Abstract: A fastening device which prevents rotational and vertical displacement of a purge ring caused by purge gas exiting the purge ring or caused by other processing conditions. The fastening device comprises a clamp which releasably holds the purge ring together with the wafer support. A pin is inserted into a bore through the purge ring, wafer support and the clamp to releasably secure the clamp in place. Slots may be formed in the purge ring to guide placement of the clamp.
Type:
Grant
Filed:
February 15, 2000
Date of Patent:
May 1, 2001
Assignee:
Applied Materials, Inc.
Inventors:
Joseph Yudovsky, Salvador Umotoy, Lawrence C. Lei, Ronald Rose
Abstract: An instant photographic print drying device. The device has a stand which carries a fan and a heating coil. Downstream of the fan the photograph is held in place by clips. A timer is provided which can be set to a prescribed time to dry the photographs. An on/off switch is provided and a momentary switch is optionally present to provide a little more drying time, without resetting the timer. A thermostat might be included to prevent overheating of the coils, and possible overheating and burning of the photograph. Optionally, the clips holding the photograph in place can be connected to a micro-switch, which activates the timer controlling the fan and heating coil when a photograph is placed on the stand.