Abstract: [Object] To provide a technology such as a piezoelectric coil having higher energy conversion efficiency. [Solving Means] A piezoelectric coil according to the present technology includes a coil-like core material and a plurality of band-like piezoelectric materials. The plurality of piezoelectric materials is helically wound around the core material so as to be alternately arranged along the core material.

Abstract: An acoustic wave device is provided comprising a substrate and at least one resonator structure of a first type and at least one resonator structure of a second type mounted on the substrate. The resonator structures of the first type are configured to operate as capacitors and have a first thickness, causing the resonator structures to have a first passband frequency range. The resonator structures of the second type have a second thickness that is different from the first thickness, causing the resonator structures to have a second passband frequency range. A method for forming such an acoustic wave device is also provided. A die comprising such an acoustic wave device, a filter comprising such an acoustic wave device, a radio-frequency module comprising such an acoustic wave device, and a wireless mobile device comprising such an acoustic wave device are also provided.

Abstract: A piezoelectric measuring device includes a sensor element that generates a measurement signal for a pressure and a data acquisition device to evaluate the measurement signal. The sensor element includes an operational amplifier with an inverting input and an output, a feedback capacitance in parallel with the inverting input and the output, and a reset switching element in parallel with the inverting input and the output. The operational amplifier provides an electrical supply voltage and the data acquisition device includes a measurement cycle circuit configured to activate the electrical supply voltage before a measurement cycle and deactivate after the measurement cycle. The sensor element includes a power-on reset logic to detect the electrical supply voltage accordingly close or reopen the reset switching element.

Abstract: A piezoelectric sensor, comprising at least one first electrode, at least one second electrode, and a piezoelectric material, wherein the piezoelectric material has an anisotropic electromechanical coupling and the at least one first and second electrodes are at least in part embedded in the piezoelectric material, the piezoelectric material having a first surface wherein the electrodes extend vertically within the piezoelectric material from the first surface.

Abstract: A method of forming a piezoelectric thin film includes sputtering a first surface of a substrate to provide a piezoelectric thin film comprising AlN, AlScN, AlCrN, HfMgAlN, or ZrMgAlN thereon, processing a second surface of the substrate that is opposite the first surface of the substrate to provide an exposed surface of the piezoelectric thin film from beneath the second surface of the substrate, wherein the exposed surface of the piezoelectric thin film includes a first crystalline quality portion, removing a portion of the exposed surface of the piezoelectric thin film to access a second crystalline quality portion that is covered by the first crystalline quality portion, wherein the second crystalline quality portion has a higher quality than the first crystalline quality portion and processing the second crystalline quality portion to provide an acoustic resonator device on the second crystalline quality portion.

Abstract: A piezoelectric device includes a support member, and a vibrating portion provided on a support surface of the support member. The vibrating portion includes, in addition to a first electrode, a piezoelectric film and a second electrode arranged in a stacking direction, an insulating film configured to increase an electric resistance value between the first and second electrodes. The first electrode is provided on the support surface of the support member, and includes an opening penetrating the first electrode in the stacking direction. The piezoelectric film is provided on the first electrode to extend across the opening. The second electrode is provided on the piezoelectric film. The insulating film is provided at a position between the first electrode and the second electrode, and at least a part of the insulating film overlaps with the opening in the stacking direction.

Abstract: A piezoelectric device includes a base member, a first conductive film arranged above the base member in contact with an upper surface of the base member, a piezoelectric film arranged above the first conductive film in contact with an upper surface of the first conductive film, a second conductive film arranged on the piezoelectric film, and an insulating portion provided inside a trench penetrating through the piezoelectric film and the first conductive film. The insulating portion has a higher electrical resistivity than the piezoelectric film.

Abstract: An acoustic wave device includes a piezoelectric layer including first and second main surfaces facing each other, an IDT electrode on the first main surface and including first and second busbars facing each other and electrode fingers, a first conductor on the second main surface and facing the first busbar with the piezoelectric layer therebetween, and a support on the second main surface and supporting the piezoelectric layer. A cavity that opens towards the piezoelectric layer is provided in the support, and the first conductor is positioned inside the cavity. An electric potential of the first conductor is different from an electric potential to which the first busbar is connected.

