Abstract: A system utilizes electroadhesive surfaces for braking and metering objects in an automated environment. An electroadhesive surface can include electrodes that are configured to induce an electrostatic attraction with nearby objects upon application of voltage to the electrodes. The systems described utilize various configurations of electroadhesive surfaces, sensors, controllers and programmable processors to create smart braking, capturing and metering systems for improved automated material handling.

Abstract: A user interface device having a user input component, a mechanical metamaterial region, one or more actuators, and a control unit is presented. The mechanical metamaterial region is located over the user input component. The one or more actuators are coupled to the mechanical metamaterial region, which has an internal structure that is mechanically alterable with the one or more actuators, and has a mechanical property that changes in response to the alteration of the internal structure by the one or more actuators. The control unit is in communication with the one or more actuators, and is configured to determine whether the user input component is to be hidden from tactile perception, and to activate the one or more actuators to mechanically alter the internal structure of the mechanical metamaterial region.

Abstract: High resolution active matrix nanowire circuits enable a flexible platform for artificial electronic skin having pressure sensing capability. Comb-like interdigitated nanostructures extending vertically from a pair of opposing, flexible assemblies facilitate pressure sensing via changes in resistance caused by varying the extent of contact among the interdigitated nanostructures. Electrically isolated arrays of vertically extending, electrically conductive nanowires or nanofins are formed from a doped, electrically conductive layer, each of the arrays being electrically connected to a transistor in an array of transistors. The nanowires or nanofins are interdigitated with further electrically conductive nanowires or nanofins mounted to a flexible handle.

Abstract: An apparatus for displaying auto-multiscopic 3D images includes a parallax barrier; an image source layer with a first side facing the rear surface of the parallax barrier; and an electromechanical system facing the second side of the image source layer. The parallax barrier comprises an array of transparent spots. The image source layer comprises at least one clear spot and is configured to emit light away from the parallax barrier. The electromechanical system comprises one or more mirrors pivotably mounted and controllable to reflect light towards the at least one clear spot in the image source layer.

Abstract: The present invention relates to an energy conversion device using a change of a contact surface with liquid and, more specifically, to a method and a device for converting mechanical energy into electrical energy by applying an opposite phenomenon to an electrowetting phenomenon. The energy conversion device having a simplified structure and reduced manufacturing costs with minimal malfunctions by changing a contact surface with liquid between a pair of electrodes and using the change of the contact surface with the liquid to generate electrical energy such that channel blocking can be prevented or a lubricating layer or electrodes complicatedly patterned on a channel are not required.

Abstract: A tactile sensor for sensing touch from a human finger includes a triboelectric layer and includes a material that becomes electrically charged after being in contact with the finger. The first side of a first conductive layer is in contact with the second side of triboelectric layer. The first side of a dielectric layer is in contact with the first conductive layer and the second side of the dielectric layer is in contact with a second conductive layer. When the triboelectric layer becomes electrically charged after being in contact with the finger, the first conductive layer and the second conductive layer are subjected to an electric field, which has a first field strength at the first conductive layer and a second field strength, different from the first field strength, at the second conductive layer. A plurality of tactile sensors can be arranged as a keyboard.

Abstract: An apparatus includes an electroactive polymer member and a first electric terminal and a second electric terminal. The electroactive polymer member has a free portion configured to change position relative to a fixed portion in response to an external stimulus corresponding to at least one of a flow parameter or a fluid parameter. The first electric terminal and the second electric terminal are coupled to the electroactive polymer member. The first electric terminal and the second electric terminal provide an electrical signal in response to the change.

Abstract: A manufacturing method of a triboelectric energy harvester, including the steps of generating an electrification material with a surface of a micro-nano pattern on an electrode and forming a coating electrification layer to support the micro-nano pattern on a surface of the electrification material, is provided.

Abstract: In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.

Abstract: An electrostatic rotating electrical machine employs interdigitated axial pegs on opposed rotor and stator plates, the pegs immersed in a high dielectric constant fluid. Peg shape, length and positioning may be varied to tailor a changing aspect profile to a desired power source.

