Stable Platforms Patents (Class 318/649)
  • Patent number: 10031206
    Abstract: A method for calibrating an orientation angle of a rotatable satellite tracking antenna, while changing an elevation angle or an azimuth, includes an elevation encoder calibrating step of setting a value of an elevation encoder measuring an elevation angle of the satellite tracking antenna to zero when an orientation direction of the satellite tracking antenna is parallel to one surface, an azimuth encoder calibrating step of setting a value of an azimuth encoder measuring an azimuth of the satellite tracking antenna to zero when an orientation direction of the satellite tracking antenna is parallel to one direction, and a gyroscope calibrating step of performing calibration such that one axis included in a gyroscope measuring a rotation angular velocity of the satellite tracking antenna is parallel to an azimuth rotation axis of the satellite tracking antenna and the other is parallel to an elevation rotation axis of the satellite tracking antenna.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: July 24, 2018
    Assignee: AGENCY FOR DEFENCE DEVELOPMENT
    Inventors: Hyunwook Jo, Jongwan Heo, Kunsup Kwon, Myungjin Jang
  • Patent number: 9851543
    Abstract: A projection lens adjustment module applicable to a projection lens is provided. The projection lens includes a first assembly and a second assembly. The projection lens adjustment module includes a flexible connection line, an adjusting element and a driving mechanism. The flexible connection line has a first end and a second end opposite to each other. The adjusting element is connected to the first end. The driving mechanism is connected to the second assembly and the second end. When the adjusting element drives the first end to move along a first direction thereby leading the second end to move along a second direction non-parallel to the first direction, the second end drives the second assembly to move along an optical axis direction of the projection lens relative to the first assembly through the driving mechanism.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: December 26, 2017
    Assignee: CORETRONIC CORPORATION
    Inventors: Sea-Huang Lee, Shyh-Kang Lin, Wen-Ching Ho
  • Patent number: 9753381
    Abstract: A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: September 5, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hans Butler
  • Patent number: 9747874
    Abstract: An electronic guitar pick, system, system and method may include an enclosure forming a cavity, the enclosure having a first end that is substantially pointed and a second end opposite the first end that is substantially flat, the enclosure having a thickness proximate the cavity greater than a thickness proximate the first end. The electronic guitar pick, system, and method may further include a sensor contained, at least in part, within the cavity and configured to generate a sensor output based on an interaction with the enclosure and a sensory output device, communicatively coupled to the sensor, configured to output a sensory output based, at least in part, on the sensor output.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: August 29, 2017
    Assignee: Capacitron, LLC
    Inventors: Peter Douglas Holm, Brandon Williams
  • Patent number: 9361865
    Abstract: An electronic guitar pick, system, system and method may include an enclosure forming a cavity, the enclosure having a first end that is substantially pointed and a second end opposite the first end that is substantially flat, the enclosure having a thickness proximate the cavity greater than a thickness proximate the first end. The electronic guitar pick, system, and method may further include a sensor contained, at least in part, within the cavity and configured to generate a sensor output based on an interaction with the enclosure and a sensory output device, communicatively coupled to the sensor, configured to output a sensory output based, at least in part, on the sensor output.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: June 7, 2016
    Assignee: Capacitron, LLC
    Inventors: Peter Douglas Holm, Brandon Williams
  • Patent number: 9063009
    Abstract: A testing device includes a receiving unit for electromagnetic signals arranged on a carrier element to be tested to generate test data from received electromagnetic radiation. The test data are evaluated in a processing system to determine a deviation of the test data from a nominal state of the carrier element. The testing device is used to test a carrier element of an elevator installation on which the elevator car is suspended.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: June 23, 2015
    Assignee: Inventio AG
    Inventors: Josef Husmann, Guntram Begle
  • Patent number: 9063008
    Abstract: A testing device includes a receiving unit for electromagnetic signals arranged on a carrier element to be tested to generate test data from received electromagnetic radiation. The test data are evaluated in a processing system in order to determine a deviation of the test data from a nominal state of the carrier element. The testing device is used to test a carrier element of an elevator installation on which the elevator car is suspended.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: June 23, 2015
    Assignee: Inventio AG
    Inventors: Josef Husmann, Guntram Begle
  • Patent number: 9030149
    Abstract: Systems and methods are provided for supporting and articulating a payload using stabilization platform. The stabilization platform may be configured to avoid gimbal lock. The stabilization platform may be configured to automatically transition between different modes of orientation.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: May 12, 2015
    Assignee: SZ DJI TECHNOLOGY Co., Ltd.
