Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: A microelectromechanical system (MEMS) device includes a resonator anchored to a substrate. The resonator includes a first strain gradient statically deflecting a released portion of the resonator in an out-of-plane direction with respect to the substrate. The resonator includes a first electrode anchored to the substrate. The first electrode includes a second strain gradient of a released portion of the first electrode. The first electrode is configured to electrostatically drive the resonator in a first mode that varies a relative amount of displacement between the resonator and the first electrode. The resonator may include a resonator anchor anchored to the substrate. The first electrode may include an electrode anchor anchored to the substrate in close proximity to the resonator anchor. The electrode anchor may be positioned relative to the resonator anchor to substantially decouple dynamic displacements of the resonator relative to the electrode from changes to the substrate.

Abstract: A MEMS oscillator includes a resonator body and primary and secondary drive electrodes to electrostatically drive the resonator body. Primary and secondary sense electrodes sense motion of the resonator body. The primary and secondary drive and sense electrodes are configured to be used together during start-up of the MEMS oscillator. The secondary drive electrode and secondary sense electrode are disabled after start-up, while the primary drive and sense electrodes remain enabled to maintain oscillation.

Abstract: A servo system is provided for controlling movement of a flexible structure having multiple masses and elements. Each element couples a respective two of the masses and functions as a spring when the flexible structure is subject to a linear or rotational input at or above a frequency at which the respective element exhibits flexure. The servo system includes multiple sensors, where each sensor is disposed relative to a respective one of the masses to sense a respective acceleration. A motor having a torque input may operatively be configured to output one of a linear or rotational force on the first mass based on a torque signal present on the torque input. A servo controller that receives each sensed acceleration from each sensor may generate a compensation feedback signal based on a sum of sensed accelerations. The torque signal may be output to the motor based on the compensation feedback signal.

Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.

Abstract: A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.

Abstract: An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.

Abstract: A flexural mode resonator element includes: a vibration arm extending from a base end toward a tip; a base joined to the vibration arm at the base end; and supporting arms arranged on both sides of the base in a width direction perpendicular to an extending direction of the vibration arm and joined to the base, wherein the base has a reduced cross-section portion disposed along the extending direction of the vibration arm between a joint portion with the vibration arm and a joint portion with the supporting arms, and the reduced cross-section portion is disposed so as to satisfy a relationship 2×W1?L?6×W1 where L is the length of the reduced cross-section portion in the extending direction of the vibration arm, and W1 is the arm width of the vibration arm.

Abstract: Systems and methods for operating a nanometer-scale cantilever beam with a gate electrode. An example system includes a drive circuit coupled to the gate electrode where a drive signal from the circuit may cause the beam to oscillate at or near the beam's resonance frequency. The drive signal includes an AC component, and may include a DC component as well. An alternative example system includes a nanometer-scale cantilever beam, where the beam oscillates to contact a plurality of drain regions.

Abstract: An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity.

Abstract: The present disclosure is directed to a MEMS resonant structure, provided with a substrate of semiconductor material; a mobile mass suspended above the substrate and anchored to the substrate by constraint elements to be free to oscillate at a resonance frequency; and a fixed-electrode structure capacitively coupled to the mobile mass to form a capacitor with a capacitance that varies as a function of the oscillation of the mobile mass; the fixed-electrode structure arranged on a top surface of the substrate, and the constraint elements being configured in such a way that the mobile mass oscillates, in use, in a vertical direction, transverse to the top surface of the substrate, keeping substantially parallel to the top surface.

Abstract: A resonator element capable of improving impact resistance is provided. A quartz crystal resonator element is a resonator element formed by etching a Z plate which is cut at predetermined angles with respect to the crystal axes of a quartz crystal. The quartz crystal resonator element includes a base, a pair of resonating arms extending from the base in the Y-axis direction, and a positive X-axis notch and a negative X-axis notch formed by notching the base in the X-axis direction. The positive X-axis notch is formed by notching the base from the negative side of the X axis towards the positive side so that the width of the positive X-axis notch increases as it approaches the outer circumference.

Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.

