Abstract: An ultra-low profile aerostatic bearing and the method of manufacturing the same is disclosed. The aerostatic bearing comprises a substrate as a bearing housing, a hypodermic tubing and a plurality of orifices on the tubing. The method of manufacturing the aerostatic bearing includes the steps of forming the bearing housing and the hypodermic tubing and bonding the hypodermic tubing and the substrate together, and applying an encapsulation substance that encases the hypodermic tubing network and covers the substrate surface to obtain geometric accuracy and surface finish of the bearing surface by replicating the geometry and surface finish of a molding master.

Abstract: A conveyor table transfer apparatus includes a link mechanism connects the drive member driven by a motor (drive source) and a movable member supporting the movable linear conveyor. The link mechanism has one or more degrees of freedom. The degree of freedom of the link mechanism causes the link mechanism to bend in response to a degree of parallelization between the linear-motion guide rail and the linear-motion guide rail, making it possible to suppress load to be applied to the drive member or the movable member. As a result, it becomes possible to move the movable linear conveyor smoothly without requiring precise adjustment in mounting of the drive member and the movable member on the linear-motion guide rail and the linear-motion guide rail respectively.

Abstract: The present invention is provided with: a base moving linearly relative to a substrate and having a first and second positions that are spaced apart from each other by a predetermined interval a in the movement direction; a linear scale where a plurality of graduations having a predetermined pitch are provided along the movement direction; encoder heads which respectively are disposed at the first and second positions of the base and detect first and second graduation numbers of the linear scale with respect to the first and second positions, wherein, as the base is moved along the linear scale, the first and second graduation numbers are detected in this order in the respective encoder heads, and the movement amount of the base is controlled on the basis of the ratio between the predetermined interval and the distance between the first graduation number and the second graduation number on the scale.

Abstract: An actuator includes a first magnet whose magnetic pole surface has an N pole and a second magnet whose magnetic pole surface has an S pole. When current flows from one end of a first wiring to the other end, the current circulates in one direction at least partially on the first magnet in a first area, while it circulates in a direction opposite to the one direction at least partially on the second magnet in the first area. When current flows from one end of a second wiring to the other end, the current circulates in the direction opposite to the one direction at least partially on another first magnet in the second area, while it circulates in the one direction at least partially on another second magnet in the second area.

Abstract: A stator assembly for driving a rotor of an electrical planar motor includes a first arrangement of longitudinal stator layers and a second arrangement of oblique stator layers. The longitudinal stator layers comprise first coil conductors and the oblique stator layers comprise second coil conductors. The second coil conductors interact with second drive magnets to drive the rotor in a first direction, and the first coil conductors interact with first drive magnets to drive the rotor in a second direction, different from the first direction. The longitudinal and oblique stator layers are arranged on top of one another in a third direction, perpendicular to the first and second directions, where the first arrangement of longitudinal stator layers and the second arrangement of oblique stator layers have a shared central plane, each being symmetrically arranged with regard to the shared central plane, in the third direction.

Abstract: A stator assembly for driving a rotor of a planar electrical motor includes longitudinal stator layers with first coil conductors and inclined stator layers with second coil conductors. The first coil conductors extend in an elongated manner in a first direction, and the second coil conductors extend in an elongated manner in a second direction, different from the first direction. The longitudinal and inclined stator layers are arranged on top of one another in a third direction, oriented perpendicularly to the first and second direction. An uppermost and lowermost stator layer of the stator assembly are each formed as a longitudinal stator layer with first coil conductors. The longitudinal stator layers are arranged in the third direction at most on one side next to an inclined stator layer, and the inclined stator layers are arranged in the third direction at most on one side next to a longitudinal stator layer.

Abstract: The invention relates to a modular optical recording system. According to the invention, a compact, flexibly configurable and expandable system structure for image recording, image stabilization and image correction is provided with an optical observation device that is to be arranged in the region of a preferably cylindrical housing concept. The recording system is designed in such a manner that a precise, play-free and frictionless mechanical correction of at least complete rotations about the optical axis and/or a precise and play-free adjustment of the flange focal distance is made possible.