Abstract: There is provided a system and method for harvesting electrical energy from interaction with papers. The system comprising an electret disposed between a first electrode and a second electrode, and an interactive device connected to one end of the first electrode and one end of the second electrode to provide an electrical potential, the interactive device configured to receive the electrical potential by moving the second electrode relative to the electret for generating electrical energy. Interactive devices that can be activated by the generator can include a light-emitting diode, an electronic paper display, an infrared communication, and a buzzer.

Abstract: A system of a vehicle may include an electrical load, a generator, and first and second conduits. The electrical load of the vehicle may include a high energy device that utilizes above 270 volts during operations of the vehicle. The generator may be coupled to an engine of the vehicle and configured to generate electrical power at a voltage above 270 volts for the electrical load of the high energy device during operations of the vehicle. The first and second conduits may be arranged along each other to house respective first and second conductors that are electrically disposed between the electrical load and the generator.

Abstract: A keyboard for converting keystrokes into electrical signals is disclosed. The keyboard includes a plurality of keys. At least one of the keys includes two electrodes and a member that generates triboelectric charges upon skin contact. The member is adjacent to one of the electrodes to affect a flow of electrons between the two electrodes when a distance between the member and the skin varies.

Abstract: An apparatus and method for capturing a light field image. The light field image capture apparatus includes a mirror array or a micro-lens array. An activated mirror selected from among the multiple mirrors of the mirror array provides light to the multiple elements of an image sensor. An activated lens, selected from among the multiple lenses of the micro-lens array, provides light to the multiple elements of the image sensor. Based on timesharing, the mirror, selected as the activated mirror from among the multiple mirrors, is changed, and the lens, selected as the activated lens from among the multiple lenses, is changed.

Abstract: A measurement device (10) for evaluating an electronic device (100) that causes sound to be heard via vibration transmission by pressing a vibrating body against a human ear includes an ear model (50) modeled after a human ear and vibration pickups (57a) and (57b) disposed at a periphery of an artificial external ear canal (53) formed in the ear model (50).

Abstract: Described herein is a combination of mixed-signal hardware and software that is capable or realizing hybrid chaotic oscillators that can be tuned digitally. This includes the type/class of chaotic oscillator, initial conditions, nonlinear elements, thresholds, nonlinear event surfaces, delays, etc. At the same time, tunable methods of how to use the chaotic oscillator information to encrypt and decrypt both analog and digital information is presented. This will make the secure information not vulnerable by digital information compromises or hardware breach.

Abstract: A generator includes a first member, a second member and a sliding mechanism. The first member includes a first electrode and a first dielectric layer affixed to the first electrode. The first dielectric layer includes a first material that has a first rating on a triboelectric series. The second member includes a second material that has a second rating on the triboelectric series that is different from the first rating. The second member includes a second electrode. The second member is disposed adjacent to the first dielectric layer so that the first dielectric layer is disposed between the first electrode and the second electrode. The sliding mechanism is configured to cause relative movement between the first member and the second member, thereby generating an electric potential imbalance between the first electrode and the second electrode.

Abstract: A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a base substrate, a cavity template layer on the base substrate, a first confinement layer between the base substrate and the cavity template layer, and a patterned device layer on the cavity template layer. The patterned device layer includes an electrode that is deflectable toward a cavity in the cavity template layer. In an embodiment, a second confinement layer is between the cavity template layer and the patterned device layer.

Abstract: An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

Abstract: A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency.

Abstract: Power generated by a vibration power generator using an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate configured to be moved relative to each other by external vibration while remaining opposite each other, a group of a plurality of electrets arranged in the relative movement direction on one surface side of the first substrate, and a group of a plurality of electrodes arranged in the relative movement direction on a surface side of the second substrate opposite to the group of electrets, the group of electrodes including first current collecting electrodes and second current collecting electrodes electrically connected to respective power supply loads to which power generated by the external vibration is supplied, and ground electrodes each provided between the first current collecting electrode and the second current collecting electrode and grounded.

