Rectangular Plate Patents (Class 310/368)
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Patent number: 8004164Abstract: In a piezoelectric device that uses a vibration mode in a direction parallel to a polarization direction, a single crystal device that achieves an electromechanical coupling factor of 65% or more, which is more than the electromechanical coupling factor (about 60%) of the existing flat plane type piezoelectric single crystal device in that vibrational direction, is provided by performing certain treatment to its device plane. Specifically, a piezoelectric portion having a comb-shaped structure in which a plurality of slits are formed with a certain arrangement pitch on either of device planes whose polarization direction is their normal direction, the slits having a depth extending in a direction substantially perpendicular to the device plane and being filled with an insulating material, is formed to achieve 65% or more of an electromechanical coupling factor in a direction parallel to the polarization direction.Type: GrantFiled: April 14, 2008Date of Patent: August 23, 2011Assignee: JFE Mineral Company, Ltd.Inventor: Mitsuyoshi Matsushita
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Patent number: 7997696Abstract: A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer.Type: GrantFiled: March 27, 2009Date of Patent: August 16, 2011Assignee: Seiko Epson CorporationInventor: Masato Shimada
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Patent number: 7997695Abstract: A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer.Type: GrantFiled: March 27, 2009Date of Patent: August 16, 2011Assignee: Seiko Epson CorporationInventor: Masato Shimada
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Patent number: 7982368Abstract: Provided is a polymer actuator including: an electrolyte layer; and a pair of electrodes provided on both surfaces of the electrolyte layer in the thickness direction, wherein the polymer actuator is deformed when a voltage is applied across the pair of electrodes, and wherein the polymer actuator includes a support portion and a deformation portion, and the gap between the electrodes in the support portion is larger than the gap between the electrodes in the deformation portion.Type: GrantFiled: December 20, 2010Date of Patent: July 19, 2011Assignee: Alps Electric Co., Ltd.Inventor: Isao Takahashi
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Patent number: 7956517Abstract: A MEMS structure having a temperature-compensated resonator member is described. The MEMS structure comprises an asymmetric stress inverter member coupled with a substrate. A resonator member is housed in the asymmetric stress inverter member and is suspended above the substrate. The asymmetric stress inverter member is used to alter the thermal coefficient of frequency of the resonator member by inducing a stress on the resonator member in response to a change in temperature.Type: GrantFiled: September 4, 2008Date of Patent: June 7, 2011Assignee: Silicon LaboratoriesInventors: Mehrnaz Motiee, Roger T. Howe, Emmanuel P. Quevy, David H. Bernstein
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Patent number: 7939990Abstract: Micro-electromechanical acoustic resonators include a resonator body suspended over a substrate. The resonator body may have a single perforation therein, which may extend substantially or completely therethrough. The resonator body may also be configured to have a center-of-mass within an interior of the perforation and/or a nodal line that overlaps the perforation. A perimeter and depth of the single perforation can be configured to reduce a susceptibility of the acoustic resonator to process-induced variations in resonant frequency relative to an otherwise equivalent resonator that omits the single perforation. In other embodiments, the resonator body may have multiple perforations therein that extend along a nodal line of the resonator.Type: GrantFiled: February 26, 2009Date of Patent: May 10, 2011Assignee: Integrated Device Technology, Inc.Inventors: Ye Wang, Harmeet Bhugra
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Patent number: 7851957Abstract: A magnetic bearing assembly for a rotatable support apparatus includes a first stationary section, a second section disposed on the first section and a shaft member secured to the base section and passing through the first section. The shaft member defines an axle for rotation for the first section wherein the magnetic bearing assembly is defined by at least one pair of magnets disposed in relation to the shaft member, the at least one pair of magnets including magnetic face surfaces aligned such that a repelling field is established between the at least one pair of magnets, wherein the first section is attached to at least one of the magnets.Type: GrantFiled: November 28, 2006Date of Patent: December 14, 2010Assignee: W.A. Krapf, Inc.Inventors: Wallace A. Krapf, John Deats, Ryan J. O'Connell
