Stable Platforms Patents (Class 318/649)
  • Patent number: 11489104
    Abstract: An electromagnetic-piezoelectric composite vibration control device based on a synchronized switch damping technology is provided. An upper guiding component is installed inside the upper rigid frame, a lower guiding component is installed inside a lower rigid component, a guide rod is nested inside the upper guiding component and the lower guiding component, an upper idler wheel mechanism and a lower idler wheel mechanism are fixedly sleeved on the guide rod and are positioned between the upper guiding component and the lower guiding component respectively, an electromagnetic mechanism is fixedly sleeved outside the guide rod, one end of each piezoelectric cantilever beam is fixed between the upper rigid frame and the lower rigid frame, the other end is arranged between the upper idler wheel mechanism and the lower idler wheel mechanism, and the piezoelectric cantilever beams and the electromagnetic mechanism are connected with a circuit system respectively.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: November 1, 2022
    Assignee: Shanghai University
    Inventors: Huayan Pu, Dong Zhang, Min Wang, Jun Luo, Yi Sun, Chaoqun Duan, Shunqi Zhang, Yan Peng, Shaorong Xie
  • Patent number: 11422440
    Abstract: A method for controlling an image stabilization apparatus includes detecting a motion status of a handle of the image stabilization apparatus. A rotation of the handle is controlled by a rotary axis motor of the image stabilization apparatus. The method further includes controlling the rotary axis motor to stop rotating in response to the motion status of the handle being a free status in which the handle is not fixed and one portion of the image stabilization apparatus other than the handle is fixed.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: August 23, 2022
    Assignee: SZ DJI OSMO TECHNOLOGY CO., LTD.
    Inventor: Yan Wang
  • Patent number: 11415990
    Abstract: A method of tracking an image feature is described. The method comprises acquiring an image with a camera, and determining, using processing circuitry, a bounding area in the image, the bounding area surrounding a feature in the image. The method further comprises determining, using processing circuitry, a rotation axis and a rotation angle based on a first focal length of the camera and a position of the bounding area relative to a center of the image. The method further comprises determining, using processing circuitry, at least one of a pan angle, a roll angle, and a tilt angle for the camera at which the bounding area is centered in the image. The method further comprises adjusting, using a gimbal, an orientation of the camera based on the at least one of the pan angle, the roll angle, and the tilt angle.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: August 16, 2022
    Assignee: Honeywell International Inc.
    Inventors: Shouvik Das, Nikhil Gupta
  • Patent number: 11402728
    Abstract: A platform apparatus includes a first unit that includes a first driver and is rotatable around a first axis by a driving force of the first driver, a second unit that includes a second driver and rotates a holder configured to hold an optical apparatus by a driving force of the second driver around a second axis orthogonal to the first axis, a first grip, and a second grip. The first and second drivers are located on one side of a plane that is orthogonal to a plane that includes the first axis and the second axis, and includes an imaginary line that connects the first grip and the second grip to each other.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: August 2, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Takeaki Yokoi
  • Patent number: 11242953
    Abstract: The disclosure describes systems and methods for calibrating an image stabilization mechanism. One method includes a control system sending a command to thermally condition one or more sensors to a predetermined temperature. During thermal conditioning to the predetermined temperature, the control system sends a command to drive one or more motors of the image stabilization mechanism to cause movement of an imaging device coupled to the image stabilization mechanism. After thermal conditioning to the predetermined temperature, the control system sends a command to stop driving the one or more motors of the image stabilization mechanism to stop movement of the imaging device coupled to the image stabilization mechanism. After stopping the driving of the one or more motors, the control system sends a command to calibrate the one or more sensors.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: February 8, 2022
    Assignee: GoPro, Inc.
