Abstract: A touch display device can include a plurality of touch electrodes disposed on or in a display panel; and a touch driving circuit configured to drive the plurality of touch electrodes by outputting a touch driving signal having a first level period and a second level period. Also, the touch driving circuit includes a current regulator configured to receive an input current from at least one of the plurality of touch electrodes during at least a partial period of the first level period and at least a partial period of the second level period of the touch driving signal, and scale down the input current to a first current and output the first current; and a converting integrator configured to output a sensing voltage based on the first current or a second current adjusted from the first current.

Abstract: An actuator device includes a housing, parallel rolling screws supported in the housing, an actuator element, an actuator spindle anchored in the actuator element, a control system, sensor heads, and position sensors. Each rolling screw is coupled to an electric motor and engages a roller nut. Rotating the rolling screws axially displaces the rolling nuts. The actuator element engages with each rolling nut. One sensor head is arranged on the actuator element near each roller nut. One position sensor is fastened in the actuator adjacent each sensor head and communicates position information of each sensor head to the control system. Each electric motor has an encoder coupled to the control system. The encoder provides a primary motor control. The control system compares information from each position sensor with information from the encoder. The information from each position sensor acts as a secondary position control of the actuator element.

Abstract: A sensor device of the present invention includes first sensors receiving a plurality of driving signals; second sensors outputting a plurality of sensing signals in response to the driving signals; and a sensor receiver connected receiving the sensing signals from the second sensors, and including a band pass filter filtering the sensing signals. The band pass filter includes a multi-path filter in which a frequency of the driving signals is set as a center frequency; a gain amplifier amplifying signals filtered through the multi-path filter according to a predetermined gain value; and a buffer isolating the multi-path filter and the gain amplifier from each other.

Abstract: An MEMS structure-based adjustable capacitor is provided, comprising: a lower plate A, a movable plate B, an upper plate C, a fixed apparatus D and one or more connecting conductors E; a lower end of the fixed apparatus D is fixedly connected to the lower plate A, an upper end of the fixed apparatus D is fixedly connected to the upper plate C, a structure B4 is provided at a middle part of movable plate B, and the movable plate B is able to move up and down along the fixed apparatus D; the lower plate A is provided with a lower electrode A1, and the movable plate B is provided with a movable electrode B1 and adjustment electrodes B2; the lower electrode A1 and the movable electrode B1 constitute a unit capacitor; and the upper plate C is provided with an upper electrode C1 and adjustment electrodes C2.

Abstract: The present disclosure relates to a method for determining the occupancy status of a seat of a motor vehicle, the method being implemented by a determination system comprising a seat, six interdigitated capacitive sensors, and a controller comprising a reference capacitance value and a threshold value for each interdigitated capacitive sensor, the method comprising a step of measuring three capacitance values for each interdigitated capacitive sensor, the following steps being implemented by the controller for the measured capacitance values: calculating a resulting capacitance value based on the measured capacitance values, calculating the difference between the resulting capacitance value and the reference capacitance value, comparing the calculated difference to the threshold value, determining the occupancy status of the seat, based on the result of the comparison.

Abstract: A load sensor includes: an electrode; a dielectric formed on a lower surface of the electrode; and a conductive elastic body disposed so as to face a lower surface of the dielectric and having conductivity. A plurality of projecting portions are formed on an upper surface of the conductive elastic body. The conductive elastic body has a bending shape that is bent in an up-down direction, in at least a part thereof. Alternatively, at least either the conductive elastic body or the electrode has a bending shape that is bent in an up-down direction, in at least a part thereof.

Abstract: A force detector includes a layered structure including a first layer and a second layer. The first layer includes a detection face that receives a force to be detected and the second layer is disposed on a face opposite to the detection face. A Young's modulus of the first layer is different from a Young's modulus of the second layer. The force detector further includes a stress generator formed in the layered structure and that receives the force acting in a tangential direction of the detection face and generates a stress with a distribution that is asymmetric with respect to a normal direction of the detection face around the stress generator. The force detector further includes a plurality of sensors disposed around the stress generator.

Abstract: A device includes a touch-mode biometric sensor having a first side facing toward a user and a second side opposite to the first side, and a display arranged under the touch-mode biometric sensor and adjacent to the second side and configured to display an image in response to a sensing result, associated with a biometric feature of the user, of the touch-mode biometric sensor.

