Abstract: A graphene sheet is provided. The graphene sheet includes a carbon lattice and a spatial distribution of defects in the carbon lattice. The spatial distribution of defects is configured to tailor the buckling properties of the graphene sheet.

Abstract: In one aspect, there is provided a heat pump system which comprises an enclosure and an electrostatic compressor. The enclosure is substantially filled with a first fluid and includes a plurality of compressor vanes, a heat exchanger, and a control module. The plurality of compressor vanes are responsive to electrical stimulus and are substantially separated from each other so that the first fluid extends to and at least partially occupies a space between adjoining pairs of the compressor vanes. The heat exchanger is thermally coupled to the first fluid in the space between the compressor vanes and to a second fluid substantially outside the enclosure. The control module is responsive to input information and includes an electrical circuit that provides the electrical stimulus to the compressor vanes. The compressor vanes respond to the electrical stimulus by compressing and releasing the first fluid between the adjoining pairs of compressor vanes.

Abstract: Systems, devices, and methods for an electrostatic machine are provided. In one embodiment, an electrostatic machine may be configured to have an electric field motor, a rotor assembly and a motor drive, wherein the improvement may include generating at least three watts (3 W) of power with a product of a gap pressure (pgap) and a gap distance (dgap) of less than ninety megapascals-micrometer (90 MPa*um).

Abstract: An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°.

Abstract: A transducer includes a high-resistance layer that includes an elastomer and has a volume resistivity of 1012 ?·cm or more, a pair of electrodes that are arranged on both a front side and a back side of the high-resistance layer and include a binder and a conductive material, and a medium-resistance layer that is interposed between the electrode and the high-resistance layer on at least one of the front side and the back side of the high-resistance layer, includes an elastomer, and has a volume resistivity that is smaller than the volume resistivity of the high-resistance layer by two or more digits. In the transducer, the medium-resistance layer is interposed between at least one electrode and the high-resistance layer to take advantage of the resistance to dielectric breakdown originally possessed by the high-resistance layer, thereby obtaining a larger force by applying a higher voltage.

Abstract: A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator.

Abstract: In an embodiment, a piezoelectric resonator configured for parametric amplification is disclosed. The piezoelectric resonator may include or comprise a piezoelectric member, and first and second resonator electrodes associated with the piezoelectric member and positioned to enable a first electric field to be generated in a first direction. The piezoelectric resonator may also include or comprise a parametric drive electrode associated with the piezoelectric member and positioned to enable a second electric field to be generated in a second direction.

Abstract: An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode.

Abstract: A power generator comprises a first substrate 102, a second substrate 103 opposed to the first substrate, first electrodes 104L and 104R and a first electrode 106 which are formed on the first substrate, second electrodes 105L and 105R and a second electrode 107 which are formed on the second substrate, wherein electric charge of the same polarity is held by the first electrode and the second electrode, and the first substrate vibrates such that an angle formed between a segment connecting a centroid of the first electrode 104L (104R) and a centroid of the second electrode 105L (105R), and a half line extending from the centroid of the second electrode 105L (105R) toward the first electrode 104L (104R) in a stationary state in parallel to the main surface of the second substrate does not exceed 55 degrees while the first substrate 102 is stationary and vibrates.

Abstract: It is an object to provide a test method of a process, an electric characteristic, and a mechanical characteristic of a structure body in a micromachine without contact. A structure body including a first conductive layer, a second conductive layer provided in parallel to the first conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer is provided; an antenna connected to the structure body is provided; electric power is supplied to the structure body wirelessly through the antenna; and an electromagnetic wave generated from the antenna is detected as a characteristic of the structure body.

Abstract: An actuator is provided with a conductive polymer film portion, an electrode, and an electrolyte portion, and by detecting a waveform of a current that flows upon application of a voltage between the conductive polymer film portion and the electrode, a displacement amount of the actuator is detected so that based on the displacement amount thus detected, a voltage is applied to the conductive polymer film portion so that the displacement amount of the actuator is adjusted.

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators.

Abstract: A ball-electric power generator is provided, in which triboelectric power can be generated by friction when balls made of one of triboelectric series having different shapes of spheres, sheets, rods, wires and the like move and hit layers or substrates made of one of the triboelectric series in a chamber defined by the layers or substrates and a spacer connecting the layers.

Abstract: A graphene triboelectric charging device and a method of generating electricity by the same are provided. The device can include an electric power generating unit including a triboelectric layer, a polyester layer disposed to face the triboelectric layer, and a graphene layer interposed between the triboelectric layer and the polyester layer, a holder accommodating the electric power generating unit and having an uneven surface configured to receive a portion of the electric power generating unit when it is deformed by external force, and a friction unit disposed to face the electric power generating unit and configured to deform the electric power generating unit, wherein the friction unit is disposed to face the uneven surface.

