Abstract: In a substrate stage device, a substrate is held by a substrate support member mounted on a Y step surface plate. The substrate support member moves in the scanning direction in long strokes on the Y step surface plate. The part corresponding to an exposure area of the substrate is held by suction in a non-contact manner from below by a fixed point stage, and other parts are supported by levitation by the plurality of air floating devices placed on the Y step surface plate. The part corresponding to the exposure area of the substrate is controlled so that surface position of the substrate is located in the depth of focus of the projection optical system by the fixed point stage.

Abstract: A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage.

Abstract: A system has a circuit substrate having conductive traces in a first layer of the substrate, the traces arranged in independent zones, a diamagnetic layer residing on a surface of the circuit substrate, at least two manipulators residing adjacent the magnetic layer, the manipulators being moveable within the zones, the manipulators being magnetic and controllable through magnetic fields, and a controller electrically coupled to the traces arranged to produce signals to generate magnetic fields.

Abstract: A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.

Abstract: A stage comprising a first translation platform having a first axis of motion, and a second translation platform having a second axis of motion, a first linear drive motor for driving the first translation platform in the first axis of motion, and a second linear drive motor for driving the second translation platform in the second axis of motion, wherein each linear drive motor further comprises a coil assembly enclosing a rod stator, and wherein the coil assembly is fixed and the rod stator is movable within the coil assembly.

Abstract: A planar motor includes a flat base element arranged in a plane, and substantially cuboidal first magnets arranged on the base element whose magnetization is perpendicular to the plane and which are arranged at evenly spaced intervals and with alternating polarity in a first direction and in a second direction. The planar motor also includes substantially cuboidal second magnets whose magnetization is parallel to the plane and which are disposed with alternating polarity in the first direction and second direction between the first magnets, so that each first magnet is surrounded by four second magnets. The first magnets are disposed on protrusions of the base element.

Abstract: The moving magnet type linear motor according to the present invention comprises a stator comprising a plurality of coils arranged in a single direction and having a both ends support structure supporting both ends of the stator in a direction perpendicular to said single direction, a pair of movers comprising a plurality of permanent magnets arranged opposing the sides of the stator respectively and capable of relative movement in said single direction with respect to each other, and guidance mechanisms guiding both the movers independently and movably in said single direction, and one of the movers is connected to a load.

Abstract: An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Abstract: Methods and apparatus for providing an efficient oval coil planar motor are disclosed. According to one aspect of the present invention, an electromagnetic actuator includes at least a first coil group, at least a second coil group, and a magnet array. The first coil group includes at least a first coil that is of an elongated toroidal shape. The first coil has a first coil length and a first coil width that is approximately equal to a multiple of three times the first coil width. The second coil group includes at least a second coil that is of an elongated toroidal shape. The second coil has a second coil width and a second coil length that is approximately equal to a multiple of three times the second coil width. The second coil group is approximately adjacent to the first coil group. The magnet array is configured to cooperate with the first and second coil groups, and includes a plurality of magnets.

Abstract: The present invention provides a linear motor where a load onto a supporting mechanism and the ripple of force are lessened and the ripple can be adjusted. As a leakage flux between the magnetic poles can be reduced by being configured by plural magnetic poles arranged with a magnet arranged on a mover held between them, a core that continuously connects the magnetic poles that holds the magnet of the mover between them, windings are integrally wound onto the plural magnetic poles and the mover formed by a row of magnets the magnetic poles of which are alternately arranged or a row of magnets the polarity of which is alternately arranged and magnetic materials, by arranging the plural magnetic poles arranged with the magnet held between and the plural magnetic poles provided with the core that continuously connects the magnetic poles.

Abstract: A lithographic apparatus including a uniformity correction system is disclosed. The lithographic apparatus comprises an illumination system configured to condition a beam of radiation. The illumination system comprises a uniformity correction system located at a plane configured to receive a substantially constant pupil when illuminated with the beam of radiation. The uniformity correction system includes fingers configured to be movable into and out of intersection with a radiation beam so as to correct an intensity of respective portions of the radiation beam. A linear motor actuator arrangement drives the fingers to their respective appropriate positions to compensate for non-uniform illumination. Control is provided by a control system that precisely manipulates carriers of the fingers.

