Bulk Negative Resistance Effect Devices, E.g., Gunn-effect Devices, Processes, Or Apparatus Peculiar To Manufacture Or Treatment Of Such Devices, Or Of Parts Thereof (epo) Patents (Class 257/E47.001)
  • Publication number: 20120132881
    Abstract: Some embodiments include a memory device having first structures arranged in a first direction and second structures arranged in a second direction. At least one structure among the first and second structures includes a semiconductor material. The second structures contact the first structures at contact locations. A region at each of the contact locations is configured as memory element to store information based on a resistance of the region. The structures can include nanowires. Other embodiments are described.
    Type: Application
    Filed: November 29, 2010
    Publication date: May 31, 2012
    Inventor: Jun Liu
  • Publication number: 20120126194
    Abstract: A memory cell structure and method for forming the same. The method includes forming a pore within a dielectric layer. The pore is formed over the center of an electrically conducting bottom electrode. The method includes depositing a thermally insulating layer along at least one sidewall of the pore. The thermally insulating layer isolates heat from phase change current to the volume of the pore. In one embodiment phase change material is deposited within the pore and the volume of the thermally insulating layer. In another embodiment a pore electrode is formed within the pore and the volume of the thermally insulating layer, with the phase change material being deposited above the pore electrode. The method also includes forming an electrically conducting top electrode above the phase change material.
    Type: Application
    Filed: February 1, 2012
    Publication date: May 24, 2012
    Applicant: International Business Machines Corporation
    Inventors: Matthew J. Breitwisch, Roger W. Cheek, Eric A. Joseph, Chung H. Lam, Bipin Rajendran, Alejandro G. Schrott, Yu Zhu
  • Publication number: 20120119179
    Abstract: According to one embodiment, a memory device includes a nanomaterial aggregate layer of a plurality of fine conductors aggregating via gaps and an insulating material disposed in the gaps.
    Type: Application
    Filed: January 20, 2012
    Publication date: May 17, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Shinichi Nakao, Kei Watanabe, Kazuhiko Yamamoto, Ichiro Mizushima, Yoshio Ozawa
  • Publication number: 20120119181
    Abstract: A semiconductor device includes a switching device disposed on a substrate. A buffer electrode pattern is disposed on the switching device. The buffer electrode pattern includes a first region having a first vertical thickness, and a second region having a second vertical thickness smaller than the first vertical thickness. A lower electrode pattern is disposed on the first region of the buffer electrode pattern. A trim insulating pattern is disposed on the second region of the buffer electrode pattern. A variable resistive pattern is disposed on the lower electrode pattern.
    Type: Application
    Filed: September 23, 2011
    Publication date: May 17, 2012
    Inventors: Gyu-Hwan OH, Shin-Jae Kang, Sug-Woo Jung, Dong-Hyun Im, Chan-Mi Lee
  • Publication number: 20120119180
    Abstract: Provided are a non-volatile memory device which can be extended in a stack structure and thus can be highly integrated, and a method of manufacturing the non-volatile memory device. The non-volatile memory device includes: at least one first electrode, at least one second electrode crossing the at least one first electrode, at least one data storing layer interposed between the at least one first electrode and the second electrode, at a region in which the at least one first electrode crosses the at least one second electrode and at least one metal silicide layer interposed between the at least one first electrode and the at least one second electrode, at the region in which the at least one first electrode crosses the at least one second electrode.
    Type: Application
    Filed: January 23, 2012
    Publication date: May 17, 2012
    Inventors: June-mo KOO, Suk-pil KIM, Tae-Eung YOON
  • Patent number: 8179712
    Abstract: A resistive memory cell that includes a metal-polymer bi-layer proximate a CMOS gate. The memory cell has a substrate having a source contact connected to a source line and a drain contact connected to a drain line, a CMOS gate proximate the substrate electrically connecting the source contact and the drain contact, the bi-layer adjacent the CMOS gate, the bi-layer comprising a thin metal layer and a polymer layer, and a word line connected to the bi-layer.
