With Apparatus Using Centrifugal Force Patents (Class 34/58)
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Publication number: 20100040522Abstract: A process for the drying of yellowcake, the yellowcake initially being in the form of a low solids content, uranium rich feed slurry, the process including the stages of: a. dewatering the feed slurry to produce a first dewatered solids cake with a solids content higher than the feed slurry; b. re-slurrying the first dewatered solids cake with sufficient water to dissolve at least some impurities and to produce an intermediate slurry with a solids content lower than the first dewatered solids cake; c. dewatering the intermediate slurry to produce a second dewatered solids cake with a solids content higher than the feed slurry; and d. drying the second dewatered solids cake to produce dried yellowcake.Type: ApplicationFiled: February 22, 2008Publication date: February 18, 2010Applicant: ADELAIDE CONTROL ENGINEERS PTY LTD.Inventor: Glenn Jobling
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Patent number: 7627959Abstract: A dryer for the removal of moisture or solvents from fine specialty chemicals and pharmaceuticals after their production, comprises a rotating drying compartment (2) which consists of at least one window (3), in operable relationship with an NIR probe (4) for measuring the moisture content of the product such as a specialty chemical or biological pharmaceutical contained in the closed drying compartment. The NIR probe (4) is positioned outside the drying compartment and is oriented through the at least one window (3) toward the product.Type: GrantFiled: March 9, 2007Date of Patent: December 8, 2009Assignee: Sanofi-Aventis Deutschland GmbHInventors: Jörg Reinhardt, Burkhard Wandelt, Christoph Naumann
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Patent number: 7621213Abstract: A salad spinner is disclosed, comprising an outer bowl; an inner basket receivable in the outer bowl; a lid placed over the outer bowl; a drive and brake mechanism combination comprising a rotary drive plate, a drive assembly engageable with the rotary drive plate, and a brake assembly; and a foldable handle operatively connected with the drive and brake mechanism combination, wherein the handle is allowed to be folded up to a locked position where the brake assembly interferes with the rotary drive plate to prevent spinning operation of the inner basket, and to be opened to an unlocked position where the brake assembly disengages from the rotary drive plate and manipulation of the handle in a horizontal direction enables the drive assembly to cause rotation of the driving rotation of the rotary drive plate and the inner basket.Type: GrantFiled: April 30, 2007Date of Patent: November 24, 2009Assignee: King's Flair Development Ltd.Inventor: Sui Wah Wong
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Patent number: 7618471Abstract: A device for recovering liquid droplets from a fluid flow stream including a rotatable element comprising wall elements configured to partially enclose a volume with an annular perimeter wall that includes an inside surface radially offset from and facing an axial center, a fixed base wall supports the rotatable element about the axial center, an input fluid conduit delivers the fluid flow stream into the fluid volume, means for rotating the rotatable element for generating a centrifugal force capable of forming a layer of liquid held by the centrifugal force against the inside surface, and an output liquid conduit disposed to collect liquid from the layer of liquid, wherein the layer of liquid rotates with the inside surface with a tangential velocity vector and the collection aperture is fixed in position opposed to the tangential velocity vector such that liquid in the layer of liquid enters the collection aperture.Type: GrantFiled: June 13, 2006Date of Patent: November 17, 2009Assignee: Protonex Technology CorporationInventors: William Brown, Peter Rezac, William Skrivan, Oren Bernstein
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Publication number: 20090249638Abstract: An apparatus for separating water from a wet material is provided according to the present invention. The apparatus includes an air lock feeder, a venturi, a plurality of centrifugal accelerators, at least one blower, at least one vapor vent, and at least one product outlet. The air lock feeder is constructed to receive air from a feed blower and move the wet material as entrained material. The venturi is operatively connected to the air lock feeder and is constructed to receive the entrained material and to accelerate the entrained material. The plurality of centrifugal accelerators are operatively connected to the venturi to receive the entrained material and accelerate the flow of the entrained material. The at least one accelerator blower is provided for accelerating the flow of the wet material within the plurality of centrifugal accelerators. The at least one vapor vent is operatively connected to the plurality of centrifugal accelerators for removing water vapor.Type: ApplicationFiled: April 3, 2009Publication date: October 8, 2009Inventor: Raymond C. McArthur
