Abstract: The present invention relates to (1) a cleaning gas for cleaning semiconductor production equipment, obtained by mixing SF6 and one or both of F2 with and NF3 with an inert gas at a specific ratio; (2) a cleaning gas for cleaning semiconductor production equipment, obtained by mixing SF6 and one or both of F2 and NF3 with an inert gas and an oxygen-containing gas at a specific ratio; (3) a method for cleaning semiconductor production equipment using the gas; and (4) a method for producing a semiconductor device including a cleaning step using the cleaning gas. By using the cleaning gas for semiconductor production equipment of the present invention which is high in the etching rate, efficient cleaning and production of semiconductor production equipment with excellent cost performance can be achieved.

Abstract: A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure which includes a robot for conveying a wafer held on the cassette mount table, a vacuum loader which includes an additional robot, an additional conveying structure and a plurality of lock chambers.

Abstract: A method and an apparatus for reducing the moisture content bound by capillary action in fiber cells. To include fine material economically and easily in the process, coarse material is sandwiched on top of fine material and then pressed and dried. The material prepared by grinding and screening is transferred as coarse material to a first spreader hopper, and the screened fine material is transferred over a chute and conveyor belt to a second spreader hopper. The fine material is spread in a thin layer through a vertically adjustable gate from the second spreader hopper onto a spreading, loading and filtering belt, and the coarse material is withdrawn on a transfer conveyor belt running below the first spreader hopper and then is spread through a vertically adjustable gate onto the fine layer, to form a sandwich-like mat.

Abstract: The invention relates to a device for heating and drying parts (2) with cellulose or plastic based hygroscopic electroinsulations, especially for the preparation of new or used transformers, condensers, instrument transformers or electric leadthroughs in a vacuum by means of condensation heat from the steam of a heating fluid (a solvent, kerosine). During heating, at least one higher-boiling second liquid, such as transformer oil, results from said parts (2). The inventive device also comprises a vessel, a vacuum pump (10), at least one condenser (3 and/or 8) and a heat exchanger (16) for the heating fluid. In order to provide a mobile system enabling local treatment of transistors (2) which are already in operation, the heat exchanger (16) heats the heating fluid in the liquid phase and evaporation occurs on or in the vessel, for example, via expansion valves (18) and/or in an expansion container or evaporator arranged directly on the vessel.

Abstract: A wafer conveyor system for used in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer horizontally from a position in a cassette to an opposite postion of the cassette.

Abstract: A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a robot disposed in the conveyor chamber of the vacuum loader. The robot includes an arm which is extendible into the lock chambers which are connected to the conveyor structure.

Abstract: An organic antireflection coating is formed on a semiconductor substrate. A resist film is formed on the semiconductor substrate through the organic antireflection coating. The resist film is patterned for forming a resist pattern having an opening. A part of the organic antireflection coating exposed on the bottom of the opening of the resist pattern is removed with atomic oxygen. Thus provided is a method of forming a resist pattern so improved as to increase the dimensional accuracy of the resist pattern.

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure that includes a robot, a cassette table for holding the cassette, an additional conveying structure for transferring a wafer held on the cassette table. Further, the apparatus is provided with a vacuum loader which is connected to the additional conveying device by a lock chamber. a controller system controls the second conveyor structure and manages the replacement of the cassette on the cassette table; and further, instructs the replacement of the cassette.

Abstract: An improved process for removing trace solvent from a material comprises rewetting the product with water during the drying process. Finished products such as suramin are produced efficiently to a high quality on a factory scale.

Abstract: A vacuum processing system, including a vacuum processing chamber for processing wafers, provides a controller for controlling a wafer processing mode and a cleaning mode for the processing chamber. The vacuum processing system further provides for a wafer moving mechanism which is controlled by the controller and allows for the transferring of a dummy wafer into the processing chamber when the cleaning mode is started and then returning the dummy wafer when the cleaning mode is finished.

