Abstract: An electric salad spinner device which is designed for ease of use and allows for efficient drying of salad greens, leafy vegetables and the like. The device comprises a base component, a generally cylindrical basket component, a generally cylindrical basket component, a scalable lid having a handle, an on/off switch and a drive motor. Optionally, the device also comprises a liquid dispenser assembly which may also be motorized to provide agitation and may also comprise a sheer assembly to allow for slicing in of hard vegetables such as, for example, cucumbers, carrots, celery and the like.

Abstract: In a conventional container centrifugal drying device, a problem exists in that a member is easily corroded by a detergent in use for a long period, and a rotating portion is heavy in weight so that energy at accelerating and decelerating times is large.

Abstract: A centrifugal dryer (10) has a plurality of conveyors (12) that are arranged inside a pair of trunnion rings (36) such that the conveyors (12) are shingled to form a polygon shaped cylinder (14) that rotates about the central axis (A—A) of the trunnion rings to create centrifugal forces on produce, or other material conveyed on the conveyors. Each conveyor (12) has an elongated endless porous belt (18) driven in one direction by a one-way bearing to convey material from the inlet end to the outlet end of the conveyor. A crank arm (56) extends from each one-way bearing and rides in a gimbal ring (50) which causes reciprocating motion of the crank arm (56) to intermittenly advance the conveyors (12) as they rotate. The gimbal ring (50) can be positionally adjusted to vary the amount each conveyor (12) advances per revolution, or it can be set in a neutral position where no movement is imparted to the crank arms (56), thereby allowing the dryer to process in a batch mode.

Abstract: Device for drying washed and rinsed crates or cases, comprising a frame and receiving or accommodation spaces carried by the frame for the crates or cases, in which the accommodation spaces are attached to a rotating shaft and are situated on either side of it in a symmetrical manner, and furthermore comprising means for rotating the rotating shaft and thus the accommodation spaces in order to cast off the water present on the crates or cases from them through centrifugal forces.

Abstract: A wafer dryer for drying a wafer includes a chamber and a support adapted to support the wafer in the chamber. A spray nozzle is disposed in the chamber. A source gas supply tank is in fluid communication with the spray nozzle. At least one heater is operable to heat the chamber and the source gas supply tank. A pumping line is in fluid communication with the chamber. Drive means are operable to rotate the chamber and the spray nozzle. A method for drying a wafer using a wafer dryer including a chamber and a revolving spray nozzle includes the steps of: loading the wafer in the chamber; reducing the pressure in the chamber in which the wafer is loaded to a near vacuum state; creating a temperature controlled atmosphere in the pressure-reduced chamber to quicken drying of the wafer; and spraying the source gas on the wafer while rotating the chamber and the revolving spray nozzle in opposite directions in the pressure-reduced temperature controlled atmosphere.

Abstract: The present invention relates to a wafer holding device comprising a rotatable base and a plurality of weighted-jaws pivotally coupled on the base. Each of the weighted-jaws is provided with a step portion, used to support and clamp the wafer, and a pendulum weight. The pendulum weight can be integrally formed or detachably hanged on the jaw, depending on the size of the wafer clamped. As the base is rotated at a predetermined velocity, the pendulum weights sway out of the axis of the base due to the centrifugal force generated by the rotation, thereby clamping the wafer in the step portions. The preferred embodiment of the present invention can further provide a stopper formed on the base and a spring connected between the base and each of the jaws so as to keep limit the movement of the jaws within predetermined range.

Abstract: A spin processing apparatus can prevent contamination of workpieces by wear particles, and can operate at high efficiency while lowering the noise level associated with the operation of the apparatus. The spin processing apparatus includes a chamber, a spin holder disposed inside the chamber for holding workpieces, and driver device for rotating the spin holder. A supporting device is provided for rotatably supporting the spin holder in a non-contact manner through a magnetically-operated mechanism.