Abstract: A sensor array (10) comprising a plurality of touch sensitive pixels, each pixel (12) comprising a capacitive sensing electrode (14) and a reference capacitor (16) connected in series with the capacitive sensing electrode (14) to provide an indicator voltage that is indicative of the proximity of a conductive object to be sensed.

Abstract: An apparatus includes a moveable electrode which moves along an interstitial pathway defined by four fixed electrodes. The first and second fixed electrodes are separated by a first distance. The third and fourth fixed electrodes are separated by a second distance and adjacent to the first and second fixed electrodes, respectively. A capacitance sensing circuit coupled to the four fixed electrodes determines a first capacitance using the first and second fixed electrodes and a second capacitance using the third and fourth fixed electrodes. In some examples, the apparatus also comprises fifth and sixth fixed electrodes separated by a third distance and orthogonal to the first and second fixed electrodes and seventh and eighth fixed electrodes separated by a fourth distance and orthogonal to the third and fourth fixed electrodes. The fifth and seventh fixed electrodes are adjacent, and the sixth and eighth fixed electrodes are adjacent.

Abstract: The capacitance sensor 1 includes a self-capacitance electrode 5, first electrodes 3 (3(1) to 3(4)), and a second electrode 4 which are arranged being separated from each other in a thickness direction of an elastically deformable base material 2 formed by a dielectric. The self-capacitance electrode 5 is connected to a first connection portion 10a for measuring capacitance by a self-capacitance method and a grounded second connection portion 10b via a switch 10 so as to be selectively connected to the first connection portion 10a and the second connection portion 10b.

Abstract: A sensing circuit includes at least a first gain stage and a controller for controlling the operation of the first gain stage. The first gain stage includes an amplifier having at least one input and one output, and a feedback loop coupled between the input and the output of the amplifier. The feedback loop includes a first capacitor coupled between the input and the output of the amplifier, and a second capacitor having a first terminal coupled to the input of the amplifier through a first switch and a second terminal coupled to the output of the amplifier through a second switch. The second capacitor is configured to be coupled in parallel to the first capacitor during a first portion of a measurement cycle, and disconnected from the first capacitor during a second portion of the measurement cycle.

Abstract: A method for plugging a subset of cells of a honeycomb structure that includes: covering a first end face of the honeycomb structure with a mask that comprises a body and a plurality of openings, wherein the plurality of openings of the mask is coincident with a plurality of cells of the honeycomb structure; providing a plug of material upon a film material; applying a force to the film material with a piston to push the plug of material through the plurality of openings of the mask and into the plurality of cells of the honeycomb structure; and measuring a plurality of pressures within the plurality of cells of the honeycomb structure during the applying step.

Abstract: The disclosed apparatus may include a capacitive proximity sensor that increases capacitance in response to proximity of an object; a reference capacitor in parallel with the capacitive proximity sensor; a switch that connects and disconnects the capacitive proximity sensor and the reference capacitor; and a capacitance sensing block that generates a capacitance signal based on a capacitance of the reference capacitor when the switch is in a disconnecting state and based on the capacitance of the reference capacitor and a capacitance of the capacitive proximity sensor when the switch is in a connecting state. Various other methods and systems are also disclosed.

Abstract: An active stylus including a pen housing, a pen core module disposed in the pen housing, a control module disposed in the pen housing, and an elastic member assembled to the control module and the pen core module is provided. The pen core module has a first end and a second end opposite to each other. The first end is protruded out of the pen housing. The control module has a force sensing element, and an elastic force of the elastic member drives the second end of the pen core module to be abutted to the force sensing element seamlessly.

Abstract: Systems and methods are provided for advancing a fuselage section of an aircraft. One embodiment is a system that includes a series of plates configured to be sequentially affixed along a length of the fuselage section, and a track configured to form a frictional fit with the plates. The track includes drive units configured to form nips retaining the series of plates, and that are configured to advance the fuselage section along the track in a process direction, and indexing elements that are configured to engage with indexing elements at the plates during pauses between operation of the drive units. The system also includes tools configured to perform work on the fuselage section while the indexing elements of the track are engaged.

Abstract: A touch device, an electronic device and a driving method are provided. The touch device includes: a plurality of touch sensors arranged in an array; a plurality of touch lines connected to the plurality of touch sensors; and a controller connected to the plurality of touch lines, wherein the controller is configured to simultaneously send a plurality of first touch signals respectively to the plurality of touch sensors via the plurality of touch lines, and simultaneously receive via the plurality of touch lines a plurality of second touch signals generated by the plurality of touch sensors.

