Serially Arranged In Flow Path Patents (Class 261/147)
  • Patent number: 11236931
    Abstract: An absorption refrigeration and air conditioning device capable of controlling temperature and/or the humidity of enclosed spaces particularly useful in maritime applications and improving fuel economy of internal combustion engines is provided.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: February 1, 2022
    Assignee: COOL4SEA APS
    Inventors: Hans Nicolai Schjerning Lundsgaard, Daniel Buhl Hansen, Mark Hollaender Viese, Christian Fonnesbaek Jensen
  • Patent number: 9179759
    Abstract: The present invention is directed to a hammock system and particularly to a convertible hammock for use on a ground stand, on the bed of truck or similar vehicle and attached to a standard vehicle trailer hitch. The hammock includes a support structure at the head and the foot of the hammock which comprises a vertically directed post. The base stand includes a receptacle for receiving the post. In addition, the post can be equally adapted for slidable reception into utility slots which are already positioned within the side walls of the bed of most pickup trucks or similar vehicles. In addition, the present invention can be directed for use with a trailer hitch component on a typical vehicle.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: November 10, 2015
    Inventor: Jeff Turner
  • Publication number: 20150145154
    Abstract: A system for supplying vaporized precursor includes an enclosure including an output. A plurality of trays is arranged in a stacked, spaced configuration inside the enclosure. The plurality of trays is configured to hold liquid precursor. A first conduit fluidly connects a carrier gas supply to the enclosure and includes a plurality of openings. A first valve is arranged along the first conduit and is configured to selectively control delivery of the carrier gas from the carrier gas supply through the first conduit to the plurality of openings in the first conduit. The plurality of openings is configured to direct the carrier gas across the liquid precursor in the plurality of trays, respectively. The output of the enclosure provides a mixture of the carrier gas and the vaporized precursor.
    Type: Application
    Filed: November 25, 2013
    Publication date: May 28, 2015
    Applicant: Lam Research Corporation
    Inventors: Ramesh Chandrasekharan, Davis Weymann
  • Patent number: 9004462
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
    Type: Grant
    Filed: April 13, 2013
    Date of Patent: April 14, 2015
    Assignee: Entegris, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Patent number: 8608140
    Abstract: A dust removing and cooling apparatus is provided. High temperature dust-containing harmful gases are exhausted in a state where 99.9% of airborne particulates are removed from the high temperature dust-containing harmful gases at a temperature that is similar to the air so that dust collecting efficiency is very high and white plume can be avoided.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: December 17, 2013
    Inventor: Jae Ouk Jung
  • Patent number: 8505886
    Abstract: According to one embodiment, there is provided a multistage-pressure condenser, including a first condenser, a second condenser and a third condenser, which are arranged in increasing order of internal pressure, the first condenser and the second condenser each including a first partition in which perforations from which condensate obtained by condensing turbine steam by cooling water drops are formed on a cooling water inflow side of the condenser rather than at a central part thereof, and a second partition which partitions a reheating room for reheating condensate dropping from the perforations in a direction perpendicular to an inflow direction of the cooling water, and a heating-steam flow path which supplies heated steam from the third condenser to the reheating room partitioned by the first partition and the second partition.
    Type: Grant
    Filed: June 21, 2010
    Date of Patent: August 13, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shun Yadorihara, Koichi Yoshimura, Takaaki Kezuka
  • Patent number: 8491720
    Abstract: Embodiments disclosed herein generally relate to an HVPE chamber. The chamber may have two separate precursor sources coupled thereto to permit two separate layers to be deposited. For example, a gallium source and a separate aluminum source may be coupled to the processing chamber to permit gallium nitride and aluminum nitride to be separately deposited onto a substrate in the same processing chamber. The nitrogen may be introduced to the processing chamber at a separate location from the gallium and the aluminum and at a lower temperature. The different temperatures causes the gases to mix together, react and deposit on the substrate with little or no deposition on the chamber walls.