Abstract: A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

Abstract: A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.

Abstract: Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.

Abstract: The present invention is directed to processes (methods) for harnessing flow-induced electrostatic energy in an oil and/or gas well and using this energy to power electrical devices (e.g., flowmeters, electrically-actuated valves, etc.) downhole. The present invention is also directed to corresponding systems through which such methods are implemented.

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.

Abstract: A device collects electrostatic charge from the atmosphere and stores the electrostatic charge for further use. The device includes a primary array including a plurality of electrically-conducting collectors, a plurality of electrically-conducting inductors, a charge regulator, and a charge storage device. A secondary array can be added to improve the efficiency of the primary array.

Abstract: A system for electro-hydrodynamically extracting energy from wind includes an upstream collector that is biased at an electric potential and induces an electric field. An injector introduces a particle into the electric field. The wind drag on the particle is at least partially opposed by a force of the electric field on the particle. A sensor monitors an ambient atmospheric condition, and a controller changes a parameter of the injector in response to a change in the atmospheric condition.

Abstract: A cantilever type of electrostatic vertical combdrive actuators may generate larger actuator displacement (typically over 70 um) with a relatively small and simple structure. The actuation voltage is lower while the actuation movement is robust without any typical sideway finger snapping phenomena due to a cantilever type of structure. Because of its small form factor, it can form a high fill factor array in applications such as lower power consumption display devices, sensitive electromagnetic radiation detector/detector arrays, etc. The MEMS (Micro-Electro-Mechanical Systems) electrostatic rotational actuators may have wide applications such as in optical shutter, optical chopper, optical switches, optical attenuators, optical tunable filter, RF shunt switch, RF ohmic contact switch, RF MEMS variable capacitors, MEMS display and sensitive electromagnetic radiation detector etc.

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Abstract: The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.

Abstract: A comb electrode structure including a plurality of first comb fingers, a plurality of second comb fingers and a first reinforced comb finger is provided. The first comb fingers and the second comb fingers are interlaced with each other. The first reinforced comb finger is located at the outermost side of the first comb fingers, and electrically connected to the first comb fingers. In an embodiment, the width of the first reinforced comb finger is greater than that of the first comb fingers. In another embodiment, the thickness of the first reinforced comb finger is greater than that of the first comb fingers.

Abstract: Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.

Abstract: An electrostatic operation device in which a variation in the amount of electric charges accumulated in an electret film caused by physical impact can be suppressed. The electrostatic operation device (electrostatic induction power generating device (1)) comprises movable electrodes (8), an electret film (5) so formed as to face the movable electrodes (8) at a space therebetween, and a stopper (401b) for suppressing the approach of the movable electrodes (8) to the electret film (5) within a predetermined space.

Abstract: In an electrostatic micromotor, a mobile substrate faces a fixed substrate and is suspended over the fixed substrate at a given distance of separation in an operative resting condition; an actuation unit is configured so as to give rise to a relative movement of the mobile substrate with respect to the fixed substrate in a direction of movement during an operative condition of actuation. The actuation unit is also configured so as to bring the mobile substrate and the fixed substrate substantially into contact and to keep them in contact during the operative condition of actuation. The electrostatic micromotor is provided with an electronic unit for reducing friction, configured so as to reduce a friction generated by the contact between the rotor substrate and the stator substrate during the relative movement.

Abstract: According to one embodiment, a method of driving an electrostatic actuator includes a first electrode provided on a substrate, a second electrode arranged above the first electrode to be movable in a vertical direction, and an insulating film provided between the first electrode and the second electrode, includes boosting a power supply voltage to generate a driving voltage of the electrostatic actuator, and applying the driving voltage to each of the first electrode and the second electrode when setting the electrostatic actuator in an up state.

Abstract: An electric generator includes an electric-power generating mechanism of an electrostatic induction type or an electromagnetic induction type, a first rectification portion, an electricity accumulation portion, an outer positive electrode, and an outer negative electrode. The electric-power generation mechanism has a first electrode and a second electrode, and the first rectification portion has input terminals electrically connected to the first electrode and the second electrode respectively, and has an output portion including positive and negative terminals. The electricity accumulation portion has an inner positive electrode electrically connected to the positive terminal, and an inner negative electrode electrically connected to the negative terminal. The outer positive electrode is electrically connected to the inner positive electrode, and the outer negative electrode is electrically connected to the inner negative electrode.