Abstract: Disclosed is a linear array ultrasonic probe, of which a first conductive layer is arranged on an outer wall of a backing body facing an array element layer by means of a gold spraying, electroplating, or chemical plating process, and/or a second conductive layer is arranged on a negative end by means of a gold spraying, electroplating, or chemical plating process, so that a thickness of at least one of the first conductive layer and the second conductive layer can be made thinner, for example, the thickness a?5 micrometers.

Abstract: A transceiver apparatus for maximizing voltage. A voltage booster or transformer is implemented using piezoelectric thin films in substrates, preferably CMOS substrates where active processing of RF signals can lead to highly integrated and inexpensive ICs. The voltage gain is achieved by cascading multiple transducers, formed in the same piezoelectric thin film, or films cascaded in series on top of each other. An array of transducers are connected in parallel or series, connected to the input or output port electrodes. Other approaches include placing the receive transformer in a location where the diffracting field from the transmitter transducer is incident on the receive transducer generating a higher ultrasonic field at the receive transformer and increasing the voltage is to connect an array of transducers, formed in the same layer, or different layers of piezoelectric layer in parallel in drive mode when the pulse is transmitted.

Abstract: A piezoelectric plate sensor comprising a piezoelectric layer; two electrodes; and an insulation layer. The insulation layer is produced by soaking the piezoelectric layer and two electrodes in a mercaptopropyltrimethoxysilane solution with an amount of water from 0.1 v/v. % to about 1 v/v % and at pH from about 8 to about 150 for a period from about 8 to about 15 hours, and the mercaptopropyltrimethoxysilane solution has a concentration of mercaptopropyltrimethoxysilane from about 0.01 v/v % to about 0.5 v/v %. A method of detecting a biomolecule in a sample using the piezoelectric plate sensor in particular, that of detecting a genetic marker with PCR sensitivity and specificity without the need of DNA isolation or amplification is also provided. The piezoelectric plate sensor may be used to diagnose various diseases including breast cancer, myocardial infarction, diarrhea, Clostridium difficile infection, and hepatitis B infection.

Abstract: A hybrid document includes a flexible document having visible markings. One or more light-controlling elements and a controller are embedded in or on the flexible document. The controller is electrically connected to the one or more light-controlling elements to control the one or more light-controlling elements. A power input connection is electrically connected to the controller, or one or more light-controlling elements, or both. A power source can be connected to the power input connection, for example a piezoelectric or photovoltaic power source. In response to applied power, the controller causes the one or more light-controlling elements to emit light. In some embodiments, the controller includes a memory and a value can be stored in the memory and displayed by the light-controlling element(s). In some embodiments, the value can be assigned or varied by a hybrid currency teller machine.

Abstract: A power generation device manufacturing method and a power generation device are proposed. In one embodiment, the method includes (a) forming a halide perovskite active layer on a flexible substrate bent by a stress applied thereto and (b) releasing the stress applied to the substrate on which the halide perovskite active layer is formed, thereby unfolding the bent substrate. By applying a strain to the active layer of the power generation device and controlling the same, using the method described above, it is possible to improve the performance of the power generation device without changing the composition of the active layer or the configuration of the device.

Abstract: A thin-film piezoelectric material elements are arranged on a thin-film piezoelectric material substrate. The thin-film piezoelectric material substrate includes an insulator on Si substrate including a substrate including silicon and an insulating layer on a surface of the substrate. The thin-film piezoelectric material element includes a thin-film laminated part on a top surface of the insulating layer. The thin-film laminated part includes a YZ seed layer including yttrium and zirconium, and formed on the top surface; a lower electrode film laminated on the YZ seed layer; a piezoelectric material film including lead zirconate titanate, shown by a formula Pb (ZrxTi(1-x)) O3(0?x?1), and an upper electrode film laminated on the piezoelectric material film. The thin-film laminated part further includes an upper piezoelectric-material protective-film, laminated on the upper side of the upper electrode film.