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: May 15, 2012
    Assignee: Seagate Technology LLC
    Inventor: Jun Zheng
  • Publication number: 20120112154
    Abstract: A method for fabricating a phase change memory device including a plurality of in via phase change memory cells includes forming pillar heaters formed of a conductive material along a contact surface of a substrate corresponding to each of an array of conductive contacts to be connected to access circuitry, forming a dielectric layer along exposed areas of the substrate surrounding the pillar heaters, forming an interlevel dielectric (ILD) layer above the dielectric layer, etching a via to the dielectric layer, each via corresponding to each of pillar heater such that an upper surface of each pillar heater is exposed within each via, recessing each pillar heater, depositing phase change material in each via on each recessed pillar heater, recessing the phase change material within each via, and forming a top electrode within the via on the phase change material.
    Type: Application
    Filed: January 16, 2012
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Matthew J. Breitwisch, Roger W. Cheek, Eric A. Joseph, Chung H. Lam, Alejandro G. Schrott
  • Patent number: 8173989
    Abstract: Provided may be a resistive random access memory (RRAM) device and methods of manufacturing and operating the same. The resistive random access memory device may include at least one first electrode, at least one second electrode spaced apart from the at least one first electrode, a first structure including a first resistance-changing layer between the at least one first and second electrodes, and a first switching element electrically connected to the first resistance-changing layer, wherein at least one of the first and second electrodes include an alloy layer having a noble metal and a base metal.
    Type: Grant
    Filed: May 8, 2008
    Date of Patent: May 8, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang-bum Lee, Young-soo Park, Xianyu Wenxu, Bo-soo Kang, Seung-eon Ahn
  • Patent number: 8173988
    Abstract: Memory cells for reduced power consumption and methods for forming the same are provided. A memory cell has a layer of phase change material. A first portion of the phase change material layer includes the programmable volume of the memory cell and its crystalline state has a higher resistivity than that of the crystalline state of a second portion of the phase change material layer.
    Type: Grant
    Filed: April 19, 2010
    Date of Patent: May 8, 2012
    Assignee: Micron Technology, Inc.
    Inventor: Jun Liu
  • Publication number: 20120104348
    Abstract: Methods for making a programmable metallization memory cell are disclosed.
    Type: Application
    Filed: January 11, 2012
    Publication date: May 3, 2012
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Haiwen Xi, Ming Sun, Dexin Wang, Shuiyuan Huang, Michael Tang, Song S. Xue
  • Publication number: 20120104353
    Abstract: A cross point memory array includes a structure in which holes are formed in an insulating layer and a storage node is formed in each of the holes. The storage node may include a memory resistor and a switching structure. The master for an imprint process used to form the cross-point memory array includes various pattern shapes, and the method of manufacturing the master uses various etching methods.
    Type: Application
    Filed: December 28, 2011
    Publication date: May 3, 2012
    Inventors: Byung-kyu LEE, Du-hyun Lee, Myoung-jae Lee
  • Publication number: 20120097915
    Abstract: There are provided a resistance variable nonvolatile memory device which changes its resistance stably at low voltages and is suitable for a miniaturized configuration, and a manufacturing method thereof. The nonvolatile memory device comprises: a substrate (100); a first electrode (101); an interlayer insulating layer (102); a memory cell hole (103) formed in the interlayer insulating layer; a first resistance variable layer (104a) formed in at least a bottom portion of the memory cell hole and connected to the first electrode; a second resistance variable layer (104b) formed inside the memory cell hole (103) and located on the first resistance variable layer (104a); and a second electrode (105); the first resistance variable layer (104a) and the second resistance variable layer (104b) respectively comprising metal oxides of the same kind; and the first resistance variable layer (104a) having a higher oxygen content than the second resistance variable layer (104b).
    Type: Application
    Filed: June 30, 2009
    Publication date: April 26, 2012
    Inventors: Takumi Mikawa, Yoshio Kawashima, Atsushi Himeno
  • Publication number: 20120098566
    Abstract: An interconnection architecture for multilayer circuits includes metal-insulator transition channels interposed between address leads and each bar in the multilayer circuit. An extrinsic variable transducer selectively transitions the metal-insulator channels between insulating and conducting states to selectively connect and disconnect the bars and the address leads. A method for accessing a programmable crosspoint device within a multilayer crossbar circuit is also provided.
