Abstract: According to one embodiment, an inkjet head includes a nozzle plate, a base member, a frame-like member, an ink chamber, a supply channel and a discharge channel. The nozzle plate includes nozzles. The base member includes driving elements that cause the ink to be ejected from the nozzles, and is opposed to the nozzle plate. The frame-like member is interposed between the nozzle plate and the base member and includes first opening parts and a second opening part extending over all the first opening parts. The ink chamber is provided inside the frame-like member and communicates with the ink chamber. The supply channel is provided in the base member and communicates with the ink chamber to supply ink. The discharge channel is provided in the base member, communicates with the ink chamber to discharge ink, and is connected to the first opening parts through the second opening parts.

Abstract: Provided are a ballpoint pen tip which can, even if ink having properties which assures that the amount of supply of the ink to the pen tip by shear of a writing ball is sufficient is adopted, prevent partially faint written traces from occurring and provide smooth writing, a ballpoint pen refill, a ballpoint pen, and a method of manufacturing a ballpoint pen tip. A triangular pyramid-shaped recess (42) gradually tapered toward an ink guide hole (36) is provided in the bottom of a ball housing (31), and troughs (44) formed in the recess (42) are utilized as ink reservoirs and ink paths. Because the troughs (44) have sufficient length, width, and depth, the amount of containment of the ink and the amount of supply of the ink are increased.

Abstract: A method of manufacturing an ink jet printhead, including: arranging a nozzle plate in which there is formed a plurality of nozzles, the nozzle plate having an upper surface and a lower surface, the upper surface being on the side of the ejection of ink drops and the lower surface being opposite to the upper surface; depositing on the upper surface a first coating including a first layer including silicon carbide, while maintaining the nozzle plate at a first deposition temperature not larger than 250° C.; depositing on the lower surface a second coating including a second layer including silicon carbide, while maintaining the nozzle plate at a second deposition temperature not larger than 250° C.; positioning the nozzle plate onto the ink barrier layer by bringing into contact the second coating layer with the ink barrier layer. The first layer is deposited before the second layer.

Abstract: A liquid discharge recording head includes: a recording element substrate, an electric wiring board, and a supporting plate that supports the recording element substrate and the electric wiring board, wherein a gap is formed between the recording element substrate and the electric wiring board; the liquid discharge recording head further including: a connecting member that electrically connects, across the gap, an electrode provided in the recording element substrate and an electrode terminal provided in the electric wiring board; and a first resin agent that is filled in the gap, a second resin agent that seals the electrode, the electrode terminal, and the connecting member, and a third resin agent that is provided between the first resin agent and the supporting plate and has a lower modulus of elasticity than the first resin agent and the second resin agent.

Abstract: At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.

Abstract: According to one embodiment, an inkjet head includes a head main body having a plurality of nozzles and drive elements which discharges ink from the plurality of nozzles, a control section which controls the drive elements, and a ceramic base on which the head main body and the control section are arranged. The inkjet head further includes a cover which is formed of a resin in which ceramic particles are mixed, and fixed to the base to cover the control section and hold the control section inside, and an adhesive which is interposed between the base and the cover, and seals an interior of the cover.

Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

Abstract: A charge plate and a method for fabricating a charge plate for an ink jet printhead includes the steps of removing portions of conductive material from a dimensionally stable substrate with a coating of conductive material to form at least a first and second electrode on a first face with a first space between the first and second electrodes, removing portions of conductive material from the dimensionally stable substrate with a coating of conductive material to form a first electrode extension which engages the first electrode on the conductive charging face, and a second electrode extension which engages the second electrode on the conductive charging face, whereby the first and second electrode extensions are electrically isolated from each other, additionally forming a first space between the electrode extensions, which connects with the first space between the electrode extensions.

Abstract: An inkjet printhead includes a substrate having an ink slot formed through its center. Integrated circuitry is formed on both a first side and a second side of the center ink slot. A conductor trace is routed across the ink slot to provide electrical communication between the integrated circuitry on the first and second sides of the slot.

