Abstract: A method for interfacing with a capacitive touch screen is disclosed. The method includes charging an internal capacitor in the touch screen, which internal capacitor is disposed proximate a fixed location on the touch screen and is capable of changing in response to a touch at the specific location. After charging, the charge on the internal capacitor is transferred from the touch screen and the value of the charge on the internal capacitor then determined.

Abstract: A capacitance sensing system may include a current conveyor circuit coupled to receive induced current from a capacitance sensing structure at a low impedance current input port; and a comparator having an input coupled to a high impedance output port of the current conveyor circuit, and an output coupled to the current conveyor circuit by a feedback path and coupled to drive the capacitance sensing structure to generate the induced current.

Abstract: In a capacitive sensing device for detecting a change in capacitance of an electrode which is caused by contact with a human body, the improvement of determination speed may be enabled. M (m is an integer satisfying n?m?2) electrodes are selected from n (n is an integer equal to or larger than two) electrodes. Capacitors connected to the m electrodes are discharged in parallel during a predetermined period, and then charged. During the charging period, a potential of each of the m electrodes is compared with a reference potential. A difference between capacitance values of the capacitors connected to the m electrodes is determined based on a result obtained by the comparison between the m electrodes.

Abstract: A technique for recognizing and rejecting false activation events related to a capacitance sense interface includes measuring a capacitance value of a capacitance sense element. The measured capacitance value is analyzed to determine a baseline capacitance value for the capacitance sensor. The capacitance sense interface monitors a rate of change of the measured capacitance values and rejects an activation of the capacitance sense element as a non-touch event when the rate of change of the measured capacitance values have a magnitude greater than a threshold level, indicative of a maximum rate of change of a touch event.

Abstract: An apparatus, system and method for automatically tuning a capacitance sensor based on comparisons of measured capacitance values to expected values and ranges of values is described. Measured capacitance is converted to a digital value with a capacitance to digital converter. The digital value is use to adjust the range, resolution, baseline offset and thresholds of the capacitance sensor according to logic executed by a controller and stored in programs in a memory.

Abstract: Disclosed herein is a position detection apparatus including: a sensor section having a plurality of detection electrodes laid out on a detection surface; a select section configured to select one or more detection electrodes from the detection electrodes; an oscillation section having an oscillation frequency determined by a capacitance generated in the one or more detection electrodes selected by the select section; a conversion section configured to output an output signal representing the frequency of an oscillation signal generated by the oscillation section; and a control section configured to change the frequency of the oscillation signal generated by the oscillation section in accordance with the output signal output by the conversion section.

Abstract: In a method of adjusting an electrostatic occupant detecting apparatus, a first group of load circuits is coupled with a sensor property measuring device, an AC voltage signal is applied from a signal source to the first group of load circuits, and a potential difference generating at a resistor of the sensor property measuring device is stored as a first measured value. A second group of load circuits having a load higher than the first group is coupled with the sensor property measuring device, the AC voltage signal is applied from the signal source to the second group of load circuits, and a potential difference generating at the resistor is stored as a second measured value. A measured sensitivity is calculated from the first measured value and the second measured value, and a sensitivity adjusting value is calculated from the measured sensitivity and an ideal sensitivity.

Abstract: This invention is concerned with a method for measuring the canopy rehydration pulse during the period of water application. During the rehydration process water leaks from the trunk xylem tubes into the sapwood extraxyllary region. A water content sensor in this region monitors the magnitude and timing of this leakage water thereby giving a measure of the magnitude and timing of the upward flow of water. The rehydration pulse is quantified by a sequence of measurements of sapwood water content: an initial measurement of water content just prior to water application, then measurement of water content during water application. The difference between the values obtained in the two measurements yields a measure of the leakage water in the extraxyllary region and, in turn, the magnitude and timing of the rehydration pulse. Determination of the onset and termination of the rehydration pulse is used to optimize the duration of water application.

Abstract: A headrest position adjusting device 100 includes a distance measuring device 10 and a drive motor unit 30, and the distance measuring device 10 includes a plurality of sensing electrodes 11 to 15 and a detecting circuit 20. The detecting circuit 20 includes a plurality of capacitance sensing circuits 21 to 25 connected one-to-one to the sensing electrodes 11 to 15 and an arithmetic processing circuit 28, and the drive motor unit 30 includes a motor driving circuit and a drive motor. Based on the detected capacitance values, the detecting circuit 20 calculates a distance calculation angle ? formed by points representing the positions and output values of the sensing electrodes 15 and 11 located at the highest and lowest positions and a point representing the position and output value of the largest output value, and thereby measures an electrode-head distance L. A position adjusting operation for a headrest 43 is performed based on the measurement result.

