Abstract: An array process diagnosis test structure for an integrated circuit including a transistor array composed of vertical FET memory cell access transistors, which are formed into the depth of a substrate in the form of active webs which run parallel in the lateral direction of the circuit is disclosed. Memory cell storage capacitors in the array test structure are formed in deep trenches on the end faces of those sections of the active webs which form the vertical FET transistors. Word lines are arranged along the webs and along parallel intersecting bit lines of the array, outside of which, and on two mutually opposite edges, are located a first and second word line comb. The wordline combs are offset and connected alternately to different word lines. In addition, a first and a second bit line comb are formed on the two other opposing edges of the transistor array mutually offset and each connected to different bit lines.

Abstract: A DRAM memory unit contains a memory bit (mbit) transistor and a capacitive region for storing charge. The memory is configured to store data as a charge stored by the capacitive region. Each memory unit is accessed by an associated wordline and the data stored by the memory unit is read from an associated bitline connected to the memory unit. The memory units are connected to the associated wordline via a wordline contact and connected to the associated bitline via a bitline contact. The memory units are arranged in memory unit clusters that include multiple memory units having a common bitline contact. The wordline contact is configured to provide for orientation of the wordlines in the memory array independent of the orientation of the bitlines. The wordline contact is also configured to provide for at least one wordline layer separated from the memory unit by a height of the wordline contact.

Abstract: Embodiments include semiconductor devices and methods of manufacture, one of which includes a capacitor unit formed on a silicon substrate. The capacitor unit is divided into a plurality of capacitor subunits which are partitioned from each other by a separating insulation layer. Each of the capacitor subunits includes a first electrode layer composed of an impurity diffusion layer formed in the silicon substrate, a second electrode layer composed of a conductive polysilicon layer and a dielectric layer composed of a silicon oxide layer interposed between the first electrode layer and the second electrode layer. The respective capacitor subunits are connected in parallel to each other through a connector.

Abstract: An integrated circuit memory device is formed by forming an interlevel insulating layer on a substrate. A plurality of storage node contact holes are formed in the interlayer insulating layer and are arranged in a pattern. A plurality of contact plugs are formed in the plurality of storage node contact holes, respectively. A material layer is formed on the interlevel insulating layer that has a plurality of landing pad holes that expose the plurality of contact plugs, respectively, the plurality of landing pad holes are arranged in a pattern that is offset with respect to the pattern of the storage node contact holes. A plurality of landing pads are formed in the plurality of landing pad holes and are connected to the plurality of contact plugs, respectively. A plurality of storage nodes are formed that are connected to the plurality of landing pads, respectively.

Abstract: Concave portions and convex portions are formed on an insulating layer. First bit lines are arranged on the convex portions. A width of the first bit lines is set to L, and a space between the first bit lines is set to L+2S. Each of the first bit lines is electrically connected to a drain diffusion layer by a contact plug. Second bit lines are arranged in a trench between the first bit lines. A width of the second bit lines is set to L, and a space between the first and second bit lines is equal to a width S of a side wall. Each of the second bit lines is electrically connected to a drain diffusion layer by a contact plug.

Abstract: A new processing sequence is provided for the creation of a metal gate electrode. At least two polysilicon gate electrodes are provided over the surface of a substrate, these polysilicon gate electrodes having a relatively thick layer of gate dielectric making these polysilicon gate electrodes suitable for high-voltage applications. The two polysilicon gate electrodes are divided into a first and a second gate electrode, both gate electrodes are imbedded in a layer of Intra Metal Dielectric (IMD). The first gate electrode is removed by applying a lift-off process to this first gate electrode, creating an opening in the layer of IMD. The second gate structure is shielded by a photoresist mask during the removal of the first gate electrode. A metal gate electrode is created in the opening created in the layer of IMD, using a thin layer of gate dielectric.

Abstract: A memory cell includes a bit line contact feature that is characterized by a contact hole bounded by insulating side walls including first and second pairs of opposing insulating side walls. The first pair of opposing insulating side walls comprises respective layers of insulating spacer material formed over a conductive line. The second pair of opposing insulating side walls comprises respective layers of insulating material formed between respective contact holes. The contact hole is filled to an uppermost extent of the insulating side walls with a conductively doped polysilicon plug defining a substantially convex upper plug surface profile. The contact hole may define either a bitline contact or a storage node contact.

