Vibrating Reed Or String Type (e.g., Tuning Fork) Patents (Class 331/156)
  • Patent number: 9166554
    Abstract: A crystal resonator element include a pair of resonating arms extending from a base, the resonating arms includes a groove, a slope portion is formed in a connection portion of the resonating arms to the base so that a distance between the groove and the outer edge of each of the resonating arms increases as it approaches the base from the resonating arms, and a non-electrode region which extends over a range of areas from a connection portion connected to a first side surface formed along the longitudinal direction of the groove and a connection portion connected to a second side surface facing the first side surface with a bottom portion disposed there between and in which excitation electrodes are not formed is provided in the groove in at least a part of the bottom portion positioned in the slope portion.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: October 20, 2015
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Akinori Yamada
  • Patent number: 9059393
    Abstract: A vibrator element includes: a base having a mounting surface; a vibrating arm which is extended from the base and has a first surface and a second surface that faces the first surface and is positioned on the mounting surface side, and which performs flexural vibration in a direction normal to the first and second surfaces; and a laminated structure which is provided on at least one of the first and second surfaces of the vibrating arm, and which includes at least a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, in which the vibrating arm is warped toward the mounting surface side.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: June 16, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Teruo Takizawa
  • Publication number: 20150137902
    Abstract: Grooves are provided on two main surfaces of a vibration arm. When a thickness of the vibration arm is T, a width of the main surface between an outer edge of the vibration arm and the groove in a plan view along a direction orthogonal to the extending direction of the main surface is W, a sum of depths of the grooves is ta, and ta/T is ?, a region that satisfies a relationship of 4.236×10×?2?8.473×10×?+4.414×10 [?m]?W [?m]??3.367×10×?2+7.112×10×??2.352×10 [?m], and 0.75??<1.00 is present on at least a part of the vibration arm in the extending direction. When a length of the vibration arm in the extending direction is L, and a length of the weight section in the extending direction is H, a relationship of 0.012<H/L<0.30 is satisfied.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 21, 2015
    Inventor: Akinori YAMADA
  • Publication number: 20150137900
    Abstract: A resonator element includes a base section, a pair of vibrating arms extending from the base section, and a holding arm extending from the base section between the pair of vibrating arms. The vibrating arms include arm sections extending from the base section and hammerheads provided at the distal end sections of the arm sections. When the mass of the vibrating arms is represented as M1 and the mass of the holding arm is represented as M2, a relation of M1>M2 is satisfied.
    Type: Application
    Filed: November 13, 2014
    Publication date: May 21, 2015
    Inventor: Akinori YAMADA
  • Publication number: 20150137901
    Abstract: A resonator element includes a base, a quartz crystal resonator blank which is integrally disposed with the base, and has a pair of vibrating arms which are disposed in parallel in an X axial direction, and extend from the base in a Y? axial direction, the vibrating arms include arms, hammerheads which are positioned on tip end sides of the arms, and are longer than the arms in the X axial direction, a relationship of 0.033×T [?m]<W4<0.330×T [?m] is satisfied when the thickness of the vibrating arm is set to T in thickness, and a distance between the hammer heads in the X axial direction is set to W4.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 21, 2015
    Inventor: Akinori YAMADA
  • Publication number: 20150137899
    Abstract: A resonator element includes a quartz crystal resonator blank provided with a base portion, vibrating arms extending from one end side of the base portion, a connecting portion which is disposed on the other end side of the base portion, and a coupling portion, located between the base portion and the connecting portion, which couples the base portion to the connecting portion. When a thickness of the quartz crystal resonator blank is set to T, a width of the base portion is set to W1, and a width of the coupling portion is set to W2, a relation of 110 ?m?T?210 ?m is satisfied, and a relation of 0.469?W2/W1?0.871 is satisfied.
    Type: Application
    Filed: November 13, 2014
    Publication date: May 21, 2015
    Inventor: Akinori YAMADA
  • Publication number: 20150116049
    Abstract: A surface acoustic wave (SAW) resonator and a SAW oscillator and an electronic apparatus including the resonator are to be provided. A SAW resonator includes: an IDT exciting a SAW using a quartz crystal substrate of Euler angles (?1.5°???1.5°, 117°???142°, 42.79°?|?|?49.57°); one pair of reflection units arranged so as allow the IDT to be disposed therebetween; and grooves acquired by depressing the quartz crystal substrate located between electrode fingers. When a wavelength of the SAW is ?, and a depth of the grooves is G, “0.01??G” is satisfied.