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Patent number: 7596886Abstract: In one embodiment of the invention, an apparatus for collecting fluid within a wafer cleaning chamber is provided. The apparatus includes a rotatable annular manifold configured to support a wafer within an inner cavity defined by an inner surface of the annular manifold. The annular manifold includes a channel extending from an inner surface of the annular manifold to a floor of the annular manifold. The floor has at least one opening. The apparatus includes a catch basin having a base with at least one drain. The base has an inner sidewall and an outer sidewall extending therefrom. The catch basin is disposed under the annular manifold to capture fluid dispensed from the at least one opening of the floor of the annular manifold. A spin, rinse and dry module and a method for collecting a fluid delivered to the surface of a rotating wafer are provided.Type: GrantFiled: December 18, 2002Date of Patent: October 6, 2009Assignee: Lam Research CorporationInventors: John M. Boyd, Fred C. Redeker
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Publication number: 20090211460Abstract: A bowl and basket assembly kit is disclosed as including an upper basket part (202), a middle basket part (204) and a lower basket part (206) linked with one another and engageable with one another in a way to form a perforated basket (200), an upper bowl part (102), a middle bowl part (104) and a lower bowl part (106) releasably engageable with one another to form a bowl (100) for receiving the perforated basket (200), and an upper locking ring (110) and a lower locking ring (112) which are swivellable about a longitudinal axis (L-L) of the bowl (100), wherein when the upper bowl part (102), middle bowl part (104) and lower bowl part (106) are engaged with one another, each of the locking rings (110, 112) is swivellable between a respective first position in which relative movement between the bowl parts (102, 104, 106) is allowed and a respective second position in which relative movement between the bowl parts (102, 104, 106) is prevented.Type: ApplicationFiled: November 19, 2008Publication date: August 27, 2009Inventors: Kwok Kuen SO, Abel Yiu Chung WAN
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Patent number: 7559155Abstract: The invention provides methods and apparatus for drying the backside of semiconductor wafers in a spin-coating environment. Solvent is evaporatively dried from a semiconductor wafer held in a spin mechanism. The undried wafer is sprayed with one or more jets of pressurized gas from gas ports disposed about the spin mechanism.Type: GrantFiled: May 17, 2004Date of Patent: July 14, 2009Assignee: Texas Instruments IncorporatedInventor: David C. Hall
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Publication number: 20090165326Abstract: This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying increases the sample-solute concentration and removes the solvent completely to produce the dried sample as a non-volatile solute precipitate. Re-circulating of drying gas is disclosed along with a solvent cold trap.Type: ApplicationFiled: February 27, 2008Publication date: July 2, 2009Inventors: Herbert J. Hedberg, Brian Kangas
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Publication number: 20090126216Abstract: A centrifugal pellet dryer screen (540) especially adapted for drying polymer pellets and micropellets includes an exterior or outer support screen (542), an inner screen (546) of an irregular or rough surface, and an optional middle screen(s) (544) sandwiched between the outer support screen and the inner screen. The screen layers are in intimate contact and the multi-layer screen assembly produces drier pellets and micropellets exiting the dryer. Plugging of the dryer screens and banding of the pellets or micropellets are significantly reduced.Type: ApplicationFiled: December 20, 2005Publication date: May 21, 2009Applicant: GAIA INDUSTRIES, INC.Inventors: Michael Eloo, J. Wayne Martin, Roger B. Wright
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Publication number: 20090114104Abstract: A drying device having a bowl, a basket with a plurality of perforations, a cover assembly, and a drive assembly. The drive assembly includes: a driving mechanism mechanically coupled to a rotatable lid that is configured to mate with a rotatable basket, and a handle pivotally attached to the cover assembly. The handle is configured to actuate the driving mechanism upon rotation of the handle about an axis from a first position to a second position. The drying device may also include a locking mechanism and/or a braking mechanism.Type: ApplicationFiled: October 30, 2008Publication date: May 7, 2009Inventors: Ravi Kumar Sawhney, Kurt Gregory Botsai, John Mark Vernon, Christopher Glupker, Simon Risley, Sanjay Choudhuri, Jason Alan Dimas Rico, Patrice Gerber
