Abstract: An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies a first numeric signal and a second numeric signal that are correlated to the analog quantity; and a first feedback control circuit for controlling the micro-electromechanical sensor, which supplies an electrical actuation quantity correlated to the second numeric signal.

Abstract: A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and ridge valleys of a fingerprint on a swiped finger. The rate sensor senses the speed of the finger as it is swiped across the image sensor. The sensor circuit supplies image drive signals to the image sensor and detects image signals in response to the drive signals. The sensor circuit supplies rate drive signals to the rate sensor and detects rate signals in response to the rate drive signals. The sensor circuit further coordinates the image signals and the rate signals to provide a fingerprint image. The image sensor may be configured as an image pickup plate and multiple image drive plates formed on a substrate, such as a flexible printed circuit board or other flexible substrate which may conform to the shape of the finger.

Abstract: A simple and robust variable coaxial capacitive sensor and detection method for monitoring the position of a rapidly reciprocating member such as a piston or displacer in a free piston Stirling engine. The coaxial capacitor of the present invention in a preferred embodiment thereof is configured to modulate capacitive electrode area rather than inter-electrode spacing and as a result a highly linear transfer function can be achieved. Also disclosed are detection methods which derive and process signals in connection with applications which have small sensor capacitance variations while suppressing stray capacitance error.

Abstract: A micro-electro mechanical system (MEMS) variable capacitor (varactor) generally includes a substrate (102), a first capacitive plate (112) formed on the substrate, a flexible structure (150) coupled to the substrate, a second capacitive plate (116) and a first electrode (122) formed on the flexible structure; a package seal (104) coupled to the substrate and having a second electrode (106) formed thereon, wherein the distance between the first capacitive plate and the second capacitive plate (and hence, the capacitance of the structure) is responsive to a bias voltage applied to the electrodes.

Abstract: The present invention provides an inspection apparatus and an inspection method, capable of, when supplying an inspection signal to a circuit wiring, eliminating any need for a pin to be brought into contact with the circuit wiring and detecting any defects including an invisible microscopic defect. An inspection apparatus A for inspecting a circuit wiring of a circuit board 100 comprises a conductive member 1 adapted to be disposed on the side of one of surfaces of the circuit board 100 and to be supplied with an inspection signal, a signal source 2 for supplying the inspection signal to the conductive member 1, a sensor unit 3 including a plurality of cells 3a to be disposed the opposed to the conductive member 1 on the side of the other surface of the circuit board 100, and a computer 5 for acquiring each signal appearing at the cells 3a in response to the inspection signal supplied to the conductive member 1.

Abstract: The invention relates to a device for detecting the position of a rotor relative to a stator, wherein at least one electrode is arranged on the rotor and at least one electrode is arranged on the stator, such that the electrodes at least partially overlap in at least one rotational position of the rotor relative to the stator, and encompasses a method for measuring the rotational position of a rotor including at least one rotor electrode relative to a stator including at least one stator electrode, wherein the rotational position is detected using a capacitive coupling between the rotor electrode and the stator electrode.

Abstract: The movable apparatus of a positioning device comprising a conductive stationary part and a conductive movable part, the stationary part has an electrode constituting a capacitor together with said movable part, and the electrode is covered by a guard electrode insulated from the stationary part, whereby a triaxial structure is formed around these electrodes.

Abstract: Aspects of the invention can provide a fingerprint sensor with high sensing precision. The fingerprint sensor according to the invention can include capacitance detection circuits that output detection signals, which each correspond to a capacitance formed between a subject surface and the fingerprint sensor, to signal transmitting paths, and an amplification circuit that amplifies the detection signals outputted to the signal transmitting paths. The individual signal transmitting paths can be respectively connected to at least two capacitance detection circuits and the fingerprint sensor further includes a resetting means that resets the potential of the signal transmitting paths before the detection signals are outputted from the capacitance detection circuits to the signal transmitting paths.

Abstract: Capacitance element electrodes (E1 to E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that is Z-axially displaced in accordance with a Z-axial movement of a detective member (30) externally operated, is disposed so as to be opposed to the above electrodes (E0 to E5). The displacement electrode (40) cooperates with the reference electrode (E0) and the capacitance element electrodes (E1 to E5) to form capacitance elements (C0 to C5), respectively. Each of the capacitance elements (C1 to C5) is connected to the capacitance element (C0) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C1 to C5) when the detective member (30) is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member (30) is detected.

