With Apparatus Using Centrifugal Force Patents (Class 34/58)
  • Publication number: 20100040522
    Abstract: A process for the drying of yellowcake, the yellowcake initially being in the form of a low solids content, uranium rich feed slurry, the process including the stages of: a. dewatering the feed slurry to produce a first dewatered solids cake with a solids content higher than the feed slurry; b. re-slurrying the first dewatered solids cake with sufficient water to dissolve at least some impurities and to produce an intermediate slurry with a solids content lower than the first dewatered solids cake; c. dewatering the intermediate slurry to produce a second dewatered solids cake with a solids content higher than the feed slurry; and d. drying the second dewatered solids cake to produce dried yellowcake.
    Type: Application
    Filed: February 22, 2008
    Publication date: February 18, 2010
    Applicant: ADELAIDE CONTROL ENGINEERS PTY LTD.
    Inventor: Glenn Jobling
  • Patent number: 7627959
    Abstract: A dryer for the removal of moisture or solvents from fine specialty chemicals and pharmaceuticals after their production, comprises a rotating drying compartment (2) which consists of at least one window (3), in operable relationship with an NIR probe (4) for measuring the moisture content of the product such as a specialty chemical or biological pharmaceutical contained in the closed drying compartment. The NIR probe (4) is positioned outside the drying compartment and is oriented through the at least one window (3) toward the product.
    Type: Grant
    Filed: March 9, 2007
    Date of Patent: December 8, 2009
    Assignee: Sanofi-Aventis Deutschland GmbH
    Inventors: Jörg Reinhardt, Burkhard Wandelt, Christoph Naumann
  • Patent number: 7621213
    Abstract: A salad spinner is disclosed, comprising an outer bowl; an inner basket receivable in the outer bowl; a lid placed over the outer bowl; a drive and brake mechanism combination comprising a rotary drive plate, a drive assembly engageable with the rotary drive plate, and a brake assembly; and a foldable handle operatively connected with the drive and brake mechanism combination, wherein the handle is allowed to be folded up to a locked position where the brake assembly interferes with the rotary drive plate to prevent spinning operation of the inner basket, and to be opened to an unlocked position where the brake assembly disengages from the rotary drive plate and manipulation of the handle in a horizontal direction enables the drive assembly to cause rotation of the driving rotation of the rotary drive plate and the inner basket.
    Type: Grant
    Filed: April 30, 2007
    Date of Patent: November 24, 2009
    Assignee: King's Flair Development Ltd.
    Inventor: Sui Wah Wong
  • Patent number: 7618471
    Abstract: A device for recovering liquid droplets from a fluid flow stream including a rotatable element comprising wall elements configured to partially enclose a volume with an annular perimeter wall that includes an inside surface radially offset from and facing an axial center, a fixed base wall supports the rotatable element about the axial center, an input fluid conduit delivers the fluid flow stream into the fluid volume, means for rotating the rotatable element for generating a centrifugal force capable of forming a layer of liquid held by the centrifugal force against the inside surface, and an output liquid conduit disposed to collect liquid from the layer of liquid, wherein the layer of liquid rotates with the inside surface with a tangential velocity vector and the collection aperture is fixed in position opposed to the tangential velocity vector such that liquid in the layer of liquid enters the collection aperture.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: November 17, 2009
    Assignee: Protonex Technology Corporation
    Inventors: William Brown, Peter Rezac, William Skrivan, Oren Bernstein
  • Publication number: 20090249638
    Abstract: An apparatus for separating water from a wet material is provided according to the present invention. The apparatus includes an air lock feeder, a venturi, a plurality of centrifugal accelerators, at least one blower, at least one vapor vent, and at least one product outlet. The air lock feeder is constructed to receive air from a feed blower and move the wet material as entrained material. The venturi is operatively connected to the air lock feeder and is constructed to receive the entrained material and to accelerate the entrained material. The plurality of centrifugal accelerators are operatively connected to the venturi to receive the entrained material and accelerate the flow of the entrained material. The at least one accelerator blower is provided for accelerating the flow of the wet material within the plurality of centrifugal accelerators. The at least one vapor vent is operatively connected to the plurality of centrifugal accelerators for removing water vapor.