Abstract: A substrate transporting device and method 19 transports a plurality of wafers W standing upright in a row, from a previous process, i.e., a cleaning process. A substrate holder 40 is carried by a transporting device 50 arranged outside a drying chamber 20. The substrate holder 40 receives the wafers W from the substrate transporting device 19 while maintaining a posture of the wafers W. The transporting device 50 lowers the substrate holder 40 and sequentially moves it into the drying chamber 20 through an unloading and loading port 21 above the drying chamber 20. Thereafter, the substrate holder 40 is fixed to a rotor 30. After closing the unloading and loading port 21 with a lid body 25, the rotor 30 is rotated. In this way, moisture sticking to surfaces of the wafers W is eliminated.

Abstract: A device and method for planarizing a film layer device on a silicon wafer. The device has a circular track whose surface faces the track center, a carrier capable of moving along the track and carrying wafers around with their front surfaces facing the center, and a set of heating elements for heating the film layers on the wafers to make them fluid. Utilizing the centrifugal force on the film layer generated by the circular movement and the fluidity of the film layer provided by heating, planarization of the film layer is achieved.

Abstract: Conventional laundry centrifuges are loaded with laundry in a upwardly slanted position, spin-dry in the same position and are then swiveled to an oblique downward angle to unload. The drum (16) of the centrifuge according to the invention receives the laundry in an upwardly slanted position, spin-dries in an upright position and swivels from that position to a downwardly directed position to unload the laundry.

Abstract: A fastening device which prevents rotational and vertical displacement of a purge ring caused by purge gas exiting the purge ring or caused by other processing conditions. The fastening device comprises a clamp which releasably holds the purge ring together with the wafer support. A pin is inserted into a bore through the purge ring, wafer support and the clamp to releasably secure the clamp in place. Slots may be formed in the purge ring to guide placement of the clamp.

Abstract: A thermal processing method is described in which a temperature response of a substrate may be controlled during a heat-up phase or a cool-down phase, or during both phases. This reduces the thermal budget of the substrate and improves the quality and performance of devices formed on the substrate. In particular, by controlling the rate of heat transfer between the substrate and a thermal reservoir (e.g., a watercooled reflector plate assembly), the temperature response of the substrate may be controlled during the thermal process. The rate of heat transfer may changed by changing the thermal conductivity between the substrate and the thermal reservoir, by changing the emissivity of a surface of the thermal reservoir, or by changing the distance between the substrate and the thermal reservoir. The thermal conductivity may be changed by changing the characteristics of a thermal transport medium (e.g., a purge gas) located between the substrate and the thermal reservoir.

Abstract: A basket or dryer liner that has the usual basket shape, i.e, generally cylindrical, but is resiliently compressible or deformable along multiple axes for reshaping into irregular shapes. It has perforate bottom wall and side walls and an open top and is generally symmetrical about x, y, and z axes that are orthogonal to each other. The basket may be manually compressed alone these axes and then allowed to return to its normal shape when released. Thus, it has a non-compressed, relaxed state wherein it has maximum exterior dimensions and can stand-alone and serve the normal functions of a basket. The basket also has a compressed condition wherein at least certain of the dimensions of the basket are less than said maximum dimensions so that it can be fitted into a dryer, allowed to expand, and serve as a dryer liner. Wet clothes and other items can then be placed in the basket through the dryer opening in the normal manner.

Abstract: A process for drying semiconductor wafers includes loading a wafer wetted with rinsing fluid into a rotor and orientating the wafer along a substantially vertical plane. A gas saturated with a solvent vapor is passed over the wafer surfaces until condensation forms on the wafer and displaces residual fluid. The rotation of the wafer by the rotor at a first rotation speed to aids the flushing and displacement of residual fluid. The passage of a dry gas over the wafer combined with the rotation of the wafer at a second rotation speed promotes drying of solvent condensed on the wafer. The first rotation speed is limited to a rate that does not cause the condensed solvent film to evaporate as quickly as it forms. The second rotation speed may exceed that of the first rotation speed to complete the drying of the wafer. The rotor and process chamber are optionally pre-saturated with condensed solvent vapor prior to the introduction of a wafer to hasten the drying process.