Abstract: A stator module is disclosed, and a planar drive system with a stator module. The stator module has a lower face opposite an upper face, a stator unit situated on the upper face, and a cooling unit. The stator unit has a coil to which current can be supplied to generate a magnetic field to drive a mover, positionable on the upper face of the stator module. The cooling unit has a cover thermally connected to a lower face of the stator unit and to the bottom of the housing. The bottom of the housing has a first fastening section on the lower face of the stator module, thermally connectable to a heat sink. The cover is designed to conduct heat out of the stator unit to the bottom of the housing, which is designed to conduct the heat at least partially to the first fastening section.

Abstract: A magnetic device comprising at least one stator (1) and one actuator (2), wherein the stator (1) and the actuator (2) respectively comprise at least one magnet with pole ends and a line of action of the magnet, and the actuator (2) can be moved linearly along a movement axis (3) and/or rotatably about a movement axis in a movement direction (4), wherein a stator line of action (15) of the stator (1) or a stator extension line (16) of the stator line of action (15), which stator extension line (16) extends as a geometric ray away from the pole end of the stator (1) as geometric tangent to the stator line of action (5), and an actuator line of action (25) of the translator (2) or an actuator extension line (26) of the translator line of action (25), which translator extension line (26) extends as a geometric ray away from the pole end of the translator (2) as geometric tangent to the translator line of action (25), respectively have intersection points (10), and the stator line of action (15), possibly the sta

Abstract: A system for cooling a motor includes a rotary machine and a cooling flow path. The rotary machine includes a motor including a rotor and a stator, a compressor including a compressor rotor, and a shaft extending between the motor and the compressor rotor. The cooling flow path is configured to deliver cooling air from a cabin of an aircraft to the motor.

Abstract: A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.

Abstract: There is provided a substrate processing apparatus having a transfer arm configured to transfer two substrates between a transfer chamber and a processing chamber having two mounting tables, the transfer arm holding the two substrates in a state where the two substrates overlap each other with a gap between the two substrates. The substrate processing apparatus includes: a lower substrate detection sensor configured to detect an edge portion of a lower substrate when the lower substrate is transferred; and an upper substrate detection sensor configured to detect an edge portion of an upper substrate when the upper substrate is transferred.

Abstract: A linear vibration motor includes a bracket, a coil provided to the bracket, a case for covering the bracket, a mass positioned in the case, at least two or more springs, each of which one end is connected to the mass and the other end is connected to one surface of the case, a magnet coupled to the mass to be integrated therewith and facing the coil, a plate coupled to the mass to be integrated therewith and positioned on the magnet, and a friction reducing part provided on at least one surface of the mass and reducing friction between the mass and the bracket. The mass vibrates in the horizontal direction such that the thickness of the linear vibration motor is not increased but can be manufactured thin. Therefore, it is advantageous in terms of space when the linear vibration motor is arranged in a mobile phone.

Abstract: A linear shaft motor (1) has a slider (10) and a tubular magnetic shaft (30). The slider (10) includes an oblong cuboid shaped motor housing (101) having a rectangular cross-section with a longitudinal central bore (180). The motor housing (101) includes at least two longitudinal cooling holes (161, 162, 163, 164, 165, 166, 167, 168) which are part of an integrated fluid cooling circuit. The at least two longitudinal cooling holes (161-168) are distributed symmetrically at a left and at a right side of the central bore (180), whereas the central axis (15) of any of the longitudinal cooling holes (161-168) lays below the topmost portion (20) of the central bore (180) and above the lowermost portion (25) of the central bore (180).

Abstract: Provided is a measuring instrument for measuring an electrostatic capacity. The measuring instrument includes a base substrate having a disk shape, a plurality of first sensors arranged along an edge of the base substrate and respectively provide a plurality of side electrodes, one or more second sensors each of which has a bottom electrode provided along a bottom surface of the base substrate, and a circuit board. The circuit board is configured to apply a high frequency signal to the plurality of side electrodes and the bottom electrode, to generate a plurality of first measurement values respectively indicating electrostatic capacities based on voltage amplitudes in the plurality of side electrodes, and to generate a second measurement value indicating an electrostatic capacity based on a voltage amplitude in the bottom electrode.

