With Etching Or Machining Of Magnetic Material Patents (Class 29/603.15)
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Patent number: 6668443Abstract: The possibility of shorting between a spin valve and its underlying magnetic shield layer can be largely eliminated by choosing the bottom spin valve structure. However, doing so causes the hard longitudinal bias that is standard for all such devices to degrade. The present invention overcomes this problem by inserting a thin NiCr, Ni, Fe, or Cr layer between the antiferromagnetic layer and the longitudinal bias layers. This provides a smoother surface for the bias layers to be deposited onto, thereby removing structural distortions to the longitudinal bias layer that would otherwise be present. A process for manufacturing the structure is also described.Type: GrantFiled: July 30, 2001Date of Patent: December 30, 2003Assignee: Headway Technologies, Inc.Inventors: Chen-Jung Chien, Chyu-Jiuh Torng, Cherng-Chyi Han, Moris Dovek, Po-Kang Wang, Mao-Min Chen
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Patent number: 6668442Abstract: When manufacturing a thin film magnetic head, a first magnetic pole and a second magnetic pole are magnetically coupled and face each other in a recording-medium-facing surface. A gap layer is in between the first and second magnetic pole. A thin film coil for generating magnetic flux is also included. A first magnetic layer is formed. A first magnetic pole is then formed on the first magnetic layer so as to be magnetically coupled to part of the first magnetic layer. A first insulating layer is formed with an inorganic material extendedly from a surface of the first magnetic pole opposite to the recording-medium-facing surface to a top surface of the first magnetic layer. The gap layer is formed on the first magnetic pole. Then the second magnetic pole is formed on the gap layer longer than the first magnetic pole. The second magnetic layer is formed so as to be magnetically coupled to part of the second magnetic pole.Type: GrantFiled: September 17, 2001Date of Patent: December 30, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6669855Abstract: A method of manufacturing a thin-film magnetic head allowing dimension control of the width of the magnetic pole and reduction of the time required for formation is provided. A layer of iron nitride formed by sputtering is selectively etched with the RIE to form a top pole tip. In this etching process with RIE, chlorine-type gas is selected as a gas seed for etching, and the process temperature is in a range of 50° C. to 300° C. Subsequently, using part of a first mask and a tip portion of the top pole tip as a mask, part of both the write gap layer and the second bottom pole are etched with the RIE similarly to the above process, to thereby form a magnetic pole. The etching conditions are optimized by performing the process with the RIE under the above conditions, so that both of the top pole tip and the magnetic pole can be formed with high precision, and that the time required for forming both of these elements can be significantly reduced.Type: GrantFiled: January 22, 2001Date of Patent: December 30, 2003Assignee: TDK CorporationInventors: Yoshitaka Sasaki, Atsushi Iijima, Seiji Yari, Katsuya Kanakubo
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Patent number: 6662433Abstract: A thin film magnetic head includes a lower shielding layer composed of a magnetic material; a nonmagnetic MR gap layer on the lower shielding layer; a magnetoresistive element layer in the MR gap layer facing a recording medium; a lower core layer composed of a magnetic material on the MR gap layer; an upper core layer composed of a magnetic material being opposed to the lower core layer with a nonmagnetic gap layer therebetween at the surface facing the recording medium; and a coil layer for inducing a recording magnetic field in the lower core layer and the upper core layer. Alternatively, a thin film magnetic head further includes a first magnetic material layer in the rear of the lower shielding layer, magnetically separated from the lower shielding layer. A method of fabricating the same is also disclosed.Type: GrantFiled: November 10, 2000Date of Patent: December 16, 2003Assignee: Alps Electric Co., Ltd.Inventor: Kiyoshi Sato
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Patent number: 6663817Abstract: A method for producing sliders having positive camber on the air bearing surface. The method comprises (i) scribing the air bearing surface of a slider row along a line between individual sliders, (ii) flat plate lapping the air bearing surface of the slider row, and (iii) producing a pattern of stress on the back side of the slider row to create positive camber in each individual slider in the slider row.Type: GrantFiled: March 26, 1999Date of Patent: December 16, 2003Assignee: Hitachi Global Storage Technologies Netherlands, B.V.Inventors: Yu-En Percy Chang, Yuri Igor Markevitch, Scott Thomas
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Patent number: 6658723Abstract: Process for collective production of integrated magnetic heads with a supporting surface with a determined height. According to the invention the components of a board are thinned collectively be etching the board along area overlapping polar parts.Type: GrantFiled: March 23, 2000Date of Patent: December 9, 2003Assignee: Commissariat a l'Energie AtomiqueInventors: Jean-Baptiste Albertini, Gérard Barrois