    Type: Application
    Filed: October 21, 2014
    Publication date: April 30, 2015
    Inventor: Kunihito YAMANAKA
  • Publication number: 20150116050
    Abstract: A vibrating element has a drive mode, and first and second detection modes in which the vibrating element vibrates in a direction orthogonal to a vibration direction in the drive mode. In frequency-temperature characteristic curves representing a change in frequency due to a change in temperature in the respective modes with a horizontal axis representing an ambient temperature and a vertical axis representing a change in frequency, when a turnover temperature of the frequency-temperature characteristic curve in the drive mode is Ta [° C.], a turnover temperature of the frequency-temperature characteristic curve in the first detection mode is Tb [° C.], and a turnover temperature of the frequency-temperature characteristic curve in the second detection mode is Tc [° C.], Ta is lower than Tb and Tc, or Ta is higher than Tb and Tc.
    Type: Application
    Filed: October 24, 2014
    Publication date: April 30, 2015
    Inventors: Keiji NAKAGAWA, Ryuta NISHIZAWA
  • Publication number: 20150102866
    Abstract: A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extend in directions different from each other from the base portion. The MEMS vibrator has a curved surface between the adjacent vibration portions.
    Type: Application
    Filed: October 14, 2014
    Publication date: April 16, 2015
    Inventor: Ryuji KIHARA
  • Publication number: 20150102865
    Abstract: A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extends in a direction that intersects with a normal line of the substrate from the base portion. In a planar view, when a length of the vibration portion in a direction in which the vibration portion extends from the base portion is L, and a length of the vibration portion in a direction that intersects with a direction in which the vibration portion extends from the base portion is W, a dimension ratio (L/W) of the vibration portion satisfies a relationship in which 0.2?(L/W)?7.0.
    Type: Application
    Filed: October 14, 2014
    Publication date: April 16, 2015
    Inventors: Kazuyuki NAGATA, Ryuji KIHARA
  • Publication number: 20150097632
    Abstract: A MEMS vibrator includes: a base portion; a plurality of vibration reeds which extends from the base portion; a supporting portion which extends from a vibration node portion of the base portion; a fixing portion which is connected with the supporting portion; and a substrate in which the fixing portion is disposed on a main surface. The plurality of vibration reeds is separated from the substrate.
    Type: Application
    Filed: October 3, 2014
    Publication date: April 9, 2015
    Inventor: Akinori YAMADA
  • Patent number: 9000854
    Abstract: Oscillators including mechanical resonators are described, as are methods of operating the oscillators such that the mechanical resonator exhibits non-linear behavior. The non-linear behavior may include multiple stable states, for instance being bi-stable. The non-linear behavior may exhibit hysteresis. The mechanical resonator may be driven to operate in a desired portion of the non-linear operating regime.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: April 7, 2015
    Assignee: Sand 9, Inc.
    Inventor: Pritiraj Mohanty
  • Publication number: 20150084706
    Abstract: An oscillator according to the disclosure includes a crystal unit, an IC chip, an adhesive agent flow prevention film, and a lead frame. The lead frame is disposed in a peripheral area of the pair of crystal terminals and the IC chip in an approximately same surface as the one surface of the flat container of the crystal unit. The lead frame includes a wiring part that is connected to an IC terminal of the IC chip by a bonding wire and is buried in the resin mold, and a mounting terminal forming portion that extends from the wiring part and is folded along an outside of the resin mold in a back surface that is another surface side opposite to the one surface of the crystal unit so as to form a mounting terminal.
    Type: Application
    Filed: August 29, 2014
    Publication date: March 26, 2015
    Inventor: FUMIO ASAMURA
  • Publication number: 20150042409
    Abstract: A continuously oscillating cantilevered beam having a velocity transducer that produces a preferably voltage signal as a function of the beam's velocity. An amplifier receives the signal and amplifies accordingly to produce an amplified signal that varies as a function of the beam's velocity. The amplified signal powers an electromagnet that is disposed in close proximity to a magnet on the beam. The resulting apparatus is a system that is driven cyclically by a force that is essentially generated in proportion to, and then amplified, the velocity of the beam itself. This ensures that the timing of applying the driving force is precisely synchronized with the movement of the beam.