    Type: Application
    Filed: October 26, 2010
    Publication date: April 26, 2012
    Inventor: Warren Robinett
  • Publication number: 20120097911
    Abstract: Phase change memory cell structures and methods are described herein. A number of methods of forming a phase change memory cell structure include forming a dielectric stack structure on a first electrode, wherein forming the dielectric stack structure includes creating a second region between a first region and a third region of the dielectric stack structure, the second region having a thermal conductivity different than a thermal conductivity of the first region and different than a thermal conductivity of the third region of the dielectric stack. One or more embodiments include forming a via through the first, second, and third regions of the dielectric stack structure, depositing a phase change material in the via, and forming a second electrode on the phase change material.
    Type: Application
    Filed: January 2, 2012
    Publication date: April 26, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Timothy A. Quick, Eugene P. Marsh, Joseph N. Greeley
  • Patent number: 8164081
    Abstract: A method includes forming an electrical insulator material over an integrated circuit having a metal-containing conductive interconnect and activating a dopant in a semiconductor material of a substrate to provide a doped region. The doped region provides a junction of opposite conductivity types. After activating the dopant, the substrate is bonded to the insulator material and at least some of the substrate is removed where bonded to the insulator material. After the removing, a memory cell is formed having a word line, an access diode, a state-changeable memory element containing chalcogenide phase change material, and a bit line all electrically connected in series, the access diode containing the junction as a p-n junction. A memory device includes an adhesion material over the insulator material and bonding the word line to the insulator material.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: April 24, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Jun Liu, Gurtej S. Sandhu
  • Publication number: 20120091425
    Abstract: A nonvolatile memory device (10A) comprises an upper electrode layer (2); a lower electrode layer (4); a resistance variable layer (3) sandwiched between the upper electrode layer (2) and the lower electrode layer (4); and a charge diffusion prevention mask (1A) formed on a portion of the upper electrode layer (2); wherein the resistance variable layer (3) includes a first film comprising oxygen-deficient transition metal oxide and a second film comprising oxygen-deficient transition metal oxide which is higher in oxygen content than the first film; at least one of the upper electrode layer (2) and the lower electrode layer (4) comprises a simple substance or alloy of a platinum group element; and the charge diffusion prevention mask (1A) is insulative, and is lower in etching rate of dry etching than the upper electrode layer (2) and the lower electrode layer (4).
    Type: Application
    Filed: June 16, 2010
    Publication date: April 19, 2012
    Inventors: Yoshio Kawashima, Takumi Mikawa
  • Publication number: 20120091414
    Abstract: According to one embodiment, a semiconductor device includes a plurality of silicon films. The plurality of silicon films are disposed on one plane and are made of polysilicon containing an impurity. A crystal orientation of each of the silicon films is a (311) orientation.
    Type: Application
    Filed: March 21, 2011
    Publication date: April 19, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Yoko IWAKAJI, Jun Hirota, Moto Yabuki, Wakana Kai, Hirokazu Ishida, Ichiro Mizushima
  • Publication number: 20120091423
    Abstract: A nonvolatile memory device is disclosed, in which a first electrode, a first material layer having a positive Peltier coefficient, an information storage layer, a second material layer having a negative Peltier coefficient, and a second electrode are laminated.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 19, 2012
    Applicant: SONY CORPORATION
    Inventor: Jun Sumino
  • Publication number: 20120091428
    Abstract: A manufacturing method of a memory apparatus in which memory devices each having a memory layer whose resistance value reversibly varies by voltage application between bottom and upper electrodes are formed, includes: forming and shaping a bottom electrode material film into a first linear pattern extending in a first direction; forming a memory layer material film and an upper electrode material film in this order on the bottom electrode material film; forming the upper electrodes and the memory layers by shaping the upper electrode material film and the memory layer material film into a second linear pattern extending in a second direction intersecting with the first direction; and forming the bottom electrodes having a quadrangle plane shape at regions where the first linear pattern intersect with the second linear pattern by shaping the bottom electrode material film into the second linear pattern.