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Publication number: 20100270892Abstract: Piezoelectric actuators having a piezoelectric layer in which a cantilever portion is formed are disclosed. In one embodiment, an actuator includes a support layer and a piezoelectric layer. The piezoelectric layer may include a supported portion formed on the support layer and a cantilever portion which extends beyond the support layer.Type: ApplicationFiled: April 27, 2009Publication date: October 28, 2010Applicant: University of Seoul Industry Cooperation FoundationInventor: Doyeol AHN
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Patent number: 7818854Abstract: A method comprises providing a substantially planar slab of piezoelectric material having a top surface. The method further comprises drilling a plurality of holes through the top surface and into the slab. The method further comprises making a plurality of cuts through the top surface and into the slab. The cuts form a plurality of polygons that are generally centered about one of the holes. The method further comprises plating the slab with an electrically conductive material. The method further comprises removing the electrically conductive material from the top surface of the slab. The method further comprises cutting the slab substantially parallel to the top surface.Type: GrantFiled: February 13, 2009Date of Patent: October 26, 2010Assignee: Ekos CorporationInventor: Richard R. Wilson
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Patent number: 7816841Abstract: A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.Type: GrantFiled: June 4, 2008Date of Patent: October 19, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
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Publication number: 20100033062Abstract: A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.Type: ApplicationFiled: October 12, 2009Publication date: February 11, 2010Applicant: HRL LABORATORIES, LLCInventors: David T. CHANG, Randall L. KUBENA, Frederic P. STRATTON, Pamela R. PATTERSON
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Patent number: 7579760Abstract: A vibrator includes a vibrating body having a substantially quadrangular prism shape and including four side surfaces extending in the longitudinal direction of the vibrating body. A common electrode is formed on substantially an entire surface of one of the side surfaces of the vibrating body. Split electrodes extend in the longitudinal direction on another side surface opposite to the side surface on which the common electrode is formed, and are spaced from each other in the width direction of the side surface on which the split electrodes are formed. In the vibrating body, a first polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the split electrodes. A second polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the common electrode.Type: GrantFiled: April 11, 2008Date of Patent: August 25, 2009Assignee: Murata Manufacturing Co., Ltd.Inventor: Katsumi Fujimoto
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Patent number: 7570126Abstract: A tuning fork type piezoelectric vibrating piece, comprising: a base unit having a base electrode for an external connection; a fork shaped arm unit extending from the base unit; a groove portion at least on a surface or a rear surface of the arm unit; a groove electrode on the groove portion; a side surface electrode on the arm unit without the groove portion; a first electrode connecting the base unit and the side surface electrode or the groove electrode; a second electrode connecting the groove electrode and the side surface electrode; and a side surface electrode set at a predetermined distance from the bottom of the fork part of the base unit. The piezoelectric vibrating piece may be packaged with a base electrode connected to an external output terminal. The piezoelectric oscillator may have an amplifier circuit and a feedback circuit with a resonant element determining the resonant frequency.Type: GrantFiled: October 5, 2007Date of Patent: August 4, 2009Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Takehiro Takahashi
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Publication number: 20090152996Abstract: Disclosed is a piezoelectric/electrostrictive membrane element having a large flexural displacement with suppressed disadvantages such as the generation of a micro crack and a lattice defect due to a concentrated stress. The element includes a substrate of a ceramic material, a membranous piezoelectric/electrostrictive portion including a piezoelectric/electrostrictive body constituted of a large number of crystal particles 10, 20 of a lead zirconate titanate based piezoelectric/electrostrictive ceramic composition, and membranous electrodes electrically connected to the piezoelectric/electrostrictive portion.Type: ApplicationFiled: December 9, 2008Publication date: June 18, 2009Applicant: NGK Insulators, Ltd.Inventors: Takaaki Koizumi, Toshikatsu Kashiwaya