Abstract: The process of mitigation of spacecraft surface charging using ionized water vapor is used, since it helps taking excess surface electrons away from a spacecraft surface, leaving practically no residue after complete evaporation.

Abstract: An apparatus (1) for drying solvent-based ink is described, in which the ink is applied onto plastic cassettes for histological preparations and/or on glass specimen slides (17) for microscopic thin sections. The apparatus (1) comprises a hot-air blower (2) and/or a flash device (3) for drying the ink.

Abstract: A handler system is provided with an on-loader unit for loading at least one of strips deposited in a cassette, a drawer unit for holding the strip from the on-loader unit at a drawer picker, a strip transferring unit for fixing in a suction manner after the holding its picker head and for transferring the strip to a cutting device, cut it into a plurality of individual package devices, a package cleaning unit for cleaning the individual package devices using a brush and an air nozzle after to fixing and retaining the individual package devices thereon by using a suction vacuum force, a package drying unit for drying the individual package devices after the cleaning, a package deposit unit for moving and depositing after drying, a package pick-up unit for retaining and for arranging the individual package devices for a quality inspection, the package pick-up unit mounted on one side of the package deposit unit, a visual inspection means for inspecting the quality of the individual package devices being, and a

Abstract: A vacuum processing apparatus which includes a cassette mount table for holding a cassette, a conveying structure for transferring a wafer from the held on the cassette mount table, a robot, and a vacuum loader. The vacuum loader is provided with a vacuum conveyor chamber and a conveying structure which further include an additional robot.

Abstract: A method and apparatus for heating and cooling a substrate are provided. A chamber is provided that comprises a heating mechanism adapted to heat a substrate positioned proximate the heating mechanism, a cooling mechanism spaced from the heating mechanism and adapted to cool a substrate positioned proximate the cooling mechanism, and a transfer mechanism adapted to transfer a substrate between the position proximate the heating mechanism and the position proximate the cooling mechanism.

Abstract: The present invention is a method of reducing adhered moisture on a wafer. According to the present invention a wafer is first spun dry. After spinning the wafer dry the wafer is passed under a linear source of isopropyl alcohol (IPA) vapor.

Abstract: A system for stripping an optical fiber includes a source air, and means for generating very short bursts of air. A heater heats the bursts of air to a temperature sufficient to remove the outer coating from an optical fiber, while maintaining the air isolated from the heat source. The heater includes a heater core that includes a heat generating element such as a conductive filament, and a heat chamber enclosed within the heater core. A spiral-shaped air conduit surrounds the outer surface of the heater core, and communicates with the heat chamber. Upon injection of air into the conduit, heat is transferred to the air from the heat generating element while the air flows through the air conduit and into and out of the chamber. A single burst of heated air removes the outer coating of an optical fiber, within less than one second.

Abstract: This invention discloses a dual fiber optical component that includes a first holding tube for containing and holding a dual fiber capillary and a collimator lens. The dual fiber capillary has first optical fiber and a second optical fiber with the first optical fiber transmits an input light beam for projecting through the collimator lens as a collimated beam. The dual fiber component further includes a second holding tube containing and holding an optical filter for receiving the collimated beam from the collimator lens. The filter further projecting a portion of the collimated beam back through the collimator lens for transmitting to the second optical fiber of the dual fiber capillary. The first holding tube has a first interface tube end forming with a convex spherical profile and the second holding tube has a second interface tube end forming with a concave spherical profile corresponding to the convex spherical profile of the first interface tube end.

Abstract: A dehydration device is proposed, in which a tub body is formed with a receiving space for receiving a bag containing substances e.g. water-containing garbage to be dehydrated. In operation, after placing the bag in the receiving space, a base board of the tub body can be driven by a driving mechanism to move downwardly so as to squeeze the bag in a manner that, a plurality of sharp portions formed on the base board can pierce bottom of the bag, allowing air and liquid to flow out from the bag to achieve the dehydration purpose. After completing dehydration, residue of the dehydrated substances together the bag are removed from the dehydration device; this makes the dehydration conveniently cleaned after use. The substance residues can then be easily separated from the bag simply by shaking the pierced bag to tear it apart. This therefore facilitates the implementation of garbage sorting.