Abstract: A centrifugally rotating clothes hanger includes a motor for rotating the hanger, the centrifugal force resulting from rotation of the hanger being used to swing water off the clothes and assist in drying the clothes due to the wind-drying effect caused by rotation-induced airflow.

Abstract: A leafed vegetable dryer includes an entrance for products, an exit for the products and one or more transporters for transporting the products between the entrance and the exit. The transporters have the form of a centrifuge. A transport driver is utilized to drive the transporters and a centrifuge driver is utilized to drive the centrifuge.

Abstract: A dynamic chuck for holding a semiconductor wafer or other substrate includes a plurality of clamping arms mounted radially about a central axis of rotation of the wafer or other substrate. Each of the arms is mounted such that it is free to pivot about a horizontal axis. As the chuck rotates the substrate, a centrifugal force acts on each of the arms, causing it to pivot about its axis of rotation and thereby forcing a holding surface of the arm against a peripheral edge of the substrate. The dynamic chuck is applicable to any type of device in which a semiconductor wafer or other substrate must be held in a centered positioned while it is being spun, including wafer cleaning and rinsing apparatus.

Abstract: A retrofitted extension for mini roller covers. Conventional rotatable paint spinners are used to expel retained paint from held paint roller covers or brushes. The conventional spaced flexible arms of the paint spinner are normally used to retain either a paint roller cover on the outside of the arms or the handle of a paint brush between them. A mini roller cover adaptor has a handle which is mountable in the spinner arms normally used to hold the paint brush handle to the paint spinner. This added mini roller adaptor handle has a rod member fixed to it and a rod retaining clip. The clip retains a mini paint roller cover to the rod member. By having a rod member that is the same exact size as the inner diameter of the mini roller cover, the paint adaptor can be used with the conventional spinner to spin the min roller cover clean.

Abstract: A solids dryer is post-connected to an invertible filter centrifuge, wherein a dehumidification and drying of the solids takes place in the invertible filter centrifuge by means of centrifugation, pressure gas compression and/or heat convection and in the solids dryer by means of heat contact and/or heat convection. The invertible filter centrifuge and the solids dryer are connected to one another to form a unit via a closure device. Sensors serve to measure the respectively prevailing degree of dehumidification and drying as well as to determine additional operating parameters. The sensors actuate a common control device which regulates the operating parameters.

Abstract: A system and method is described for processing waste citrus peel to remove oil from the peel in a highly efficient manner for subsequent processing, where the temperature of the peel is elevated, the peel is then finely fragmented to create a slurry, the solid particles are removed from the slurry and dried, and the oil is separated from the water in the slurry. The temperature of the peel is elevated by exposing the peel to steam so that minimal water is added.

Abstract: A rotating wafer processor uses a non-contacting gas seal mounted to a process chamber and a vibration isolation mount between the chamber and a support structure. The non-contacting seal incorporates a housing with a chamfer on opposing ends of an annular land encircling a rotating drive shaft, and one or more outlet ports on the chamfers to form a gas-purged, noncontacting seal. The seal is directly mounted to the chamber and interposed between the chamber and bearings that support the drive shaft, so the shaft, chamber and rotating load vibrate together.

Abstract: A brush and roller spinner and paint mixer comprises a hollow cylindrical body portion, a gripper at one end of the body portion to releasably hold a brush or roller and a handle at the other end of the body portion. The handle is affixed to one end of a helically shaped rod which extends axially through the cylindrical body and is mounted to the gripper member at its other end to cause rotational movement thereof as the handle is moved downwardly. The handle includes a recessed base which extends outwardly from the handle and includes downwardly extending walls having a recess which engages a protrusion on the cylinder cover to halt the motion thereof and lock the handle in place. A paint mixer comprising an elongated shaft with a spiral element at one end may be removably mounted at the other end to the gripper so that the mixer is rotated by movement of the handle.