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Patent number: 6655009Abstract: A method of fabricating a second pole piece layer of a write head is constructed using first and second photoresist layers which are sensitive to light with different bandwidths. The second photoresist layer, which is on top of the first photoresist layer, is light exposed with light that excludes light that would change the molecular structure of the first or bottom photoresist layer. After light exposure and development of the second photoresist layer to provide an opening for yoke and back gap portions of the second pole piece layer, the first photoresist layer is light exposed with light that includes the light excluded in the light exposure step of the second photoresist layer. The light exposure of the first photoresist layer and its developing provides the first photoresist layer with an opening for electroplating the second pole tip of the second pole piece layer.Type: GrantFiled: June 11, 2001Date of Patent: December 2, 2003Assignee: International Business Machines CorporationInventors: Bin Huang, Edward Hinpong Lee
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Patent number: 6651312Abstract: A method of manufacturing a composite type thin film magnetic head, in which saturation and leakage of a magnetic flux can be suppressed although a pole portion is miniaturized and throat height, apex angle and MR height can be precisely formed to have desired values, is proposed. A recessed portion is formed in a substrate by using, as a mask, a first magnetic layer. A second magnetic layer and a thin film coil are formed within the recessed portion such that the thin film coil is supported by an insulating layer in an isolated manner. Surfaces of the magnetic layers and the insulating layer are flattened to form a common unit for manufacturing a composite type thin film magnetic head. A third magnetic layer is formed and coupled with the second magnetic layer. A flat write gap layer and a flat fourth magnetic layer are then formed.Type: GrantFiled: July 19, 2000Date of Patent: November 25, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6651313Abstract: In the present method for manufacturing a magnetic write head a focused ion beam (FIB) tool is utilized to mill the side edges of a P2 pole, in order to provide a narrowed track width. Prior to milling, a thin film layer of material is deposited upon the P2 pole tip. The milling boxes of the FIB tool are properly aligned upon the layer with reference to the location of the P2 pole tip. Milling of the lateral edges of the P2 pole tip is then conducted to the appropriate depth, and the layer of material is removed. The resulting P2 pole tip has sharp lateral edges, rather than the rounded edges that are produced in prior art FIB processing methods that do not utilize the thin film layer. In a preferred implementation, the FIB tool is utilized first to deposit the thin film layer and thereafter to perform the milling operation.Type: GrantFiled: October 6, 2000Date of Patent: November 25, 2003Assignee: International Business Machines CorporationInventors: Thomas Young Chang, Michael Andrew Parker
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Patent number: 6648985Abstract: A laminate structure includes an antiferromagnetic layer, a pinned magnetic layer, and a seed layer contacting the antiferromagnetic layer on a side opposite to pinned magnetic layer. The seed layer is constituted mainly by face-centered cubic crystals with (111) planes preferentially oriented. The seed layer is preferably non-magnetic. Layers including the antiferromagnetic layer, a free magnetic layer, and layers therebetween, have (111) planes preferentially oriented.Type: GrantFiled: April 11, 2001Date of Patent: November 18, 2003Assignee: Alps Electric Co., Ltd.Inventors: Masamichi Saito, Naoya Hasegawa, Yosuke Ide, Kenichi Tanaka
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Publication number: 20030210501Abstract: A magnetic head includes a GMR read head that is protected from electrostatic discharge (ESD) on a slider by a silicon germanium (SiGe) integrated circuit device. In a preferred embodiment the SiGe circuit device includes one or more silicon germanium heterojunction bipolar transistors (SiGe HBT) or silicon germanium carbon heterojunction bipolar transistors (SiGeC HBT) that is electrically connected across the electrical leads of the GMR read head. Particular electrical connection configurations with the SiGe circuit devices include diodic modes, npn modes, series cascade modes and two stage ESD network configurations. The silicon chip may be sandwiched between the slider body and the read/write head or the read/write head may be sandwiched between the slider body and the silicon chip.Type: ApplicationFiled: May 10, 2002Publication date: November 13, 2003Inventor: Steven Howard Voldman
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Publication number: 20030204952Abstract: A recording head for use with magnetic recording media has an improved structure, made by a simplified manufacturing process. The electrically insulating materials within the recording head are inorganic. The insulating materials are vacuum deposited, with no need to use a hard bake process that would be required for use of organic insulators. In one embodiment, the write gap is first masked, and then the coil is deposited on the write gap. A slightly larger area is then exposed within the mask, permitting insulation to be deposited over the coil. In a second embodiment, the coil and associated insulation are deposited and then milled to have a tapered configuration. This recording head also places the writing pole on a very flat surface, thereby allowing plated or deposited films to be easily manufactured to correspond to narrow track widths.Type: ApplicationFiled: May 20, 2003Publication date: November 6, 2003Inventors: Billy Wayne Crue, Michael Kevin Minor, Richard Joseph Bojko