    Type: Application
    Filed: April 3, 2009
    Publication date: October 8, 2009
    Inventor: Raymond C. McArthur
  • Patent number: 7596886
    Abstract: In one embodiment of the invention, an apparatus for collecting fluid within a wafer cleaning chamber is provided. The apparatus includes a rotatable annular manifold configured to support a wafer within an inner cavity defined by an inner surface of the annular manifold. The annular manifold includes a channel extending from an inner surface of the annular manifold to a floor of the annular manifold. The floor has at least one opening. The apparatus includes a catch basin having a base with at least one drain. The base has an inner sidewall and an outer sidewall extending therefrom. The catch basin is disposed under the annular manifold to capture fluid dispensed from the at least one opening of the floor of the annular manifold. A spin, rinse and dry module and a method for collecting a fluid delivered to the surface of a rotating wafer are provided.
    Type: Grant
    Filed: December 18, 2002
    Date of Patent: October 6, 2009
    Assignee: Lam Research Corporation
    Inventors: John M. Boyd, Fred C. Redeker
  • Publication number: 20090211460
    Abstract: A bowl and basket assembly kit is disclosed as including an upper basket part (202), a middle basket part (204) and a lower basket part (206) linked with one another and engageable with one another in a way to form a perforated basket (200), an upper bowl part (102), a middle bowl part (104) and a lower bowl part (106) releasably engageable with one another to form a bowl (100) for receiving the perforated basket (200), and an upper locking ring (110) and a lower locking ring (112) which are swivellable about a longitudinal axis (L-L) of the bowl (100), wherein when the upper bowl part (102), middle bowl part (104) and lower bowl part (106) are engaged with one another, each of the locking rings (110, 112) is swivellable between a respective first position in which relative movement between the bowl parts (102, 104, 106) is allowed and a respective second position in which relative movement between the bowl parts (102, 104, 106) is prevented.
    Type: Application
    Filed: November 19, 2008
    Publication date: August 27, 2009
    Inventors: Kwok Kuen SO, Abel Yiu Chung WAN
  • Patent number: 7559155
    Abstract: The invention provides methods and apparatus for drying the backside of semiconductor wafers in a spin-coating environment. Solvent is evaporatively dried from a semiconductor wafer held in a spin mechanism. The undried wafer is sprayed with one or more jets of pressurized gas from gas ports disposed about the spin mechanism.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: July 14, 2009
    Assignee: Texas Instruments Incorporated
    Inventor: David C. Hall
  • Publication number: 20090165326
    Abstract: This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying increases the sample-solute concentration and removes the solvent completely to produce the dried sample as a non-volatile solute precipitate. Re-circulating of drying gas is disclosed along with a solvent cold trap.
    Type: Application
    Filed: February 27, 2008
    Publication date: July 2, 2009
    Inventors: Herbert J. Hedberg, Brian Kangas
  • Publication number: 20090126216
    Abstract: A centrifugal pellet dryer screen (540) especially adapted for drying polymer pellets and micropellets includes an exterior or outer support screen (542), an inner screen (546) of an irregular or rough surface, and an optional middle screen(s) (544) sandwiched between the outer support screen and the inner screen. The screen layers are in intimate contact and the multi-layer screen assembly produces drier pellets and micropellets exiting the dryer. Plugging of the dryer screens and banding of the pellets or micropellets are significantly reduced.
    Type: Application
    Filed: December 20, 2005
    Publication date: May 21, 2009
    Applicant: GAIA INDUSTRIES, INC.
    Inventors: Michael Eloo, J. Wayne Martin, Roger B. Wright
  • Publication number: 20090114104
    Abstract: A drying device having a bowl, a basket with a plurality of perforations, a cover assembly, and a drive assembly. The drive assembly includes: a driving mechanism mechanically coupled to a rotatable lid that is configured to mate with a rotatable basket, and a handle pivotally attached to the cover assembly. The handle is configured to actuate the driving mechanism upon rotation of the handle about an axis from a first position to a second position. The drying device may also include a locking mechanism and/or a braking mechanism.
