Abstract: An active inductor oscillator includes a tank circuit for generating a first differential signal, a common-mode inverting differential buffer for generating a second differential signal in response to the first differential signal, and an integrating circuit for generating a third differential signal in response to the second differential signal. The third differential signal is applied to the tank circuit, and lags the first differential signal. A differential transistor pair in the tank circuit provides active inductance in response to the third differential signal, and a cross-coupled transistor pair in the tank circuit provides negative resistance that amplifies the first differential signal in response to the first differential signal. Currents through the tank circuit, buffer, and integrating circuit are essentially identical to one another and move in unison with an externally applied reference current that controls the oscillation frequency.

Abstract: A frequency locked loop (FLL) having an oscillator whose output frequency controls the amount of charge provided by a switched feedback capacitor to a charge integrator whose output voltage controls the frequency of the oscillator. A switched reference capacitor provides a charge to the charge integrator which is a function of a reference frequency, so that the oscillator output frequency is a function of a product of the reference frequency times a ratio of the capacitance of the reference capacitor to the capacitance of the feedback capacitor. Plural reference capacitors, each responsive to a respective reference frequency may be provided so that the oscillator output frequency can be related to the sums or differences of the reference frequencies, the ratios of capacitors, the ratio of the reference voltages or a fixed multiplication factor.

Abstract: A capacitor (200) having an actual physical capacitance value of Cact and is coupled to an oscillator (36). The oscillation frequency of the oscillator (36) can be changed by changing the effective capacitance of the capacitor (200). The actual capacitance (Cact) of capacitor (200) can be altered to appear to be any effective capacitance (Ceff) between zero and a value much greater than Cact by using a Miller effect. In order to alter the effective capacitance of the capacitor (200), a representation of the output osculation signal (16) is provided to a frequency adjust stage (22). The frequency adjust stage either passed the signal (16) with 0.degree. phase shift or with 180.degree. phase shift. In addition to shifting the phase, the stage (22) will amplify or attenuate the signal (16) to result in the phase shifted and amplified/attenuated frequency adjusting signal (24).

Abstract: The phase-locked loop circuit provided by the present invention has a voltage-controlled oscillating circuit that has a nonlinear characteristic representing the relation between the control voltage applied to the voltage-controlled oscillating circuit and the frequency of a signal generated thereby. With a voltage lower than a predetermined voltage V1 applied to the voltage-controlled oscillating circuit, the rate of change in frequency with a change in control voltage applied to the voltage-controlled oscillating circuit is high. As a result, the loop gain of the phase-locked loop circuit can be changed at a high speed. The phase-locked loop circuit is designed so that, when a forcible pulling-in operation is started after the phase locked state is lost due to removal of an input signal, the control voltage applied to the voltage-controlled oscillating circuit is set at a low potential from the beginning in order to increase the loop gain.

Abstract: A magnetic material for microwave, comprising a phase having garnet structure, said phase comprising a component represented by Formula I(A.sub.3-a Bi.sub.a)B.sub.x O.sub.y Formula Iwhere A represents a component comprising at least one element selected from yttrium (Y) and rare earth elements, B represents a component comprising Fe, a represents a number in the range of 0 to less than 2.00, x represents a number in the range of 4.76 to less than 5.00, and y represents a number satisfying an inequality 1.5(3+x).ltoreq.y.ltoreq.12.

Abstract: A phase-locked-loop circuit includes an oscillator having switched capacitors that are selectively coupled to a positive feedback path of the oscillator in a coarse frequency error correction mode of operation. When the frequency error is small, the circuit operates in a fine error correction mode without varying the selection of the switched reactive elements.

Abstract: The output frequency (14) of an oscillator circuit (10) can be controlled by replacing at least one of the reactive components (40), such as a capacitor or inductor, with a synthesized element (22). The synthesized element creates a signal that corresponds to the response of the reactive component it is replacing. The synthesized element may be a current source (44), such as a field effect transistor, that is capable of operating at low voltages.