Abstract: An electrostatic induction power generator includes a spherical member for making a distance between surfaces of a first substrate and a second substrate facing each other constant. A housing is provided with a first reference surface to which a surface of the second substrate facing the first substrate is fixed and which is a positioning reference for the second substrate with respect to the surface facing the first substrate in a vertical direction, and a second reference surface with which the spherical member is slidably in contact and which is a positioning reference for the spherical member with respect to the surface facing the first substrate in the vertical direction. The spherical member is slidably in contact with a surface of the first substrate facing the second substrate.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for driving an array of tri-state devices. The array of tri-state devices may form an array of display elements, and the array may be passively addressed. According to one aspect, the array includes two segment lines and one common line connected to each tri-state display element. According to another aspect, the array includes two common lines and one segment line connected to each tri-state display element.

Abstract: The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.

Abstract: Self powered microelectromechanical oscillators are provided for various applications.

Abstract: A capacitive generator has a generator circuit (G) and a charge priming circuit (P) that includes variable capacitors (1, 2, 101, 102) all coupled to a mechanical transmission which acts to vary the capacitance of the capacitors and to actuate an array of switches (K). A small residual charge on the priming circuit (P) can thus be amplified and conveyed to the generating circuit (G) where it is used to generate an alternating current between the variable capacitors (1, 2) of the generating circuit. The capacitance of the generating capacitors (1, 2) is varied in antiphase in response to the movement of the transmission. An electrical energy extraction device (8) in circuit with the generator capacitors (1, 2) extracts electrical energy from the circuit in reaction to the alternating current which can then be used to power or recharge a small portable device.

Abstract: The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Abstract: A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.

Abstract: An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.

Abstract: The present invention relates to an electrical influence machine comprising a first non electrically conductive support structure spaced from a second non electrically conductive support structure, at least one of the support structures being arranged to move with respect to the other support structure, at least two charge collecting points being arranged to collect charge from at least one of the support structures, and a plurality of conductive sectors located on or embedded in opposed surfaces of the first and/or second support structures, the conductive sectors comprising a material with a specific surface area greater than the specific surface area of a self supporting metal foil.

Abstract: An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode.

Abstract: A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.

Abstract: The invention provides a transducer for converting between mechanical and electrical energies. The transducer comprises an EAP laminate with a layer of an elastomer material arranged between two electrode layers, each electrode layer comprising a second layer of a plastically deformable material, e.g. metal or a thermoplastic material, and a third layer of an electrically conductive material. Due to the layer of plastically deformable material, the electrode layers can be shaped into various shapes which can provide anisotropic characteristics of the transducer.

Abstract: A display device is provided. The display device includes: a substrate including a unit display area, a fixing member that is formed on the substrate and that is electrically isolated, an insulating layer that is formed on the fixing member, a fixing electrode that is formed on the insulating layer and that is electrically connected to a power source, and a plurality of moving members with one end fixed to the insulating layer and positioned apart by a distance from the fixing electrode. The plurality of moving members and the fixing electrode are positioned within the unit display area.

Abstract: A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.

Abstract: An energy harvesting apparatus and method that is especially well suited for harvesting low frequency broadband vibration energy from a vibrating structure is presented. The apparatus includes a pair of disc springs that are arranged in an opposing relationship. A threaded fastening member and a threaded nut extend through apertures in each of the disc springs and enable a predetermined preload force to be applied to the disc springs. The preload effectively “softens” the disc springs, thus heightening the sensitivity of the disc springs to low frequency, low amplitude vibration energy. A piezoelectric material ring is secured to each of the disc springs. Each piezoelectric material ring experiences changes in strain as its associated disc spring deflects in response to vibration energy experienced from a vibrating structure.

Abstract: An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.

Abstract: An electrostatic energy harvester comprises at least a plurality of variable capacitor layers. In one embodiment, at least two of the variable capacitor layers are directly bonded together. In another embodiment, at least two of the variable capacitor layers are bonded together with at least one moving mass layer. Still in another embodiment, at least two of the variable capacitor layers are located at different heights and are located separately from each other. A method of making such a device is also disclosed.

Abstract: Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.

Abstract: The invention provides an actuator apparatus and method where a source provides electrons to a target material wherein electrical work is performed. A beta emission process comprises a source material emitting electrons which are then captured by a target material. The actuator's source vanes rotate within an electric field between the target chutes' walls, generating torque. The principal providing torque and power is the change in energy as a vane gets closer to the outer walls. During the release and capture process, electrical work is performed which, in turn, is transferred into mechanical work in the form of rotation of the rotor. Specific applications include a radioisotope fueled rotary actuator for micro and nano air vehicles employed as the main form of propulsion.

Abstract: The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate.