Abstract: Embodiments of the invention provide a spin rinse dry (SRD) chamber for a semiconductor processing system. The SRD chamber includes a selectively rotatable substrate support member having an upper substrate receiving surface formed thereon, and a selectively rotatable shield member positioned above the upper substrate receiving surface, the rotatable shield member having a substantially planar lower surface that may be selectively positioned proximate the upper substrate.

Abstract: A deflector mounted on the internal surface of a cylindrical screen in a centrifugal pellet dryer. The deflector is one or more vertical strips mounted in spaced relation on the interior surface of the screen by bolting to mating mounting strips on the outside of the screen. The deflector strips deflect the pellets moving along the interior surface of the screen. The edge of the deflector strip facing the direction of movement of the circulating pellets is inclined to deflect the pellets back toward the rotor. In another form, the deflector strip has angled flanges with one flange clamped between outwardly extending vertical side edge flanges on the cylindrical screen. The other flange extends at an oblique angle to deflect the circulating pellets back toward the rotor.

Abstract: Spin drying of a stack of flats such as egg trays is performed within a housing by movement of a rotatable lifting head into engagement with the undersurface of the stack. A stack lifting device lifts the lifting head and the stack of flats positioned thereon vertically upwardly into engagement with a drive engagement device thereabove which is rotatably powered by a drive with an optional braking device. Operation of the drive will cause rotation of the lifting head, the stack of flats and the drive engagement device simultaneously. The stack of flats will be held between the lifting head engaging the lower surface thereof and the drive engagement device engaging the upper surface thereof for fixedly securing these three elements together during powered rotation thereof. The rotation will spin off any liquids remaining on the flats such as would be present after being washed.

Abstract: A roller squeegee and spinner adapter tool is disclosed for safely, easily, speedily and thoroughly removing paint or other coating material from a roller by squeegeeing or sliding the major bulk of paint from the roller and then attaching a mini-roller to a paintbrush and roller spinner for conveniently removing residual paint and cleaning solution from the mini-roller via the spinning action (centrifugal force) of the spinner.

Abstract: Embodiments of the invention generally provide a multistage semiconductor processing tool, wherein the processing tool includes a first transfer chamber having a first substrate transfer robot positioned therein and at least one load lock chamber in communication with the first transfer chamber. The at least one load lock is generally configured to communicate substrates into and out of the first transfer chamber. Further, the processing tool includes at least one substrate cleaning chamber positioned in communication with the first transfer chamber. The at least one substrate cleaning chamber generally includes a substrate support member, a broadband actuation device in communication with the substrate support member, and a particle removal device configured to sweep away dislodged particles from an area proximate the substrate surface.

Abstract: A wafer chuck for use in a semiconductor process chamber capable of producing an inert gas blanket positioned on the chuck from residual chemical vapor in the chamber is disclosed. A plurality of mounting pins for supporting a wafer is further provided in the upper surface for forming an inert gas into a cavity formed between the wafer and the upper surface of the chuck. A plurality of apertures in a sidewall of the body portion for flowing an inert gas into the lower chamber forming an inert gas blanket blocking a passageway between the upper and lower chambers, thus preventing the wafer from damage by residual chemical vapor in the lower chamber.

Abstract: In order to create a solid-bow centrifuge for mechanical drainage and thermal drying of sludges, in which the possibility of clumping or of bake-on of the finely dispersed thick matter spun off from the thick matter outlet openings is minimized or prevented, according to the invention it is proposed to provide in the flight path of the spun off thick matter, a baffle cone surrounding the thick matter outlet openings at a distance and which rotates at a high circumferential velocity, that is, preferably it rotates together with the basket shell, and whose inner, ring-shaped, rotating conical surface accelerates the arriving thick matter and prevents solids bake-on.

Abstract: A centrifugal processor includes an elongated inlet and outlet in fluid communication with a rotor housing having an eccentric bowl. A rotor having fan blades and adapted to hold flat media is rotatably disposed within the rotor housing. An intake gate is pivotably mounted to the rotor housing to swing about the rotor into a closed position during a rinse mode and into an open position during a drying mode. The gate has a wedge that is designed to almost contact the rotor when the gate is in the open position for drying. The geometry of the elongated inlet, outlet, and eccentric bowl, in combination with the design of the rotor and that of the intake gate, work together to create a cross flow fan having a flow path across the flat media and one that exposes the flat media to large volumes of incoming air only once.

Abstract: The invention relates to a method for controlling the surface temperatures of substrates arranged on substrate supports borne by a substrate support carrier on dynamic gas cushions in a processing chamber of a CVD-reactor. The aim of the invention is to reduce or adjust the temperature variations. According to the invention, an average surface temperature value is calculated, being measured in a particularly optical manner, and the level of the gas cushions is regulated by varying the individually controlled gas flow producing the gas cushions in such a way that the variations of the measured surface temperatures in relation to the average value lies within a predetermined temperature window.

Abstract: A cleaning tool is used to remove residual paint from paint application devices such as paintbrushes and paint rollers. The tool uses at least two pliable extensions that extend from a base. Opposite to the extensions, a chuck adaptor is provided. A paintbrush is received by, and supported between, the extensions and a paint roller can be received by and supported over the distal ends of the extensions and a portion of the base. The chuck adaptor is secured within the chuck of a drill or spinner and rotated, preferably within a container of liquid solvent such as water or paint thinner. The pliable extensions not only flex to allow the brush handle to be inserted and removed from the tool, but during the rotation of the brush within the solvent, the extensions flex slightly to allow a translating rotation of the brush through the solvent, more completely cleaning the brush and doing so in a more expeditious manner.

Abstract: The present invention is a dryer for use with solid-form objects suitable for a continuous process production environment, such as some kinds of produce and vegetables. The apparatus uses a variable-speed accelerator belt to rapidly load objects. The dryer has a domed shaped retaining door to force objects to the perimeter of the perforated spinning drum. In operation the apparatus uses a method to vary the speed of the accelerator belt to accomplish even self-balanced stacking of the objects within the drum. The method also includes varying the drum rotation speed from a slow rotation during loading, permitting self-balancing of the contents of the drum, to a higher drying speed that extracts liquid from the objects.

Abstract: In a method for centrifugally dehydrating a pallet or the like, the pallet or the like is held on a diagonal line thereof, and is rotated in a state where the diagonal line is substantially aligned with an axis of rotation, thereby removing a liquid adhered thereto.

Abstract: A vertical, centrifugal separator used for drying drill cuttings prior to transport or further processing. The separator is adapted to receive scavenged heat from any source and is further adapted to include internal conveyers, thereby lowering the overall operating profile and providing increased cuttings retention time within a heated environment.

Abstract: A drying apparatus which prepares granulated plastic for an injection molding machine, including a centrifugal apparatus configured for receiving the granulated plastic therein, at least a portion of the centrifugal apparatus being configured to rotate and thereby impart centrifugal force upon the granulated plastic and a dry air distributor fluidly coupled with the centrifugal apparatus and configured to deliver dry air within the centrifugal apparatus.

Abstract: For separating and drying pellets from a suspension, centrifugal dryers have proved successful wherein a rotor equipped with conveyor blades and disposed vertically in an outside housing for collecting the liquid is enclosed coaxially by a hollow body formed of screen elements. The suspension of pellets and liquid is supplied continuously to the lower area of the space between the hollow body and the rotor. The pellets are transported upward by the conveyor blades rotating with the rotor while being thrown back and forth and dried between the conveyor blades and the screens. At the upper end of the rotor the dried pellets are thrown off. The liquid separated from the pellets passes through the screen jacket and flows out of the discharge port of the outside housing.

Abstract: A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

Abstract: A battery-operated two-speed salad spinner. The bowl receives one of two differently sized baskets. A cover includes a driving mechanism that rotates a selected bowl through a driving wheel.

Abstract: The operation of dewatering and drying devices which consist of a dewatering centrifuge and a concentrically arranged spray drier may be disturbed by leaks between the drier housing and the centrifuge or by deposits and encrustation of solid particles inside the drier. In order to avoid these disturbances, the rotating outer surface of the centrifuge (1) is sealed with respect to the fixed front walls (13, 14) of the drier housing (11) by a sealing system in two or more stages which consists of rotary seals (160) and elastic or sliding sealing elements (180, 260, 300, 340). The rotating outer surface of the centrifuge (1) is provided, with turbulence-generating means (32, 33, 40, 42, 46), preferably torus-shaped turbulence-generating rollers, arranged inside the drier housing (11).

Abstract: An apparatus and associated method for securing a wafer to a SRD spider, the SRD spider has a plurality of spider arms. The apparatus includes a plurality of spaced surfaces disposed on a distal end of one of the spider arms, each of the surfaces being spaced perpendicularly from the longitudinal axis of the spider arm. In one aspect, the two surfaces are positioned to limit production of a wedging force between that spaced surface and the wafer. In one embodiment, a post at least partially defines each one of the plurality of spaced surfaces.

Abstract: Methods of coating an implantable device and a system for performing such methods are disclosed. An embodiment of the method includes applying a coating substance to the surface of an implantable device, and rotating the implantable device in a centrifuge. The method can uniformly coat the implantable device with the coating substance and to remove unwanted accumulations of coating substance entrained between struts or crevices in the implantable device body. This system is applicable to methods for coating intraluminal stents, synthetic grafts, and stent coverings with therapeutic compositions comprising therapeutic agents mixed with a polymeric matrix and a solvent.

Abstract: A sponge sleeve installation appliance for installing a sponge sleeve onto a roller has an elongated socket body including a sleeve portion and a tapered portion. The sleeve portion has an outer circular diameter slightly larger than an inner diameter of the sponge sleeve which when not deformed defines an interior space for accommodating at least part of the roller inserted from a bottom of the sleeve portion. The tapered portion has a cone shape with a bottom connected to a top of the sleeve portion which protrudes and tapers off from the sleeve portion in a longitudinal direction of the sleeve portion.

Abstract: Embodiments of the invention provide a spin rinse dry (SRD) chamber for a semiconductor processing system. The SRD chamber includes a selectively rotatable substrate support member having an upper substrate receiving surface formed thereon, and a selectively rotatable shield member positioned above the upper substrate receiving surface, the rotatable shield member having a substantially planar lower surface that may be selectively positioned proximate the upper substrate.

Abstract: A centrifuge for draining washed egg trays comprises a centrifuge chamber in a housing (9). A bottom (8) for receiving a washed stack (7) of egg trays in a feeding position is displaceable with respect to said housing (9) between the feeding position and a centrifuging position. The stack (7) of egg trays is centred on the bottom in the centrifuging position, and in this position the bottom is in engagement with a rotational drive (22, 23), which is vertically non-displaceable with respect to the housing.

Abstract: An apparatus for spin drying a semiconductor wafer includes a hollow core spindle and a chuck assembly having grippers for supporting a wafer at an edge thereof. A sleeve is disposed in the central opening of the spindle and a manifold is disposed in the upper end of the sleeve. A capacitance sensor is affixed to the manifold. In another apparatus, an arm having a capacitance sensor mounted thereon is positioned such that the capacitance sensor is disposed above a space to be occupied by a wafer that is supported by the grippers. Yet another apparatus includes an arm having a light source and a detector mounted thereon. The light source directs light toward a surface of a wafer such that light that reflects off of the surface is substantially perpendicular to that surface. The detector is positioned to measure the intensity of the reflected light.

Abstract: Embodiments of the present invention relate to an apparatus for spin drying substrates in a spin dryer tank. A spin dryer cover is movable between a closed position to close an opening of the spin dryer tank and an open position to open the spin dryer tank, and a cylinder is coupled with the spin dryer cover. The cylinder is movable in a first operation to move the spin dryer cover to the open position and movable in a second operation to move the spin dryer cover to the closed position. A system for sensing the position of the spin dryer cover comprises a cylinder sensor configured to sense the first operation and the second operation of the cylinder. A cover sensor is configured to sense the position of the spin dryer cover. A logic circuit is configured to output a cover opening signal indicating that the spin dryer cover is in the open position when the cylinder sensor senses the first operation of the cylinder and the cover sensor senses that the spin dryer cover is in the open position.