Abstract: Holders (20) for articles such as newly-formed packets or groups of cigarettes are used to constrain and protect the articles while being conveyed by handling apparatus (22), e.g. in a packing machine (10). Holders (20) of similar external shape, adapted to interface with the handling apparatus, may be provided with differing internal features (28), adapted for receiving different articles, so that the articles may be readily conveyed by the same apparatus. The apparatus may be employed at the exit end of a cigarette packing machine to maintain the shape of newly-formed packets in a packet stabilising region. This region may comprise a reservoir including a series of compartmented drums (24,26) in which each compartment receives a line of abutting holders which is indexed in an axial direction during rotation of the drums.

Abstract: An improved tray-scanning station for a tray-fed scanning acoustic microscope prevents the dislodging of small, loosely held parts from the trays by coupling fluid as the trays pass through an inspection station, or by the action of a dryer as the trays pass through a drying station.

Abstract: A drying device capable of keeping substantially constant the temperature of a moving recording sheet and evenly drying it without increasing radiation heat. Though the surface temperature of a recording sheet is lower on the upstream in the drying region and the temperature of outside air blown into the drying region is lower, the temperature of the recording sheet moved in the drying region is kept substantially constant by making the output of the upstream halogen lamp larger than that of the downstream halogen lamp. Even if the airflow velocity in the drying region is different, the radiation heat amount is adjusted according to the velocity to keep substantially constant the temperature of the recording sheet moved in the drying region. Thus, the recording sheet can be evenly dried and even if a jam of the recording sheet occurs in the drying region, there is no possibility of scorching, fuming or the like.

Abstract: A system for cleaning disc drive components includes a rotary support member for receiving an assembled disc drive component. A rotary drive motor is coupled to the rotary support member for rotating the rotary support member and disc drive motor supported thereon together at a rotation speed to impart a centrifugal force on any excess lubricant contained by the disc drive motor of sufficient magnitude to draw the excess lubricant from the disc drive motor. The system may also or alternatively include an enclosure defining an interior having an oxygen-containing environment. A support platform is disposed within the oxygen-containing environment of the interior of the enclosure, for supporting a disc drive component within the oxygen-containing environment of the enclosure, for example, after the component is removed from the rotary support member.

Abstract: The present invention relates to a vapor phase reflow system comprising at least one soldering zone and a process zone, a primary liquid reservoir containing a primary liquid, the vapor phase reflow system further comprising a heating means for converting the primary liquid into the vapor phase. The system is characterized in that primary liquid or the vapor thereof or both can be introduced by means of a primary-liquid fluid line into a soldering-zone heating module in fluid communication with the soldering zone and into a process-zone heating module in fluid communication with the process zone, the heating capacity of the soldering-zone heating module and of the process-zone heating module being adjustable independently of each other to thereby generate superheated vapor based on the zones. Furthermore, the invention relates to a method for operating a vapor phase reflow system.

Abstract: A system for cleaning a reticle. There is provided a clean chamber and a reticle having a pair of opposing edges and a pair of opposing surfaces which is to be cleaned disposed in the clean chamber. A gas inert to the reticle is directed in a direction tangential to each of the surfaces of the reticle and along one the edge of the reticle. The gas is exhausted from a location spaced from the other of the pair of opposing edges and remote form the one edge. An optional monitor monitors the particles in the exhausted gas. The gas is preferably applied in pulses which have a pulse length of from about 0.05 second to about 1 second and a pulse repetition rate of from about 0.5/second to about 40/second. The gas is preferably ionized and preferably is applied at a pressure of from about 20 psi to about 120 psi. The stepper chamber is vibrationally isolated from the blow-off chamber.