Abstract: A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

Abstract: A capacitive sensor includes: a first sensing electrode connected to a first reference capacitor in which is stored reference electric charge; a second sensing electrode connected to a second reference capacitor in which is stored reference electric charge; and a shield electrode to which is applied electric potential equal to that of the first sensing electrode and the second sensing electrode. The first sensing electrode positions adjacent to a detecting surface of the capacitive sensor, and the second sensing electrode positions opposite to the detecting surface in such a manner that the first and second sensing electrodes are spaced apart and facing to each other. The shield electrode is configured to partly expose the first and second sensing electrodes on the side of the detecting surface, and the shield electrode extends toward the detecting surface beyond the first sensing electrode.

Abstract: A combined passive and active object sensing system (30; 50; 70) employing electric field sensing is described. An electric field sensing transmission electrode (2) generates a first electric field (11, 12, 13) that induces a current in an electric field sensing reception electrode (4). A passive object (10) is sensed from variation in this current. An active object (31; 51; 71) comprises a further electric field sensing transmission electrode (33; 53; 73) and generates a second electric field (35, 36, 37; 55, 56, 57; 75, 76, 77). This may be generated by the active object (31) coupling with and applying a phase shift to the first electric field (11, 12, 13). Alternatively the second electric field (55, 56, 57) may be generated at a different frequency to the first electric field (11, 12, 13). Alternatively the second electric field (75, 76, 77) may be generated by the active object (71) coupling with an alternating magnetic field generated by a coil (172).

Abstract: A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and ridge valleys of a fingerprint on a swiped finger. The rate sensor senses the speed of the finger as it is swiped across the image sensor. The sensor circuit supplies image drive signals to the image sensor and detects image signals in response to the drive signals. The sensor circuit supplies rate drive signals to the rate sensor and detects rate signals in response to the rate drive signals. The sensor circuit further coordinates the image signals and the rate signals to provide a fingerprint image. The image sensor may be configured as an image pickup plate and multiple image drive plates formed on a substrate, such as a flexible printed circuit board or other flexible substrate which may conform to the shape of the finger.

Abstract: An electrostatic capacitance sensing device of exemplary embodiments of the present invention include M number of row lines, N number of column lines that are arranged in a matrix of M rows and N columns, N number of path gates for output signal, and electrostatic capacitance sensing elements provided at the intersections between the row and column lines. The electrostatic capacitance sensing element includes a signal sensing element, a signal amplifying element, a column selection element, and a row selection element. The signal sensing element includes a capacitance sensing electrode and a capacitance sensing dielectric film. The path gate for output signal, the signal amplifying element, the column selection element, and the row selection element are made up of thin-film semiconductor devices.

Abstract: A method for enhancing the linearity of a differential capacitive sensor as a function of beam displacement. An ac-modulated feedback connection from a sensor output terminal to a movable beam electrode is provided through a fix-up capacitor. The output terminal signal is inverted in the feedback connection so that the fix-up capacitor reduces the capacitance from the fixed electrodes to the beam electrode. When the fix-up capacitor value is chosen approximately equal to the fixed capacitance of the differential capacitor, the feedback circuit compensates for the effect of this fixed capacitance. The linearity of the output as a function of the displacement of the beam is improved. Thus, the signal-to-noise ratio of devices such as accelerometers may be increased by allowing sensors to employ a large displacement range. The invention may be used in differential accelerometers and in other types of differential capacitive sensors.

Abstract: A method and apparatus for processing anomalous trigger event conditions to provide anomalous trigger event rate measurements. The apparatus operates to identify one or more trigger events in at least one input signal IN, determine the number of events during a period of time (e.g. events per second) and provide a visual representation of this determination to a user via a display device. The visual representation may comprise an alphanumeric display, a waveform, a graphic image proximate a waveform and the like.

Abstract: A biometric sensing device includes sensing arrays for sensing a biological surface swiped across the sensing arrays in an arbitrary direction. This device allows for simultaneously sensing different features of a biological surface where the features have the smallest distinguishable features of different size. Using the technique of interleaving partial images, the resolution of the biometric sensing device is increased. Therefore, a small and robust biometric sensing device is provided, which allows for sensing high resolution images.

