Piezoelectric Slab Having Different Resonant Frequencies At Different Areas Patents (Class 310/320)
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Patent number: 6711792Abstract: A piezoelectric resonator is constructed to be vibrated in a square type vibration mode and to minimize the variations in the resonant frequency caused by the manufacturing process. The resonator includes a piezoelectric substrate having a pair of main surfaces, electrodes disposed on the pair of main surfaces and grooves provided on one of the main surfaces of the piezoelectric substrate. The grooves divide at least one of the electrodes into a plurality of divided electrodes. One of the plurality of divided electrodes defines an input/output electrode. A maximum distance between the outer edges of two of the grooves disposed opposite to each other across the input/output electrode is about 0.5 to about 0.55 times the length of one side edge of the piezoelectric substrate.Type: GrantFiled: August 27, 2001Date of Patent: March 30, 2004Assignee: Murata Manufacturing Co., Ltd.Inventor: Yasuhiro Itasaka
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Patent number: 6700302Abstract: A piezoelectric resonator includes an internal electrode sandwiched between two layers of ceramic piezoelectric substrates each having a substantially square shape. Surface electrodes are arranged on the front surface and the back surface of the piezoelectric substrate. Both of the piezoelectric substrates are polarization-treated in the substantially perpendicular direction relative to the main surfaces and in the opposite directions with respect to the sandwiched internal electrode. When a signal voltage is applied across the surface electrodes, the piezoelectric resonator is bending-deformed so as to become convex on one side of the main surfaces and become concave on the other side thereof.Type: GrantFiled: July 22, 2000Date of Patent: March 2, 2004Assignee: Murata Manufacturing Co., Ltd.Inventors: Takashi Yamamoto, Yuko Yokoi
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Patent number: 6700303Abstract: A piezoelectric element includes a plurality of piezoelectric layers composed of a piezoelectric material containing Sr, Bi, Ti, and O, at least three vibration electrodes opposing each other, each disposed among the piezoelectric layers, and an energy-confining region formed in a region in which the vibration electrodes overlap, the energy-confining region being parallel to the planes of the vibration electrodes and exciting an n-th order longitudinal thickness vibration. The maximum length L of a secant between two intersections on the periphery of the energy-confining region and the distance t between the topmost vibration electrode and the bottommost vibration electrode satisfy the relationship nL/t of less than 10. The piezoelectric element is thermally stable and has a narrow allowable error.Type: GrantFiled: December 18, 2002Date of Patent: March 2, 2004Assignee: Murata Manufacturing Co. LtdInventors: Akira Ando, Masahiko Kimura, Takuya Sawada
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Publication number: 20040017133Abstract: A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the pair of thin plate sections. Movable sections, having mutually opposing end surfaces, are formed proximate the ends of the thin plate sections. A distance between the end surfaces is not less than a length of the movable sections.Type: ApplicationFiled: May 30, 2003Publication date: January 29, 2004Applicant: NGK Insulators, Ltd.Inventors: Yukihisa Takeuchi, Tsutomu Nanataki, Koji Ikeda, Koji Kimura, Kazuyoshi Shibata
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Patent number: 6679272Abstract: The present invention provides a megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate. The apparatus includes a probe having one of a variety of cross-sections configured to decrease the ratio of normal-incident waves to shallow-angle waves. One such cross-section includes a channel running along a portion of the lower edge of the probe. Another cross-section includes a narrow lower edge of the probe. Another cross-section is elliptical. Another cross-section includes transverse bores originating in the lower edge of the probe. As an alternative to, or in addition to, providing a probe having a cross-section other than circular, the present invention may also provide a probe having a roughened lower surface.Type: GrantFiled: August 3, 2001Date of Patent: January 20, 2004Assignee: Verteq, Inc.Inventors: Mario E. Bran, Michael B. Olesen, Yi Wu
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Patent number: 6637087Abstract: A method of manufacturing an edge reflection type surface acoustic wave device includes the step of preparing a surface acoustic wave mother substrate having a plurality of interdigital transducers formed on one main surface thereof. A cut groove is formed in the substrate by cutting the surface acoustic wave mother substrate beginning from the one main surface side thereof. This step of forming a cut groove is repeated so as to produce a plurality of cut grooves so that the first reflection edge of the respective surface acoustic wave devices are sequentially formed. Next, similarly, cut grooves are sequentially formed on the surface acoustic wave mother substrate from the one main-face side thereof so as not to reach the other main surface thereof, whereby the second reflection edges of the respective surface acoustic wave devices are sequentially formed.Type: GrantFiled: March 17, 2000Date of Patent: October 28, 2003Assignee: Murata Manufacturing Co., Ltd.Inventors: Hideya Horiuchi, Michio Kadota, Junya Ago, Seigo Hayashi, Yasunori Takakuwa
