Cooling By Gas Or Vapor Contact Patents (Class 34/428)
  • Patent number: 9297499
    Abstract: A device for the cryopreservation and/or vitrification of a biological sample in a freezing medium is described. The device preferably comprises a bath for receiving a vessel containing a biological sample in liquid-phase nitrogen. In one example, the bath includes a first member extending generally vertically from a bottom wall portion which divides the interior chamber of the bath into a first sub-chamber adapted for receiving a volume of cryogenic freezing medium and a second or overflow sub-chamber adapted to receive freezing medium from the first sub-chamber. A second member extends generally horizontally between the sidewall portions of the bath and includes at least one opening for receiving a biological sample-containing vessel(s). A kit including a cryogenic storage device and a vessel is also described.
    Type: Grant
    Filed: December 5, 2013
    Date of Patent: March 29, 2016
    Assignee: Cook Medical Technologies LLC
    Inventors: Jorge L. Jimenez-Rios, Bryan D. Woodard, Shawn Nichols, Scott K. Philhower, Barry B. Hoult
  • Patent number: 9211515
    Abstract: Methods and devices are provided for transfer of particulate material, such as biomass feedstocks, into and out of pressurized reactors. Improved sluice devices have an L-shaped sluice chamber having an upper, vertical component in communication with a horizontal loading chamber and a lower component in communication with a vertical reactor inlet or outlet. Piston valves seal the sluice inlet and outlet by axial displacement across the vertical component of the sluice chamber and across the vertical reactor inlet or outlet. Relative to other methods for reactor unloading, these devices consume less steam and significantly reduce furfural content of unloaded, pretreated biomass. An optional hybrid plug/sluice method of biomass feeding using the devices permits biomass loading at sluice pressures intermediate between atmospheric and reactor pressure, thereby reducing “pump cycle” time and increasing biomass throughput capacity.
    Type: Grant
    Filed: August 27, 2010
    Date of Patent: December 15, 2015
    Assignee: INBICON A/S
    Inventors: Jens Fink, Niels Nielsen Poulsen
  • Patent number: 9194627
    Abstract: A liquid collection device for removing a liquid from a catalyst brick is provided and includes a containment vessel having an inner volume and a receiver supported by the containment vessel and in fluid communication with the inner volume, whereby the receiver supports the catalyst brick relative to the containment vessel. The collection device further includes a vacuum source spaced apart from the receiver and in fluid communication with the inner volume. The vacuum source exerts a fluid force on the catalyst brick to draw the liquid from the catalyst brick and into the inner volume.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: November 24, 2015
    Assignee: FCA US LLC
    Inventors: James J Daley, Robert Jerger, Andrew Brocker, Wei-Jun Yang
  • Patent number: 8950081
    Abstract: Methods of removing moisture from a compressor using a sorbent technology are provided. A dehydration device incorporating the sorbent technology is disposed in a system that contains a hygroscopic fluid. By passing the hygroscopic fluid over the sorbent technology, moisture is removed from the hygroscopic fluid. The systems include sealed devices and integral components for heating, ventilation, and air conditioning (HVAC) systems and refrigeration devices.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: February 10, 2015
    Assignee: Emerson Climate Technologies, Inc.
    Inventor: Matthew J. Heidecker
  • Patent number: 8776393
    Abstract: A substrate cooling apparatus is configured to include: a mounting table including a mounting surface for mounting a substrate thereon; a projection provided on the mounting surface for supporting a rear surface of the substrate; a coolant flow path through which a coolant flows, provided in the mounting table for cooling the mounting surface; a plurality of gas discharge ports provided in a circumferential direction at a peripheral edge portion of the mounting surface for discharging a cooling gas for cooling the substrate; a gas suction port provided at a center portion of the mounting surface for sucking the cooling gas; and a groove provided in the mounting surface for diffusing the cooling gas in a circumferential direction of the substrate. The substrate cooling apparatus configured as described above can cool the substrate mounted on the mounting surface with high uniformity.
    Type: Grant
    Filed: October 5, 2010
    Date of Patent: July 15, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Kouichi Mizunaga, Yasuhiro Kuga, Masatoshi Kaneda
  • Patent number: 8695229
    Abstract: A laundry machine, more particularly, a dryer and a control method of a dryer may be disclosed. A control method of a dryer includes (a) of supplying an additive to a drum in an initial part of a drying cycle for drying a drying object; and (b) of supplying an additive to the drum in a last part of the drying cycle.
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: April 15, 2014
    Assignee: LG Electronics Inc.
