Abstract: Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a single-crystal piezoelectric plate. A back surface of a supported portion of the piezoelectric plate is attached to a surface of the substrate. A portion of the piezoelectric plate forms a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on a front surface of the piezoelectric plate. The IDT includes first and second busbars, and interleaved fingers extending alternately from the first and second busbars. Overlapping portions of the interleaved fingers are disposed on the diaphragm. At least portions of both the first and second busbars are disposed on the supported portion of the piezoelectric plate.

Abstract: An acoustic filter includes a piezoelectric plate on a substrate. Portions of the piezoelectric plate form one or more diaphragms, each diaphragm spanning a respective cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes interdigital transducers (IDTs) of acoustic resonators including a shunt resonator and a series resonator. Interleaved fingers of each IDT are on a diaphragm of the one or more diaphragms. A first dielectric layer with a first thickness is between the fingers of the IDT of the shunt resonator, and a second dielectric layer with a second thickness less than the first thickness is between the fingers of the IDT of the series resonator. The piezoelectric plate and the IDTs are configured such that radio frequency signals applied to the IDTs excite respective primary shear acoustic modes within the diaphragms.

Abstract: Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.

Abstract: A surface acoustic wave filter device uses a Rayleigh wave as a main mode, and includes a ladder type surface acoustic wave filter unit. A thickness of a dielectric layer in a surface acoustic wave resonator configuring a series arm resonator is different from thickness of a dielectric layer in a surface acoustic wave resonator configuring a parallel arm resonator. A propagation orientation of a surface acoustic wave in the surface acoustic wave resonator configuring the series arm resonator is different from a propagation orientation of a surface acoustic wave in the surface acoustic wave resonator configuring the parallel arm resonator.

Abstract: A method of making a resonating beam accelerometer (RBA). In an example process, a proof mass device and resonators are created from a quartz material. A direct bond is formed between the proof mass and the resonators by applying a predefined amount of pressure at a predefined temperature for a predefined amount of time. One or more damping plates are created from a quartz material. A direct bond is formed between the damping plates and the proof mass device. The proof mass device is created by applying a predefined amount of pressure at pressure at temperature to two bases, two proof mass portions, and a flexure. The proof mass bases are on opposite sides of the flexure. The proof mass portions are on opposite sides of the flexure. A gap is present between the proof mass bases and the proof mass portions.

Abstract: A method for manufacturing piezoelectric resonator devices according to the present invention includes the following steps: a wafer forming step of preparing a thick-walled wafer 30 integrally formed with multiple lower lid members 3; a bonding step of bonding crystal resonator plates 2 to one main surface 31 of the wafer 30 via a bonding material 5 and bonding upper lid members 4 on the crystal resonator plates via a bonding material 5; a thinning step of thinning the wafer 30 from the other main surface 37 of the wafer; an external terminal forming step of forming external terminals on the other main surface of the thinned wafer; and a dividing step of cutting the wafer between each adjacent pair of crystal resonators so that multiple crystal resonators are obtained.

Abstract: An elastic wave filter includes a piezoelectric substrate, an input side IDT electrode, an output side IDT electrode, and a reflector. At least one IDT electrode among the input side IDT electrode and the output side IDT electrode is weighted only with a main lobe among an apodized weighting method such that the intersection length becomes short from a part at which one electrode finger is opposed to another electrode finger adjacent to the one electrode finger toward an end portion of the at least one IDT electrode in a propagation direction of an elastic wave. A part with the largest intersection length in the at least one IDT electrode is shifted to any one of one side and another side in the propagation direction of the elastic wave from a center position at the at least one IDT electrode in the propagation direction of the elastic wave.

Abstract: Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

Abstract: A method for producing an electric component including a dielectric layer on a substrate, includes the method steps of applying a metallic layer to the substrate and oxidizing the metallic layer to form a dielectric layer, wherein at least one partial region of the metallic layer is fully oxidized through the entire thickness of the layer.