Abstract: Provided is a manufacturing method of a package where a gas generated between a base substrate forming wafer and a lid substrate forming wafer at the time of bonding these two wafers to each other can be easily discharged to the outside. In the method, the base substrate forming wafer and the lid substrate forming wafer are laminated to each other by sandwiching the base substrate forming wafer and the lid substrate forming wafer from both sides in the laminating direction using a lower jig and an upper jig arranged in a vacuum chamber thus forming a wafer bonded body having a plurality of cavities in each of which a piezoelectric vibrating piece is sealed, and the wafer bonded body is cut for every one of plurality of cavities thus forming a plurality of packages.

Abstract: A photoresist film forming process to form a film through a spin coating method is included, a plurality of groove portions and a plurality of wall portions are formed in an upper surface of a flow regulating plate, among the plurality of groove portions, the diameter of the outer side surface of a first groove portion is set to be smaller than the longest distance from the rotation center to the outer edge of the square wafer, and is set to be larger than the shortest distance from the rotation center to the outer edge of the square wafer, and among the plurality of groove portions, the diameter of the outer side surface of a second groove portion is set to be smaller than the shortest distance from the rotation center to the outer edge of the square wafer.

Abstract: A variable simulated inductor comprises an integrator connected to receive the voltage across the input to the circuit. The output of the inductor is connected to a control terminal of a transconductor connected across the input of the circuit. The gain of the transconductor is electronically controllable in order to control the inductance of the circuit. An oscillator using a variable simulated inductor and a piezoelectric resonator connected in parallel is also provided.

Abstract: A vibrating device includes: a package having an internal space; and a vibrating reed housed in the internal space of the package, wherein the package has a porous portion formed of a communication hole communicating between the internal space and the outside and a porous body buried in the communication hole, and a metal film closing the internal space is arranged on the outside side of the porous portion.

Abstract: A method for manufacturing a quartz crystal unit comprises the steps of forming a quartz crystal tuning fork resonator vibratable in a flexural mode of an inverse phase and having a quartz crystal tuning fork base and first and second quartz crystal tuning fork tines connected to the quartz crystal tuning fork base, forming at least one groove having at least three stepped portions in at least one of opposite main surfaces of each of first and second quartz crystal tuning fork tines, disposing an electrode on a surface of one of the at least three stepped portions of the at least one groove and an electrode on one of opposite side surfaces of each of the first and second quartz crystal tuning fork tines, mounting the quartz crystal tuning fork resonator on a mounting portion of a case, and connecting a lid to the case to cover an open end of the case, wherein the step of forming the quartz crystal tuning fork base and the first and second quartz crystal tuning fork tines is performed before the step of formin

Abstract: A vibrator element includes a base section, vibration arms, and excitation electrodes provided to the respective vibration arms, the excitation electrodes each include a first electrode disposed on a principal surface side of the vibration arm, a second electrode disposed so as to be opposed to the first electrode, and a piezoelectric body extending between the first electrode and the second electrode, and ITO is used as at least one of the first electrode and the second electrode.

Abstract: A microelectromechanical (MEMS) resonator is disclosed that comprises a substrate and a resonator body suspended above the substrate by means of clamped-clamped beams, where each beam comprises two support legs with a common connection to the resonator body, and the resonator body is configured to resonate at an operating frequency. The MEMS resonator further comprises an excitation component configured to excite the resonator body to resonate at the operating frequency, where each beam is further configured to oscillate in a flexural mode at a flexural wavelength as a result of resonating at the operating frequency, and each leg is acoustically long with respect to the flexural wavelength.

Abstract: A quartz crystal unit has a quartz crystal resonator, a case for housing the quartz crystal resonator, and a lid for covering an open end of the case. The quartz crystal resonator comprises a quartz crystal tuning fork resonator capable of vibrating in a flexural mode of an inverse phase and having at least one groove, and an electrode is disposed on at least one of opposite side surfaces of each of the first and second quartz crystal tuning fork tines. The quartz crystal tuning fork resonator has a capacitance ratio r2 of a second overtone mode of vibration greater than 1500. The lid is connected to the case through a connecting member to cover the open end of the case.

Abstract: A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.