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Publication number: 20090144955Abstract: A method comprises providing a substantially planar slab of piezoelectric material having a top surface. The method further comprises drilling a plurality of holes through the top surface and into the slab. The method further comprises making a plurality of cuts through the top surface and into the slab. The cuts form a plurality of polygons that are generally centered about one of the holes. The method further comprises plating the slab with an electrically conductive material. The method further comprises removing the electrically conductive material from the top surface of the slab. The method further comprises cutting the slab substantially parallel to the top surface.Type: ApplicationFiled: February 13, 2009Publication date: June 11, 2009Applicant: Ekos CorporationInventor: Richard R. Wilson
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Patent number: 7535158Abstract: A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.Type: GrantFiled: December 14, 2007Date of Patent: May 19, 2009Assignee: Epson Toyocom CorporationInventor: Jun Watanabe
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Patent number: 7521846Abstract: A piezoelectric resonator element including: a base formed of a piezoelectric material and having a given length; a plurality of vibration arms extending from one part of the base; and a supporting arm extending from another part of the base spaced apart from the one part of the base by the given length in a width direction, the supporting arm extending in a common direction with the vibration arms outboard the vibration arms.Type: GrantFiled: October 17, 2005Date of Patent: April 21, 2009Assignee: Seiko Epson CorporationInventor: Hideo Tanaya
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Patent number: 7521844Abstract: To provide a piezoelectric single-crystal device which can stably attain an electromechanical coupling factor k31 of 60% or more in the lateral vibration mode and a method of manufacturing the same. Specifically, the piezoelectric single-crystal device has the polarization direction 3 in the [110] axis of a pseudocubic system and has the direction normal to an end face 10c of the piezoelectric device within the solid angle range of the [001] axis ±35° including the [001] axis approximately orthogonal to the polarization direction 3. The electromechanical coupling factor k31 in the direction orthogonal to the polarization direction 3, in the so-called lateral vibration mode, is 60% or more.Type: GrantFiled: October 28, 2004Date of Patent: April 21, 2009Assignee: JFE Mineral Company, Ltd.Inventor: Mitsuyoshi Matsushita
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Patent number: 7518284Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.Type: GrantFiled: November 3, 2006Date of Patent: April 14, 2009Assignee: Danfoss A/SInventors: Mohamed Yahia Benslimane, Peter Gravesen
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Patent number: 7509715Abstract: A method comprises providing a substantially planar slab of piezoelectric material having a top surface. The method further comprises drilling a plurality of holes through the top surface and into the slab. The method further comprises making a plurality of cuts through the top surface and into the slab. The cuts form a plurality of polygons that are generally centered about one of the holes. The method further comprises plating the slab with an electrically conductive material. The method further comprises removing the electrically conductive material from the top surface of the slab. The method further comprises cutting the slab substantially parallel to the top surface.Type: GrantFiled: June 2, 2005Date of Patent: March 31, 2009Assignee: Ekos CorporationInventor: Richard R. Wilson
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Patent number: 7466063Abstract: A micro manipulator for electrode movement, a driving method thereof, and a brain signal measuring device using the same are provided.Type: GrantFiled: June 27, 2006Date of Patent: December 16, 2008Assignee: Korea Institute of Science and TechnologyInventors: Byung-kyu Kim, Suk-ho Park, Hee-sup Shin, Dae-soo Kim, Hyun-jun Park, Jong-oh Park
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Patent number: 7456554Abstract: The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member 22 for supporting a vibrator 1A with bonding wires 26. The supporting member 22 has a supporting plate 40 with an opening 25 formed therein to be positioned direct under a vibrator 1A, and a bonding wire 26 comprising a bonding end 29 to be bonded with the vibrator 1A, a fixed portion 26a fixed on the supporting plate 40 and a bent portion 28 direct under the opening 25. A distance “L1” between the bent portion 28 and a position 39 where the bonding wire 26 starts to protrude from the supporting plate 40 is 10 percent or more of a distance “L2” of the bent portion 28 and the bonding end 29.Type: GrantFiled: May 9, 2006Date of Patent: November 25, 2008Assignee: Seiko Epson CorporationInventors: Seiji Ishikawa, Takayuki Kikuchi, Shigeki Hayashi