Abstract: A linear motor for use in semiconductor processing apparatuses. The linear motor is a three axis linear motor that includes magnets that cover end turns of coil windings in order to utilize the end turns to generate a force along a second or third axis. The coil windings are positioned between two magnet arrays and each magnet array has a magnet, such as a voice coil motor (VCM) magnet, positioned along one side to cover the endturns and provide a magnetic flux. A VCM back iron is positioned to provide a magnetic flux return path for the VCM magnets. The structure in conjunction with a DC offset produces a useful force.

Abstract: The invention relates to a planar positioning apparatus, comprising a stator which comprises a coil arrangement consisting of flat coils, a rotor which is arranged opposite the stator in the operating state of the positioning apparatus and which has a planar magnet arrangement comprising a plurality of rows of magnets, wherein the plane which is spanned by the planar magnet arrangement is arranged parallel to the plane of the coil arrangement, at least one position measuring head, which is arranged within the stator or rotor in the operating state of the positioning apparatus, for detecting the position of the rotor relative to the stator, an area scale which is fixed to the rotor or to the stator in a specific position, and an evaluation and control device for evaluating position signals of the position measuring head and for controlling the application of current to the coil arrangement for controlling the position of the rotor with respect to the stator.

Abstract: A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.

Abstract: A displacement device including a stage and a stator, wherein the stator is shaped to provide a working region and the stator includes: a plurality of magnet blocks of the first kind, each magnet block of the first kind including a plurality of first magnets generally linearly elongated in the X-direction, and a plurality of magnet blocks of the second kind, each magnet block of the second kind including a plurality of second magnets generally linearly elongated in the Y-direction. The stage is movably arranged next to the stator in the Z-direction, and the stage includes: a coil block of the first kind, each coil block of the first kind including a plurality of electric conductors generally linearly elongated in the X-direction; and a coil block of the second kind, each coil block of the second kind including a plurality of electric conductors generally linearly elongated in the Y-direction.

Abstract: An actuator assembly (16) for moving a device (22) includes a stator component (30), a mover component (32), a measurement system (18), and a signal processor (20). The measurement system (18) includes (i) a magnet assembly (244) that is coupled to and moves with the mover component (32); and (ii) a plurality of spaced apart sensors (246A). The magnet assembly (244) produces a magnetic field (244B) that moves relative to the stator component (30) as the mover component (32) moves along a mover axis (32C). Each sensor (246A) is a transducer that generates a sensor signal that varies its output voltage in response to the changing magnetic field (244B) from the magnet assembly (244) as the mover component (32) is moved relative to the sensors (246A). The signal processor (20) receives the sensor signals and estimates a position of the mover component (32) along the mover axis (32C) based at least in part on the sensor signals.

Abstract: A linear motor includes a movable element and a stator. The stator includes a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the movable element's axis of travel, a plurality of main pole magnets provided spaced apart from each other and paralleling the axis of travel, on respective inside lateral surfaces of the pair of back yokes, and first and second interpole magnets provided, adjoining along said axis of travel, in each of intervals between adjoining couples of the main pole magnets.

Abstract: Aspects of the invention provide methods and systems for moving a plurality of moveable stages relative to a stator. The stator comprises a plurality of coils shaped to provide pluralities of coil trace groups where each coil trace group comprises a corresponding plurality of generally linearly elongated coil traces which extend across a stator tile. Each moveable stage comprises a plurality of magnet arrays. Methods and apparatus are provided for moving the moveable stages relative to the stator, where a magnet array from a first moveable stage and a magnet array from a second moveable stage both overlap a shared group of coil traces. For at least a portion of the time that the magnet arrays from the first and second moveable stages overlap the shared group of coil traces, currents are controllably driven in the shared coil trace group based on the positions of both the first and second moveable stages. The positions of the first and second moveable stages may be ascertained by feedback.

Abstract: A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology.

Abstract: Numerous arrangements for permanent magnets are disclosed that can focus the flux produced by the magnets. Depending on the particular application in which the disclosed designs and techniques are used, efficiency and reliability may be increased by minimizing flux leakage, increasing peak flux density, and shaping the flux fields to improve the effective coercivity of the flux focusing permanent magnet arrangement when loaded, and to achieve customized voltage and current waveforms. The disclosed magnet assemblies may be incorporated into a machine, such as a motor/generator, having windings and may be disposed for movement relative to the windings. The magnet assembly may be mounted on a support formed of one or more ferromagnetic materials, such as a back iron. The disclosed flux focusing magnet assemblies may be formed using a variety of manufacturing methods.