Abstract: The present invention prevents production of residue which causes short-circuit between word lines. A memory cell comprises a channel formation region CH, charge storage films CSF each comprised of a plurality of stacked dielectric films, two storages comprised of regions of the charge storage films CSF overlapping the two ends of the channel formation region CH, a single-layer dielectric film DF2 contacting the channel formation region CH between the storages, auxiliary layers (for example, bit lines BL1 and BL2) formed on two impurity regions S/D, two first control electrodes CG1 and CG2 formed on the auxiliary layers with dielectric film interposed and positioned on the storages, and a second control electrode WL buried in a state insulated from the first control electrodes CG1 and CG2 in a space between them and contacting the single-layer dielectric film DF2.

Abstract: A semiconductor device and a method for preparing the same that can solve crack of a semiconductor film, capacitance electrodes and the like due to stress when forming a source electrode and a drain electrode in a semiconductor device having a thin film transistor and a holding capacitance with three or more capacitance electrodes is provided. Before forming the source electrode and the drain electrode, a crystalline silicon film for relaxing the stress is formed, then a contact hole connecting to the semiconductor film of the thin film transistor is opened, and a metal film to be the source electrode and the drain electrode is formed.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: A circuit structure has at least two etching trenches disposed at sidewalls of a silicon block left behind during the etching of the structure. The etching trenches are disposed at angles with respect to one another that are prescribed by the form of the silicon block left behind. Semiconductor layer structures which can interact with one another diagonally across are in each case accommodated in the etching trenches. In this case, the function of the entire circuit structure results from the interaction of the layer structures disposed in the various etching trenches.

Abstract: A microelectronic contact structure, e.g., a contact structure for a capacitor electrode of a DRAM, comprises a first dielectric layer on a substrate, a conductive region disposed on a first dielectric layer, a second dielectric layer on the first dielectric layer and contacting the conductive region at a sidewall of the conductive region, and an etch-stopping dielectric region disposed on the conductive region and having a sidewall in contact with the second dielectric layer. The etch-stopping dielectric region extends laterally beyond the sidewall of the conductive region and has an etching selectivity with respect to the second dielectric layer. A third dielectric layer is disposed on the second dielectric layer and etch-stopping dielectric region. A conductive plug extends through the third dielectric layer and along the sidewall of the etch-stopping dielectric region.

Abstract: A multi-layer electrode (246) and method of fabrication thereof in which a conductive region (244) is separated from a barrier layer (222) by a first conductive liner (240) and a second conductive liner (242). First conductive layer (240) comprises Pt, and second conductive liner (242) comprises a thin layer of conductive oxide. The multi-layer electrode (246) prevents oxygen diffusion through the top conductive region (244) and reduces material variation during electrode patterning.

Abstract: A semiconductor device includes: a digital circuit including a first capacitive element of metal-insulator-metal structure, and an analogue circuit including a second capacitive element of metal-insulator-metal structure. Bottom electrodes, capacitive insulation layers, and top electrodes of the first and second capacitive elements are formed in the same or common processes to each other. The bottom electrodes are electrically connected with contacts in an underlying inter-layer insulator. The top electrodes are electrically connected with other contacts in an overlying inter-layer insulator.

Abstract: A memory cell in a DRAM, which is a semiconductor memory device, is provided with a bit line 21a connected to a bit line plug 20b and a local interconnect 21b, over a first interlevel insulating film 18. A conductor sidewall 40 of TiAlN is formed on side faces of hard mask 37, upper barrier metal 36, Pt film 35 and BST film 34. No contact hole is provided on the Pt film 35 constituting an upper electrode 35a. The upper electrode 35a is connected to an upper interconnect (a Cu interconnect 42) via the conductor sidewall 40, dummy lower electrode 33b, dummy cell plug 30 and local interconnect 21b. The Pt film 35 is not exposed to a reducing atmosphere, and therefore deterioration in characteristics of the capacitive insulating film 34a can be prevented.

Abstract: A decoder for a memory device is provided. The decoder array includes a number of address lines and a number of output lines. The address lines and the output lines form an array. A number of vertical transistors are selectively disposed at intersections of output lines and address lines. Each transistor is formed in at least one pillar of semiconductor material that extends outwardly from a working surface of a substrate. The vertical transistors each include source, drain, and body regions. A gate is also formed along at least one side of the at least one pillar and is coupled to one of the number of address lines. The transistors in the array implement a logic function that selects an output line responsive to an address provided to the address lines.