Abstract: An injection-molded article of polymer piezoelectric material includes: a helical chiral polymer constituted by a polymer chain and having a unit cell with an a-axis, a b-axis, and a c-axis as crystal axes, wherein b-axis<a-axis<c-axis in terms of lengths of the crystal axes, the c-axis is parallel to a long chain direction of the polymer chain, the helical chiral polymer is a crystal in which the b-axis is uniaxially oriented, and the injection-molded article has piezoelectricity.

Abstract: A piezoelectric transducer comprises a deflectable structure having a first portion and a laterally adjoining second portion. The first portion has a piezoelectric layer and the second portion has an insulating material layer, and the second portion has a higher rigidity and a smaller mass per unit area than the first portion.

Abstract: A piezoelectric actuator includes a substrate, and a drive structure formed on the substrate, wherein the drive structure includes a piezoelectric thin film, and an average grain size of the piezoelectric thin film is smaller than or equal to 1 ?m.

Abstract: A method for manufacturing a structure comprising a thin layer transferred onto a support provided with a charge trapping layer, the method comprising the following steps: —preparing the support comprising forming the trapping layer on a base substrate, the trapping layer having a hydrogen concentration of less than 10{circumflex over (?)}18 at/cm{circumflex over (?)}; —joining the support to a donor substrate by way of a dielectric layer having a hydrogen concentration of less than 10{circumflex over (?)}20 at/cm{circumflex over (?)}3 or comprising a barrier preventing the diffusion of hydrogen toward the trapping layer or having low hydrogen diffusivity; —removing part of the donor substrate to form the thin layer; the manufacturing method exposing the structure to a temperature below a maximum temperature of 1000° C. The present disclosure also relates to a structure obtained at the end of this method.

Abstract: A photoacoustic imaging device is suitable for performing photoacoustic imaging on an object to be tested and includes a light emitting device and a light-transmissible ultrasonic transducer. The light emitting device emits a beam along an optical axis. The light-transmissible ultrasonic transducer is disposed on the light emitting device at the optical axis and includes a transparent substrate and a plurality of ultrasonic transducer units. The plurality of ultrasonic transducer units is disposed on the transparent substrate and allows the beam to pass therethrough and be incident to the object to be tested along the optical axis, for coaxially receiving an ultrasound transmitted from the object to be tested along the optical axis after the beam is incident into the object to be tested.

Abstract: A quartz-crystal vibrating piece includes an element unit, excitation electrodes, and an extraction electrode. The element unit includes a vibrator, a first thick portion, and second thick portions. The vibrator has a quadrilateral shape in plan view, vibrates in a thickness-shear mode, and has a thickness t1. The first thick portion has a rectangular shape in plan view, has a short side connected to one side of the vibrator, extends in a first direction, and has a thickness t2 thicker than the thickness t1. The second thick portions are connected to both side surfaces of an end portion of the first thick portion in an opposite side of the vibrator. Each of the second thick portions extends along a second direction intersecting with the first direction and having a thickness t3 thicker than the thickness t1 and same as or different from the thickness t2.

Abstract: A method of making an acoustic sensor includes forming or providing a mold having one or more grooves extending in a direction of the length of the mold to a distal end of the mold. The method also includes forming or depositing a structure having one or more piezoelectric layers over the top surface of the mold to define a beam with a proximal portion and a distal portion, the distal portion having a corrugated section including one or more grooves that correspond to the one or more grooves of the mold. The method also includes forming or applying an electrode to the proximal portion of the structure and releasing the structure from the mold to form one or more cantilever beams. The corrugated section inhibits bending of the corrugated section along the length of the distal portion of the structure when the acoustic sensor is subjected to sound pressure.

Abstract: Methods of forming electrochemical cells are described. In some implementations, the method can include providing an electrochemical cell having an electrode including electrochemically active material with at least about 20% to about 100% by weight of silicon. The method can include charging the electrochemical cell by providing a formation charge current at about 1 C or greater to the electrochemical cell. The method can also include discharging the electrochemical cell. In various implementations, substantially no rest of greater than about 5 minutes occurs between charging and discharging.