Abstract: An inkjet printhead includes a substrate having a recessed cavity formed therein. The cavity has a continuous sidewall around the perimeter of the cavity. The printhead includes a heating element formed onto the sidewall of the cavity.

Abstract: A fluid cartridge for a printing device includes a housing including a floor, a chamber defined in the housing and configured to store an ink therein, a capillary medium disposed in the housing and in operative communication with the chamber, and a wick disposed at least partially in an opening of the floor, the wick including a portion extending a predetermined distance into the housing such that the wick portion contacts the capillary medium. The fluid cartridge further includes an enriched pigment-confining member established inside the housing such that the confining member physically contacts the floor and surrounds at least a portion of a periphery of the wick. The confining member is configured to i) block enriched ink from the wick, and/or ii) dilute the enriched ink prior to flowing through the wick.

Abstract: A method for manufacturing a liquid ejection head having an ejection port-forming member in which an ejection port configured to eject liquid is formed, includes the steps of preparing a substrate including a base substrate; a first layer composed of a resin composition not containing a polymerization initiator but containing a compound that can be polymerized by irradiation with active energy rays under the presence of the polymerization initiator; and a second layer composed of an active energy ray-curable resin composition containing the polymerization initiator; pressing a mold, on which a pattern of the ejection port has been formed, against the first layer and the second layer; irradiating the second layer with the active energy rays while the mold is being pressed against the first layer and the second layer; bonding the second layer to another supporting substrate; and detaching the base substrate.

Abstract: A sub-carriage includes a housing unit that houses at least part of each of multiple recording heads, and a head passage opening and an upper opening serving as opening portions through which the housing unit passes. A flow channel anchoring member for anchoring a flow channel member is attached to the sub-carriage so as to span across the aforementioned opening portions, and each of the recording heads is sequentially anchored to the sub-carriage to which the flow channel anchoring member has been attached.

Abstract: A method of manufacturing a liquid discharge head including a plurality of passages on a substrate, the passages communicating with a plurality of discharge ports configured to discharge liquid. The method includes the step of forming first, second, third, and fourth members, the first member having a shape of one passage, the second member having a shape of another member, the third member being formed near the first member, the fourth member being formed near the second member, the first to fourth members being formed on a surface of the substrate. The method also includes coating the substrate with a cover layer covering the first to fourth members, removing the first member to form the one passage, and removing the second member to form the another passage.

Abstract: A manufacturing method for manufacturing a liquid ejection element including a liquid flow path which is open at an ejection outlet for ejecting liquid, and an energy generating member for generating energy usable for ejecting the liquid from liquid flow path through the ejection outlet, the manufacturing method, includes a step of forming the energy generating member on a front side of a substrate; a step of forming a top plate member on the side having the energy generating member formed by the energy generating member forming step, wherein the top plate member is a member in which the liquid flow path and the ejection outlet are formed; and a step of thinning the substrate, having the top plate member formed thereon by the top plate member forming step, from a back side thereof.

Abstract: A manufacturing method, for a liquid discharge head that includes a silicon substrate in which a supply port is formed for supplying a liquid, includes the steps of providing the silicon substrate, a mask layer provided with an opening that corresponds to the supply port being provided on one face of the silicon substrate; forming a groove in the silicon substrate along the shape of the opening in the mask layer; removing, via sandblasting, silicon of the silicon substrate inward of the groove in the silicon substrate; and performing, from the one face, anisotropic etching of the silicon substrate that has been sandblasted, and forming the supply port.

Abstract: A method of supplying ink to ink ejection nozzles on a printhead for an inkjet printer with a print engine controller for controlling the printhead operation involving the provision a printhead IC having an array of the ink ejection nozzles formed on a substrate, the provision of circuitry for electrical connection to the print engine controller, the provision of a support member for supporting the printhead integrated circuit and the circuitry within the printer, the provision of a thermoplastic polymer sealing film, and securing the polymer film to a mounting surface of the support member by applying heat and pressure for a predetermined time, mounting the printhead integrated circuit and the circuitry to the support member via the polymer film and, electrically connecting the circuitry to the printhead integrated circuit. The mounting surface has ink feed channels formed in it and the polymer film is attached to the mounting surface between the ink feed channels and the printhead integrated circuits.