Abstract: An elastic wave filter device having improved sharpness of filter characteristics includes a longitudinally-coupled resonator-type elastic wave filter section including first to third IDT electrodes each including a plurality of electrode fingers, and first and second reflectors. The first to third IDT electrodes include narrower-pitch portions provided in end portions thereof, which are each adjacent to another IDT electrode in a direction of propagation of elastic waves, each of the narrower-pitch portions having a smaller period of electrode fingers than a period of electrode fingers in the remaining portion of the relevant IDT electrode. The number of electrode fingers in the narrower-pitch portion of the second IDT electrode, which is disposed on the side closer to the first IDT electrode, and the number of electrode fingers in the narrower-pitch portion of the second IDT electrode, which is disposed on the side closer to the third IDT electrode, differ from each other.

Abstract: System and method for enabling the cohabitation of licensed and unlicensed communications devices. A method comprises at a receiver, receiving transmitted data, demodulating the transmitted data to produce spread symbols, despreading the spread symbols to produce received data, wherein the despreading comprises using an orthogonal sequence selected from a list of orthogonal sequences for use by all transmissions in the wireless network, and processing the received data.

Abstract: An acoustic wave resonator includes a piezoelectric body, an IDT electrode for exciting an acoustic wave with wavelength ?, and a dielectric thin film provided so as to cover the IDT electrode. The IDT electrode includes a bus bar electrode region, a dummy electrode region, and an IDT cross region in order from outside. The film thickness of the dielectric thin film above at least one of the bus bar electrode region and the dummy electrode region is smaller than that above the IDT cross region by 0.1? to 0.25?. This configuration provides an acoustic wave resonator that reduces transverse-mode spurious emission.

Abstract: A method of manufacturing a boundary acoustic wave device includes the steps of forming an electrode on a first medium layer, forming a second medium layer so as to cover the electrode on the first medium layer, and forming a sound absorbing layer on an external surface of the second medium layer. The sound absorbing layer has an acoustic velocity of transverse waves that is lower than an acoustic velocity of transverse waves of the second medium layer.

Abstract: Aspects of a method and system for communicating via a spatial multilink repeater are provided. In this regard, a received signal may be frequency shifted to generate a plurality of repeated signals, wherein each repeated signal may be shifted by a different frequency with respect to the received signal. Each repeated signal may comprise one or more signal components and a phase and/or amplitude of each of the components may be controlled to control a directivity of the repeated signals. Each of the repeated signals may be generated by quadrature down-converting said received signal by mixing the received signal with a first LO signal pair, up-converting the down-converted signal by mixing it with a second LO signal pair, and adding or subtracting an in-phase portion and a quadrature-phase portion of the up-converted signal.

Abstract: A ladder filter device includes elastic wave resonators with IDT electrodes. An apodization angle ? in an IDT electrode of a series arm resonator in the ladder filter device falls within a range from about 2° to about 14° with respect to an elastic wave propagation direction. This arrangement provides a ladder filter device that has a smaller insertion loss in a low frequency side portion of a passing band.

Abstract: A heated resonator includes a base substrate, a piezoelectric piece having a thickness and a top side and a bottom side, a first electrode on the top side, a second electrode opposite the first electrode on the bottom side, an anchor connected between the piezoelectric piece and the base substrate, and a heater on the piezoelectric material. A thermal resistor region in the piezoelectric piece is between the heater and the anchor.

Abstract: The present disclosure relates to a two-track surface acoustic wave (SAW) device that has a first SAW track and a second SAW track. The second SAW track may include an interconnecting grating that divides an acoustic cavity of the second SAW track into two acoustic cavities, which are acoustically coupled to one another. The first SAW track and the second SAW track may be electrically coupled to one another transversally via a first re-radiation interconnection and a second re-radiation interconnection. When the two-track SAW device is used in a bandpass filter, by including the interconnecting grating, insertion loss and roll-off response characteristics of the bandpass filter may be improved. Further, in one embodiment of the two-track SAW device, addition of capacitance between the re-radiation connections may improve return loss of the two-track SAW device.

Abstract: An acoustic wave resonator includes a piezoelectric substrate and first and second comb-shaped electrodes provided on the piezoelectric substrate and interdigitating with each other. The first comb-shaped electrode includes a first busbar and first electrode fingers extending in a direction non-perpendicular to a direction in which the first busbar extends. The second comb-shaped electrode includes a second busbar and second electrode fingers extending from the second busbar and interdigitating with the first electrode fingers at an interdigitating region. This acoustic wave resonator can suppress a spurious response due to a transverse mode and has a high Q value.