Abstract: A sensing device is provided. The sensing device includes a plurality of infrared thermosensitive elements and a plurality of resistor-capacitor (RC) oscillators. The plurality of infrared thermosensitive elements are arranged in an array. Each of the plurality of infrared thermosensitive elements has a resistance value which changes with a temperature of the infrared thermosensitive element by absorbing infrared radiation and generates a sensing voltage corresponding to the resistance value. The plurality of RC oscillators are coupled to the plurality of infrared thermosensitive elements to receive the corresponding sensing values, respectively. Each of the plurality of RC oscillators generates a digital sensing signal according to the corresponding sensing value to indicate the temperature of the corresponding infrared thermosensitive element. Each of the plurality of RC oscillators is disposed under the corresponding infrared thermosensitive element.

Abstract: The invention relates to an arrangement (10) for a vehicle (1) for detecting an activation action for activating a function on the vehicle (1), comprising: at least one sensor element (21) for sensing a change in a vicinity of the sensor element (21), a controlling arrangement (80) for an electric control of the sensor element (21) in order to provide a sensing signal (S), the frequencies of which comprise at least one predefined sensing frequency, an evaluation arrangement (90), which is interconnected to the sensor element (21) via a signal path (SP) in order to use the sensing signal (S) to repeatedly determine at least one parameter of the sensor element (21) specific to the sensing for detecting the activation action, a filter arrangement (40) in the signal path (SP) comprising at least one high-pass (41, 43) in order to at least reduce the frequencies of the sensing signal (S) lower than the at least one sensing frequency.

Abstract: In an embodiment a sensor arrangement includes a pressure sensor realized as a capacitive pressure sensor, a capacitance-to-digital converter coupled to the pressure sensor and implemented as a delta-sigma analog-to-digital converter and a reference voltage generator having a control input configured to receive a control signal and an output configured to provide a reference voltage, wherein the output of the reference voltage generator is connected to an input of the capacitance-to-digital converter, wherein the reference voltage generator is configured to set a value of the reference voltage as a function of the control signal, and wherein at least two different values of the reference voltage have the same sign and different amounts.

Abstract: A flexible sensor that includes a printed circuit board (PCB), a capacitive structure on the PCB, and mechanical coupling sites. The PCB includes a slot extending from an outer edge of the PCB to an inner portion of the PCB, and the slot defines a first edge and a second edge facing the first edge. The first and second edges are separated by a gap when the PCB is in an unflexed state. The slot is configured to permit the PCB to flex so as to vary a relative position of the first edge with respect to the second edge. The capacitive structure on the PCB includes a first edge electrode on a portion of the first edge of the PCB, and a second edge electrode on a portion of a second edge of PCB. The second edge electrode is aligned with the first edge electrode across the slot.

Abstract: A resonant rotor, for use in an inductive position sensor, includes a rotor core, a first rotor coil, and a rotor capacitor. The first rotor coil includes a first twisted rotor loop drawn about the rotor core and the rotor capacitor is connected in series with the first rotor coil. For a second embodiment, the first rotor coil includes a second twisted rotor loop. The first rotor coil has a first symmetry and the inductive position sensor includes a stator. An excitation coil is drawn on the stator and has a second symmetry. The first symmetry substantially corresponds to the second symmetry. A method for determining a position of an object using an inductive position sensor includes generating three electromagnetic fields using respective excitation coils, inducing voltages, respectively, in three receive coils, and determining based on voltages a position of an object coupled to a resonant rotor.

Abstract: Capacitive door handle sensor comprising at least one transmission electrode and a reception electrode, an operational amplifier configured as a charge amplifier and connected to the reception electrode, a switch for charge transfer, a first and a second switch for discharging the two operational amplifier inputs and, a capacitor arranged between the output and the inverting input of the operational amplifier, and a control unit for controlling and evaluating the measurement, wherein the control unit comprises a reference potential switching output which is connected to a terminal of the switch and is configured to selectively control a capacitance measurement between the transmission electrodes and the reception electrode or between the reception electrode and ground. Furthermore, methods for setting different operating modes are claimed.