    Type: Application
    Filed: August 5, 2014
    Publication date: February 12, 2015
    Inventor: Earl J. Brown
  • Publication number: 20150022274
    Abstract: A piezoelectric film producing process includes depositing a piezoelectric body in a mixed atmosphere of N2 gas and Ar gas by using a sputtering method, using an Al—Cu alloy as deposition material.
    Type: Application
    Filed: July 14, 2014
    Publication date: January 22, 2015
    Inventors: Takashi YAMAZAKI, Osamu IWAMOTO
  • Patent number: 8928208
    Abstract: A tuning fork-type piezoelectric resonator plate has a resonator blank comprising a pair of vibrating leg portions and a base portion from which the leg portions protrude. The pair of leg portions are arranged in parallel protrudingly from one end face of the base portion, and a pronged portion is formed between the pair of leg portions in an intermediate position in a width direction of the one end face of the base portion. The base portion has a pair of through holes along the one end face of the base portion, and on another end face side opposite to the one end face of the base portion, a joining region that joins to an external portion. The pair of through holes are specially positioned and have special wall surface configurations.
    Type: Grant
    Filed: February 2, 2012
    Date of Patent: January 6, 2015
    Assignee: Daishinku Corporation
    Inventor: Yoshinobu Sakamoto
  • Publication number: 20140368287
    Abstract: A resonator element includes a base portion, a pair of vibrating arms that are integrally provided with the base portion and extend in a Y-axis direction from a distal end of the base portion, and a supporting arm that is integrally provided with the base portion, is positioned between the vibrating arms, and extends in the Y-axis direction from the distal end of the base portion. A first fixation portion is provided in one principal surface of the base portion, and a second fixation portion is provided in one principal surface of the supporting arm. The resonator element is fixed to an object through fixation members, by the first fixation portion and the second fixation portion.
    Type: Application
    Filed: June 18, 2014
    Publication date: December 18, 2014
    Inventors: Akinori YAMADA, Osamu IWAMOTO
  • Publication number: 20140368288
    Abstract: A resonator element includes a base portion, a pair of vibrating arms that extend in a first direction from the base portion and are arranged along a second direction perpendicular to the first direction, and a supporting arm that extends in the first direction from the base portion and is disposed between the pair of vibrating arms when seen in a plan view.
    Type: Application
    Filed: June 18, 2014
    Publication date: December 18, 2014
    Inventor: Akinori YAMADA
  • Patent number: 8907548
    Abstract: A resonator element includes: a base portion provided on a plane including a first axis and a second axis orthogonal to the first axis; a vibrating arm extending from the base portion in the first axis direction; an excitation electrode provided on the vibrating arm so as to excite the vibrating arm; and a first mass portion provided on the vibrating arm so as to adjust the frequency of the vibrating arm, wherein the vibrating arm performs flexural vibration in a direction perpendicular to the plane and wherein the first mass portion is provided in a region exceeding ½ of the entire length in the first axis direction of the vibrating arm from the end of the vibrating arm close to the base portion and is formed from a material whose density D (in units of 103 kg/m3) is in the range of 2.20?D?8.92.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: December 9, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Hiroki Kawai
  • Patent number: 8866567
    Abstract: A quartz crystal unit has a quartz crystal tuning fork resonator having a thickness within a range of 0.05 mm to 0.18 mm, and at least one groove formed in at least one of opposite main surfaces of each of first and second tuning fork tines so that a length of the at least one groove is within a range of 20% to 78% of an overall length of the resonator and less than 1.29 mm. An electrode is disposed on at least one of a base portion and a surface of the at least one groove so that the electrode of the first tuning fork tine has an electrical polarity opposite to an electrical polarity of the electrode of the second tuning fork tine. The capacitance ratio r2 of a second overtone mode of vibration of the quartz crystal tuning fork resonator is greater than 1500. The quartz crystal tuning fork resonator is housed in a case having an open end, and a lid is connected to the case.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: October 21, 2014
    Assignee: Piedek Technical Laboratory
    Inventor: Hirofumi Kawashima
  • Patent number: 8854150
    Abstract: A resonator in which in addition to the normal anchor at a nodal point, a second anchor arrangement is provided and an associated connecting arm between the resonator body and the second anchor arrangement. The connecting arm connects to the resonator body at a non-nodal point so that it is not connected to a normal position where fixed connections are made. The connecting arm is used to suppress transverse modes of vibration.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: October 7, 2014
    Assignee: NXP, B.V.