    Inventors: Fazhan Chen, Zihan Chen
  • Patent number: 8866427
    Abstract: When it is determined that the number of times that motor rotation-indicative quantity has been detected has exceeded a measurement interval, a feedback speed value is calculated from a motor rotation-indicative quantity detected immediately before, a motor rotation-indicative quantity detected immediately before the last time a measurement interval determination means determined that the number of times had exceeded the measurement interval, and time that has elapsed since the last time the measurement interval determination means determined that the number of times had exceeded the measurement interval, and the measurement interval having a length calculated from a greater one between the calculated feedback speed value and a speed command value is set for the measurement interval determination means to refer to.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: October 21, 2014
    Assignees: IHI Aerospace Co., Ltd., Sinfonia Technology Co., Ltd.
    Inventors: Hitoshi Oyori, Masaaki Monte
  • Patent number: 8853988
    Abstract: Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: October 7, 2014
    Assignee: Nikon Corporation
    Inventors: Michael B. Binnard, Scott Coakley, Douglas C. Watson, Pai-Hsueh Yang
  • Patent number: 8835872
    Abstract: A sample stage device (10) is so configured as to calculate ideal position information xtg(i), tg(i) per predetermined period that is unaffected by drive conditions relating to gaps (25, 26), etc., and to determine, per predetermined cycle and in real time, deviations dx(i), dy(i) between real-time measured positions x(i), y(i) by position detectors comprising laser interferometers (33, 34), etc., and ideal position information xtg(i), tg(i). In addition, it calculates, based on deviations dx(i), dy(i) thus determined, such speed command values vx(i), vy(i) for motors (27, 28) that measured values x(i), y(i) would follow ideal position information xtg(i), tg(i), and performs stable and high-speed positioning control for a sample table (11) through feedback control that controls speed in real time.
    Type: Grant
    Filed: June 23, 2011
    Date of Patent: September 16, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventor: Takashi Kobayashi
  • Patent number: 8823309
    Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: September 2, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Hironori Ogawa, Masahiro Koyama, Nobuo Shibata, Masaru Matsushima, Shuichi Nakagawa, Katsunori Onuki, Yoshimasa Fukushima
  • Patent number: 8810181
    Abstract: A control apparatus for controllably driving a drive mechanism which displaces a movable member, includes: an electric-current detecting unit configured to detect electric current for driving the drive mechanism; a speed control unit configured to set a target electric-current according to a drive speed at which the drive mechanism is caused to drive the movable member; and an electric-current control unit configured to multiply, by an integral gain and a proportional gain, an electric-current deviation between a target electric-current and a detection electric-current detected by the electric-current detecting unit to set output electric-current to be output to the drive mechanism, wherein the current control unit changes at least one of the integral gain and the proportional gain according to the drive speed of the drive mechanism.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: August 19, 2014
    Assignee: Mitutoyo Corporation
    Inventors: Tomohiro Usui, Yo Terashita
  • Patent number: 8723472
    Abstract: Improved precision is realized in positioning control. Provided is a servo control device that is applied to a numerical control equipment provided with a screw-feeding section that converts rotational movement of a motor to linear movement, a driven section that is linearly moved by the screw-feeding section, and a support member by which the screw-feeding section and the driven section are supported and that controls the motor so as to match a position of the driven section to a positioning instruction, including a support-member-reaction-force compensating section 311 that compensates for vibrations of the driven section due to a vibrational reaction force of the support member, wherein a transfer function provided in the support-member-reaction-force compensating section 311 includes a stiffness term for the driven section.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: May 13, 2014
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Katsuyoshi Takeuchi, Hideaki Yamamoto
  • Patent number: 8674645
    Abstract: A drive for providing high dynamics for a machine, such as a production machine, includes a short-stroke motor, and a pulse-decoupling device for decoupling pulses of the short-stroke motor from the machine using closed-loop control. The pulse-decoupling device has at least one component for use as a working-point adjustment device for adjusting a working point of the short-stroke motor. The pulse-decoupling device is thus able to assume the function of pulse decoupling and in addition, at least partially, the function of working point adjustment.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: March 18, 2014
    Assignee: Siemens Aktiengesellschaft
    Inventor: Markus Knorr
  • Patent number: 8519728