Abstract: A flexible multi-material structure comprises a plurality of overlapping rings that form a generally circular shape perpendicular to a longitudinal axis of the structure; an internal compliant hollow frame having a circumference corresponding to the generally circular shape of the plurality of rings, the internal frame comprising: a plurality of connection clips wherein each connection clip is attached one of the plurality of rings, the internal frame and connection clips defining a longitudinal spacing between the plurality of rings, each of the plurality of rings is shaped to minimize contact with adjacent rings when the structure is articulated, each ring including a spherical profile along an aft interior region which nests with a forward outer region of an adjacent ring, wherein connections between the rings and the frame allows independent motion of the rings and frame, allowing each ring to pivot about a geometric center of the spherical profile.

Abstract: A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

Abstract: The present invention relates to a piezoelectric motor that can be moved with very fine resolution at the nanometer level by means of a piezoelectric element (piezo actuator) that increases in length when a voltage is applied.

Abstract: A display device and a method of manufacturing the same are provided. The display device includes a pixel including an emission area and a non-emission area, a transistor of the pixel, a protective layer on the transistor, and including an opening area overlapping the non-emission area, alignment electrodes on the protective layer and spaced apart from each other, light emitting elements between respective ones of the alignment electrodes in the emission area, and a connection electrode electrically connected to the light emitting elements, and electrically connected to the transistor in the opening area.

Abstract: Piezoelectric composites are described. A piezoelectric composite can include a polymeric matrix, piezoelectric additive(s), and polyol. Methods of making and using the piezoelectric composite are also described.

Abstract: An RF filter system includes a plurality of bulk acoustic wave resonators arranged in a circuit having serial and parallel shunt configurations of resonators. Each resonator having a reflector, a support member including a surface, a first electrode including tungsten, overlying the reflector, a piezoelectric film including crystalline aluminum scandium nitride overlapping the first electrode, a second electrode including tungsten overlapping the piezoelectric film and the first electrode, and a passivation layer including silicon nitride overlying the second electrode. Portions of the support member surface of at least one resonator define a cavity region having a portion of the first electrode of the at least one resonator is located within the cavity region. The pass band circuit response has a bandwidth corresponding to a thickness of at least one of the first electrode, piezoelectric film, second electrode, and passivation layer. The system can include single crystal or polycrystalline BAW resonators.

Abstract: A vibrator device includes a package including a base that is a semiconductor substrate and a lid that is a semiconductor substrate and has a housing section, a vibrator element and a passive element housed in the housing section and placed at the base, an oscillation circuit placed at the base and electrically coupled to the vibrator element, and a circuit that is placed at the base or the lid, is electrically coupled to the passive element, and operates based on an oscillation signal from the oscillation circuit.

Abstract: Ultrasonic probes are provided to abate unwanted signal noise. An ultrasonic probe includes a bundle of rods configured to sample data at a first end and propagate a signal encoding the sampled data to a second end. Each of the rods in the bundle of rods has a substantially similar length and a substantially similar diameter. The ultrasonic probe also includes a shell concentrically disposed around the bundle of rods. The shell is configured to pack the bundle of rods together. The shell includes a plurality of grooves configured to abate a prevailing bulk wave sampled by the first end.

Abstract: A reinforcing element for a structural profile, in particular for a round, oval or elliptical structural tube, includes a composite structure, which has a hollow-cylindrical, helically wound mesh of fiber strands which form an inner shell surface configured to receive the structural profile, wherein the fiber strands are respectively embedded in a matrix material, which has an electroactive polymer which can be stretched along a longitudinal extent of the fiber strands by application of an electrical voltage, such that the composite structure can be expanded by application of the electrical voltage to introduce the structural profile into the composite structure and can be shrunk by switching off the electrical voltage to fix the structural profile on the shell surface in the composite structure.

Abstract: At least some embodiments of the present disclosure an electrostatic sheet jamming device comprising a first sheet having a first conductive layer, a first dielectric layer disposed adjacent to the first conductive layer, and a second sheet comprising a second conductive layer and disposed proximate to the first dielectric layer. The first dielectric layer is disposed between the first conductive layer and the second conductive layer. The first sheet and the second sheet are non-extensible and flexible, wherein the first sheet and the second sheet are slidable relative to each other in a first state. The first sheet and the second sheet are jammed with each other in a second state when a voltage is applied between the first conductive layer and the second conductive layer. In some embodiments, the applied voltage is less than or equal to a break-down voltage of air at a distance between the first conductive layer and the second conductive layer.