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Patent number: 6628044Abstract: A vibration motor comprising at least one stationary part and one part driven to move relative to the fixed part, together with excitation that is suitable for exerting forces that tend to move rigid contact sectors presented by the fixed part and/or the moving part and to cause the rigid sectors to vibrate in vibration modes that combine tangential vibration and normal vibration, thereby driving the movement of the moving part, the motor presenting for the tangential vibration or the normal vibration a main resonant mode and at least one secondary resonant mode, wherein the secondary resonant mode is at a frequency that is substantially equal to a harmonic frequency of the main resonant mode.Type: GrantFiled: March 9, 2001Date of Patent: September 30, 2003Assignee: Sagem S.A.Inventors: Jean Thierry Audren, Daniel Bezanere
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Publication number: 20030178918Abstract: A laminate type piezoelectric element having an improved piezoelectric property is provided. Vibration electrodes are arranged in a piezoelectric body, and high-order vibration of the thickness vibration is excited. The piezoelectric ceramic includes two ceramic piezoelectric layers which are laminated, and are integrally formed. Each of the ceramic piezoelectric layers contains ceramic crystal grains having shape anisotropy and spontaneous polarization preferentially oriented in one plane. The in-plane direction of this plane is perpendicular to the principal surfaces of the ceramic piezoelectric layers. The ceramic piezoelectric layers are polarized in the same thickness direction.Type: ApplicationFiled: March 24, 2003Publication date: September 25, 2003Inventors: Hirozumi Ogawa, Masahiko Kimura, Koichi Hayashi, Akira Ando
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Patent number: 6621193Abstract: A thickness extensional vibration mode piezoelectric resonator includes a piezoelectric body having piezoelectric layers and N internal electrodes disposed therein, where N is an integer equal to 3 to 5. Electric fields of opposite polarity are applied alternately in the direction of thickness to the piezoelectric layers located between the internal electrodes. When the thickness of a piezoelectric layer between adjacent internal electrodes in the direction of thickness is denoted by D and the thicknesses of a first and second piezoelectric layer outside the outermost internal electrodes in the direction of thickness are denoted by D1 and D2, the following relationships are satisfied: 0.50≦(D1+D2)/2D≦1.00 at N=3, 0.50≦(D1+D2)/2D≦0.90 at N=4, and 0.50≦(D1+D2)/2D≦0.80 at N=5.Type: GrantFiled: August 26, 2000Date of Patent: September 16, 2003Assignee: Murata Manufacturing Co., Ltd.Inventor: Toshio Nishimura
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Patent number: 6621194Abstract: A piezoelectric element includes a piezoelectric substrate formed of a piezoelectric material and a pair of electrodes formed on a first principal plane and a second principal plane of the piezoelectric substrate, wherein thickness shear vibration occurs, and the vibration direction of the thickness shear vibration is nonparallel to the side walls of the piezoelectric substrate.Type: GrantFiled: November 10, 2000Date of Patent: September 16, 2003Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Masato Sugimoto, Tetsuro Otsuchi, Katsunori Moritoki
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Patent number: 6604266Abstract: A method for manufacturing a piezoelectric component in which a resonating portion on a piezoelectric substrate is provided with a deposit that is sensitive to radiation in a range of wavelengths from 350 to 2000 nm so as to have portions thereof trimmed away to form indentations therein without burning the deposit to avoid generating heat that is injurious to the piezoelectric component and substrate. A laser beam in the frequency range of 350 to 2000 nm is then caused to impinge on the deposit to cause the formation of trimmed indentations without substrate damaging heat in a controlled manner to adjust the resonance frequency of the piezoelectric component.Type: GrantFiled: June 27, 2000Date of Patent: August 12, 2003Assignee: TDK CorporationInventors: Seiichi Tajima, Takahito Kiriyama
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Patent number: 6604267Abstract: A method for manufacturing a piezoelectric device includes the steps of providing a piezoelectric substrate having a piezoelectric driving unit and laminating outer coating substrates on major surfaces thereof via adhesive layers. Each of the adhesive layers includes a first layer of an adhesive having a Shore D hardness after curing of not more than approximately 60 and disposed so as not to be exposed in a region of lateral side surfaces of the layered body provided with the external electrodes, second and third layers of an adhesive having a Shore D hardness of at least approximately 60, and the third layer of having a viscosity before curing of at least approximately 3.0×105 mPas at a temperature of 25° C. The third layer is disposed between the periphery of the first layer and the region of the lateral side surfaces of the layered body provided with the external electrodes.Type: GrantFiled: June 22, 2001Date of Patent: August 12, 2003Assignee: Murata Manufacturing Co., Ltd.Inventors: Kunio Sawai, Motohide Yonemura, Syuji Fujii
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Patent number: 6577043Abstract: A highly compact piezoelectric resonator having excellent resonant characteristics and very small resonant resistance includes an upper electrode disposed on one of two main surfaces of a piezoelectric film and a lower electrode disposed on the other main surface of the piezoelectric film. The upper electrode includes a first external-signal extracting electrode, a first leading electrode, and three first vibrating electrodes. The lower electrode includes a second external-signal extracting electrode, a second leading electrode, and three second vibrating electrodes. The three first vibrating electrodes are arranged substantially perpendicularly to the three second vibrating electrodes via the piezoelectric film. Vibrating sections are located at positions where the first vibrating electrodes are arranged substantially perpendicularly to the second vibrating electrodes.Type: GrantFiled: August 28, 2001Date of Patent: June 10, 2003Assignee: Murata Manufacturing Co., Ltd.Inventors: Norimitsu Tsukai, Masaki Takeuchi, Yukio Yoshino