Abstract: A modular micro-fluid ejection device includes a carrier frame supporting pluralities of micro-fluid ejection modules. Each of the modules has a plate of nozzles defining a plane. Adjacent nozzle plates are substantially coplanar and registered with one another across the entirety of the carrier frame. Methods to mount the modules to the frame include, first, temporarily mounting one module and then another, and then permanently mounting both with a durable adhesive. Manufacturing systems include suction devices to hold a first module in place on a fixture while later modules are suctioned and registered to each other. Once set in place, a carrier frame is commonly contacted to the modules and the suction to released. Adhesives between the frame and modules cause the modules to separate from the fixture and transfer to the frame. All remain properly registered upon transfer.

Abstract: A method for manufacturing a ferroelectric member element structure having a ferroelectric member film, and lower and upper electrodes between which the ferroelectric member film is sandwiched, includes the steps of: forming a buffer layer having pattern-shaped oriented growth on a monocrystal substrate; performing oriented growth of the lower electrode layer on the buffer layer; performing oriented growth of the ferroelectric member film to cover the buffer layer and the lower electrode layer; and removing a portion of the ferroelectric member film other than the portion having the oriented growth achieved along the pattern of the buffer layer, by means of an etching treatment.

Abstract: Inkjet printheads and methods of manufacturing the inkjet printhead are disclosed. The inkjet printhead may include a glue layer disposed between the substrate and a chamber layer. The glue layer may contain a crosslink inhibitor that inhibits cross linkage of a photosensitive resin during an exposing process.

Abstract: Disclosed is a printhead having at least one ink drop generator region, which includes an ink chamber, an orifice through which ink drops are ejected, and a heating element positioned below the ink chamber. The heating element includes a resistor defined therein and a nano-structured surface that is exposed to the ink fluid supplied to the ink chamber. The nano-structured surface takes the form of an array of nano-pillars. The printhead is fabricated by a method that includes: forming a heating element having an oxidizable metal layer as the uppermost layer; forming an aluminum-containing layer on the oxidizable metal layer; anodizing the aluminum-containing layer to form porous alumina; anodizing the oxidizable metal layer so as to partially fill the pores in the porous alumina with metal oxide material; and removing the porous alumina by selective etching to produce a nano-structured surface.

Abstract: A liquid discharge head includes a recording element substrate including an energy generation element for generating energy used to discharge a liquid and a terminal electrically connected to the energy generation element, and an electric wiring board including an electrode electrically connected to the terminal via a wire to transmit an electric signal supplied from outside to the energy generation element, wherein the terminal has an area twice or more larger than a contact area between the terminal and the wire and the electrode has an area twice or more larger than a contact area between the electrode and the wire.

Abstract: An inkjet pen includes a printhead firing chamber, a nozzle plate having at least one nozzle in fluid communication with the firing chamber, and a layer of shipping fluid within the firing chamber and covering the nozzle plate and the at least one nozzle. The shipping fluid has a density that is different than that of the ink that will be ejected from the firing chamber to form an image on media.

Abstract: An assembly method of a liquid discharge head is provided. The liquid discharge head includes an element substrate, an electrode portion, a flexible wiring member which has the element substrate at one end and the electrode portion at another end, and includes a plurality of bent portions, wherein, each edge line of at least two bent portions are not parallel and a housing. The assembly method includes a step for providing the flexible wiring member and the housing in which the element substrate is fixed on a first surface of the housing, a step for fixing the flexible wiring member on a second surface of the housing while holding the electrode portion at a position on a third surface of the housing where the electrode portion to be fixed, and a step for fixing the electrode portion to the position.