    Inventors: Chul Jin Choi, Sang Hun Bae, Yang Hwan Kim, Min Ji Kim
  • Publication number: 20140047869
    Abstract: A drum washing machine and a control method thereof. The drum washing machine includes a cabinet, a tub including a first tub part and a second tub part, a drum, an inlet provided at one side of the second tub part and supplying condensed water, and at least one flow path provided on one surface from among the inner surfaces of the second tub part opposite the drum and guiding flow of the condensed water to increase a contact area between the condensed water supplied from the inlet and the second tub part. The drum washing machine improves the structure of the tub to effectively inject condensed water, and may thus increase condensing efficiency. Further, the drum washing machine improves the structures of the tub and the drying duct, and may thus prevent accumulation of lint and lowering of performance of the drum washing machine.
    Type: Application
    Filed: August 14, 2013
    Publication date: February 20, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jin Doo Kim, Jung Hyuk Lee, Kyung Up Lim, Nam Kyu Jun, Yong Sok Lee, Hyung Sub Lim, Min Hee Kang
  • Publication number: 20140007451
    Abstract: A device and method for storing, curing, drying hay and other fibrous plant materials which includes a flexible water impermeable bag, as injection means at one end and an adjustable vent at the opposite end, and preferably spacer means between stacks of baled materials. The bales are progressively loaded at one end as the bag is unrolled and extended progressively laterally for additional bales. After loading, the gas injection and vent means are connected at ends of the bag and are adjusted to generate a back pressure within the bag to partially inflate it. The flowrate of gas or air is adjusted to maintain the temperature within the bales within an optimal range, preferably between ambient temperature and 120 degrees Fahrenheit enabling beneficial curing until sufficient moisture has been removed to prevent mold growth.
    Type: Application
    Filed: July 9, 2013
    Publication date: January 9, 2014
    Inventor: Owen Jackson Brown, JR.
  • Patent number: 8549768
    Abstract: A method for producing a fog of ice nuclei by introducing a cryogenic fluid and a humid gas stream into a freeze dryer. The cryogenic fluid and humid gas stream will form ice nuclei having a preferred size for introduction into vials contained in the freeze dryer.
    Type: Grant
    Filed: March 11, 2011
    Date of Patent: October 8, 2013
    Assignee: Linde Aktiengesellschaft
    Inventors: Prerona Chakravarty, Ron C. Lee
  • Patent number: 8479410
    Abstract: A dryer control method includes: a first dry step of drying a dry item with strong hot wind while tumbling a drum in which the dry item is placed; and a second dry step of drying the dry item with mild hot wind while tumbling the drum. Because the dry process is repeatedly performed on the dry item according to a proposed dry algorithm, the dry item made of wool fiber can be prevented from being shrunken or creased in the dry process.
    Type: Grant
    Filed: June 2, 2009
    Date of Patent: July 9, 2013
    Assignee: LG Electronics Inc.
    Inventors: Ki-Wook Jung, Jun-Seok Lee
  • Patent number: 8458924
    Abstract: The invention relates to a dryer with a housing and a drying chamber for objects to be dried, a process air duct, in which are located a heater for warming the process air and a first fan, a motor for driving the drying chamber, a heat exchanger and a cold air section in the process air duct or in a cooling air duct, with a motor cooling duct which branches off from the cold air section being able to apply cold air to the motor.
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: June 11, 2013
    Assignee: BSH Bosch und Siemens Hausgeraete GmbH
    Inventors: Falk Laube, Holger Löffler, Andreas Ziemann
  • Patent number: 8187387
    Abstract: Disclosed herein are a dryer and a method of controlling a cleaning operation thereof that are capable of supplying moisture into a drying chamber of the dryer to wet contaminants in the drying chamber and blowing air to the wetted contaminants to remove the contaminants. The method includes supplying moisture into a drying chamber to wet contaminants in the drying chamber and removing the contaminants wetted by the moisture.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: May 29, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tai Eun Kim, Jeong Han Kim, Byoung Yull Yang
  • Patent number: 8176654
    Abstract: By a method and a device for preventing corrosion on and in the region of a gas inlet nozzle during nitric acid condensation, contact of the condensing gas with the nozzle and with the surroundings of the nozzle are supposed to be minimized. This is achieved in that the gas inlet nozzle has a sleeve on the inside in the transition region to the interior of the condenser, by which sleeve a gas inlet orifice in the form of an annular gap is formed, whereby the annular space is provided with at least one feed opening for secondary air, so that an enveloping flow of secondary air is produced around the entering NO gas.
