Abstract: Provided are an RF power distribution device and an RF power distribution method. The RF power distribution device includes an impedance matching network for transferring power from an RF power source and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating capacitively-coupled plasma. The power distribution unit includes a first reactive element connected in series to a first electrode, a variable capacitor having one end connected in parallel to the first reactive element and the first electrode and the other end grounded, and a second reactive element having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device are in contact with each other and the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected.

Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.

Abstract: Systems and methods for generating and using characteristics of an impedance matching model with different impedance matching networks are described impedances and/or power efficiencies are measured using a network analyzer or a sensor. The impedances and/or power efficiencies are used to determine the characteristics. With use of different impedance matching networks, the values of the characteristics are changed to achieve same or similar results across different plasma tools for a variety of conditions.

Abstract: A new tuning probe for slide-screw impedance tuners uses a simplified semi-cylindrical tubular form. This ensures reduced manufacturing cost and high machining tolerance for probes using galvanic ground contact. RF performance matches or exceeds traditional cubical probes both using galvanic and capacitive ground contacts.

Abstract: Each of multiple plasma processing chambers has an RF power input line connected to receive RF power from a common RF power source. An RF control module is connected to distribute RF power from the common RF power source to the RF power input lines of the multiple chambers. A voltage sensor and a current sensor are connected to a corresponding RF power input line. Each voltage sensor measures an instantaneous electrical voltage present on its RF power input line. Each current sensor measures an instantaneous electrical current present on its RF power input line. An analog multiplier module is connected to receive as inputs the instantaneous electrical voltage from its corresponding voltage sensor and the instantaneous electrical current from its corresponding current sensor. Each analog multiplier module generates an output signal that indicates an instantaneous RF power present on the corresponding RF power input line of the corresponding chamber.

Abstract: Methods for generating a look-up table relating a plurality of complex reflection coefficients to a plurality of matched states for a tunable matching network. Typical steps include measuring a plurality of complex reflection coefficients resulting from a plurality of impedance loads while the tunable matching network is in a predetermined state, determining a plurality of matched states for the plurality of impedance loads, with a matched state determined for each of the plurality of impedance loads and providing the determined matched states as a look-up table. A further step is interpolating the measured complex reflection coefficients and the determined matching states into a set of complex reflection coefficients with predetermined step sizes.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, a non-transitory computer-readable storage medium, which can include computer instructions to determine a subset of use cases from a group of use cases stored in a memory of a communication device, and to determine a target use case from among the subset of use cases based on an operational parameter associated with a transceiver of the communication device. Additional embodiments are disclosed.

Abstract: A circuit for tuning an impedance matching network is disclosed. The circuit includes a current sensor, a control circuit coupled to the current sensor and a reference current source and a tunable capacitor coupled to the control circuit. The control circuit is configured to generate a control signal based on an output of the current sensor, wherein the control signal is configured to vary a capacitance of the tunable capacitor.

Abstract: An electronic device is provided. The electronic device includes a first antenna radiator operating in at least one frequency band, and at least one second antenna radiator disposed proximate to the first antenna radiator coupled to at least one radiation pattern of the first antenna radiator, and to operate as a parasitic resonator.

Abstract: A high performance integrated tunable impedance matching network with coupled merged inductors. Embodiments include a combination of merged multiport constructively coupled spiral inductors and tunable capacitors configured to reduce insertion losses, circuit size, and optimization time while maintaining a high Q factor for the coupled spiral inductors.

Abstract: Method for performing dynamic impedance matching and communication apparatus thereof are provided. With respect to an operating band of an impedance matching circuit of a communication device, a first number of times of tuning are performed on a first element of an impedance matching circuit, and a second number of times of tuning are performed on a second element of the impedance matching circuit, wherein the first number is different from the second number.

Abstract: An automated “double-decker” slide screw impedance tuner uses two tuning probes, independently movable inside two stacked circular slablines, which lie flat on the bench table. The eccentrically self-rotating disc probes are mounted at the end of rotating radial arm-carriages, the total mechanism operating in a planetary configuration. The radial arms are mounted one above and one below the whole structure. The rotation of the arms control the phase of Gamma and the self-rotation of the disc probes controls the amplitude. The length (footprint) of the tuner, compared with traditional “linear” tuners, is reduced by a factor of 5 to 9, depending of the minimum frequency of operation.