    Abstract: Methods and apparatuses for modifying a stage position and measuring at least one parameter of a motor connected with a stage during a commanded stage position are described. In one embodiment of one aspect of the invention, the motor is configured to move the stage in a first direction in response to the at least one parameter and determine whether the at least one parameter is within a threshold range.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: August 27, 2013
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak
  • Patent number: 8493007
    Abstract: A method for ascertaining measured values in a cyclically controlled system, the cyclic control having control time periods in which the system is controlled, and no-control time periods in which the system is not controlled, having the following operations of determining first integration time periods as a function of the cyclic control, the first integration time periods being situated within at least one of the control time periods, and/or determining second integration time periods as a function of the cyclic control, the second integration time period being situated within at least one of the no-control time periods; detecting one of the measured variables of the system dependent on the control; ascertaining summation and/or integration values by summation and/or integration of the measured variable during the first and/or second integration time periods; ascertaining the measured value for at least one of the control time periods and/or no-control time periods on the basis of time data of the first and/
    Type: Grant
    Filed: July 27, 2009
    Date of Patent: July 23, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Andreas Schmidtlein, Rainer Baumgaertner
  • Patent number: 8456127
    Abstract: Provided is a method of obtaining an image of a disc, in which the method obtains an image of an analysis or test result object of a disc by minimizing a difference between the positionings of a magnet of the disc and a magnet of a feeding unit, and an apparatus for driving a disc, wherein the apparatus performs the method. The method includes: fixing a positioning of a disc by using magnetic attraction between a first magnet installed on the disc and a second magnet installed on a feeding unit; minimizing a difference between the positionings of the first and second magnets; and obtaining an image of an analysis or test result object of the disc.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: June 4, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-cheol Kim, Chung-ung Kim, Ki-ju Lee, Jong-jin Park, Dong-hwi Cho, Su-bong Bae
  • Patent number: 8395758
    Abstract: While one ends of ropes are respectively tied to a ?Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a ?Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved.
    Type: Grant
    Filed: May 17, 2010
    Date of Patent: March 12, 2013
    Assignee: Nikon Corporation
    Inventor: Yasuo Aoki
  • Patent number: 8324844
    Abstract: An ultrasonic motor device includes: an ultrasonic motor that moves an object; a detecting unit that detects movement of the object; and a control unit that drives the ultrasonic motor according to a first driving signal before detection of the movement of the object, and drives the ultrasonic motor according to a second driving signal, which is different from the first driving signal, after detection of the movement of the object.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: December 4, 2012
    Assignee: Nikon Corporation
    Inventor: Noriaki Nakajima
  • Patent number: 8310195
    Abstract: Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
    Type: Grant
    Filed: February 15, 2012
    Date of Patent: November 13, 2012
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak, Richard J. Casler, Jr., Thomas Rohrs
  • Patent number: 8294406
    Abstract: The present invention is a parallel kinematic linkage based micro-positioning system that can provide precise movement at the micron and sub-micron level of a payload that is compatible with an existing automation system. The system has a motor controller, a digital signal processor, a base frame, a first motor, a first cranking arm with a first connecting link and an intermediate stage that mounts a second motor that is attached to a second cranking arm with a second connecting link. There is also an output stage (also called a table) that is precisely moved by the second cranking arm and a first and second optical linear encoder used in combination with the first and second motor and the first and second cranking arm forming a first motor assembly that converts operational data into a plurality of highly precise X-axes and Y-axes payload linear movements.
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: October 23, 2012
    Inventor: Bhargav Ishwarlal Gajjar
  • Patent number: 8278866
    Abstract: Embodiments of the invention are directed to systems and methods for accurate positioning of a unit movable by a drive system. The method may include adjusting tension of a resilient element of the drive system to reduce hysteresis motion errors of the resilient element below a predetermined threshold by performing measurements of the hysteresis motion errors of the resilient element for two or more tension values and selecting a tension value for which the hysteresis motion error is below the threshold.
    Type: Grant
    Filed: February 3, 2009
    Date of Patent: October 2, 2012
    Assignee: Objet Ltd.