Abstract: A piezoelectric device and a manufacturing method thereof in which a piezoelectric film formed of a thin film of a lead zirconate titanate-based perovskite oxide is formed on a substrate, and at least a first region out of the first region and a second region of the piezoelectric film is irradiated with electromagnetic waves having a wavelength of 230 nm or less in a reducing atmosphere to provide a difference in piezoelectric characteristics between the first region and the second region so that the first region has a smaller absolute value of a piezoelectric constant d31 and a smaller dielectric loss tan ? than the second region.

Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a piezoelectric plate having front and back surfaces and an interdigital transducer (IDT). The IDT has a first pitch/mark zone with interleaved fingers having a pitch equal to a first pitch value P1 and a mark equal to a first mark value M1, and a second pitch/mark zone with interleaved fingers having a pitch equal to a second pitch value P2 and a mark equal to a second mark value M2. A radio frequency signal applied to the IDT causes excitation of a same shear primary acoustic mode by both the first pitch/mark zone and the second pitch/mark zone. P1, M1, P2, and M2, are selected such that an amplitude of spurious modes is reduced as compared to a device having a same primary acoustic mode and a single pitch/mark zone.

Abstract: An elastic wave device that excites main vibration of an SH mode includes a piezoelectric layer formed from a piezoelectric material, a carrier substrate, and an IDT electrode formed on the piezoelectric layer. When a wavelength of an elastic wave, which is determined by an electrode cycle P of the IDT electrode, is represented by ?, the piezoelectric layer has a thickness of 0.15? or more and 1.5? or less. The carrier substrate has an acoustic anisotropy, and is arranged in a crystal orientation that reduces unnecessary vibrations of an SV mode and a vertical L-mode.

Abstract: An acoustic resonator with a reinforcing structure is provided according to the present disclosure. The acoustic resonator includes a substrate and a cavity formed on the substrate, a piezoelectric layer is arranged above the substrate and an opening passing through the piezoelectric layer is formed in a peripheral region of the piezoelectric layer. The reinforcing structure includes a reinforcing layer, part of the reinforcing layer is formed at the edge of the opening with being fitted to the edge, to reinforce a resonant functional layer near the edge of the opening, which can reduce a change in stress of the piezoelectric layer and the lower electrode near the edge of the opening after the cavity is released, so that the piezoelectric layer and the lower electrode do not easily collapse due to stress, thereby ensuring the performance of a device. A method for manufacturing the same is further provided.

Abstract: Systems and apparatus are disclosed relating to improved fluid supply systems. In some examples, the improved fluid supply systems use an electrically controllable proportional valve and a surge prevention process to prevent a surge of pressurized fluid at the end of a welding-type operation. In particular, the surge prevention process may coordinate closure of the proportional valve and an on/off solenoid valve so that pressure in the fluid flow path can equalize to an ambient pressure after a welding operation (and/or a post flow operation) has ended. This coordination ensures that there is no pressure buildup and/or associated surge of fluid when the on/off solenoid valve is next opened (e.g., at the start of the next welding operation).

Abstract: Mechanoluminescent devices and articles, such as wearable articles, that include mechanoluminescent devices. The mechanoluminescent devices may have a lateral type architecture or a vertical type architecture. The mechanoluminescent devices may be sensors, including pressure sensors.

Abstract: A PMUT includes a substrate, a stopper, and a multi-layered structure, where the substrate includes a corner, and a cavity is disposed in the substrate. The stopper is in contact with the corner of the substrate and the cavity. The multi-layered structure is disposed over the cavity and attached to the stopper and the multi-layered structure includes at least one through hole in contact with the cavity.

Abstract: Mechanoluminescent devices and articles, such as wearable articles, that include mechanoluminescent devices. The mechanoluminescent devices may have a lateral type architecture or a vertical type architecture. The mechanoluminescent devices may be sensors, including pressure sensors.

Abstract: Mechanoluminescent devices and articles, such as wearable articles, that include mechanoluminescent devices. The mechanoluminescent devices may have a lateral type architecture or a vertical type architecture. The mechanoluminescent devices may be sensors, including pressure sensors.