    Inventors: Thomas Gubler, Pascal Gohl
  • Patent number: 11205937
    Abstract: A driving system has a driving motor body operative to produce a driving force for driving an object to move in reciprocating directions. A pivotal support is located between the driving motor body and a machine base for supporting the driving motor body on the machine base. The pivotal support causes at least a portion of the driving motor body to rotate relative to the machine base in an opposite direction to a direction of the driving force produced by the driving motor body to drive the object, so as to reduce vibration transmission to the machine base.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: December 21, 2021
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Keng Yew Song, Ka Shing Kwan, Yue Zhang, Xiao Liang Chen, Chu Fan Feng
  • Patent number: 11146319
    Abstract: An antenna system and a data processing method are provided. The system may include: a control module; and a processing module, an information collection module and a transceiver module. The information collection module is configured to collect moving device information and antenna attitude information. The transceiver module is configured to receive a data request instruction through the communication satellite. The control module is configured to determine a request content and a processing time according to the data request instruction, and send the request content, the moving device information and the antenna attitude information to the processing module when the processing time arrives. The processing module is configured to process the moving device information and the antenna attitude information according to the request content obtain data to be sent corresponding to the request content, and send the data to be sent to the communication satellite through the transceiver module.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: October 12, 2021
    Assignee: XI'AN ZHONGXING NEW SOFTWARE CO., LTD.
    Inventors: Jinhuang Xiao, Xiaowen Chen, Rongjian Xiao, Dagang Gong
  • Patent number: 11058598
    Abstract: A method of tremor reduction in a handheld device includes measuring a tremor motion and a tilt motion with a motion tracking module (“MTM”) disposed in a housing of the handheld device. In response to measuring the tremor motion, an attachment arm is moved with at least one motion generating mechanism to reduce the tremor motion in the attachment arm. Additionally, in response to measuring the tilt motion, the attachment arm is moved with the at least one motion generating mechanism to resist the attachment arm hitting a hard stop in the handheld device.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: July 13, 2021
    Assignee: Verily Life Sciences LLC
    Inventors: Anupam Pathak, Dylan Owens
  • Patent number: 11041588
    Abstract: A method for controlling a gimbal includes detecting a motion of the gimbal, determining whether a received control signal indicates that the motion of the gimbal corresponds to a user-intended motion, controlling the gimbal to move along a moving direction of the motion in response to determining that the received control signal indicates the motion of the gimbal corresponds to the user-intended motion, and controlling the gimbal to move along an opposite direction to the moving direction of the motion in response to determining that the received control signal does not indicate the motion of the gimbal corresponds to the user-intended motion.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: June 22, 2021
    Assignee: SZ DJI OSMO TECHNOLOGY CO., LTD.
    Inventor: Mingyu Wang
  • Patent number: 11022423
    Abstract: Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: June 1, 2021
    Assignee: TSINGHUA UNIVERSITY
    Inventors: Yu Zhu, Jinchun Hu, Shengwu Du, Enyao Shang, Ming Zhang, Wensheng Yin, Kaiming Yang, Rong Cheng
  • Patent number: 10976002
    Abstract: A gimbal for supporting a load includes at least three rotatably coupled driving axis assemblies. Each driving axis assembly includes a driving device and a joint arm configured to rotate when driven by the driving device. The gimbal also includes a controller configured to control the gimbal to limit a rotation of at least one of the three driving axis assemblies during a rotation of the gimbal.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: April 13, 2021
    Assignee: SZ DJI TECHNOLOGY CO., LTD.
    Inventors: Tie Su, Paul Pan
  • Patent number: 10875237
    Abstract: A device for fabricating structures of large dimensions, layer by layer. The invention relates to a device making use of positioning an extrusion head in three dimensions by means of cables in order to deposit a pasty material continuously in thin layers, e.g. a mortar comprising either a hydraulic binder or thermoplastic compounds or thermosetting compounds or curable compounds. The invention is for making industrial elements of very large dimensions, and more particularly for making buildings.
    Type: Grant
    Filed: December 11, 2015
    Date of Patent: December 29, 2020
    Inventor: Xavier Rocher
  • Patent number: 10871423
    Abstract: A method and apparatus for monitoring the motion of an oscillating mechanical device using one or more internet of things (IoT) devices. An exemplary method for monitoring an oscillating mechanical device includes collecting motion data from an accelerometer attached to a moving part in the oscillating mechanical device. A power spectrum for the oscillating mechanical device is calculated from the motion data. A mask is applied over the power spectrum to determine if a device is having operational difficulties.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: December 22, 2020
    Assignee: Intel Corporation
    Inventors: Keith Nolan, Mark Kelly
  • Patent number: 10719289
    Abstract: A method and system is provided for controlling a display in a machine operating in a work area whereby a plurality of views are displayed on a screen with each of the plurality of views corresponding to a plurality of functions and having one or more of the views independently available on another display.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: July 21, 2020
    Assignee: Topcon Positioning Systems, Inc.