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Publication number: 20090113754Abstract: The present invention refers to a process for drying solid organic substances in aqueous phase including the steps of: feeding a continuous flow of such organic substances having a water content=50% by weight into a turbodrier having a cylindrical tubular body with horizontal axis, equipped with inlet and outlet openings, a heating jacket for bring the inner wall of the tubular body to a predetermined temperature, a bladed rotor extending inside the cylindrical tubular body (1) where it is made to rotate at speeds between 15 and 40 m/s, so as to disperse the continuous flow of organic substances into a flow of particles of organic substances; centrifuging the particles of organic substances against the inner wall of the turbodrier heated to a temperature above 130° C.Type: ApplicationFiled: September 27, 2007Publication date: May 7, 2009Applicant: GEOLINE S.R.L.Inventor: Guiseppina Cerea
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Publication number: 20080295353Abstract: In a factory that uses a large number of containers, it is necessary to ensure an installation location for a container washing device that is absolutely necessary as a preprocess for a container drying device. A container washing and centrifugal drying device has an exterior section having a door section, and having a container washing and centrifugal drying unit that comprises a turntable on which tacked containers are placed inside the exterior section, each of two columns erected at opposing position the same distance from the rotational center of the turntable on an upper part of the turntable, a clamp opening and closing cylinder for opening and closing clamp sections, and a plurality of washing tubes provided in a vertical direction at substantially equal intervals in a circumferential direction on the outer periphery spaced apart from the turntable, each of the washing tubes being provided with a plurality of washing nozzles at equal intervals in the vertical direction facing inwards.Type: ApplicationFiled: April 17, 2008Publication date: December 4, 2008Applicant: MISUZU KOKI COMPANY LIMITEDInventor: Makoto Ogawa
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Patent number: 7448315Abstract: A device for drying food is disclosed in an embodiment as a container including a bowl having a side wall terminating at a top edge defining an opening and a cover substantially covering the opening; a basket assembly disposed in the bowl and rotatable relative to the container about an axis at a variable rate of rotation, the basket assembly including a basket having a side wall terminating at a top edge; and a lid, the lid being releasably coupled to the basket and the cover.Type: GrantFiled: March 17, 2005Date of Patent: November 11, 2008Assignee: Helen of Troy LimitedInventors: Paul Mulhauser, Rebecca Taylor
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Publication number: 20080210103Abstract: A food processing device, e.g. a salad spinner, has a housing with a lid, a basket supported in the housing for rotation, and a drive mechanism supported by the lid for rotating the basket to spin water from salad in the housing. The drive mechanism has a crank handle and a drive transmission system coupling the handle to the basket to transmit a rotational driving force from the handle to rotate the basket. The drive transmission system has a first rotary gear arranged to receive the rotational driving force from the handle and a second rotary gear in driving engagement with the first gear for receiving the rotational driving force from the first gear to rotate the basket. The first and second gears have corresponding serial formations, e.g., recesses and protrusions, of respective circular cross-sections that are inter-engageable, one in the other, for transmission of the driving force.Type: ApplicationFiled: February 26, 2008Publication date: September 4, 2008Inventors: Yiu Chung Wan, Lance Logan Hood
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Publication number: 20080189975Abstract: When chuck pins are in a releasing state, support pins for supporting a lower surface of a substrate at respective heights different from each other support the substrate in an inclined position. When the chuck pins are in a gripping state, substrate gripping parts grip a substrate sidewise to separate the substrate upwardly from a substrate rest part, thereby holding the substrate in a horizontal position at a predetermined gripping height. After a liquid mass covering the substrate is formed, the chuck pins are changed from the gripping state to the releasing state to support the substrate having been gripped in the horizontal position into an inclined position, thereby draining the liquid mass from the surface of the substrate. The substrate with the liquid mass drained from the surface thereof is held and rotated in a horizontal position. Thus, the substrate is dried.Type: ApplicationFiled: January 29, 2008Publication date: August 14, 2008Inventor: Katsuhiko MIYA