    Type: Grant
    Filed: December 14, 2009
    Date of Patent: July 23, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Tetsuya Ishikawa, David H. Quach, Anzhong Chang, Olga Kryliouk, Yuriy Melnik, Harsukhdeep S. Ratia, Son T. Nguyen, Lily Pang
  • Patent number: 8454001
    Abstract: An emission purifying system and device for slowing global warming is provided herein which may eliminate the pollutant gases produced by combustion. The system uses a pump with waterfall, bubbling, airing, lubricating and liquefying sub-systems to catch and store the combustion gases, thus reducing the temperature of the combustion, potentially preventing global warming effects and acid rain, eliminating the noise produced by combustion as well as the characteristic odors, while utilizing the produced thermal energy to transform it into steam and kinetic energy for a variety of uses.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: June 4, 2013
    Inventor: Miguel Angel Caraveo-Martinez
  • Patent number: 8444120
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: May 21, 2013
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Publication number: 20120217662
    Abstract: A cooling tower for evaporating water from a brine solution is provided and may include a housing having an air inlet and a brine inlet. The cooling tower may also include a heat-exchange assembly having a heat-exchange media that suspends the brine solution and at least one nozzle in fluid communication with the brine inlet. The at least one nozzle may receive the brine solution from the brine inlet and may transfer the brine solution from the brine inlet to the heat-exchange media to allow the heat-exchange media to transfer moisture from the brine solution to air received from the air inlet to reduce the moisture content of the brine solution.
    Type: Application
    Filed: May 7, 2012
    Publication date: August 30, 2012
    Applicant: MITEK HOLDINGS, INC.
    Inventors: Kelly D. Rushmore, James H. Shoffner
  • Patent number: 8128073
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an amoule may having a removable top. Multiple containers defining multiple material support surfaces be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
    Type: Grant
    Filed: November 5, 2010
    Date of Patent: March 6, 2012
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Patent number: 8088292
    Abstract: The invention relates to a gas liquid contactor and effluent cleaning system and method and more particularly to an array of nozzles configured to produce uniformly spaced flat liquid jets with reduced linear stability. An embodiment of the invention is directed towards a stability unit used with nozzles of a gas liquid contactor and/or an enhancer for stable jet formation, and more particularly to reducing the stability of liquid jets formed from nozzles of the gas liquid contactor. Another aspect of the invention relates to operating the apparatus at a condition that reduces the stability of liquid jets, e.g., a droplet generator apparatus. Yet another aspect of the invention relates to operation of the apparatus with an aqueous slurry. Still another aspect of the invention is directed towards to an apparatus for substantially separating at least two fluids.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: January 3, 2012
    Assignee: Neumann Systems Group, Inc.
    Inventors: David Kurt Neumann, Andrew R. Awtry, Jason K. Brasseur, Keith R. Hobbs, Boris R. Nizamov, Thomas Lee Henshaw
  • Patent number: 7988135
    Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. the invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.
    Type: Grant
    Filed: June 23, 2010
    Date of Patent: August 2, 2011
    Assignee: Palas GmbH Partikel-und Lasermesstechnik
    Inventors: Leander Mölter, Friedrich Munzinger
  • Publication number: 20110089583
    Abstract: Provided is a dust removing and cooling apparatus.
    Type: Application
    Filed: February 27, 2009
    Publication date: April 21, 2011
    Inventor: Jae Ouk Jung
  • Patent number: 7828273
    Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. The invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.
    Type: Grant
    Filed: March 25, 2009
    Date of Patent: November 9, 2010
    Assignee: Palas GmbH Partikel-und Lasermesstechnik
    Inventors: Leander Mölter, Friedrich Munzinger
  • Patent number: 7828274
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: November 9, 2010
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman
  • Publication number: 20100276341
    Abstract: A system and method of recovering heat and water from a slurry, such as tailings from oil sands extraction, is provided. The method includes providing the tailings to a humidification vessel, adding a sufficiently dry gas directly to the slurry in the vessel to form warm, water-saturated gas, such that heat and water are recovered from the slurry, removing the warm, water-saturated gas from the humidification vessel, providing the warm, water-saturated gas to a direct contact condensation vessel, cooling the gas in the condensation vessel to condense the water from the gas, thereby extracting water from the warm, water-saturated gas and recycling the dry gas, and recovering the water from the condensation vessel. Water which is of high quality, suitable for steam generation is obtained by a method in accordance with the present invention.