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Patent number: 6572552Abstract: An ultrasonic diagnostic apparatus for observing a detectable object to be ultrasonically diagnosed. The apparatus includes an ultrasonically diagnostic probe unit for probing the object with ultrasonic waves in response to input pulse signals and with an ultrasonic echo from the object, a signal transmitting unit to generate the input pulse signals, a signal receiving unit for receiving the ultrasonic echo and processing output signals to be converted into an image of the object, and a display unit to display the image.Type: GrantFiled: July 31, 2001Date of Patent: June 3, 2003Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Hiroshi Fukukita
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Publication number: 20030088960Abstract: A method of fabricating an air gap type Film Bulk Acoustic Resonator (FBAR) is provided. The FBAR fabrication method includes: (a) depositing and patterning a sub-electrode on a semiconductor substrate; (b) depositing and patterning a piezoelectric material layer on the sub-electrode; (c) depositing and patterning an upper electrode on the piezoelectric material layer; (d) forming a hole which passes through the upper electrode, the piezoelectric material layer and the sub-electrode; and (e) injecting a fluorine compound into the hole so that an air gap can be formed on the semiconductor substrate, and non-plasma etching the semiconductor substrate. Since the FBAR fabrication method does not include forming and eliminating the sacrificial layer in the fabrication process, the fabrication process is simplified. In addition, the air gap having the limitless frequency selectivity can be formed and the performance of the FBAR can be enhanced.Type: ApplicationFiled: May 8, 2002Publication date: May 15, 2003Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: O-Gweon Seo, Chan-Bong Jun, Man-Geum Park
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Patent number: 6538361Abstract: A piezoelectric oscillator is constructed to prevent deterioration of frequency accuracy caused by external-capacitance variations to maintain a high degree of frequency accuracy. Additionally, an undesired short-circuit is prevented from occurring even when the height of the oscillator is reduced. In this oscillator, on an upper surface of a capacitor substrate only first and second external electrodes connected to a piezoelectric resonator are provided. The piezoelectric resonator connects to the external electrodes. A parallel capacitance section for loading capacitance in parallel to the piezoelectric resonator is connected between the first and second external electrodes. Additionally, load capacitance sections for interposing load capacitances are connected between the first external electrode and a third external electrode and between the second and third external electrodes. The parallel capacitance section and the pair of load capacitance sections are contained in the capacitor substrate.Type: GrantFiled: July 18, 2001Date of Patent: March 25, 2003Assignee: Murata Manufacturing Co., Ltd.Inventor: Ryuhei Yoshida
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Patent number: 6538896Abstract: A surface mount type electronic component includes a substantially rectangular case substrate, an electronic element mounted on the case substrate along the longitudinal direction, and a cap which is fixed onto the case substrate in such a manner as to cover the electronic element. First and second top-surface electrodes and first and second bottom-surface electrodes, which extend along the width direction of the case substrate, are arranged with a spacing on the top surface and the bottom surface of the case substrate, respectively. The first top-surface electrode and the first bottom-surface electrode are connected to each other via a first side electrode disposed on the side surface of the case substrate, and the second top-surface electrode and the second bottom-surface electrode are connected to each other via a second side electrode disposed on the side surface of the case substrate.Type: GrantFiled: April 15, 2002Date of Patent: March 25, 2003Assignee: Murata Manufacturing Co., Ltd.Inventors: Eitaro Kameda, Toshiyuki Baba, Hideaki Kuroda, Yasuhiro Morimoto
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Patent number: 6531806Abstract: A chip-type piezoelectric component has greatly increased bond strength of external electrodes while allowing the external electrodes to be easily formed. The external electrodes including a conductive paste are continuously formed on the side surface of a laminated body in which a piezoelectric element is laminated with seal substrates in addition to embedding a part of the external electrodes in recesses in which terminal electrodes of the piezoelectric element have been exposed. A metal plating layer having good solder wettability is provided on the outermost layer of the external electrode. The bonding strength between the external electrode and the laminated body is greatly improved by the wedge effect of the conductive paste penetrated in the recess, thereby preventing the electrode from peeling.Type: GrantFiled: August 21, 2000Date of Patent: March 11, 2003Assignee: Murata Manufacturing Co., Ltd.Inventor: Muneyuki Daidai