Abstract: A capacitive touch panel can select a way of voltage control with a high degree of detection accuracy according to operating environment. In response to approach of an input unit, the stray capacitance of the sensing electrode the input unit approached increases. Accordingly, charge and discharge of the stray capacitances of a plurality of sensing electrodes are controlled, and a sensing electrode the potential change of which is made slow by the increase in stray capacitance and resultant increase in time constant is detected as a sensing electrode the input unit approached. The stray capacitance of a sensing electrode can selectively be controlled either by the charge control or by the discharge control, and optimum one of the controls is selected according to operating environment.

Abstract: A method for counting and validating discrete articles to be introduced into containers, and an apparatus for actuating the method, which method includes distancing the articles from one another in a thinning-out section, and making the articles cross a detection zone such as to induce a consequent reactance variation in at least a variable reactance sensor. According to a reactance variation, an output signal of the variable reactance sensor takes on a specific waveform, the output signal being sent to an input of a processing unit. The processing unit provides in output data relating to a number of the articles which have passed through the at least a detection zone, a wholeness thereof as well as a passage of objects of a different nature from the articles into the detection zone.

Abstract: A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit to drive the first through fourth oscillators so as to oscillate the first and second oscillators in opposite phase, and the third and fourth oscillators in opposite phase, and so as to oscillate the first and second unit in opposite phase; and a detection unit configured to detect displacements of the first through fourth oscillators in the detecting direction, wherein an acceleration, angular rate, angular acceleration and centrifugal force are independently detected by canceling unnecessary inertial force components from the displacements of the first through fourth oscillators.

Abstract: The invention provides testing of a chemically-sensitive transistor device, such as an ISFET device, without exposing the device to liquids. In one embodiment, the invention performs a first test to calculate a resistance of the transistor. Based on the resistance, the invention performs a second test to transition the testing transistor among a plurality of modes. Based on corresponding measurements, a floating gate voltage is then calculated with little or no circuitry overhead. In another embodiment, the parasitic capacitance of at least either the source or drain is used to bias the floating gate of an ISFET. A driving voltage and biasing current are applied to exploit the parasitic capacitance to test the functionality of the transistor.

Abstract: A touch switch for controlling accessory equipment of a vehicle avoids a malfunction which is caused due to an environmental change such as a change in a state of air, arrival of unnecessary electromagnetic waves, or the like. Conductor plates 20-1 to 20-3 are disposed in an arrangement isolated from one another on a surface opposite to a sensor surface 16T of a touch plate 16 which is touched by a person's hand. The conductor plates 20-1 to 20-3 are each connected to a capacity measurement/control unit 34. The capacity measurement/control unit 34 determines as a judgment value D the absolute value of a value obtained by subtracting a minimum absolute value among changes ?C1 to ?C3 in electrostatic capacity from a maximum absolute value among the changes ?C1 to ?C3 in electrostatic capacity. The capacity measurement/control unit 34 controls a switch 28 according to the judgment value D.

Abstract: A capacitive sensor includes a switching capacitor circuit, a comparator, and a charge dissipation circuit. The switching capacitor circuit reciprocally couples a sensing capacitor in series with a modulation capacitor during a first switching phase and discharges the sensing capacitor during a second switching phase. The comparator is coupled to compare a voltage potential on the modulation capacitor to a reference and to generate a modulation signal in response. The charge dissipation circuit is coupled to the modulation capacitor to selectively discharge the modulation capacitor in response to the modulation signal.

Abstract: A Schottky junction silicon nanowire field-effect biosensor/molecule detector with a nanowire thickness of 10 nanometer or less and an aligned source/drain workfunction for increased sensitivity. The nanowire channel is coated with a surface treatment to which a molecule of interest absorbs, which modulates the conductivity of the channel between the Schottky junctions sufficiently to qualitatively and quantitatively measure the presence and amount of the molecule.

Abstract: Described are quality control methods and devices for the reproducible manufacturing and integrity monitoring of polymers on electrochemical synthesis and detection chips. The devices and methods allow for simultaneous manufacturing and synthesis of polymers.