Abstract: To enhance a heat dissipation property and achieve stabilization of a resonance characteristic in an elastic wave resonator including an IDT electrode weighted so as to have a plurality of apodization local maximum value portions, the elastic wave resonator includes an IDT electrode located on a piezoelectric substrate, the IDT electrode is apodization-weighted so that a plurality of local maximum values occur in apodization in an elastic wave propagation direction, heat dissipation electrodes are provided in at least one apodization local minimum value portion occurring in the elastic wave propagation direction in the IDT electrode, and when it is assumed that direction dimension widths of the heat dissipation electrodes in the elastic wave propagation direction are A and the dimension of about ½ of a wave length of a propagating elastic wave is B, B<A is satisfied.

Abstract: A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.

Abstract: An acoustic wave element includes an IDT electrode in contact with a piezoelectric material and including a plurality of electrode fingers, which include first and second electrode fingers that adjoin each other in an acoustic wave propagation direction and that connect to different potentials and a first dummy electrode finger facing the first electrode finger via a gap located on an outer side in an electrode finger length direction of the first electrode finger. At an area near the gap, first protrusions are provided in at least one of the first electrode finger and the first dummy electrode finger, the first protrusion protruding in the acoustic wave propagation direction from at least one of side edges of the at least one of the first electrode finger and the first dummy electrode finger. The acoustic wave element has greatly improved resonance characteristics of a resonance frequency and prevents short-circuit failure between electrode fingers and degradation in insulation properties.

Abstract: A method of manufacturing a boundary acoustic wave device includes the steps of forming an electrode on a first medium layer, forming a second medium layer so as to cover the electrode on the first medium layer, and forming a sound absorbing layer on an external surface of the second medium layer. The sound absorbing layer has an acoustic velocity of transverse waves that is lower than an acoustic velocity of transverse waves of the second medium layer.

Abstract: An elastic wave device includes a piezoelectric substrate, an IDT electrode located on the piezoelectric substrate, and a capacitive electrode that is located on the piezoelectric substrate and is connected in series with the IDT electrode. The capacitive electrode includes a plurality of capacitive electrode portions, each of which includes a pair of mutually interdigitated comb-shaped electrodes. The plurality of capacitive electrode portions are connected with each other in parallel. The plurality of capacitive electrode portions are arranged such that an intersecting width direction D1 of the capacitive electrode portions is inclined with respect to an intersecting width direction D2 of the IDT electrode. The plurality of capacitive electrode portions are arrayed in an elastic-wave propagating direction D3 of the IDT electrode.

Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.

Abstract: A ladder filter including a series arm resonator and a parallel arm resonator disposed on the same common piezoelectric substrate achieves improved miniaturization. The ladder filter includes series arm resonators and parallel arm resonators, which include elastic wave resonators, and are disposed on the same common piezoelectric substrate, at least one parallel arm resonator of the series arm resonators and the parallel arm resonators includes a first resonator and a second resonator electrically connected in parallel to each other, and the first resonator and the second resonator are arranged in parallel or substantially in parallel in a direction perpendicular or substantially perpendicular to an elastic wave propagation direction, on one side outside one series arm resonator of remaining resonators in the elastic wave propagation direction thereof.

Abstract: In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, the line occupying ratio causing the maximum electromechanical coupling coefficient and the line occupying ratio causing the maximum reflection of the surface acoustic waves in the IDT are different from each other, the center of the IDT has the line occupying ratio causing an increase in electromechanical coupling coefficient in comparison with the edges of the IDT, and the edges of the IDT have the line occupying ratio causing an increase in reflection of the surface acoustic waves in comparison with the center of the IDT.