    Inventors: Ivan Giovanni Di Federico, Dimitre Markov, Kash Munir, Andrew Davis, Lyndon Whaite, John Boal, Stefan Stefanov
  • Patent number: 10031206
    Abstract: A method for calibrating an orientation angle of a rotatable satellite tracking antenna, while changing an elevation angle or an azimuth, includes an elevation encoder calibrating step of setting a value of an elevation encoder measuring an elevation angle of the satellite tracking antenna to zero when an orientation direction of the satellite tracking antenna is parallel to one surface, an azimuth encoder calibrating step of setting a value of an azimuth encoder measuring an azimuth of the satellite tracking antenna to zero when an orientation direction of the satellite tracking antenna is parallel to one direction, and a gyroscope calibrating step of performing calibration such that one axis included in a gyroscope measuring a rotation angular velocity of the satellite tracking antenna is parallel to an azimuth rotation axis of the satellite tracking antenna and the other is parallel to an elevation rotation axis of the satellite tracking antenna.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: July 24, 2018
    Assignee: AGENCY FOR DEFENCE DEVELOPMENT
    Inventors: Hyunwook Jo, Jongwan Heo, Kunsup Kwon, Myungjin Jang
  • Patent number: 9851543
    Abstract: A projection lens adjustment module applicable to a projection lens is provided. The projection lens includes a first assembly and a second assembly. The projection lens adjustment module includes a flexible connection line, an adjusting element and a driving mechanism. The flexible connection line has a first end and a second end opposite to each other. The adjusting element is connected to the first end. The driving mechanism is connected to the second assembly and the second end. When the adjusting element drives the first end to move along a first direction thereby leading the second end to move along a second direction non-parallel to the first direction, the second end drives the second assembly to move along an optical axis direction of the projection lens relative to the first assembly through the driving mechanism.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: December 26, 2017
    Assignee: CORETRONIC CORPORATION
    Inventors: Sea-Huang Lee, Shyh-Kang Lin, Wen-Ching Ho
  • Patent number: 9753381
    Abstract: A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: September 5, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hans Butler
  • Patent number: 9747874
    Abstract: An electronic guitar pick, system, system and method may include an enclosure forming a cavity, the enclosure having a first end that is substantially pointed and a second end opposite the first end that is substantially flat, the enclosure having a thickness proximate the cavity greater than a thickness proximate the first end. The electronic guitar pick, system, and method may further include a sensor contained, at least in part, within the cavity and configured to generate a sensor output based on an interaction with the enclosure and a sensory output device, communicatively coupled to the sensor, configured to output a sensory output based, at least in part, on the sensor output.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: August 29, 2017
    Assignee: Capacitron, LLC
    Inventors: Peter Douglas Holm, Brandon Williams
  • Patent number: 9361865
    Abstract: An electronic guitar pick, system, system and method may include an enclosure forming a cavity, the enclosure having a first end that is substantially pointed and a second end opposite the first end that is substantially flat, the enclosure having a thickness proximate the cavity greater than a thickness proximate the first end. The electronic guitar pick, system, and method may further include a sensor contained, at least in part, within the cavity and configured to generate a sensor output based on an interaction with the enclosure and a sensory output device, communicatively coupled to the sensor, configured to output a sensory output based, at least in part, on the sensor output.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: June 7, 2016
    Assignee: Capacitron, LLC
    Inventors: Peter Douglas Holm, Brandon Williams
  • Patent number: 9063009
    Abstract: A testing device includes a receiving unit for electromagnetic signals arranged on a carrier element to be tested to generate test data from received electromagnetic radiation. The test data are evaluated in a processing system to determine a deviation of the test data from a nominal state of the carrier element. The testing device is used to test a carrier element of an elevator installation on which the elevator car is suspended.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: June 23, 2015
    Assignee: Inventio AG
    Inventors: Josef Husmann, Guntram Begle
  • Patent number: 9063008
    Abstract: A testing device includes a receiving unit for electromagnetic signals arranged on a carrier element to be tested to generate test data from received electromagnetic radiation. The test data are evaluated in a processing system in order to determine a deviation of the test data from a nominal state of the carrier element. The testing device is used to test a carrier element of an elevator installation on which the elevator car is suspended.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: June 23, 2015
    Assignee: Inventio AG
    Inventors: Josef Husmann, Guntram Begle
  • Patent number: 9030149
    Abstract: Systems and methods are provided for supporting and articulating a payload using stabilization platform. The stabilization platform may be configured to avoid gimbal lock. The stabilization platform may be configured to automatically transition between different modes of orientation.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: May 12, 2015
    Assignee: SZ DJI TECHNOLOGY Co., Ltd.