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Patent number: 6634087Abstract: A spin valve based magnetic read head that is suitable for use with ultra-high recording densities is described along with a process for manufacturing it. This produces a product that is free of conductor lead bridging and conductor lead fencing. A key sub-process is the deposition of a first capping layer through DC sputtering followed by, without breaking vacuum, a lead overlay layer This is followed by deposition, also by DC sputtering, of a second capping layer which is patterned so that it becomes a hard mask. Then, using this hard mask, the lead overlay layer is removed from the center of the structure by means of ion beam etching. Hard bias and conductor lead layers are then formed inside parallel trenches without the use of liftoff processes.Type: GrantFiled: December 26, 2000Date of Patent: October 21, 2003Assignee: Headway Technologies, Inc.Inventors: Cheng T. Horng, Ru-Ying Tong, Kochan Ju
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Publication number: 20030192168Abstract: A method for forming a bottom spin valve sensor having a synthetic antiferromagnetic pinned (SyAP) layer, antiferromagnetically coupled to a pinning layer, in which one of the layers of the SyAP is formed as a three layer lamination that contains a specularly reflecting oxide layer of FeTaO. The sensor formed according to this method has an extremely high GMR ratio and exhibits good pinning strength.Type: ApplicationFiled: May 13, 2003Publication date: October 16, 2003Applicant: HEADWAY TECHNOLOGIES, INC.Inventors: Min Li, Simon H. Liao, Masashi Sano, Kiyoshi Noguchi, Kochan Ju, Cheng T. Horng
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Patent number: 6631549Abstract: A bottom spin valve sensor employs a seed layer for a nickel oxide (NiO) antiferromagnetic pinning layer for the purpose of increasing magnetoresistance of the sensor (dR/R). The spin valve sensor can be a simple spin valve or an antiparallel (AP) spin valve sensor. In the preferred embodiment the seed layer is tantalum oxide TayOx or copper (Cu).Type: GrantFiled: November 24, 2000Date of Patent: October 14, 2003Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventor: Mustafa Pinarbasi
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Publication number: 20030189801Abstract: In magnetic read heads based on bottom spin valves the preferred structure is for the longitudinal bias layer to be in direct contact with the free layer. Such a structure is very difficult to manufacture. The present invention overcomes this problem by introducing an extra layer between the bias electrodes and the free layer. This layer protects the free layer during processing but is thin enough to not interrupt exchange between the bias electrodes and the free layer. In one embodiment this is a layer of copper about 5 Å thick and parallel exchange is operative. In other embodiments ruthenium is used to provide antiparallel exchange between the bias electrode and the free layer. A process for manufacturing the structure is also described.Type: ApplicationFiled: April 5, 2002Publication date: October 9, 2003Applicant: Headway Technologies, Inc.Inventors: Moris Dovek, Po-Kang Wang, Chen-Jung Chien, Chyu-Jiuh Torng, Yun-Fei Li
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Publication number: 20030182789Abstract: In the method of making a thin-film magnetic head in accordance with the present invention, an alignment mark is electrically connected to a multilayer film which will later become a TMR film. Therefore, when the alignment mark is irradiated with a position correcting electron beam in order to correct a drawing position in the subsequent step of electron beam lithography, electric charges of the electron beam flow into the multilayer film without staying in the alignment mark. As a consequence, the position correcting electron beam does not lose its straightforwardness, whereby the drawing position in electron beam lithography can be corrected accurately.Type: ApplicationFiled: March 6, 2003Publication date: October 2, 2003Applicant: TDK CORPORATIONInventors: Tsuneo Kagotani, Noriaki Kasahara, Hitoshi Hatate, Teruyo Kagotani
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Publication number: 20030182790Abstract: Methods of making a read head with improved contiguous junctions are described. After sensor layer materials are deposited over a substrate, a lift-off mask is formed over the sensor layer materials in a central region which is surrounded by end regions. Ion milling is performed with use of the lift-off mask such that the sensor layer materials in the end regions are removed and those in the central region remain to form a read sensor. A high-angle ion mill (e.g. between 45-80 degrees) is then performed to remove redeposited material from side walls of the lift-off mask Next, a reactive ion etch (RIE) is used to reduce the thickness and the width of the lift-off mask and to remove capping layer materials from the top edges of the read sensor.Type: ApplicationFiled: March 28, 2002Publication date: October 2, 2003Inventors: Richard Hsiao, Wipul Pemsiri Jayasekara, Mustafa Pinarbasi, Patrick Rush Webb