Abstract: To enhance a heat dissipation property and achieve stabilization of a resonance characteristic in an elastic wave resonator including an IDT electrode weighted so as to have a plurality of apodization local maximum value portions, the elastic wave resonator includes an IDT electrode located on a piezoelectric substrate, the IDT electrode is apodization-weighted so that a plurality of local maximum values occur in apodization in an elastic wave propagation direction, heat dissipation electrodes are provided in at least one apodization local minimum value portion occurring in the elastic wave propagation direction in the IDT electrode, and when it is assumed that direction dimension widths of the heat dissipation electrodes in the elastic wave propagation direction are A and the dimension of about ½ of a wave length of a propagating elastic wave is B, B<A is satisfied.

Abstract: Aspects of a method and system for communicating via a spatial multilink repeater are provided. In this regard, a received signal may be frequency shifted to generate a plurality of repeated signals, wherein each repeated signal may be shifted by a different frequency with respect to the received signal. Each repeated signal may comprise one or more signal components and a phase and/or amplitude of each of the components may be controlled to control a directivity of the repeated signals. Each of the repeated signals may be generated by quadrature down-converting said received signal by mixing the received signal with a first LO signal pair, up-converting the down-converted signal by mixing it with a second LO signal pair, and adding or subtracting an in-phase portion and a quadrature-phase portion of the up-converted signal.

Abstract: It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.

Abstract: Aspects of a method and system for inter-PCB communication utilizing a spatial multi-link repeater are provided. In this regard, a signal may be transmitted between printed circuit boards via one or more repeaters, wherein the repeaters may frequency shift received signals to generate repeated signals. Each of the repeated signals may be generated by quadrature down-converting said received signal by mixing the received signal with a first LO signal pair, up-converting the down-converted signal by mixing it with a second LO signal pair, and adding or subtracting an in-phase portion and a quadrature-phase portion of the up-converted signal. Each repeated signal may comprise one or more signal components and a phase and/or amplitude of each of the components may be controlled to control a directivity of the repeated signals. The repeater may reside on one of the plurality of printed circuit boards.

Abstract: A longitudinally-coupled resonator-type acoustic wave device includes first to third IDT electrodes disposed on a piezoelectric material and first and second reflectors disposed in acoustic wave propagation directions. Each of any two IDT electrodes adjacent to each other in the acoustic wave propagation directions, of the first to third IDT electrodes, has a narrower-pitch electrode finger portion at an edge thereof adjacent to the other IDT electrode. Most portions of the first to third IDT electrodes are apodized, and the narrower-pitch electrode finger portions and the electrode finger portions adjacent thereto are normally shaped.

Abstract: The present invention relates to an integrated dual-track surface-wave filter comprising two input interdigital transducers, an output interdigital transducer, and a shield stripe therebetween, which are integrated on a piezoelectric wafer. The integrated dual-track surface-wave filter is characterized in that the two input interdigital transducers share one output interdigital transducer and one comb-like electrode that has a bus bar arranged at the middle thereof, and in that main lobe regions of apodized envelope curves on the two parallel input interdigital transducers are staggered to be at cross overlapping positions, and in that the bus bar on the common comb-like electrode is segmented to connect respective fingers on the two input interdigital transducers. In this manner, the present invention effectively narrows the chip area occupied, consumes less substrate materials and decreases the volume of the encapsulated enclosure, thereby reducing the manufacture cost effectively.

Abstract: An acoustic wave resonator that is excellent in terms of return loss characteristics at the resonant and anti-resonant frequencies and that is capable of effectively reducing loss includes an IDT electrode in which a plurality of first electrode fingers and a plurality of second dummy electrode fingers are connected to a first common electrode, a plurality of second electrode fingers and a plurality of first dummy electrode fingers are connected to a second common electrode. Apodization weighting is applied in the acoustic wave propagation direction. The metallization ratio of a non-crossing region is relatively high compared with the metallization ratio of a crossing region in the acoustic wave propagation direction.

Abstract: A method of making a resonating beam accelerometer (RBA). In an example process, a proof mass device and resonators are created from a quartz material. A direct bond is formed between the proof mass and the resonators by applying a predefined amount of pressure at a predefined temperature for a predefined amount of time. One or more damping plates are created from a quartz material. A direct bond is formed between the damping plates and the proof mass device. The proof mass device is created by applying a predefined amount of pressure at pressure at temperature to two bases, two proof mass portions, and a flexure. The proof mass bases are on opposite sides of the flexure. The proof mass portions are on opposite sides of the flexure. A gap is present between the proof mass bases and the proof mass portions.