Abstract: A thickness detecting sensor can widely set a dynamic range for detecting the thickness of a medium, and exactly detect the thickness of the medium even when the dynamic range is widely set in this way. Therefore, the thickness detecting sensor has a fixing electrode and a movable electrode arranged so as to be opposed to each other, a plunger for changing the gap between the electrodes by coming in contact with the medium, and a CR oscillating circuit and an FV converting circuit for converting electrostatic capacity stored between the electrodes into an electric signal for detecting the thickness of the medium. The rear end portion of the plunger comes in contact with the electrode face of the gap side of the movable electrode. The movable electrode is displaced in the direction separated from the fixing electrode correspondingly to the thickness of the medium.

Abstract: A water supply for sanitary devices has a sensor, is activatable without contact, has a first capacitor with first and second conductive layers and a dielectric layer positioned there-between. A second capacitor having a first and second electrically conductive layers and a dielectric layer there-between. An AC voltage generator is electrically connected to the second layer of the first capacitor for coupling an AC voltage. The supply has a sensor amplifier for amplifying an output signal and the first layer is shared by the capacitors and has a shared absorption area. Upon approach or contact of an object or a liquid, an additional capacitor is formed whose effective capacitance experiences a detectable change that is tapped at the second layer.

Abstract: A capacitive sensor is disclosed that includes a variable capacitor transducer that varies its capacitance with changes in an environmental parameter. The present invention is adapted to measure any linear parameter such as pressure, force, or distance. The sensor of the present invention is compact, inexpensive to make, and easily fabricated using commonly available components. Furthermore, it is not susceptible to errors caused by vibration, acceleration, and its orientation to the earth's gravitational field. The output of the capacitive sensor does not substantially drift with changes in temperature.

Abstract: A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

Abstract: A method and a device for evaluating the deformations or forces to which a structure having an elastomeric body (2) is subjected. The device includes a dipole (6), the dielectric (3) of which is formed by the elastomeric body, and an electronic analyzing circuit sensitive to a variation of a capacitive characteristic of the dipole caused by the deformations of the elastomeric body. In particular, but not exclusively, the invention relates to a device for evaluating the forces to which a pneumatic tire is subjected when rolling, as it passes through the contact area. The invention applies similarly in other structures having an elastomeric body, such as, for example, the elastomeric joints intended for the chassis system of vehicles.

Abstract: In a capacitance type sensor of the present invention, a capacitance element is constituted between a displacement electrode and a capacitance element electrode. A return-switch movable electrode is arranged above and spaced from the displacement electrode, to be placed in contact with the displaying electrode due to a displacement of a direction button. When the direction button is operated, the return-switch movable electrode is first displaced into contact with the displacement electrode. Then, the both make a displacement while keeping a contact state. When the displacement electrode is displaced to change the spacing to the capacitance element electrode, changed is the capacitance value of the capacitance element. Based on this change, a force is recognized. Herein, in the course of a transit from a state the displacement electrode and the return-switch electrode are not in contact to a state of their contact, the output signal varies necessarily beyond a threshold voltage.

Abstract: A robot arm for industrial robots comprises one or several jointed arms (1,1c) that are mutually connected to each other by means of rotary joints (1a, 1b), and a jointed arm (1) connected to a base (3), in which an angle transducer is arranged in the rotary joints (1a,1b) in order to measure exactly the angular relationship between the jointed arms (1,1c) or between the jointed arm (1) and the base (3), in order to make possible adjustment of the robot arm into the desired angular position.

Abstract: The circuit configuration includes a measuring capacitor having a variable capacitance, which is set by means of a physical measured quantity to be detected, a reference capacitor and a buffer amplifier. An input of the buffer amplifier is at least temporarily coupled to the measuring capacitor such that an output of the buffer amplifier supplies a signal voltage essentially proportional to a measurement voltage occurring on the measuring capacitor. At the beginning of each measuring cycle, the measuring capacitor is discharged to a predetermined residual charge, whereas the reference capacitor is charged to a predetermined reference charge. Afterwards, the reference charge is transferred as completely as possible from the reference capacitor to the measuring capacitor. To this end, the input and output of the buffer amplifier are temporarily coupled to one another via the first reference capacitor during operation.