    Type: Application
    Filed: October 9, 2008
    Publication date: November 4, 2010
    Inventors: Brian C. Speirs, James Andrew Dunn
  • Publication number: 20100170481
    Abstract: A conversion system for a gasoline engine based generator enables the use of heavier fuels. A vertically disposed vortex separation chamber includes an inlet proximate the bottom of the chamber and tangential to the longitudinal axis of the chamber for delivering to the chamber partially vaporized fuel in an air-fuel mixture from a carburetor associated with the engine. An outlet proximate the top of the chamber also tangential to the longitudinal axis of the chamber for delivering vaporized fuel from the chamber to the engine. An electric heater is in communication with the bottom of the chamber for heating the chamber wall to vaporize any fuel thereon so vaporized fuel is reintroduced in swirling air-fuel mixture in the chamber. A battery source charged by the generator provides power to the electric heater. A jacket is disposed about and spaced from the chamber wall creating an annulus between the jacket and the chamber wall.
    Type: Application
    Filed: December 8, 2009
    Publication date: July 8, 2010
    Inventors: David H. Walker, Andrew C. Harvey, Nathan B. Longo
  • Publication number: 20100078836
    Abstract: In a method and apparatus for passing a mixed vapour and liquid stream between a first heat exchanger (101) and a second heat exchanger (102) the mixed vapour and liquid stream outflows from the first heat exchanger (101) through two or more outlets (104). Then, the mixed vapour and liquid stream in the outlets (104) passes through two or more intermediate conduits (103) to the second heat exchanger (102), after which the mixed vapour and liquid stream inflows from the intermediate conduits (103) into the second heat exchanger (102) through two or more inlets (105). The number (X) of outlets (104) is equal to or greater than the number (Y) of inlets (105).
    Type: Application
    Filed: December 4, 2007
    Publication date: April 1, 2010
    Inventors: Willem Dam, Johan Jan Barend Pek, Leendert Johannes Arie Zoetemeijer
  • Patent number: 7556244
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resuting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment.
    Type: Grant
    Filed: August 28, 2007
    Date of Patent: July 7, 2009
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Patent number: 7543803
    Abstract: For the reliable condensation of steam on condensation nuclei in an aerosol flow and therefore for enlarging the particles in the aerosol, the invention provides a method which is characterized in that condensation nuclei are passed through an inner area of an evaporating zone forming a flow area, the liquid to be evaporated is contacted with the flow area and evaporated therein and the thus produced steam is condensed on the condensation nuclei. the invention also provides an apparatus for condensing steam on condensation nuclei with an inlet for condensation nuclei and an evaporating zone constructed in such a way that a flow area for the condensation nuclei has a heated liquid duct open thereto and that a condensation flue is connected to the flow area. The invention also provides methods and apparatuses for counting particles, for producing monodisperse aerosols using the aforementioned method or the aforementioned apparatus.
    Type: Grant
    Filed: January 17, 2006
    Date of Patent: June 9, 2009
    Assignee: Palas GmbH Partikel- und Lasermesstechnik
    Inventors: Leander Mölter, Friedrich Munzinger
  • Patent number: 7487956
    Abstract: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may include an amoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resuting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: February 10, 2009
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi K. Laxman
  • Patent number: 7389813
    Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: June 24, 2008
    Assignee: ASML Holding N.V.
    Inventors: Dikran S. Babikian, Bryan H. Wade
  • Patent number: 7322566
    Abstract: A device for conditioning breathing air includes a housing (1) provided with an inlet (5) for non treated breathing air and an outlet (6) for the treated breathing air. The housing (1) contains a passive humidifier (7) and an active humidifier wherein the active humidifier includes a water supply inlet (13), a heating device for the supplied water, a membrane (12) having substantial water impermeable and water vapor permeable characteristics, and a heat exchange element (14). The membrane (12) is divided into a hydrophilic membrane (12a) and a water vapor permeable and water impermeable membrane (12b). The heat exchange element is a perforated metal plate (14) and/or a heating resistance. A method for the conditioning of breathing air includes the steps of: supplying through the inlet opening non treated breathing air, passively humidifying the supplied air through the passive humidifier, and actively humidifying the breathing air, through the active humidifier of a device.