Abstract: A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

Abstract: A resonator has a vibrating element (10) and at least a first (20) and a second (30) electrode, at least one of the electrodes storing an electric charge to make the device charge biased. A charge adjuster (C) can add to or reduce the stored charge. The charge adjuster can be a capacitor to reduce leakage, and or a power supply coupled by switch. It can reduce problems of stiction, and reduce power consumption, and reduce non linearity's, it enables the charge level to be adjusted before operation. A second switch can be used to ground the vibrating element.

Abstract: A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bise

Abstract: A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on the one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.

Abstract: In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.

Abstract: A method for manufacturing a quartz crystal unit comprises the steps of adjusting an oscillation frequency of a quartz crystal tuning fork resonator that is vibratable in a flexural mode of an inverse phrase and that has first and second quartz crystal tuning fork tines, forming at least one groove in each of two of opposite main surfaces of each of first and second quartz crystal tuning fork tines, disposing an electrode on a surface of the at least one groove formed in each of two of the opposite main surfaces and each of two of opposite side surfaces of each of the first and second quartz crystal tuning fork tines so that the electrodes of the grooves of the first quartz crystal tuning fork tine are connected to the electrodes of the side surfaces of the second quartz crystal tuning fork tine and the electrodes of the grooves of the second quartz crystal tuning fork tine are connected to the electrodes of the side surfaces of the first quartz crystal tuning fork tine, the quartz crystal tuning fork resonat

Abstract: A tunable nanostructure such as a nanotube is used to make an electromechanical oscillator. The mechanically oscillating nanotube can be provided with inertial clamps in the form of metal beads. The metal beads serve to clamp the nanotube so that the fundamental resonance frequency is in the microwave range, i.e., greater than at least 1 GHz, and up to 4 GHz and beyond. An electric current can be run through the nanotube to cause the metal beads to move along the nanotube and changing the length of the intervening nanotube segments. The oscillator can operate at ambient temperature and in air without significant loss of resonance quality. The nanotube is can be fabricated in a semiconductor style process and the device can be provided with source, drain, and gate electrodes, which may be connected to appropriate circuitry for driving and measuring the oscillation. Novel driving and measuring circuits are also disclosed.

Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

Abstract: To efficiently fabricate a high quality piezoelectric vibrating piece regardless of an accuracy of an outer shape of a wafer, there is provided a method of fabricating a plurality of piezoelectric vibrating pieces at a time utilizing a wafer S, the method including a step of forming two or more of through holes 40 and forming outer shapes of a plurality of piezoelectric plates 10 simultaneously with the through holes by constituting reference points G by centers of the through holes by etching the wafer by a photolithography technology, a step of preparing a jig for a wafer having inserting pins formed to project by a number the same as a number of the through holes from above a flat plate portion, thereafter, mounting the wafer on the flat plate portion in a state of inserting the inserting pin into the through hole, a step of forming an electrode on outer surfaces of the plurality of piezoelectric plates, and a step of cutting to separate the plurality of piezoelectric plates from the wafer to fragment, and

Abstract: Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.

Abstract: A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.

Abstract: A crystal resonator element include a pair of resonating arms extending from a base, the resonating arms includes a groove, a slope portion is formed in a connection portion of the resonating arms to the base so that a distance between the groove and the outer edge of each of the resonating arms increases as it approaches the base from the resonating arms, and a non-electrode region which extends over a range of areas from a connection portion connected to a first side surface formed along the longitudinal direction of the groove and a connection portion connected to a second side surface facing the first side surface with a bottom portion disposed there between and in which excitation electrodes are not formed is provided in the groove in at least a part of the bottom portion positioned in the slope portion.

Abstract: A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator.

Abstract: A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width.

Abstract: A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequency 2?0 and to provide a resonating output signal at a frequency ?0. A cascaded feedback path in any electrically coupled cascade order includes at least one non-linear element, at least one phase shifter electrically, and at least one amplifier. The cascade feedback path is configured to receive as input the resonating output signal at a frequency ?0 and configured to provide as output a feedback path signal as the parametric excitation signal at a frequency 2?0 to the resonator. A parametric feedback oscillator output terminal is configured to provide the resonating output signal at the frequency ?0 as an output signal. A method of causing a parametric feedback oscillation is also described.

Abstract: Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.

Abstract: Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.