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Publication number: 20030184924Abstract: A TMR element includes: a free layer formed on a lower gap layer; a tunnel barrier layer formed on the free layer; and a pinned layer formed on the tunnel barrier layer. The pinned layer and the tunnel barrier layer have sidewalls formed through etching. The TMR element further comprises a deposition layer made of a material that is separated by etching and deposits on the sidewalls and undergoes oxidation.Type: ApplicationFiled: April 30, 2003Publication date: October 2, 2003Applicant: TDK CorporationInventors: Koji Shimazawa, Satoru Araki
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Publication number: 20030179508Abstract: A magnetic head is made of a shield layer having first and second recesses defined in first and second end regions which surround a central region. Bias and lead layers are formed in the first and the second recesses, and a read sensor is formed in the central region. Advantageously, edges of the bias and lead layers are formed below edges of the read sensor to thereby define a magnetic track width of the read sensor. Also, the sensor profile is substantially flat so that a gap layer over the read sensor can provide for adequate insulation.Type: ApplicationFiled: March 22, 2002Publication date: September 25, 2003Inventor: Hugo Alberto Emilio Santini
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Publication number: 20030179517Abstract: Patterned, longitudinally and transversely antiferromagnetically exchange biased GMR sensors are provided which have narrow effective trackwidths and reduced side reading. The exchange biasing significantly reduces signals produced by the portion of the ferromagnetic free layer that is underneath the conducting leads while still providing a strong pinning field to maintain sensor stability. In the case of the transversely biased sensor, the magnetization of the free and biasing layers in the same direction as the pinned layer simplifies the fabrication process and permits the formation of thinner leads by eliminating the necessity for current shunting.Type: ApplicationFiled: March 22, 2002Publication date: September 25, 2003Applicant: Headway Technologies, Inc.Inventors: Cheng T. Horng, Min Li, Ru-Ying Tong, Yun-Fei Li, You Feng Zheng, Simon Liao, Kochan Ju, Cherng Chyi Han
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Patent number: 6622371Abstract: Provided is a method of manufacturing a thin film magnetic head which enables dimensional control of a pole width and enables reducing the time required to form the pole width. After a top pole chip precursory layer made of iron nitride is formed by sputtering, a surface of the top pole chip precursory layer is polished and flattened. A first mask precursory layer and a photoresist film are formed in sequence on the flattened top pole chip precursory layer. A photoresist pattern having an opening is formed by selectively exposing and patterning the photoresist film by photolithography. The surface of the top pole chip precursory layer is polished and flattened, and thus a surface of the first mask precursory layer formed over the top pole chip precursory layer is also flat. Thus, pattern deformation resulting from light reflected from an underlayer during exposure is prevented, and therefore the opening of the photoresist pattern can be formed with high accuracy.Type: GrantFiled: February 12, 2001Date of Patent: September 23, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Publication number: 20030167625Abstract: A problem associated with current bottom spin valve designs is that it is difficult to avoid magnetic charge accumulation at the edge of the sensor area, making a coherent spin rotation during sensing difficult to achieve. This problem has been eliminated by introducing an exchange coupling layer between the free layer and the ferromagnetic layer that is used to achieve longitudinal bias for stabilization and by extending the free layer well beyond the sensor area. After all layers have been deposited, the read gap is formed by etching down as far as this layer. Since it is not critical exactly how much of the biasing layers (antiferromagnetic as well as ferromagnetic) are removed, the etching requirements are greatly relaxed. Whatever material remains in the gap is then oxidized thereby providing a capping layer as well as a good interface for specular reflection in the sensor region.Type: ApplicationFiled: March 6, 2002Publication date: September 11, 2003Applicant: Headway Technologies, Inc.Inventors: Yun-Fei Li, Hui-Chuan Wang, Chyu-Jiuh Torng, C.C. Han
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Publication number: 20030163913Abstract: A method for manufacturing magnetic sensing elements for use in magnetic sensors and hard disks. A ferromagnetic layer and a second antiferromagnetic layer are deposited on a nonmagnetic layer having a uniform thickness. The second antiferromagnetic layer is milled to form an indent. The resulting magnetic sensing element has a free magnetic layer reliably set in a single-magnetic-domain state in the track width direction.Type: ApplicationFiled: July 11, 2002Publication date: September 4, 2003Inventors: Naoya Hasegawa, Eiji Umetsu