Abstract: A method and apparatus for processing whole head vegetables, characterized by a core end, and an open leafy end, is disclosed. Whole head vegetables pass through a washer which has a bottom belt which runs through the length of the washing line and passes through a first and a second tank (or more tanks) of cleaning water. Between the first and second cleaning tanks, a plurality of spray bars further clean the whole head vegetables. Top belts at each of the cleaning tanks above the bottom belt to secure the produce as it passes through the first cleaning tank and through the second cleaning tank. The lower belt, and the upper belts are controlled by a single speed control system resulting in less damage to the produce. Additionally, the angle of the belts conveying the produce through the two cleaning tanks is chosen for optimum performance.

Abstract: In the method for unloading items of laundry from a spin-dryer or washer-dryer (20) which has a perforated operating drum (21) and a drum housing (22) with an end-side unloading opening (26) which can be closed by means of a door (27), after the spin-drying process is finished, the operating drum (21) is set to a speed at which the centrifugal force acting on the items of laundry is still somewhat greater than the force of gravity. The door (27) of the drum housing (22) is opened. The pipe of a suction conveying system is connected to the unloading opening (26) of the drum housing (22). The suction conveying system is activated, and on the drum housing (22) the closure member (29) of an air inlet opening, which is arranged on the peripheral wall, is opened. The method can also be used analogously in tumble-dryers. The device for carrying out the method has the device parts mentioned.

Abstract: An improved drive rod and clutch disk for a paint brush and roller cleaning tool providing the unique combination of a hardened steel clutch disk and chrome plated drive rod. Hardening virtually eliminates enlargement of the bow tie hole in the clutch disk due to wear, preventing the cross member on the end portion of the drive rod from escaping through the clutch disk bow-tie hole during the lifetime of the cleaning tool. The chrome plated spiral drive rod minimizes galling, greatly extending the useful life of the cleaning tool in the instant invention, compared to the prior art.

Abstract: A system for externally monitoring the angular rotation rate of a spin rinse dryer chamber in a semiconductor fabrication facility. The system includes a spin rinse dryer comprised of a dryer housing and a chamber wall that is capable of rotating within the housing. The chamber wall defines a chamber suitable for receiving a designated wafer carrier. The dryer further includes a chamber door hinged to the housing for enclosing the chamber. The spin rinse dryer is configured to rotate the chamber when activated. A detection apparatus of the system is positioned externally to the dryer housing in proximity to the chamber. The detection apparatus is adapted to detect the angular rotation rate of a detectable marker affixed to an exterior wall of the designated wafer carrier when the designated wafer carrier is placed in the chamber and the spin rinse dryer is activated.

Abstract: A paint roller adapter is disclosed which includes a substantially longitudinal first rod and a second rod. The first rod is suitable for being received by a drill chuck. The second rod, being longer in length than the first rod, is capable of receiving a mini-roller about the longitudinal centroid of the roller. Between the first and second rods may include a handle portion to facilitate a user grasping the adapter. Between the handle and the second rod is a step taper, preferably with annular ribs thereon. This step taper has a gradual increase in diameter from the surface of the second rod increasing in the direction of the handle. This gradual taper provides secure frictional contact between the roller and the taper/second rod combination, thus securably fastening the roller to the adapter. Between the handle and the first rod exists an annular taper that would facilitate the insertion of the first rod into a paint roller spinner, the jaws of the roller securing onto the handle.

Abstract: A cover is provided to an opening of a chamber in such a manner to open and close the opening and when the cover closes the opening, the chamber and the cover form a sealed drying process space. In this drying process space, nitrogen gas is supplied to purge the gas in the drying process space to turn into an inert gas filled space. Thereafter, substrates to be treated are brought into the drying process space. nitrogen gas is further supplied to the drying process space and then the substrates are being rotated to dry the same.