    Type: Application
    Filed: October 30, 2008
    Publication date: May 7, 2009
    Inventors: Ravi Kumar Sawhney, Kurt Gregory Botsai, John Mark Vernon, Christopher Glupker, Simon Risley, Sanjay Choudhuri, Jason Alan Dimas Rico, Patrice Gerber
  • Publication number: 20090113754
    Abstract: The present invention refers to a process for drying solid organic substances in aqueous phase including the steps of: feeding a continuous flow of such organic substances having a water content=50% by weight into a turbodrier having a cylindrical tubular body with horizontal axis, equipped with inlet and outlet openings, a heating jacket for bring the inner wall of the tubular body to a predetermined temperature, a bladed rotor extending inside the cylindrical tubular body (1) where it is made to rotate at speeds between 15 and 40 m/s, so as to disperse the continuous flow of organic substances into a flow of particles of organic substances; centrifuging the particles of organic substances against the inner wall of the turbodrier heated to a temperature above 130° C.
    Type: Application
    Filed: September 27, 2007
    Publication date: May 7, 2009
    Applicant: GEOLINE S.R.L.
    Inventor: Guiseppina Cerea
  • Publication number: 20080295353
    Abstract: In a factory that uses a large number of containers, it is necessary to ensure an installation location for a container washing device that is absolutely necessary as a preprocess for a container drying device. A container washing and centrifugal drying device has an exterior section having a door section, and having a container washing and centrifugal drying unit that comprises a turntable on which tacked containers are placed inside the exterior section, each of two columns erected at opposing position the same distance from the rotational center of the turntable on an upper part of the turntable, a clamp opening and closing cylinder for opening and closing clamp sections, and a plurality of washing tubes provided in a vertical direction at substantially equal intervals in a circumferential direction on the outer periphery spaced apart from the turntable, each of the washing tubes being provided with a plurality of washing nozzles at equal intervals in the vertical direction facing inwards.
    Type: Application
    Filed: April 17, 2008
    Publication date: December 4, 2008
    Applicant: MISUZU KOKI COMPANY LIMITED
    Inventor: Makoto Ogawa
  • Patent number: 7448315
    Abstract: A device for drying food is disclosed in an embodiment as a container including a bowl having a side wall terminating at a top edge defining an opening and a cover substantially covering the opening; a basket assembly disposed in the bowl and rotatable relative to the container about an axis at a variable rate of rotation, the basket assembly including a basket having a side wall terminating at a top edge; and a lid, the lid being releasably coupled to the basket and the cover.
    Type: Grant
    Filed: March 17, 2005
    Date of Patent: November 11, 2008
    Assignee: Helen of Troy Limited
    Inventors: Paul Mulhauser, Rebecca Taylor
  • Publication number: 20080210103
    Abstract: A food processing device, e.g. a salad spinner, has a housing with a lid, a basket supported in the housing for rotation, and a drive mechanism supported by the lid for rotating the basket to spin water from salad in the housing. The drive mechanism has a crank handle and a drive transmission system coupling the handle to the basket to transmit a rotational driving force from the handle to rotate the basket. The drive transmission system has a first rotary gear arranged to receive the rotational driving force from the handle and a second rotary gear in driving engagement with the first gear for receiving the rotational driving force from the first gear to rotate the basket. The first and second gears have corresponding serial formations, e.g., recesses and protrusions, of respective circular cross-sections that are inter-engageable, one in the other, for transmission of the driving force.
    Type: Application
    Filed: February 26, 2008
    Publication date: September 4, 2008
    Inventors: Yiu Chung Wan, Lance Logan Hood
  • Publication number: 20080189975
    Abstract: When chuck pins are in a releasing state, support pins for supporting a lower surface of a substrate at respective heights different from each other support the substrate in an inclined position. When the chuck pins are in a gripping state, substrate gripping parts grip a substrate sidewise to separate the substrate upwardly from a substrate rest part, thereby holding the substrate in a horizontal position at a predetermined gripping height. After a liquid mass covering the substrate is formed, the chuck pins are changed from the gripping state to the releasing state to support the substrate having been gripped in the horizontal position into an inclined position, thereby draining the liquid mass from the surface of the substrate. The substrate with the liquid mass drained from the surface thereof is held and rotated in a horizontal position. Thus, the substrate is dried.
    Type: Application
    Filed: January 29, 2008
    Publication date: August 14, 2008
    Inventor: Katsuhiko MIYA
  • Publication number: 20080128085
    Abstract: According to the present invention, when performing spin treatment on a square wafer for a solar battery, it is possible to prevent the treatment medium, which is caused to flow down onto the surface of the wafer and scattered to the outside of the wafer from the four sides thereof in droplets, from reaching the back surface of the wafer.