Abstract: A vibration power generator configured to generate power by displacement between an electret group having a plurality of electrets and an electrode group having a plurality of electrodes in a relative movement direction in response to an external vibration, includes a casing in which the electret group and the electrode group are disposed, a fixed member in which one of the electret group and the electrode group is disposed, the fixed member being fixed to a side of the casing, and a movable member in which the other of the electret group and the electrode group is disposed. The movable member is disposed in the casing such that the movable member is relatively movable in response to the external vibration while opposed to the fixed member.

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

Abstract: The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12) comprising a first electrode (16), a membrane (14) comprising a second electrode (18), wherein the cell has an outer region (22) where the membrane (14) is mounted to the substrate (12) and an inner region (20) inside or surrounded by the outer region (22), wherein the membrane (14) is collapsed to the substrate (12) in a first collapsed annular-shaped region (24) located within the inner region (20).

Abstract: The present invention employs an actuator including: a movable portion connected to a reflecting member having a reflective surface; a movable comb electrode disposed at a distance from the reflecting member, supported by the movable portion, and extended in a direction parallel to the reflective surface; a stationary comb electrode supported by a supporting portion, extends in the direction parallel to the reflective surface, and disposed alternately with the movable comb electrode; and a voltage controller that applies a voltage to the movable comb electrode and the stationary comb electrode to displace the movable comb electrode and the movable portion in a direction normal to the reflective surface. A portion that supports the movable comb electrode and a portion that supports the stationary comb electrode are disposed such that the movable comb electrode and the stationary comb electrode pass each other.

Abstract: A pressure sensor made of semiconductor material, the sensor comprising a box defining a housing under a secondary vacuum, at least one resonator received in the housing and suspended by flexible beams from at least one elastically deformable diaphragm closing the housing that also contains means for exciting the resonator in order to set the resonator into vibration and detector means for detecting a vibration frequency of the resonator. The detector means comprise at least a first suspended piezoresistive strain gauge having one end secured to one of the beams and one end secured to the diaphragm. The resonator and the first strain gauge are arranged to form zones of doping that are substantially identical in kind and in concentration.

Abstract: A micro electromechanical system (MEMS) device includes a MEMS section attached to a substrate, and a cap bonded to a first surface of the substrate. The MEMS device further includes a carrier bonded to a second surface of the substrate opposite the first surface, wherein the carrier is free of active devices, and the cap and the carrier define a vacuum region surrounding the MEMS section. The MEMS device further includes a bond pad on a surface of the carrier opposite the MEMS section, wherein the bond pad is electrically connected to the MEMS section.

Abstract: Flow electrification sensors and methods relating thereto may be useful in characterizing fluids, especially the in situ characterization of fluids produced during oil and gas production operations. A system may include a flow path; a flow electrification sensor at least partially contained within the flow path, the flow electrification sensor comprising a static charge accumulator and an insulator arranged such that the static charge accumulator interacts with a fluid in the flow path; a reference sensor; and a signal processor communicably coupled to the flow electrification sensor and the reference sensor.

Abstract: An actuation device (1) which includes an actuation element (3) with a fixed 10 portion (31) and a driving portion (32); wherein the fixed portion (31) includes a crawling surface (311). The driving portion (32) includes a flexible moveable blade (321) positioned in parallel and at a distance from the crawling surface (311). When a power supply voltage is applied between the moveable blade (321) and the crawling surface (311), the free end (3211) comes into contact with the crawling surface (311), and a contact area, between the moveable blade (321) and the crawling surface (311), increases by propagation of the crawling front (3213) along the moveable blade (321). The propagation of the crawling front displaces the moveable blade (321) according to a first orientation.

Abstract: An EAP generator is described, including at least one EAP stack that is disposed between two force-transferring surfaces disposed parallel to one another, having at least one layer, facilitating relative displacement between the end of the EAP stack and the force-transferring surface facing toward that end, in particular a deformable or friction-reducing intermediate layer. A corresponding method for generating electrical energy from elongation energy on a capacitive basis by charge displacement is also described.

Abstract: A mirror assembly includes a frame having a central opening and a mirror plate, which is contained within the central opening of the frame and is shaped to define separate first and second mirrors connected by a bridge extending between the first and second mirrors. A pair of hinges are connected between the frame and the mirror plate at locations on the central axis on opposing sides of the frame so as to enable rotation of the mirror plate about the central axis relative to the frame.