Abstract: The disclosed invention is an improved means of cleaning paint brushes and paint rollers. The device consists of a base with at least two pliable longitudinal extensions which are held together by a series of ring segments. This combination of extensions and ring segments define a cavity that is capable of receiving and releasably securing the handle of a paint brush. The base is capable of receiving a paint roller, the roller fitting over the longitudinal extensions. An attachment rod extends from the base, opposite to the extensions. The attachment rod can be received by a drill chuck, or other rotary device and thereby rotated, including the brush received therein. As the brush rotates the flexible nature of the extensions allow the brush to orbit about the axis of rotation imparted by the drill. This allows rotation and translation of the brush so that no bristles of the brush are consistently in line with the center of rotation.

Abstract: The invention relates to a spin extractor for extracting liquid from wet laundry by rotating a drum with the laundry contained therein at high speed about a horizontal axis. In an inventive spin extractor, while an operation controller controls the speed of the drum so that the laundry is slightly pressed on the inner peripheral wall of the drum by centrifugal force and rotates with the drum, a position detector detects the position of an eccentric load due to the laundry as a first position. Then, the speed of the drum is raised to a second speed for weak extraction, which is lower than a predetermined maximum speed for extraction, and the position detector detects the position of the eccentric load as a second position. A quality determiner checks the displacement of the second position from the first position to determine the uniformity in extraction quality of the articles, where the extraction quality of an article represents how easily liquid is extracted therefrom.

Abstract: A device for drying food is provided. The device includes a bowl having a bottom wall and a sidewall terminating in a top edge, a cover removably connected to the top edge of the bowl, a basket assembly including a basket and a removable lid disposed in the bowl and rotatable relative to the bowl about an axis, and a brake assembly carried by the cover and engageable with the lid for stopping rotation of the basket assembly.

Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

Abstract: A drying apparatus and method is described wherein baskets, or totes, filled with produce to be dried, are stacked vertically within an inner support frame. The totes are arranged with the open tops facing upwardly. The inner support frame has top and bottom spindles or shafts which are rotationally supported by bearing structures at the top and bottom of the dryer body. Moisture is driven from the enclosed procuce by centrifugal force when the inner support frame/totes are rotated. Produce such as whole head vegetables are preferably arranged in rows in the totes with the cores or cut ends of a row of produce juxtapositioned with, or "butted" against, the cut ends of another row, with the leafy ends generally pointing away from the axis of rotation. In this position, water or moisture tends to flow outwardly from the leafy open ends when the inner frame is rotated during a drying operation.

Abstract: A device for drying food includes a bowl having a bottom wall and a sidewall terminating in a top edge, a cover removably connected to the top edge of the bowl and a perforated basket disposed in the bowl and rotatable relative thereto coaxially therewith, and a drive assembly coupled to the basket for effecting rotation thereof. The drive assembly includes a linearly reciprocating handle structure with a screw shaft engageable with a nut coupled to the basket for converting the reciprocating movement of the handle structure to rotary motion of the basket.

Abstract: There is provided an improved centrifugal dryer that includes a motor section or portion, a dryer section or portion disposed therebelow, and a reservoir section or portion disposed below the dryer portion, the dryer portion being hingedly attached to the reservoir portion. A product slurry is introduced into the dryer portion through a center inlet pipe and flows into the dryer section where the product is dried by forcing the fluid in the slurry through apertures in a perforated screen held in position between upper and lower screen positioning plates.