Abstract: An acoustic wave resonator that is excellent in terms of return loss characteristics at the resonant and anti-resonant frequencies and that is capable of effectively reducing loss includes an IDT electrode in which a plurality of first electrode fingers and a plurality of second dummy electrode fingers are connected to a first common electrode, a plurality of second electrode fingers and a plurality of first dummy electrode fingers are connected to a second common electrode. Apodization weighting is applied in the acoustic wave propagation direction. The metallization ratio of a non-crossing region is relatively high compared with the metallization ratio of a crossing region in the acoustic wave propagation direction.

Abstract: To provide a transversal type filter having weighted finger electrodes of at least either of an input IDT and an output IDT provided on a piezoelectric substrate, in which a diffraction of elastic wave output from an end face of the weighted IDT electrode is suppressed, a band width is wide, and a high flatness and a high selectivity are realized. In at least either of an input IDT and an output IDT, an apodized region in which a weighting is performed by using an apodizing method with which an aperture of finger electrodes is continuously changed is formed on a center portion of the electrode with respect to a propagation direction of an elastic wave, and dog-leg regions in which a weighting is performed by using a dog-leg method with which the aperture is made into 1/n by floating electrodes to form n tracks are formed on both sides of the apodized region. Subsequently, finger electrodes in each track of the dog-leg region are further weighted by using the apodizing method.

Abstract: A surface acoustic wave device includes a pair of reflectors and an interdigital transducer having a cross electrode having a interdigitated portion and a dummy portion and a dummy electrode. The dummy electrode has a length different from the length of the dummy portion of the cross electrode arranged adjacent to the dummy electrode.

Abstract: An acoustic wave filter device having a greatly reduced size includes a balance-unbalance conversion function and an input/output impedance ratio of about 1. The acoustic wave filter device includes a second IDT of a first acoustic wave filter portion that is connected to an unbalanced terminal. The second IDT includes first and second divided IDT portions which are divided in an overlap width direction and connected in series with each other between the unbalanced terminal and a ground potential. A fifth IDT of a second acoustic wave filter portion connected to the first acoustic wave filter portion includes first and second divided IDT portions which are divided in an acoustic wave propagating direction. The first and second divided IDT portions of the fifth IDT are connected to first and second balanced terminals, respectively.

Abstract: A method for manufacturing a boundary acoustic wave device prevents formation of discontinuous portions in a dielectric film without a significant decrease in the thickness of an IDT when the dielectric film is formed by deposition and without deterioration of electrical characteristics. The method includes the steps of forming an IDT on a piezoelectric substrate, forming a lower dielectric film so as to cover the IDT, conducting a planarizing step so as to smooth the rough surface of the lower dielectric film, and forming an upper dielectric film so as to cover the lower dielectric film of which the rough surface is smoothed.

Abstract: A method for manufacturing a boundary acoustic wave device includes the steps of preparing a laminated structure in which an IDT electrode is disposed at an interface between first and second solid media and reforming the first medium and/or the second medium by externally providing the laminated structure with energy capable of reaching the inside of the first medium and/or the second medium and thus adjusting a frequency of the boundary acoustic wave device. The above provides a boundary acoustic wave device manufacturing method that enables frequency adjustment to be readily performed with high accuracy.

Abstract: A transversal filter operates using surface acoustic waves and has a piezoelectric substrate and an acoustic track that is arranged on the substrate and in which a first transducer and a second transducer are arranged. Each transducer has electrode fingers. A function, which characterizes the weighting of the overlap length of electrode fingers of different polarity in the second transducer, has a half main lobe and at least one side lobe. The amplitude of the lobes decreases monotonally in a direction that points to the first transducer.

Abstract: The filter includes at least one acoustic track formed on a piezoelectric substrate. At least one SAW input transducer and at least one SAW output transducer are arranged in each track. Each track has a RSPUDT structure and thus a distributed excitation. The excitation function includes sources arranged in a main lobe and a tail function including at least one tail lobe. A fine and precise approximation to the desired continuous excitation function is obtained by decreasing the excitation strength in the tail function by a factor of at least 2.