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Publication number: 20080128085Abstract: According to the present invention, when performing spin treatment on a square wafer for a solar battery, it is possible to prevent the treatment medium, which is caused to flow down onto the surface of the wafer and scattered to the outside of the wafer from the four sides thereof in droplets, from reaching the back surface of the wafer.Type: ApplicationFiled: December 1, 2004Publication date: June 5, 2008Applicant: MIMASU SEMICONDUCTOR INDUSTRY CO., LTD.Inventors: Masato Tsuchiya, Syunichi Ogasawara
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Publication number: 20080120864Abstract: A method of cleaning a solids outlet assembly of a material dryer including attaching a plurality of pulse nozzles to at least one surface of the solids outlet assembly, accumulating a solid material onto the at least one surface thereby forming an accumulated solid, and actuating periodically the plurality of pulse nozzles to discharge air bursts that dislodge and remove the accumulated solid from the at least one surface is disclosed.Type: ApplicationFiled: February 6, 2008Publication date: May 29, 2008Applicant: M-I LLCInventors: Tony Clarke, Richard Bingham
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Publication number: 20080115380Abstract: A laundry apparatus according to the present invention ensures an improved laundry drying efficiency. In the laundry apparatus, an air guide (71) is provided on an upper edge portion of an outer tub opening (4a) as being opposed to an air inlet (6). Drying air flowing downward from the air inlet (6) to be supplied to the outer tub opening (4a) impinges on an inclined wall (72) of the air guide (71). The drying air impinging on the inclined wall (72) is deflected into a drum (5) through a drum opening (5a) (as indicated by a broken-line arrow). Thus, the drying air is prevented from further flowing downward in the outer tub opening (4a) into a gap (70) defined between the outer tub (4) and the drum (5), but supplied to laundry in the drum (5).Type: ApplicationFiled: November 16, 2007Publication date: May 22, 2008Applicants: SANYO ELECTRIC CO., LTD., Sanyo Electric Techno Create Co., LTD.Inventors: Masafumi Nishino, Kazushige Murakami, Mitsuru Naganawa
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Publication number: 20080052947Abstract: After rinsing, a liquid mixture (IPA+DIW) is supplied to a substrate surface while rotating a substrate at a first rotating velocity which is relatively high to thereby replace the rinsing liquid adhering to the substrate surface with the liquid mixture. In this way, the rinsing liquid adhering to the gaps between the patterns formed on the substrate surface is replaced with the liquid mixture. Subsequently, DIW is supplied to the substrate surface in a condition that the rotation of the substrate is stopped or that the substrate is rotated at a second rotating velocity which is relatively low to thereby form a puddle-like liquid layer with DIW. In this way, the liquid mixture of the surface layer part is removed from the substrate surface while leaving almost all the liquid mixture adhering to the gaps between the patterns. After that, the liquid layer is removed from the substrate surface to thereby dry the substrate surface.Type: ApplicationFiled: August 13, 2007Publication date: March 6, 2008Inventor: Katsuhiko Miya
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Publication number: 20080052948Abstract: A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.Type: ApplicationFiled: August 30, 2007Publication date: March 6, 2008Inventors: Hyun Jong Kim, Ju Won Kim, Jung Keun Cho
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Patent number: 7337712Abstract: A vessel for separating and collecting excess oil from deep fried foods disposed therein before the deep fried foods are sauted. A colander is rotatably mounted in a pot and holds the fried foods. A gear train operatively connects a motor to the colander. The motor is operatively connected to, and rotates, the colander to centrifugally force the excess oil from the deep fried foods out therefrom and collect in the pot. A handle is replaceably attached to the pot by apparatus that utilizes the weight of the handle to prevent the handle from detaching from the pot.Type: GrantFiled: March 1, 2004Date of Patent: March 4, 2008Inventors: Franklin Wang, Rosaline K. Wang
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Patent number: 7325329Abstract: A salad spin-drier with a bowl of glass or ceramic so that part of the water collection bowl, which until now has been purely functional, may be simultaneously used as a serving bowl for the salad. The salad bowl as is standard apart from the bowl has a lid in which a drive mechanism having a rotary drive plate with a cord drum and a pull cord may be set into rotational movement by a pull grip. The rotary drive plate with tabs engages into suitable ribs on the spin-drier basket. The spin-drier basket has a bearing recess which rests on a bearing cam. The bearing cam is separated from the bowl centrally on a plate. The bowl has a planar inner base on which the plate rests, and by way of an abutment edge limiting the plane base one achieves a central mounting of the plate. For the simplified removal of the plate these may have suitable openings easier gripping. A rubber-elastic rest is on the underside of the plate and serves as scratch-protection and slip-protection.Type: GrantFiled: July 21, 2005Date of Patent: February 5, 2008Assignee: MOHA Moderne Haushaltwaren AGInventor: Bruno Herren