Abstract: An impedance tuner system, usable in a measurement system including at least one measurement system device, the tuner system comprising the impedance tuner having a signal transmission line, and an impedance-varying system coupled to the transmission line, and responsive to command signals to selectively vary the impedance presented by the impedance tuner. An impedance tuner controller is configured to generate the command signals, and wherein measurement device drivers and at least one of characterization, calibration and measurement algorithms are embedded into the tuner controller, the tuner controller configured to allow a user to control execution of said at least one of the characterization, calibration and measurement algorithms using the tuner controller.

Abstract: An apparatus for determining information on a power variation of a transmit signal comprises a power amplifier module, an antenna module and a power variation determining module. The power amplifier module amplifies a radio frequency transmit signal and the antenna module transmits at least partly the amplified radio frequency transmit signal. The power variation determining module determines a weighted sum of a first feedback signal derived from the amplified radio frequency transmit signal and a second feedback signal derived from the amplified radio frequency transmit signal. The first feedback signal and the second feedback signal comprise different dependencies on a varying impedance at the antenna module. Further, the power variation determining module generates a power variation signal based on the weighted sum. The power variation signal comprises information related to a power variation of the amplified radio frequency transmit signal.

Abstract: An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and, the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.

Abstract: In accordance with an embodiment, a switchable capacitance circuit includes a plurality of capacitance-switch cells that each have a capacitance circuit having a capacitance between a first terminal and a second terminal of the capacitance circuit, and a semiconductor switching circuit including a first terminal coupled to the first terminal of the capacitance circuit, a plurality of series connected radio-frequency (RF) switch cells having a load path and a common node. Each of the plurality of series connected RF switch cells has a switch transistor and a gate resistor having a first end coupled to a gate of the switch transistor and a second end coupled to the common node. The switchable capacitance circuit also includes a resistance circuit having a first end coupled to the common node and a second end coupled to a control node.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, a matching network including a tunable reactance circuit configured to be coupled to at least one of a transmitter portion and a receiver portion of a communication device, where the tunable reactance circuit is adjustable to a plurality of tuning states, and where the determination of a tuning state is based on whether detected signal measurements are determined to be invalid and is based on information from at least one of an open-loop or closed-loop feedback configuration of the tunable reactance circuit. Additional embodiments are disclosed.

Abstract: In one embodiment, the invention can be a switching circuit, the switching circuit including a passive switch coupled to a first switch terminal; a driving switch coupled in series with the passive switch and a second switch terminal, the driving switch configured to turn the passive switch on and off; a power source configured to provide power to the passive switch and the driving switch; and a monitoring circuit configured to receive an indication that a switching circuit voltage exceeds a predetermined amount and, in response, reduce the power provided to the driving switch; or receive an indication that a switching circuit current exceeds a predetermined amount and, in response, reduce the power provided to the driving switch.

Abstract: A impedance matching apparatus (100) is provided with: a matching circuit (110) having a plurality of variable reactance elements; an incident signal/reflected signal extracting circuit (120) configured to extract an incident signal and a reflected signal; an estimating device (130) configured to estimate input impedance of a transmitting antenna (11) on the basis of the extracted incident signal and the extracted reflected signal; and a setting device (140) configured to set a value associated with one part of the plurality of variable reactance elements such that output impedance of a power supply (14) theoretically matches the input impedance on the basis of the estimated input impedance, and then adjust a value associated with at least one of the plurality of variable reactance elements according to the extracted reflected signal.