Abstract: Methods and apparatus for varying and measuring the position of a micromachined electrostatic actuator using a pulse width modulated (PWM) pulse train are disclosed. One or more voltage pulses are applied to the actuator. In each of the pulses, a voltage changes from a first state to a second state and remains in the second state for a time tpulse before returning to the first state. The position of the actuator may be varied by varying the time ?tpulse. A position of the actuator may be determined by measuring a capacitance of the actuator when the voltage changes state, whether the time t is varied or not. An apparatus for varying the position of a MEMS device may include a pulse width modulation generator coupled to the MEMS device an integrator coupled to the MEMS device and an analog-to-digital converter coupled to the integrator. The integrator may measure a charge transferred during a transition of a pulse from the pulse generator.

Abstract: A movable switch electrode (E21) which is contactable with a capacitance element electrode (E1) formed on a substrate (20) and is spaced apart from a fixed switch electrode (E11) formed in an interior of the capacitance element electrode (E1) and having a domed form to cover the fixed switch electrode (E11) is set in place. When a detective member (30) is operated and a force applied from a displacement electrode (40) to the movable switch electrode (E21) reaches a specified value, the movable switch electrode (E21) is elastically deformed and depressed drastically with buckling at the nearly top portion thereof and is brought into contact with the fixed switch electrode (E11). This brings the switch into the ON-state. At this time, an operator is given a pronounced click feeling.

Abstract: A detection system for detecting a dangerous condition for an operator using a power tool of the type which has an exposed blade relative to a work surface and a protection system for minimizing, if not eliminating the possibility of a user being injured by contacting the blade. In one preferred embodiment of the present invention, a proximity detection system is capable of detecting the presence of a user near the blade of a table saw and a protection system that can either retract the blade below the work surface of the table saw or terminate the drive torque to the blade which can result in rapid stopping of the saw blade by a work piece that is being cut.

Abstract: A capacitance acceleration derivative detector includes a housing, and a first plate fixed within the housing. A second plate is also fixed within the housing and spaced apart from and in parallel relation to the first plate. A flexure plate is disposed between and in substantially parallel relation to the first and second plates. The flexure plate is coupled to the housing along at least an edge. The flexure plate and first plate define a first distance and the flexure plate and the second plate define a second distance. The first and second distances vary in response to acceleration forces acting upon the flexure plate. The flexure plate and the first fixed plate generate a first charge displacement capacitance signal, and the second fixed plate and the flexure plate generate a second charge displacement capacitance signal.

Abstract: A capacitive fingerprint sensor against ESD damage and contamination interference includes a substrate, a plurality of plate electrodes, a metal mesh, a plurality of ESD units, a plurality of bonding pads, and a protection layer. The plate electrodes, bonding pads and metal mesh are positioned on the substrate at the same level, and are composed of the same material. The ESD units are connected to the metal mesh that is conducted to the ground, and are exposed via a plurality of first openings. Thus, electrostatic charges from a finger may be discharged through this path to the ground. The metal mesh is covered by the protection layer and is not exposed. The number of the ESD units is far less than that of the plate electrodes so as to reduce the contamination interference on the captured fingerprint image.

Abstract: A capacitance element electrode is formed on a first surface of FPC, and a displacement electrode is formed on a second surface of the FPC. The FPC is folded at its connecting portion in such a manner that the first surface and the second surface are opposite to each other, whereby a capacitance element is formed between the capacitance element electrode and the displacement electrode.

Abstract: A sensor unit having capacitance element electrodes and a displacement electrode being opposite thereto is disposed on a substrate. A detective button is supported onto the substrate in such a manner that the detective button is positioned above the sensor unit to define a specified space between the supporting member for supporting the detective button and the displacement electrode.

Abstract: A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

Abstract: A capacitance position sensor includes a pair of opposed tabular electrodes, an LC oscillator circuit having a toroidal core winding and whose oscillating frequency varies with change in capacitance between the pair of electrodes, and an arithmetic processing unit for calculating an absolute value of a distance between the electrodes from the oscillating frequency of the oscillator circuit. A position controller includes a stationary member formed with one electrode of the pair of electrodes of the position sensor, a movable member on which the other electrode of the pair of electrodes is formed, and moving device for moving the movable member relative to the stationary member.