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Publication number: 20070256315Abstract: A salad spinner is disclosed, comprising an outer bowl; an inner basket receivable in the outer bowl; a lid placed over the outer bowl; a drive and brake mechanism combination comprising a rotary drive plate, a drive assembly engageable with the rotary drive plate, and a brake assembly; and a foldable handle operatively connected with the drive and brake mechanism combination, wherein the handle is allowed to be folded up to a locked position where the brake assembly interferes with the rotary drive plate to prevent spinning operation of the inner basket, and to be opened to an unlocked position where the brake assembly disengages from the rotary drive plate and manipulation of the handle in a horizontal direction enables the drive assembly to cause rotation of the driving rotation of the rotary drive plate and the inner basket.Type: ApplicationFiled: April 30, 2007Publication date: November 8, 2007Inventor: Siu Wah Wong
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Patent number: 7228645Abstract: A shower head processes a wafer with a plate having a plurality of nozzles positioned thereon, each of the nozzles assigned to one of a plurality of processing zones for the wafer; and a manifold assembly coupled to each of the nozzles to control one or more of the nozzles as a group in each processing zone.Type: GrantFiled: January 11, 2005Date of Patent: June 12, 2007Inventor: Xuyen Ngoc Pham
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Patent number: 7171720Abstract: The invention relates to a device for expelling liquid from a wiping element which is held on a wiping head of a surface cleaning device so as to form a wiping surface, comprising a container, in which a wiping element holding device accommodating the wiping element as well as a driving device are arranged, wherein the wiping element holding device can be driven by means of the driving device so as to rotate about an axis of rotation. In order to further develop the device in such a manner that it has a lower consumption of energy it is suggested in accordance with the invention that the wiping element holding device form a receiving means, into which the wiping element can be inserted with a surface normal of the wiping surface aligned at an angle to the axis of rotation.Type: GrantFiled: November 15, 2004Date of Patent: February 6, 2007Assignee: Alfred Kaercher GmbH & Co. KG.Inventors: Hendrik Rust, Yunus Demirtas, Ronald Schwarz
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Patent number: 7127828Abstract: A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.Type: GrantFiled: March 12, 2002Date of Patent: October 31, 2006Assignee: Semitool, Inc.Inventors: Robert Weaver, Ronald Schlagenhauser
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Patent number: 7111546Abstract: A salad spinner for drying food articles and household items includes a transparent bowl and a perforated basket disposed in the bowl. The basket further includes a cylindrical wall connected to a bottom wall of the basket and disposed at its center. The salad spinner further includes a drive assembly attachable to the cylindrical wall of the basket for spinning the basket relative to the bowl whereby water on the food articles is passed through the perforated wall of the basket and displaced to the bowl.Type: GrantFiled: July 19, 2004Date of Patent: September 26, 2006Assignee: Lifetime Brands, Inc.Inventors: Jeffrey Siegel, William J. Lazaroff
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Patent number: 7103990Abstract: It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments. According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.Type: GrantFiled: September 11, 2003Date of Patent: September 12, 2006Assignee: Fujikin IncorporatedInventors: Tadahiro Ohmi, Yasuyuki Shirai, Takumi Fujita, Yukio Minami, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada
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Patent number: 7100304Abstract: An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.Type: GrantFiled: June 10, 2004Date of Patent: September 5, 2006Assignee: Akrion Technologies, Inc.Inventors: Jeffrey M. Lauerhaas, Thomas J. Nicolosi, Jr., Paul Mertens, William Fyen
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Patent number: 7080463Abstract: A salad spinner and mixer may be made from two substantially identical transparent bowls that can be joined together at their rims to define a chamber; two substantially identical colanders that can be joined together at their rims and received within the chamber; and a bifurcated base that has a spindle on each of two parallel upstanding portions. When the spindles are received within dimples on the bottoms of the bowls, the bowl and colander assembly can be spun about an axis defined by the spindles to remove water from the salad ingredients. The bowl assembly, used without the colanders, can also be use to mix salad dressing with salad ingredients. The resultant salad can be served in one of the bowls. Moreover, the bifurcated base can serve as a napkin holder.Type: GrantFiled: August 4, 2004Date of Patent: July 25, 2006Inventor: Robert A Johnson