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Patent number: 6609291Abstract: A method of manufacturing a thin film magnetic head including the steps of forming a first magnetic layer, a band-shaped insulating layer, a gap layer, a second magnetic layer, a thin film coil, a third magnetic layer wherein the substrate, pole portions of the first and second magnetic layers and gap layer sandwiched by the magnetic layers to form the air bearing surface which is to be opposed to a magnetic record medium is polished.Type: GrantFiled: June 13, 2000Date of Patent: August 26, 2003Assignee: TDK CorporationInventors: Yoshitaka Sasaki, Atsushi Iijima, Kazumasa Fukuda
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Publication number: 20030156361Abstract: A patterned, synthetic, longitudinally exchange biased GMR sensor is provided which has a narrow effective trackwidth and reduced side reading. The advantageous properties of the sensor are obtained by satisfying a novel relationship between the magnetizations (M) of the ferromagnetic free layer (F1) and the ferromagnetic biasing layer (F2) which enables the optimal thicknesses of those layers to be determined for a wide range of ferromagnetic materials and exchange coupling materials. The relationship to be satisfied is MF2/MF1=(Js+Jex)/Js, where Js is the synthetic coupling energy between F1 and F2 and Jex is the exchange energy between F2 and an overlaying antiferromagnetic pinning layer. An alternative embodiment omits the overlaying antiferromagnetic pinning layer which causes the relationship to become MF2/MF1=1.Type: ApplicationFiled: February 15, 2002Publication date: August 21, 2003Inventors: Min Li, You Feng Zheng, Simon Liao, Kochan Ju
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Publication number: 20030156355Abstract: A magnetic head is configured by forming a thin-film-shaped magnetic element on top of a thin film that is provided parallel to a medium-facing surface. An aperture is formed in the thin film, and part of a main magnetic pole is formed to have a tip portion that protrudes into that aperture. This configuration makes it possible to impose highly accurate control over the amount by which thin-film-shaped magnetic elements are recessed from the medium-facing surface, while simultaneously exerting accurate control over the amount of protrusion of the main magnetic pole tip portion by making the thickness of the thin film extremely small. As a result, the recording flux strength at the main magnetic pole tip portion can be increased to the ultimate value thereof, making it possible to supply a head that can record on a high retention force medium suitable for higher densities.Type: ApplicationFiled: March 18, 2003Publication date: August 21, 2003Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Hiroaki Yoda, Kohichi Tateyama, Yusuke Ohinata
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Patent number: 6606782Abstract: To form a spin valve device, start by forming a gap layer. Form a buffer layer with a layer of refractory material on the buffer layer. Form patterned underlayers including a magnetic material for providing trackwidth and longitudinal bias on the buffer layer comprising either a lower antiferromagnetic layer stacked with a ferromagnetic layer or a Cr layer stacked with a permanent magnetic layer. Form an inwardly tapered depression in the patterned underlayers down to the buffer layer by either ion milling through a mask or a stencil lift off technique. Form layers covering the patterned underlayers that cover the inwardly tapered depression. Form free, pinned, spacer and antiferromagnetic layers. Form conductors either on a surface of the antiferromagnetic layer aside from the depression or between the buffer layer and the patterned underlayers.Type: GrantFiled: March 22, 2002Date of Patent: August 19, 2003Assignee: Headway Technologies, Inc.Inventors: Tai Min, Po-Kang Wang, Moris Musa Dovek
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Publication number: 20030151857Abstract: A flux guide type includes a magnetoresistive device for reading a signal flux, and a flux guide for transmitting the signal flux to the magnetoresistive device, wherein the flux guide includes a laminated film that includes a ferromagnetic layer, a non-magnetic layer and a ferromagnetic layer in this order, and the two ferromagnetic layers in the flux guide have antiparallel directions of magnetization with respect to the non-magnetic layer.Type: ApplicationFiled: October 30, 2002Publication date: August 14, 2003Applicant: FUJITSU LIMITEDInventor: Hitoshi Kishi
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Patent number: 6604275Abstract: A method of manufacturing a thin-film magnetic head, includes the steps of: forming, on a lower auxiliary pole, a three-layer pole tip structure consisting of a lower pole tip element, a recording gap layer and an upper pole tip element; depositing a lower insulating layer on the three-layer pole tip structure; polishing the lower insulating layer by chemical-mechanical polishing so that a top surface of the lower insulating layer is leveled lower than a top of the three-layer pole tip structure over at least a region within which a coil conductor is formed; forming the coil conductor on the lower insulating layer; forming an upper insulating to cover the coil conductor; and forming an upper auxiliary pole so that a part of which contacts to the upper pole tip element.Type: GrantFiled: November 1, 2000Date of Patent: August 12, 2003Assignee: TDK CorporationInventors: Tetsuya Mino, Yasufumi Uno, Koji Matsukuma, Koichi Terunuma, Masahiro Kondo