    Type: Application
    Filed: December 1, 2004
    Publication date: June 5, 2008
    Applicant: MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.
    Inventors: Masato Tsuchiya, Syunichi Ogasawara
  • Publication number: 20080120864
    Abstract: A method of cleaning a solids outlet assembly of a material dryer including attaching a plurality of pulse nozzles to at least one surface of the solids outlet assembly, accumulating a solid material onto the at least one surface thereby forming an accumulated solid, and actuating periodically the plurality of pulse nozzles to discharge air bursts that dislodge and remove the accumulated solid from the at least one surface is disclosed.
    Type: Application
    Filed: February 6, 2008
    Publication date: May 29, 2008
    Applicant: M-I LLC
    Inventors: Tony Clarke, Richard Bingham
  • Publication number: 20080115380
    Abstract: A laundry apparatus according to the present invention ensures an improved laundry drying efficiency. In the laundry apparatus, an air guide (71) is provided on an upper edge portion of an outer tub opening (4a) as being opposed to an air inlet (6). Drying air flowing downward from the air inlet (6) to be supplied to the outer tub opening (4a) impinges on an inclined wall (72) of the air guide (71). The drying air impinging on the inclined wall (72) is deflected into a drum (5) through a drum opening (5a) (as indicated by a broken-line arrow). Thus, the drying air is prevented from further flowing downward in the outer tub opening (4a) into a gap (70) defined between the outer tub (4) and the drum (5), but supplied to laundry in the drum (5).
    Type: Application
    Filed: November 16, 2007
    Publication date: May 22, 2008
    Applicants: SANYO ELECTRIC CO., LTD., Sanyo Electric Techno Create Co., LTD.
    Inventors: Masafumi Nishino, Kazushige Murakami, Mitsuru Naganawa
  • Publication number: 20080052947
    Abstract: After rinsing, a liquid mixture (IPA+DIW) is supplied to a substrate surface while rotating a substrate at a first rotating velocity which is relatively high to thereby replace the rinsing liquid adhering to the substrate surface with the liquid mixture. In this way, the rinsing liquid adhering to the gaps between the patterns formed on the substrate surface is replaced with the liquid mixture. Subsequently, DIW is supplied to the substrate surface in a condition that the rotation of the substrate is stopped or that the substrate is rotated at a second rotating velocity which is relatively low to thereby form a puddle-like liquid layer with DIW. In this way, the liquid mixture of the surface layer part is removed from the substrate surface while leaving almost all the liquid mixture adhering to the gaps between the patterns. After that, the liquid layer is removed from the substrate surface to thereby dry the substrate surface.
    Type: Application
    Filed: August 13, 2007
    Publication date: March 6, 2008
    Inventor: Katsuhiko Miya
  • Publication number: 20080052948
    Abstract: A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
    Type: Application
    Filed: August 30, 2007
    Publication date: March 6, 2008
    Inventors: Hyun Jong Kim, Ju Won Kim, Jung Keun Cho
  • Patent number: 7337712
    Abstract: A vessel for separating and collecting excess oil from deep fried foods disposed therein before the deep fried foods are sauted. A colander is rotatably mounted in a pot and holds the fried foods. A gear train operatively connects a motor to the colander. The motor is operatively connected to, and rotates, the colander to centrifugally force the excess oil from the deep fried foods out therefrom and collect in the pot. A handle is replaceably attached to the pot by apparatus that utilizes the weight of the handle to prevent the handle from detaching from the pot.
    Type: Grant
    Filed: March 1, 2004
    Date of Patent: March 4, 2008
    Inventors: Franklin Wang, Rosaline K. Wang
  • Patent number: 7325329
    Abstract: A salad spin-drier with a bowl of glass or ceramic so that part of the water collection bowl, which until now has been purely functional, may be simultaneously used as a serving bowl for the salad. The salad bowl as is standard apart from the bowl has a lid in which a drive mechanism having a rotary drive plate with a cord drum and a pull cord may be set into rotational movement by a pull grip. The rotary drive plate with tabs engages into suitable ribs on the spin-drier basket. The spin-drier basket has a bearing recess which rests on a bearing cam. The bearing cam is separated from the bowl centrally on a plate. The bowl has a planar inner base on which the plate rests, and by way of an abutment edge limiting the plane base one achieves a central mounting of the plate. For the simplified removal of the plate these may have suitable openings easier gripping. A rubber-elastic rest is on the underside of the plate and serves as scratch-protection and slip-protection.