Abstract: A sensor includes a semiconductor substrate, a detector disposed above the semiconductor substrate and configured to output a signal in accordance with a physical quantity, an electrostatic discharge protection circuit including a metal-oxide-semiconductor transistor, and a dummy pattern formed above the semiconductor substrate and formed of a same material as a material of a gate electrode, the gate electrode being included in the electrostatic discharge protection circuit.

Abstract: Provided is a strain sensor that includes a fixing section and a measurement section that is supported by the fixing section and can expand and contract. The strain sensor includes a base material that has a first main surface and a second main surface, which face each other, and a conductor section provided on the first main surface. The conductor section includes a detection conductor that is provided in the measurement section and that has a resistance value that changes in accordance with expansion and contraction of the base material in the measurement section. The measurement section includes a detection section in which the detection conductor is provided and a low-elastic-modulus section that increases a deformation amount with respect to an external force in the detection section.

Abstract: In described examples, each node between adjacent capacitive elements of a stack of series-coupled capacitive elements is biased during a reset mode, where each of the capacitive elements includes piezoelectric material. A strain-induced voltage is generated across each of the capacitive elements. Each of the strain-induced voltages is combined to generate a piezoelectric-responsive output signal during a sensing mode at a time different from the time of the reset mode.

Abstract: Apparatus for distance gauging in laser material processing includes a source of laser-radiation, an electrically-conductive focusing assembly, a constant-current source, and a voltmeter. The focusing assembly focuses laser-radiation towards an electrically conductive workpiece being processed. The focusing assembly and the workpiece form a capacitive sensor. The constant current source provides a constant electrical current to the focusing assembly for a constant time. The focusing assembly and the workpiece are separated by a distance that is proportional to a change in voltage measured on the focusing assembly during the constant time.

Abstract: A push button sheet and a touch panel having the push button sheet, by which different input results can be obtained, between when an operator touches the push button sheet and when the operator presses the same button sheet. The push button sheet has at least one convex reaction area configured to be bent in a predetermined press direction, a first electrode arranged on a convex surface of the reaction area, a second electrode arranged within the reaction area and below the first electrode with respect to the press direction and electrically connected to the first electrode, and a third electrode arranged within a second reaction area, wherein the second electrode and the third electrode are electrically communicated when the reaction area is bent.

Abstract: A method for producing an insulated electric wire includes a step of preparing a conductor having a linear shape; a step of forming an insulating coating so as to cover a surface on an outer peripheral side of the conductor to obtain an insulated electric wire that includes the conductor and the insulating coating covering the conductor; and a step of measuring a first electrostatic capacity between the insulated electric wire and a first electrode disposed outside in a radial direction of the insulated electric wire so as to face an outer peripheral surface of the insulated electric wire while transporting the insulated electric wire in a longitudinal direction of the conductor, and inspecting a formation state of the insulating coating, the formation state including a formation state of a defective portion in the insulating coating, on the basis of a change in the first electrostatic capacity.

Abstract: An example system drives one or more transmit signals on first electrodes disposed in a first layer and propagating electrodes disposed in a second layer. The system measures a capacitance of sensors through a of second electrodes. Each second electrode crosses each first electrode to provide a plurality of discrete sensor areas, each discrete sensor area associated with a difference crossing and including a portion of at least one propagating electrode. Each second electrode is galvanically isolated from the first electrodes and the propagating electrodes.

Abstract: A sensor pixel includes a sensor electrode, a first transistor including a gate electrode connected to the sensor electrode and which controls a current output provided to an output line, a second transistor connected to a first voltage line and a first transistor, a third transistor connected to the first transistor and the output line, and a compensator unit which compensates a threshold voltage of the first transistor.

Abstract: A submersible sensor comprising a fluid-tight shell, electrodes operatively coupled to the inner surface of the fluid-tight shell, and a processor disposed within the fluid-tight shell and operatively coupled to the electrodes. The processor is configured to detect capacitance changes at the electrodes, detect a first property of a first medium responsive to first detected capacitance changes of the detected capacitive changes, detect a second property of a second medium responsive to second detected capacitance changes of the detected capacitive changes, and activate one or more operational modes responsive to a difference between the first property and the second property.