Abstract: A magnet machine may translate or rotate with one element stationary and another element moving. One element has mounted thereon a plurality of magnets arranged in a sequenced array extensive in the direction of operation, the magnets fixed with N-pole magnet faces opposing S-pole magnet faces across gaps between the magnets, and side faces arranged in a plane. A second element has a single or integrated magnet mounted with one pole face positioned parallel to, and gapped apart from the plane of the plurality of magnets. This pole face is disrupted by an array of spaced apart grooves. The direction of motion is in the plane. A solenoid may be mounted within one or more of the grooves so provide a staring force or a braking force to the moving element.

Abstract: Apparatus and method estimate a position of a movable stage. The apparatus comprises: a stator comprising 2D array of sensors arranged relative to one another to provide a plurality of stator-Y oriented sensor columns and a plurality of stator-X oriented sensor rows; a movable stage comprising a first Y-magnet array comprising a plurality of first magnetization segments generally linearly elongated in a stage-Y direction, each first magnetization segment having a stage-Y direction length, Lyy, and a magnetization direction generally orthogonal to the stage-Y direction, the magnetization directions of the plurality of first magnetization segments exhibiting a first magnetic spatial period over ?x a stage-X direction width, Wyx, of the first magnet array; and a controller connected to receive information based on an output from each of the sensors and configured to use the information to determine a stator-X direction position of the movable stage.

Abstract: A displacement device comprise a stator having a plurality of electrically conductive coils shaped to provide: a first plurality of coil traces generally elongated in a stator-x direction and distributed over at least a first portion of a first layer; a second plurality of coil traces generally elongated in a stator-y direction and distributed over at least a second portion of a second layer. The first and second portions of the first and second layers overlapping one another in a stator-z direction. The displacement device also comprises a moveable stage having one or more magnet arrays. The moveable stage is moveable relative to the stator within a two-dimensional working region. The one or more magnet arrays include a first magnet array comprising a plurality of first magnetization segments, each having a corresponding first magnetization direction.

Abstract: A lithography apparatus includes an original holder configured to hold and move an original, a measurement unit configured to measure a misalignment amount of the original with respect to the original holder, and a controller configured to control movement of the original holder. The controller repeatedly performs preliminary driving for moving the original holder before performing the pattern formation. At this time, if the misalignment amount measured by the measurement unit converges to a predetermined convergence value while the preliminary driving is repeatedly performed, the controller ends the preliminary driving.

Abstract: A linear transport system can have a carriage guide rail having a first and a second carriage, which are arranged in such a way that they can be moved independently of one another on the carriage guide. The XY table for this linear transport system can comprise a carrying structure and a first and a second linear guide, which are embodied with an angular offset relative to one another and each have a first and a second guide element, e.g., which can be moved relative to one another along a linear track. In one arrangement, the first guide elements of the first and second linear guides are connected to the carrying structure. The second guide element of the second linear guide can be connected to the first carriage and the second guide element of the second linear guide can be connected to the second carriage.

Abstract: An input device includes: at least two coil bodies that are held by a holding body; and at least two magnetic poles formation sections that are held by a moving body to be movable. The holding body holds each of the at least two coil bodies such that a winding direction of a wire in each of the at least two coil bodies extends along an operation plane; and such that an extension direction of the wire extending along a coil side surface is different from one another.

Abstract: This linear motor apparatus includes: a first linear motor and a second linear motor, movable bodies of which move in the same direction in a linked manner; a first control portion that causes the first linear motor to produce thrust to apply a load to a pressurizing target via the movable bodies; and a second control portion that causes the second linear motor to produce thrust and controls the thrust, wherein, if the first control portion is causing a load to be applied to the pressurizing target, then the second control portion causes the second linear motor to produce thrust that cancels an external force produced to the movable bodies.

Abstract: A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

Abstract: A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.