    Type: Grant
    Filed: July 21, 2005
    Date of Patent: February 5, 2008
    Assignee: MOHA Moderne Haushaltwaren AG
    Inventor: Bruno Herren
  • Publication number: 20070256315
    Abstract: A salad spinner is disclosed, comprising an outer bowl; an inner basket receivable in the outer bowl; a lid placed over the outer bowl; a drive and brake mechanism combination comprising a rotary drive plate, a drive assembly engageable with the rotary drive plate, and a brake assembly; and a foldable handle operatively connected with the drive and brake mechanism combination, wherein the handle is allowed to be folded up to a locked position where the brake assembly interferes with the rotary drive plate to prevent spinning operation of the inner basket, and to be opened to an unlocked position where the brake assembly disengages from the rotary drive plate and manipulation of the handle in a horizontal direction enables the drive assembly to cause rotation of the driving rotation of the rotary drive plate and the inner basket.
    Type: Application
    Filed: April 30, 2007
    Publication date: November 8, 2007
    Inventor: Siu Wah Wong
  • Patent number: 7228645
    Abstract: A shower head processes a wafer with a plate having a plurality of nozzles positioned thereon, each of the nozzles assigned to one of a plurality of processing zones for the wafer; and a manifold assembly coupled to each of the nozzles to control one or more of the nozzles as a group in each processing zone.
    Type: Grant
    Filed: January 11, 2005
    Date of Patent: June 12, 2007
    Inventor: Xuyen Ngoc Pham
  • Patent number: 7171720
    Abstract: The invention relates to a device for expelling liquid from a wiping element which is held on a wiping head of a surface cleaning device so as to form a wiping surface, comprising a container, in which a wiping element holding device accommodating the wiping element as well as a driving device are arranged, wherein the wiping element holding device can be driven by means of the driving device so as to rotate about an axis of rotation. In order to further develop the device in such a manner that it has a lower consumption of energy it is suggested in accordance with the invention that the wiping element holding device form a receiving means, into which the wiping element can be inserted with a surface normal of the wiping surface aligned at an angle to the axis of rotation.
    Type: Grant
    Filed: November 15, 2004
    Date of Patent: February 6, 2007
    Assignee: Alfred Kaercher GmbH & Co. KG.
    Inventors: Hendrik Rust, Yunus Demirtas, Ronald Schwarz
  • Patent number: 7127828
    Abstract: A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.
    Type: Grant
    Filed: March 12, 2002
    Date of Patent: October 31, 2006
    Assignee: Semitool, Inc.
    Inventors: Robert Weaver, Ronald Schlagenhauser
  • Patent number: 7111546
    Abstract: A salad spinner for drying food articles and household items includes a transparent bowl and a perforated basket disposed in the bowl. The basket further includes a cylindrical wall connected to a bottom wall of the basket and disposed at its center. The salad spinner further includes a drive assembly attachable to the cylindrical wall of the basket for spinning the basket relative to the bowl whereby water on the food articles is passed through the perforated wall of the basket and displaced to the bowl.
    Type: Grant
    Filed: July 19, 2004
    Date of Patent: September 26, 2006
    Assignee: Lifetime Brands, Inc.
    Inventors: Jeffrey Siegel, William J. Lazaroff
  • Patent number: 7103990
    Abstract: It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments. According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: September 12, 2006
    Assignee: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Yasuyuki Shirai, Takumi Fujita, Yukio Minami, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada
  • Patent number: 7100304
    Abstract: An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: September 5, 2006
    Assignee: Akrion Technologies, Inc.
    Inventors: Jeffrey M. Lauerhaas, Thomas J. Nicolosi, Jr., Paul Mertens, William Fyen
  • Patent number: 7080463
    Abstract: A salad spinner and mixer may be made from two substantially identical transparent bowls that can be joined together at their rims to define a chamber; two substantially identical colanders that can be joined together at their rims and received within the chamber; and a bifurcated base that has a spindle on each of two parallel upstanding portions. When the spindles are received within dimples on the bottoms of the bowls, the bowl and colander assembly can be spun about an axis defined by the spindles to remove water from the salad ingredients. The bowl assembly, used without the colanders, can also be use to mix salad dressing with salad ingredients. The resultant salad can be served in one of the bowls. Moreover, the bifurcated base can serve as a napkin holder.