Abstract: A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

Abstract: A centrifugal dryer of the present invention includes: a chamber for performing drying processing for plural substrates; a cradle, installed inside chamber, and drying plural substrates by rotation driving in a state of being held therein; and an elastic wave sensor for detecting an elastic wave generating upon striking of a chip from plural substrates to said chamber during the processing therefor.

Abstract: A deflector associated with the internal surface of a cylindrical screen in a conventional centrifugal pellet dryer. In a preferred form, the deflector is one or more vertical deflector strips mounted in circumferentially spaced relation on the interior surface of the dryer cylindrical screen by bolting to mating mounting strips on the outside of the screen. The deflector strips disrupt the circular flow of the particles along the interior surface of the screen. The edge of the deflector strip facing the direction of rotational movement of the rotor and circulating particles is preferably inclined to deflect the particles back toward the rotor. In another form, the elongated deflector strip has generally an angle iron shape with one flange clamped between the outwardly extending vertical side edge flanges which are bolted together to form the cylindrical screen and the other flange extending at an oblique angle into the clearance band to deflect the circulating particles back toward the rotor.

Abstract: In a method for centrifugally dehydrating a pallet or the like, the pallet or the like is held on a diagonal line thereof, and is rotated in a state where the diagonal line is substantially aligned with an axis of rotation, thereby removing a liquid adhered thereto.

Abstract: A centrifugal dryer for leafy comestibles includes a basket within a cylindrical cabinet. Overlying the cabinet is a cover assembly having a lid, an external crank arm and a gear train sealed within a gearbox mounted to the underside of the lid. An output shaft of the gear train engages a central tower of the basket to rotate the basket about a vertical axis. The cover assembly includes a hand brake mechanism having a brake pad which selectively engages an upper peripheral lip flange of the basket for stopping rotation without straining the gear train.

Abstract: A wet material treatment apparatus includes an inlet hopper for introducing the wet material into the apparatus. The hopper feeds the wet material into an injector auger that physically directs the wet material into a high velocity air stream produced by a blower thereby directing the flow of the wet material through the apparatus. The wet material moves from the injector auger into a cyclone that separates the wet material through specific gravity and desiccation into a substantially liquid and a substantially solid portion. The substantially liquid portion is discharged through a first outlet in the cyclone to a wet scrubber, while the substantially solid portion of the wet material is discharged through a second outlet. The apparatus can be mounted to a trailer for mobile transportation, and can include two cyclones operating in series.

Abstract: An apparatus for agitating a workpiece in a high pressure environment comprises a workpiece holder, a bearing, a pressure chamber housing, and a nozzle. The workpiece holder couples to the pressure chamber housing via the bearing. The nozzle couples to the pressure chamber housing. The workpiece holder comprises protrusions and a region for holding the workpiece. In operation a fluid exits the nozzle and impinges the protrusions of the workpiece holder causing the workpiece holder to rotate, which agitates the workpiece.

Abstract: Improved honey extraction devices are provided by increasing the number of honeycomb baskets carried by centrifugal honey extraction devices. The designs of prior art extractors are altered by either incorporating multi-layer honeycomb basket assemblies into their design or providing additional honeycomb baskets substantially aligned with the honeycomb baskets pre-existing in the prior art designs. The multi-layer honeycomb basket assemblies include a first honeycomb basket having an interior for retaining a honeycomb and at least a second honeycomb basket having an interior for retaining a honeycomb. The second honeycomb basket is substantially aligned with the first honeycomb basket and a gap is provided between the first and second honeycomb baskets. A barrier is positioned between the interior of the first honeycomb basket and the interior of the second honeycomb basket. Additional baskets may also be provided in a similar manner.