Abstract: A transformer coupled capacitive tuning (TCCT) circuit for an inductively coupled plasma (ICP) chamber includes a matching circuit including a first switched capacitor circuit and a first inductor. The first switched capacitor circuit includes a first terminal, a second terminal, a first capacitor connected to at least one of the first terminal and the second terminal, a second capacitor connected to at least one of the first terminal and the second terminal, and a first switch in communication with at least one of the first capacitor and the second capacitor to vary a capacitance value between the first terminal and the second terminal. A power splitter communicates with the matching circuit and an inductive coil of the ICP chamber.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, a memory, a transceiver, a plurality of antennas coupled with the transceiver, a matching network coupled with at least one of the plurality of antennas, a detector coupled with the matching network where the detector obtains operational data associated with at least two of the plurality of antennas, and a controller circuit coupled with the detector and the matching network. The controller circuit can analyze the operational data to determine an operational data differential between the at least two of the plurality of antennas. The controller circuit selects a use case for the communication device from among a group of use cases stored in the memory based on the operational data differential. Additional embodiments are disclosed.

Abstract: A method and apparatus are for performing antenna matching and include determining a cable connection state of a cable connector, generating a cable detection signal that indicates the cable connection state, and modifying impedance transform of a tunable matching circuit in response to the cable detection signal. The cable detection signal indicates one of a presence and an absence of a cable connector. The tunable matching circuit couples a transceiver and an antenna. The tunable matching circuit couples the selected impedance transform between the transceiver and the antenna. The apparatus is a radio communication device that includes a transceiver, a processing system, an antenna, a tunable matching circuit, an input/output section, a cable connector, and a sensor.

Abstract: A phase-stiff radio frequency power amplifier (RFPA) is disclosed. The high phase-stiffness property of the RFPA obviates the need for a circulator or other isolation device in applications where the RFPA is used to implement the high-power amplifier in a transmit-receive module (TRM) configured for use in a phased array. The phase-stiff RFPA is designed to operate in switch-mode, resulting in high energy efficiency. Together, the high energy efficiency and high phase-stiffness attributes of the RFPA afford the ability to construct a phased array having a SWaP (Size, Weight and Power) performance that far surpasses that which can be possibly achieved in a phased array constructed from conventional TRMs.

Abstract: In an impedance matching device between a power transmission circuit and a power transmission antenna, a storage unit stores tables associated with a load value, each storing control values of a coupling coefficient between the power transmission and reception antennae. A selection unit selects a table corresponding to the load value estimated by the load value estimation unit. An adjustment direction determination unit determines the direction of a position for reading out one of the control values from the selected table. A readout position determination unit determines the position for reading out the control value from the selected table based on the direction and a predetermined step width for shifting the position for reading out the control value. A circuit selection unit electrically connects a matching circuit or the through circuit. A control value output unit outputs the control value at the determined position to the selected circuit.

Abstract: This disclosure relates to real-time calibration of a tunable matching network that matches the dynamic impedance of an antenna in a radio frequency receiver system. The radio frequency receiver system includes two non-linear equations that may be solved to determine the reflection coefficient of the antenna. Control system that calculates, in real time, a value of an input impedance of the antenna to match a load in a receiver system, wherein said impedance is calculated directly using a closed-form solution. The reflection coefficient of the antenna may be used to determine the input impedance of the antenna. The elements of the matching circuit are then adjusted to match the input impedance of the antenna.

Abstract: The embodiments of the present disclosure provide a method for controlling an antenna of a terminal device. The method comprises: acquiring an environmental state parameter of a terminal device; extracting an antenna performance parameter corresponding to the environmental state parameter from a preset antenna performance parameter table; and adjusting an antenna signal of the terminal device using the antenna performance parameter. According to the embodiment of the disclosure, a preferable antenna performance parameter may be obtained by acquiring the environmental state parameter of the location where the terminal device is located, and the antenna is adjusted according to the preferable antenna performance parameter, thereby achieving an intelligent adjustment of the antenna and adapting to the environmental change, thus the antenna is highly practical, strongly adaptive as well as efficient in operation.

Abstract: An impedance matching device includes a first variable capacitor connected to an RF power source and including a first shaft moving linearly, a first linear motion unit axially coupled to the first shaft of the first variable capacitor to provide linear motion, a first insulating joint connecting the first shaft to a first driving shaft of the first linear motion unit, and a first displacement sensor adapted to measure a movement distance of the first driving shaft of the first linear motion unit.