    Inventors: Fazhan Chen, Zihan Chen
  • Patent number: 8866427
    Abstract: When it is determined that the number of times that motor rotation-indicative quantity has been detected has exceeded a measurement interval, a feedback speed value is calculated from a motor rotation-indicative quantity detected immediately before, a motor rotation-indicative quantity detected immediately before the last time a measurement interval determination means determined that the number of times had exceeded the measurement interval, and time that has elapsed since the last time the measurement interval determination means determined that the number of times had exceeded the measurement interval, and the measurement interval having a length calculated from a greater one between the calculated feedback speed value and a speed command value is set for the measurement interval determination means to refer to.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: October 21, 2014
    Assignees: IHI Aerospace Co., Ltd., Sinfonia Technology Co., Ltd.
    Inventors: Hitoshi Oyori, Masaaki Monte
  • Patent number: 8853988
    Abstract: Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: October 7, 2014
    Assignee: Nikon Corporation
    Inventors: Michael B. Binnard, Scott Coakley, Douglas C. Watson, Pai-Hsueh Yang
  • Patent number: 8835872
    Abstract: A sample stage device (10) is so configured as to calculate ideal position information xtg(i), tg(i) per predetermined period that is unaffected by drive conditions relating to gaps (25, 26), etc., and to determine, per predetermined cycle and in real time, deviations dx(i), dy(i) between real-time measured positions x(i), y(i) by position detectors comprising laser interferometers (33, 34), etc., and ideal position information xtg(i), tg(i). In addition, it calculates, based on deviations dx(i), dy(i) thus determined, such speed command values vx(i), vy(i) for motors (27, 28) that measured values x(i), y(i) would follow ideal position information xtg(i), tg(i), and performs stable and high-speed positioning control for a sample table (11) through feedback control that controls speed in real time.
    Type: Grant
    Filed: June 23, 2011
    Date of Patent: September 16, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventor: Takashi Kobayashi
  • Patent number: 8823309
    Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: September 2, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hironori Ogawa, Masahiro Koyama, Nobuo Shibata, Masaru Matsushima, Shuichi Nakagawa, Katsunori Onuki, Yoshimasa Fukushima
  • Patent number: 8810181
    Abstract: A control apparatus for controllably driving a drive mechanism which displaces a movable member, includes: an electric-current detecting unit configured to detect electric current for driving the drive mechanism; a speed control unit configured to set a target electric-current according to a drive speed at which the drive mechanism is caused to drive the movable member; and an electric-current control unit configured to multiply, by an integral gain and a proportional gain, an electric-current deviation between a target electric-current and a detection electric-current detected by the electric-current detecting unit to set output electric-current to be output to the drive mechanism, wherein the current control unit changes at least one of the integral gain and the proportional gain according to the drive speed of the drive mechanism.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: August 19, 2014
    Assignee: Mitutoyo Corporation
    Inventors: Tomohiro Usui, Yo Terashita
  • Patent number: 8723472
    Abstract: Improved precision is realized in positioning control. Provided is a servo control device that is applied to a numerical control equipment provided with a screw-feeding section that converts rotational movement of a motor to linear movement, a driven section that is linearly moved by the screw-feeding section, and a support member by which the screw-feeding section and the driven section are supported and that controls the motor so as to match a position of the driven section to a positioning instruction, including a support-member-reaction-force compensating section 311 that compensates for vibrations of the driven section due to a vibrational reaction force of the support member, wherein a transfer function provided in the support-member-reaction-force compensating section 311 includes a stiffness term for the driven section.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: May 13, 2014
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Katsuyoshi Takeuchi, Hideaki Yamamoto
  • Patent number: 8674645
    Abstract: A drive for providing high dynamics for a machine, such as a production machine, includes a short-stroke motor, and a pulse-decoupling device for decoupling pulses of the short-stroke motor from the machine using closed-loop control. The pulse-decoupling device has at least one component for use as a working-point adjustment device for adjusting a working point of the short-stroke motor. The pulse-decoupling device is thus able to assume the function of pulse decoupling and in addition, at least partially, the function of working point adjustment.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: March 18, 2014