    Type: Application
    Filed: October 12, 2011
    Publication date: April 19, 2012
    Applicant: SONY CORPORATION
    Inventor: Koji Miyata
  • Publication number: 20120091416
    Abstract: A phase change material for use in a phase change memory device comprises germanium-antimony-tellurium-indium, wherein the phase change material comprises in total more than 30 at % antimony, preferably 5-16 at % germanium, 30-60 at % antimony, 25-51 at % tellurium, and 2-33% at % indium.
    Type: Application
    Filed: April 29, 2010
    Publication date: April 19, 2012
    Inventors: Michael Antoine Armand In 'T Zandt, Robertus Adrainus Maria Wolters, Hendrikus Jan Wondergem
  • Patent number: 8159856
    Abstract: A resistive sense memory apparatus includes a bipolar select device having a semiconductor substrate, a plurality of collector contacts disposed in a first side of the of the semiconductor substrate, an emitter contact layer disposed in a second side of the semiconductor substrate, and a base layer separating the plurality of collector contacts from the emitter contact layer. Each collector contact is electrically isolated from each other. A resistive sense memory cells is electrically coupled to each collector contacts and a bit line. The base layer and the emitter contact layer provide an electrical path for the plurality of collector contacts.
    Type: Grant
    Filed: July 7, 2009
    Date of Patent: April 17, 2012
    Assignee: Seagate Technology LLC
    Inventor: Maroun Georges Khoury
  • Patent number: 8153471
    Abstract: A phase change memory structure and method for forming the same, the method including providing a substrate comprising a conductive area; forming a spacer having a partially exposed sidewall region at an upper portion of the spacer defining a phase change memory element contact area; and, wherein the spacer bottom portion partially overlaps the conductive area. Both these two methods can reduce active area of a phase change memory element, therefore, reducing a required phase changing electrical current.
    Type: Grant
    Filed: November 14, 2010
    Date of Patent: April 10, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Li-Shyue Lai, Chao-Hsiung Wang, Denny Tang, Wen-Chin Lin
  • Publication number: 20120080657
    Abstract: Memory cells described herein have an increased current density at lateral edges of the active region compared to that of conventional mushroom-type memory cells, resulting in improved operational current efficiency. As a result, the amount of heat generated within the lateral edges per unit value of current is increased relative to that of conventional mushroom-type memory cells. Therefore, the amount of current needed to induce phase change is reduced.
    Type: Application
    Filed: December 13, 2011
    Publication date: April 5, 2012
    Applicant: Macronix International Co., Ltd.
    Inventors: Shih-Hung Chen, Yi-Chou Chen
  • Publication number: 20120075925
    Abstract: An improved phase change memory device has a phase change structure including a thin part between a contact surface of an electrode and a dielectric structure. For example, the thin part has a maximum thickness that is smaller than a maximum width of the contact surface of the electrode. In another example, the phase change structure surrounds the dielectric structure. Several variations improve the contact between the phase change structure and an electrode.
    Type: Application
    Filed: August 15, 2011
    Publication date: March 29, 2012
    Applicants: International Business Machines, Macronix International Co., Ltd.
    Inventors: Hsiang-Lan Lung, Chung Hon Lam
  • Publication number: 20120074368
    Abstract: A semiconductor memory device having a diode and a transistor connected in series, which prevents carriers from going from the diode into the transistor, thereby reducing the possibility of transistor deterioration. A structure to annihilate carriers from the diode is provided between a channel layer of the transistor and a diode semiconductor layer of the diode where the carriers are generated.
    Type: Application
    Filed: July 13, 2011
    Publication date: March 29, 2012
    Inventors: Yoshitaka SASAGO, Masaharu KINOSHITA, Mitsuharu TAI, Akio SHIMA, Takashi KOBAYASHI
  • Publication number: 20120077309
    Abstract: Memory devices and methods for manufacturing are described herein. A memory device as described herein includes a first electrode layer, a second electrode layer, and a thermal isolation structure including a layer of thermal isolation material between the first and second electrode layers. The first and second electrode layers and the thermal isolation structure define a multi-layer stack having a sidewall. A sidewall conductor layer including a sidewall conductor material is on the sidewall of the multi-layer stack. The sidewall conductor material has an electrical conductivity greater than that of the thermal isolation material. A memory element including memory material is on and in contact with the second electrode layer.
    Type: Application
    Filed: December 6, 2011
    Publication date: March 29, 2012
    Applicant: Macronix International Co., Ltd.