Abstract: A self-aligned lateral-transistor DRAM cell structure is disclosed by the present invention, in which a trench structure comprises a trench region and a trench-isolation region being formed in a side portion of the trench region and a self-aligned lateral-transistor structure comprises a merged common-source diffusion region, a self-aligned gate-stack region, and a self-aligned common-drain diffusion region being formed in another side portion of the trench region by using spacer-formation techniques. The unit cell size of the self-aligned lateral-transistor DRAM cell structure can be fabricated to be equal to 6 F2 or smaller. The self-aligned lateral-transistor DRAM cell structure is used to implement two contactless DRAM arrays for high-speed read and write operations.

Abstract: The invention provides a semiconductor memory device having a trench part serving as an isolation area formed on semiconductor substrate, control gate used for controlling write-operation and read-operation formed orthogonally to the trench part, a source line of a first diffused layer formed on the surface of the trench part along one of the longitudinal sides of the control gate, and on the semiconductor substrate between the neighboring trench parts, silicide layer formed over the surface of the source line, and a drain of a second diffused layer formed between the trench parts in the other of the longitudinal sides.

Abstract: In a semiconductor memory including a dynamic random access memory, a memory cell of the dynamic random access memory includes: a semiconductor pillar (a silicon pillar); a capacitor in which one side of the silicon pillar is used as a charge accumulation electrode; and a longitudinal insulated gate static induction transistor in which the other side of the silicon pillar is used as an active region (a source region, a channel formation region and a drain region), and a bit line is connected to the silicon pillar.

Abstract: In one implementation, integrated circuitry includes a first capacitor electrode layer received over a substrate. A capacitor dielectric layer is received over the first capacitor electrode layer. The capacitor dielectric layer has an edge terminus. A second capacitor electrode layer is received over the capacitor dielectric layer. The first capacitor electrode layer and the second capacitor electrode layer, respectively, have opposing lateral edges. The capacitor dielectric layer edge terminus is laterally coincident with at least a portion of one of the opposing lateral edges of the second capacitor electrode layer. An insulative silicon nitride including cap is received over the capacitor dielectric layer edge terminus and the one opposing lateral edge of the second capacitor electrode layer. The cap does not contact any portion of the opposing lateral edges of the first capacitor electrode layer. Other aspects and implementations are disclosed.

Abstract: In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.

Abstract: The present invention relates to the field of semiconductor integrated circuits and, in particular, to capacitor arrays formed over the bit line of an integrated circuit substrate. The present invention provides a method for forming stacked capacitors, in which a plurality of patterned capacitor outlines, or walls, are formed over the bit line of a semiconductor device. In one aspect of the invention, spacers are formed on the patterned capacitor outlines and become part of the cell poly after being covered with cell nitride. In another aspect, the spacers are formed of a material capable of being etched back, such as titanium nitride. In another aspect, a metal layer is patterned and annealed to a polysilicon layer to form a mask for a capacitor array, and subsequently etched to form the array.

Abstract: A high integration dynamic random access memory is provided by this invention. Furthermore, a write method is provided such that the cell size of two-and three-transistor gain cell memories is reduced. A dynamic memory incorporating a thin-channel transistor as the write element such that long data storage retention is achieved in the memory devices of this invention. A dynamic memory cell having low operating power and high density is also realized by this invention.

Abstract: A contact plug 26 formed between adjacent two wirings 14 according to a self-aligning manner is provided. An interlayer oxide film 12 is provided on a substrate layer 10 conductive to the bottom face of the contact plug. A lower insulating film 32 formed of a nitride based insulating film is provided so as to cover the entire surface of the interlayer oxide film 12 except for the contact hole portion. A wiring 12, an upper insulating film 16 formed of a nitride based insulating film, and sidewalls 18 formed of a nitride based insulating film are provided over the lower insulating film 32. The contact hole has a diameter larger than the interval defined between the wirings 14 in the same layer as the interlayer oxide film 12.