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Patent number: 7424771Abstract: A method of preparing a composite sheet unit includes arranging a plurality of sintered piezoelectric thin wires in a uniform direction on a surface of a resin layer is prepared. A plurality of the same are laminated and integrated so that the sintered piezoelectric thin wires are positioned between the resin layers. Here, a curing resin may be impregnated therein so as to form resin-impregnated-cured portions. Then, the lamination is cut in a direction crossing a lengthwise direction of the sintered piezoelectric thin wires, so that a piezocomposite is obtained. Cut surfaces may be ground. By so doing, it is possible to provide a highly reliable piezocomposite having a fine structure at low cost, and to provide an ultrasonic probe for ultrasonic diagnostic equipment, as well as ultrasonic diagnostic equipment using the same.Type: GrantFiled: January 24, 2005Date of Patent: September 16, 2008Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Seigo Shiraishi, Norihisa Takahara, Emiko Igaki, Hidetomo Nagahara, Koetsu Saito
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Patent number: 7423363Abstract: A piezoelectric vibrating element includes a main vibration section vibrating in a constant direction, an open edge formed at least at one edge among edges provided in a vibration direction of the main vibration section, an outer frame section formed so as to surround the main vibration section, and a junction section being disposed between the main vibration section excluding the open edge and the outer frame section, having groove parts being recessed with respect to both surfaces of the main vibration section and flat parts being substantially flush with the both surfaces of the main vibration section, and being formed so as to integrally connect the main vibration section with the outer frame section.Type: GrantFiled: February 24, 2006Date of Patent: September 9, 2008Assignee: Seiko Epson CorporationInventors: Masako Tanaka, Shigeru Shiraishi
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Publication number: 20080179994Abstract: An energy trap piezoelectric resonator makes use of a harmonic wave in a thickness longitudinal vibration mode and can effectively suppress a spurious fundamental wave in a thickness longitudinal vibration mode without significantly suppressing the harmonic wave that is used for the resonator. The energy trap piezoelectric resonator has a first excitation electrode disposed at an upper surface of a piezoelectric substrate polarized in a thickness direction and a second excitation electrode disposed at a lower surface, and a floating electrode disposed at least one of the upper surface and/or the lower surface of the piezoelectric substrate so as to extend towards and away from the first excitation electrode with respect to a node of an electric potential distribution based on electric charges generated by the fundamental wave that is propagated when an energy trap vibration portion where the excitation electrodes oppose each other is excited.Type: ApplicationFiled: April 20, 2005Publication date: July 31, 2008Applicant: MURATA MANUFACTURING CO., LTD.Inventors: Hitoshi Sakaguchi, Hiroaki Kaida, Takashi Hase
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Patent number: 7321185Abstract: Two similarly shaped, such as rectangular, shells are attached to one another such that they form a resulting thin airfoil-like structure. The resulting device has at least two stable equilibrium shapes. The device can be transformed from one shape to another with a snap-through action. One or more actuators can be used to effect the snap-through; i.e., transform the device from one stable shape to another. Power to the actuators is needed only to transform the device from one shape to another.Type: GrantFiled: March 6, 2006Date of Patent: January 22, 2008Assignee: United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: Marc R. Schultz
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Patent number: 7312559Abstract: The present invention relates to a ceramic tube type ultrasonic motor having a stator including a tube-type elastic body that is formed of a ceramic material; and a plurality of piezoelectric diaphragms that are attached on the outer peripheral surface of the elastic body in a longitudinal direction thereof and to which voltages having a phase difference are respectively applied and a rotor that is rotated by the friction with the elastic body flexurally vibrating due to the voltages applied to the plurality of piezoelectric diaphragms.Type: GrantFiled: August 8, 2006Date of Patent: December 25, 2007Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Dong Kyun Lee, Burhanettin Koc, Byung Woo Kang
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Patent number: 7309397Abstract: A block of stacked green films provided with internal electrodes is laminated, at least one actuator is separated from the block, the actuator obtains its shape by means of a machining operation, is then sintered, and the sinter skin produced by the sintering is used as an insulating layer. The sinter skin is abraded at the points where the internal electrodes are connected to the external electrodes.Type: GrantFiled: January 9, 2004Date of Patent: December 18, 2007Assignee: Ceramtec AG Innovative Ceramic EngineeringInventors: Hans-Jürgen Schreiner, Reiner Bindig, Matthias Simmerl, Jürgen Schmidt