Abstract: This stage apparatus includes a movable table to hold a sample, a levitation unit to operate the movable table at least in a vertical direction, and a linear motor to operate the movable table in a first horizontal direction in a horizontal plane, including a linear motor movable element arranged inside the movable table and a linear motor stator arranged inside the movable table.

Abstract: The stage device of the present invention includes a linear motor having a coil and a plurality of permanent magnets, a current driver that supplies current to the coil, and a control section that generates a command for the current driver. The control section generates the command through commutation processing in which a sinusoidal wave using an electrical angle obtained by calculation based on the relative position between the coil and the permanent magnet is multiplied by a thrust force command value for the linear motor, and further ensures that a sinusoidal wave component, which has an amplitude proportional to a thrust force command value and is 90 degrees out of phase from the sinusoidal wave, is included in the command.

Abstract: A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.

Abstract: The invention relates to a cover (20) for a secondary part (2) of an electrical linear motor (1), wherein the secondary part (2) includes at least one first and one second secondary partial element (12), and wherein each secondary partial element (12) comprises a toothed profile, and wherein the cover (20) extends over the toothed profiles of the first and second secondary partial elements (12), forming a continuous surface. The invention further relates to a secondary part (2) comprising a cover (20) and a linear motor (1) comprising a secondary part (2) and a cover (20).

Abstract: A linear motor is provided with a stator, a slider disposed to be movable relatively with respect to the stator with a gap, and a non-magnetic plate mounted to either one of the stator and the slider so as to define the gap between the stator and the slider.

Abstract: A system has a circuit substrate having conductive traces in a first layer of the substrate, the traces arranged in independent zones, a diamagnetic layer residing on a surface of the circuit substrate, at least two manipulators residing adjacent the magnetic layer, the manipulators being moveable within the zones, the manipulators being magnetic and controllable through magnetic fields, and a controller electrically coupled to the traces arranged to produce signals to generate magnetic fields.

Abstract: A method of propelling a magnetic manipulator above a circuit substrate includes arranging a magnetic manipulator on a diamagnetic layer on a surface of the circuit substrate, generating drive signals using a controller, and applying the drive signals to at least two conductive traces arranged in the circuit substrate below the diamagnetic layer. A circuit substrate to control movement of a magnetic manipulator has a diamagnetic layer on a surface of the substrate, and conductive traces arranged under the diamagnetic layer, the conductive traces arranged in a parallel line pattern in at least two separate layers.

Abstract: A linear motor includes a field magnet and an armature. The field magnet includes a pair of opposing field magnet yokes. A yoke base is disposed on a first end of each field magnet yoke in a Y axis direction. Between the field magnet yokes, a first magnet row is disposed including, along an X axis direction, a plurality of opposing pairs of first magnets having different polarities. Between the field magnet yokes, a second magnet row is disposed to a first side or a second side of the first magnet row in the Y axis direction. The second magnet row includes a pair of opposing second magnets having different polarities and forming a single row in the Y axis direction on the field magnet yokes. The armature includes a first armature coil opposite the first magnet row and a second armature coil opposite the second magnet row.

Abstract: An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

Abstract: Provided is a linear motor actuator which generates a sufficient thrust force and a retaining force and is remarkably smaller than conventional linear motor actuators. The linear motor actuator includes a base member (1) provided with a bottom plate (10) and a pair of side walls (11) and formed in a channel shape; a track rail (2) laid on the bottom plate along a longitudinal direction of the base member; a slide table (3) moving along the track rail; stator magnets (40) arranged on an inner side surface of each of side walls of the base member; and a pair of coil members (41) mounted to the slide table and opposed to the stator magnets provided to each of the side walls of the base member, thereby constituting a linear motor (4).