    Type: Grant
    Filed: November 21, 2007
    Date of Patent: May 15, 2012
    Assignee: ThyssenKrupp Uhde GmbH
    Inventor: Rainer Maurer
  • Publication number: 20110232124
    Abstract: A drier apparatus for removing water from various materials includes a mixer, drying chamber, separator and regenerator and a method for use of the apparatus. The material to be dried is mixed with a heated media to form a mixture which then passes through the chamber. While passing through the chamber, a comparatively cool fluid is passed generally counter current through the mixture so that the mixture becomes cooler and drier and the fluid becomes hotter and more saturated with moisture. The mixture is then separated into drier material and media. The media is transferred to the regenerator and heated therein by the hot fluid from the chamber and supplemental heat is supplied to bring the media to a preselected temperature for mixing with incoming material to be dried.
    Type: Application
    Filed: December 13, 2007
    Publication date: September 29, 2011
    Inventor: Steve D. Shivvers
  • Publication number: 20110016743
    Abstract: A dryer control method includes: a first dry step of drying a dry item with strong hot wind while tumbling a drum in which the dry item is placed; and a second dry step of drying the dry item with mild hot wind while tumbling the drum. Because the dry process is repeatedly performed on the dry item according to a proposed dry algorithm, the dry item made of wool fiber can be prevented from being shrunken or creased in the dry process.
    Type: Application
    Filed: June 2, 2009
    Publication date: January 27, 2011
    Inventors: Ki-Wook Jung, Jun-Seok Lee
  • Publication number: 20100205821
    Abstract: A system for dehumidifying and drying a powdered or granular material having a drying hopper, a dehumidifying unit, and a circulation route having a processing gas supply route and a processing gas dehumidifying route that interconnect the drying hopper and the dehumidifying unit to allow processing gas to circulate is proposed. The system repeatedly supplies and circulates the processing gas in the circulation route. The processing gas supply route and the processing gas dehumidifying route are interconnected by a bypass route having a regulation valve. A temperature sensor for detecting the temperature of processing gas exhausted from the drying hopper is installed in the processing gas dehumidifying route. The system further has a control means for controlling opening or closing of the regulation valve, provided in the bypass route, based on a temperature detection signal detected by the temperature sensor.
    Type: Application
    Filed: July 31, 2008
    Publication date: August 19, 2010
    Inventors: Hiroshi Tada, Yu Jian Liu, Masaaki Nosaka
  • Publication number: 20090320318
    Abstract: An operating method for a laundry machine capable of efficiently removing dust and start smell from clothes without using washing water and efficiently removing wrinkles from clothes in a convenient manner is disclosed. The operating method for a laundry machine which includes a tub (200) for storing washing water, a drum (300) for acommodating laundry, a steam generator (400) that is supplied with water for generating steam separately from the washing water to supply steam to the laundry and an air supply device (600) for compulsorily supplying air into the drum (300), the operating method including supplying hot air into the drum (300) to increase a temperature of the laundry and an innen temperature of the drum (300) and remove dust or volatile smell particles contained in the laundry, supplying steam into the drum (300) to dissolve non-volatile smell particles and relieve wrinkles of the laundry, and resupplying hot air into the drum (300) to remove moisture and wrinkles from the laundry.
    Type: Application
    Filed: September 6, 2007
    Publication date: December 31, 2009
    Inventors: Pyoung Hwan Kim, Su Hee Shin, Seong Hae Jeong, Young Soo Kim, Deug Hee Lee
  • Publication number: 20080295873
    Abstract: The horizontal drying system for an automatic vehicle washing system of the type comprising at least one first fan adapted to supply at least a first jet of air, has means for moving it along a trajectory represented by an oval cone in the direction transverse to the vehicle.
    Type: Application
    Filed: May 21, 2008
    Publication date: December 4, 2008
    Inventor: Marcelo Elvio DE SILVIO
  • Patent number: 7320183
    Abstract: The invention provides a honeycomb formed structure drying method including causing undried honeycomb formed structures 10 placed on stands 12 to pass through a drying apparatus 1, thereby drying the undried honeycomb formed structures through high-frequency heating, to thereby form dried honeycomb formed structures 11; removing the dried honeycomb formed structures 11 from the stands 12; cooling the stands 12 which have been heated dried in the drying apparatus 1 are cooled to a temperature lower than the gelation temperature of the undried honeycomb formed structures 10; placing newly formed undried honeycomb formed structures 10 on the cooled stands 12; drying the undried honeycomb formed structures by passing through the drying apparatus 1; and repeating these operations. The honeycomb formed structure drying method prevents deformation such as warpage of partition walls of honeycomb formed structures during drying thereof.