Abstract: A manufacturing method for an ink jet recording head. The method includes the steps of preparing a recording element substrate, preparing an electric wiring member, preparing a sealing material discharging member, and applying a sealing material. The ink jet recording head is constructed to provide a first gap between a recording element substrate and an inner edge of a hole. The first gap is larger than a second gap between the recording element substrate and an opposite inner edge of the hole measured along the same line. The sealing material is applied while moving the sealing material discharging member, along the line, from a portion of an electric wiring member adjacent to the first gap, across the first gap, across the electrical connection portions, across the second gap, to a portion of the electric wiring member adjacent to the second gap.

Abstract: A method of hydrophilizing surfaces of an ink pathway configured for supplying ink to nozzles in an inkjet printhead. The method includes the steps of: treating the surfaces of the ink pathway with a solution comprising an alkoxylated polyethyleneimine; and drying the surfaces.

Abstract: A print head has a jet stack having an array of jets, an array of transducers arranged on the jet stack such that each transducer corresponds to a jet in the array of jets, and a flexible circuit substrate arranged adjacent the array of transducers such that contact pads on the flexible circuit substrate make electrical connection to at least some of the array of transducers, the flexible circuit substrate being embossed so that the contact pads extend out of a plane of the flexible circuit substrate.

Abstract: A method for hydrophilizing surfaces of a printhead assembly includes decontaminating the printhead assembly; plasma activating the surfaces of the printhead assembly; treating the surfaces of the printhead assembly with a treatment solution; drying the printhead assembly; baking the printhead assembly; and performing a print quality and electrical test on the printhead assembly. The step of decontaminating the printhead assembly is performed before the step of plasma activating the surfaces of the printhead assembly.

Abstract: An alignment jig for a liquid-jet head, which is used when positioning and joining a nozzle plate and a fixing member, the nozzle plate having nozzle orifices for jetting a liquid of the liquid-jet head and an alignment mark for alignment, the fixing member being adapted to hold a plurality of the liquid-jet heads, the alignment jig comprising a mask which is a transparent member provided with a reference mark for alignment with the alignment mark, the reference mark being formed within the mask.

Abstract: A method of forming a nozzle chamber of a printhead includes steps of forming a first laminate of sacrificial layers on a substrate, the first laminate of sacrificial layers being formed as a ring on the substrate; photoimaging the first laminate of sacrificial layers to cause edges thereof to angle inwards, forming an approximate trapezoidal cross-section; depositing a TiN layer over the first laminate of sacrificial layer and the substrate, the TiN layer being inclined at portions deposited over the inwardly angled edges; etching the TiN layer to form a paddle and a nozzle chamber rim, the paddle incorporating an inner inclined portion and the nozzle chamber rim incorporating a complementary outer inclined portion, the paddle and nozzle rim defining an aperture therebetween; and removing the one or more sacrificial layers.

Abstract: Systems, methods and structures for remanufacturing inkjet printer cartridges and inkjet printer print heads by removing the print head and adhesive holding the print head to a used inkjet printer cartridge, preparing the cartridge housing for a new print head by routing out the used print head and used adhesive to create a new mounting surface for new adhesive and a new print head, placing the adhesive and new print head on the new mounting surface, curing the adhesive and assembling a re-manufactured cartridge from the cartridge housing having a new print head positioned thereon.

Abstract: The present invention provides an ink-jet head which comprises an ink supply channel configured to allow ink to flow, two or more ink chambers each having a bottom surface with a nozzle and an upper surface constituting of a vibrating plate, the two or more ink chambers being arranged in a row along a direction in which the ink flows in the ink supply channel, a partition wall partitioning the ink chambers. and a piezo-mounting plate having two or more multilayer piezoelectric elements and two or more columns fixed thereto. The two or more multilayer piezoelectric elements are arranged in a row, and the two or more columns are arranged between the multilayer piezoelectric elements. And also, the piezo-mounting plate is arranged on the upper surface of the ink chambers. In the ink-jet head, the vibrating plate constituting the upper surface of the ink chamber is held between the partition wall and the column.

Abstract: The invention provides, between a discharge element substrate and a supply member, a support member containing a mixture that contains: a material having an affinity for a material forming the supply member; and another material.