    Type: Grant
    Filed: May 27, 2003
    Date of Patent: January 29, 2008
    Assignee: BVBA Medisize Belgie
    Inventor: Jean-Michel Anthony
  • Patent number: 7300038
    Abstract: Structure helps support material in a container with an increased exposed surface area to help promote contact of a gas with vaporized material. For at least one disclosed embodiment, the structure may help support material for vaporization in the same form as when the material is placed at the structure. For at least one disclosed embodiment, the structure may help support material with an increased exposed surface area relative to a maximum exposed surface area the material could have at rest in the container absent the structure. For at least one disclosed embodiment, the structure may define one or more material support surfaces in an interior region of the container in addition to a bottom surface of the interior region of the container. For at least one disclosed embodiment, the structure may define in an interior region of the container one or more material support surfaces having a total surface area greater than a surface area of a bottom surface of the interior region of the container.
    Type: Grant
    Filed: June 1, 2004
    Date of Patent: November 27, 2007
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John N. Gregg, Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman
  • Patent number: 7261150
    Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: August 28, 2007
    Assignee: Hydrogenics Corporation
    Inventors: Joe Cargnelli, Ravi B. Gopal
  • Patent number: 7153115
    Abstract: An optical fiber cooling tube includes an internal cavity through which an optical fiber passes and a set of injection passages that are distributed along the tube, open into the cavity, and are oriented in a contraflow direction relative to the direction in which the optical fiber moves.
    Type: Grant
    Filed: April 4, 2003
    Date of Patent: December 26, 2006
    Assignee: Alcatel
    Inventors: Aurélien Leon, Denis Tschumperle, Olivier Schuepbach, Jean-François Bourhis
  • Patent number: 7066453
    Abstract: The movement and mixing of microdroplets through microchannels is described employing silicon-based microscale devices, comprising microdroplet transport channels, reaction regions, electrophoresis modules, and radiation detectors. The discrete droplets are differentially heated and propelled through etched channels. Electronic components are fabricated on the same substrate material, allowing sensors and controlling circuitry to be incorporated in the same device.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: June 27, 2006
    Assignee: The Regents of the University of Michigan
    Inventors: Mark A. Burns, Carlos H. Mastrangelo, Timothy S. Sammarco, Francis P. Man, James R. Webster, Brian N. Johnson, Bradley Foerster, Darren Jones, Yakeitha Fields, Adam Kaiser, David T. Burke
  • Patent number: 7051801
    Abstract: A method for humidifying and controlling the temperature of a process gas stream comprising the steps of super-saturating and heating the process gas stream with steam until it reaches a first pre-set temperature; cooling the process gas stream until it reaches a second pre-set temperature; removing excess condensed water from the process gas stream; and heating the process gas stream until it reaches a third pre-set temperature. An apparatus for implementing this method is also disclosed.
    Type: Grant
    Filed: July 28, 2000
    Date of Patent: May 30, 2006
    Assignee: Hydrogenics Corporation
    Inventors: Joe Cargnelli, Ravi B. Gopal
  • Patent number: 6969495
    Abstract: For use in a separation column, a mat element or a beam element has at least: an upper part 2; at least one distributor-collector part (3) having one or more secondary orifices (7i) and at least one main orifice (6), whereby the passage sections of orifices (8) and (7i) are different; and a lower part (4). The distributor-collector part or parts (3) arranged between the upper part (2) and the lower part (4). A sealing element (5a) arranged between the distributor-collector part (3) and the upper part (2), and a sealing element (5b) arranged between the distributor-collector part (3) and the lower part (4). A separation element (8) arranged at distributor-collector part (3), thus delimiting two spaces (3a, 3b) for circulation of fluids.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: November 29, 2005
    Assignee: Institut Francais du Petrole
    Inventors: Gérard Hotier, Pierre Renard, Xavier Decoodt
  • Patent number: 6966364
    Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.
    Type: Grant
    Filed: February 12, 1999
    Date of Patent: November 22, 2005
    Assignee: ASML Holding N.V.
    Inventors: Dikran S. Babikian, Bryan H. Wade
  • Patent number: 6921062
    Abstract: A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
    Type: Grant
    Filed: July 23, 2002
    Date of Patent: July 26, 2005
    Assignee: Advanced Technology Materials, Inc.