Abstract: This application relates to MEMS transducer having a membrane layer (101) and at least one variable vent structure (301). The variable vent structure has a vent hole for venting fluid so as to reduce a pressure differential across the membrane layer and a moveable vent cover (302a, 302b) which, at an equilibrium position, at least partly blocks the vent hole. The vent cover is moveable from its equilibrium position in response to a pressure differential across the vent cover so as to vary the size of a flow path through the vent hole. In various embodiments the vent cover comprises at least a first flap section (302a) and a second flap section (302b), the first flap section being hingedly coupled to the side of the vent hole and the second flap section being hingedly coupled to the first flap section so as to be moveable with respect to the first flap section.

Abstract: Provided are an acoustic probe and a method of manufacturing the acoustic probe including a chip module substrate, a piezoelectric unit for cross-converting ultrasound and an electric signal while the piezoelectric unit is vibrating, and a connection unit for supporting the piezoelectric unit and electrically connecting the piezoelectric unit and the chip module substrate.

Abstract: In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

Abstract: A substrate support assembly includes a ceramic puck and a thermally conductive base having an upper surface that is bonded to a lower surface of the ceramic puck. The thermally conductive base includes a plurality of thermal zones and a plurality of thermal isolators that extend from the upper surface of the thermally conductive base towards a lower surface of the thermally conductive base, wherein each of the plurality of thermal isolators provides approximate thermal isolation between two of the plurality of thermal zones at the upper surface of the thermally conductive base.

Abstract: A device and method recovering heat energy and converting the heat energy into electrical energy by heat-sensitive molecules to which are connected magnetic particles, with the heat-sensitive molecules able to move the magnetic particles in relation to a conductive circuit to generate an induced current in the circuit.

Abstract: The invention is related to a totally implantable cochlear implant having a transducer which is a piezoelectric vibration energy harvester to be mounted on the ossicular chain or the tympanic membrane to detect the frequency of oscillations and generate the required voltage to stimulate the relevant auditory nerves. The invention enables patients' continuous access to sound, since it eliminates the outside components of conventional cochlear implants. The invention also eliminates the problem of battery need, since the transducer generates voltage required to stimulate auditory nerves from the vibrations of ossicular chain. The transducer is fabricated using Microelectromechanical Systems (MEMS) fabrication techniques. The invention incorporates of two main parts, a transducer acting both as a frequency detector and an energy harvester, and electrodes to stimulate the auditory nerve inside the cochlea.

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

Abstract: Electrostatic generators/motors designs are provided that generally may include a first rippled stator centered about a longitudinal axis; a second rippled stator centered about the axis, a first rippled rotor centered about the axis and located between the first rippled stator and the second rippled stator. A magnetic field having field lines about parallel with the average plane of at least one of the first rippled stator or the second rippled stator is provided with either a Halbach array configuration or a conductor array configuration.

Abstract: According to an embodiment, a MEMS device includes a deflectable membrane including a first plurality of electrostatic comb fingers, a first anchor structure including a second plurality of electrostatic comb fingers interdigitated with a first subset of the first plurality of electrostatic comb fingers, and a second anchor structure including a third plurality of electrostatic comb fingers interdigitated with a second subset of the first plurality of electrostatic comb fingers. The second plurality of electrostatic comb fingers are offset from the first plurality of electrostatic comb fingers in a first direction and the third plurality of electrostatic comb fingers are offset from the first plurality of electrostatic comb fingers in a second direction, where the first direction is different from the second direction.

Abstract: A motor includes a two-layer rotor and a two-layer stator. The two layer rotor includes an A-phase rotor and a B-phase rotor that are stacked together. When ?1 represents, in electric angle, an angle of the B-phase stator relative to the A-phase stator in a clockwise circumferential direction, and ?2 represents, in electric angle, an angle of the B-phase rotor relative to the A-phase rotor in a counterclockwise circumferential direction, ?1+|?2|=90° is satisfied.