    Inventor: Shih Hung Chen
  • Publication number: 20120074376
    Abstract: Nonvolatile memory elements are provided that have resistive switching metal oxides. The nonvolatile memory elements may be formed by depositing a metal-containing material on a silicon-containing material. The metal-containing material may be oxidized to form a resistive-switching metal oxide. The silicon in the silicon-containing material reacts with the metal in the metal-containing material when heat is applied. This forms a metal silicide lower electrode for the nonvolatile memory element. An upper electrode may be deposited on top of the metal oxide. Because the silicon in the silicon-containing layer reacts with some of the metal in the metal-containing layer, the resistive-switching metal oxide that is formed is metal deficient when compared to a stoichiometric metal oxide formed from the same metal.
    Type: Application
    Filed: December 6, 2011
    Publication date: March 29, 2012
    Applicant: Intermolecular, Inc.
    Inventors: Nitin Kumar, Jinhong Tong, Chi-I Lang, Tony Chiang, Prashant B. Phatak
  • Publication number: 20120069632
    Abstract: Provided is a current steering element that can prevent write didturb even when an electrical pulse with different polarities is applied and that can cause a large current to flow through a variable resistance element. The current steering element includes a first electrode (32), a second electrode (31), and a current steering layer (33). The current steering layer (33) comprises SiNx (where 0<x?0.85) added with hydrogen or fluorine. When D (D=D0×1022 atoms/cm3) represents a density of hydrogen or fluorine, d (nm) represents a thickness of the current steering layer (33), and V0 (V) represents a maximum value applicable to between the first electrode (32) and the second electrode (31), D, x, d, and V0 satisfy the following Formulae. (ln(10000(C·exp(?·d)exp(?·x))?1)?)2?V0 (ln(1000(C·exp(?·d)exp(?·x))?1)?)2?(ln(10000(C·exp(?·d)exp(?·x))?1)?)2/2?0 wherein C=k1×D0k2, and ?, ?, ?, k1, and k2 are constants.
    Type: Application
    Filed: March 10, 2011
    Publication date: March 22, 2012
    Inventors: Yukio Hayakawa, Koji Arita, Takumi Mikawa, Takeki Ninomiya
  • Publication number: 20120068148
    Abstract: A variable resistance nonvolatile memory element capable of suppressing a variation in resistance values is provided.
    Type: Application
    Filed: March 7, 2011
    Publication date: March 22, 2012
    Inventors: Yoshio Kawashima, Takumi Mikawa, Yukio Hayakawa
  • Publication number: 20120068147
    Abstract: A method for forming a phase change memory device is disclosed. A substrate with a bottom electrode thereon is provided. A heating electrode and a dielectric layer are formed on the bottom electrode, wherein the heating electrode is surrounded by the dielectric layer. The heating electrode is etched to form recess in the dielectric layer. A phase change material is deposited on the dielectric layer, filling into the recess. The phase change material is polished to remove a portion of the phase change material exceeding the surface of the dielectric layer and a phase change layer is formed confined in the recess of the dielectric layer. A top electrode is formed on the phase change layer and the dielectric layer.
    Type: Application
    Filed: November 23, 2011
    Publication date: March 22, 2012
    Applicant: POWERCHIP SEMICONDUCTOR CORP.
    Inventors: Jen-Chi CHUANG, Ming-Jeng HUANG, Chien-Min LEE, Jia-Yo LIN, Min-Chih WANG
  • Patent number: 8129705
    Abstract: Provided is a nonvolatile memory device including a phase-change memory configured with cross-point memory cells in which memory elements formed of a phase-change material and selection elements formed with a diode are combined. A memory cell is configured with a memory element formed of a phase-change material and a selection element formed with a diode having a stacked structure of a first polycrystalline silicon film, a second polycrystalline silicon film, and a third polycrystalline silicon film. The memory cells are arranged at intersection points of a plurality of first metal wirings extending along a first direction with a plurality of third metal wirings extending along a second direction orthogonal to the first direction. An interlayer film is formed between adjacent selection elements and between adjacent memory elements, and voids are formed in the interlayer film provided between the adjacent memory elements.