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Patent number: 6525449Abstract: In an energy-trapping piezoelectric resonator which utilizes a harmonic in a thickness-extensional vibration mode, first and second excitation electrodes are provided partially on both major surfaces of a piezoelectric substrate such that they are opposed to each other on the front and rear surfaces via the piezoelectric substrate. First and second lead electrodes are connected to the first and second excitation electrodes, and first and second terminal electrodes provided along edges of the piezoelectric substrate are connected to the first and second lead electrodes, respectively. A spurious suppressing electrode section is connected to a portion of at least one of the first and second lead electrodes.Type: GrantFiled: November 12, 1998Date of Patent: February 25, 2003Assignee: Murata Manufacturing Co., Ltd.Inventor: Masaya Wajima
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Patent number: 6518688Abstract: A piezoelectric vibration element comprises a vibration element part 1, a vibration propagation part 2 made of a same material with a greater thickness than the vibration element part 1, a groove 6 disposed in the boundary of the vibration element part 1 and vibration propagation part 2, excitation electrodes 3 confronting the face side and back side of the vibration element part 1, a connection electrode 4 disposed in the vibration propagation part 2, and an external lead-out electrode 5 connected electrically to the connection electrode 4. In this piezoelectric vibration element, the main vibration is the overtone mode, that is, when the lowest order wave mode is first-order or second-order, the wavelength in the thickness direction is (2n+1) times (n being a natural number) thereof.Type: GrantFiled: February 28, 2001Date of Patent: February 11, 2003Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Yukinori Sasaki
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Patent number: 6515401Abstract: A piezoelectric resonator which achieves a compact oscillator with high performance having high thermal resistance and a narrow tolerance includes an element body having an excitation layer and a non-excitation layer. One vibration electrode is provided on the surface of the excitation layer and another vibration electrode is provided between the excitation layer and the non-excitation layer. The two vibration electrodes extend from opposing ends of the excitation layer toward the approximate central portion thereof so as to oppose each other at the approximate central portion of the excitation layer. On end-surfaces of the element body, end-surface electrodes are connected to the vibration electrodes, respectively.Type: GrantFiled: October 30, 2000Date of Patent: February 4, 2003Assignee: Murata Manufacturing Co., LTDInventors: Akira Ando, Masahiko Kimura, Takuya Sawada, Jiro Inoue, Hiroaki Kaida, Toru Nagae
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Patent number: 6492759Abstract: A piezoelectric resonator has a piezoelectric substrate on obverse and reverse surfaces of which electrodes are disposed. Comb-shaped electrodes consisting of electrode fingers and spaces are disposed around the electrode situated at least on one surface of the piezoelectric substrate and at prescribed space intervals between this electrode and each of those comb-shaped electrodes. This arrangement enables obtaining means for suppressing the occurrence of spurious waves due to an inharmonic mode in the 200-MHz band high-frequency resonator or two-pole monolithic filter.Type: GrantFiled: September 20, 2000Date of Patent: December 10, 2002Assignee: Toyo Communication Equipment Co., Ltd.Inventor: Jun Watanabe
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Publication number: 20020140318Abstract: A piezoelectric/electrostrictive actuator in which a plurality of piezoelectric/electrostrictive elements each consisting of a piezoelectric/electrostrictive body and at least one pair of electrodes are formed on a thick ceramic substrate, said actuator being activated by the displacement of said piezoelectric/electrostrictive bodies, is provided. The piezoelectric/electrostrictive elements are joined to said ceramic substrate into respective unified bodies, and are two-dimensionally arranged independently of each other. The piezoelectric/electrostrictive actuator ensures providing a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration as well as a method for manufacturing such a actuator can be provided.Type: ApplicationFiled: September 12, 2001Publication date: October 3, 2002Applicant: NGK Insulators, Ltd.Inventors: Yukihisa Takeuchi, Hiroyuki Tsuji, Kazumasa Kitamura, Nobuo Takahashi, Koji Kimura
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Patent number: 6448690Abstract: An energy-trap type piezoelectric resonator utilizes a fundamental wave of a thickness shear vibration mode and includes resonance electrodes provided on both main surfaces of a substantially rectangular piezoelectric plate so as to face each other with the piezoelectric plate disposed therebetween. An energy trap vibration portion including a portion of the piezoelectric plate where the resonance electrodes overlap each other is asymmetrical with respect to the center in the longitudinal direction of the piezoelectric plate.Type: GrantFiled: December 28, 2000Date of Patent: September 10, 2002Assignee: Murata Manufacturing Co., Ltd.Inventors: Kazuhiro Sawai, Ryuhei Yoshida
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Publication number: 20020121840Abstract: A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.Type: ApplicationFiled: March 5, 2001Publication date: September 5, 2002Inventors: John D. Larson, Paul D. Bradley, Richard C. Ruby