Abstract: An embodiment of the present disclosure provides a circuit including an antenna having a tunable component. The tunable component can be operable to receive a variable signal to cause the tunable component to change a reactance of the antenna. The tunable component can include a first conductor coupled to the antenna, a second conductor, and a tunable material positioned between the first conductor and the second conductor, where at least one of the first conductor or the second conductor, or both are adapted to receive the variable signal to cause the change in the reactance of the antenna. Additional embodiments are disclosed.

Abstract: An intelligent, independent and universal mechanical balancing apparatus for automatic microwave multi-probe slide screw tuners allows stable on-wafer testing of sub-micrometric devices. Low loss rigid airlines (bend-lines) used to connect the multi-probe tuner with the chips, in order to improve the tuning range at the DUT reference plane, causes mechanical movements of the wafer probes attached to the rigid bend-lines, when the tuner mobile carriages move horizontally. Stabilizing the center of gravity (balancing) of the tuner by means of exactly controlled counter-weights, driven by the same firmware which controls the tuner motors, allows for synchronized compensation of the probe movement and safe on wafer load pull operation.

Abstract: A photonic transmitter, comprises a modulator driver having a first and second output ports, a photonic integrated transmitter circuit having a modulator having a first and a second input line, and a first input port electrically coupled with the first input line and a second input port electrically coupled with the second input line, and an interconnect bridge assembly, including a first termination resistor, a second termination resistor, and a substrate. An impedance-controlled transmission structure is formed in the substrate, and has: (a) an impedance control section including a first and a second signal lines electrically insulated from one another; and (b) a transmission section including a third and a fourth signal line coupled with termination resistor. The interconnect bridge assembly transmits an impedance controlled differential electrical signal from the modulator driver to the modulator, and transmits the electrical signal from the modulator to the first and second termination resistors.

Abstract: In an automatic matching unit, a controller includes a first and a second matching algorithm. The operating point Zp is moved stepwise toward the matching point Zs with a relatively large pitch by using the first matching algorithm. Further, when the operating point Zp is within the outer proximity range, the operating point Zp is moved stepwise toward the matching point Zs with a relatively small pitch by using the second matching algorithm. In the second matching algorithm, the operating point Zp is moved close to the third reference line TC1S or TC2S perpendicular to the first or second reference line C1S or C2S along, e.g., the route Zp(7)?Zp(8)?Zp(9) on the impedance coordinates. The coordinates of the operating point Zp(9) reaches an available quasi-matching point ZB extremely close to the origin O (the matching point Zs).

Abstract: Provided is a plasma processing apparatus that performs a processing on a processing target object using plasma. The plasma processing apparatus includes a processing container and a plasma generating mechanism including a high frequency generator disposed outside of the processing container to generate high frequency waves. The plasma generating mechanism generates plasma in the processing container using the high frequency waves and includes: a high frequency oscillator that oscillates the high frequency waves; a power supply unit that supplies a power to the high frequency oscillator; a waveguide path that propagates the high frequency waves oscillated by the high frequency oscillator to the processing container side which becomes a load side; and a voltage standing wave ratio variable mechanism that varies a voltage standing wave ratio of voltage standing waves formed in the waveguide path by the high frequency waves, according to the power supplied from the power supply unit.

Abstract: In an impedance matching device, a storage unit stores a control value representing a load value and a value equivalent to input impedance in advance. The control value identifies inductance and capacitance values matching a predetermined impedance value by use of either a first or second matching circuit. An impedance estimation unit estimates input impedance of the power transmission antenna. The load value estimation unit estimates load value of a circuit connected to a power reception antenna and consuming transmitted electric power. A circuit selection unit electrically connects the first matching circuit, the second matching circuit, or a through circuit per the load value and the input impedance equivalent value. A control value output unit reads out the control value stored in the storage unit based on the load value and the input impedance equivalent value, and outputs the control value to the circuit selected by the circuit selection unit.