Abstract: A second order PLL uses on-chip dynamically configurable compensation to permit varying loop bandwidth and damping ratio simultaneously in response to command signals. In a first embodiment, a type 2 PLL is compensated by synthesizing a two-pole lowpass filter, a zero, and a gain-programmable integrator. By appropriate selection of transfer function characteristics associated with each of these three building blocks, the open loop PLL transfer function may be remotely varied by scaling resistance or transconductance. In a second embodiment, a type 2 PLL is compensated using a simple series R-C in parallel with C configuration, wherein component selection results in a transfer function that permits relocation of a zero and a pole by varying a single resistance or transconductance. Such variation is preferably accomplished using ganged banks of resistors, remotely switched by associated metal-on-silicon transistors.

Abstract: An automatic impedance matching apparatus for matching an RF-signal generator to a load, such as a plasma etching chamber, is disclosed. The matching apparatus comprises a matching network having two variable impedance devices, a tune detector for detecting the condition of the impedance match between the RF-signal and the load, and a controller for modifying the values of the variable impedance components in response to the measured tune condition. The present invention disclosed improve reset and convergence unit and eliminates the need for the "dead-band" provided around the matching point found in prior art impedance matching controllers. Also disclosed is an improved adjustment unit for adjusting the variable impedance components which is faster and more stable than found in prior art controllers. Also disclosed is a normalization unit for normalizing the input detection siganls such that variations in turning performance due to variations in input power level from the source are substantially reduced.

Abstract: There is disclosed herein a driver system for an ultrasonic probe for allowing a user to have proportional control of the power dissipated in the probe in accordance with the position of power dissipation controls operable by the user and for automatically tuning upon user request such that the driving frequency is equal to the mechanical resonant frequency of said probe and such that the reactive component of the load impedance represented by said probe is tuned out. The system uses a tunable inductor in series with the piezoelectric crystal excitation transducer in the probe which has a flux modulation coil. The bias current through this flux modulation coil is controlled by the system. It is controlled such that the inductance of the tunable inductor cancels out the capacitive reactance of the load impedance presented by the probe when the probe is being driven by a driving signal which matches the mechanical resonance frequency of the probe.

Abstract: The system uses a tunable inductor in series with the piezoelectric crystal excitation transducer in the probe which has a flux modulation coil. The bias current through this flux modulation coil is controlled by the system. It is controlled such that the inductance of the tunable inductor cancels out the capacitive reactance of the load impedance presented by the probe when the probe is being driven by a driving signal which matches the mechanical resonance frequency of the probe. The resulting overall load impedance is substantially purely resistive. The system measures the phase angle and monitors the power level. The system uses this information to adjust the bias current flowing through the flux modulation coil to maintain the substantially purely resistive load impedance for changing power levels. This information is also used to adjust the frequency of the driving signal to track changing mechanical resonance conditions for the probe at different power levels.

Abstract: In a controlled signal generator or specifically a microwave frequency signal generator, which requires a quieting capacitor, improved switching speed without degrading noise performance is provided by switching out the quieting capacitor during frequency changes, precharging it to the new condition, and then reconnecting it for normal operation. Other error causing current drains are also compensated for.

Abstract: A quartz crystal oscillator is controlled entirely by digital elements to phase lock with a reference square wavetrain by alternately switching the tuning circuit of the oscillator between first and second configurations. The ratio of the times during which the tuning circuit is in its respective configurations is a function of the relative phases of the oscillator output and the reference wavetrain and serves to determine the precise frequency of the oscillator so as to keep its output locked to the phase of the reference wavetrain.

Abstract: Mode locked surface acoustic wave oscillators, configured as comb spectrum generators, are stabilized by means of a variable phase in the closed, oscillation loop, the phase being controlled in response to deviations of the low, pulse repetition frequency from a design reference PRF. The variable phase may be provided by a variable phase device inserted in the oscillatory loop, such as varactor-tuned lumped element delay lines or 90.degree. hybrids, or other devices. Or, the variable phase may be provided by a voltage tunable surface acoustic wave device used as the basic oscillator SAW delay line.