    Type: Grant
    Filed: May 2, 2009
    Date of Patent: March 6, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Masaharu Kinoshita, Yoshitaka Sasago, Norikatsu Takaura
  • Patent number: 8129704
    Abstract: Non-volatile resistive-switching memories are described, including a memory element having a first electrode, a second electrode, a metal oxide between the first electrode and the second electrode. The metal oxide switches using bulk-mediated switching, has a bandgap greater than 4 electron volts (eV), has a set voltage for a set operation of at least one volt per one hundred angstroms of a thickness of the metal oxide, and has a leakage current density less than 40 amps per square centimeter (A/cm2) measured at 0.5 volts (V) per twenty angstroms of the thickness of the metal oxide.
    Type: Grant
    Filed: October 21, 2008
    Date of Patent: March 6, 2012
    Assignee: Intermolecular, Inc.
    Inventors: Prashant Phatak, Tony Chiang, Pragati Kumar, Michael Miller
  • Publication number: 20120049149
    Abstract: The present application describes a crossbar memory array. The memory array includes a first array of parallel nanowires of a first material and a second array of parallel nanowires of a second material. The first and the second array are oriented at an angle with each other. The array further includes a plurality of nanostructures of non-crystalline silicon disposed between a nanowire of the first material and a nanowire of the second material at each intersection of the two arrays. The nanostructures form a resistive memory cell together with the nanowires of the first and second materials.
    Type: Application
    Filed: November 7, 2011
    Publication date: March 1, 2012
    Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Wei Lu, Sung Hyun Jo, Kuk-Hwan Kim
  • Publication number: 20120043517
    Abstract: A nonvolatile semiconductor storage device according to an embodiment includes a first line; a second line that intersects the first line; and a memory cell that includes a memory element and a non-ohmic element, the memory cell being provided at the intersection of the first line and the second line while the memory element and the non-ohmic element are series-connected, data being stored in the memory element according to a change of a resistance state, wherein the non-ohmic element includes a metallic layer, an intrinsic semiconductor layer that is joined to the metallic layer, and a doped semiconductor layer that is joined to the intrinsic semiconductor layer and contains a first dopant.
    Type: Application
    Filed: August 12, 2011
    Publication date: February 23, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Takeshi Sonehara
  • Publication number: 20120043521
    Abstract: A memory cell including a memory element comprising an electrolytic insulator in contact with a conductive metal oxide (CMO) is disclosed. The CMO includes a crystalline structure and can comprise a pyrochlore oxide, a conductive binary oxide, a multiple B-site perovskite, and a Ruddlesden-Popper structure. The CMO includes mobile ions that can be transported to/from the electrolytic insulator in response to an electric field of appropriate magnitude and direction generated by a write voltage applied across the electrolytic insulator and CMO. The memory cell can include a non-ohmic device (NOD) that is electrically in series with the memory element. The memory cell can be positioned between a cross-point of conductive array lines in a two-terminal cross-point memory array in a single layer of memory or multiple vertically stacked layers of memory that are fabricated over a substrate that includes active circuitry for data operations on the array layer(s).
    Type: Application
    Filed: November 3, 2011
    Publication date: February 23, 2012
    Applicant: UNITY SEMICONDUCTOR CORPORATION
    Inventors: LAWRENCE SCHLOSS, JULIE CASPERSON BREWER, WAYNE KINNEY, RENE MEYER
  • Patent number: 8119503
    Abstract: Methods of forming integrated circuit devices include forming an etch stop layer on a surface of a semiconductor substrate and forming a first interlayer insulating layer on the etch stop layer. The first interlayer insulating layer is patterned to define an opening therein that exposes a first portion of the etch stop layer. This first portion of the etch stop layer is then removed to thereby expose an underlying portion of the surface of the semiconductor substrate. This removal of the etch stop layer may be performed by wet etching the first portion of the etch stop layer using a phosphoric acid solution. A semiconductor region is then selectively grown into the opening, using the exposed portion of the surface of the semiconductor substrate as an epitaxial seed layer.