    Type: Grant
    Filed: September 2, 2004
    Date of Patent: January 22, 2008
    Assignee: NGK Insulators, Ltd.
    Inventors: Takeyuki Ishii, Yuji Asai, Makoto Nakajo
  • Patent number: 7260901
    Abstract: The invention relates to a device for controlling the temperature of objects, especially for drying or cooling objects, said device comprising a housing containing at least two tempering units which are arranged in a functionally parallel manner. Each tempering unit comprises a tunnel-type usable space in which tempered air is applied to the objects. Said objects can be displaced through the usable spaces by means of a respective transport system. According to the invention, the at least two tempering units are superimposed in the housing essentially above the same base surface.
    Type: Grant
    Filed: June 18, 2003
    Date of Patent: August 28, 2007
    Assignee: Eisenmann Maschinenbau GmbH & Co. KG
    Inventor: Martin Doll
  • Patent number: 7162811
    Abstract: A method for completely drying polished nails without any smudging or nicking. The method utilizes first warm air and then very cold air followed by a brief return to warm air. The warm air of the inital step uses air at a temperature of approximately eighty-five degrees Farenhit for approximately four minutes. The very cold air has a temperature of approximately thirty-five degrees and is blown for approximately two minutes. The last step utilizes the intial heating temperature of eighty-five degrees Farenheit but for only fifteen seconds.
    Type: Grant
    Filed: June 16, 2003
    Date of Patent: January 16, 2007
    Inventors: Diane E. Delaney, Cornelia A. Arndt
  • Patent number: 6877250
    Abstract: In an apparatus for a treatment of a wafer at elevated temperatures, the wafer is taken out of the reactor after heat treatment with the help of a mechanical transport apparatus which preferably grips the wafer around the circumference and on the under side. The transport apparatus includes a wafer surrounding ring. The wafer is placed in a floating wafer reactor where it is cooled in a controlled manner. Transport for further action or treatment then takes place.
    Type: Grant
    Filed: December 10, 2002
    Date of Patent: April 12, 2005
    Assignee: ASM International N.V.
    Inventors: Ernst Hendrik August Granneman, Vladimir Ivanovich Kuznetsov, Gert Jan Snijders
  • Publication number: 20040250443
    Abstract: A method for comletely drying polished nails without any smudging or nicking. The method utilizes first warm air and then very cold air followed by a brief return to warm air. The warm air of the initial step uses air at a temperature of approximately eighty-five degrees Fahrenheit for approximately four minutes. The very cold air has a temperature of approximately thirty-five degrees and is blown for approximately two minutes. The last step utilizes the initial heating temperature of eighty-five degrees Farenheit but for only fifteen seconds.
    Type: Application
    Filed: June 16, 2003
    Publication date: December 16, 2004
    Inventors: Diane E. Delaney, Cornelia A. Arndt
  • Publication number: 20040035019
    Abstract: A condenser of a condensing-type clothes dryer is disclosed, which includes a plurality of condensing ducts provided in a middle portion of a circulation duct, the condensing ducts condensing air being circulated there-through after being discharged from a drum; and a plurality of cooling fins provided to be in contact with an outer surface of the condensing ducts, wherein an interval or a pitch of the cooling fins is different partially according to flow rate of air blown from a cooling fan for a heat-exchange with air flowing through the condensing duct. At this time, the pitch or interval of the cooling fins is narrow at a portion where air blown from the cooling fan flows fast, and the pitch or internal of the cooling fins is wide at a portion where air blown from the cooling fan flows slowly.
    Type: Application
    Filed: April 3, 2003
    Publication date: February 26, 2004
    Inventors: Young Hwan Park, Choon Myun Chung, Mu Yong Choi, Dae Yun Park, Kyung Seop Hong
  • Patent number: 6651358
    Abstract: Heat transfer fluid mixtures and methods of making and using same are presented. The inventive heat transfer fluid mixtures consist essentially of at least one light gas, such as hydrogen, and at least one heavy fluid, such as helium wherein the mixture will not be capable of mixing with air in any proportions to produce a self-sustaining flammable or combustible mixture, or wherein a concentration of hydrogen is sufficient to reduce cost of the mixture to an amount substantially less than cost of pure helium.
    Type: Grant
    Filed: October 31, 2001
    Date of Patent: November 25, 2003
    Assignee: American Air Liquide, Inc.