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract: A multi-degree-of-freedom actuator includes a movable element having a plurality of permanent magnets, and a stator including a stator core and a plurality of coils. The permanent magnets are arranged in the X direction such that the number P of poles is an even number of two or more. The coils are of two types: X-direction driving coil and Z-direction driving coil. The Z-direction driving coils the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets. The X-direction driving coil or coils the number of which is P/2 are each disposed at a position opposite to an intermediate point between two adjacent ones of the magnetic poles of the permanent magnets.

Abstract: A thrust generation mechanism comprising magnetic pole teeth which are arranged so as to sandwich and hold permanent magnets disposed on movers, cores which serially connect the magnetic pole teeth which sandwich and hold the magnets, armature winding wires which are collectively wound around the cores, and the movers having the magnets arranged such that the different magnetic poles thereof alternately face the front side and the rear side. The magnetic pole teeth which are arranged so as to sandwich and hold the permanent magnets and the armature iron cores which have cores serially connecting the magnetic pole teeth which hold the magnets are arranged in the longitudinal direction of the movers, and armature iron cores have a common winding wire.

Abstract: A sliding system with onboard moving-coil linear motor is disclosed in which an armature assembly is a printed-circuit board, armature windings of flat configuration and coil stay having a stay and any number of cores made integral with the stay. The armature assembly is held by virtue of the stay at a preselected location inside an interval defined between field magnet arrays and, therefore, is small and compact in height in transverse section. A bed formed in an angled hook-like configuration in a transverse section contributes to shrinkage of the sliding system in either of height and width in transverse section or most compactness of the sliding system in transverse dimension. Moreover, the bed can be selected in length at discretion according to the purpose of usage to provide any desirable stroke length for a single table of a preselected length, getting the sliding system convenient for usage.

Abstract: A planar stage moving apparatus for a machine includes: first to fourth linear motors for applying, between a base, i.e. a fixed body and a table, i.e. a movable body, a movement force to the table, each linear motor including a stator core on which a coil is wound and which is fixed to the base and a mover core to which a permanent magnet is attached and which is fixed to the table; an air bearing unit provided between the base and the table to move the table under the influence of magnet fields when currents are applied to the coils of the linear motors; and a linear encoder installed on one side of the table to measure movement of the table.

Abstract: A moving device comprises at least a first element provided with main magnets and a second element provided with coils. The main magnets are arranged in a grid of rows and columns, wherein main magnets in adjacent rows are oppositely polarised and staggered relative to each other. The coils can be energized for moving the first element relative to the second element in a direction parallel to the rows as well as in a direction parallel to the columns. Auxiliary magnets of the same polarity are disposed between the main magnets at least in a number of rows, wherein the strength of the magnetic field of said auxiliary magnets is different from that of the main magnets.

Abstract: A Linear Tape Motors sequentially bends flexures to precisely position a payload within a large, linear range. Movement is backlash free. Flexure bending is also used to drive large forces, using efficient mechanical advantage, anchor the Tape Motor against back-slipping and prevent sticking and jamming malfunctions. Existing permanent magnet motor drive technology can be easily adapted to energize and control the flexure bending motions. Combining flexures with rare earth permanent magnets, provides ultra compact Linear Tape Motors with very high power and force densities that hold position with power off. Their operating range can be is as long as required. Thus, Linear Tape Motors are attractive for space science instruments, where precision positioning in ultra cold operating conditions is required and where low mass and low power are premium.

Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.

Abstract: A stage comprising a first translation platform having a first axis of motion, and a second translation platform having a second axis of motion, a first linear drive motor for driving the first translation platform in the first axis of motion, and a second linear drive motor for driving the second translation platform in the second axis of motion, wherein each linear drive motor further comprises a coil assembly enclosing a rod stator, and wherein the coil assembly is fixed and the rod stator is movable within the coil assembly.