Abstract: A through hole formed in an AT-cut crystal plate includes an inclined surface (72) that extends from a peripheral area toward a penetrating part (71) in a center part of the through hole. The inclined surface (72) includes: a first crystal surface S1 that extends from the penetrating part (71) toward the peripheral area of the through hole in a ?Z? and a +X directions; a second crystal surface S2 that extends from the penetrating part (71) toward the peripheral area of the through hole in the ?Z? and the +X directions and that contacts with the first crystal surface S1 in the +Z? and the +X directions of the first crystal surface S1; and a third crystal surface S3 that contacts with the second crystal surface S2 in the +X direction of the second crystal surface S2 and that contacts with the main surface of the AT-cut crystal plate.

Abstract: A piezoelectric generator structure disposed between an upper platform and a lower platform that includes a lower piezoelectric pad, an upper piezoelectric pad, and a connecting shaft. The lower piezoelectric pad coupled to the upper piezoelectric pad via the connecting shaft, where the lower piezoelectric pad is configured to compress under a downward motion of the upper platform during a compression movement due to an additional load being applied to an existing load on a top surface of the upper platform, where the lower piezoelectric pad produces a first voltage due to the compression movement. The upper piezoelectric pad configured to compress under an upward motion of the upper platform during a rebound movement of the upper platform, where the upper piezoelectric pad produces a second voltage due to the rebound movement. The generator structure configured to provide the first and the second voltage to a coupled power storage unit.

Abstract: There is provided a laminated substrate having a piezoelectric film, including: a substrate; a first electrode film provided on the substrate; and a piezoelectric film provided on the first electrode film, wherein an oxide film containing an oxide represented by a composition formula of RuOx or IrOx, is provided on the piezoelectric film.

Abstract: Mechanoluminescent devices and articles, such as wearable articles, that include mechanoluminescent devices. The mechanoluminescent devices may have a lateral type architecture or a vertical type architecture. The mechanoluminescent devices may be sensors, including pressure sensors.

Abstract: A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

Abstract: Devices and processes for preparing devices are described for reducing resonance of spurious waves in a bulk acoustic resonator and/or for obstructing propagation of lateral waves out of an active region of the bulk acoustic resonator. A first electrode is coupled to a first side of a piezoelectric layer and a second electrode is coupled to a second side of the piezoelectric layer to form a stack having the active region. The piezoelectric layer in the active region is configured to resonate in response to an electrical signal applied between the first electrode and the second electrode. One or more perforations in the first electrode, the piezoelectric layer and/or the second electrode, and/or one or more posts or beams supporting the stack, reduce resonance of spurious waves and obstruct propagation of lateral acoustic waves out of the active region.

Abstract: A display apparatus includes a display panel configured to display an image and a plurality of vibration generating devices on a rear surface of the display panel, the display panel being at least one of a vibration plate configured to output sound and a vibration plate configured to output a haptic vibration. Each of the plurality of vibration generating devices includes a first electrode under the display panel, a piezoelectric member under the first electrode, a damping member in a periphery the piezoelectric member, and a second electrode under the piezoelectric member.

Abstract: An imaging lens driving module includes a base, a casing, a driving mechanism and a damping element. The base has an opening, and the casing has a central aperture corresponding to the opening. The casing includes a plastic frame portion and a metal structure portion. The plastic frame portion is coupled to the base. The metal structure portion has a plurality of pins extending towards the base. The driving mechanism is disposed in the casing. The driving mechanism is configured to drive the lens unit to move in a direction parallel to an optical axis. The damping element is connected to the pins and the lens unit. The metal structure portion is insert-molded with the plastic frame portion to form the casing. The pins are located closer to the optical axis than the other part of the metal structure portion to the optical axis.

Abstract: Provided is a piezoelectric thin film device in which lattice mismatch between a piezoelectric thin film and a lower electrode layer (first electrode layer) is reduced. A piezoelectric thin film device 10 comprises a first electrode layer 6a and a piezoelectric thin film 2 laminated directly on the first electrode layer 6a; the first electrode layer 6a includes an alloy composed of two or more metal elements; the first electrode layer 6a has a face-centered cubic lattice structure; and the piezoelectric thin film 2 has a wurtzite structure.