    Assignee: Siemens Aktiengesellschaft
    Inventor: Markus Knorr
  • Patent number: 8519728
    Abstract: Methods and apparatuses for modifying a stage position and measuring at least one parameter of a motor connected with a stage during a commanded stage position are described. In one embodiment of one aspect of the invention, the motor is configured to move the stage in a first direction in response to the at least one parameter and determine whether the at least one parameter is within a threshold range.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: August 27, 2013
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak
  • Patent number: 8493007
    Abstract: A method for ascertaining measured values in a cyclically controlled system, the cyclic control having control time periods in which the system is controlled, and no-control time periods in which the system is not controlled, having the following operations of determining first integration time periods as a function of the cyclic control, the first integration time periods being situated within at least one of the control time periods, and/or determining second integration time periods as a function of the cyclic control, the second integration time period being situated within at least one of the no-control time periods; detecting one of the measured variables of the system dependent on the control; ascertaining summation and/or integration values by summation and/or integration of the measured variable during the first and/or second integration time periods; ascertaining the measured value for at least one of the control time periods and/or no-control time periods on the basis of time data of the first and/
    Type: Grant
    Filed: July 27, 2009
    Date of Patent: July 23, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Andreas Schmidtlein, Rainer Baumgaertner
  • Patent number: 8456127
    Abstract: Provided is a method of obtaining an image of a disc, in which the method obtains an image of an analysis or test result object of a disc by minimizing a difference between the positionings of a magnet of the disc and a magnet of a feeding unit, and an apparatus for driving a disc, wherein the apparatus performs the method. The method includes: fixing a positioning of a disc by using magnetic attraction between a first magnet installed on the disc and a second magnet installed on a feeding unit; minimizing a difference between the positionings of the first and second magnets; and obtaining an image of an analysis or test result object of the disc.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: June 4, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-cheol Kim, Chung-ung Kim, Ki-ju Lee, Jong-jin Park, Dong-hwi Cho, Su-bong Bae
  • Patent number: 8395758
    Abstract: While one ends of ropes are respectively tied to a ?Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a ?Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved.
    Type: Grant
    Filed: May 17, 2010
    Date of Patent: March 12, 2013
    Assignee: Nikon Corporation
    Inventor: Yasuo Aoki
  • Patent number: 8324844
    Abstract: An ultrasonic motor device includes: an ultrasonic motor that moves an object; a detecting unit that detects movement of the object; and a control unit that drives the ultrasonic motor according to a first driving signal before detection of the movement of the object, and drives the ultrasonic motor according to a second driving signal, which is different from the first driving signal, after detection of the movement of the object.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: December 4, 2012
    Assignee: Nikon Corporation
    Inventor: Noriaki Nakajima
  • Patent number: 8310195
    Abstract: Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
    Type: Grant
    Filed: February 15, 2012
    Date of Patent: November 13, 2012
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak, Richard J. Casler, Jr., Thomas Rohrs
  • Patent number: 8294406
    Abstract: The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an existing automation system. The system has a motor controller, a digital signal processor, a base frame, a first motor, a first cranking arm with a first connecting link and an intermediate stage that mounts a second motor that is attached to a second cranking arm with a second connecting link. There is also an output stage (also called a table) that is precisely moved by the second cranking arm and a first and second optical linear encoder used in combination with the first and second motor and the first and second cranking arm forming a first motor assembly that converts operational data into a plurality of highly precise X-axes and Y-axes payload linear movements.