Abstract: A semiconductor wafer scrubbing and drying apparatus is capable processing wafers in a vertical orientation from start to finish. The apparatus moves the wafers in a generally vertical direction from an entry station of the apparatus to a dryer of the apparatus. The wafers enter the apparatus in a cassette and exit in another cassette in the same order as they were in the entry cassette to preserve individual wafer identity. The apparatus is constructed so that the compartment in which the wafers are handled is isolated and the components handling the wafers in that compartment are made of a fluorinated plastic. The actuators driving the motion of the wafer handling components are located in another compartment. A rinsing device in the wafer handling compartment is activated and deactivate for rinsing one of the wafers without the use of valves in the rinse line.

Abstract: A spin dryer assembly for drying workpieces such as semiconductor wafers includes a workpiece platform for receiving a workpiece to be dried. A motor is coupled to and spins the platform to effect removal of water and particulates from the workpiece. Gripping fingers are pivotally mounted around the platform and securely grip the workpiece during drying. Spring loaded plungers maintain the gripping fingers in a secured position during drying. A cam ring is vertically movable into and out of contact with the gripping fingers to bias the gripping portions of the fingers outwardly to a release position after drying.

Abstract: A centrifugal force salad green spinning system is improved for use with delicate fruits and vegetables such as strawberries and delicate herbs by inserting a secondary receptacle basket with reduced diameter sidewalls into the primary rotary spinning receptacle basket thereby to reduce the magnitude of centrifugal force exerted upon contents of the secondary receptacle basket.

Abstract: An apparatus for purging the backside of a substrate in a process chamber includes a purge gas injector. The injector includes a substantially annular-shaped opening providing a slit that is structured and arranged to direct a flow of purge gas about radially outward therefrom in a direction approximately parallel to a plane defined by the substrate, wherein the substrate is supported in the process chamber above the purge gas injector. When the substrate is rotated at a sufficient speed, the purge gas flowing from the injector is impelled to flow spirally outward along the backside of the substrate.

Abstract: A processing apparatus of the invention includes a rotary processing part for rotating and drying plural sheets of objects to be processed collectively in order to allow the object to be rotated immediately after they are accommodated in the rotary processing part and a balance adjusting mechanism for adjusting balance of the rotary processing part by moving counterweights in accordance with the number of the objects. Further the processing apparatus further includes a counter for counting the number of the objects accommodated in the rotary processing part and a control unit for controlling the balance adjusting operation of the balance adjusting mechanism in accordance with a predetermined relationship between the number of objects and the respective positions of the counterweights.

Abstract: Coal or other mineral slurry is dewatered by establishing a bed of the slurry and injecting a gas stream such as air into the bed to establish turbulent flow to strip moisture. This slurry may use particles in the range 0.5 mm to 30 mm with air injected at about 10 m/sec, and suitable novel apparatus includes a centrifuge or a vibratory conveyor with a closed tunnel and transverse air flow for stripping moisture.

Abstract: A vacuum processing system has a process chamber with a rotating member, such as a magnetron in a physical vapor deposition (PVD) chamber, disposed near a surface, such as a target in a PVD chamber. The rotating member and the surface are cooled by a cooling fluid. The rotational motion of the rotating member induces the cooling fluid to circulate around the rotating member and between the surface and the rotating member, thus efficiently cooling the rotating member and the surface with a quickly flowing fluid.The rotating member has a fluid conduit extending from the rotational center of the rotating member to the outer edge of the rotating member. The cooling fluid inside the fluid conduit is subject to a centrifugal force under the action of the rotational motion, so that the cooling fluid is induced to flow from the rotational center to the outer edge, thus forcing the cooling fluid to circulate.

Abstract: A rotary processing apparatus comprises a rotary table on which a substrate to be processed is placed, a rotary drive means for rotating the rotary table, a plurality of holding members each rotating together with the rotary table having a rotation supporting point at a position close to a peripheral portion of the rotary table, for holding a peripheral portion of the substrate above the rotary table, and including one end having a holding portion for holding the substrate to be processed and the other end having a portion to be pressed, an urging member provided on the rotary table, for urging the holding portion of each of the plurality of holding members towards a center of the rotary table, a pressing member provided underneath the rotary table for pressing the portion to be pressed to a direction opposite to the urging direction of the urging member, and a drive mechanism for driving the pressing member in up and down directions.