Abstract: A surface acoustic wave resonator is constructed such that cross widths of an IDT electrode are weighted so that the cross widths are reduced as they move outward in the surface acoustic wave propagation direction, an inner edge of a first bus bar includes inclined portions that are inclined so that the inner edge is spaced a predetermined distance away from an envelope portion adjacent to the first bus bar, an inner edge of a second bus bar includes inclined portions that are inclined so that the inner edge is spaced a predetermined distance away from an envelope portion adjacent to the second bus bar, and the sum N of the numbers of electrode fingers and dummy electrodes that are crossed by a straight line extending from the tip of at least one of the electrode fingers in the surface acoustic wave propagation direction is at least N.

Abstract: An integrated SAW device features an electronic assembly, a SAW device mounted to the electronic assembly, and a heater element on the SAW device to minimize thermal resistance between the SAW device and the heater element.

Abstract: An acoustic cavity of a surface acoustic wave (SAW) architecture is defined on a piezoelectric substrate by two acoustic reflectors are formed on a piezoelectric substrate. The surface acoustic wave architecture may include at least one alpha interdigitated transducer (IDT) at least three beta IDTs which are placed in acoustic series within the acoustic cavity. The alpha IDT is electrically coupled to a first interface. The beta IDTs are coupled in electrical and acoustic series and are associated with a second interface. At least three beta IDTs are adjacent one another. An additional reflector or an alpha IDT may be placed between two of the beta IDTs.

Abstract: A longitudinally-coupled resonator-type acoustic wave device includes first to third IDT electrodes disposed on a piezoelectric material and first and second reflectors disposed in acoustic wave propagation directions. Each of any two IDT electrodes adjacent to each other in the acoustic wave propagation directions, of the first to third IDT electrodes, has a narrower-pitch electrode finger portion at an edge thereof adjacent to the other IDT electrode. Most portions of the first to third IDT electrodes are apodized, and the narrower-pitch electrode finger portions and the electrode finger portions adjacent thereto are normally shaped.

Abstract: A method of manufacturing an acoustic wave device includes forming a first sealing portion on a substrate having an acoustic wave element thereon so that a functional region, in which an acoustic wave oscillates, of the acoustic wave element acts as a first non-covered portion and a cutting region for individuating acts as a second non-covered portion, forming a second sealing portion on the first sealing portion so as to cover the first non-covered portion and the second non-covered portion, and cutting off the substrate and the second sealing portion so that the second non-covered portion is divided.

Abstract: A method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) or insulating base and resonator wafers, wherein resonator anchors, a capacitive air gap, isolation trenches, and alignment marks are micromachined in an active layer of the base wafer; the active layer of the resonator wafer is bonded directly to the active layer of the base wafer; the handle and dielectric layers of the resonator wafer are removed; viewing windows are opened in the active layer of the resonator wafer; masking the single crystal silicon semiconductor material active layer of the resonator wafer with photoresist material; a single crystal silicon resonator is machined in the active layer of the resonator wafer using silicon dry etch micromachining technology; and the photoresist material is subsequently dry stripped.

Abstract: Apparatus, systems, devices and methods for providing an orthogonal frequency coding technique for surface acoustic wave sensors incorporating the use of multiple parallel acoustic tracks to provide increased coding by phase shifting and delaying a code sequence. The surface acoustic wave sensor includes parallel tracks with multiple reflectors with differing delay offsets to form a complex code sequence. The reflectors may be uniform, but alternatively could include fingers withdrawn, have reflector position modulation, differing frequencies or be spatially weighted.

Abstract: A surface acoustic wave filter includes a piezoelectric substrate including lithium niobate, a series resonator including a first interdigital transducer electrode provided on the piezoelectric substrate, and a parallel resonator including a second interdigital transducer electrode provided on the piezoelectric substrate and being electrically connected to the series resonator. An apodized weighting factor of the first interdigital transducer electrode is smaller than an apodized weighting factor of the second interdigital transducer electrode. This surface acoustic wave filter has a small loss.