    Inventor: Frederick W. Giacobbe
  • Publication number: 20030200673
    Abstract: A device for rapidly cooling a semiconductor wafer test/transfer machine. The device includes a body which is provided with an interior gas passage one end of which is connected to a source of clean, dry air or other gas by a tubing. In typical application, the body is rested on the cover of a semiconductor wafer test or transfer machine, typically above or adjacent to the chuck or other wafer holder of the machine, with the other end of the gas passage in contact with the cover. The air or gas flowing through the gas passage impinges against the machine cover and rapidly cools the chuck or other wafer holder.
    Type: Application
    Filed: April 25, 2002
    Publication date: October 30, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co, Ltd.
    Inventors: Pao-Kun Liao, Wen-Tsai Su
  • Patent number: 6622398
    Abstract: A method for processing semiconductor wafers and similar articles has an ozone remover connected to a processing chamber. The ozone remover has a light chamber surrounded by reflectors. Ozone and other processing gases and vapors flow out of the processing chamber and into the light chamber. Ultraviolet lights in the ozone remover flood the light chamber with ultraviolet light, converting ozone into oxygen. The amount of ozone released into the environment is reduced. A recirculation line receives the gases and vapors flowing out of the ozone remover. Oxygen and any remaining ozone are separated from other gas and vapor components and are recycled back to an ozone generator, to increase the ozone generator efficiency in supplying the machine with ozone.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: September 23, 2003
    Assignee: Semitool, Inc.
    Inventor: Ralph Wayne Thomas
  • Patent number: 6595008
    Abstract: A process is provided for the safe storage of sodium percarbonate in a bulk container that is substantially closed to the ambient atmosphere. A temperature is measured at at least one position inside the sodium percarbonate stored in bulk and, with an increase in temperature within the range of 0.5 to 10° C. per day, in particular 1 to 5° C. per day, dry air is passed periodically or continuously through the bulk material until the increase in temperature has fallen to a value of less than 1° C. per day in particular less than 0.5° C. per day.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: July 22, 2003
    Assignee: Degussa AG
    Inventors: Michael Scheibe, Dietmar Träumer, Rainer Kohlen, Wolfgang Leonhardt, Lothar Kaiser
  • Publication number: 20030131495
    Abstract: A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted to cool a substrate positioned proximate the cooling mechanism, and a transfer mechanism adapted to transfer a substrate between the position proximate the heating mechanism and the position proximate the cooling mechanism.
    Type: Application
    Filed: November 12, 2002
    Publication date: July 17, 2003
    Inventors: Ratson Morad, Ho Seon Shin, Robin Cheung, Igor Kogan
  • Publication number: 20030097763
    Abstract: A portable, atmospheric dehydrator and water condenser for dehydrating fruits and vegetables while producing pure atmospheric condensation from humidity found in the air and purifying the water for dispensing and drinking purposes.
    Type: Application
    Filed: June 10, 2002
    Publication date: May 29, 2003
    Inventors: Michael Morgan, Janet Morgan
  • Publication number: 20020178609
    Abstract: Heat transfer fluid mixtures and methods of making and using same are presented. The inventive heat transfer fluid mixtures consist essentially of at least one light gas, such as hydrogen, and at least one heavy fluid, such as helium wherein the mixture will not be capable of mixing with air in any proportions to produce a self-sustaining flammable or combustible mixture, or wherein a concentration of hydrogen is sufficient to reduce cost of the mixture to an amount substantially less than cost of pure helium.
    Type: Application
    Filed: October 31, 2001
    Publication date: December 5, 2002
    Applicant: American Air Liquide, Inc.
    Inventor: Frederick W. Giacobbe
  • Patent number: 6408537
    Abstract: A method and apparatus is disclosed for staging or cooling a substrate between high temperature thermal processing steps. In the disclosed embodiment, one or more cooling stations are located off-line within a wafer handling chamber, outside the thermal processing chamber. After thermal processing, a hot wafer can be loaded on to one station, where the wafer is subjected to forced convection cooling. In particular, the wafer is subjected to cooling gas from above and below through perforated upper and lower showerhead assemblies. The wafer can thus be cooled rapidly on a station while other wafers are transferred into and out of the processing chamber, Desirably, the wafer is cooled on the station to a point at which it can be handled by a low temperature wafer handler and stored in a low temperature cassette.
    Type: Grant
    Filed: May 30, 2000
    Date of Patent: June 25, 2002
    Assignee: ASM America, Inc.