Abstract: A memory cell having a bit line contact is provided. The memory cell may be a 6F2 memory cell. The bit line contact may have a contact hole bounded by insulating sidewalls, and the contact hole may be partially or completely filled with a doped polysilicon plug. The doped polysilicon plug may have an upper plug surface profile that is substantially free of concavities or substantially convex. Similarly, a storage node contact may comprise a doped polysilicon plug having an upper plug surface profile that is substantially free of concavities or that is substantially convex. Additionally, a semiconductor device having a conductive contact comprising a polysilicon plug may is provided. The plug may contact a capacitor structure.

Abstract: A DRAM of an open bit line structure has a cell area smaller than that of a DRAM of a folded bit line structure and is susceptible to noise. A conventional DRAM of an open bit line structure has a large bit line capacitance and is susceptible to noise or has a large cell area. There has been no DRAM of an open bit line structure having a small bit line capacitance, unsusceptible to noise and having a small cell area. The present invention forms capacitor lower electrode plug holes not aligned with bit lines to reduce bit line capacitance. Bit lines are formed in a small width, capacitor lower electrode plugs are dislocated from positions corresponding to the centers of the bit lines in directions away from the bit lines and the contacts are formed in a reduced diameter to avoid increasing the cell area. Thus a semiconductor storage device of an open bit line structure resistant to noise and having a small cell area is provided.

Abstract: A structure and a manufacture method of a DRAM device with deep trench capacitors are described. Each capacitor has a collar oxide layer with different height for electrical isolation and leakage reduction. Further, the DRAM device has strip-type active areas to improve some optical errors and thus reduce sufficiently the contact resistance of a buried strap film of a capacitor.

Abstract: New organic light-emitting diodes and related electroluminescent devices and methods for fabrication, using siloxane self-assembly techniques.

Abstract: In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.

Abstract: A semiconductor nonvolatile memory device improving reproducibility and reliability of insulation breakage of a silicon oxide film and capable of reducing the manufacturing cost and a method for production of the same, wherein each of the memory cells arranged in a matrix form has an insulating film breakage type fuse comprising an impurity region of a first conductivity type formed on a semiconductor substrate, a first insulating film formed on the semiconductor substrate while covering the impurity region, an opening formed in the first insulating film so as to reach the impurity region, and a first semiconductor layer of a first conductivity type, a second insulating film, and a second semiconductor layer of a second conductivity type successively stacked in the opening from the impurity region side, or has an insulating film breakage type fuse comprising an impurity region of a first conductivity type in the first semiconductor layer having an SOI structure, a first insulating film on the SOI layer, an op

Abstract: According to one aspect of the present invention, a semiconductor memory device has: a semiconductor layer formed on an insulating film; and a memory cell array including a matrix arrangement of a plurality of memory cells each made up of first and second transistors connected in series, one side of each memory cell being connected to a bit line and the other side of each memory cell being supplied with a reference potential, and according to another aspect of the present invention, a semiconductor memory device manufacturing method includes: forming an oxide layer and a silicon active layer on a semiconductor substrate; forming an element isolation region for separating said silicon active layer into discrete element-forming regions to be substantially flush with said silicon active layer; forming gate electrode of paired two transistors by depositing a gate electrode material on said silicon active layer and patterning it; injecting predetermined ions into a region for forming a diffusion layer in, using sa

Abstract: A word line and a cell plate electrode line are formed at a common interconnection layer. A redundant replacement unit for a faulty row is set corresponding to the cell plate electrode line. For each redundant replacement unit, a program element is arranged for stopping supply of a cell plate voltage from the cell plate voltage line to the cell plate electrode line. The program element corresponding to the cell plate electrode line short-circuited to the word line nonvolatilely changes from the on state to the off state in response to an externally supplied input instruction.

Abstract: In a cell array region of a NOR-type mask ROM device and a fabricating method therefor, following formation of a plurality of word lines parallel to one another on a semiconductor substrate, a plurality of sub-bit lines intersecting the top portion of the plurality of word lines at right angles are formed. Trench regions are formed on the semiconductor substrate exposed by the plurality of word lines and the plurality of sub-bit lines. An interlayer insulating layer is formed on the entire surface of the resulting material, and a plurality of bit lines which are parallel to one another are formed on the interlayer insulating layer.

Abstract: A capacitor structure, especially for use in deep sub-micron CMOS, having an array of electrically conductive pillars which form the plates of the capacitor. Each of the pillars is formed by electrically conductive lines segments from at least two different conductor levels electrically connected by an electrically conductive via. Dielectric material is disposed between the two conductor levels and the pillars of the array. The pillars are electrically connected to opposing nodes in an alternating manner so that the pillars are electrically interdigitated.