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Piezoelectric substrate, piezoelectric resonating element and surface-mount piezoelectric oscillator
Patent number: 7235913Abstract: In the case where an ultraminiature piezoelectric substrate, which has a resonating portion formed by making a concavity by etching in the surface of the piezoelectric substrate made of an anisotropic crystal material, is mass-produced by batch operation using a large-area piezoelectric substrate wafer, an annular portion surrounding each concavity is formed sufficiently thick to prevent cracking from occurring when the wafer is severed.Type: GrantFiled: June 26, 2006Date of Patent: June 26, 2007Assignee: Toyo Communication Equipment Co., Ltd.Inventor: Hirokazu Iwata -
Patent number: 7205704Abstract: The invention relates to a device for displacing a moving part along a longitudinal axis relative to a housing, said device being symmetrical about a plane extending longitudinally relative to the moving part, the device comprising two structures that are secured to said moving part and elements of active material comprising at least two blocks extending between inside walls of each structure, with the elongation directions of the blocks being antisymmetrical about an axis substantially perpendicular to the displacement axis of the moving part, wherein the structures are flexible and suitable for displacing the moving part by deforming as a function of the elongation of the blocks.Type: GrantFiled: January 31, 2006Date of Patent: April 17, 2007Assignee: Sagem Defense SecuriteInventors: Jean Thierry Audren, Etienne Merlet, Jérôme Meleard, Charles Mangeot
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Patent number: 7199510Abstract: A crystal unit for high frequency use includes: a crystal blank having a central portion that is used as a vibration region and a peripheral portion that surrounds the central portion and that is provided with a greater thickness than the central portion; a pair of excitation electrodes provided respectively on both major surface of the crystal blank in said vibration region; a pair of extending electrodes led out from the pair of excitation electrodes toward ends of the crystal blank, respectively; and an opposition region in which the extending electrodes overlap each other with the crystal blank interposed. Each of the extending electrodes connects to a corresponding excitation electrode over at least half of the outer circumference of the excitation electrode, and the thickness of the crystal blank is greater in the opposition region than in the vibration region.Type: GrantFiled: June 29, 2005Date of Patent: April 3, 2007Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Mitoshi Umeki
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Patent number: 7166952Abstract: An equivalent to the spatial separation either side of a nominal median plane that is inherent in a bimorph (with one piezoelectric layer on one side, and the second on the other side of the plane) is attained by structurally shaping the cross-section of a simple, single piezoelectric layer (11) such that it has a multiplicity of piezoelectric portions arranged in two generally-planar groups one either side of a median plane, so that any dimension change undergone by a portion on one side of that plane will tend to bend the whole device in the opposite direction to the same sense dimension change undergone by a portion on the other side of that plane. The simple, single layer acts as though it were a bimorph if elongate and beam-like, bending along its length, one end moving up/down, or back/forth, relative to the other but with any need for an internal, electrode.Type: GrantFiled: September 26, 2002Date of Patent: January 23, 2007Assignee: 1. . . LimitedInventors: Richard Topliss, David Livingstone, Andrew Matheson, Gareth McKevitt, Mark Richard Shepherd, Anthony Hooley
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Patent number: 7154358Abstract: A film bulk acoustic resonator is formed on a substrate having a major surface. The film bulk acoustic resonator includes an elongated stack. The elongated stack includes a layer of piezoelectric material positioned between a first conductive layer deposited on a first surface of the layer of piezoelectric material, and a second conductive layer deposited on a second surface of the layer of piezoelectric material. The elongated stack is positioned substantially perpendicular with respect to the major surface of the substrate. The first and second conductive layers are placed on the layer of piezoelectric material substantially simultaneously and in one processing step. The major surface of the substrate is in a horizontal plane and the stack of the film bulk acoustic resonator is in a substantially vertical plane. The resonator structure formed may be used either as a resonator or a filter.Type: GrantFiled: September 16, 2004Date of Patent: December 26, 2006Assignee: Intel CorporationInventors: Qing Ma, Li-Peng Wang, Valluri Rao