Abstract: A dryer for drying continuous strips of paper uses blowing and suction airflows. The temperature of the suction airflow is higher than the temperature of the blowing airflow. The dryer exchanges energy between the blowing and suction airflows.

Abstract: The device that has been invented, sprays water into and around a windrow of hay evenly adding moisture to dry alfalfa to allow for baling at moistures above 14% and below 18%, reducing the losses of leaves due to shatter.

Abstract: A device that utilizes a method to heat dyes to color plastic lenses. The device is an electrically heated outer tank containing a heat transfer medium. An inner tank containing a dye solution is placed in side the outer tank. Lenses are placed in the dye solution along with sensor probes and microprocessor control to maximize dye diffusion into the lenses and minimize boil over of the tanks. Spill containment and agitation stirring are also features which enhance diffusion of dye into the lenses while minimizing boil over.

Abstract: A process chamber 25 for processing a semiconductor substrate, comprises a support for supporting a substrate 50. A gas distributor 90 provided for introducing process gas into the chamber 25, comprises a gas nozzle for injecting process gas at an inclined angle relative to a plane of the substrate 50, into the chamber 25. Optionally, a gas flow controller 100 controls and pulses the flow of process gas through one or more gas nozzles 140. An exhaust is used to exhaust the process gas from the chamber 25.

Abstract: The invention relates to a method of producing a thickened slimes fraction blended with a tailing fraction for delivery to a discharge or disposal point (38). The method includes the steps of forming a bed of tailings fraction on a de-watering screen (28) and delivering a thickened slimes fraction onto the bed of tailings fraction. The slimes fraction (30) is then allowed to de-water through the bed and the screen.

Abstract: A portable sport equipment bag having an air distributor is connected with a hose to blower and ozone generator operable to move air and ozone under pressure into the air distributor. The air distributor has one or more manifolds located within the bag. The manifolds have a plurality of holes to allow air and ozone in the manifolds to flow into the bag to dry sport equipment and objects within the bag and destroy bacteria, molds and fungus in the bag. One or more air filters mounted on the bag remove odors and foreign matter from the air flow from the bag into the environment adjacent the bag.

Abstract: A method and apparatus for processing whole head vegetables, characterized by a core end, and an open leafy end, is disclosed. Whole head vegetables pass through a washer which has a bottom belt which runs through the length of the washing line and passes through a first and a second tank (or more tanks) of cleaning water. Between the first and second cleaning tanks, a plurality of spray bars further clean the whole head vegetables. Top belts at each of the cleaning tanks above the bottom belt to secure the produce as it passes through the first cleaning tank and through the second cleaning tank. The lower belt, and the upper belts are controlled by a single speed control system resulting in less damage to the produce. Additionally, the angle of the belts conveying the produce through the two cleaning tanks is chosen for optimum performance.

Abstract: The present invention relates to the wetting or providing moisture throughout a container of a powdery dry material such as an emission control baghouse dust. A collection hopper container is provided which usually comprises a box like structure with a sealable cover or top. A supply of low-pressure steam is provided to a plurality of conduits that extent through the cover and extend downwardly into the collected powdery material. By the injection of low-pressure steam through the plurality of conduits and outwardly into the powdery material through openings in the conduits, moisture is provided throughout the powdery material to lessen the dusty nature of the material to enable further processing to be accomplished more readily.

Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.

Abstract: A device and method for use with an automatic laundry dryer for conditioning laundry articles during the drying cycle. The device comprises a carrier impregnated with microencapsulated fluid, for use with an automatic laundry dryer for dispensing said fluid during the drying cycle thereby conditioning laundry articles. In the preferred embodiment, a polyurethane foam carrier is impregnated with a microencapsulated active agent fluid for rendering the laundry articles substantially static-free and/or for dispensing fragrance to provide the articles with a desirable scent.

