Abstract: An element measurement circuit is provided, comprising a oscillator for generating a first oscillation clock and second oscillation clock, a frequency divider for dividing the first oscillation clock to generate a third oscillation clock and for dividing the second oscillation clock to generate a fourth oscillation clock, a frequency detector for detecting the third oscillation clock to generate a first count value and for detecting the fourth oscillation clock to generate a second count value, and a controller for generating a first oscillation period according to the first count value, for generating a second oscillation period according to the second count value, and for generating a measurement value according to the first oscillation period and the second oscillation period.

Abstract: A test pattern for analyzing a delay characteristic of an interconnection line and a method of analyzing a delay characteristic of an interconnection line using the test pattern are provided. The test pattern for analyzing a delay characteristic of an interconnection line includes: a first metal line formed as a snake shaped structure having a plurality of concave-convex sections each having the same width; a second metal line having a comb shape formed on the same layer as the first metal line such that a plurality of teeth portions of the second metal line are respectively formed between the concave-convex sections at one side of the first metal line; and a third metal line having a comb shape formed on the same layer as the first metal line such that a plurality of teeth portions of the third metal line are respectively formed between the concave-convex sections at the other side of the first metal line.