Abstract: A linear guide with an integrated linear motor, the linear guide having a stationary support extending in a guide direction, a table movable in the guide direction and a linear motor. The linear motor includes 1) a movable element connected with the table, 2) a stationary element connected with the stationary support and contactless bearings between the stationary support and the table and 3) an electromagnetic positioner based on electromagnetic interaction for positioning the table transversely in relation to the guide direction. The linear guide includes an integrated position-measuring system having a scale and scanning heads which detect a position of the table in the guide direction and a deviation direction, which lies transversely in relation to the guide direction and parallel in relation to a plane of an air gap of the linear motor. The electromagnetic positioner acts in such a way so that the table is positioned in the deviation direction.

Abstract: The invention relates to a linear drive for a machine tool having a housing, having a carriage, which is mounted so it is axially movable in the housing via two bearings, and has a central axis and a length, and having at least one first motor, having a first motor element and a second motor element, wherein said first motor element is disposed on said carriage and said second motor element is disposed on said housing, wherein said first motor element is implemented on said carriage as a primary part and said second motor element is implemented on said housing as a secondary part. Furthermore, the invention relates to a method for moving a carriage for a lathe tool of a highly-dynamic machine tool employing a crossed roller bearing for mounting the carriage, wherein all roller bodies of said crossed roller bearing are always operationally linked to a carriage-side bearing surface, and said carriage is driven at an oscillation frequency of at least 50 Hz, in particular between 60 Hz and 200 Hz.

Abstract: A planar motor includes a movable body and a stator configured to drive the movable body in a plane. The stator includes a first stator unit and a second stator unit. The movable body is moved in a first direction by a force acting between the movable body and the first stator unit, and is moved in a second direction by a force acting between the movable body and the second stator unit. The first stator unit and the second stator unit are arranged to face each other in such a manner that the movable body is provided therebetween.

Abstract: A multi-degree-of-freedom actuator includes a movable element having a plurality of permanent magnets, and a stator including a stator core and a plurality of coils. The permanent magnets are arranged in the X direction such that the number P of poles is an even number of two or more. The coils are of two types: X-direction driving coil and Z-direction driving coil. The Z-direction driving coils the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets. The X-direction driving coil or coils the number of which is P/2 are each disposed at a position opposite to an intermediate point between two adjacent ones of the magnetic poles of the permanent magnets.

Abstract: A shake correction apparatus of a camera, includes a stationary support board; an electrical board movable relative to the stationary support board; an image pickup device supported by the electrical board and including leads made of a magnetic material which are arranged on a periphery of the image pickup device to electrically connect the image pickup device to the electrical board; at least one drive coil which moves with the electrical board; at least one magnet provided on a surface of the stationary support board which faces the electrical board, and positioned around the image pickup device and the leads as viewed from the front thereof, the magnet exerting a magnetic force on the drive coil; and at least one magnetic cover, made of a magnetic substance, for covering a portion of the magnet which faces the leads.

Abstract: A motor is provided comprising a magnet assembly having two rows of magnets arranged along a first axis, which are separated by a gap for generating magnetic flux lines between the rows of magnets. The motor further comprises a coil bracket which is located within the gap between the two rows of magnets. The coil bracket includes a first set of coils arranged along the first axis that are operative to drive movement of the coil bracket relative to the magnet assembly along the first axis. A second set of coils arranged along the first axis are operative to drive movement of the coil bracket relative to the magnet assembly along a second axis which is orthogonal to the first axis between a first end position and a second end position along the second axis.

Abstract: A supporting apparatus supports a movable element by a bearing. The apparatus has a moment reducing unit that exerts a force on a portion of the movable element, which is different from a portion supported by the bearing. The moment reducing unit reduces a moment that acts on the movable element when the portion of the movable element, which is supported by the bearing, changes as the movable element moves. This stabilizes the attitude of the movable element.

Abstract: A linear motor is provided with a first member including a magnet and a second member including a coil facing the magnet, which are moved relative to each other. The second member includes a thermal conduction member, a thermal insulation member, the coil, and a first cooling unit, which are disposed in this order from the magnet side, and a second cooling unit configured to cool the thermal conduction member being disposed outside an area in which the magnet and the coil face each other.