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Patent number: 6437488Abstract: A multilayer piezoelectric component includes a compact and sintered ceramic body including a piezoelectric ceramic material and having opposite first and second sides. First and second external electrodes are respectively provided on the first and second sides of the compact ceramic sintered body. A plurality of internal electrodes are stacked in the ceramic sintered body so as to overlap each other with ceramic layers disposed therebetween in the thickness direction. The internal electrodes are arranged to be electrically connected to the first or second external electrode. A dummy electrode is provided between an end of at least one of the internal electrodes opposite to the end connected to one of the external electrodes, and the other external electrode not connected to the at least one internal electrode at the height where the at least one internal electrode is located.Type: GrantFiled: December 1, 1999Date of Patent: August 20, 2002Assignee: Murata Manufacturing Co., Ltd.Inventors: Mitsuru Sube, Yoshiaki Kohno
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Patent number: 6437482Abstract: A piezoelectric resonator using a thickness extensional vibration mode, comprises a vibrator portion made up of two or more layers of piezoelectric thin-films where the piezoelectric thin-films and a plurality of insulating thin films are alternately laminated. An alternating voltage is independently applied to each layer of the piezoelectric thin-films for a higher-order vibration mode to be dominantly excited.Type: GrantFiled: April 11, 2000Date of Patent: August 20, 2002Assignee: Murata Manufacturing Co., Ltd.Inventor: Akihiko Shibata
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Patent number: 6419848Abstract: A piezoelectric actuator, comprising a stacked structure consisting of a top electrode 5, a piezoelectric film 4, and a bottom electrode 3, wherein the piezoelectric film comprises a first group 42 of piezoelectric ceramic particles and a second group 43 of piezoelectric ceramic particles. A distinctive feature is that the particles constituting the first group of piezoelectric ceramic particles are larger than the jingo particles constituting the second group of piezoelectric ceramic particles, and the first group of piezoelectric ceramic particles and the second group of piezoelectric ceramic particles have mutually different compositions. The piezoelectric actuator can thus be manufactured by an application method in a low-temperature environment, and a thicker piezoelectric film can be obtained. In addition, a highly practical piezoelectric film can be provided by combining the advantages of a plurality of material types.Type: GrantFiled: March 2, 2000Date of Patent: July 16, 2002Assignee: Seiko Epson CorporationInventors: Hong Qiu, Koji Sumi, Tsutomu Nishiwaki, Haruo Nakamura
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Publication number: 20020079786Abstract: A piezoelectric resonator uses a radial flexural mode vibration. In the piezoelectric resonator, an even number of at least four electrode layers and an odd number of at least three piezoelectric layers are alternately stacked. Among the three piezoelectric layers, at least two piezoelectric layers are polarized in a thickness direction. The four electrode layers are connected to one another so that, in at least one piezoelectric layer among the three piezoelectric layers, an electric field is generated in a direction that is identical to the polarization direction of the at least one piezoelectric layer, and in at least another piezoelectric layer among the three piezoelectric layers, an electric field is generated in a direction that is opposite to the polarization direction of the at least another piezoelectric layer. Among the three piezoelectric layers, at least one piezoelectric layer has a thickness that is different from each of the thicknesses of the other piezoelectric layers.Type: ApplicationFiled: November 28, 2001Publication date: June 27, 2002Applicant: Murata Manufacturing Co., Ltd.Inventor: Hirofumi Funaki
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Patent number: 6404102Abstract: A piezoelectric substrate is constituted by a piezoelectric material of an effective Poisson's ratio being less than 1/3. The substrate has a pair of opposite faces and the opposite faces are provide with a pair of vibrating electrodes in correspondence. The opposite faces of the piezoelectric substrate are rectangular respectively. The sum of the lengths Lc of the one faces in the opposite faces 1a, 1b and the length Wc of the other side of the same is limited within range 2.22 mm≦≦2.24 mm or 2.34 mm≦≦2.48 mm, said one faces being vertical each other. The areas Sc of the opposite faces are 1.22 mm2≦Sc≦1.26 mm2 or 1.35 mm2≦Sc≦1.538 mm2. Accordingly, though using the piezoelectric material of the effective Poisson's ratio being less than 1/3, vibration in the thickness extensional fundamental waves can be steadily utilized.Type: GrantFiled: August 3, 2000Date of Patent: June 11, 2002Assignee: TDK CorporationInventors: Toshiyuki Suzuki, Nobuyuki Miki, Masakazu Hirose, Masayoshi Inoue
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Publication number: 20020067106Abstract: The present invention provides a robust FBAR device and a simplified method of fabricating a FBAR device. FBAR device according to the present invention includes a membrane supporting layer between a substrate and a membrane layer, surrounding an air gap region. The membrane supporting layer supports the membrane layer to obtain a robust structure. Firstly, the method forms a sacrificial layer on the substrate, then a photoresist pattern is formed on air gap forming region at a top surface of the sacrificial layer, the method removes the sacrificial layer to form a sacrificial pattern by using the photoresist pattern as an etching mask. An insulating material then deposits on the substrate, the photoresist pattern is remove, and a membrane layer is formed on a top surface of the sacrificial layer and the insulating material layer. Finally, the method removes the sacrificial pattern to form an air gap.Type: ApplicationFiled: October 25, 2001Publication date: June 6, 2002Applicant: Samsung Electro-Mechanics Co., Ltd.Inventors: Kuk Hyun Sunwoo, Hyoung Jun Kim, Jae Wook Jang