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: October 23, 2012
    Inventor: Bhargav Ishwarlal Gajjar
  • Patent number: 8278866
    Abstract: Embodiments of the invention are directed to systems and methods for accurate positioning of a unit movable by a drive system. The method may include adjusting tension of a resilient element of the drive system to reduce hysteresis motion errors of the resilient element below a predetermined threshold by performing measurements of the hysteresis motion errors of the resilient element for two or more tension values and selecting a tension value for which the hysteresis motion error is below the threshold.
    Type: Grant
    Filed: February 3, 2009
    Date of Patent: October 2, 2012
    Assignee: Objet Ltd.
    Inventors: Eliahu M. Kritchman, Alexander Libinson
  • Patent number: 8179078
    Abstract: A hand-held or vehicle-mounted stabilization system including a platform supported by two or more rotatably-coupled gimbal frames each having a pivot assembly disposed at its rotation axis to couple an actuator to a rotation sensor having a rotation-sensitive sensor axis that is preferably fixedly disposed with respect to the rotation axis, and a controller for accepting the sensor signals and for producing each motor signal needed to dispose the platform in a predetermined angular position with respect to each rotation axis independent of changes in mount orientation. An alternative embodiment includes a controller for accepting an external slew signal sequence and for producing the motor signals needed to move the platform along a predetermined sequence of positions represented by the slew signal sequence.
    Type: Grant
    Filed: December 6, 2009
    Date of Patent: May 15, 2012
    Inventor: Adam D. Sidman
  • Patent number: 8174229
    Abstract: The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movement target position at a first movement speed; a positional deviation correcting step of moving the table to a low-speed positioning step start position at a second movement speed that is lower than the first movement speed; a low-speed positioning step of moving the table to a target position at a third movement speed that is lower than the second movement speed. After the low-speed positioning step is completed, a rod connected to a motor returns to its original position to separate a pin of the rod side from a concave portion of the table side.
    Type: Grant
    Filed: April 8, 2009
    Date of Patent: May 8, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Masashi Fujita, Shuichi Nakagawa, Takashi Kobayashi
  • Patent number: 8157240
    Abstract: A quakeproof plinth is adapted to make a showpiece mount vertically go down without a tilt so as to cushion and shelter a showpiece seated thereon from impact force exerted on the entire showpiece. A plinth (100) of the present invention is comprised of a showpiece mount (110), a supporting member (120) capable of supporting the showpiece mount so as to move the same upward and downward, basement shock absorbers (130) enabling the showpiece mount to be shock-absorbingly bumped down thereon, a vibration detector (140), and an actuating device (150) activated to move the showpiece mount downward in response to a detection signal produced from the vibration detector.
    Type: Grant
    Filed: March 9, 2009
    Date of Patent: April 17, 2012
    Assignees: Musashi Co., Ltd., Kohichi Murakoshi
    Inventors: Tomonao Kaneko, Noboru Yamane
  • Patent number: 8140288
    Abstract: Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio.
    Type: Grant
    Filed: November 19, 2007
    Date of Patent: March 20, 2012
    Assignee: Nikon Corporation
    Inventors: Pai-Hsueh Yang, Bausan Yuan, Kazuo Masaki, Kazuhiro Hirano, Xiao-Feng Yang, Scott Coakley, Michael B. Binnard
  • Patent number: 8120304
    Abstract: Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: February 21, 2012
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak, Richard J. Casler, Jr., Thomas Rohrs
  • Patent number: 8069004
    Abstract: Systems comprising generating devices comprising sensors for generating sensor signals representing orientations of the generating devices are provided with comparing devices comprising comparators for comparing the sensor signals with reference signals for interpreting the orientations, to increase the number of possible applications. The generating devices and the comparing devices may form parts of one apparatus or of different apparatuses and then communicate wiredly or wirelessly via radio or infrared. Reference sensors for generating the reference signals and/or reference memories for storing the reference signals may be located in the comparing devices and/or in sources and then communicate wiredly or wirelessly via radio or infrared. Further comparators in the comparing devices may introduce adjustable sensitivities.