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Patent number: 7116040Abstract: An electronic component of an embodiment of the present invention comprises a first piezoelectric thin film resonator and a second piezoelectric thin film resonator. The first piezoelectric thin film resonator and second piezoelectric thin film resonator are a piezoelectric thin film resonator that has a structure in which a piezoelectric thin film is interposed between a lower electrode and an upper electrode, that is constituted in an area where the lower electrode, piezoelectric thin film, and upper electrode overlap each other, and that obtains a signal with a predetermined resonance frequency by bulk waves propagating inside the piezoelectric thin film. The interval between a part of a periphery of the first piezoelectric thin film resonator and a part of a periphery of the second piezoelectric thin film resonator that face each other is not constant.Type: GrantFiled: December 13, 2004Date of Patent: October 3, 2006Assignee: TDK CorporationInventor: Kenji Inoue
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Patent number: 7098574Abstract: In the case where an ultraminiature piezoelectric substrate, which has a resonating portion formed by making a concavity by etching in the surface of the piezoelectric substrate made of an anisotropic crystal material, is mass-produced by batch operation using a large-area piezoelectric substrate wafer, an annular portion surrounding each concavity is formed sufficiently thick to prevent cracking from occurring when the wafer is severed.Type: GrantFiled: October 22, 2003Date of Patent: August 29, 2006Assignee: Toyo Communication Equipment Co., Ltd.Inventor: Hirokazu Iwata
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Patent number: 7038358Abstract: An electro-active transducer includes a ferroelectric material sandwiched by first and second electrode patterns. When the device is used as an actuator, the first and second electrode patterns are configured to introduce an electric field into the ferroelectric material when voltage is applied to the electrode patterns. When the device is used as a sensor, the first and second electrode patterns are configured to introduce an electric field into the ferroelectric material when the ferroelectric material experiences deflection in a direction substantially perpendicular thereto. In each case, the electrode patterns are designed to cause the electric field to: i) originate at a region of the ferroelectric material between the first and second electrode patterns, and ii) extend radially outward from the region of the ferroelectric material (at which the electric field originates) and substantially parallel to the ferroelectric material's plane.Type: GrantFiled: January 16, 2003Date of Patent: May 2, 2006Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventors: Robert G. Bryant, Robert L. Fox
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Patent number: 7011887Abstract: An IT-cut quartz crystal unit has a discoidal or a rectangular quartz crystal blank which is cut from a crystal of quartz along a plane perpendicular to the Y-axis of the crystal of the quartz which is rotated over approximately 34° about the X-axis, and further rotated from this rotated position over approximately 19° about the Z-axis. Excitation electrodes are formed on both main surface of the crystal blank, respectively. The crystal blank is held at positions in at least one set of opposing peripheral regions selected from an angular range of 18°±18° from the Z?-axis on the surface of the crystal blank, viewed from the center on the surface of the crystal blank; an angular range of 198°±18° from the Z?-axis; an angular range of 108°±18° from the Z?-axis; and an angular range of 288°±18° from the Z?-axis.Type: GrantFiled: September 2, 2003Date of Patent: March 14, 2006Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Shigeru Obara, Genwa Koki, Kouichi Hara
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Patent number: 7012355Abstract: A crystal unit has a crystal blank having a hole defined in at least one principal surface thereof, the crystal blank having a region of a reduced thickness including the hole, the region serving as a vibrating region, excitation electrodes disposed respectively on opposite principal surfaces of the crystal blank in the vibrating region, extension electrodes extending respectively from the excitation electrodes to respective opposite ends of one side of the crystal blank, and a casing having a step formed therein. The opposite ends of the one side of the crystal blank are fixed to the step by a joining member. The crystal blank has a notched portion defined therein between the one side and the vibrating region, the notched portion extending from at least one transverse edge of the crystal blank in a transverse direction of the crystal blank.Type: GrantFiled: June 25, 2003Date of Patent: March 14, 2006Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Seiji Oda, Mitoshi Umeki, Hiroshi Uehara, Keisuke Hirano
