For Hall-effect Devices (epo) Patents (Class 257/E43.007)
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Patent number: 10319687Abstract: A soluble sensor is provided. The soluble sensor includes a soluble handle substrate and a layer of semiconductor material that is disposed on the soluble handle substrate. The layer of semiconductor material includes a plurality of semiconductor devices interconnected to perform a sensing function.Type: GrantFiled: March 12, 2018Date of Patent: June 11, 2019Assignee: Honeywell International Inc.Inventor: Steven Tin
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Patent number: 8987703Abstract: An apparatus includes a substrate, a sequence of crystalline semiconductor layers on a planar surface of the substrate, and first and second sets of electrodes over the sequence. The sequence has a 2D quantum well therein. The first set of electrodes border opposite sides of a lateral region of the sequence and are controllable to vary a width of a non-depleted portion of the quantum well along the top surface. The second set of electrodes border channels between the lateral region and first and second adjacent lateral areas of the sequence and are controllable to vary widths of non-depleted segments of the quantum well in the channels. The electrodes are such that straight lines connecting the lateral areas via the channels either pass between one of the electrodes and the substrate or are misaligned to an effective [1 1 0] lattice direction of the sequence.Type: GrantFiled: January 12, 2012Date of Patent: March 24, 2015Assignee: Alcatel LucentInventor: Robert L. Willett
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Patent number: 8766384Abstract: A method of forming a magnetic tunnel junction device is disclosed that includes forming a trench in a substrate, the trench including a plurality of sidewalls and a bottom wall. The method includes depositing a first conductive material within the trench proximate to one of the sidewalls and depositing a second conductive material within the trench. The method further includes depositing a material to form a magnetic tunnel junction (MTJ) structure within the trench. The MTJ structure includes a fixed magnetic layer having a magnetic field with a fixed magnetic orientation, a tunnel junction layer, and a free magnetic layer having a magnetic field with a configurable magnetic orientation. The method further includes selectively removing a portion of the MTJ structure to create an opening in the MTJ structure.Type: GrantFiled: October 30, 2012Date of Patent: July 1, 2014Assignee: QUALCOMM IncorporatedInventor: Xia Li
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Patent number: 8736003Abstract: A Hall effect transducer in a semiconductor wafer comprises a first layer of semiconducting material, a second layer of semiconducting material, and a contact structure configured to provide a path for electrical current to pass through the second layer. The second layer has higher electron hole mobility than the first layer, and is epitaxially grown atop the first layer.Type: GrantFiled: December 18, 2009Date of Patent: May 27, 2014Assignee: Allegro Microsystems, LLCInventors: David Erie, Noel Hoilien, Steven Kosier
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Patent number: 8680592Abstract: A method of forming a magnetic tunnel junction device is disclosed that includes forming a trench in a substrate, the trench including a first sidewall, a second sidewall, a third sidewall, a fourth sidewall, and a bottom wall. The method includes depositing a first conductive material within the trench proximate to the first sidewall and depositing a second conductive material within the trench. The method further includes depositing a magnetic tunnel junction (MTJ) structure within the trench. The MTJ structure includes a fixed magnetic layer having a magnetic field with a fixed magnetic orientation, a tunnel junction layer, and a free magnetic layer having a magnetic field with a configurable magnetic orientation. The method further includes selectively removing a portion of the MTJ structure that is adjacent to the fourth sidewall to create an opening such that the MTJ structure is substantially u-shaped.Type: GrantFiled: May 14, 2010Date of Patent: March 25, 2014Assignee: QUALCOMM IncorporatedInventor: Xia Li
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Publication number: 20130307609Abstract: Embodiments of the present invention provide a Hall effect device that includes a Hall effect region of a first semiconductive type, at least three contacts and a lateral conductive structure. The Hall effect region is formed in or on top of a substrate, wherein the substrate includes an isolation arrangement to isolate the Hall effect region in a lateral direction and in a depth direction from the substrate or other electronic devices in the substrate. The at least three contacts are arranged at a top of the Hall effect region to supply the Hall effect device with electric energy and to provide a Hall effect signal indicative of the magnetic field, wherein the Hall effect signal is generated in a portion of the Hall effect region defined by the at least three contacts. The lateral conductive structure is located between the Hall effect region and the isolation arrangement.Type: ApplicationFiled: May 15, 2012Publication date: November 21, 2013Applicant: Infineon Technologies AGInventor: Udo Ausserlechner