    Inventors: Eliahu M. Kritchman, Alexander Libinson
  • Patent number: 8179078
    Abstract: A hand-held or vehicle-mounted stabilization system including a platform supported by two or more rotatably-coupled gimbal frames each having a pivot assembly disposed at its rotation axis to couple an actuator to a rotation sensor having a rotation-sensitive sensor axis that is preferably fixedly disposed with respect to the rotation axis, and a controller for accepting the sensor signals and for producing each motor signal needed to dispose the platform in a predetermined angular position with respect to each rotation axis independent of changes in mount orientation. An alternative embodiment includes a controller for accepting an external slew signal sequence and for producing the motor signals needed to move the platform along a predetermined sequence of positions represented by the slew signal sequence.
    Type: Grant
    Filed: December 6, 2009
    Date of Patent: May 15, 2012
    Inventor: Adam D. Sidman
  • Patent number: 8174229
    Abstract: The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movement target position at a first movement speed; a positional deviation correcting step of moving the table to a low-speed positioning step start position at a second movement speed that is lower than the first movement speed; a low-speed positioning step of moving the table to a target position at a third movement speed that is lower than the second movement speed. After the low-speed positioning step is completed, a rod connected to a motor returns to its original position to separate a pin of the rod side from a concave portion of the table side.
    Type: Grant
    Filed: April 8, 2009
    Date of Patent: May 8, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Masashi Fujita, Shuichi Nakagawa, Takashi Kobayashi
  • Patent number: 8157240
    Abstract: A quakeproof plinth is adapted to make a showpiece mount vertically go down without a tilt so as to cushion and shelter a showpiece seated thereon from impact force exerted on the entire showpiece. A plinth (100) of the present invention is comprised of a showpiece mount (110), a supporting member (120) capable of supporting the showpiece mount so as to move the same upward and downward, basement shock absorbers (130) enabling the showpiece mount to be shock-absorbingly bumped down thereon, a vibration detector (140), and an actuating device (150) activated to move the showpiece mount downward in response to a detection signal produced from the vibration detector.
    Type: Grant
    Filed: March 9, 2009
    Date of Patent: April 17, 2012
    Assignees: Musashi Co., Ltd., Kohichi Murakoshi
    Inventors: Tomonao Kaneko, Noboru Yamane
  • Patent number: 8140288
    Abstract: Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio.
    Type: Grant
    Filed: November 19, 2007
    Date of Patent: March 20, 2012
    Assignee: Nikon Corporation
    Inventors: Pai-Hsueh Yang, Bausan Yuan, Kazuo Masaki, Kazuhiro Hirano, Xiao-Feng Yang, Scott Coakley, Michael B. Binnard
  • Patent number: 8120304
    Abstract: Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: February 21, 2012
    Assignee: FormFactor, Inc.
    Inventors: Sun Yalei, Uday Nayak, Richard J. Casler, Jr., Thomas Rohrs
  • Patent number: 8069004
    Abstract: Systems comprising generating devices comprising sensors for generating sensor signals representing orientations of the generating devices are provided with comparing devices comprising comparators for comparing the sensor signals with reference signals for interpreting the orientations, to increase the number of possible applications. The generating devices and the comparing devices may form parts of one apparatus or of different apparatuses and then communicate wiredly or wirelessly via radio or infrared. Reference sensors for generating the reference signals and/or reference memories for storing the reference signals may be located in the comparing devices and/or in sources and then communicate wiredly or wirelessly via radio or infrared. Further comparators in the comparing devices may introduce adjustable sensitivities.
    Type: Grant
    Filed: May 9, 2006
    Date of Patent: November 29, 2011
    Assignee: NXP B.V.
    Inventors: Hans Boeve, Teunis Jan Ikkink, Victor Van Acht
  • Patent number: 8049454
    Abstract: A rough and fine movement device capable of moving a mobile body with high accuracy, and a liquid supply device incorporating such a device. First and second mobile bodies are movable along guide members with a connection member connecting the mobile bodies in a relatively movable manner. A first drive mechanism roughly moves the first mobile body by a first stroke. A second drive mechanism between the first and the second mobile bodies, finely moves the second mobile body relative to the first mobile body by a second stroke. The second drive mechanism on one of the first and second mobile bodies and includes an actuator having a contactor with a first contact surface. The other of the bodies includes a second contact surface which contacts the first contact surface. At least one of the first contact surface or the second contact surface is spherical.