Abstract: Symmetrical differential capacitive sensors are disclosed. Methods of making and using symmetrical differential capacitive sensors are also disclosed.

Abstract: The invention described relates to an apparatus and method for measuring the concentration of a low molecular weight alcohol, in an aqueous liquid feed solution, comprising a first sensor including a hydrophilic capillary tube having an inner diameter, being disposed between two electrodes to form a first capacitor, a second sensor including a hydrophobic capillary tube having the same inner diameter as a capillary tube of the first sensor; said hydrophobic capillary tube having a hydrophobic coating on the inner diameter, being disposed between two electrodes to form a second capacitor, wherein the first hydrophilic and second hydrophobic sensors are dipped to the same depth in the aqueous solution to measure the solution concentration, means for measuring the capacitance of the two capacitors, and control means including a control circuit driven by a computer, wherein the difference in capacitance between the two capacitors is a measure of the concentration of the solution, independent of the depth of dippi

Abstract: A system for measuring a voltage drop between two nodes in an electrical circuit, comprising a switched capacitor integrator (SCI), a comparator and a counter. The SCI alternately (a) captures charge onto a set of sampling capacitors and (b) selectively accumulates/transfers the charge onto a pair of integration capacitors, where the charge includes a first portion that is based on the voltage drop and a second portion that depends on a digital indicator signal. The comparator generates the digital indicator signal based on whether an analog output of the SCI is positive or negative. The counter counts a number of ones occurring in the digital indicator signal during a measurement interval. At the end of the measurement interval, the count value represents a measure of the voltage drop. Knowing the resistance between the two nodes, the voltage drop may be converted into a current measurement.

Abstract: A method for forming a nanofluidic channel measuring system is disclosed. The method includes forming a first trench in a substrate, forming a second trench in the substrate, the first trench and the second trench are separated by a first width, providing a first conductor pad at a first location, providing a second conductor pad at a second location, forming a first nano-wire for coupling the first conductor pad with the second conductor pad, and forming a nano-channel through the first nano-wire, the nano-channel also coupling the first trench and the second trench, the nano-channel configured to sever the first nano-wire. A nanofluidic channel measuring system is also disclosed.

Abstract: An occupant detection apparatus includes a capacitive sensor, a signal applying circuit, a signal detector, and a voltage applying circuit. The capacitive sensor has an electrode. The signal applying circuit applies a voltage amplitude signal to the electrode during a first time period, but does not apply the voltage amplitude signal to the electrode during a second time period. The voltage amplitude signal has a voltage with a varying amplitude. The signal detector detects a change in an electric current flowing through the capacitive sensor during the first time period. The voltage applying circuit applies a predetermined voltage to the electrode during the entire first time period and during at least part of the second time period.

Abstract: A method for detecting a patter offset amount of exposed regions comprises forming at least one pair of conductive detecting marks with a predetermined position relationship by a patterning process including two exposing processes; detecting an electrical characteristic of the at least one pair conductive detecting marks, if the detected electrical characteristic does not meet a predetermined position relationship, it is determined that the pattern offset amount of the exposed regions in two exposure steps is not qualified; and if the detected electrical characteristic meets the predetermined position relationship, it is determined that the pattern offset amount of the exposed regions in two exposure steps is qualified.

Abstract: A circuit for measuring a capacitance value of a touch screen includes: a target capacitor unit having a target capacitor charged with a target charging voltage; a target voltage control unit to charge the target capacitor; a reference capacitor unit having a reference capacitor charged with a charging reference voltage; a reference voltage control unit to charge the reference capacitor; a comparator to compare the target charging voltage and the charging reference voltage and output a transition signal at a moment when the target charging voltage becomes higher than the charging reference voltage; and a controller to receive an output signal of the comparator and a clock signal and generate a digital output signal and a control signal, wherein a capacitance value of the target capacitor is measured using a time elapsed from a time when the target capacitor is initialized to a time when the transition signal is outputted.

Abstract: The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity.

Abstract: A multi-function sensor apparatus includes multiple sensing electrodes and a control circuit adapted to receive signals from each of the sensing electrodes and to deem whether the sensing electrodes are in a touched state or an untouched state. The control circuit also is adapted to selectively provide an output based on the sensor's states and the manner in which the sensors came to be in such states.