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Patent number: 6992424Abstract: A piezoelectric vibrator which uses lithium tantalate as a piezoelectric material and of which main vibration is thickness shear vibration. The thickness direction of the vibrator forms angle of 0°±5° to the X-axis of a single crystal. The longitudinal direction of vibrator lies, with the X-axis used as a rotation axis, in direction n +57°±2° clockwise from the Y-axis of the single crystal. A ratio L/H of the length L of the vibrator to the thickness H is not less than 15. A ratio Le/H of the length Le of the exciting electrode to the thickness H of the vibrator element portion is 3–6. Accordingly, a vibrator having improved temperature characteristics and a large Q is realized.Type: GrantFiled: February 7, 2002Date of Patent: January 31, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yukinori Sasaki, Tetsuro Shimamura, Tetsuo Kawasaki, Kazunari Nishihara, Tetsuya Furihata, Kuniaki Matsushita, Katsunori Moritoki, Katsu Takeda
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Patent number: 6989626Abstract: A compact and high-power piezoelectric transformer is realized by using higher order longitudinal extensional mode vibrations and increasing an effective electromechanical coupling factor by a primary electrode which consists of plural electrodes.Type: GrantFiled: July 20, 2004Date of Patent: January 24, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Katsu Takeda, Hiroshi Nakatsuka, Takeshi Yamaguchi, Kojiro Okuyama, Katsunori Moritoki
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Patent number: 6979937Abstract: Laser beam machining is applied to form arbitrarily shaped electroactive ceramics for transducers (e.g., electromechanical sensors and actuators). One particularly preferred embodiment of the invention comprises machining parallel grooves in a ceramic plate to improve flexibility. The grooves provide strain relief in bending by relieving Poisson strains transverse to the direction of bending. This embodiment offers the further benefit that planar anisotropy or directionality is introduced in the transducer. The machining process of the invention further enables the production of more complex geometries than those currently known in the art. Because of the flexibility of the machining process, virtually any desired transducer shape may be produced.Type: GrantFiled: January 8, 2002Date of Patent: December 27, 2005Assignee: Mide Technology CorporationInventors: Brett P. Masters, John P. Rodgers, Marthinus C. van Schoor
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Patent number: 6967432Abstract: A piezoelectric shear resonator has a substantially rectangular-column piezoelectric element that excites a shear-vibration mode and that has opposing substantially rectangular shear strain surfaces. The shear strain surfaces each have an aspect ratio at which the electromechanical coupling factor reaches substantially a maximum value. When the vertical dimension of the shear strain surfaces is D and the horizontal dimension thereof is Le, the aspect ratio Le/D is expressed by Le/D={?·(S44E/S33E)1/2+?}±0.3, where S44E and S33E are elastic compliances, ?=0.27·n+0.45, ?=1.09·n+0.31, and n is a positive integer.Type: GrantFiled: December 2, 2002Date of Patent: November 22, 2005Assignee: Murata Manufacturing Co., Ltd.Inventors: Akihiro Mitani, Hiroaki Kaida
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Patent number: 6940139Abstract: A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.Type: GrantFiled: March 23, 2004Date of Patent: September 6, 2005Assignee: Kabushiki Kaisha ToshibaInventor: Hideyuki Funaki
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Patent number: 6924588Abstract: In a gallium phosphate crystal, a crystallographic Y-axis and a Z-axis that have been rotated about an X-axis counterclockwise through an angle ? is referred to as a Y?-axis and a Z?-axis, respectively, where the angle ? is in a range from 10° to 20°. A piezoelectric crystal material made of gallium phosphate is provided as a plate-shaped member which is elongate in an X-axis direction and cut from the gallium phosphate crystal parallel to an X-Z? crystal plane of the gallium phosphate, and the plate-shaped member has sides parallel to an axis that is obtained by rotating the Y?-axis counterclockwise about the X-axis in an angular range from 1° to 3°.Type: GrantFiled: February 4, 2004Date of Patent: August 2, 2005Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Masanobu Okazaki, Morio Onoue, Hitoshi Sekimoto