Abstract: An apparatus including a resonator electrode and a second electrode separated from the resonator electrode by a gap having a size that facilitates electron transfer across the gap, wherein the resonator electrode is a resonator electrode mounted for oscillatory motion relative to the second electrode that results in a size of the gap between the resonator electrode and the second electrode being time variable; a feedback circuit configured to convey an electron transfer signal dependent upon electron transfer across the gap as a feedback signal; and a drive electrode adjacent the resonator electrode configured to receive a feedback signal from a feedback circuit configured to provide a time-varying feedback signal dependent upon electron transfer across a gap.

Abstract: A method for manufacturing a piezoelectric device comprising steps of preparing a base wafer (S122, S124) having a plurality of bases having a first bonding film formed on surrounding of the bases and first dents (66) formed adjacent to and contacted to the first bonding film; preparing a lid wafer (S102, S104) having a plurality of lids having a second bonding film formed on surrounding of the lid and the second dents (67) formed adjacent to and contacted to the second bonding film; mounting a bonding material (75) on the first dents (66) or the second dents (67); and bonding (S152) the base wafer and the lid wafer by solidifying the bonding material after melting the bonding material and flowing the molten material along the first bonding film and the second bonding film.

Abstract: Provided are a package marking method capable of printing a clean marking without impairing the reliability, a package manufactured by the method, a piezoelectric vibrator, and an oscillator, an electronic device, and a radio-controlled timepiece having the piezoelectric vibrator. A package marking method for printing a marking on the surface of a lid substrate formed of a glass includes a thin film forming step of forming a thin film on the surface of the lid substrate and a marking step of printing a marking on the surface of the lid substrate by irradiating the thin film formed by the thin film forming step with a laser beam to remove the thin film.

Abstract: A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

Abstract: Provided are a vacuum package and a method for manufacturing the vacuum package having excellent airtightness and capable of improving mounting strength, and a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece. The package includes a base substrate and a lid substrate bonded to each other, a cavity formed between the base substrate and the lid substrate and configured to be capable of sealing a piezoelectric vibrating reed, and penetration electrodes penetrating through the base substrate in the thickness direction so as to make the inner side of the cavity and the outer side conductive. Portions of the base substrate and the lid substrate in the vicinity of the cavity form bonding regions in which the two substrates are bonded. A notch portion through which the bonding surface of the lid substrate is exposed as seen from the thickness direction of the base substrate is formed on the corner portions of the base substrate.

Abstract: A resonator element which can achieve a reduction in size while maintaining vibration characteristics, and a piezoelectric device and an electronic device, are to be provided. A quartz crystal resonator element has a base portion, a pair of arm portions extending from the base portion as a root, and a cut-out portion formed by reducing the width of the base portion in the width direction from each side of the arm portions. The root has a first root portion positioned on a side where the arm portions are opposed to each other, and a second root portion positioned on a side where the arm portions are not opposed to each other, and a relationship between a length A from the first root portion to the second root portion and a length B from the first root portion to an inner end portion of the cut-out portion is A?B.

Abstract: A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.

Abstract: A resonator element includes: a base portion, a first resonating arm that is extended from the base portion along a first direction, and a second resonating arm that is extended from the base portion along a first direction opposite to the first resonating arm, wherein the first resonating arm and the second resonating arm are arranged such that a base end portion of one side resonating arm and a middle portion of the other side resonating arm are arranged in the second direction orthogonal to the first direction.

Abstract: A MEMS device includes a substrate, a cavity formed above the substrate, a first vibrator contained in the cavity, and a second vibrator contained in the cavity and having a natural frequency different from that of the first vibrator. The first vibrator and the second vibrator are preferably arranged along a long side of the cavity having a rectangular shape in plan view.

Abstract: Provided are a method of manufacturing a package capable of forming a penetration electrode without conduction defects while maintaining the airtightness of a cavity, a piezoelectric vibrator manufactured by the manufacturing method, and an oscillator, an electronic apparatus, and a radio-controlled timepiece each having the piezoelectric vibrator. A penetration electrode forming step includes: a penetration hole forming step of forming a penetration hole in a base substrate wafer (first substrate); a first paste material filling step of filling a first paste material in the penetration hole and temporarily drying the first paste material; and a second paste material filling step of filling a second paste material in the penetration hole so as to be overlapped on the first paste material. The first paste material has a viscosity lower than the second paste material.