Abstract: A 16 megabit (224) or greater density single deposition layer metal Dynamic Random Access Memory (DRAM) part is described which allows for a die that fits within an industry-standard 300 ml wide SOJ (Small Outline J-wing) package or a TSOP (Thin, Small Outline Package) with little or no speed loss over previous double metal deposition layered 16 megabit DRAM designs. This is accomplished using a die architecture which allows for a single metal layer signal path, together with the novel use of a lead frame to remove a substantial portion of the power busing from the die, allowing for a smaller, speed-optimized DRAM. The use of a single deposition layer metal results in lower production costs, and shorter production time.

Abstract: There is a bi-level bit line architecture. Specifically, there is a DRAM memory cell and cell array that allows for six square feature area (6F2) cell sizes and avoids the signal to noise problems. Uniquely, the digit lines are designed to lie on top of each other like a double decker overpass road. Additionally, this design allows each digit line to be routed on both conductor layers, for equal lengths of the array, to provide balanced impedance. Now noise will appear as a common mode noise on both lines, and not as differential mode noise that would degrade the sensing operation. Furthermore, digit to digit coupling is nearly eliminated because of the twist design.

Abstract: A test signal generating circuit generates internal test control signals from a small number of signals supplied via an address terminal in a test mode operation. According to the test control signals, the values of internal row address signal bits from an address buffer are set, while a row-related control circuit with test control function controls operations of a row selection circuit and bit line peripheral circuitry according to the test control signals. A plurality of word lines are driven simultaneously into a selected state and an acceleration test is performed according to a small number of control signals in a short period of time. Voltage stress applied between memory cell capacitors and between word lines can be accelerated with a small number of control signals.

Abstract: An integrated semiconductor chip has at least two metal interconnects of two different metallization planes, which are disposed parallel to one another. The metal interconnects are connected to one another via at least one electrically conductive contact point. The metal interconnects, for each direction, run orthogonally with respect to one another in a first region. For each direction, they run parallel to one another and at an oblique angle to the directions of the metal interconnects of the first region in a second region (20), in which they are contact-connected to one another. This configuration makes it possible, with little influence of electromigration, to have a comparatively small space requirement needed for the contact connection of mutually orthogonal interconnects.

Abstract: A T-RAM array having a plurality of T-RAM cells is presented where each T-RAM cell has dual devices. Each T-RAM cell is planar and has a buried vertical thyristor and a horizontally stacked pseudo-TFT transfer gate. The buried vertical thyristor is located beneath the horizontally stacked pseudo-TFT transfer gate. A method is also presented for fabricating the T-RAM array having the buried vertical thyristors, the horizontally stacked pseudo-TFT transfer gates and the planar cell structure.

Abstract: On a semiconductor substrate surface, a drain diffusion layer, which is in common to two transistors that make up a memory cell pair, is formed and source diffusion layers, for each of the transistors, respectively, are formed so as to sandwich the drain diffusion layer from both sides, a bit line is formed from a lower wiring layer and is connected to the drain diffusion layer, a source line is formed from the uppermost wiring layer, and the writing of information is performed by making a contact hole exist or non-existent immediately below the source line arranged from the uppermost wiring layer, in other words, by connection or non-connection of the source diffusion layer with the source line. By this arrangement, the TAT can be shortened and, since the capacitance of the bit line is not increased, high-speed operation with a short precharge time and discharge time for the bit line can be realized and the consumption power can be lessened.

Abstract: A semiconductor device adopting an interlayer contact structure between upper and lower conductive layers and a method of manufacturing the semiconductor device adopting the structure are provided. The lower conductive layer includes a first conductive layer and a first silicide layer stacked together. The upper conductive layer includes a second conductive layer doped with impurities and a second silicide layer stacked together. In the interlayer contact structure, the first and second conductive layers are in direct contact with each other. This decreases the contact resistance between the two conductive layers and improves the electrical properties of the device.

Abstract: In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.