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Patent number: 6892738Abstract: The present invention provides a megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate. The apparatus includes a probe having one of a variety of cross-sections configured to decrease the ratio of normal-incident waves to shallow-angle waves. One such cross-section includes a channel running along a portion of the lower edge of the probe. Another cross-section includes a narrow lower edge of the probe. Another cross-section is elliptical. Another cross-section includes transverse bores originating in the lower edge of the probe. As an alternative to, or in addition to, providing a probe having a cross-section other than circular, the present invention may also provide a probe having a roughened lower surface.Type: GrantFiled: January 20, 2004Date of Patent: May 17, 2005Assignee: Goldfinger Technologies, LLCInventors: Mario E. Bran, Michael B. Olesen, Yi Wu
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Patent number: 6856073Abstract: A fluid-control electro-active device includes a piezo-diaphragm made from a ferroelectric material sandwiched by first and second electrode patterns configured to introduce an electric field into the ferroelectric material when voltage is applied thereto. The electric field originates at a region of the ferroelectric material between the first and second electrode patterns, and extends radially outward from this region of the ferroelectric material and substantially parallel to the plane of the ferroelectric material. The piezo-diaphragm deflects symmetrically about this region in a direction substantially perpendicular to the electric field. An annular region coupled to and extending radially outward from the piezo-diaphragm perimetrically borders the piezo-diaphragm. A housing is connected to the annular region and defines at least one fluid flow path therethrough with the piezo-diaphragm disposed therein.Type: GrantFiled: March 13, 2003Date of Patent: February 15, 2005Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventors: Robert G. Bryant, Dennis C. Working
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Patent number: 6842087Abstract: A three-terminal filter using the area flexural vibration mode is smaller than filters using the area expansion vibration mode or the length vibration mode, and is easily adjusted to produce a desired frequency by changing the thickness and length of the three-terminal filter. The three-terminal filter includes three electrodes having a substantially square shape, and two piezoelectric layers having a substantially square shape, which are alternately laminated. The piezoelectric layers are polarized in the same thickness direction as the thickness direction, or in opposite thickness directions. The three-terminal filter further includes one surface electrode that functions as an input electrode, another surface electrode that functions as an output electrode, and an internal electrode that functions as a ground electrode.Type: GrantFiled: October 12, 2001Date of Patent: January 11, 2005Assignee: Murata Manufacturing Co., Ltd.Inventor: Masakazu Yamauchi
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Patent number: 6836055Abstract: A piezoelectric vibrator uses aluminum nitride as piezoelectric material and thickness sliding vibration as the primary vibration. A polarization direction of the primary vibration is along the longitudinal direction of its vibrating element. This vibrator eliminates undesired resonance, caused by a width of the vibrating element, from a vicinity of a resonance frequency of the primary vibration. Vibrating element 1 has width W and thickness H defined as follows: 2.0≦W/H≦4.0 or 4.3≦W/H≦5.7 or 6.2≦W/H≦7.8 or 8.2≦W/H≦9.8.Type: GrantFiled: March 18, 2003Date of Patent: December 28, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Yukinori Sasaki
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Patent number: 6812623Abstract: A compact and high-power piezoelectric transformer is realized by using higher order longitudinal extensional mode vibrations and increasing an effective electromechanical coupling factor by a primary electrode which consists of plural electrodes.Type: GrantFiled: September 23, 2002Date of Patent: November 2, 2004Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Katsu Takeda, Hiroshi Nakatsuka, Takeshi Yamaguchi, Kojiro Okuyama, Katsunori Moritoki
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Patent number: 6800988Abstract: A piezoelectric device is disclosed, which includes a first element of porous crystalline material, a second element being attached to, or integrally formed with, the first element, and at least one electrode being in electrical contact with the first element, such that subjecting the first element to an electric potential via the at least one electrode results in a strain induced by the first element on the second element. Also disclosed is a piezooptic device which includes a first element of porous crystalline material, a second element being attached to, or integrally formed with, the first element, and a light source, such that subjecting the first element to light originating from the light source results in a strain induced by the first element on the second element.Type: GrantFiled: July 11, 2000Date of Patent: October 5, 2004Assignee: Technion Research & Development Foundation Ltd.Inventor: Erez N. Ribak