    Type: Grant
    Filed: August 4, 2004
    Date of Patent: July 25, 2006
    Inventor: Robert A Johnson
  • Patent number: 7028415
    Abstract: A drying apparatus for use with many kinds of objects, but is particularly suited for use in drying most kinds of produce and vegetables including leaf vegetables. In one embodiment, the dryer includes a canted drum design which provides a number of benefits and advantages over prior art designs. The canted design allows the use of a spin drying method that breaks up clumps of material in the dryer and assists in the even distribution of material, thereby improving load balance. The canted design provides ergonomic advantages to the operator when loading and unloading the dryer, and, the canted design allows easy access to the drive system for maintenance and repairs.
    Type: Grant
    Filed: April 5, 2004
    Date of Patent: April 18, 2006
    Inventors: Alan Heinzen, Erick A. Davidson
  • Patent number: 7002134
    Abstract: A dryer lid/robot collision prevention system which prevents inadvertent collision of a spin dryer lid with a transfer robot as the robot approaches and loads wafer-containing cassettes into the spin dryer. The system includes at least one, and typically, a pair of photoelectric sensors mounted on an inner wall behind the spin dryer lid. Each of the photoelectric sensors is electrically connected to a relay circuit which activates a cylinder sensor in the spin dryer in the event that the photoelectric sensors sense the normal position of the open spin dryer lid. The cylinder sensors activate a PLC module, which activates the cassette cradles in the spin dryer. Finally, the activated mode of the cassette cradles signals the transfer robot to approach and load the wafer cassettes into the cassette cradles. The system may include a bypass switch for bypassing the system, as desired.
    Type: Grant
    Filed: May 9, 2003
    Date of Patent: February 21, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yao-Tsung Chu, Chih-I Fang
  • Patent number: 6993854
    Abstract: A centrifugal dryer of the present invention includes: a chamber for performing drying processing for plural substrates; a cradle, installed inside chamber, and drying plural substrates by rotation driving in a state of being held therein; and an elastic wave sensor for detecting an elastic wave generating upon striking of a chip from plural substrates to said chamber during the processing therefor.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: February 7, 2006
    Assignees: Renesas Technology Corp., Mitsubishi Electric Engineering Company Limited
    Inventors: Hirotoshi Ise, Toshiki Oono, Tatsuo Mizuno
  • Patent number: 6988327
    Abstract: A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: January 24, 2006
    Assignee: Lam Research Corporation
    Inventors: James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker, Carl Woods
  • Patent number: 6938357
    Abstract: An improved centrifugal pellet dryer that employs forced air in the direction opposite that of the pellet travel through the dryer. The air may be preheated depending on the particular product. The resulting airstream reduces water spray and lowers the humidity level of the air in the dryer system. The airstream exits the dryer at or below the lower level of the rotor, thus providing increased exposure to the airflow. The result is enhanced drying effectiveness and increased dryer capacity.
    Type: Grant
    Filed: September 9, 2003
    Date of Patent: September 6, 2005
    Assignee: Carter Day International, Inc.
    Inventor: David Hauch
  • Patent number: 6928751
    Abstract: An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.
    Type: Grant
    Filed: June 12, 2002
    Date of Patent: August 16, 2005
    Assignees: Goldfinger Technologies, LLC, Interuniversitair Microelektronica Centrum (IMEC)
    Inventors: Chad M. Hosack, Jeffrey M. Lauerhaas, Mario E. Bran, Raoul Standt, Paul Patel, Yi Wu, Geert Doumen, Paul Mertens
  • Patent number: 6899021
    Abstract: A salad shaker having a lower part of a container and a cover which is placed on the cover and has a cable pull drive by which the salad sieve can be rotated. The drive is connected to a rotating plate by a free-running device which acts on both sides, and enables the rotational direction of the salad sieve to be charged in a spring-biased manner. The repeated change in rotational direction causes the shaking efficiency to be significantly improved. The restoring force of the inventive spring automatically reels in the cable and holds the handle in a desired position on the cover in a spring-biased manner. The drive of this invention can also be used in handle-operated salad shakers.