    Inventors: Casper van der Avoort, Jozef Thomas Martinus van Beek
  • Publication number: 20140292431
    Abstract: A resonator element includes a quartz crystal substrate having a base, a pair of vibration arms extending from the base, and a support arm located between the vibration arms and extending from the base in the direction in which the vibration arms extend. Each of the vibration arms has an arm portion and a hammer head provided at the front end of the arm portion. The arm portion has a pair of principal surfaces and a groove that has a bottom and opens through each of the principal surfaces. In the invention, the width of each of bank-shaped portions of each of the principal surfaces that are disposed side by side on opposite sides of the groove along the width direction of the vibration arm perpendicular to the longitudinal direction thereof is set at 6 ?m or smaller.
    Type: Application
    Filed: March 20, 2014
    Publication date: October 2, 2014
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Akinori YAMADA
  • Publication number: 20140292432
    Abstract: A resonator includes: a resonator element including a base portion, and a pair of vibrating arms which are integrally provided with the base portion, extend in a first direction from the base portion, and are arranged in a second direction orthogonal to the first direction; a base which supports the resonator element; and a fixing portion which fixes the resonator element with respect to the base, and the resonator element is configured so as to satisfy conditions shown by the following formula (1).
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Akinori YAMADA
  • Publication number: 20140292433
    Abstract: A resonator element includes a base portion and a pair of vibrating arms that are provided integrally with the base portion and extend in a Y-axis direction from a distal end of the base portion. When the lengths of the vibrating arms are set to L and the lengths of hammerheads are set to H, a relation of 0.183?H/L?0.597 is satisfied. When a resonance frequency of a basic vibration mode is set to ?0 and a resonance frequency of a vibration mode different from the basic vibration mode is set to ?1, a relation of (|?0??1|)/?0?0.124 is satisfied.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Akinori Yamada, Shuhei Yoshida
  • Patent number: 8847694
    Abstract: A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.
    Type: Grant
    Filed: May 17, 2012
    Date of Patent: September 30, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Hideo Tanaya
  • Patent number: 8847708
    Abstract: A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.
    Type: Grant
    Filed: March 27, 2012
    Date of Patent: September 30, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Ryuji Kihara
  • Patent number: 8836440
    Abstract: Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. In very thin nanowire structures (sub-micron-meter in width), additive piezoresistance patterning and fabrication can be highly difficult and thus need to be avoided. This invention shows that, in piezoresistive nanowires with homogeneous material composition and symmetric structures, no conventional and additive piezoresistance loops are needed. Using AC and DC drive signals, and bias signals of controlled frequency and amplitude, output signals having a variety of frequencies can be obtained. Various examples of such resonators and their theory of operation are described.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: September 16, 2014
    Assignee: California Institute of Technology
    Inventors: Philip X.-L. Feng, Luis Guillermo Villanueva, Michael L. Roukes
  • Publication number: 20140251010
    Abstract: In a quartz crystal unit, the unit comprising a quartz crystal resonator having an overall length less than 2.1 mm, and a base portion, and first and second vibrational arms, at least one groove being formed in at least one of opposite main surfaces of each of the first and second vibrational arms so that a width of the at least one groove is greater than or equal to a distance in the width direction of the at least one groove measured from an outer edge of the at least one groove to an outer edge of the corresponding one of the first and second vibrational arms and less than 0.07 mm, at least one metal film for adjusting an oscillation frequency of the quartz crystal resonator being disposed on at least one of the opposite main surfaces of each of the first and second vibrational arms.