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Patent number: 8564083Abstract: The invention relates to a vertical Hall sensor integrated in a semiconductor chip and a method for the production thereof. The vertical Hall sensor has an electrically conductive well of a first conductivity type, which is embedded in an electrically conductive region of a second conductivity type. The electrical contacts are arranged along a straight line on a planar surface of the electrically conductive well. The electrically conductive well is generated by means of high-energy ion implantation and subsequent heating, so that it has a doping profile which either has a maximum which is located at a depth T1 from the planar surface of the electrically conductive well, or is essentially constant up to a depth T2.Type: GrantFiled: March 15, 2012Date of Patent: October 22, 2013Assignees: Melexis Technologies NV, X-Fab Semiconductor Foundries AGInventors: Christian Schott, Peter Hofmann
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Patent number: 8466526Abstract: A Hall sensor has a P-type semiconductor substrate and a Hall sensing portion having a square shape and an N-type conductivity disposed on a surface of the semiconductor substrate. The Hall sensor includes Hall voltage output terminals having the same shape with each other, and control current input terminals having the same shape with each other. The Hall voltage output terminals are disposed at respective ones of four vertices of the Hall sensing portion. The control current input terminals include pairs of control current input terminals disposed at respective ones of the four vertices of the Hall sensing portion and arranged on both sides of respective ones of the Hall voltage output terminals in spaced apart relation from the Hall voltage output terminals so as to prevent electrical connection between the control current input terminals and the Hall voltage output terminals.Type: GrantFiled: June 30, 2011Date of Patent: June 18, 2013Assignee: Seiko Instruments Inc.Inventors: Takaaki Hioka, Toshihiko Omi
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Patent number: 8426936Abstract: Through a main surface (10) of a semiconductor substrate (1) of a first type of conductivity, a doped well of a second type of conductivity is implanted to form a sensor region (3) extending perpendicularly to the main surface. The sensor region can be confined laterally by trenches (5) comprising an electrically insulating trench filling (6). The bottom of the sensor region is insulated by a pn-junction (20). Contacts (4) are applied to the main surface and provided for the application of an operation voltage and the measurement of a Hall voltage.Type: GrantFiled: March 24, 2010Date of Patent: April 23, 2013Assignee: austriamicrosystems AGInventors: Rainer Minixhofer, Sara Carniello, Volker Peters
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Publication number: 20120241887Abstract: The invention relates to a vertical Hall sensor integrated in a semiconductor chip and a method for the production thereof. The vertical Hall sensor has an electrically conductive well of a first conductivity type, which is embedded in an electrically conductive region of a second conductivity type. The electrical contacts are arranged along a straight line on a planar surface of the electrically conductive well. The electrically conductive well is generated by means of high-energy ion implantation and subsequent heating, so that it has a doping profile which either has a maximum which is located at a depth T1 from the planar surface of the electrically conductive well, or is essentially constant up to a depth T2.Type: ApplicationFiled: March 15, 2012Publication date: September 27, 2012Applicants: X-FAB SEMICONDUCTOR FOUNDRIES AG, MELEXIS TECHNOLOGIES NVInventors: Christian Schott, Peter Hofmann
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Publication number: 20120119735Abstract: Embodiments relate to xMR sensors having very high shape anisotropy. Embodiments also relate to novel structuring processes of xMR stacks to achieve very high shape anisotropies without chemically affecting the performance relevant magnetic field sensitive layer system while also providing comparatively uniform structure widths over a wafer, down to about 100 nm in embodiments. Embodiments can also provide xMR stacks having side walls of the performance relevant free layer system that are smooth and/or of a defined lateral geometry which is important for achieving a homogeneous magnetic behavior over the wafer.Type: ApplicationFiled: November 15, 2010Publication date: May 17, 2012Inventors: Juergen Zimmer, Klemens Pruegl, Olaf Kuehn, Andreas Strasser, Ralf-Rainer Schledz, Norbert Thyssen
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Publication number: 20110204460Abstract: An integrated circuit and a method of making the integrated circuit provide a Hall effect element having a germanium Hall plate. The germanium Hall plate provides an increased electron mobility compared with silicon, and therefore, a more sensitive Hall effect element.Type: ApplicationFiled: February 19, 2010Publication date: August 25, 2011Applicant: Allegro Microsystems, Inc.Inventors: Harianto Wong, William P. Taylor, Ravi Vig
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Publication number: 20110147865Abstract: A Hall effect transducer in a semiconductor wafer comprises a first layer of semiconducting material, a second layer of semiconducting material, and a contact structure configured to provide a path for electrical current to pass through the second layer. The second layer has higher electron hole mobility than the first layer, and is epitaxially grown atop the first layer.Type: ApplicationFiled: December 18, 2009Publication date: June 23, 2011Applicant: POLAR SEMICONDUCTOR, INC.Inventors: David Erie, Noel Hoilien, Steven Kosier