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Publication number: 20020057039Abstract: A piezoelectric oscillator is constructed to prevent deterioration of frequency accuracy caused by external-capacitance variations to maintain a high degree of frequency accuracy. Additionally, an undesired short-circuit is prevented from occurring even when the height of the oscillator is reduced. In this oscillator, on an upper surface of a capacitor substrate only first and second external electrodes connected to a piezoelectric resonator are provided. The piezoelectric resonator connects to the external electrodes. A parallel capacitance section for loading capacitance in parallel to the piezoelectric resonator is connected between the first and second external electrodes. Additionally, load capacitance sections for interposing load capacitances are connected between the first external electrode and a third external electrode and between the second and third external electrodes. The parallel capacitance section and the pair of load capacitance sections are contained in the capacitor substrate.Type: ApplicationFiled: July 18, 2001Publication date: May 16, 2002Applicant: Murata Manufacturing Co., LtdInventor: Ryuhei Yoshida
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Patent number: 6388363Abstract: A small and easily produced piezoelectric resonator, which effectively damps unwanted vibration and utilizes intended vibration includes excitation electrodes provided on both main surfaces of a piezoelectric substrate, and first and second lead-out electrodes and first and second terminal electrodes electrically connected to the excitation electrodes, respectively. At least one of the terminal electrodes includes an electrode extension portion arranged to extend into the imaginary region where the first and second excitation electrodes are extended to at least one of the side edges of the piezoelectric substrate.Type: GrantFiled: November 10, 2000Date of Patent: May 14, 2002Assignee: Murata Manufacturing, Ltd.Inventors: Kenichi Kotani, Masakazu Yoshio
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Publication number: 20020047503Abstract: An object of the present invention is to provide a quartz resonator unit and a quartz oscillator having a small size and a light weight and having the capability of oscillating in the overtone mode, and also to provide a quartz element for use in the quartz resonator unit and quartz oscillator. Thus, a further object is to determine the optimum width-to-thickness ratio of the quartz element at which the quartz element having a width less than 1.5 mm and a length less than 4.7 mm does not show coupling with spurious vibrations over the entire range of operation temperature. From the experiments and evaluation performed repeatedly, it has been concluded that an AT-cut rectangular quartz element having the width-to-thickness ratio w/t in a range selected from the group consisting of 8.48 0.05, 12.18 ±0.05, 13.22 ±0.07, 14.78 ±0.07, and 15.57 0.07 is suitable as a small-sized quartz element that can oscillate at a high frequency and has excellent temperature characteristics.Type: ApplicationFiled: April 23, 1997Publication date: April 25, 2002Inventor: ITARU NAGAI
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Publication number: 20020043893Abstract: The invention utilizes multiple frequency sound in liquids to improve the cleaning or processing effect. The sound frequencies are produced in two or more non-overlapping continuous frequency ranges. The sound frequencies are controlled to change frequency within the frequency ranges and the sound frequencies are programmed by a digital code to jump amongst the frequency ranges. The sound frequencies may change continuously within the frequency ranges, and the sound frequencies may jump discontinuously from one frequency range to another. The frequency ranges may also be within different, non-contiguous and non-overlapping frequency bands.Type: ApplicationFiled: October 29, 2001Publication date: April 18, 2002Inventor: William L. Puskas
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Patent number: 6373169Abstract: A capacitor-containing piezoelectric resonance component is constructed to minimize variations in electrostatic capacitance. The component includes dielectric substrates that are disposed on upper and lower surfaces of an energy-trap type piezoelectric resonance element such that a vibration space is defined. On the dielectric substrates, first and second capacitor-defining electrodes are disposed to define a predetermined gap G in a direction that is substantially parallel to the main surface of the dielectric substrate. The second capacitor-defining electrode overlaps with the vibration space via either the dielectric substrates or portions of the dielectric substrates. When G′ represents the distance between an end portion of the second capacitor-defining electrode and an end portion of the vibratory space along the direction in which the first and the second capacitor-defining electrode oppose each other, one of the expressions G′/G≧1 and G′/G≦−0.4 is satisfied.Type: GrantFiled: October 16, 2000Date of Patent: April 16, 2002Assignee: Murata Manufacturing Co., Ltd.Inventor: Masaya Wajima
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Patent number: 6373168Abstract: A balanced input-output piezoelectric filter includes a piezoelectric ceramic substrate provided therein with a ground electrode. Input electrodes and output electrodes are located on both major surfaces of the piezoelectric ceramic substrate so as to be adjacent to each other. The input electrodes function as a balanced-circuit connecting electrode and are connected to balanced input terminals. The output electrodes function as a balanced-circuit connecting electrode and are connected to balanced output terminals.Type: GrantFiled: July 28, 2000Date of Patent: April 16, 2002Assignee: Murata Manufacturing Co., Ltd.Inventor: Masao Gamo