    Type: Application
    Filed: May 20, 2014
    Publication date: September 11, 2014
    Applicant: PIEDEK TECHNICAL LABORATORY
    Inventor: Hirofumi KAWASHIMA
  • Publication number: 20140253253
    Abstract: A resonator element includes a piezoelectric substrate that includes a vibration portion, and a thick portion which is integrally formed with an outer edge excluding a partial outer edge in an outer edge of the vibration portion and which is thicker than the vibration portion, and a pair of excitation electrodes that are respectively provided on a first main surface and a second main surface of a vibration region which are in front and rear relationships. In addition, the piezoelectric substrate includes first and second beam portions that are provided along a fourth side of the vibration portion.
    Type: Application
    Filed: February 27, 2014
    Publication date: September 11, 2014
    Inventors: Masayuki KIKUSHIMA, Masako TANAKA, Naohisa OBATA, Yukihiro UNNO
  • Publication number: 20140254328
    Abstract: A piezoelectric vibrating piece includes: a pair of vibrating arm sections which are disposed at a distance away from each other in a width direction of a base section; the base section to which each base end of the pair of vibrating arm sections is connected; and a support arm section that is connected to the base section between the pair of vibrating arm sections and extends from the base section to the same side as the pair of vibrating arm sections, in which convex sections are formed continuous with side surfaces of roots of the vibrating arm sections and side surfaces of the base section.
    Type: Application
    Filed: March 7, 2014
    Publication date: September 11, 2014
    Applicant: SII Crystal Technology Inc.
    Inventor: Masanori TAMURA
  • Publication number: 20140253254
    Abstract: A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.
    Type: Application
    Filed: May 22, 2014
    Publication date: September 11, 2014
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Akinori YAMADA
  • Patent number: 8810327
    Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.
    Type: Grant
    Filed: October 4, 2012
    Date of Patent: August 19, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Akinori Yamada
  • Patent number: 8803626
    Abstract: A piezoelectric vibration reed includes a pair of vibrating arm portions arranged in parallel to each other and a base portion. The base portion is integrally coupled to proximal ends of the pair of the vibrating arm portions in a longitudinal direction that the vibrating arm portions extend. The base portion includes a connecting portion, a mount portion, and a narrow portion between the connecting portion and the mount portion. The base portion further includes a pair of notched portions notched respectively inwardly from both sides of the base portion in the width direction and ribs projecting outwardly in the width direction of the base portion and arranged in the interiors of the notched portions.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: August 12, 2014
    Assignee: Seiko Instruments Inc.
    Inventor: Daishi Arimatsu
  • Publication number: 20140202245
    Abstract: A piezoelectric device includes: a piezoelectric vibrating reed; and a package, wherein the piezoelectric vibrating reed has a vibrating part and first and second supporting arms extending from a base end part, the package has a base, a lid, a cavity defined by the base and the lid, a convex part projecting from the base or the lid into the cavity, a length of the first supporting arm is shorter than a length of the second supporting arm, and the convex part is provided in a range ahead of a leading end of the first vibrating arm in an extension direction of the first supporting arm and at least partially overlapping with the second supporting arm in a length direction of the piezoelectric vibrating reed so as not to overlap with the piezoelectric vibrating reed in a plan view.
    Type: Application
    Filed: March 24, 2014
    Publication date: July 24, 2014
    Applicant: Seiko Epson Corporation
    Inventors: Katsuo ISHIKAWA, Akitoshi HARA
  • Publication number: 20140203883
    Abstract: A resonator includes a ring-shaped or disk-shaped resonator main body, a supporting joist, and a securing portion. The supporting joist extends from the resonator main body to support the resonator main body. The securing portion is formed at a distal end of the supporting joist and the securing portion is secured to a base material. The securing portion includes a first rod-shaped portion and a second rod-shaped portion. The first rod-shaped portion is formed in a first direction. The second rod-shaped portion is formed in a second direction different from the first direction.
    Type: Application
    Filed: January 23, 2014
    Publication date: July 24, 2014
    Applicant: Nihon Dempa Kogyo Co., Ltd.