    Type: Grant
    Filed: July 7, 2009
    Date of Patent: February 21, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kong-Soo Lee, Kyoung-Seok Kim, Sang-Jin Park, Chang-Hoon Lee, Ji-Hyun Jeong, Jae-Hyun Park, Jae-Hee Oh
  • Publication number: 20120037878
    Abstract: Methods and devices associated with phase change cell structures are described herein. In one or more embodiments, a method of forming a phase change cell structure includes forming a substrate protrusion that includes a bottom electrode, forming a phase change material on the substrate protrusion, forming a conductive material on the phase change material, and removing a portion of the conductive material and a portion of the phase change material to form an encapsulated stack structure.
    Type: Application
    Filed: October 27, 2011
    Publication date: February 16, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Jun Liu
  • Publication number: 20120032135
    Abstract: A phase-change material layer is formed on the lower electrode using a chalcogenide compound doped with carbon, or carbon and nitrogen. A phase-change material layer is obtained by doping a stabilizing metal into the preliminary phase-change material layer. An upper electrode is formed on the phase-change material layer. Since the phase-change material layer may have improved electrical characteristics, stability of phase transition and thermal stability, the phase-change memory unit may have reduced set resistance, enhanced durability, improved reliability, increased sensing margin, reduced driving current, etc.
    Type: Application
    Filed: October 18, 2011
    Publication date: February 9, 2012
    Inventors: Bong-Jin KUH, Yong-Ho HA, Doo-Hwan PARK, Han-Bong KO, Sang-Wook LIM, Hee-Ju SHIN
  • Patent number: 8102003
    Abstract: A resistance memory element which memorizes a high resistance state and a low resistance state and is switched between the high resistance state and the low resistance state by an application of a voltage includes a first electrode layer of titanium nitride film, a resistance memory layer formed on the first electrode layer and formed of titanium oxide having a crystal structure of rutile phase, and a second electrode layer formed on the resistance memory layer.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: January 24, 2012
    Assignee: Fujitsu Limited
    Inventors: Chikako Yoshida, Hideyuki Noshiro, Takashi Iiduka
  • Patent number: 8101937
    Abstract: Multistate nonvolatile memory elements are provided. The multistate nonvolatile memory elements contain multiple layers. Each layer may be based on a different bistable material. The bistable materials may be resistive switching materials such as resistive switching metal oxides. Optional conductor layers and current steering elements may be connected in series with the bistable resistive switching metal oxide layers.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: January 24, 2012
    Assignee: Intermolecular, Inc.
    Inventor: Tony Chiang
  • Publication number: 20120014165
    Abstract: A microelectronic programmable structure suitable for storing information and array including the structure and methods of forming and programming the structure are disclosed. The programmable structure generally includes an ion conductor and a plurality of electrodes. Electrical properties of the structure may be altered by applying energy to the structure, and thus information may be stored using the structure.
    Type: Application
    Filed: September 20, 2011
    Publication date: January 19, 2012
    Applicant: AXON TECHNOLOGIES CORPORATION
    Inventor: Michael N. Kozicki
  • Publication number: 20120012808
    Abstract: A memory cell is provided that includes a semiconductor pillar and a reversible state-change element coupled to the semiconductor pillar. The semiconductor pillar includes a heavily doped bottom region of a first conductivity type, a heavily doped top region of a second conductivity type, and a lightly doped or intrinsic middle region interposed between and contacting the top and bottom regions. The middle region comprises a first proportion of germanium, and either the top region or the bottom region comprises no germanium or comprises a second proportion of germanium less than the first proportion. The reversible state-change element includes a layer of a resistivity-switching metal oxide or nitride compound selected from the group consisting of NiO, Nb2O5, TiO2, HfO2, Al2O3, CoO, MgOx, CrO2, VO, BN, and AlN. Numerous other aspects are provided.
    Type: Application
    Filed: September 28, 2011
    Publication date: January 19, 2012
    Inventor: S. Brad Herner
  • Patent number: 8097871
    Abstract: Memory cells described herein have an increased current density at lateral edges of the active region compared to that of conventional mushroom-type memory cells, resulting in improved operational current efficiency. As a result, the amount of heat generated within the lateral edges per unit value of current is increased relative to that of conventional mushroom-type memory cells. Therefore, the amount of current needed to induce phase change is reduced.
    Type: Grant
    Filed: April 30, 2009
    Date of Patent: January 17, 2012
    Assignee: Macronix International Co., Ltd.