Abstract: A liquid discharge head includes a recording element substrate including an energy generating element, a wiring substrate including wiring, a support substrate for supporting the recording element substrate and the wiring substrate so that a side end portion of the recording element substrate and a side end portion of the wiring substrate are adjacent to each other, and a sealing member, wherein the side end portion of the wiring substrate has a step portion, a distance between a second portion of the step portion on the side opposite to the support substrate and the side end portion of the recording element substrate is larger than a distance between a first portion of the step portion on the side of the support substrate and the side end portion of the recording element substrate, and a part of the wiring is formed in the first portion.

Abstract: A fluid handling structure for a lithographic apparatus is disclosed. The fluid handling structure has, on an undersurface, a liquid supply opening or a plurality of liquid supply openings and a liquid extraction opening or a plurality of liquid extraction openings arranged such that, in use, liquid is provided on and removed from the undersurface of the fluid handling structure.

Abstract: Disclosed are an inkjet print head and a method of manufacturing the same. An inkjet print head according to an aspect of the invention may include: an inkjet board having an ink passage therein; a cutting portion provided outside the ink passage of the inkjet board and having a cutting surface created by separation into head chip units of the inkjet board; and an auxiliary cutting portion provided from one surface of the cutting portion inwardly in a thickness direction of the inkjet board, and assisting the separation into head chip units of the inkjet board.

Abstract: There is provided a method of manufacturing an inkjet head. A method of manufacturing an inkjet head according to an aspect of the invention may include: forming a piezoelectric actuator on a dummy substrate; cutting the piezoelectric actuator into head cell units of an inkjet head; preparing an inkjet head substrate including an ink chamber formed at a position corresponding to the piezoelectric actuator; bonding the dummy substrate and the inkjet head substrate to each other so that the piezoelectric actuator and the ink chamber correspond to each other; and removing the dummy substrate.

Abstract: A method of manufacturing a printhead includes providing a substrate and a filter membrane structure. A first portion of the substrate defines a plurality of nozzles and a second portion of the substrate defines a plurality of liquid chambers. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a respective one of the plurality of nozzles. The filter membrane structure is adhered, for example, laminated, to the second portion of the substrate. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a distinct portion of the filter membrane structure. Pores are formed in the filter membrane structure using a photo-lithography process.

Abstract: A nozzle plate component manufactured by forming a layer of photoresist on a substrate and selectively exposing and removing material to define an array of distinct bodies. Nickel is then electroformed around the bodies to form a plate, with nozzles subsequently formed by ablation through the photoresist. The process can essentially be repeated to form a guard structure around each nozzle.

Abstract: An inkjet printhead, in particular for sewing/embroidering machines, includes a support structure; a plurality of firing cells included in the support structure, each firing cell being adapted to eject ink through a respective nozzle for coloring a thread to be used in a sewing/embroidering machine; a guide element, provided on the support structure, for guiding the thread in a position facing said nozzles. Also disclosed are a sewing/embroidering machine including the printhead and a method for making the printhead.

Abstract: A method is provided for manufacturing an ink jet recording head including a reservoir to which ink is supplied from outside, a pressure generating chamber leading to the reservoir, and a nozzle orifice leading to the pressure generating chamber. According to the method, the ink jet recoding head is fabricated by conducting semiconductor processes such as a film forming step, a photolithography step, an etching step and the like, on a single substrate. Thus, there is no need for multiple substrates or adhesives.

Abstract: An ink jet head producing method includes forming a first flow path forming member in a portion constituting a flow path side wall, which constitutes at least a partitioning portion between flow paths on a substrate; forming a pattern as a mold for the flow path, the pattern being formed over the substrate and a portion of the first flow path forming member; forming a second flow path forming member on the first flow path forming member and the pattern, the second flow path forming member being formed of a material corresponding to the first flow path forming member; forming the discharge port in the second flow path forming member; and forming the flow path by removing the pattern.

Abstract: Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers.