    Inventors: TAKAHIRO OHTSUKA, MAKIKO NAKAMURA, NORITOSHI KIMURA
  • Publication number: 20140182361
    Abstract: A sensor for detecting analytes, a method of making the sensor, and a method of using the sensor. In one embodiment, the present invention comprises at least one array comprising a plurality of resonators. The resonators can be arranged in a plurality of rows and a plurality of columns, and can be connected in a combined series-parallel configuration. The resonators can be adapted to vibrate independently at about the same resonance frequency and about the same phase. The sensor can also comprise an actuator and a signal detector electrically coupled to the array. The sensor can also further comprise an analyte delivery system and can be functionalized for detection of at least one analyte.
    Type: Application
    Filed: January 25, 2013
    Publication date: July 3, 2014
    Applicant: California Institute of Technology
    Inventors: Igor Bargatin, John Sequoyah Aldridge, Edward Myers, Michael L. Roukes
  • Patent number: 8760235
    Abstract: A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: June 24, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Akinori Yamada
  • Patent number: 8760234
    Abstract: A MEMS vibrator includes: a substrate; a first electrode disposed above the substrate; and a second electrode disposed in a state where at least one portion of the second electrode has a space between the first electrode and the second electrode, and having a beam portion capable of vibrating, in the thickness direction of the substrate, with electrostatic force and a supporting portion supporting one edge of the beam portion and disposed above the substrate, wherein a supporting side face of the supporting portion supporting the one edge has a bending portion which bends in plan view from the thickness direction of the substrate, and the one edge is supported by the supporting side face including the bending portion.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: June 24, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Shogo Inaba
  • Patent number: 8749315
    Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: June 10, 2014
    Assignee: SiTime Corporation
    Inventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
  • Patent number: 8742854
    Abstract: A periodic signal generator is configured to generate high frequency signals characterized by relatively low temperature coefficients of frequency (TCF). A microelectromechanical resonator, such as concave bulk acoustic resonator (CBAR) supporting capacitive and piezoelectric transduction, may be geometrically engineered as a signal generator that produces two periodic signals having unequal resonant frequencies with unequal temperature coefficients. Circuitry is also provided for combining the two periodic signals using a mixer to thereby yield a high frequency low-TCF periodic difference signal at an output of the periodic signal generator.
    Type: Grant
    Filed: July 19, 2011
    Date of Patent: June 3, 2014
    Assignee: Integrated Device Technology Inc.
    Inventors: Seungbae Lee, Harmeet Bhugra, Ashwin Samarao
  • Patent number: 8742872
    Abstract: In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.
    Type: Grant
    Filed: February 24, 2011
    Date of Patent: June 3, 2014
    Assignee: Panasonic Corporation
    Inventors: Tomohiro Iwasaki, Keiji Onishi, Kunihiko Nakamura
  • Patent number: 8732938
    Abstract: An improved method of packaging a sensor is provided. The method includes the step of affixing a tuning fork to a platform. The tuning fork includes tines comprising one or more surfaces, with each tine further comprising an electrode and a piezoelectric material. An application specific integrated circuit (ASIC) is affixed to the platform. Electrical communication between the ASIC and the electrode of each tine is established for providing stimulus to the tuning fork and for receiving a response signal from the tuning fork. A protective layer is applied to cover the platform and a portion of the tuning fork while maintaining a portion of a surface of each tine free from the protective layer such that the surface can displace the fluid in contact therewith.
    Type: Grant
    Filed: May 19, 2010
    Date of Patent: May 27, 2014
    Assignees: MEAS France, Hella KGaA Hueck & Co.
    Inventors: Oleg Kolosov, Leonid Matsiev, John F. Varni, G. Cameron Dales, Olaf Ludtke, Dirk Wullner, Andreas Buhrdorf, Heiko Dobrinski
  • Patent number: 8736152
    Abstract: An exemplary tuning-fork type piezoelectric vibrating piece has a rectangular base having upper and lower main surfaces and a pair of vibrating arms extending longitudinally from the base. The vibrating arms also have the upper and lower main surfaces. Each main surface of each vibrating arm defines a respective vibrating-arm groove extending longitudinally into the base. Each main surface of the base has at least one respective step-side surface situated outboard, in an X-axis direction, of each vibrating-arm groove. Each step-side surface is parallel with the respective vibrating-arm groove. A first electrode is situated on the vibrating-arm grooves of the first vibrating arm and on the at least one respective step-side surface on each main surface. A second electrode is situated on the vibrating-arm grooves of the second vibrating arm and on the at least one respective step-side surface on each main surface. The first and second electrodes are energized with different electrical polarities.