    Type: Grant
    Filed: September 2, 2002
    Date of Patent: May 31, 2005
    Assignee: Moha Moderne Haushaltwaren AG
    Inventor: Hansjürgen Riede
  • Patent number: 6892472
    Abstract: A method and apparatus for rinsing and spin-drying a hydrophobic material such as a hydrophobic semiconductor wafer improves wafer drying while at the same time reduces the formation of residual contaminants on the dried surface of the wafer. This is accomplished by first establishing a safe-zone between a minimum rotational speed above which drying proceeds satisfactorily and a maximum rotational speed above which contaminants dry on the wafer's surface. A spin-rate profile can then be adopted such that the rinse/dry process proceeds within the safe zone.
    Type: Grant
    Filed: March 18, 2003
    Date of Patent: May 17, 2005
    Assignee: Novellus Systems, Inc.
    Inventor: Justin M. Quarantello
  • Patent number: 6848194
    Abstract: An apparatus for spin drying a semiconductor wafer includes a hollow core spindle and a chuck assembly having grippers for supporting a wafer at an edge thereof. A sleeve is disposed in the central opening of the spindle and a manifold is disposed in the upper end of the sleeve. A capacitance sensor is affixed to the manifold. In another apparatus, an arm having a capacitance sensor mounted thereon is positioned such that the capacitance sensor is disposed above a space to be occupied by a wafer that is supported by the grippers. An additional apparatus includes an arm having a light source and a detector mounted thereon. The light source directs light toward a surface of a wafer such that light that reflects off of the surface is substantially perpendicular to that surface. The detector is positioned to measure the intensity of the reflected light.
    Type: Grant
    Filed: January 28, 2003
    Date of Patent: February 1, 2005
    Assignee: Lam Research Corporation
    Inventor: Randolph E. Treur
  • Patent number: 6837969
    Abstract: A method for the concentration of liquid mixtures includes the step of causing a continuous stream of the liquid mixtures to flow in the form of a turbulent thin layer in contact with a heated wall; for that purpose, a continuous stream of liquid mixture is fed into a turbo-concentrator including a cylindrical tubular body (1), a heating jacket (4) and a bladed rotor (8) rotatably supported in the cylindrical tubular body (1), and is centrifuged to form a dynamic and tubular thin layer, the thin layer advancing inside the cylindrical tubular body (1) then being discharged continuously in the form of a stream of concentrated liquid mixture.
    Type: Grant
    Filed: October 17, 2000
    Date of Patent: January 4, 2005
    Assignee: Vomm Chemipharma S.r.l.
    Inventor: Corrado Vezzani
  • Patent number: 6834440
    Abstract: An apparatus for drying a wafer includes a rotating chuck configured to rotate the wafer. A movable de-ionized water supply member and an organic solvent supply member are positioned adjacent a face of the wafer. The de-ionized water supply member supplies de-ionized water onto the wafer, and the organic solvent supply member has a plurality of solvent supply nozzles disposed to supply an organic solvent onto the wafer. The organic solvent supply member includes a first solvent supply member and a second solvent supply member. The de-ionized water supply member and the first solvent supply member move radially between a position adjacent the central portion of the wafer and the edge portion of the wafer.
    Type: Grant
    Filed: May 13, 2003
    Date of Patent: December 28, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Keum-Joo Lee
  • Patent number: 6827092
    Abstract: An apparatus for preparing a wafer is provided. The apparatus includes a wafer backside plate and a central shaft. The wafer backside plate has a top surface that includes a cylindrical edge lip, which defines a central aperture. The central shaft is designed to fit within the central aperture. The wafer backside plate is designed to automatically slide between an up position during rotational wager processing and a down position when the wafer is not in rotational wafer processing. A gap defined between the top surface of the wafer backside plate and the wafer is less when the wafer backside plate is in the up position than when the wafer backside plate is in the down position.
    Type: Grant
    Filed: December 22, 2000
    Date of Patent: December 7, 2004
    Assignee: Lam Research Corporation
    Inventors: Stephen M. Smith, Randolph E. Treur
  • Publication number: 20040211081
    Abstract: A drying apparatus for use with many kinds of objects, but is particularly suited for use in drying most kinds of produce and vegetables including leaf vegetables. In one embodiment, the dryer includes a canted drum design which provides a number of benefits and advantages over prior art designs. The canted design allows the use of a spin drying method that breaks up clumps of material in the dryer and assists in the even distribution of material, thereby improving load balance. The canted design provides ergonomic advantages to the operator when loading and unloading the dryer, and, the canted design allows easy access to the drive system for maintenance and repairs.