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Patent number: 6369487Abstract: A piezoelectric resonance component includes a capacitor substrate, a piezoelectric resonator mounted on the capacitor substrate, and a cover member fixedly attached to the capacitor substrate. The capacitor substrate includes a dielectric substrate, a plurality of inner electrodes arranged in layers within the dielectric substrate, and a plurality of outer electrodes disposed on at least one of opposed side surfaces of the dielectric substrate. The plurality of inner electrodes include an inner electrode to be connected to a ground potential and a pair of split inner electrodes located at a common vertical position and spaced apart from each other with respect to a central portion of the dielectric substrate.Type: GrantFiled: March 28, 2000Date of Patent: April 9, 2002Assignee: Murata Manufacturing Co., Inc.Inventors: Eitaro Kameda, Toshiyuki Baba, Jiro Inoue, Shoichi Kawabata
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Patent number: 6369488Abstract: A piezoelectric device operable to excite a thickness extensional third harmonic vibration is provided, which can realize a high performance oscillator with an excellent thermal stability. The piezoelectric device includes a piezoelectric substrate. The piezoelectric substrate is formed from a piezoelectric material containing as major components Sr, Bi, Nb, and O. Vibration electrodes are formed on both of the surfaces of the piezoelectric substrate. The range lying between the vibration electrodes and defined by the overlapped vibration electrodes constitutes an energy trapping range. The value L/t is set to be less than 9, in which L represents the length of the longest secant extending between intersections on the periphery of the energy confining region and t represents the distance between the vibration electrodes.Type: GrantFiled: September 21, 2000Date of Patent: April 9, 2002Assignee: Murata Manufacturing Co., Ltd.Inventors: Akira Ando, Masahiko Kimura, Takuya Sawada
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Patent number: 6362561Abstract: An energy-trapping piezoelectric vibration device generates a thickness shear mode and includes an elongated piezoelectric element having first and second longitudinally opposed ends, top and bottom surfaces provided between the first and second ends such that the top and bottom surfaces oppose each other, and beveled surfaces disposed at a vicinity of the first and second ends such that the thickness of the piezoelectric element gradually decreases towards the first and second ends, respectively. First and second vibration electrodes are disposed on the top surface and the bottom surface of the piezoelectric element, respectively. The first and second vibration electrodes are located at an approximate middle portion of the piezoelectric element so as to oppose each other with the piezoelectric element disposed therebetween, to define opposing portions which constitute a vibrator.Type: GrantFiled: February 9, 2000Date of Patent: March 26, 2002Assignee: Murata Manufacturing Co., LTDInventors: Hideaki Kuroda, Ryuhei Yoshida
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Publication number: 20020030419Abstract: A first vibrating electrode is provided on a first side of a piezoelectric substrate perpendicular to the thickness direction. A second vibrating electrode is provided on a second side opposite to the first side to face the first vibrating electrode. A first pad and a second pad are respectively formed on a side of the piezoelectric substrate perpendicular to the thickness direction in area having a small vibration displacement. The first pad and the second pad are electrically connected to the first vibrating electrode and the second vibrating electrode.Type: ApplicationFiled: July 25, 2001Publication date: March 14, 2002Applicant: TDK CORPORATIONInventors: Toshiyuki Suzuki, Nobuyuki Miki
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Publication number: 20020030420Abstract: A highly compact piezoelectric resonator having excellent resonant characteristics and very small resonant resistance includes an upper electrode disposed on one of two main surfaces of a piezoelectric film and a lower electrode disposed on the other main surface of the piezoelectric film. The upper electrode includes a first external-signal extracting electrode, a first leading electrode, and three first vibrating electrodes. The lower electrode includes a second external-signal extracting electrode, a second leading electrode, and three second vibrating electrodes. The three first vibrating electrodes are arranged substantially perpendicularly to the three second vibrating electrodes via the piezoelectric film. Vibrating sections are located at positions where the first vibrating electrodes are arranged substantially perpendicularly to the second vibrating electrodes.Type: ApplicationFiled: August 28, 2001Publication date: March 14, 2002Inventors: Norimitsu Tsukai, Masaki Takeuchi, Yukio Yoshino
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Publication number: 20020027398Abstract: A method for manufacturing a thin plate includes steps of: securing the thin plate at a mounting platform; forming a metal plating film in contact with an external circumferential surface of the thin plate on a surface of the mounting platform; and grinding the thin plate until the thin plate achieves a specific thickness.Type: ApplicationFiled: March 5, 2001Publication date: March 7, 2002Inventors: Noboru Ueda, Mutsumi Touge