    Type: Grant
    Filed: April 22, 2008
    Date of Patent: November 1, 2011
    Assignee: Ulvac, Inc.
    Inventor: Seiichi Satou
  • Patent number: 8018194
    Abstract: When application software running on a PC is in the state of being terminated, a switch unit is turned OFF with the control of a CPU and individual motors, and in this state, a light source is not supplied with a motor/lamp-use power source. In this state, however, the CPU and individual I/Fs are supplied with a logic-use power source. Therefore, the switch unit is turned ON when the application software is started, and an initialization process for an individual electrically driven unit is no longer required.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: September 13, 2011
    Assignee: Olympus Corporation
    Inventor: Hiroshi Watanabe
  • Patent number: 8013562
    Abstract: A driving mechanism comprises a fixed housing, a movable housing on which an object to be driven is mounted and a driving motor which is operative to drive the movable housing to move linearly as well as to rotate relative to the fixed housing. An inductance-type encoder determines both linear and rotary displacement of the movable housing relative to the fixed housing, whereby to provide closed-loop control of the position of the object in both linear and rotary directions.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: September 6, 2011
    Assignee: ASM Assembly Automation Ltd
    Inventors: Wai Chuen Gan, Gary Peter Widdowson, Shiqiang Yao, Siu Yan Ho, Hon Yu Peter Ng
  • Patent number: 8013561
    Abstract: A driving mechanism comprises a fixed housing, a movable housing on which an object to be driven is mounted and a driving motor which is operative to drive the movable housing to move linearly as well as to rotate relative to the fixed housing. An inductance-type encoder determines both linear and rotary displacement of the movable housing relative to the fixed housing, whereby to provide closed-loop control of the position of the object in both linear and rotary directions.
    Type: Grant
    Filed: September 9, 2008
    Date of Patent: September 6, 2011
    Assignee: ASM Assembly Automation Ltd
    Inventors: Wai Chuen Gan, Gary Peter Widdowson
  • Patent number: 7948198
    Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: May 24, 2011
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventor: Takuya Hosobata
  • Patent number: 7944166
    Abstract: Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: May 17, 2011
    Assignee: Sumitomo Heavy Industries
    Inventors: Takuya Hosobata, Kazuya Hioki
  • Patent number: 7911174
    Abstract: A method and system are provided for sensing the position of a rotor in a hybrid stepper motor. First and second Hall sensors are positioned in a spaced-apart relationship with the first and second armatures of the rotor such that the first and second Hall sensors generate electrical outputs that are 90° out of phase with one another as the rotor rotates. The electrical outputs are adjusted relative to a reference, and the amplitude of the electrical outputs is further adjusted to account for spacing differences between the rotor and each of the first and second Hall sensors.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: March 22, 2011
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: David E. Howard, Dean C. Alhorn, Dennis A. Smith
  • Patent number: 7898204
    Abstract: A mechanism for manipulation of a substrate over a substantially planar region has at least three, and up to six, degrees of freedom (DOF). The mechanism may be manufactured in various configurations, including triangular, and may use inherent symmetry to reduce the number of distinct components that must be manufactured. The mechanism may use parallelism to reduce the moving mass and thereby achieve higher levels of performance using less expensive motors while dissipating less power.
    Type: Grant
    Filed: January 5, 2007
    Date of Patent: March 1, 2011
    Assignee: Active Precision, Inc.
    Inventor: Bradley Hunter
  • Patent number: 7898205
    Abstract: A linear feedback positioning module is provided with a coupling and a drive at one side of a platform having a lead screw, a movable assembly combined on the lead screw and a feedback assembly. The feedback assembly includes a magnetic scale cooperating with a read head. The magnetic scale is combined on the platform and located along the lead screw to cooperate with the lead screw. The linear feedback positioning module is further used with a backend control assembly. By such arrangements, the feedback assembly can correct error at any moment to improve the process and product accuracy and increase the production efficiency and product competitiveness.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: March 1, 2011
    Assignee: Hiwin Mikrosystem Corp.