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Patent number: 7028415Abstract: A drying apparatus for use with many kinds of objects, but is particularly suited for use in drying most kinds of produce and vegetables including leaf vegetables. In one embodiment, the dryer includes a canted drum design which provides a number of benefits and advantages over prior art designs. The canted design allows the use of a spin drying method that breaks up clumps of material in the dryer and assists in the even distribution of material, thereby improving load balance. The canted design provides ergonomic advantages to the operator when loading and unloading the dryer, and, the canted design allows easy access to the drive system for maintenance and repairs.Type: GrantFiled: April 5, 2004Date of Patent: April 18, 2006Inventors: Alan Heinzen, Erick A. Davidson
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Patent number: 7002134Abstract: A dryer lid/robot collision prevention system which prevents inadvertent collision of a spin dryer lid with a transfer robot as the robot approaches and loads wafer-containing cassettes into the spin dryer. The system includes at least one, and typically, a pair of photoelectric sensors mounted on an inner wall behind the spin dryer lid. Each of the photoelectric sensors is electrically connected to a relay circuit which activates a cylinder sensor in the spin dryer in the event that the photoelectric sensors sense the normal position of the open spin dryer lid. The cylinder sensors activate a PLC module, which activates the cassette cradles in the spin dryer. Finally, the activated mode of the cassette cradles signals the transfer robot to approach and load the wafer cassettes into the cassette cradles. The system may include a bypass switch for bypassing the system, as desired.Type: GrantFiled: May 9, 2003Date of Patent: February 21, 2006Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yao-Tsung Chu, Chih-I Fang
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Patent number: 6993854Abstract: A centrifugal dryer of the present invention includes: a chamber for performing drying processing for plural substrates; a cradle, installed inside chamber, and drying plural substrates by rotation driving in a state of being held therein; and an elastic wave sensor for detecting an elastic wave generating upon striking of a chip from plural substrates to said chamber during the processing therefor.Type: GrantFiled: April 25, 2002Date of Patent: February 7, 2006Assignees: Renesas Technology Corp., Mitsubishi Electric Engineering Company LimitedInventors: Hirotoshi Ise, Toshiki Oono, Tatsuo Mizuno
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Patent number: 6988327Abstract: A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.Type: GrantFiled: March 31, 2003Date of Patent: January 24, 2006Assignee: Lam Research CorporationInventors: James P. Garcia, John M. de Larios, Michael Ravkin, Fred C. Redeker, Carl Woods
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Patent number: 6938357Abstract: An improved centrifugal pellet dryer that employs forced air in the direction opposite that of the pellet travel through the dryer. The air may be preheated depending on the particular product. The resulting airstream reduces water spray and lowers the humidity level of the air in the dryer system. The airstream exits the dryer at or below the lower level of the rotor, thus providing increased exposure to the airflow. The result is enhanced drying effectiveness and increased dryer capacity.Type: GrantFiled: September 9, 2003Date of Patent: September 6, 2005Assignee: Carter Day International, Inc.Inventor: David Hauch
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Patent number: 6928751Abstract: An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.Type: GrantFiled: June 12, 2002Date of Patent: August 16, 2005Assignees: Goldfinger Technologies, LLC, Interuniversitair Microelektronica Centrum (IMEC)Inventors: Chad M. Hosack, Jeffrey M. Lauerhaas, Mario E. Bran, Raoul Standt, Paul Patel, Yi Wu, Geert Doumen, Paul Mertens
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Patent number: 6899021Abstract: A salad shaker having a lower part of a container and a cover which is placed on the cover and has a cable pull drive by which the salad sieve can be rotated. The drive is connected to a rotating plate by a free-running device which acts on both sides, and enables the rotational direction of the salad sieve to be charged in a spring-biased manner. The repeated change in rotational direction causes the shaking efficiency to be significantly improved. The restoring force of the inventive spring automatically reels in the cable and holds the handle in a desired position on the cover in a spring-biased manner. The drive of this invention can also be used in handle-operated salad shakers.Type: GrantFiled: September 2, 2002Date of Patent: May 31, 2005Assignee: Moha Moderne Haushaltwaren AGInventor: Hansjürgen Riede