Abstract: To enable position or distance of sensing target making approach, etc. to the range of sensing area to be detected securely with simple configuration at low cost and improve latitude of designing, position detector includes capacitance sensor unit and detecting circuit unit. Capacitance sensor unit includes first and second sensing electrodes and dielectric material therebetween. Dielectric material has range L of sensing area defined on its sensing surface. Detecting circuit unit includes selector switches SWA and SWB, capacitance sensing circuits, A/D converters, and arithmetic processing circuit. Arithmetic processing circuit judges and detects the position of sensing target in range L of sensing area based on detected values of capacitances C1 and C2 sensed by first and second sensing electrodes under switching control on selector switches SWA and SWB.

Abstract: Measurement apparatuses and methods are described. A measurement input is coupled with a first terminal of a capacitance via a first switch, and a reference voltage is coupled with the first terminal of the capacitance via a second switch. A measurement circuit is coupled to a second terminal of said capacitance.

Abstract: A fingerprint sensing circuit for detecting a fingerprint of a user, including a signal source, at least a sensing unit, a resistor, an electrode, and a detecting circuit. The signal source provides a reference signal. The electrode is coupled to a reference level. The sensing unit generates a sensed value according to the electrode and the fingerprint of the user. The resistor is coupled between the signal source and the output node. The detecting circuit is coupled to the output node. The resistor, the sensing unit, and the electrode constitute a filter circuit to the signal source. At least a first signal is generated to the output node according to the reference signal and the sensed value, and the detecting circuit detects the first signal to generate a corresponding detected result indicative of the fingerprint.

Abstract: A linear sensor 21 includes an attachment base 22 attached to a metallic edge of a slide door 2 capable of opening and closing a platform 4, a skin cover part 23 which bulges from the attachment base 22 and has a hollow part 24 in the inside, an insulator 25 which has flexibility and also is embedded in the hollow part 24, and a plate-shaped electrode 26 opposed to the attachment base 22, at least a portion of the electrode being embedded in the insulator 25. In the hollow part 24, a gap 27 is disposed between the electrode 26 and the attachment base 22 and also, the electrode 26 is set in a plus pole and the attachment base 22 is set in a minus pole as the grounding, and proximity and/or contact between a foreign body and the skin cover part 23 is detected based on a change in capacitance between the electrode 26 and the grounding minus pole.

Abstract: A method of measuring the capacitance of a capacitive component (21), whereby a digital bridge with two measuring branches generates a first signal (B1) defined by a train of measuring pulses (M) having a frequency (f1) related to the unknown capacitance being measured, and a second signal (B2) defined by a train of reference pulses (L) having a frequency (f2) related to a reference capacitance (CREF) of known value. The time difference (?T) between the times (T1, T2) taken by the two measuring branches of the digital bridge to generate an equal number of pulses (Th1, Th2) is calculated. The capacitance difference (?C) between the unknown capacitance and the reference capacitance (CREF) is determined as a function of the time difference (?T). The unknown capacitance of the capacitive component (21) is calculated on the basis of the reference capacitance (CREF) and the capacitance difference (?C).

Abstract: Various embodiments provide systems and methods for controlling sub-system components during power disturbance events. More particularly, various embodiments provide systems and methods for preventing a controller (215) within a sub-system from turning OFF a switching device (220) during power disturbance events related to other sub-systems.

Abstract: A surface-conforming obscured feature detector includes a plurality of sensor plates flexibly connected together, each having a capacitance that varies based on the dielectric constant of the materials that compose the surrounding objects and the proximity of those objects. A sensing circuit is coupled to the sensor plates to measure the capacitances of the sensor plates. A controller is coupled to the sensing circuit to analyze the capacitances measured by the sensing circuit. One or a plurality of indicators are coupled to the controller, and are selectively activated to identify the location of a relative high capacitance, which can be indicative of an obscured feature behind a surface.

Abstract: Methods of performing electrostatic discharge testing on a transaction card are disclosed. A transaction card may be placed on an insulated surface. A grounding probe may be placed at a first location on the transaction card. A discharge probe may be charged to a known voltage level. The discharge probe may then be discharged at a second location on the transaction card. A discharge wave shape may be recorded from the ground probe, and one of a pass condition and a fail condition may be assigned based on at least the value of the known voltage level as compared to a reference voltage level. The first location and the second location may each be selected from a plurality of areas on the transaction card.