Abstract: A generator includes a first member, a second member and a sliding mechanism. The first member includes a first electrode and a first dielectric layer affixed to the first electrode. The first dielectric layer includes a first material that has a first rating on a triboelectric series. The second member includes a second material that has a second rating on the triboelectric series that is different from the first rating. The second member includes a second electrode. The second member is disposed adjacent to the first dielectric layer so that the first dielectric layer is disposed between the first electrode and the second electrode. The sliding mechanism is configured to cause relative movement between the first member and the second member, thereby generating an electric potential imbalance between the first electrode and the second electrode.

Abstract: A varying capacitance rotating electrical machine provides capacitor elements, such as capacitor plates, that move with respect to each other as separated by a thin film of fluid, for example, air, on which one capacitor element floats. In one embodiment, multiple plates provide for three-phase operation. Narrow gaps provided by the floating capacitor elements increase the power density of the rotating electrical machine.

Abstract: A motor system comprises a rotor shaft, and a magnetic drive motor and a capacitive drive motor. An engagement system is configured for selectively engaging one or both of the magnetic drive motor and the capacitive drive motor with the rotor shaft, in order to rotate the rotor shaft at a desired rotational speed and generate a desired output torque. An actuator may be coupled to the rotor shaft in order to convert the rotational speed and/or output torque (or a rotational position of the rotor shaft) for operation on a load, for example to position the load rotationally or linearly with respect to the rotor axis, or to exert a force or torque on the load.

Abstract: A generator for producing an electric field for with an inspection technology system is provided. The generator provides the required variable magnitude quasi-static electric fields for the “illumination” of objects, areas and volumes to be inspected by the system, and produces human-safe electric fields that are only visible to the system. The generator includes a casing, a driven, non-conducting and triboelectrically neutral rotation shaft mounted therein, an ungrounded electrostatic dipole element which works in the quasi-static range, and a non-conducting support for mounting the dipole element to the shaft. The dipole element has a wireless motor system and a charging system which are wholly contained within the dipole element and the support that uses an electrostatic approach to charge the dipole element.

Abstract: A generator includes a first cylindrical member and a second cylindrical member. The first cylindrical member includes a first dielectric layer including a first material that has a first rating on a triboelectric series; and a first conductive strip disposed around an exterior surfaces of the first cylindrical member. The first conductive strip includes a second material that has a second rating on the triboelectric series that is different from the first rating. The second cylindrical member is disposed about the first cylindrical member and includes a second dielectric layer that includes the first material. The second cylindrical member also includes the second material and at least one second conductive strip disposed around an interior surface of the second cylindrical member. A sliding mechanism causes lateral relative motion between the first cylindrical member against the second cylindrical member, generating an electric potential imbalance between the first and second conductive strip.

Abstract: A micro fabricated sensor for micro-mechanical and nano-mechanical testing and nano-indentation. The sensor includes a force sensing capacitive comb drive for the sensing of a force applied to a sample, a position sensing capacitive comb drive for the sensing of the position of a sample and a micro fabricated actuator to apply a load to the sample. All the sensor components mentioned above are monolithically integrated on the same silicon MEMS chip.

Abstract: A method for fabricating a vibratory structure gyroscope is provided herein. An annular cavity is formed in a first surface of a substrate, the annular cavity defining an anchor post located in a central portion of the annular cavity. A bubble layer is formed over the first surface of the substrate and over the annular cavity. The substrate and the bubble layer are heated to form a hemitoroidal bubble in the bubble layer over the annular cavity. A sacrificial layer is deposited over the hemitoroidal bubble of the bubble layer and an aperture is formed in the sacrificial layer, the aperture disposed over the anchor post in the annular cavity. A resonator layer is deposited over the sacrificial layer and the sacrificial layer between the bubble layer and the resonator layer is removed.

Abstract: An electrostatic induction power generator includes a spherical member for making a distance between surfaces of a first substrate and a second substrate facing each other constant. A housing is provided with a first reference surface to which a surface of the second substrate facing the first substrate is fixed and which is a positioning reference for the second substrate with respect to the surface facing the first substrate in a vertical direction, and a second reference surface with which the spherical member is slidably in contact and which is a positioning reference for the spherical member with respect to the surface facing the first substrate in the vertical direction. The spherical member is slidably in contact with a surface of the first substrate facing the second substrate.

Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.