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Patent number: 7960714Abstract: An apparatus includes a substrate with a planar surface, a multilayer of semiconductor layers located on the planar surface, a plurality of electrodes located over the multilayer, and a dielectric layer located between the electrodes and the multilayer. The multilayer includes a 2D quantum well. A first set of the electrodes is located to substantially surround a lateral area of the 2D quantum well. A second set of the electrodes is controllable to vary a lateral width of a non-depleted channel between the substantially surrounded lateral area of the 2D quantum well and another area of the 2D quantum well. A third set of the electrodes is controllable to vary an area of a non-depleted portion of the lateral area.Type: GrantFiled: December 23, 2008Date of Patent: June 14, 2011Assignee: Alcatel-Lucent USA Inc.Inventors: Kirk William Baldwin, Loren N. Pfeiffer, Kenneth William West, Robert L Willett
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Patent number: 7948042Abstract: A multi-level lithography processes for the fabrication of suspended structures are presented. The process is based on the differential exposure and developing conditions of several a plurality of resist layers, without harsher processes, such as etching of sacrificial layers or the use of hardmasks. These manufacturing processes are readily suited for use with systems that are chemically and/or mechanically sensitive, such as graphene. Graphene p-n-p junctions with suspended top gates formed through these processes exhibit high mobility and control of local doping density and type. This fabrication technique may be further extended to fabricate other types of suspended structures, such as local current carrying wires for inducing local magnetic fields, a point contact for local injection of current, and moving parts in microelectromechanical devices.Type: GrantFiled: March 3, 2009Date of Patent: May 24, 2011Assignee: The Regents of the University of CaliforniaInventors: Chun Ning Lau, Gang Liu, Jairo Velasco, Jr.
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Patent number: 7936029Abstract: A Hall effect element includes a Hall plate with an outer perimeter. The outer perimeter includes four corner regions, each tangential to two sides of a square outer boundary associated with the Hall plate, and each extending along two sides of the square outer boundary by a corner extent. The outer perimeter also includes four indented regions. Each one of the four indented regions deviates inward toward a center of the Hall plate. The Hall plate further includes a square core region centered with and smaller than the square outer boundary. A portion of each one of the four indented regions is tangential to a respective side of the square core region. Each side of the square core region has a length greater than twice the corner extent and less than a length of each side of the square outer boundary.Type: GrantFiled: February 19, 2009Date of Patent: May 3, 2011Assignee: Allegro Microsystems, Inc.Inventor: Yigong Wang
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Publication number: 20100252900Abstract: Through a main surface (10) of a semiconductor substrate (1) of a first type of conductivity, a doped well of a second type of conductivity is implanted to form a sensor region (3) extending perpendicularly to the main surface. The sensor region can be confined laterally by trenches (5) comprising an electrically insulating trench filling (6). The bottom of the sensor region is insulated by a pn-junction (20). Contacts (4) are applied to the main surface and provided for the application of an operation voltage and the measurement of a Hall voltage.Type: ApplicationFiled: March 24, 2010Publication date: October 7, 2010Applicant: austriamicrosystems AGInventors: Rainer MINIXHOFER, Sara Carniello, Volker Peters
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Patent number: 7782050Abstract: A semiconductor device including a Hall effect sensor and related method. The Hall effect device includes a substrate having a first conductivity type and an epitaxial layer having a second conductivity type defining a Hall effect portion. A conductive buried layer having the second conductivity type is situated between the epitaxial layer and the substrate. First and second output terminals and first and second voltage terminals are provided, with the second voltage terminal being coupled to the conductive buried layer.Type: GrantFiled: April 11, 2008Date of Patent: August 24, 2010Assignee: Infineon Technologies AGInventors: Udo Ausserlechner, Mario Motz
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Patent number: 7394092Abstract: A quantum computer can only function stably if it can execute gates with extreme accuracy. “Topological protection” is a road to such accuracies. Quasi-particle interferometry is a tool for constructing topologically protected gates. Assuming the corrections of the Moore-Read Model for ?=5/2's FQHE (Nucl. Phys. B 360, 362 (1991)) we show how to manipulate the collective state of two e/4-charge anti-dots in order to switch said collective state from one carrying trivial SU(2) charge, |1>, to one carrying a fermionic SU(2) charge |?>. This is a NOT gate on the {|1>, |?>} qubit and is effected by braiding of an electrically charged quasi particle a which carries an additional SU(2)-charge. Read-out is accomplished by ?-particle interferometry.Type: GrantFiled: October 6, 2006Date of Patent: July 1, 2008Assignee: Microsoft CorporationInventors: Michael H. Freedman, Chetan V. Navak, Sankar Das Sarma
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Publication number: 20080135959Abstract: The invention relates to a semiconductor component (100) comprising a semiconductor chip (10) configured as a wafer level package, a magnetic field sensor (11) being integrated into said semiconductor chip.Type: ApplicationFiled: December 8, 2006Publication date: June 12, 2008Inventors: Horst Theuss, Albert Auburger