Abstract: A device for measuring a variation in the capacitance of a variable capacitive structure, includes: a supply voltage; a reference capacitance; element for measuring a voltage across the terminals of the reference capacitance; a measurement capacitive structure; and elements for detecting a threshold voltage across the terminals of the reference capacitance. The device is configured/programmed so that the measurement capacitive structure is discharged, in a variable number of discharges, into the reference capacitance after the variable capacitive structure has been discharged, in a fixed number of discharges, into the reference capacitance and until the voltage (VS) across the terminals of the reference capacitance has reached the threshold voltage. The variation in the variable number of discharges relative to a previously obtained number of discharges allows the variation in the capacitance of the variable capacitive structure to be estimated.

Abstract: A detector for use in an extrusion-based digital manufacturing system, the detector comprising a sense conductive component and an excitation conductive component to define a first gap that is configured to receive a consumable material used in the extrusion-based digital manufacturing system, where the excitation conductive component is configured to generate a first electrical field across the first gap.

Abstract: A method, system (100), and computer program product for age compensation for a gas sensor (101) are provided. The method includes determining an impedance spectrum for the gas sensor (101) by an impedance analyzer (103); determining a set of principle parameters based on the impedance spectrum by a principle parameter identifier (104); constructing an age compensation model for the gas sensor (101) using the set of principle parameters by an age compensation modeler (105); and applying the age compensation model to an output of the gas sensor (101). Gas sensor (101) failure detection is also provided.

Abstract: This invention offers an electrostatic capacity type touch sensor that can be calibrated in a short period of time at a moment when a finger of operator or the like does not touch a touch pad. An absolute value of a difference (AD0?AD2) between a first output voltage AD0 and a third output voltage AD2 is compared with a first threshold value Vtr1 in step S10. When the difference (AD0?AD2) between the output voltages is smaller than the first threshold value Vtr1, it is judged that the finger of operator or the like does not touch the touch pad, and it is judged which of an offset in a second output voltage AD1 and an offset in the third output voltage AD2 is smaller than the other. When the offset in the second output voltage AD1 is smaller than the offset in the third output voltage AD2, the modification to the second calibration data X1 is permitted.

Abstract: A touch sensing system which includes a touch input interface and a capacitance sensing circuit is provided. The touch input interface includes a plurality of sensing capacitors which output at least one waveform under test and at least one reference waveform. The capacitance sensing circuit includes a difference comparing unit. The difference comparing unit receives the waveform under test and the reference waveform and outputs a differential signal according to at least one positive edge difference and at least one negative edge difference between the waveform under test and the reference waveform. Furthermore, a capacitance sensing method is also provided.

Abstract: Disclosed herein is a capacitance measuring circuit for a touch sensor.

Abstract: A method for detecting detachment of a reinforcing component that is attached to a body skin component of a vehicle body of a vehicle, the body skin component and the reinforcing component forming an electric capacitor together with an intermediate adhesive layer, said capacitor having a capacitance that changes if there is at least partial detachment of the body skin component from the reinforcing component, the capacitance of the capacitor or a change in the capacitance of the capacitor being measured in order to detect detachment of the reinforcing component.

Abstract: A touch sensing system including a touch input interface and a capacitance sensing circuit is provided. The touch input interface includes a plurality of sensing capacitors for outputting a capacitance under test and a reference capacitance. The capacitance sensing circuit includes a first sensing channel, a second sensing channel, and a difference comparing unit. During a first period of the sensing period, the first sensing channel senses the capacitance under test, and the second sensing channel senses the reference capacitance. During a second period of the sensing period, the first sensing channel senses the reference capacitance, and the second sensing channel senses the capacitance under test. The difference comparing unit outputs a difference according to the capacitance under test and the reference capacitance. Additionally, a capacitance sensing method is also provided.

Abstract: An apparatus for determining a dielectric property of a capacitor arrangement, having an alternating signal generator for applying an electric alternating signal to the capacitor arrangement. It further contains an evaluation circuit for evaluating at least one electric measuring quantity of an electric signal tapped from the capacitor arrangement. It further comprises balancing means which are arranged in an electric path between the alternating signal generator and the capacitor arrangement and by means of which a parameter of the electric alternating signal can be changed in such a way that an output signal of the evaluation circuit assumes a specific value, preferably zero, under defined constant conditions. Control means are provided for emitting an electric control signal to the balancing means, by means of which the change of the at least one parameter can be controlled. The apparatus can thus be balanced in a simple, rapid, cost-effective and especially automatic way.