    Inventors: John Gregg, Scott Battle, Jeffrey I. Banton, Donn Naito, Marianne Fuierer
  • Patent number: 6789789
    Abstract: A two-stage vaporizer includes two vaporizing stages joined by a vaporization chamber located gravitationally below the first vaporizing stage and gravitationally above the second vaporizing stage. A separator covering an outlet within the vaporization chamber allows vaporized precursor from both vaporizing stages to pass through the outlet to chemical vapor deposition system and prevents any remaining liquid precursor from passing through the outlet. The liquid precursor is premixed with carrier gas just prior to entry into the vaporizer. Additional flows of carrier gas pass through the two vaporizing stages in opposite directions to carry the vaporized precursor to the outlet.
    Type: Grant
    Filed: May 29, 2002
    Date of Patent: September 14, 2004
    Assignee: Veeco Instruments Inc.
    Inventors: Rajul V. Randive, William J. Messner
  • Patent number: 6715743
    Abstract: A gas humidifier provides a continuous flow of gas through two stages of bubbling with an intermediate heating stage. Gas is introduced into an enclosure containing a quantity of bulk water by pumping the gas into a gas entry pipe or tube. The gas exits the gas entry pipe to bubble up through a bubbling evaporator. At the water surface of the bubbling evaporator, a heating element heats the gas-vapor mixture. The heated gas-vapor mixture then bubbles up through the bulk water, and the temperature of the bulk water determines the thermal cycles of the heating element. The gas-vapor mixture bubbles up through the bulk water, reaching saturation at the dew point. The saturated gas is then directed from the humidifier for use.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: April 6, 2004
    Inventor: Chaojiong Zhang
  • Patent number: 6595020
    Abstract: An alternative powered evaporative cooler has a squirrel cage fan. A low voltage DC motor is provided to power the squirrel cage fan. A pulley system is coupled to the squirrel cage fan and the low voltage DC motor for transferring energy from the low voltage DC motor to rotate the squirrel cage fan. A low voltage DC power source is provided to power the low voltage DC motor.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: July 22, 2003
    Inventor: David I. Sanford
  • Patent number: 6488774
    Abstract: A trap apparatus is optimum for trapping a material gas discharged from a vapor deposition apparatus for depositing in a vapor phase thin films of high-dielectric or ferroelectric such as barium/strontium titanates on substrates. The trap apparatus is disposed downstream of a vacuum process chamber. The vacuum process chamber is for processing a substrate. The trap apparatus is for trapping a component having a low vapor pressure contained in a gas discharged from the vacuum process chamber. The trap apparatus includes a trap container for introducing the gas discharged from the vacuum process chamber, and a cooling device provided in the trap container for cooling the gas to a temperature equal to or lower than a condensing temperature of a gas component which is contained in the gas and easily liquidized.
    Type: Grant
    Filed: February 24, 2000
    Date of Patent: December 3, 2002
    Assignee: Ebara Corporation
    Inventors: Kuniaki Horie, Masahito Abe, Tsutomu Nakada, Yuji Araki
  • Patent number: 6362367
    Abstract: This invention relates to a process for producing one or more organic acids in high purity which process comprises (i) oxidizing in a liquid oxidation reactor one or more organic liquids with essentially pure oxygen or oxygen-enriched air containing at least about 50% oxygen, at a temperature sufficiently stable to prevent cycling of reaction rate, to produce a crude reaction product fluid, and (ii) refining said crude reaction product fluid to give said one or more organic acids in high purity. The oxidation temperature is preferably controlled to within about ±3° C. of a target temperature. The organic acids described herein is useful in a variety of applications, such as intermediates in the manufacture of chemical compounds, pharmaceutical manufacture and the like.
    Type: Grant
    Filed: April 21, 1998
    Date of Patent: March 26, 2002
    Assignee: Union Carbide Chemicals & Plastics Technology Corp.
    Inventors: John Braithwaite, David Robert Bryant, David James Miller, John Earl Logsdon
  • Patent number: 6126151
    Abstract: A hybrid cooling plant includes at least one sector with a dry cooling part connected to a feed pump and including at least two heat exchangers which are connected in parallel, and with a wet cooling part located underneath the dry cooling part, wherein the dry cooling part and the wet cooling part are connected to each other by a closed connection. The highest locations of the heat exchangers are connected through a deaerating line to a vacuum pump and the heat exchangers are provided with evacuating and ventilating valves and level limit switches. The deaerating lines of the heat exchangers of a sector which operationally form a unit are connected to a deaerating vessel or reservoir.