Abstract: A method of assembling an inkjet printhead, the method comprising the steps of providing a die mount substrate including a die mount surface, an ink receiving surface, a first end wall having a latchable projection and a second end wall having an extension; providing a printhead die including at least one nozzle array and a plurality of bond pads; attaching the printhead die to the die mount surface of the die mount substrate; providing a wiring member; adhering a portion of the wiring member to the die mount surface of the die mount substrate; electrically interconnecting the wiring member to the bond pads of the printhead die; providing a printhead frame including an ink delivery surface, a latch and a bracket; inserting the extension from the second end wall of the die mount substrate into the bracket; providing a sealing member between the ink receiving surface and the ink delivery surface; and closing the latch to engage the latchable projection of the die mount substrate.

Abstract: A liquid ejection head including: a base plate member having ejection holes and an ejection face having ejection openings; and an actuator; wherein the ejection face has first and second recessed portions extending in one direction and arranged in a perpendicular direction, wherein the ejection openings are formed in bottom portions of the respective first recessed portions; wherein each second recessed portion and a corresponding first recessed portion are arranged side by side such that a separation distance therebetween is not smaller than a separation distance between two first recessed portions located side by side at the shortest distance among first recessed portions and is shorter than a separation distance between two first recessed portions located side by side at the greatest distance among the first recessed portions; and wherein on the bottom portions is formed a liquid repellent layer having not been removed due to a masking material having entered into the first recessed portions to cover the l

Abstract: An inkjet head includes a plurality of nozzles through which ink is dischargeable out of the inkjet head, a pressure chamber plate that is made of metal, a plurality of pressure chambers that are groove portions formed in the pressure chamber plate for applying to the ink a pressure that is necessary in order to discharge the ink from the plurality of nozzles, an actuator that faces a first face of the pressure chamber plate and that includes a plurality of pressure generating portions, and a pressure chamber support member that supports the pressure chamber plate from a second face of the pressure chamber plate, the second face being an opposite face to the first face, and that is made from a material that has a Young's modulus that is greater than a Young's modulus of a material from which the pressure chamber plate is made.

Abstract: A method for manufacturing a liquid ejecting head, that has piezoelectric elements and offers a good displacement characteristic, including forming a first electrode film on a flow channel substrate; forming a first ferroelectric film on the first electrode film; etching the first ferroelectric film and the first electrode film with a resist film formed on the first ferroelectric film as the mask; removing the resist film by ashing with oxygen plasma; forming a protective resist film so as to cover the central portion of the substrate; removing partly the resist film by ashing with oxygen plasma; removing the resist film and the protective resist film by treatment with an organic remover; forming additional ferroelectric films; forming a second electrode film; and shaping the second electrode film and the ferroelectric films other than the first ferroelectric film into a certain pattern

Abstract: A method of manufacturing a liquid discharging head which includes a flow path forming member which has a discharge port for discharging a liquid and a liquid flow path communicating with the discharge port, and a base body having a liquid supply port which supplies the liquid flow path with the liquid, the method includes (1) forming a mold of the liquid flow path and a foundation member formed of a porous inorganic material over the base body, (2) applying an organic resin over the base body so as to cover the mold and the foundation member to form the flow path forming member, (3) forming the discharge port in the flow path forming member to form the liquid supply port in the base body, and (4) removing the mold to form the liquid flow path.

Abstract: A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. The method of manufacturing a liquid ejection head includes: a step of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a step of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a step of forming ink ejection openings in the silicon substrate; and a step of removing the porous silicon areas.

Abstract: This manufacturing method includes a passage forming process, in which a liquid passage including at least a pressure generating chamber 12 is formed in a passage forming substrate 10 (110), a first bonding process, in which an adhesive is applied on one side of the passage forming substrate 10, in which the liquid passage opens, so as to form a first adhesion layer 201 and a nozzle plate 120 is bonded by the first adhesion layer 201, and a second bonding process, in which an adhesive is applied on the other side of the passage forming substrate 10 so as to form a second adhesion layer 202 and a compliance substrate 40 is bonded by the second adhesion layer 202, the second bonding process being executed after the first bonding process.