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Publication number: 20030145453Abstract: The lower electrode is at least exposed at the surface of a substructure layer in a current-perpendicular-to-the-plane structure magnetoresistive element. A resist is formed to extend over the surface of the substructure layer. A patterning void is defined in the resist. The shape of the patterning void is designed to correspond to the contour of the magnetoresistive multilayered film. The magnetoresistive multilayered film is formed by deposition within the patterning void. This method enables avoidance of a dry etching process effected on the magnetoresistive multilayered film. Scrapings or waste of the magnetoresistive multilayered film are not generated at all. The side surfaces of the magnetoresistive multilayered film are completely prevented from attachment or adhesion of scrapings or waste. The side surfaces of the magnetoresistive multilayered film are kept stainless.Type: ApplicationFiled: October 28, 2002Publication date: August 7, 2003Applicant: FUJITSU LIMITEDInventors: Chikayoshi Kamata, Shin Eguchi, Atsushi Tanaka, Tooru Fukuya
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Patent number: 6598289Abstract: A recording head has: a bottom pole layer and a top pole layer that include pole portions; a recording gap layer placed between the pole portions; and a thin-film coil located between the top and bottom pole layers, the coil being insulated from the pole layers. The top pole layer has a pole portion layer and a yoke portion layer. The step of making the yoke portion layer includes the steps of forming a frame made of an insulating material around a region where the yoke portion layer is to be formed; forming a layer including a magnetic material inside and on top of the frame; and forming the yoke portion layer with the layer remaining in the frame by flattening the top surface of the layer including the magnetic material so that the frame is exposed.Type: GrantFiled: September 11, 2000Date of Patent: July 29, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Publication number: 20030137771Abstract: A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS.Type: ApplicationFiled: March 4, 2003Publication date: July 24, 2003Inventor: Hugo Alberto Emilio Santini
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Patent number: 6591480Abstract: A method for fabricating a flux concentrating stitched write head for high data rate applications wherein said flux concentration is achieved by means of a non-magnetic step embedded into a portion of the lower magnetic pole just beneath the write gap layer. The design permits extremely short throat heights, which will be required by future high data rate applications.Type: GrantFiled: May 12, 2000Date of Patent: July 15, 2003Assignee: Headway Technologies, Inc.Inventors: Mao-Min Chen, Pokang Wang, Cherng-Chyi Han
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Patent number: 6591481Abstract: A magnetoresistive device comprises a magnetoresistive element, two bias field applying layers that apply a longitudinal bias magnetic field to the magnetoresistive element, and two electrode layers that are located adjacent to one of the surfaces of each of the bias field applying layers and overlap one of the surfaces of the magnetoresistive element. The magnetoresistive element incorporates a protection layer located on a soft magnetic layer. A sacrificial coating layer is formed on the protection layer. Before forming the electrode layers, the coating layer and an oxide layer, formed through natural-oxidizing part of the top surface of the coating layer, are removed through etching. After the electrode layers are formed, the portion of the protection layer located in the region between the two electrode layers is oxidized, and a high resistance layer is thereby formed.Type: GrantFiled: August 3, 2001Date of Patent: July 15, 2003Assignee: TDK CorporationInventors: Koji Shimazawa, Noriyuki Ito, Koichi Terunuma
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Patent number: 6591478Abstract: The use of a Nd-YAG laser or excimer laser enables easy formation of protrusions on a protecting layer and a portion of an opposite surface near the trailing side end thereof and a thin film element. It is thus possible to avoid direct contact between the thin film element and the disk surface, and thus prevent damage to the thin film element and wearing thereof even if a slider and the disk surface repeatedly slide on each other.Type: GrantFiled: April 14, 1999Date of Patent: July 15, 2003Assignee: Alps Electric Co., LtdInventors: Hirohisa Ishihara, Takao Soma, Tadashi Otagiri, Soichiro Matsuzawa
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Patent number: 6588092Abstract: Method for producing a magnetic head of a pair of magnetic core halves combined with a nonmagnetic layer therebetween including forming a winding window in at least one of a pair of generally flat oxide magnetic plates, forming at least one underlying layer on each oxide magnetic plate, forming a metal magnetic thin film on the underlying layer containing magnetic crystalline particles having average volume Va and average surface area Sa fulfilling the relationship Sa>about 4.64 Va¾, forming a groove in a body including the oxide magnetic plate, underlying layer and metal magnetic thin film, and combining the body with another body including an oxide magnetic plate and a metal magnetic thin film with a nonmagnetic layer therebetween, where the metal magnetic thin film is formed in such a manner to prevent the oxide magnetic plates from cracking due to internal stress generated in the metal magnetic thin film.Type: GrantFiled: December 28, 2001Date of Patent: July 8, 2003Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Nozomu Matsukawa, Masayoshi Hiramoto, Hiroshi Sakakima, Koichi Osano, Eisuke Sawai