Abstract: A motor is provided comprising a magnet assembly having two rows of magnets arranged along a first axis, which are separated by a gap for generating magnetic flux lines between the rows of magnets. The motor further comprises a coil bracket which is located within the gap between the two rows of magnets. The coil bracket includes a first set of coils arranged along the first axis that are operative to drive movement of the coil bracket relative to the magnet assembly along the first axis. A second set of coils arranged along the first axis are operative to drive movement of the coil bracket relative to the magnet assembly along a second axis which is orthogonal to the first axis between a first end position and a second end position along the second axis.

Abstract: A device for handling and/or performing work operations on objects comprises: at least a first arm (2) comprising a first end (2a) for supporting a tool (3) for moving or working; means for supporting and moving (4) the first arm (2) which comprise at least a first linear electric motor (5), developing on a closed path (P), for moving the first arm (2) along a circular trajectory (91), and at least a second linear electric motor (6), to which the first arm (2) is directly connected, developing in an arched trajectory (92). The first (5) and the second (6) linear electric motors cooperate to move the first arm (2).

Abstract: This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.

Abstract: A linear motor includes a primary part arranged as a guideway stator and at least one secondary part that is movable with respect to the primary part, the at least one secondary part having device(s) for controlling the generation of a magnetic field, causing its motion, in the primary part. It is possible to avoid costly control devices for the application of current to the stator.

Abstract: A planar pulse motor includes a stator and a mover which is arranged opposite to the stator and which has a plurality of coils. The planar pulse motor can drive the mover in a first direction on a horizontal plane and in a second direction orthogonal to the first direction by controlling current flowing in the plurality of coils. The stator has a plurality of raised portions, including a plurality of first raised portions composed by laminating a plurality of layers of members including magnetic materials through which magnetic flux can pass only in the first direction and a plurality of second raised portions composed by laminating a plurality of layers of members including magnetic materials through which magnetic flux can pass only in the second direction, and a plurality of recessed portions through which magnetic flux does not pass in either the first or the second direction.

Abstract: A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).

Abstract: A driving apparatus (100q) is provided with: a first base portion (110-1); a first stage portion (130-1); a first elastic portion (120-1) which has elasticity to displace the first stage portion in one direction (Y axis); a second stage portion (130-2) which is disposed on the first stage portion and on which a driven object (12) is mounted; a second elastic portion (120-2) which has elasticity to displace the second stage in other direction (X axis); a first applying device (151-1, 152-1, 22) for applying an excitation force for displacing the first stage portion such that the first stage portion is resonated in the one direction at a resonance frequency determined by the first stage portion and the first elastic portion; and a second applying device (151-2, 152-2, 22) for applying a driving force for displacing, in a stepwise manner or in a continuous manner, the second stage portion in the other direction.

Abstract: A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (D1) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor.

Abstract: The aim of the invention is the equipping of a synchronous linear motor with a non-permanently-magnetic secondary part with a simple positional measuring system. Said aim is achieved, whereby the tooth structure of the toothed rack-shaped non-permanently-magnetic secondary part (S) varies with position in the direction of movement (B). Furthermore, the synchronous linear motor can be provided with absolute and incremental positional measuring systems, such that the coarse resolution of the absolute measuring system can be supplemented by the fine resolution of the incremental system.

Abstract: An actuator including magnets arranged on a plane on a plane, coils respectively arranged to face the magnets and move relatively with facing the magnets when a current is applied thereto, a moving member connected to either the magnets or coils, a guide member that guides the moving member to move in a given two-dimensional range; and a hit prevention mechanism to prevent the moving member from hitting a movable limit in the given two-dimensional range. The hit prevention mechanism is provided at the movable limit (edge) in the two-dimensional range. It is thus possible to prevent the moving member from hitting the movable limit. This can prevent damage or any hitting sound. The actuator can be used in a comfortable manner and stably for a long period.

Abstract: Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.