    Inventor: Thomas W. Aswad
  • Patent number: 6405452
    Abstract: A method for drying wafers after a wet bench process is disclosed. In the method, a wafer is first immersed in a volume of DI water held in a container. A mixture of alcohol vapor/inert gas is then flown into the upper portion of the container that is not filled with the volume of DI water at a flow rate of less than 20 l/min. The wafer is then withdrawn from the DI water into the upper portion of the container filled with the alcohol vapor/inert gas mixture and thereby driving DI water molecules off the surface of the wafer without leaving organic residue on the wafer surface.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: June 18, 2002
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Jih-Churng Twu, Ming-Dar Guo, Yu-Chien Hsiao, Chia-Chun Cheng
  • Patent number: 6381873
    Abstract: An method for the formation of coating films on substrates which consists of a main high-temperature and high pressure drying chamber with two additional chambers located in front and behind the working chamber, respectively. The front drying chamber, which is installed between the loading station and the working chamber, is intended for drying the coating films at room temperature, while the rear drying chamber is intended for cooling after drying at high temperature and high pressure in the main working chamber. The front and rear chambers are provided with means for adjusting the respective drying and cooling processes by means of respective heating and cooling systems. This allows initial drying in a wider temperature range and final cooling under most optimum conditions.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: May 7, 2002
    Inventors: Vladimir Peremychtchev, Joseph Kristul, Igor Rakhvalsky
  • Patent number: 6374513
    Abstract: A process for the heat treatment of lignocellulosic material where the material is perheated and dried at a temperature close to the vaporization temperature of water, heated in a reducing atmosphere and cooled by the injection of water vapor.
    Type: Grant
    Filed: September 2, 1999
    Date of Patent: April 23, 2002
    Assignee: Pluri-Capital (PCI) Inc.
    Inventors: Roland Unternhahrer, Cyrille Chautemps, Jean-Pierre Bernon
  • Patent number: 6370796
    Abstract: A cooling system and method are provided for cooling a heater block located in a cylindrical processing chamber of a wafer processing apparatus. The cooling system includes first and second frame assemblies having respective ends adapted to rest on an upper peripheral surface of the processing chamber, and fan assemblies mounted to the frame assemblies at spaced locations therealong. A first pair of fan assemblies are directed to push air into the processing chamber, and a second pair of fan assemblies are directed to pull air out of the processing chamber. The fan assemblies are arranged such that they circulate ambient air through the processing chamber to provide a rapid cooling of the heater block to a safe working temperature. The frame assemblies have an adjustable length that can be adjusted to fit processing chambers having different sizes and configurations.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: April 16, 2002
    Assignees: sony corporation, Sony Electronics, Inc.
    Inventor: Daniel Zucker
  • Patent number: 6351896
    Abstract: A method and apparatus for drying a fiber web, in which the fiber web is dried between two tight bands moving in the same direction and turning around turning rolls. The first band is heated and the second band is cooled by a cooling chamber. The cooling chamber includes at least one cooling element and the cooling element includes at least one inlet chamber and at least one outlet chamber. The fiber web is arranged to run through a drying zone, with at least one felt or wire, such that the fiber web is in contact with the surface of the first, heated band and the felt or wire is between the fiber web and the second, cooled band. The pressure of the cooling element is balanced by a pressure balancing means, and the second band is provided with a hydraulic bearing for allowing the band to slide evenly and with little friction on the cooling chamber.
    Type: Grant
    Filed: August 18, 2000
    Date of Patent: March 5, 2002
    Assignee: Metso Paper, Inc.
    Inventor: Veli-Matti Vainio
  • Patent number: 6345451
    Abstract: Coolant gas recovery and reuse from a heat exchanger is automatically interrupted when the oxygen content of the used gas exceeds a predetermined maximum concentration and is recommenced when the oxygen content falls below a predetermined minimum concentration. The mass flow of coolant gas introduced into the passageway is controlled independently of its composition and, during normal operation, the mass flow ratio of coolant gas withdrawn for recovery to coolant gas introduced into the heat exchanger is maintained constant. This ratio can be ramped up to the constant level in a predetermined manner on start up of fiber cooling and following recovery interruption. The invention provides both methods and apparatus and has particular application to Optical Fiber manufacture.
    Type: Grant
    Filed: March 23, 2000
    Date of Patent: February 12, 2002
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Gregory Khosrov Arslanian, Michael Henry Evans, Joseph Anthony Schillinger
  • Publication number: 20010045024
    Abstract: Method of making safe a heat treatment enclosure operating under a gas atmosphere, the said enclosure comprising a cooling chamber for rapidly cooling a metal strip running from an upstream chamber to a downstream chamber by means of a plurality of guide rollers, wherein said rapid cooling chamber is filled with a controlled atmosphere with a high hydrogen content and said strip is confined within said rapid cooling chamber by means of at least one pressure-balancing duct and of a plurality of gas locks placed between the various chambers, the pressures of the gas atmospheres between the chambers being balanced by means of ducts controlling the flow rates of the gas flowing through the said gas locks.