Abstract: A circuit includes a first capacitor having first and second capacitive sensing strips positioned on first and second sliding portions of the slider type mobile device. In the closed position, the first and second capacitive sensing strips overlap one another and in an open position the first and second capacitive sensing strips have no overlap with one another. A voltage divider having a voltage VIN(+) comprised of a first resistor network is coupled with the first capacitor. A voltage comparator having two inputs VIN(+) and VIN(?) is used to determine a high or low state. A second resistive network is used to set VIN(?). The voltage comparator will return a digital high condition indicative of the slider being in the open position when VIN(+) is greater than VIN(?) and a digital low condition indicative of the slider being in the closed position when VIN(+) is less than VIN(?).

Abstract: When moving a head rest front portion in a full-open position direction, an ECU determines that the head rest front portion comes close to an occupant head portion on the basis of a detection result of an electrostatic capacitance sensor so as to stop the head rest front portion, and determines that the head rest front portion comes close to the occupant head portion on the basis of an absolute capacitance change with respect to a reference electrostatic capacitance value of the electrostatic capacitance sensor. Alternatively, the ECU determines that the head rest front portion comes close to the occupant head portion on the basis of a change amount of the electrostatic capacitance value of the electrostatic capacitance sensor.

Abstract: The invention inter alia relates to a method for monitoring the bearing current of an electrical machine (10). An electrode (100) arranged at a distance (d) to a shaft and the shaft—due to the gap (S) between the electrode and the shaft—produce a measurement capacitance (C) and an electric shift current (i) which flows through the measurement capacitance when there is a temporal change of the voltage (Ug) applied between the shaft and the housing is measured. A measurement signal (Ms) indicating a bearing current flow is generated when the shift current or a measurement variable produced by the shift current meets a predetermined trigger criterion. Preferably, the electrode has a circular inner contour so that the gap is annular. The annular inner contour results in an error compensation in the case of a balance error of the shaft because the factor dC/dt remains at least substantially constant. Due to the contactless measurement of the shift current, no contact brushes for contacting the shaft are required.

Abstract: An occupant detection system and method are provided. The system includes a capacitive sensor having an electrode arranged in a seat proximate to an expected location of an occupant for sensing an occupant presence approximate thereto. The capacitive sensor is configured to provide an output indicative of the sensed occupant presence. The system also includes a force sensor arranged within the seat providing an output indicative of a sensed force applied to the seat. The system further includes occupant detection circuitry for processing the capacitive sensor output and force sensor output and detecting a state of occupancy of the seat based on the capacitive sensor output and the force sensor output.

Abstract: Methods, systems and devices are described for determining a measurable capacitance for proximity detection in a sensor having a plurality of sensing electrodes and at least one guarding electrode. A charge transfer process is executed for at least two executions. The charge transfer process includes applying a pre-determined voltage to at least one of the plurality of sensing electrodes using a first switch, applying a first guard voltage to the at least one guarding electrode using a second switch, sharing charge between the at least one of the plurality of sensing electrodes and a filter capacitance, and applying a second guard voltage different from the first guard voltage to the at least one guarding electrode. A voltage is measured on the filter capacitance for a number of measurements equal to at least one to produce at least one result to determine the measurable capacitance for proximity detection.

Abstract: In some embodiments, a capacitance discrimination circuit includes first and second capacitors, a comparator configured to compare a first voltage of the first capacitor and a second voltage of the second capacitor, a counter circuit configured to perform a count operation based on a comparison result of the comparator, a charge circuit configured to charge the first and second capacitors, and a control circuit configured to control the charge circuit so as to charge either the first capacitor or the second capacitor based on the comparison result of the comparator. The capacitance discrimination of the first and second capacitors is performed based on count values of the counter circuit. The capacitance discrimination circuit preferably includes a discharge circuit to discharge electric charges stored in the first and second capacitors in accordance with a discharge signal from the control circuit.

Abstract: A method of monitoring a semiconductor process is provided. The method includes preparing a process chamber including first and second electrodes spaced apart from and facing each other, and connecting the first electrode to a ground and connecting the second electrode to a radio frequency power source. An impedance in the process chamber is measured using a voltage value and a current value at the second electrode. The consumption amount of consumables in the process chamber is checked using the impedance. Varied process conditions are adjusted within an initial set range.