Abstract: Method for detecting movements through a micro-electric-mechanical sensor, having a fixed body and a moving mass, forming at least one first and one second detection capacitor, connected to a common node and to a first, respectively a second detection node and having a common detection capacitance at rest and a capacitive unbalance in case of a movement. The method includes the steps of: feeding the common node with a constant detection voltage of predetermined duration; generating a feedback voltage to maintain the first and the second detection node at a constant common mode voltage; generating a compensation electric quantity, inversely proportional to the common detection capacitance at least in one predetermined range; supplying the compensating electric quantity to the common node; and detecting an output quantity related to the capacitive unbalance.

Abstract: A sensor for detecting changes in the dielectric constant of a liquid is described. The sensor has two electrodes immersed in the liquid with dielectric surfaces substantially parallel with each other, and a ramp disposed on a support between the electrodes. The ramp intersects the surfaces at obtuse and acute angles respectively and provides a surface disposed at an angle relative to an electric field extending between the two electrodes, thereby reducing parasitic effects of the sensed dielectric content of the liquid. Slots in the electrode adjacent the lower end of the ramp reduce the strength of the field proximate to the ramp and thereby further reduce the parasitic effects.

Abstract: A capacitance element electrode (E1) and a reference electrode (E31) are formed on a substrate (20) so as to be opposite to a displacement electrode (40). A dome-shaped movable switch electrode (E21) is disposed so as to be in contact with the reference electrode (E31) and at a distance from a fixed switch electrode (E11) formed inside the reference electrode (E31), and to cover the fixed switch electrode (E11). When an operation is applied to a detective member (30) and a portion of the movable switch electrode (E21) in the vicinity of its top is displaced to be brought into contact with fixed switch electrode (E11), a switch is turned ON. On the other hand, from a change in capacitance value of a capacitance element (C1) formed between the displacement electrode (40) and the capacitance element electrode (E1), the intensity of the force to the detective member (30) can be recognized.

Abstract: Each pixel of an array has a subarray of upper capacitor plates located just beneath a sensing surface. The upper plates may be square and laid out in an equal number of rows and columns. Each upper plate can be selectively electrically connected to one of two lower capacitor plates according to the state of a memory cell, such as an SRAM memory cell, associated with each upper plate. The upper plate/lower plate interconnections can be configured in predetermined different patterns of the upper plates in successive sensing operations to improve the accuracy of capacitively sensing of an object, such as a human fingerprint, applied to the sensing surface above the pixel array.

Abstract: A capacitive sensor is disclosed that includes a variable capacitor transducer that varies its capacitance with changes in an environmental parameter. The present invention is adapted to measure any linear parameter such as pressure, force, or distance. The sensor the present invention is compact, inexpensive to make, and easily fabricated using commonly available components. Furthermore, it is not susceptible to errors caused by vibration, acceleration, and its orientation to the earth's gravitational field. The output of the capacitive sensor does not substantially drift with changes in temperature.

Abstract: A detector, for determining presence, number, length concentration, position and/or motion of at least one particle present in a fluid and having a dielectric coefficient other than a dielectric coefficient of the fluid, the detector including: (a) a capacitor, comprising a first conductive plate and a second conductive plate defining an inter-plate volume having a longitudinal axis; and (b) at least two electrical contacts, connecting each of the first and second conductive plates to a capacitance measuring device; the capacitor being characterized by at least one variable parameter so as to allow determination and/or monitoring of presence, number, length concentration, position and/or at least one motion characteristic of the at least one particle placed within the inter-plate volume of the capacitor.

Abstract: An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change according to movement of the dielectric mass in the fringe electrical field. This measuring principle is verified by FEM simulation. The simple structure of the accelerometer device allows the polymer Parylene to be used as the proof mass, greatly simplifying the technology by requiring only surface micromachining. Prototype accelerometers are fabricated and calibrated with the aid of off-chip capacitive readout IC.

Abstract: A capacitive fingerprint sensor against ESD damage and contamination interference includes a substrate, a plurality of plate electrodes, a metal mesh, a plurality of ESD units, a plurality of bonding pads, and a protection layer. The plate electrodes, bonding pads and metal mesh are positioned on the substrate at the same level, and are composed of the same material. The ESD units are connected to the metal mesh that is conducted to the ground, and are exposed via a plurality of first openings. Thus, electrostatic charges from a finger may be discharged through this path to the ground. The metal mesh is covered by the protection layer and is not exposed. The number of the ESD units is far less than that of the plate electrodes so as to reduce the contamination interference on the captured fingerprint image.