Abstract: A pixel control circuit and control method, a pixel unit, a display substrate and device are provided. The pixel control circuit includes: a pressure detecting sub-circuit and a switching sub-circuit; the pressure detecting sub-circuit is connected to a control node, and configured to control a potential of the control node to be a first potential when a pressure signal is detected; and the switching sub-circuit is connected to a first power source terminal, a light-emitting sub-circuit in the pixel unit and the control node respectively, and configured to provide a first power source signal from the first power source terminal for the light-emitting sub-circuit when the potential of the control node is the first potential. The pixel control circuit effectively raises the speed of fingerprint detection.

Abstract: A chip substrate, a manufacturing method thereof, a gene sequencing chip, and a gene sequencing method. The chip substrate includes a base substrate; first electrode, located on the base substrate in an array; an insulating layer, located at gaps between two adjacent ones of the first electrodes, and partially covering the two adjacent ones of the first electrodes to form containing spaces being in one-to-one correspondence with the first electrodes; a capacitive dielectric layer, located on a side of the first electrodes away from the base substrate, and located in the containing spaces; and second electrodes, located on a side of the capacitive dielectric layer away from the base substrate, the capacitive dielectric layer includes a first region and a second region, an orthographic projection of the second electrodes on the base substrate is overlapped with an orthographic projection of the first region on the base substrate.

Abstract: Methods and apparatuses are provided wherein a sensor which comprises at least two electrodes and a movable part is alternately biased with at least two different voltages.

Abstract: A movement-sensitive capacitive sensor includes a first conductive element and a second conductive element positioned adjacent to the first conductive element. The sensor also includes a first protective insulator and a second protective insulator sealed to the first protective insulator with the first conductive element and the second conductive element positioned between the first protective insulator and the second protective insulator. The sensor further includes a circuit configured to calculate, over time while a person is occupying the movement-sensitive capacitive sensor and moving while occupying the movement-sensitive capacitive sensor, capacitance values between the first conductive element and the second conductive element.

Abstract: A device is provided for detecting and/or regulating an amplitude of an oscillation of an oscillatory body about an oscillation axis, wherein a change in a capacitance between at least one electrode of the oscillatory body and a stationary electrode takes place during the oscillation of the oscillatory body. The device comprises a detection circuit for detecting a signal representing a measure of the change in capacitance; and an evaluation circuit for determining information from the signal, wherein the evaluation circuit is designed to calculate the amplitude of the oscillation of the oscillatory body from the determined information and an ascertained period of the oscillation of the oscillatory body and/or to regulate the amplitude of the oscillation of the oscillatory body using the determined information and the ascertained period of the oscillation of the oscillatory body.

Abstract: A method and structure suitable for, e.g., improving high voltage breakdown reliability of a microelectronic device such as a capacitor usable for galvanic isolation of two circuits. A first dielectric layer has a first dielectric constant located over a semiconductor substrate. A metal structure located over the first dielectric layer has a side surface. A second dielectric layer having a second different dielectric constant is located adjacent the metal structure. A dielectric structure located between the side surface of the metal structure and the second dielectric layer has the first dielectric constant.

Abstract: Provided is a fingerprint identification panel comprising multiple first electrode strips, multiple second electrode strips, a scanning device, a sensing signal providing device and an identification device, wherein the first electrode strips and the second electrode strips are insulated from and intersected with each other; the scanning device is configured to provide driving signals to the plurality of first electrode strips in turn, the sensing signal providing device is configured to provide sensing signals to the second electrode strips, and a capacitor is formed between each first electrode strip and a second electrode strip adjacent thereto; the plurality of second electrode strips are connected with the identification device, and transmit signals that reflect quantities of the capacitors to the identification device, the identification device is configured to determine a morphology of a fingerprint based on the signals.

Abstract: A metal nanowire according to an embodiment of the invention includes at least one bent portion. An angle (?) between an n-th wire portion and an (n+1)-th wire portion connected to the n-th wire portion through an n-th bent portion satisfies an inequation of 0°<?<180°.

Abstract: The invention relates to a shift operating element, specifically for a motor vehicle, having an actuation surface which can be moved by the manual application of force by means of an element, wherein the element is specifically the finger of a human hand. The shift operating element comprises a sensor which interacts with the actuation surface such that the sensor, upon the movement of the actuation surface by means of the element, generates a signal. The signal is specifically employed to shift and/or trigger a function, in the manner of a shift signal. A mechanical damping and/or restoring element is provided which interacts with the actuation surface upon the movement thereof. The mechanical damping and/or restoring element is a constituent of the sensor, specifically the mechanical damping and/or restoring element is integrated into the sensor.