Abstract: Single and multi-probe slide screw impedance tuners use a slabline filled with dielectric and the same probe and center conductor as in air. The dielectric filling reduces the overall tuner length by a factor of 1/??r. The increase in loss, and associated reduction in reflection factor, is partly compensated by the shorter size and travel of the probes. A typical length reduction is 40%. Using low loss oil reduces the electric field between probe and center conductor and increases Corona threshold; lubrication of sliding contact between probe and slabline walls and cooling of the center conductor are additional benefits. Probe grounding is established either by adjustable top mounted conductive slabs or spring loaded grounding contact on the probes. The method is most effective for tuners with lowest frequency between 100 and 200 MHz and harmonic tuners with lowest frequency between 200 and 400 MHz.

Abstract: A communication device including a ground plane and an antenna element is provided. An edge of the ground plane is embedded with a notch, which has at least a first edge and a second edge. The antenna element, disposed at the notch, has at least a first operating frequency band and a second operating frequency band. The antenna element includes a first conductive portion and a second conductive portion. The first conductive portion has a starting terminal, electrically coupled to the first edge of the notch through a signal source, as a feeding terminal of the antenna element. A capacitive coupling portion is formed between an end terminal of the first conductive portion and the ground plane. The second conductive portion has a shorting terminal electrically coupled or connected to the second edge of the notch.

Abstract: A circuit for controlling a capacitor having a capacitance settable by biasing, including at least one terminal for receiving a digital set point value depending on the value desired for the capacitance, a circuit for determining a drift of the capacitance with respect to a nominal value, and a circuit of application of a correction to said digital set point value, depending on the determined drift.

Abstract: A continuously manually or remotely adjustable microwave attenuator and linear phase shifter is made using a two section slabline structure in which a “U” formed center conductor forms a line-stretcher to adjust the transmission phase and slivers of ferromagnetic material are inserted into the magnetic field of the slabline, or thin layers of dielectric material are inserted into the electric field serving either way to reducing the amplitude of the transmission factor, or increase the attenuation. The unit is manually or remotely controlled, in which case its transmission behavior can be calibrated on a VNA and used in test software for automated differential load pull operations.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, a non-transitory computer-readable storage medium, which can include computer instructions to determine a subset of use cases from a group of use cases stored in a memory of a communication device, and to determine a target use case from among the subset of use cases based on an operational parameter associated with a transceiver of the communication device. Additional embodiments are disclosed.

Abstract: A method for an antenna mismatch compensation may include determining an amplitude ratio by measuring a ratio of amplitudes of a reflected signal and an incident signal of an antenna tuning circuit coupled to an antenna. A time difference between the reflected signal and the incident signal may be measured. The time difference may be converted to a phase difference. A topology and one or more parameters of the antenna tuning circuit may be determined based on the amplitude ratio and the phase difference so that the antenna tuning circuit compensates for the antenna mismatch.

Abstract: An RF impedance matching network includes an RF input; an RF output configured to operably couple to a plasma chamber; a series electronically variable capacitor (“series EVC”), the series EVC electrically coupled in series between the RF input and the RF output; and a shunt electronically variable capacitor (“shunt EVC”), the shunt EVC electrically coupled in parallel between a ground and one of the RF input and the RF output; a control circuit to control the series variable capacitance and the shunt variable capacitance, wherein the control circuit is configured to determine the variable plasma impedance of the plasma chamber, determine a series capacitance value and a shunt capacitance value, and generate a control signal to alter at least one of the series variable capacitance and the shunt variable capacitance; wherein the alteration is caused by at least one of a plurality of switching circuits.

Abstract: A plasma processing system may include a radio frequency (RF) generator configured to supply a pulsing process signal to a target in a plasma processing chamber via a RF matching network. A phase and magnitude detector circuit is coupled to the RF generator and configured to sense the pulsing process signal and output a magnitude error signal and a phase error signal. A pulse tracking circuit is electrically coupled to the phase and magnitude detector circuit and configured to receive the magnitude error signal and the phase error signal and output a tracked magnitude signal and a tracked phase signal. A match controller is electrically coupled to the pulse tracking circuit and the RF matching network and configured to receive the tracked magnitude signal and the tracked phase signal and vary an impedance of the RF matching network in response to the tracked magnitude and phase signals.

Abstract: A wireless communication device (WCD) having improved tuning abilities is provided. The device comprises an absorption element (AE) connected to an additional antenna (MIMOA). RF power coupled from a main antenna (MA) into the additional antenna (MIMOA) is absorbed instead of being re-emitted into the main antenna (MA) and disturbing measurement of the reflected power level.