Abstract: A portable sport equipment bag having an air distributor is connected with a hose to blower operable to move air under pressure into the air distributor. The air distributor has one or more manifolds located within the bag. The manifolds have a plurality of holes to allow air in the manifolds to flow into the bag to dry sport equipment and objects within the bag. One or more air filters mounted on the bag remove odors and foreign matter from the air flow from the bag into the environment adjacent the bag.

Abstract: The spray dryer comprises a rectangular upper body(1), a middle body(2) having a pair of side walls inclining inward and approaching mutually along larger side walls of the upper body, a rectangular bottom body(3), a ceiling board(4), a bottom plate(5), a vertical partition wall(6) for separating the upper body into a larger chamber(7) and a smaller chamber(8), and a gas stream dispersing perforated plate(14) disposed in a middle portion of the bottom body. The larger chamber(7) works as a spray drying zone and the upper half portion(17) of the bottom body works as a fluidized drying zone. Raw material fluid and hot gas are introduced downward into the larger chamber, and sprayed smaller size fluid particles are dried completely in the spray drying zone to have a low density, and enter to the lower bottom part of the smaller chamber with exhausted hot gas and turn upward to be discharged from outlet(13) disposed in an upper portion of the smaller chamber.

Abstract: Method and apparatus are provided for reprocessing dry pellets made of waste bio-solids in which the pellets and wet sludge waste bio-solids are supplied to the inlet of a material combining conveyor whose angular position can be adjusted. The pellets are coated with the sludge as they travel along the material combining conveyor to its output which feeds a dryer or oven. By adjusting the speed, length and angular position of the material combining conveyor, the amount of sludge coated onto the pellets can be controlled. The material combining conveyor is preferably a sealed shaftless screw conveyor that extends in a generally veritcal direction so that pellets not properly coated fall by gravity to the conveyor inlet. Dry pellets and wet sludge can be supplied from separate bins to a common feed conveyor such as a shaftless screw conveyor which conveys the mixture to the input of the material combining conveyor.

Abstract: A mobile carpet dryer that includes a blower unit that forces heated air onto the carpet. The dryer further includes a vacuum unit that draws water out of the carpet to greatly speed the drying process. The blower unit and the vacuum unit are mounted in a wheeled housing to provide easy portability of the dryer.

Abstract: A component drier for drying electronic components which are washed with solvent. The component drier includes a drying chamber, in which a vat having a bottom surface wall allowing passage of air and water is arranged. The vat stores components to be dried. Heated air is introduced into the drying chamber through an air inlet which is positioned above the vat. The air in the drying chamber is forcibly discharged through an air outlet which is positioned below the vat. Thus, a space under the vat has a sufficient negative pressure as compared with a space above the vat so that the air forcibly passes through clearances between the components downwardly from above the vat, thereby removing most part of the solvent moistening the components in the liquid state. A small quantity of liquid which is left on the components is subsequently efficiently vaporized by the heated air.

Abstract: An article and method are disclosed for controlling the build-up of static electricity within a clothes dryer by adding the article to the dryer along with a load of fabrics to be dried. The article comprises a bladder formed from a waterproof, moisture-permeable material, such as expanded polytetrafluoroethylene. Within the bladder is a sponge or other water-absorbent material. The article releases sufficient moisture during tumbling of the article with the fabrics to prevent the build-up of static electricity on the fabrics. To avoid loss of moisture from the bladder when it is not in use and during the early portions of the dryer cycle, the waterproof material utilized can be one that is moisture-impermeable at room temperature, but that becomes moisture-permeable at the elevated temperatures that exist within the dryer during the later portions of the dryer cycle. The article includes a fill spout for adding water and other fabric conditioning agents to the bladder.

Abstract: A device for drying and cleaning footwear comprising a shallow housing on which the user steps to activate heater blowers which provide hot air which is directed upward against the footwear of the user. At the same time the user moves his feet against brushes. The debris and water falls though the device to be collected in shallow drawers at the bottom of the device.