    Type: Application
    Filed: April 5, 2004
    Publication date: October 28, 2004
    Inventors: Alan Heinzen, Erick A. Davidson
  • Publication number: 20040181965
    Abstract: A method and apparatus for rinsing and spin-drying a hydrophobic material such as a hydrophobic semiconductor wafer improves wafer drying while at the same time reduces the formation of residual contaminants on the dried surface of the wafer. This is accomplished by first establishing a safe-zone between a minimum rotational speed above which drying proceeds satisfactorily and a maximum rotational speed above which contaminants dry on the wafer's surface. A spin-rate profile can then be adopted such that the rinse/dry process proceeds within the safe zone.
    Type: Application
    Filed: March 18, 2003
    Publication date: September 23, 2004
    Inventor: Justin M. Quarantello
  • Patent number: 6763605
    Abstract: A vertical, centrifugal separator used for drying drill cuttings prior to transport or further processing. The separator is adapted to receive scavenged heat from any source and is further adapted to include internal conveyers, thereby lowering the overall operating profile and providing increased cuttings retention time within a heated environment.
    Type: Grant
    Filed: May 31, 2002
    Date of Patent: July 20, 2004
    Assignee: Baker Hughes Incorporated
    Inventor: Jeffrey Reddoch
  • Patent number: 6754980
    Abstract: An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.
    Type: Grant
    Filed: June 12, 2002
    Date of Patent: June 29, 2004
    Assignee: Goldfinger Technologies, LLC
    Inventors: Jeffrey M. Lauerhaas, Thomas J. Nicolosi, Jr., Paul Mertens, William Fyen
  • Patent number: 6754975
    Abstract: An apparatus for attenuating physical damage to a substrate, along with an attendant method, comprises as a first component a base plate having defined therein a location for receiving a substrate cassette. The apparatus also comprises a substrate retainer movably attached to the base plate such that when the substrate cassette having a substrate contained therein is positioned on the base plate at the location for receiving the substrate cassette, and the substrate is subjected to a mechanical force, the substrate retainer moves such as to retain the substrate within the substrate cassette with a retaining force. Both the apparatus and the method are particularly applicable for attenuating damage to a substrate when spin-drying the substrate.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: June 29, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hung-Wen Chen, David Yen
  • Patent number: 6745489
    Abstract: Spin drying of a stack of flats such as egg trays is performed within a housing by movement of a rotatable lifting head into engagement with the undersurface of the stack. A stack lifting device lifts the lifting head and the stack of flats positioned thereon vertically upwardly into engagement with a drive engagement device thereabove which is rotatably powered by a drive with an optional braking device. Operation of the drive will cause rotation of the lifting head, the stack of flats and the drive engagement device simultaneously. The stack of flats will be held between the lifting head engaging the lower surface thereof and the drive engagement device engaging the upper surface thereof for fixedly securing these three elements together during powered rotation thereof. The rotation will spin off any liquids remaining on the flats such as would be present after being washed.
    Type: Grant
    Filed: November 18, 2003
    Date of Patent: June 8, 2004
    Inventor: Jeffrey B. Kuhl
  • Publication number: 20040103552
    Abstract: The centrifuge (1) comprises a container (2) which is open at the top, a perforated basket (3) which is rotatable in the container (2) and which is likewise open at the top, a lid (4) which can be coupled to the container (2), a drive member (5) which is rotatable relative to the lid (4) and which is capable of being coupled to the basket (3) and of driving it in rotation, and an operating unit (6) comprising an electrical motor (10), capable of bringing about the rotation of the drive member (5) and of the basket (3) coupled thereto. The operating unit (6) is separate and distinct from the lid (4) and is capable of being inserted removably into a housing (4a) provided in the lid (4) in such a manner that it is coupled in rotation to the drive member (5). The operating unit (6) also comprises at least one electrical battery (15), preferably of the rechargeable type, for supplying power to the motor (10).
    Type: Application
    Filed: January 14, 2004
    Publication date: June 3, 2004
    Inventor: Renato Rhon