Abstract: The present disclosure discusses a power delivery system, and methods of operation, configured to monitor characteristics of a generator, a match network, and a plasma load, via one or more sensors, and control these components via a local controller in order to improve power delivery accuracy and consistency to the plasma load. Control can be based on a unified monitoring of power characteristics in the power delivery system as well as variations between components and even non-electrical characteristics such as plasma density, end point, and spectral components of plasma light emission, to name a few.

Abstract: In one aspect, a system includes a generator configured to generate and tune a frequency of a supply signal. The system includes an auto-matching network configured to receive the supply signal and to generate an impedance-matched signal for use in powering a plasma system. In some implementations, during a first stage of an impedance matching operation, the generator is configured to tune the frequency of the supply signal until the generator identifies a frequency for which the reactance of the generator and the reactance of the load are best matched. In some implementations, during a second stage of the impedance matching operation, the auto-matching network is configured to tune a tuning element within the auto-matching network until the auto-matching network identifies a tuning of the tuning element for which the resistance of the generator and the resistance of the load are best matched.

Abstract: In accordance with this invention the above and other problems are solved by a switching apparatus and method that uses a switching circuit having a pair of parallel solid-state diodes (e.g., PN or PIN diodes), one of which is connected to a transistor (e.g., power MOSFET or IGBT), to switch a capacitor (or reactance element) in or out of a variable capacitance element (or variable reactance element) of an impedance matching network. Charging a body capacitance of the transistor reverse biases one of the two diodes so as to isolate the transistor from the RF signal enabling a low-cost high capacitance transistor to be used. Multiple such switching circuits and capacitors (or reactance elements) are connected in parallel to provide variable impedance for the purpose of impedance matching.

Abstract: Method for performing dynamic impedance matching and communication apparatus thereof are provided. With respect to an operating band of an impedance matching circuit of a communication device, a first number of times of tuning are performed on a first element of an impedance matching circuit, and a second number of times of tuning are performed on a second element of the impedance matching circuit, wherein the first number is different from the second number.

Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.

Abstract: Mechanically short multi-carriage impedance tuners use meandering slabline structures. The meandering structure reduces the overall tuner length by a factor of 2.5 at 0.4 GHz. The critical issue of slabline bends is addressed with several low loss, low reflection alternatives. A preferred configuration comprises a vertical-horizontal slabline transition. Cable connections are discarded because of reflections and insertion loss. Measured results show acceptable performance. The tuner is mostly interesting for relatively lower microwave frequencies, such as 1 GHz.

Abstract: An impedance matching device includes a matching element array unit with a matching element array to which a transmission pulse and a received pulse pass, an extraction/calculation unit extracting pulse information from the transmission pulse and the received pulse, calculating impedance values corresponding to the pulse information, and calculating an impedance value having best response characteristics of the received pulse with respect to the transmission pulse as a matching impedance value, an array control unit routing the matching element array unit according to the matching impedance value, a first converter converting a frequency of the transmission pulse into a carrier frequency and outputting the transmission pulse to the matching element array unit, a second converter converting the carrier frequency into a low frequency, and a converter control unit outputting a signal for controlling the frequency converting of the first converter and the second converter.

Abstract: A method and apparatus for use in a digitally tuning a capacitor in an integrated circuit device is described. A Digitally Tuned Capacitor DTC is described which facilitates digitally controlling capacitance applied between a first and second terminal. In some embodiments, the first terminal comprises an RF+ terminal and the second terminal comprises an RF? terminal. In accordance with some embodiments, the DTCs comprise a plurality of sub-circuits ordered in significance from least significant bit (LSB) to most significant bit (MSB) sub-circuits, wherein the plurality of significant bit sub-circuits are coupled together in parallel, and wherein each sub-circuit has a first node coupled to the first RF terminal, and a second node coupled to the second RF terminal. The DTCs further include an input means for receiving a digital control word, wherein the digital control word comprises bits that are similarly ordered in significance from an LSB to an MSB.