    Inventors: Shih-Hung Chen, Yi-Chou Chen
  • Patent number: 8097870
    Abstract: A memory cell that includes a memory element configured for switching from a first data state to a second data state by passage of current therethrough. The memory cell includes a top electrode and a bottom electrode for providing the current through the memory cell, and an alignment element positioned at least between the top electrode and the top surface of the memory element, the alignment element having an electrically conductive body tapering from the top electrode to the top surface of the memory element. Methods for forming the memory cell are also described.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: January 17, 2012
    Assignee: Seagate Technology LLC
    Inventors: Christina Laura Hutchinson, Insik Jin, Lance Stover
  • Patent number: 8097874
    Abstract: Programmable metallization memory cells include an electrochemically active electrode and an inert electrode and an ion conductor solid electrolyte material between the electrochemically active electrode and the inert electrode. A sacrificial metal is disposed between the electrochemically active electrode and the inert electrode. The sacrificial metal has a more negative standard electrode potential than the filament forming metal.
    Type: Grant
    Filed: July 10, 2009
    Date of Patent: January 17, 2012
    Assignee: Seagate Technology LLC
    Inventors: Venkatram Venkatasamy, Ming Sun, Dadi Setiadi
  • Publication number: 20120001148
    Abstract: A resistance-change memory device using stress engineering is described, including a first layer including a first conductive electrode, a second layer above the first layer including a resistive-switching element, a third layer above the second layer including a second conductive electrode, where a first stress is created in the switching element at a first interface between the first layer and the second layer upon heating the memory element, and where a second stress is created in the switching element at a second interface between the second layer and the third layer upon the heating.
    Type: Application
    Filed: September 15, 2011
    Publication date: January 5, 2012
    Applicant: INTERMOLECULAR, INC.
    Inventors: Michael Miller, Prashant Phatak, Tony Chiang
  • Patent number: 8089060
    Abstract: A non-volatile memory cell and a fabrication method thereof are provided. The non-volatile memory cell includes an anode; a cathode having a surface facing the anode; a specific structure disposed on the surface; and an ion conductor disposed among the anode, the cathode and the specific structure, wherein the specific structure is one of a bulging area on the surface of the cathode and an insulating layer with an opening.
    Type: Grant
    Filed: July 22, 2009
    Date of Patent: January 3, 2012
    Assignee: Nanya Technology Corp.
    Inventors: Chun-I Hsieh, Shih-Shu Tsai, Chang-Rong Wu
  • Publication number: 20110315945
    Abstract: A semiconductor device includes a semiconductor substrate, a non-volatile semiconductor memory element formed over the semiconductor substrate, including a variable resistance element including a laminate comprising a first electrode, a variable resistance layer, and a second electrode, and a volatile semiconductor memory element formed over the semiconductor substrate, including a capacitance element including a laminate comprising a third electrode, a dielectric layer including a same material as the variable resistance layer, and a fourth electrode.
    Type: Application
    Filed: September 6, 2011
    Publication date: December 29, 2011
    Applicant: Elpida Memory, Inc.
    Inventor: Kazuhiko KAJIGAYA
  • Publication number: 20110315947
    Abstract: A microelectronic programmable structure suitable for storing information and array including the structure and methods of forming and programming the structure are disclosed. The programmable structure generally includes an ion conductor and a plurality of electrodes. Electrical properties of the structure may be altered by applying energy to the structure, and thus information may be stored using the structure.
    Type: Application
    Filed: September 9, 2011
    Publication date: December 29, 2011
    Applicant: AXON TECHNOLOGIES CORPORATION
    Inventor: Michael N. Kozicki
  • Publication number: 20110315946
    Abstract: A nonvolatile memory device, including a lower electrode on a semiconductor substrate, a phase change material pattern on the lower electrode, an adhesion pattern on the phase change material pattern and an upper electrode on the adhesion pattern, wherein the adhesion pattern includes a conductor including nitrogen.
    Type: Application
    Filed: September 2, 2011
    Publication date: December 29, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Han-Bong KO, Yong-Ho Ha, Doo-Hwan Park, Bong-Jin Kuh, Hee-Ju Shin