    Type: Grant
    Filed: April 14, 1999
    Date of Patent: October 3, 2000
    Assignee: GEA Energietechnik GmbH
    Inventor: Vladimir Vodicka
  • Patent number: 6059934
    Abstract: Tray designs for use in a separation column for distilling or fractionating a feed stream are provided that incorporate co-current contact of the liquid and vapor streams and their subsequent separation on each tray. In one embodiment, located on the trays are a plurality of co-current vapor and liquid contacting sections including a volume of the tray in which vapors and liquid can be in co-current contact. Also located on the trays are a plurality of de-entrainment devices for separating entrained liquids from a vapor stream, the de-entrainment devices having an inner and an outer side, the inner side being adjacent to the co-current contacting sections.
    Type: Grant
    Filed: April 17, 1998
    Date of Patent: May 9, 2000
    Assignee: Mobil Oil Corporation
    Inventors: Berne K. Stober, Raymond M. Sowiak
  • Patent number: 5837105
    Abstract: A tray design for use in a separation column for distilling or fractionating a feed stream is provided that incorporates co-current contact of the liquid and vapor streams and their subsequent separation on each tray. Located on the trays are a plurality of co-current vapor and liquid contacting sections including a volume of the tray in which vapors and liquid can be in co-current contact. Also located on the trays are a plurality of de-entrainment devices for separating entrained liquids from a vapor stream, the de-entrainment devices having an inner and an outer side, the inner side being adjacent to the co-current contacting sections. The tray design further incorporates a plurality of liquid downcomers, having an upper portion and a lower portion, where the upper portion.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: November 17, 1998
    Assignee: Mobil Oil Corporation
    Inventors: Berne K. Stober, Raymond M. Sowiak
  • Patent number: 5676715
    Abstract: An apparatus for improved removal of particulates and contaminants from a flue gas produced by the combustion of waste materials or fossil fuels in industrial processes having at least one horizontally oriented heat exchanger stage in which a wet scrubbing solution, such as an alkali reagent is sprayed in the same direction as the flue gas flow and a drain mechanism is located below the horizontally oriented heat exchanger. The horizontal orientation of the heat exchanger and the location of the drain mechanism increase the removal efficiency of very small particulates and contaminants. A collection tank is connected to the drain mechanism. A spray washing system is provided adjacent a mist eliminator and one or more additional heat exchanger stages for unplugging the heat exchanger and enhancing small particulate removal within the system.
    Type: Grant
    Filed: February 13, 1996
    Date of Patent: October 14, 1997
    Assignee: The Babcock & Wilcox Company
    Inventors: Daniel S. Kalka, Dennis W. Johnson, Robert B. Myers, Pervaje A. Bhat
  • Patent number: 5395517
    Abstract: An improved apparatus and process for oxidizing industrial spent caustic streams, whereby oxidation of spent caustic occurs in a unitary processing tower with three chambers that cooperate simultaneously to oxidize the caustic in the first chamber; to separate the caustic from the oxidizing gas in the second chamber; and, in the third chamber, to pass gas and cooled caustic through a mass transfer apparatus that cools and cleans the gas and releases the caustic and gas into a gas-liquid separation zone of the upper chamber. An alternative embodiment of the invention involves spatially separating the upper chamber from the other two chambers.
    Type: Grant
    Filed: June 10, 1994
    Date of Patent: March 7, 1995
    Assignee: Merichem Company
    Inventor: Tamas Varadi
  • Patent number: 5133941
    Abstract: An improved process and apparatus for hydrogenating a stream of hydrocarbons is provided. The pressure and temperature of the stream are elevated and the stream is passed through two or more serially connected hydrogenation reaction zones. While passing through the reaction zones hydrogen is dispersed in the stream and the stream is caused to flow along successive downward and upward paths. The reacted stream is cooled prior to reducing the pressure exerted thereon.