Abstract: A planar motor includes a base provided with at least one stator, a mover provided on a top portion of a planar object to be placed on a top portion of the base, and moving according to a magnetic field generated by the stator, a mover support connected to the mover, supporting the mover from the planar object, and moving the mover according to a force of the magnetic field, and a controller supplying a control current to the stator to control location of the mover.

Abstract: A covering is easily mounted and/or demounted to envelop an overall sliding device with onboard moving-magnet linear motor. The covering helps improved propulsion, high velocity and response of a table even with small in dimension, compact in construction. End blocks are installed in opposite ends of a bed and a linear motor is placed between the bed and the table. The end blocks are made in solid bodies which are tightened to the bed together with a coil board. The end blocks have butting surfaces which can come into abutment against the ends of the table to protect the table from getting out of the bed. The end blocks have locking recesses which mate with locking jaws on the covering to fasten the covering to the end blocks.

Abstract: An exposure apparatus exposes an upper surface of a substrate with exposure light through liquid, and includes an optical member that has an emitting surface from which the exposure light is emitted; and a substrate holding apparatus having a holding portion that releasably holds a lower surface of the substrate, and an upper surface provided around the holding portion. The upper surface of the substrate holding apparatus is configured such that the upper surface of the substrate holding apparatus and the upper surface of the substrate held by the holding portion are substantially in a plane. The upper surface of the substrate holding apparatus has a jagged edge portion. The substrate is held by the holding portion such that an edge portion of the substrate held by the holding portion is located along the jagged edge portion of the upper surface of the substrate holding apparatus.

Abstract: A voice coil motor array module includes a carrier, and a plurality of voice coil motors disposed on the carrier and arranged side by side in at least one row along an arrangement direction. Each voice coil motor includes a lens holder having a holder body and a coil wound around the holder body, and two magnetic components respectively disposed on two opposite sides of the holder body and having the same magnetic poles facing each other. When the coil is energized, the coil interacts with the magnetic components to drive displacement of the holder body along a direction parallel to a normal direction of a plane of the arrangement direction.

Abstract: An exposure apparatus exposes a substrate with an exposure beam via a projection system supported by a frame. A substrate stage having a table that mounts the substrate is placed on a base under the projection system. A measurement device has a plurality of heads provided at the table and each irradiate a measurement beam on a grating section supported by the frame, and measures positional information of the table by a head of the plural heads, that faces the grating section. A drive device drives the substrate stage to move the substrate. A controller controls a drive of the substrate stage based on displacement information of a head used in measurement of the positional information or correction information to compensate a measurement error of the measurement device that occurs due to a displacement of the head, and based on the positional information measured by the measurement device.

Abstract: A permanent magnet synchronous planar motor with a structure of concentric winding comprises a primary structure, a secondary structure, and an air gap. Armature windings in the primary structure of the permanent magnet synchronous planar motor are fixed on an air gap side of the primary base plate in a shape of board, wherein the air gap side is defined as a side adjacent to the air gap. The armature winding of each phase comprises a plurality of concentric rectangular coils. The rectangular coils are connected in series in turn from inside to outside, and winding directions of the two adjacent rectangular coils are opposite. A distance Lc between center lines of two opposite sides of each of the rectangular coils and the polar distance ?m of the permanent magnet in the secondary structure have a relationship as follows. Lc=(2k+1)?m, wherein k is a natural number.

Abstract: An exemplary locking or coupling device includes a plurality of magnets each having a direction of magnetization. A plurality of pole shoe members are positioned between selected ones of the magnets. A moveable support supports some of the magnets and some of the pole shoe members. The moveable support is moveable to selectively change a relative orientation of the directions of magnetization. One relative orientation primarily directs a flow of magnetic flux between the magnets through the pole shoe members and the magnetic flux remains essentially in a plane containing the magnets and the pole shoe members. A second, different relative orientation primarily directs the flow of magnetic flux from the pole shoe members in a transverse direction away from the plane.

Abstract: An exposure apparatus exposing a substrate with exposure light through liquid, including: an optical member having an emitting surface from which exposure light is emitted; a substrate holding apparatus that includes: a first holding portion holding a lower surface of substrate so that lower surface of substrate can be released, and a first member that defines an opening where substrate can be arranged, and that has an upper surface which is arranged at a vicinity of an upper surface of the substrate in a state which the substrate is held by the first holding portion; and a porous member of which at least a part is arranged at a gap between the substrate and the first member, and which has an upper surface liquid-repellent with respect to the liquid, wherein at least a part of the liquid which flows into the gap is recovered through the porous member.