    Type: Grant
    Filed: May 9, 2006
    Date of Patent: November 29, 2011
    Assignee: NXP B.V.
    Inventors: Hans Boeve, Teunis Jan Ikkink, Victor Van Acht
  • Patent number: 8049454
    Abstract: A rough and fine movement device capable of moving a mobile body with high accuracy, and a liquid supply device incorporating such a device. First and second mobile bodies are movable along guide members with a connection member connecting the mobile bodies in a relatively movable manner. A first drive mechanism roughly moves the first mobile body by a first stroke. A second drive mechanism between the first and the second mobile bodies, finely moves the second mobile body relative to the first mobile body by a second stroke. The second drive mechanism on one of the first and second mobile bodies and includes an actuator having a contactor with a first contact surface. The other of the bodies includes a second contact surface which contacts the first contact surface. At least one of the first contact surface or the second contact surface is spherical.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: November 1, 2011
    Assignee: Ulvac, Inc.
    Inventor: Seiichi Satou
  • Patent number: 8018194
    Abstract: When application software running on a PC is in the state of being terminated, a switch unit is turned OFF with the control of a CPU and individual motors, and in this state, a light source is not supplied with a motor/lamp-use power source. In this state, however, the CPU and individual I/Fs are supplied with a logic-use power source. Therefore, the switch unit is turned ON when the application software is started, and an initialization process for an individual electrically driven unit is no longer required.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: September 13, 2011
    Assignee: Olympus Corporation
    Inventor: Hiroshi Watanabe
  • Patent number: 8013562
    Abstract: A driving mechanism comprises a fixed housing, a movable housing on which an object to be driven is mounted and a driving motor which is operative to drive the movable housing to move linearly as well as to rotate relative to the fixed housing. An inductance-type encoder determines both linear and rotary displacement of the movable housing relative to the fixed housing, whereby to provide closed-loop control of the position of the object in both linear and rotary directions.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: September 6, 2011
    Assignee: ASM Assembly Automation Ltd
    Inventors: Wai Chuen Gan, Gary Peter Widdowson, Shiqiang Yao, Siu Yan Ho, Hon Yu Peter Ng
  • Patent number: 8013561
    Abstract: A driving mechanism comprises a fixed housing, a movable housing on which an object to be driven is mounted and a driving motor which is operative to drive the movable housing to move linearly as well as to rotate relative to the fixed housing. An inductance-type encoder determines both linear and rotary displacement of the movable housing relative to the fixed housing, whereby to provide closed-loop control of the position of the object in both linear and rotary directions.
    Type: Grant
    Filed: September 9, 2008
    Date of Patent: September 6, 2011
    Assignee: ASM Assembly Automation Ltd
    Inventors: Wai Chuen Gan, Gary Peter Widdowson
  • Patent number: 7948198
    Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: May 24, 2011
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventor: Takuya Hosobata
  • Patent number: 7944166
    Abstract: Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: May 17, 2011
    Assignee: Sumitomo Heavy Industries
    Inventors: Takuya Hosobata, Kazuya Hioki
  • Patent number: RE44396
    Abstract: Force feedback in large, immersive environments is provided by device which a gyro- stabilization to generate a fixed point of leverage for the requisite forces and/or torques. In one embodiment, one or more orthogonally oriented rotating gyroscopes are used to provide a stable platform to which a force-reflecting device can be mounted, thereby coupling reaction forces to a user without the need for connection to a fixed frame. In one physical realization, a rigid handle or joystick is directly connected to the three-axis stabilized platform and using an inventive control scheme to modulate motor torques so that only the desired forces are felt. In an alternative embodiment, a reaction sphere is used to produce the requisite inertial stabilization. Since the sphere is capable of providing controlled torques about three arbitrary, linearly independent axes, it can be used in place of three reaction wheels to provide three-axis stabilization for a variety of space-based and terrestrial applications.
    Type: Grant
    Filed: July 25, 2007
    Date of Patent: July 30, 2013
    Assignee: Immersion Corporation
    Inventors: Gerald P. Roston, Charles J. Jacobus