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Patent number: 6892472Abstract: A method and apparatus for rinsing and spin-drying a hydrophobic material such as a hydrophobic semiconductor wafer improves wafer drying while at the same time reduces the formation of residual contaminants on the dried surface of the wafer. This is accomplished by first establishing a safe-zone between a minimum rotational speed above which drying proceeds satisfactorily and a maximum rotational speed above which contaminants dry on the wafer's surface. A spin-rate profile can then be adopted such that the rinse/dry process proceeds within the safe zone.Type: GrantFiled: March 18, 2003Date of Patent: May 17, 2005Assignee: Novellus Systems, Inc.Inventor: Justin M. Quarantello
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Patent number: 6848194Abstract: An apparatus for spin drying a semiconductor wafer includes a hollow core spindle and a chuck assembly having grippers for supporting a wafer at an edge thereof. A sleeve is disposed in the central opening of the spindle and a manifold is disposed in the upper end of the sleeve. A capacitance sensor is affixed to the manifold. In another apparatus, an arm having a capacitance sensor mounted thereon is positioned such that the capacitance sensor is disposed above a space to be occupied by a wafer that is supported by the grippers. An additional apparatus includes an arm having a light source and a detector mounted thereon. The light source directs light toward a surface of a wafer such that light that reflects off of the surface is substantially perpendicular to that surface. The detector is positioned to measure the intensity of the reflected light.Type: GrantFiled: January 28, 2003Date of Patent: February 1, 2005Assignee: Lam Research CorporationInventor: Randolph E. Treur
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Patent number: 6837969Abstract: A method for the concentration of liquid mixtures includes the step of causing a continuous stream of the liquid mixtures to flow in the form of a turbulent thin layer in contact with a heated wall; for that purpose, a continuous stream of liquid mixture is fed into a turbo-concentrator including a cylindrical tubular body (1), a heating jacket (4) and a bladed rotor (8) rotatably supported in the cylindrical tubular body (1), and is centrifuged to form a dynamic and tubular thin layer, the thin layer advancing inside the cylindrical tubular body (1) then being discharged continuously in the form of a stream of concentrated liquid mixture.Type: GrantFiled: October 17, 2000Date of Patent: January 4, 2005Assignee: Vomm Chemipharma S.r.l.Inventor: Corrado Vezzani
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Patent number: 6834440Abstract: An apparatus for drying a wafer includes a rotating chuck configured to rotate the wafer. A movable de-ionized water supply member and an organic solvent supply member are positioned adjacent a face of the wafer. The de-ionized water supply member supplies de-ionized water onto the wafer, and the organic solvent supply member has a plurality of solvent supply nozzles disposed to supply an organic solvent onto the wafer. The organic solvent supply member includes a first solvent supply member and a second solvent supply member. The de-ionized water supply member and the first solvent supply member move radially between a position adjacent the central portion of the wafer and the edge portion of the wafer.Type: GrantFiled: May 13, 2003Date of Patent: December 28, 2004Assignee: Samsung Electronics Co., Ltd.Inventor: Keum-Joo Lee
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Patent number: 6827092Abstract: An apparatus for preparing a wafer is provided. The apparatus includes a wafer backside plate and a central shaft. The wafer backside plate has a top surface that includes a cylindrical edge lip, which defines a central aperture. The central shaft is designed to fit within the central aperture. The wafer backside plate is designed to automatically slide between an up position during rotational wager processing and a down position when the wafer is not in rotational wafer processing. A gap defined between the top surface of the wafer backside plate and the wafer is less when the wafer backside plate is in the up position than when the wafer backside plate is in the down position.Type: GrantFiled: December 22, 2000Date of Patent: December 7, 2004Assignee: Lam Research CorporationInventors: Stephen M. Smith, Randolph E. Treur
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Publication number: 20040211081Abstract: A drying apparatus for use with many kinds of objects, but is particularly suited for use in drying most kinds of produce and vegetables including leaf vegetables. In one embodiment, the dryer includes a canted drum design which provides a number of benefits and advantages over prior art designs. The canted design allows the use of a spin drying method that breaks up clumps of material in the dryer and assists in the even distribution of material, thereby improving load balance. The canted design provides ergonomic advantages to the operator when loading and unloading the dryer, and, the canted design allows easy access to the drive system for maintenance and repairs.Type: ApplicationFiled: April 5, 2004Publication date: October 28, 2004Inventors: Alan Heinzen, Erick A. Davidson