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Patent number: 6584676Abstract: A method for finishing a pole tip trimmed read/write heat that includes a substrate with a pole tip structure having a shield, a shield/pole, and an outer pole. A gap region separates the pole and the shield/pole. First, pole tip trimming is performed to the read/write head to remove matter from the shield/pole, the pole, and the gap region. This defines a bridge composed of inward-facing extensions of the pole and shield/pole interconnected by an intervening region. This bridge separates recessed “trenches,” each formed by removing a contiguous mass from the shield/pole, the gap region, and the pole. Next, an overlayer is applied over the pole tip structure, filling the recessed trenches. The coated structure is then trimmed to remove all coating material overlying the shield/pole and pole. Trimming is continued to additionally remove a top layer of the protrusions of the pole and shield/pole to remove any rounded edges created by pole tip patterning, resulting in a more distinct write head.Type: GrantFiled: May 2, 2000Date of Patent: July 1, 2003Assignee: International Business Machines CorporationInventors: Yu-En Percy Chang, Thomas Young Chang, Michael A. Parker
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Patent number: 6581272Abstract: A method for forming a bottom spin valve sensor having a synthetic antiferromagnetic pinned (SyAP) layer, antiferromagnetically coupled to a pinning layer, in which one of the layers of the SyAP is formed as a three layer lamination that contains a specularly reflecting oxide layer of FeTaO. The sensor formed according to this method has an extremely high GMR ratio and exhibits good pinning strength.Type: GrantFiled: January 4, 2002Date of Patent: June 24, 2003Assignee: Headway Technologies, Inc.Inventors: Min Li, Simon H. Liao, Masashi Sano, Kiyoshi Noguchi, Kochan Ju, Cheng T. Horng
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Patent number: 6574854Abstract: A method for forming a magnetic head to solve the curved electrodeposited write gap layer problem by initially fabricating the write gap layer to be wider than the intended final P2 pole tip width. Ion milling the sides of the P2 pole tip structure is then performed to remove the curved outer portions of the write gap layer and to thereby fabricate a P2 pole tip having the desired pole tip width. Specifically, following the electrodepositing of the write gap layer and P2 pole tip thereon, an ion milling step is conducted to remove material from the sidewalls of the P2 pole tip including the write gap layer. The ion milling step is preferably conducted utilizing a broad beam ion milling device that is directed to the surface of the substrate upon which the magnetic heads are being fabricated. Preferably, the ion beam is directed at an angle of approximately 70° away from normal to the substrate surface such that milling of the head side surfaces is efficiently accomplished.Type: GrantFiled: June 27, 2000Date of Patent: June 10, 2003Assignee: International Business Machines CorporationInventor: Timothy J. Moran
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Publication number: 20030093894Abstract: Double photolithography is used to produce an under-layer of protective and filtering photoresist over a substrate that will have channels milled with a FIB. Secondary layers are applied with precision on top of the first layer in order to define the precise patterns to be milled and to provide targeting and alignment fiducials.Type: ApplicationFiled: November 18, 2002Publication date: May 22, 2003Inventors: Matthew P. Dugas, Joseph Tersteeg
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Patent number: 6562251Abstract: A process of chemical-mechanical contouring (CMC) using a stair-step etch involves formation of an elevated layer of substrate overlying a device, in the illustrative example a thin-film magnetic head. The elevated layer of substrate is formed into a stair-step structure with the height and width of the stair-steps selected to attain a predetermined shape and size.Type: GrantFiled: July 26, 2000Date of Patent: May 13, 2003Assignee: AIWA Co., Ltd.Inventor: Steven G. Jordan