Abstract: First and second predetermined charging voltages are applied between the movable and fixed electrodes of a capacitive type of sensor to measure first and second capacitances between the movable and fixed electrodes, respectively. The first and second electrostatic capacitances are compared to obtain a characteristic of the sensor from a result of comparison. In measuring the first and second capacitances, first and second charging voltages are generated of which magnitudes are determined in accordance with the first and second capacitances, respectively. Equalization is made between the first output voltage when the first charging voltage is applied between the movable and fixed electrodes in a predetermined normal condition of the movable electrode and the second output voltage outputted when the second charging voltage is applied between the movable and fixed electrodes in the predetermined normal condition.

Abstract: A meter for measuring the root-mean-squared potential of an AC signal characterized by a frequency f is disclosed. The meter includes first and second capacitors. The AC signal is applied to the first capacitor, which includes first and second plates separated by a distance that depends on the root-mean-squared potential of the AC signal, but not on changes in the AC signal that occur over a time of 1/f. The second capacitor has first and second plates separated by a distance that depends on the separation of the first and second plates in the first capacitor. A detection circuit measures the capacitance of the second capacitor. The first plate of the first capacitor is preferably connected to the first plate of the second capacitor by a non-conducting mechanical link.

Abstract: A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed electrode supported on the substrate. The beam is movable in a vertical direction of the substrate so that the physical quantity in the vertical direction is detectable. The sensor can be minimized, and has excellent output characteristics. Further, a manufacturing cost of the sensor is small.

Abstract: An apparatus for testing a dielectric property of a material constituting the interlayer dielectric of a flash memory device is formed by a layer (122) of the dielectric material disposed throughout a test structure (200) representative of the flash memory device and a plurality of conductors (117A, 117B, 117C) disposed within that layer (122) or a pair of planar conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509) deposited such that the conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509) are substantially parallel to each other and the layer (122) of dielectric material is disposed throughout a test structure (400, 500) so as to separate the conductors (402, 404; 502, 503; 504, 505; 506, 507; 508, 509), the test structure (400, 500) functioning as a capacitor. The apparatus may also test a conductive property of a material constituting the conducting lines of a flash memory device by disposing a conductor (801, 901) through the dielectric material (122).

Abstract: A bridge accelerometer system includes four capacitors, wherein two capacitors are formed on each side of a rigid member. The other two capacitors are similarly constructed, except that the rigid member is replaced by a flexured plate. The construction of the plates with respect to the flexured plate is substantially similar to the configuration formed by the rigid member and the other two capacitors, and the fixed capacitors and rigid plate are isolated from the flexured arrangement. The four capacitors are connected to form a bridge generating a bridge voltage signal. The bridge voltage signal is signal processed to generate a digital word. The digital word is linearized and filtered and received in computer for attitude adjustment and velocity control.

Abstract: A proximity switch which operates according to an inductive or capacitive action principle and contains a LC tuned circuit and a dynamically connected amplifier, and in which the approach of a suitable influencing element or article changes at least one oscillation parameter, the operating state of the amplifier being changed when the article does not reach a certain distance to the tuned circuit, the oscillation not however being interrupted with reaching the operating point. The proximity switch (1), likewise contains display elements (5) which are able to signal the presence of influence on the tuned circuit before the operating point or value of the amplifier is reached.

Abstract: The invention relates to a capacitive magnetic field sensor. This sensor has a first electrode (2) and a second electrode (3), which are spaced apart from one another and which form a measurement capacitance. The first electrode (2) is situated on a first substrate body (4), and the second electrode (3) on a second substrate body (5). The second substrate body (5) is designed as a deformable membrane in the vicinity of the second electrode (3). A magnetic body (6) is situated in the vicinity of the second electrode (3) and the membrane, and is rigidly connected to the membrane and to the second electrode (3). As a result of this rigid connection, the influence of an external magnetic field on the magnetic body causes not only the magnetic body (6) to change its position but also causes the membrane and the second electrode (3) to change their position, since they are rigidly connected to said magnetic body.

Abstract: A surface-pressure distribution sensor includes a plurality of unit detection elements placed in a sensor area of a substrate and a switch formed on the substrate. The sensor is configure to operate under an operation mode in which the unit detection elements are sequentially selected or a standby mode in which the unit detection elements are not selected. The sensor is also configured to alternate between the two modes. The switch is configured change the standby mode to the operation mode when the switch is operated on.