    Type: Application
    Filed: May 15, 2001
    Publication date: November 29, 2001
    Applicant: Stein Heurtey
    Inventors: Francois Mignard, Runmeng Song, Stephane Mehrain
  • Patent number: 6276072
    Abstract: A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted to cool a substrate positioned proximate the cooling mechanism, and a transfer mechanism adapted to transfer a substrate between the position proximate the heating mechanism and the position proximate the cooling mechanism. The heating mechanism preferably comprises a heated substrate support adapted to support a substrate and to heat the supported substrate to a predetermined temperature, and the cooling mechanism preferably comprises a cooling plate. The transfer mechanism may comprise, for example, a wafer lift hoop having a plurality of fingers adapted to support a substrate, or a plurality of wafer lift pins. A dry gas source may be coupled to the chamber and adapted to supply a dry gas thereto.
    Type: Grant
    Filed: September 15, 1999
    Date of Patent: August 21, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Ratson Morad, Ho Seon Shin, Robin Cheung, Igor Kogan
  • Patent number: 6253464
    Abstract: A system that employs thermophoresis to protect lithographic surfaces from particle deposition and operates in an environment where the pressure is substantially constant and can be sub-atmospheric. The system (thermophoretic pellicle) comprises an enclosure that surrounds a lithographic component whose surface is being protected from particle deposition. The enclosure is provided with means for introducing a flow of gas into the chamber and at least one aperture that provides for access to the lithographic surface for the entry and exit of a beam of radiation, for example, and further controls gas flow into a surrounding low pressure environment such that a higher pressure is maintained within the enclosure and over the surface being protected.
    Type: Grant
    Filed: August 18, 2000
    Date of Patent: July 3, 2001
    Assignee: Euv LLC
    Inventors: Leonard E. Klebanoff, Daniel J. Rader
  • Patent number: 6161309
    Abstract: A cooling unit reduces the temperature of heat shrink tool holders and extensions to ambient temperature. The cooling unit includes a housing with a removable cooling tray. The cooling tray is formed with a plurality of receptacles configured to accommodate a heat shrink tool holder or extension. Additionally, a blower is disposed within the housing for propelling a flow of ambient temperature air over the cooling tray to cool the heat shrink tool holders or extensions to ambient temperature. The blower in the cooling unit may be an axial fan with an axial inlet in fluid communication with the ambient temperature air and a radial outlet to direct the flow of air over the cooling tray. Additionally, the housing may further includes a damper disposed between the radial outlet of the fan and the cooling tray for selectively regulating the flow of air over the cooling tray.
    Type: Grant
    Filed: April 28, 1999
    Date of Patent: December 19, 2000
    Inventor: Harold D. Cook
  • Patent number: 6119368
    Abstract: An improved cool chamber is provided which includes a gas manifold for redistributing the gas flow and reducing the velocity of the gas particles that are directed towards a wafer. The gas manifold has a generally circular body that defines a plurality of outlets. A plurality of tubes, each having a first end and a second end, extend from the body. The first end is coupled to the body at the outlets. A vent diffuser is coupled to the second end of each tube. The vent diffuser includes a sintered gasket for providing point-of-use filtering of the gas and diffusion of the gas. The gas manifold is at a height different from the height of the plane of the wafer. An adapter plate that includes a bypass port is also provided. The bypass port is employed to conduct gas from the gas manifold back into the chamber during de-pressurization.
    Type: Grant
    Filed: April 30, 1998
    Date of Patent: September 19, 2000
    Assignee: Conexant Systems, Inc.
    Inventor: Sean P. Masterson
  • Patent number: 6105274
    Abstract: A process for treating a workpiece. The workpiece is cooled by directing toward the workpiece a material that includes a gas and particles of a material that undergoes a phase change when applied to the workpiece. The gas and the particle material are non-reactive with the workpiece during the cooling.