    Inventor: Don-Hua Cheng
  • Patent number: 7852034
    Abstract: An exposure apparatus that comprises a stage-that moves in the X-axis direction, an X-axis linear motor that drives the stage, a counter mass that moves in a direction opposite to the stage due to the action of the reaction force of the drive force of the stage in the X-axis direction by the motor, X-axis trim motors that drives the counter mass in the X-axis direction, and a control unit that controls the trim motors and gives the counter mass an initial velocity in the +X direction when the stage is moved via the motor, for example, in the +X direction. Accordingly, the strokes required for the movement of the counter mass can be shortened without increasing the size of the counter mass.
    Type: Grant
    Filed: April 6, 2005
    Date of Patent: December 14, 2010
    Assignee: Nikon Corporation
    Inventor: Yuichi Shibazaki
  • Patent number: 7817243
    Abstract: A vibration isolation system isolates a body from its surroundings with respect to vibrations. The vibration isolation system includes active isolator devices that isolate and damp the body in unstable directions. However, such active isolators may exert damping forces not only in the unstable direction, but simultaneously in other stable directions due to mechanical coupling of the stable and unstable directions. As a result the damping and isolation in the other stable directions may be deteriorated due to the active isolation and damping. Employing modal decoupling, i.e. decomposing any vibration into independent directions, and isolating and damping in the independent directions, enables compensation of any vibration in an unstable direction without influencing the isolation and damping performance in any other, possibly stable, direction.
    Type: Grant
    Filed: April 12, 2004
    Date of Patent: October 19, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel François Heertjes, Jan-Gerard Cornelis Van Der Toorn
  • Patent number: 7738080
    Abstract: A stage apparatus includes a base, a stage that can move on a surface of the base, a first imparting unit arranged inside the base, which has a mass body and an actuator that is fixed to the base and moves the mass body in a direction vertical to the surface, the first imparting unit being configured to apply a force to the base by moving the mass body, and a controlling unit that controls the movement of the mass body in the vertical direction in the first imparting unit in accordance with movement of the stage, so that a force, which is generated in the base by the movement of the stage in a rotational direction around an axis parallel to the surface, is reduced.
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: June 15, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventor: Satoru Itoh
  • Patent number: 7710059
    Abstract: A method of optimizing a servo controller power required in the operation of two-dimensional flexure (Microelectronic Memory Storage) MEMS devices. Furthermore, provided is an arrangement for optimizing servo controller power in a two-dimensional flexure MEMS storage device through a utilization of the inventive method.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: May 4, 2010
    Assignee: International Business Machines Corporation
    Inventors: Hien P. Dang, Sri M. Sri-Jayantha
  • Publication number: 20100079101
    Abstract: A hand-held or vehicle-mounted stabilization system including a platform supported by two or more rotatably-coupled gimbal frames each having a pivot assembly disposed at its rotation axis to couple an actuator to a rotation sensor having a rotation-sensitive sensor axis that is preferably fixedly disposed with respect to the rotation axis, and a controller for accepting the sensor signals and for producing each motor signal needed to dispose the platform in a predetermined angular position with respect to each rotation axis independent of changes in mount orientation. An alternative embodiment includes a controller for accepting an external slew signal sequence and for producing the motor signals needed to move the platform along a predetermined sequence of positions represented by the slew signal sequence.
    Type: Application
    Filed: December 6, 2009
    Publication date: April 1, 2010
    Inventor: Adam D. Sidman
  • Patent number: 7649333
    Abstract: A damping apparatus is provided for a positioning stage that is operative to move and position an object along a motion axis. The damping apparatus comprises a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis, in response to forces generated to the positioning stage during acceleration or deceleration thereof. Resilient elements connected to the positioning stage serve to reduce transmission of vibration generated from the positioning stage.
    Type: Grant
    Filed: January 15, 2007
    Date of Patent: January 19, 2010
    Assignee: ASM Assembly Automation Ltd.
    Inventors: Ping Kong Joseph Choy, Siu Wing Or, Chung Sheung Yung, Chou Kee Peter Liu, Lai Wa Helen Chan-Wong
  • Patent number: 7642741
    Abstract: A stabilization system including a platform supported by two or more rotatably-coupled gimbal frames each having a pivot assembly disposed at its rotation axis to couple an actuator to a rotation sensor having a rotation-sensitive sensor axis that is fixedly disposed with respect to the rotation axis, and a controller including means for accepting the sensor signals and for producing each motor signal needed to dispose the platform in a predetermined angular position with respect to each rotation axis independent of changes in the base orientation. A motion simulator embodiment includes controller means for accepting an external slew signal sequence and means for producing the motor signals needed to move the platform along a predetermined sequence of positions represented by the slew signal sequence.