Abstract: An arrangement for lowering the noise level in connection with a cooling layer in a pulp dryer having a heat-insulated bottom wall and top wall constituting a sound-attenuating construction and a wall at the inlet side of the cooling layer also constituting a sound-attenuating construction. At the outlet side of the air flow from the cooling layer in the pulp dryer, sound-attenuation baffles are arranged preferably perpendicular to or inclined in relation to the direction of the air flow and which are placed at a distance from one another.

Abstract: An apparatus for drying and sterilizing kitchen utensils including two door panels with axial compression means at two opposite ends respectively moved in sliding grooves on the apparatus base relative to respective roller means at the sliding grooves, clamps adjustably fastened to tracks on an utensil carrying rack inside the apparatus base for holding down kitchen utensils, supporting tubes connected to stub tubes on the rack for holding containers upside-down for drying and sterilizing, and air conduits with air outlets for guiding hot currents of ozone to the rack and the supporting tubes in all directions.

Abstract: A raw sewage disposal apparatus for evaporating and drying raw sewage by heating. An evaporation container has a closed bottom portion and an opened upper portion for containing raw sewage thereon. A rotary holding structure holds an upper end of the evaporation container so as to permit horizontal rotation thereof. A covering supports the rotary holding structure and closes the opened upper portion of the evaporation container from the atmosphere. A frame capable of hanging the evaporation container supports the covering substantially horizontally. A driving device is provided for rotating the evaporation container, and an electromagnetic heating means is disposed close to a lower surface of the evaporation container and generates a high-frequency electromagnetic wave which is supplied to the evaporation container.

Abstract: A downflow spin dryer, includes a housing; a rotor rotating within the housing in a direction of rotation, the rotor including first and second opposite mounting holes at different heights; a cradle fitted within the rotor for accommodating semiconductor substrates to be dried, the cradle having a rear portion and a front portion as viewed with respect to the direction of rotation of the rotor, the cradle being fitted to the rotor such that the rear portion of the cradle is at a lower position than the front portion of the cradle, the cradle including first and second opposite mounting holes in alignment with the first and second mounting holes, respectively, of the rotor when the cradle is fitted within the rotor, the first and second mounting holes of the cradle being at the same height; screws for entering the first mounting holes of the cradle and the rotor, and for entering the second mounting holes of the cradle and the rotor, so as to mount the cradle within the rotor; an air inlet in an upper surface

Abstract: A paper sludge drier includes a somewhat attrition style mill discharging to a horizontal, rotary drum drier. The mill has two mill plates facing each other. As one rotates relative to the other, sludge is broken down as it passes between the plates. The sludge flows generally from the center of the plates and outward through grooves running radially across the plates. The sludge is subsequently dried in the horizontal drum which has an integral internal screw that conveys the sludge through the drum. The sludge drier reduces the moisture content of the paper sludge from over 50 percent down to less than 20 percent.

Abstract: A method of converting industrial, domestic or other sludge, into a pelletized or granular fertilizer, as well as a sludge converter for practicing the method. The sludge is dewatered to form sludge cake solids which are dried in a dryer, and then sorted with a sorter into a sorted product comprising oversized, undersized, and standard sized product. Oversized product containing fibrous material is reduced in size by grinding in a hammermill. A portion of the sorted product is recycled for mixing and sizing in a mixer with the dewatered sludge cake solids. To control dust and odors, cyclones and a condenser remove a substantial portion of the gaseous particulate matter and condensable gases from the converter, and any remaining noncondensates are burned in the heat source flame. A waste oil burning heat source supplies heat energy to the dryer.

Abstract: In order to provide a vacuum degreasing-drying method by which extremely small, precision metal products can be degreased and dried quickly and completely without using organic solvents, according to the present invention, an object 112 to be rinsed is put in a vacuum drier 110 after being rinsed with a hydrocarbon cleaning agent and then the air in the vacuum drier 110 is evacuated so as to degrease and dry the object thus rinsed.