    Type: Grant
    Filed: March 18, 1999
    Date of Patent: August 22, 2000
    Assignee: International Business Machines Corporation
    Inventors: Arne W. Ballantine, Ronald A. Warren
  • Patent number: 6016410
    Abstract: A fuser, for a reproduction apparatus, having at least one heated fuser roller operating at a setpoint temperature to permanently fix a marking particle image to a receiver member, and a mechanism for controlling temperature droop in the at least one heated fuser roller. The temperature droop controlling mechanism includes an external heat source movable to a position in operative relation with the heated fuser roller and a nonoperative position remote from the heated fuser roller. A logic and control unit regulates heat input to the heated fuser roller, during an idle period, to raise the setpoint temperature for the heated fuser roller a preselected amount relative to the operating temperature set point. At the actuation of the reproduction apparatus job run start, the control unit regulates heat input to the heated fuser roller by the fuser roller heater and the external heat source to raise the fuser operating temperature setpoint a preselected amount relative to the idle temperature setpoint.
    Type: Grant
    Filed: November 20, 1998
    Date of Patent: January 18, 2000
    Assignee: Eastman Kodak Company
    Inventors: Muhammed Aslam, Fangsheng Wu, Robert D. Bobo
  • Patent number: 5981022
    Abstract: A method for drying and/or curing a traveling web including a RF generating means for delivering RF through field and RF stray field to the web to heat the web, air bars to direct air flow to the web for cooling to facilitate emission of moisture therefrom and to avoid blistering due to overheating, an RF field generator to reflect RF energy to the web, and a control system to monitor and to control air temperature and/or flow, RF field strength, and/or web temperature to maintain a balance between heating and cooling to obtain efficient high speed drying while avoiding damage to the web.
    Type: Grant
    Filed: December 11, 1996
    Date of Patent: November 9, 1999
    Assignee: Avery Dennison Corporation
    Inventors: Kyung Min, John E. Johansen
  • Patent number: 5974682
    Abstract: The process system of the present invention has a cooling process portion, a siding portion, and transfer means. The cooling process portion is responsible for applying cooling process to a heated substrate. The siding portion is positioned in an upper side of the cooling process portion and used for temporarily storing the substrate before being subjected to the cooling process. The transfer means loads/unloads the substrate into/from the cooling process portion and the siding portion.
    Type: Grant
    Filed: August 29, 1997
    Date of Patent: November 2, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Masami Akimoto
  • Patent number: 5970717
    Abstract: An apparatus is provided with a cooling unit for cooling a treatment substrate, a supporting body for supporting the treatment substrate before being transferred to the cooling unit and a cooling apparatus for cooling the treatment substrate supported by the supporting body. The apparatus cools the treatment substrate in a position where the treatment substrate stands by before being transferred into the cooling unit and thereafter cools the cooled treatment substrate in the cooling unit, which makes rapid and accurate cooling possible.
    Type: Grant
    Filed: March 12, 1998
    Date of Patent: October 26, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Kiyohisa Tateyama
  • Patent number: 5351749
    Abstract: An arrangement of apparatus and process thereof for cooling hot fluid solid particles, especially hot regenerated catalytic particles are disclosed. The apparatus comprises a substantially vertical, cylindrical and close ended heat removal vessel through the shell sid passage of which is passed the fluid solid particles that flow downwardly in the form of dense phase fluidized bed, and one or more seperate heat exchange tube units through the tube side passage of which the coolant is passed and evaporized, each of said heat exchange tube units comprising a supply coolant inlet tube, a supply coolant collecting chamber, one or more heat exchange tubes, a vapour collecting chamber and a resulting vapour discharge tube, all of which constitute a close type coolant-to-vapour circulation.
    Type: Grant
    Filed: May 27, 1993
    Date of Patent: October 4, 1994
    Assignee: Sinopec Beijing Design Institute
    Inventors: Zhouping Lai, Hongyan Liu, Qiye Yang, Ziliang Liu
  • Patent number: 5345693
    Abstract: Offal material, such as shrimp or crab shells, fish offal, etc, is dried to produce a fine-grained base material or additive for use in foodstuffs and animal fodder by subjecting a starting material in a chamber to a turbulent air current which accelerates the material lumps into various paths of movement. Hereby the material lumps continuously collide with each other, thereby constantly exposing new surfaces or rupture. The chamber is supplied with air, having a temperature which partly depends on the temperature of the starting material and partly depends on the comminution rate, in an amount adjusted according to the amount of starting material introduced per time unit. Hereby it is achieved that free water is immediately removed from the exposed surfaces of rupture by evaporation. By exerting a counter-pressure, the material is retained in the chamber until a desired particle size has been achieved.
    Type: Grant
    Filed: December 3, 1992
    Date of Patent: September 13, 1994
    Assignee: Nutec SpA
    Inventor: Rene Skjold