    Type: Grant
    Filed: January 28, 1991
    Date of Patent: July 28, 1992
    Assignee: Phillips Petroleum Company
    Inventors: George E. Hays, Theodore M. Classen
  • Patent number: 4964977
    Abstract: A cross-flow type cooling tower comprises a cooling tower main body, a water tank placed at the upper part of the main body, a plurality of closed type heat exchanging units arranged in the main body in substantially horizontal manner and in parallel to each other in multi-stage below the water tank, a supplying header placed near an air discharge opening of the main body, which is detachably connectable to supplying ports of the heat exchanging units, a discharge header placed near an air intake opening of the main body, which is detachably connectable to discharge ports of the heat exchanging units, wherein the water tank is divided into a first water receiving part near the air intake opening and a second water receiving part near the air discharge opening by way of a partition wall, and a switching valve is provided at at least a water feeding pipe to the second water receiving part.
    Type: Grant
    Filed: April 7, 1989
    Date of Patent: October 23, 1990
    Assignee: Shinwa Sangyo Company, Ltd.
    Inventors: Jujiro Komiya, Tadanobu Muto
  • Patent number: 4857090
    Abstract: An energy conservation system for cooling and conditioning air, particularly air at elevated temperatures which is discharged from the rotors of open-end spinning machines. The air is directed along a predetermined flow path in which a first stage cooling zone is established, which utilizes one or more cooling coils through which flow a heat exchange fluid that is cooled by an externally located cooling tower. The system includes a second stage cooling zone comprising an air washer in which water is sprayed into the air stream, such water being chilled in part by a mechanical refrigeration unit. The air washer preferably includes two spray pipes, one being located upstream of the other, with the downstream spray pipe receiving some liquid chilled by the refrigeration unit, and with the upstream spray pipe receiving its spray liquid from the discharge collected from the downstream spray pipe.
    Type: Grant
    Filed: February 23, 1988
    Date of Patent: August 15, 1989
    Assignee: Pneumafil Corporation
    Inventor: Roy Hartness
  • Patent number: 4618462
    Abstract: The present invention relates to humidifiers as used in research and in the calibration of humidity measuring instruments for producing a saturated gas stream. Specifically the invention relates to humidifiers comprising a bubble type and an extended surface type humidifier in gas flow communication one to the other and including temperature control means.
    Type: Grant
    Filed: October 17, 1984
    Date of Patent: October 21, 1986
    Inventor: Robert S. Fisher
  • Patent number: 4612778
    Abstract: An auxiliary cooler shell for installation over and around a conventional evaporative cooler for the enhancement of the cooling effectiveness and efficiency of the existing cooling system, the auxiliary shell incorporating evaporator pads and a water distribution spider that is supplied by the water pump of the conventional cooler over which the shell is installed.
    Type: Grant
    Filed: February 14, 1985
    Date of Patent: September 23, 1986
    Inventor: Michael V. Medrano
  • Patent number: 4578961
    Abstract: An absorption apparatus for use in an absorption heat pump system comprising inner and outer helically wound tubular elements. An absorbing fluid flows in the outer element while a cooling fluid flows in the inner tubular element. A plurality of gas supply means supply gas to the outer tubular element from a gas distribution manifold.
    Type: Grant
    Filed: February 11, 1985
    Date of Patent: April 1, 1986
    Assignee: Shell Oil Company
    Inventor: Ronald Domnick
  • Patent number: 4574062
    Abstract: Contaminated air is treated to attain a predetermined temperature, purity and relative humidity using an apparatus which includes heat exchange elements and water spray nozzles. The heat exchange elements comprise tubes arranged to impart turbulence to the contaminated air flowing over the tubes. Water is sprayed into the air flow against the tubes and water droplets intimately mix with the air flow so that the contact surfaces of the tubes simultaneously perform three functions: purification of the air, humidification of the air to a relative humidity of about 100%, and bringing the air to a desired temperature. Purification occurs when the air-water droplets hit the outside contact surfaces of the tubes. Impurities contained in the air are deposited on the contact surfaces to be washed away by the water spray. Humidification occurs when the spray water on the contact surfaces is vaporized by the addition of heat from a heat transport fluid conducted through the tubes.
    Type: Grant
    Filed: June 14, 1984
    Date of Patent: March 4, 1986
    Inventor: Jacob Weitman
  • Patent number: 4538426
    Abstract: An improved regenerative indirect evaporative and dry surface cooling system for conditioning the air in a structure.
    Type: Grant
    Filed: September 12, 1983
    Date of Patent: September 3, 1985
    Inventor: Sumner D. Bock