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Patent number: 6351055Abstract: A composite piezoelectric component includes a plurality of piezoelectric resonant elements. Each of the plurality of piezoelectric resonant elements includes a substrate having a first major surface and a second major surface disposed opposite to each other. A pair of vibrating electrodes is disposed on the first and second major surfaces, respectively, so as to oppose each other with the substrate disposed therebetween. A ground electrode which is connected to ground is disposed on at least one of the first and second major surfaces. The plurality of piezoelectric resonant elements are stacked on each other so that the major surface of one substrate opposes the major surface of another substrate. A conductive joining member electrically connects at least two of the vibrating electrodes and the ground electrode of the plurality of piezoelectric resonant elements and mechanically bonds the stacked piezoelectric resonant elements.Type: GrantFiled: March 23, 2000Date of Patent: February 26, 2002Assignee: Yurata Manufacturing Co., LTDInventors: Tomoaki Futakuchi, Hisayuki Hashimoto
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Patent number: 6344706Abstract: A piezoelectric component includes a substantially rectangular shaped piezoelectric element, a first elastic material covering at least a pair of end portions of the piezoelectric element, the pair of end portions including edge parts of the piezoelectric element, a second elastic material covering the entire piezoelectric element and the first elastic material, and an outer-cladding resin covering the whole circumference of the piezoelectric element which is covered with the second elastic material.Type: GrantFiled: October 5, 1999Date of Patent: February 5, 2002Assignee: Murata Manufacturing Co., LTDInventors: Koji Morita, Masanobu Sugimori, Muneyuki Daidai
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Publication number: 20020003387Abstract: A piezoelectric resonator is constructed to be vibrated in a square type vibration mode and to minimize the variations in the resonant frequency caused by the manufacturing process. The resonator includes a piezoelectric substrate having a pair of main surfaces, electrodes disposed on the pair of main surfaces and grooves provided on one of the main surfaces of the piezoelectric substrate. The grooves divide at least one of the electrodes into a plurality of divided electrodes. One of the plurality of divided electrodes defines an input/output electrode. A maximum distance between the outer edges of two of the grooves disposed opposite to each other across the input/output electrode is about 0.5 to about 0.55 times the length of one side edge of the piezoelectric substrate.Type: ApplicationFiled: August 27, 2001Publication date: January 10, 2002Applicant: Murata Manufacturing Co., Ltd.Inventor: Yasuhiro Itasaka
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Publication number: 20010050515Abstract: A piezoelectric resonator utilizes a thickness shear vibration mode, which allows for simplification of the manufacturing process, effectively suppresses ripples in the width mode, has superior frequency characteristics and is inexpensive. This piezoelectric resonator includes a pair of vibration electrodes provided on portions of first and second main surfaces, respectively, of a piezoelectric substrate, and a damping member arranged so as to cover a vibrating portion only on one main surface of the piezoelectric resonator and a pair of side surfaces connecting the first and second main surfaces.Type: ApplicationFiled: April 25, 2001Publication date: December 13, 2001Applicant: Murata Manufacturing Co., LtdInventor: Yoshihiro Ikeda
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Publication number: 20010050514Abstract: Transducer elements having a 2-2 or 1-3 composite structure and driven in a k31 transverse mode for small-feature size transducer arrays, which provide improved electrical impedance matching to an ultrasonic imaging system and improved acoustic matching to the human body. The transducer element includes a plurality of thin piezoceramic wafers which are electroded on opposing major surfaces. The spaced wafers are separated by a passive polymer layer in a composite structure. Methods of producing the transducer elements are also described.Type: ApplicationFiled: January 5, 2001Publication date: December 13, 2001Inventor: Turukevere R. Gururaja
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Patent number: 6315577Abstract: An electronic component includes leads which are capable of absorbing impacts during insertion into a printed circuit board and which are superior in terminal pull-out strength and torsional resistance of the terminal. In electronic components having leads, a plurality of lead terminals are joined with a piezoelectric resonator as an electronic component element, and the lead terminals include flat fitting parts provided in the vicinity of first end parts, kinks provided between the fitting parts and second end parts, and first and second flat parts provided between the fitting parts and the kinks.Type: GrantFiled: August 17, 2000Date of Patent: November 13, 2001Assignee: Murata Manufacturing Co., Ltd.Inventor: Daisaku Kugo
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Publication number: 20010038257Abstract: A piezoelectric resonant component is constructed such that it is possible to reduce the thickness of an exterior case member while preventing fracture and chipping of the exterior case member. The piezoelectric resonant component preferably includes exterior substrates defining exterior case members and being stacked on an energy trap type piezoelectric resonant element via adhesive layers disposed therebetween so as to define spaces for allowing for free and unhindered vibration of the piezoelectric vibration portion, and a plurality of external electrodes disposed on the surfaces of the exterior substrates on the opposite side of the surfaces thereof fastened to the piezoelectric resonant element are arranged so as not to overlap with the spaces through the intermediary of the exterior substrates.Type: ApplicationFiled: March 9, 2001Publication date: November 8, 2001Applicant: Murata Manufacturing Co., Ltd.Inventor: Masaya Wajima