Abstract: Embodiments of the present invention relate to an apparatus for spin drying substrates in a spin dryer tank. A spin dryer cover is movable between a closed position to close an opening of the spin dryer tank and an open position to open the spin dryer tank, and a cylinder is coupled with the spin dryer cover. The cylinder is movable in a first operation to move the spin dryer cover to the open position and movable in a second operation to move the spin dryer cover to the closed position. A system for sensing the position of the spin dryer cover comprises a cylinder sensor configured to sense the first operation and the second operation of the cylinder. A cover sensor is configured to sense the position of the spin dryer cover. A logic circuit is configured to output a cover opening signal indicating that the spin dryer cover is in the open position when the cylinder sensor senses the first operation of the cylinder and the cover sensor senses that the spin dryer cover is in the open position.

Abstract: A food drying device of the type which includes an outer housing, a perforated main container in the housing and a drive apparatus on the housing for rotating the main container relative to the housing, includes a perforated auxiliary container disposable in the main container, and including an open-top bowl-shaped base and a removable lid. The bottom of the base has plural radial grooves which mate with radial ribs on the bottom of the main container so that they rotate together without slippage. A central hub on the main container lid is receivable in a central recess on the auxiliary container lid to limit relative axial movement.

Abstract: A centrifugal pellet dryer apparatus, lifter and rotor wherein the lifters can have a surface configured to deflect pellets inwardly and the rotor can have lifters attached in an arrangement designed to increase pellet impacts with lifters by providing a higher concentration of lifters on the rotor in a first region which initially engages a slurry of pellets and water. The inwardly curved lifters tend to direct the pellets inwards toward other lifters and away from dewatering screens and the higher concentration of lifters on the lower region of the rotor results in added pellet impacts with lifters. The centrifugal pellet dryer can have an outer housing, a base portion with a water discharge outlet and a top portion having a pellet discharge port and an exhaust port. Within the housing can be one or more generally cylindrical foraminous members disposed around the rotor. One or more separator plates can be provided between the foraminous members to divide the pellet dryer into sections.

Abstract: A wafer dryer for drying a wafer includes a chamber and a support adapted to support the wafer in the chamber. A spray nozzle is disposed in the chamber. A source gas supply tank is in fluid communication with the spray nozzle. At least one heater is operable to heat the chamber and the source gas supply tank. A pumping line is in fluid communication with the chamber. Drive means are operable to rotate the chamber and the spray nozzle. A method for drying a wafer using a wafer dryer including a chamber and a revolving spray nozzle includes the steps of: loading the wafer in the chamber; reducing the pressure in the chamber in which the wafer is loaded to a near vacuum state; creating a temperature controlled atmosphere in the pressure-reduced chamber to quicken drying of the wafer; and spraying the source gas on the wafer while rotating the chamber and the revolving spray nozzle in opposite directions in the pressure-reduced temperature controlled atmosphere.

Abstract: A centrifuge for draining washed egg trays comprises a centrifuge chamber in a housing (9). A bottom (8) for receiving a washed stack (7) of egg trays in a feeding position is displaceable with respect to said housing (9) between the feeding position and a centrifuging position. The stack (7) of egg trays is centred on the bottom in the centrifuging position, and in this position the bottom is in engagement with a rotational drive (22, 23), which is vertically non-displaceable with respect to the housing.

Abstract: A roller squeegee and spinner adapter tool is disclosed for safely, easily, speedily and thoroughly removing paint or other coating material from a roller by squeegeeing or sliding the major bulk of paint from the roller and then attaching a mini-roller to a paintbrush and roller spinner for conveniently removing residual paint and cleaning solution from the mini-roller via the spinning action (centrifugal force) of the spinner.

Abstract: Device for drying washed and rinsed crates or cases, comprising a frame and receiving or accommodation spaces carried by the frame for the crates or cases, in which the accommodation spaces are attached to a rotating shaft and are situated on either side of it in a symmetrical manner, and furthermore comprising means for rotating the rotating shaft and thus the accommodation spaces in order to cast off the water present on the crates or cases from them through centrifugal forces.

Abstract: The present invention provides a flow disrupter within the flow path of a slurry comprising a desired particulate matter and a transport fluid so as to impart a force angularly disposed to an otherwise obtained direction of travel, thereby preventing the formation of a sheet of aggregated particulates against the screen surface. In a method in accord with the present invention a force is imparted to the desired particulate matter in an angular direction to the direction of travel.