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Patent number: 6560853Abstract: A method makes a magnetic head with a zero throat height (ZTH) comprising the steps of forming a first pole piece layer, forming the ZTH defining insulation layer on a first portion of the first pole piece layer, forming an insulation layer on the ZTH defining insulation layer and a first insulation layer on a second portion of the first pole piece layer, forming a coil layer on the first insulation layer so that the ZTH defining insulation layer is located entirely between the coil layer and the ABS, forming at least a second insulation layer on the coil layer, forming the second pole piece over a front portion of a top surface of the ZTH defining insulation layer and on the second insulation layer so that the ZTH defining insulation layer causes the second pole piece to separate from the first pole piece layer and forming the first insulation layer with a thickness that is less than a thickness of the ZTH defining insulation layer so that a pole tip portion of the second pole piece can be frame plated withType: GrantFiled: May 1, 2000Date of Patent: May 13, 2003Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Patent number: 6557242Abstract: A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS.Type: GrantFiled: December 27, 1999Date of Patent: May 6, 2003Assignee: International Business Machines CorporationInventor: Hugo Alberto Emilio Santini
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Patent number: 6558561Abstract: A thin film magnetic head having a particularly short throat height and a fine pole portion with no magnetic saturation and a small magnetic flux leakage is manufactured on a mass scale in an efficient and speedy manner as follows. After forming a lower shield for a magnetoresistive type thin film magnetic head on a substrate, a magnetoresistive layer embedded in a shield gap layer is formed, a first magnetoresistive layer constituting an upper shield for the magnetoresistive type thin film magnetic head as well as a lower pole of an inductive type thin film magnetic head is formed, a recess is formed in its surface, an insulating layer is embedded in the recess, and a surface is flattened. On the thus flattened surface, is formed a write gap layer, and a second magnetic layer constituting a pole chip is formed into a desired pattern. A rear edge of said second magnetic layer is extended inwardly beyond an edge of the recess opposing to an air bearing surface.Type: GrantFiled: February 1, 2002Date of Patent: May 6, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6557241Abstract: A process of forming a combination-type thin film magnetic head on a wafer is disclosed wherein plural polished amount-monitoring elements are formed at the same time as formation of the members which constitute the inductive-type thin film magnetic head. The plural polished amount-monitoring elements each have a different distance from the inside edge opposite to he air bearing surface of the joined surface between a pair of electrode members to the standard position of the zero-throat height. After the magneto-resistive-effective-type thin film magnetic head is formed, the wafer is cut into plural bars, each having plural arranged combination type thin film magnetic head units.Type: GrantFiled: February 23, 2000Date of Patent: May 6, 2003Assignee: TDK CorporationInventor: Yoshitaka Sasaki
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Patent number: 6553649Abstract: A method makes a merged magnetic head that has an air bearing surface and read and write head portions wherein the write head portion has a pole tip, yoke and back gap regions. A method of making the write head comprises steps of forming first and second pole pieces wherein the first pole piece has a first pole tip and the second pole piece has a second pole tip, forming a gap layer which separates the pole tips in the pole tip region and connecting the first and second pole pieces in the back gap region, forming an insulation stack with a write coil embedded therein between the first and second pole pieces in the yoke region and forming the first pole tip with a width at the air bearing surface that defines a track width of the write head portion. The read head portion is formed on the write head portion with a first shield layer which is a common layer with the second pole piece.Type: GrantFiled: April 6, 2000Date of Patent: April 29, 2003Assignee: Hitachi Global Storage Technologies Netherlands BVInventor: Hugo Alberto Emilio Santini
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Patent number: 6555294Abstract: A process for collectively making integrated magnetic heads with a bearing surface obtained by photolithography. According to the process, on a wafer is deposited a plurality of heads, a mask defining the profile of the bearing surfaces and the wafer is collectively engraved in the vicinity of the pole pieces of the heads. Such a process may find particular application to the making of magnetic heads.Type: GrantFiled: January 29, 2001Date of Patent: April 29, 2003Assignee: Commissariat a l'Energie AtomiqueInventors: Jean-Baptiste Albertini, Pierre Gaud, Gérard Barrois, Henri Sibuet
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Patent number: 6550131Abstract: A method for making a thin-film magnetic head with a magnetoresistive layer having a desired shaped to facilitate narrowing of the track width, wherein the surface, in the depth direction, is not curved, and wherein the shape and magnetic anisotropy of each sublayer of the magnetoresistive layer is stabilized to ensure improved reading characteristics.Type: GrantFiled: June 9, 2000Date of Patent: April 22, 2003Assignee: Alps Electric Co., Ltd.Inventor: Kiyoshi Sato
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Publication number: 20030072109Abstract: A magnetoresistive memory element includes a spacer layer; and first and second ferromagnetic layers separated by the spacer layer. The first ferromagnetic layer and the spacer layer form an interface that has been smoothed.Type: ApplicationFiled: November 1, 2002Publication date: April 17, 2003Inventors: Manish Sharma, Janice H. Nickel