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Publication number: 20040181965Abstract: A method and apparatus for rinsing and spin-drying a hydrophobic material such as a hydrophobic semiconductor wafer improves wafer drying while at the same time reduces the formation of residual contaminants on the dried surface of the wafer. This is accomplished by first establishing a safe-zone between a minimum rotational speed above which drying proceeds satisfactorily and a maximum rotational speed above which contaminants dry on the wafer's surface. A spin-rate profile can then be adopted such that the rinse/dry process proceeds within the safe zone.Type: ApplicationFiled: March 18, 2003Publication date: September 23, 2004Inventor: Justin M. Quarantello
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Patent number: 6763605Abstract: A vertical, centrifugal separator used for drying drill cuttings prior to transport or further processing. The separator is adapted to receive scavenged heat from any source and is further adapted to include internal conveyers, thereby lowering the overall operating profile and providing increased cuttings retention time within a heated environment.Type: GrantFiled: May 31, 2002Date of Patent: July 20, 2004Assignee: Baker Hughes IncorporatedInventor: Jeffrey Reddoch
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Patent number: 6754980Abstract: An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.Type: GrantFiled: June 12, 2002Date of Patent: June 29, 2004Assignee: Goldfinger Technologies, LLCInventors: Jeffrey M. Lauerhaas, Thomas J. Nicolosi, Jr., Paul Mertens, William Fyen
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Patent number: 6754975Abstract: An apparatus for attenuating physical damage to a substrate, along with an attendant method, comprises as a first component a base plate having defined therein a location for receiving a substrate cassette. The apparatus also comprises a substrate retainer movably attached to the base plate such that when the substrate cassette having a substrate contained therein is positioned on the base plate at the location for receiving the substrate cassette, and the substrate is subjected to a mechanical force, the substrate retainer moves such as to retain the substrate within the substrate cassette with a retaining force. Both the apparatus and the method are particularly applicable for attenuating damage to a substrate when spin-drying the substrate.Type: GrantFiled: January 16, 2001Date of Patent: June 29, 2004Assignee: Taiwan Semiconductor Manufacturing Co., LtdInventors: Hung-Wen Chen, David Yen
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Patent number: 6745489Abstract: Spin drying of a stack of flats such as egg trays is performed within a housing by movement of a rotatable lifting head into engagement with the undersurface of the stack. A stack lifting device lifts the lifting head and the stack of flats positioned thereon vertically upwardly into engagement with a drive engagement device thereabove which is rotatably powered by a drive with an optional braking device. Operation of the drive will cause rotation of the lifting head, the stack of flats and the drive engagement device simultaneously. The stack of flats will be held between the lifting head engaging the lower surface thereof and the drive engagement device engaging the upper surface thereof for fixedly securing these three elements together during powered rotation thereof. The rotation will spin off any liquids remaining on the flats such as would be present after being washed.Type: GrantFiled: November 18, 2003Date of Patent: June 8, 2004Inventor: Jeffrey B. Kuhl
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Publication number: 20040103552Abstract: The centrifuge (1) comprises a container (2) which is open at the top, a perforated basket (3) which is rotatable in the container (2) and which is likewise open at the top, a lid (4) which can be coupled to the container (2), a drive member (5) which is rotatable relative to the lid (4) and which is capable of being coupled to the basket (3) and of driving it in rotation, and an operating unit (6) comprising an electrical motor (10), capable of bringing about the rotation of the drive member (5) and of the basket (3) coupled thereto. The operating unit (6) is separate and distinct from the lid (4) and is capable of being inserted removably into a housing (4a) provided in the lid (4) in such a manner that it is coupled in rotation to the drive member (5). The operating unit (6) also comprises at least one electrical battery (15), preferably of the rechargeable type, for supplying power to the motor (10).Type: ApplicationFiled: January 14, 2004Publication date: June 3, 2004Inventor: Renato Rhon