Abstract: An input sensing unit including a plurality of capacitive sensing electrodes, and a conductive layer disposed on at least a portion of the sensing electrodes, in which the conductive layer overlaps at least a portion of the sensing electrodes in a plan view, and the conductive layer includes a plurality of conductive patterns spaced apart from each other.

Abstract: According to a first aspect of the present disclosure, a fingerprint processing system is provided, which comprises: a set of sensor plates; a measurement unit configured to measure one or more capacitances on the sensor plates; a processing unit configured to process the measured capacitances; wherein the measurement unit is configured to concurrently measure capacitances on subsets of the set of sensor plates; wherein the processing unit is configured to process the concurrently measured capacitances. According to a second aspect of the present disclosure, a corresponding method of processing a fingerprint in a fingerprint processing system is conceived. According to a third aspect of the present disclosure, a corresponding computer program is provided.

Abstract: An electrostatic encoder (40) detects the rotation angle of a rotor (42) with great accuracy based on the change in the capacitance between electrodes arranged on a stator (41) and the rotor (42). Detection electrodes (44a to 44d) and transmission electrodes (45a to 45d) are arranged circumferentially and alternately on the stator (41). Detection signals (phase A, phase B) amplitude-modulated based on the rotation of the rotor (42) and having a mutual phase difference of 90 degrees are output from adjacent ones of the detection electrodes. Modulated signals (V1, V2) are generated by demodulating the detection signals having a mutual phase difference of 90 degrees. Applying resolver-digital (RD) conversion processing to the modulated signals allows obtaining the rotation angle of the rotor.

Abstract: A touch input device may be provided that includes: a cover; a display module disposed under the cover; and a pressure sensing unit disposed under the display module. The pressure sensing unit includes a first elastic foam, a pressure sensor disposed on the first elastic foam, and a first adhesive layer disposed between the first elastic foam and the pressure sensor. A change amount of a stress of the first elastic foam required for the first elastic foam to be compressed to half of the thickness thereof from its original state is less than the change amount of the stress of the first elastic foam required for the first elastic foam to be compressed from half of the thickness thereof to the thickness to which the first elastic foam is able to be maximally compressed.

Abstract: A force sensor comprises a first substrate, a second substrate, a third substrate, and a package body. The first substrate includes a fixed electrode, at least one first conductive contact, and at least one second conductive contact. The second substrate is disposed on the first substrate and electrically connected to the first conductive contact of the first substrate. The second substrate includes a micro-electro-mechanical system (MEMS) element corresponding to the fixed electrode. The third substrate is disposed on the second substrate and includes a pillar connected to the MEMS element. The package body covers the third substrate. The foregoing force sensor has better reliability.

Abstract: The double layer capacitance of a working electrode of a sensor may be measured with minimal disruption to the sensor equilibrium by open circuiting the working electrode and measuring the voltage drift on a periodic, or as-needed, basis. The values of the double layer capacitance may be monitored over time to determine, e.g., sensor age and condition.

Abstract: Improved driven shield electrodes used with capacitance sensors are described in this application. Typical capacitance sensors suffer from parasitic capacitance that can make proximity sensing difficult. The driven shield described herein is divided into multiple portions and an increased drive voltage is applied to at least one of these portions. This increase voltage enhances the electric field of the capacitance sensor and increases the proximity sensitivity. Other embodiments are described.

Abstract: A physical quantity sensor includes a stationary electrode, an X-axis displaceable movable member, and a movable electrode. The stationary electrode includes first and second movable electrodes arranged side by side along the Y-axis direction. The first and second stationary electrodes respectively include first and second stationary electrode fingers extending from first and second trunks in the ±Y-axis directions. The movable electrode includes first and second movable electrodes arranged side by side in the Y-axis direction. The first and second movable electrodes respectively include first and second movable electrode fingers located on both sides in the Y-axis direction of the first and second trunks, and opposed to the first and second stationary electrode fingers.

Abstract: A physical quantity sensor includes a base substrate, a movable portion that is oscillatably provided around an axis while facing the base substrate and that is divided into a first movable portion and a second movable portion, a first fixed electrode that is disposed on the base substrate facing the first movable portion, and a second fixed electrode that is disposed on the base substrate facing the second movable portion. The first fixed electrode and the second fixed electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first fixed electrode, and a second fringe capacitance, which is between the second movable portion and the second fixed electrode.