    Type: Grant
    Filed: April 22, 2006
    Date of Patent: January 5, 2010
    Inventor: Adam D. Sidman
  • Patent number: 7630620
    Abstract: A system and method for reducing vibration in a dome camera security system is provided in which the heat produced by the motors is reduced as well. The dome camera system is equipped with an acceleration detecting circuit disposed in close proximity to the camera. The acceleration detecting circuit has an accelerometer for detecting accelerations in any of three directions (i.e., X-axis, Y-axis and Z-axis). As a vibration is induced on the camera by external forces, such as wind or traffic, the acceleration detection circuit detects accelerations indicative of the vibrations and in proportion to the magnitude of the vibration on the camera. A controlling circuit adjusts the holding current of the motors in response to the detected accelerations, thereby increasing the ability of the motors to maintain a particular camera position. When vibrations are detected to be minimal or not present, the holding current can be reduced thus reducing heat production by the motors.
    Type: Grant
    Filed: July 24, 2007
    Date of Patent: December 8, 2009
    Assignee: Honeywell International Inc.
    Inventors: James F. Benson, Judd D. Clover, Douglas L. Ringer
  • Patent number: 7592760
    Abstract: A positioning device configured to position a first and a second movable object in a substantially common operation area is presented. The positioning device includes a first coil assembly arranged next to the operation area, a second coil assembly arranged at an opposite side of the operation area, one or more first magnets arranged on the first movable object and configured to cooperate with the first coil assembly, and one or more second magnets arranged on the second movable object and configured to cooperate with the second coil assembly.
    Type: Grant
    Filed: September 11, 2006
    Date of Patent: September 22, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Hans Butler, Franciscus Adrianus Gerardus Klaassen
  • Patent number: 7583044
    Abstract: A servo control system micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
    Type: Grant
    Filed: June 18, 2008
    Date of Patent: September 1, 2009
    Assignee: International Business Machines Corporation
    Inventors: Sri M. Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos S. Eleftheriou, Mark A. Lantz, Charalampos Pozidis
  • Patent number: RE41035
    Abstract: Disclosed are a magnetic bearing device with a vibration restraining function, a magnetic bearing device with a vibration estimating function, and a pump device with the magnetic bearing devices mounted thereto, in which it is possible to realize a reduction in vibration in the apparatus system as a whole inclusive of the equipment associated with the vacuum pump without newly providing a vibration sensor. In a vibration detector, a multiplication result obtained by multiplying the Laplace transformation of a displacement of a rotor by a predetermined transfer function is added to a multiplication result obtained by multiplying the Laplace transformation of a variation in an unbalance force acting on the rotor by the reciprocal of the mass of the rotor. The result of this calculation is reversed in polarity and is added to the output of a compensator by an adder.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: December 15, 2009
    Assignee: BOC Edwards Japan Limited
    Inventors: Yoshinobu Ohtachi, Hideo Fukami, Hirotaka Namiki
  • Patent number: RE44396
    Abstract: Force feedback in large, immersive environments is provided by device which a gyro- stabilization to generate a fixed point of leverage for the requisite forces and/or torques. In one embodiment, one or more orthogonally oriented rotating gyroscopes are used to provide a stable platform to which a force-reflecting device can be mounted, thereby coupling reaction forces to a user without the need for connection to a fixed frame. In one physical realization, a rigid handle or joystick is directly connected to the three-axis stabilized platform and using an inventive control scheme to modulate motor torques so that only the desired forces are felt. In an alternative embodiment, a reaction sphere is used to produce the requisite inertial stabilization. Since the sphere is capable of providing controlled torques about three arbitrary, linearly independent axes, it can be used in place of three reaction wheels to provide three-axis stabilization for a variety of space-based and terrestrial applications.
    Type: Grant
    Filed: July 25, 2007
    Date of Patent: July 30, 2013
    Assignee: Immersion Corporation
    Inventors: Gerald P. Roston, Charles J. Jacobus