Abstract: A trench MOSFET includes a plurality of trench segments in an upper surface of an epitaxial layer, extending through a second conductivity type region into a first conductivity type epitaxial region, each segment at least partially separated from an adjacent segment by a terminating region, and the trench segments defining a plurality of polygonal body regions within the second conductivity type region. A first insulating layer at least partially lines each trench and a plurality of first conductive regions are provided within the trench segments adjacent to the first layer. Each of the conductive regions is connected to an adjacent conductive region by a connecting conductive region, overlying the terminating region, that bridges at least one of the terminating regions, and a plurality of first conductivity source regions are within upper portions of polygonal body regions and adjacent the trench segments, the source regions positioned outside the terminating regions.

Abstract: An apparatus and method of operating an open digit line and a folded digit line DRAM memory array having a plurality of memory cells wherein, in a plan view, each memory cell, in one embodiment, has an area of 6F2. One method comprises, storing a first bit in a first memory cell and storing a second bit that is complementary to the first bit in a second memory cell. The first bit and the second bit form a data bit. The data bit is read by comparing a voltage difference between the first memory cell and the second memory cell.

Abstract: A structure of memory device with thin film transistor is proposed. The structure of the memory device includes a substrate. The substrate has shallow trench isolation structures, a thin film transistor, a memory cell transistor, a memory peripheral transistor, and logic circuit transistor. The shallow trench isolation structures are located in the memory cell region, the logic circuit region, and also on the memory peripheral region to isolate the memory peripheral region from the memory cell region and the logic circuit region. The thin film transistor with a thin film substrate is located above the shallow trench isolation structure at the logic circuit region. A method for fabricating the memory device with thin film transistor is also proposed, where a thin film conductive layer is formed over the substrate at the logic circuit region to serve as the thin film transistor substrate.

Abstract: There is a bi-level bit line architecture. Specifically, there is a DRAM memory cell and cell array that allows for six square feature area (6F2) cell sizes and avoids the signal to noise problems. Uniquely, the digit lines are designed to lie on top of each other like a double decker overpass road. Additionally, this design allows each digit line to be routed on both conductor layers, for equal lengths of the array, to provide balanced impedance. Now noise will appear as a common mode noise on both lines, and not as differential mode noise that would degrade the sensing operation. Furthermore, digit to digit coupling is nearly eliminated because of the twist design.

Abstract: A folded bit line DRAM device is provided. The folded bit line DRAM device includes an array of memory cells. Each memory cell in the array of memory cells includes a pillar extending outwardly from a semiconductor substrate. Each pillar includes a single crystalline first contact layer and a single crystalline second contact layer separated by an oxide layer. A single crystalline vertical transistor is formed along alternating sides of the pillar within a row of pillars. The single crystalline vertical transistor includes an ultra thin single crystalline vertical first source/drain region coupled to the first contact layer, an ultra thin single crystalline vertical second source/drain region coupled to the second contact layer, and an ultra thin single crystalline vertical body region which opposes the oxide layer and couples the first and the second source/drain regions.

Abstract: A dual work function semiconductor structure with borderless contact and method of fabricating the same are presented. The structure may include a field effect transistor (FET) having a substantially cap-free gate and a conductive contact to a diffusion adjacent to the cap-free gate, wherein the conductive contact is borderless to the gate. Because the structure is a dual work function structure, the conductive contact is allowed to extend over the cap-free gate without being electrically connected thereto.

Abstract: In one aspect, the invention provides a method of forming an integrated circuitry memory device. In one preferred implementation, a conductive layer is formed over both memory array areas and peripheral circuitry areas. A refractory metal layer is formed over the conductive layer to provide conductive structure in both areas. According to a preferred aspect of this implementation, the conductive layer which is formed over the memory array provides an electrical contact for a capacitor container to be formed. According to another preferred aspect of this implementation, the conductive layer formed over the peripheral circuitry area constitutes a conductive line which includes at least some of the silicide. In another preferred implementation, the invention provides a method of forming a capacitor container over a substrate. According to a preferred aspect of this implementation, a conductive layer is elevationally interposed between an upper insulating layer and a lower conductive layer over the substrate.

Abstract: A semiconductor device having a structure in which the potential of a gate interconnection is not affected by that of a bit line when a dummy pad contact is formed at an end portion of a memory cell, and a method of manufacturing a semiconductor device in which no steps are formed in the vicinity of a memory cell end are obtained. The semiconductor device includes dummy pad contacts arranged in a dotted line, which are smaller than a first pad contact in the memory cell body and are opened using a self-alignment method, and a conduction is cut-off in a path leading from the dummy pad contact to the bit line.