Abstract: A fine movement stage is driven by a controller, based on positional information of the fine movement stage in a measurement direction measured by a measurement system and correction information of a measurement error caused by a tilt of the fine movement stage included in the positional information. Accordingly, driving the fine movement stage with high precision becomes possible, which is not affected by a measurement error included in the positional information in a measurement direction of the measurement system that occurs due to a tilt of the fine movement stage.

Abstract: The present invention provides an exposure apparatus including a stage control system configured to control a stage for holding a substrate in accordance with a command value, a specifying unit configured to specify an exposure start time at which exposure on the substrate starts upon detecting exposure light illuminated on the substrate, and a main control system configured to calculate positions of the stage at a plurality of times in an exposure period for the substrate based on position information of the stage at an exposure start time specified by the specifying unit, obtain an average position of the stage in at least a partial period in the exposure period from the calculated positions of the stage at the plurality of times, and give a command value for matching the average position of the stage with a target position to the stage control system.

Abstract: An exposure method and an exposure device are provided. An exemplary exposure device includes a stage, a first clamp holder, a second clamp holder, an optical projection unit, a first alignment detection unit, and/or a second alignment detection unit. The stage includes a first region and a second region. The first clamp holder is located in the first region and adapted for holding a first substrate, and the second clamp holder is located in the second region and adapted for holding a second substrate. The optical projection unit is located above the stage and adapted for exposure of the first substrate or the second substrate. The first alignment detection unit is adapted for detecting alignment marks of the first substrate. The second alignment detection unit is adapted for detecting alignment marks of the second substrate. The exposure device can accurately position the stage and improve production yield.

Abstract: A magnetic shear force transfer device for transferring shear forces across a non-magnetic gap includes a first magnetic structure comprising concentric circular tracks of magnetic sources magnetically printed into a first magnetizable material a second magnetic structure comprising concentric circular tracks of magnetic sources magnetically printed into a second magnetizable material. Each concentric circular track has an even number of magnetic sources where adjoining magnetic sources alternate in polarity. One or more tracks of the first magnetic structure are rotated relative to one or more tracks of the second magnetic structure such that a maximum torque condition coincides to one angular orientation between the first and second magnetic structures.

Abstract: A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.

Abstract: A displacement device with a first and second part which are displaceable relative to one another, the first part being provided with a system of magnets, the second part being provided with a set of coil block units including: at least three first coil block units having current conductors oriented parallel to a second direction, at least two second coil block units having current conductors oriented parallel to a first direction, wherein the displacement device includes a controller configured to control the position of the second part relative to the first part, and wherein when the second part mainly moves in the second direction the controller is configured to levitate the second part from the first part in the third direction by using first coil block units only.

Abstract: A target positioning device, in particular for a lithography system, comprising a carrier for carrying a target, and a stage for carrying and moving the carrier along a first direction (X). The stage comprising two X-stage bases, both arranged on top of a common base plate, each X-stage base carries an X-stage carriage, and a Y-beam comprising a Y-stage for carrying said carrier and moving the carrier said carrier in a second direction (Y). The Y-beam bridges the space between the X-stage carriages and is connected to the X-stage carriages via a flexible coupling. The device further comprises two motors each for driving a corresponding X-stage carriage along its corresponding X-stage base. The two motors are arranged at least substantially below the stage. Each motor of said two motors is coupled to an eccentric cam or crank which is connected to the corresponding X-stage carriage via a crank shaft.

Abstract: According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.

Abstract: A method for moving a stage includes coupling a stage mover to the stage, and directing current to the stage mover with a control system. The stage mover includes a magnet array and a conductor array positioned adjacent to the magnet array. The conductor array includes a first layer of coils and a second layer of coils, with the first layer of coils being closer to the magnet array than the second layer of coils. The control system directs current to the first layer of coils and the second layer of coils independently. Further, the control system directs more current to the first layer of coils than the second layer of coils during a movement step to reduce the power consumption.