    Type: Grant
    Filed: March 3, 2011
    Date of Patent: May 27, 2014
    Assignee: Nihon Dempa Kogyo Co., Ltd.
    Inventor: Hiroki Iwai
  • Patent number: 8723611
    Abstract: The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: May 13, 2014
    Assignee: Murata Electronics Oy
    Inventor: Ville Kaajakari
  • Patent number: 8692632
    Abstract: A resonator element includes a base portion in which a pair of notches is formed, a pair of resonating arms which is extended in parallel from one end side of a first portion of the base portion. The resonating arm is provided with a bottomed elongated groove which has an opening along at least one principal surface of both principal surfaces and a weight portion which is formed at the tip end side of the resonating arm on the opposite side of a root of the resonating arm attached to the base portion and which has a larger width than on the root side. The weight portion is formed so that the proportion of the length of the weight portion to the length from the root to the tip end side in a longitudinal direction of the resonating arm is within a range of 35% to 41%.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: April 8, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Akinori Yamada
  • Publication number: 20140091871
    Abstract: A MEMS element includes: a substrate; a first electrode formed above the substrate; and a second electrode having a support portion and a beam portion, the support portion being formed above the substrate, the beam portion extending from the support portion, being formed in a state of having a gap between the first electrode and the beam portion, and being capable of vibrating in a thickness direction of the substrate. The width of the beam portion decreases with distance from a base of the beam portion toward a tip of the beam portion. The central length of the beam portion is larger than the lengths of ends of the beam portion. The width of the base of the beam portion is larger than the central length of the beam portion.
    Type: Application
    Filed: September 19, 2013
    Publication date: April 3, 2014
    Applicant: Seiko Epson Corporation
    Inventor: Ryuji Kihara
  • Patent number: 8674775
    Abstract: A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: March 18, 2014
    Assignee: Silicon Laboratories Inc.
    Inventors: Mehrnaz Motiee, Emmanuel P. Quevy, David H. Bernstein
  • Patent number: 8665032
    Abstract: A flexural mode resonator element includes: a vibration arm extending from a base end toward a tip; a base joined to the vibration arm at the base end; and supporting arms arranged on both sides of the base in a width direction perpendicular to an extending direction of the vibration arm and joined to the base, wherein the base has a reduced cross-section portion disposed along the extending direction of the vibration arm between a joint portion with the vibration arm and a joint portion with the supporting arms, and the reduced cross-section portion is disposed so as to satisfy a relationship 2×W1?L?6×W1 where L is the length of the reduced cross-section portion in the extending direction of the vibration arm, and W1 is the arm width of the vibration arm.
    Type: Grant
    Filed: September 20, 2012
    Date of Patent: March 4, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Hideo Tanaya, Yoshiyuki Yamada
  • Patent number: 8663487
    Abstract: The invention is directed to the provision of a method for manufacturing a crystal oscillator manufacturing method that can achieve a highly precise fine adjustment without applying unnecessary external force to a crystal oscillator, and that can adjust a plurality of crystal oscillators in a collective manner. More specifically, the invention provides a method for manufacturing a crystal oscillator includes a first etching step for forming a prescribed external shape, an electrode forming step for forming an electrode at least in a portion of a surface of the external shape, a leakage amount measuring step for measuring leakage amount associated with leakage vibration of the external shape, and a second etching step for etching the external shape by an amount that is determined based on a measurement result of the leakage amount measuring step so as to adjust balance.
    Type: Grant
    Filed: October 16, 2009
    Date of Patent: March 4, 2014
    Assignee: Citizen Holdings Co., Ltd.
    Inventors: Akiko Katoh, Tohru Yanagisawa
  • Publication number: 20140055206
    Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.
    Type: Application
    Filed: October 31, 2013
    Publication date: February 27, 2014
    Applicant: Seiko Epson Corporation
    Inventors: Akinori YAMADA, Shuhei YOSHIDA