Abstract: An apparatus for attenuating physical damage to a substrate, along with an attendant method, comprises as a first component a base plate having defined therein a location for receiving a substrate cassette. The apparatus also comprises a substrate retainer movably attached to the base plate such that when the substrate cassette having a substrate contained therein is positioned on the base plate at the location for receiving the substrate cassette, and the substrate is subjected to a mechanical force, the substrate retainer moves such as to retain the substrate within the substrate cassette with a retaining force. Both the apparatus and the method are particularly applicable for attenuating damage to a substrate when spin-drying the substrate.

Abstract: A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.

Abstract: A process for de-watering foodstuffs, such as leafy vegetables, includes moving the foodstuffs along a path, creating an upwardly moving air vortex which intersects the path, thereby raising the foodstuffs upwardly from the path while swirling them in a vortical manner. The foodstuffs raised above the path are received in one end of a duct, the other end of which deposits them on a conveying means. Preferably, the foodstuffs are moved by an air-permeable transport means such as an endless belt. The upwardly moving vortex is created by an air blower which forces air through a tubular portion that contains helically oriented vanes having a tighter and tighter helix in the downstream direction.

Abstract: The present invention is a method of reducing adhered moisture on a wafer. According to the present invention a wafer is first spun dry. After spinning the wafer dry the wafer is passed under a linear source of isopropyl alcohol (IPA) vapor.

Abstract: A dryer for industrial parts, such as engine blocks, is disclosed having a receiving frame and a conveyor which sequentially moves the industrial parts into the receiving frame. A lock pin is movably mounted to the frame and movable between a lock position in which the lock pin engages the industrial part and prevents the movement of the industrial part relative to the receiving frame, and a release position in which the lock pin is spaced from the industrial part thus permitting movement of the industrial part relative to the receiving frame. A shaft is rotatably mounted to the housing and secured to the receiving frame while a motor is mechanically coupled to the shaft so that, upon activation of the motor and with the lock pin in its lock position, the motor rotatably drives the frame with the industrial part thus expelling water and debris from the industrial part by centripetal force.

Abstract: In a machine for processing semiconductor wafers, a rotor includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.

Abstract: In a housing (1), a hollow shaft (3) is located for rotation, driven by a motor (5). Rigidly attached to the shaft (3) is a pressure vessel (6). Fitted to the shaft (3) inside the vessel (6) is a filter comprising a number of tube-shaped filter elements (9). The liquid to be filtered is fed into an upper chamber (19) of the shaft (3) via an inlet ring (18), and flows through transverse holes (20) into the vessel (6). After passing through the filter (9), the purified liquid is discharged via holes (10) in the hollow shaft (3) through an outlet ring (12). To clean the filter the residual liquid in the vessel (6) is pressed out through the filter with compressed air. Subsequently the deposit adhering to the filter tubes (9) is flung off by rotating the shaft (3) and propelled to the bottom of the vessel by feeding compressed air or clean oil to cleaning nozzles (38). An outlet ring (7) is raised slightly and the deposit at the vessel wall is dried by centrifuging.

Abstract: Apparatus for spinning a work piece such as a semiconductor wafer includes a work piece platform that is configured to be rotated about a central axis. Arrayed about the periphery of the platform is a plurality of spaced apart, symmetrically positioned work piece supports. Each of the supports includes a resilient bumper that serves both to support the work piece and as a friction brake to retard slippage of the work piece relative to the platform when the platform and work piece are rotating, and especially when the platform is accelerating or decelerating. Also arrayed about the periphery of the work piece platform is a plurality of work piece gripper assemblies configured to center the work piece in contact with the work piece supports when the platform is rotating. The gripper assemblies include a gripper finger that is configured to pivot about a pivot axis from a non work piece gripping position to a work piece gripping position in response to centrifugal force generated by the rotation of the platform.

Abstract: A centrifugal wafer drying apparatus comprises a rotor rotatably disposed in a container, a cradle mounted on the rotor, and a carrier mounted in the cradle and having grooves for receiving wafers. The carrier holds the wafers at an oblique angle with respect to a plane normal to the axis of rotation of the rotor, at least during rotation of the rotor.