Abstract: The present invention relates to a wafer cleaning machine having an input station, a water track, a cleaning station, a rinsing station, a spin-dry station, and a load station. The input station includes two or more wafer supply areas for a continuous supply of wafers to the water track. After the wafers enter the water track from the input station, the wafers are transported down the track into the wafer cleaning station. The wafer cleaning station comprises a plurality of pairs of rollers which pull the wafers through the cleaning station and thereby clean the top and bottom flat surfaces of the wafers. A cleaning fluid manifold formed within the upper panel of the cleaning station facilitates effective distribution of the cleaning fluid to the rollers. From the cleaning station, the wafers are transported to a rinse station. From the rinsing station, the workpieces are transferred to a dual spin-dry station.

Abstract: A paint spinner uses a Yankee screwdriver or other mechanism having a driving rod with some combination of an unusually tight winding or gearing, an overlength rod, gearing of the drive shaft, a slip clutch and a flywheel to rotate a small diameter roller cover at speeds in excess of 800 revolutions per minute which are sufficient to clean the roller cover.

Abstract: A salad spinner having a base which receives a basket for rotation therein. A cover mounts to the base and includes a drive plate with engages the basket to drive same. The basket includes an upper edge spaced closely to the base for stability. The basket further includes one or more access depressions permitting a user to insert a finger between the basket and base. The drive plate includes one or more drive projections which abut against the access depressions, permitting these access depressions to also be used as a portion of the drive train. The cover may be inverted to an inoperative position for reduced storage space, and a storage cap may be secured to the base to store the salad spinner, of simply the contents of the base, free from contamination.

Abstract: Centrifugal filtration capable of improving recovery of crystal in a baskey. The basket is so arranged that a central axis thereof is inclined with respect to a horizontal direction to obliqely downwardly orientate a bottom wall of the basket. A crystal recovery auction pipe is arranged which includes a pivotally movable section pivotally moved in the basket, of which a distal end is advanced into crystal in the basket. Crystal in the basket is recovered by suction through the distal end of the suction pipe, which is ultimately displaced to a corner of the basket between a lowermost portion of a peripheral wall of the basket and a bottom wall thereof. This permits crystal collected to a lowermost section of the basket to be substantially recovered by suction through the suction pipe, to thereby improve crystal recovery.

Abstract: A method of processing a disk-shaped substrate, or wafer, during a chemical vapor process includes a backside purge of the substrate with a purge gas. The backside purge is obtained by spinning the substrate about a central axis, directing a flow of the purge gas over the backside of the spinning substrate, and causing the purge gas to flow in an outward radial direction with the spinning substrate. An apparatus in a vapor processing system structured for conducting the backside purge includes a support mechanism structured and arranged to support the substrate and spin the substrate about a central axis, and a conduit coupled to a source of purge gas, structured and arranged to direct a flow of the purge gas over a backside of the substrate while the substrate is spinning such that the spinning substrate causes the purge gas to flow radially outward.

Abstract: A substrate gripper device for gripping a substrate has a rotatable substrate stage, a plurality of fixing fingers vertically mounted on an outer edge of the rotatable substrate stage and having respective horizontal substrate rests for placing thereon an outer edge of the substrate, and a plurality of swing fingers angularly movably supported on the fixing fingers, respectively, for vertically gripping the substrate in coaction with the fixing fingers. The swing fingers are normally biased to move in a closing direction toward the fixing fingers, respectively, by helical springs acting on the swing fingers. A plurality of opening pins are vertically movably disposed below the swing fingers, respectively, and movable upwardly for angularly moving the swing fingers in the opening direction against biasing forces of the helical springs. An opening mechanism is vertically movably disposed below the substrate stage for simultaneously moving the opening pins upwardly.