Abstract: An image forming apparatus capable of automatically and accurately judging whether or not the number of sheets of paper in a paper storage part is adequate for the number of copies to be made from the weight of paper in the paper storage part is provided.

Abstract: A system and method of backprinting image prints in which an order is received specifying one or more recipients and, for each specified recipient, a set of one or more images associated with that recipient. For each recipient specified by the order, the images associated with the recipient are separated into at least one printable unit of images, and, for each printable unit, each image in the printable unit is printed on a first side of an image print. Backprinting information is backprinted on the other side of one or more of the image prints. The backprinting information can be received from a user and backprinted onto one or images.

Abstract: For dividing an image and recording divided images on a photosensitive film with a plurality of laser beams, an auxiliary scanning speed is reduced in the vicinity of junctions between adjacent ones of the divided images to adjust the intervals between main scanning lines, and each of the main scanning lines is divided into divided main scanning lines in a main scanning direction, and the divided main scanning lines are formed separately in an auxiliary scanning direction. With such a correcting process, a high-quality image free of striped artifacts and inclination differences of main scanning lines can be recorded on the photosensitive film.

Abstract: A digital still camera is used for taking and storing digital representations of a plurality of images. A printer, such as an ink jet printer or a laser printer, is used for generating graphical representations of selected ones of the plurality of images on a preselected print media such as a paper. A flash memory card, floppy diskette, direct data link or some other data transfer scheme is used to transfer the digital representations of the plurality of images from the digital still camera to the printer. The printer includes programming for generating a combination proof sheet and order form. The combination proof sheet and order form can include an array of thumbnail images and a plurality of image selection and/or image enhancement user designation areas such as bubbles to be filled in by the user with a pencil. The printer includes a scanner and related circuitry and software for scanning the combination proof sheet and order form to detect the user designation areas completed by the user.

Abstract: Transport of strip-shaped workpieces, including those that have through openings, is control based on the output of upper and lower sensors provided between the delivery reel and processing part for detecting sagging of the workpiece at two points. The strip-shaped workpiece is subjected to processing and transport with a preset frequency, and upon occurrence of a state in which the upper sensor has determined the absence of sagging of the workpiece on the delivery side of the processing part and the lower sensor of this side has determined the presence of the workpiece, a fault is recognized, and processing and transport are interrupted if this detected state does not change during an interval that is a multiple of the preset frequency.

Abstract: The present invention relates to a photographic printer and a method of printing in which the printer is interfaced with a defect detection or scanning system that is adapted to inspect photographic paper for defects as it is consumed by the printer. In the system and method of the present invention, when a defect is detected, the printer is enabled to either skip over the defect area or to reprint the affected image. With respect to the defect, when detected, the present invention provides either for the utilization of a defect marker, such as a hole punch, which provides a physical mark on the paper in close vicinity of the defect or an electronic device capable of transmitting the precise location of the defect to the printing section. The hole or electronic signal is recognized by the printer, to enable it to either skip the defective frames or reprint the images.

Abstract: In a photography method, a determination is made that a set of captured images includes one or more encoded captured images having a partial shading encodement. The encodement has a predetermined edge pattern and is disposed within a predetermined subarea of an image. An encoded captured image is digitized to provide a digital image having a plurality of pixels. A plurality of pixel templates of an edge pattern and the pixels in the subarea of the digital image are convolved to provide a plurality of template position metrics. Each pixel template has the same shape. Each pixel template is differently located in said subarea. The highest of the template position metrics and a predetermined threshold template position metric value of the edge pattern are compared. The digital image is digitally modified when said highest template position metric matches the threshold template position metric value.

Abstract: A printing apparatus (110) for selectively printing an image from image data either onto any member of a set of photosensitive media (140), including a first photosensitive medium (140) having a relatively low contrast response and a second photosensitive medium (140) having a relatively high contrast response. The printing apparatus (110) uses a spatial light modulator (136) for forming an image, having at least a first set of setup voltage conditions for printing onto the first photosensitive medium (140) and a second set of setup voltage conditions for printing onto the second photosensitive medium (140). An adjustable polarizing component in the path of output light from the spatial light modulator (136), has at least a first contrast setting for the first photosensitive medium (140) and a second contrast setting for the second photosensitive medium (140).

Abstract: There is disclosed a sheet accumulation processing device having a shielding mechanism of a sheet discharge opening which is simple in mechanism, low in cost and requires no complicated control. In the device, after an end of a sheet bunch sent via one end of a slit opening formed in a housing front face of the device is received by a sheet holding means disposed in the slit opening in a predetermined receiving position, the sheet holding means with the sheet bunch held therein is moved along the opening and, in a predetermined discharge position in the slit opening, discharges the sheet bunch onto a sheet accumulating tray in front of the housing. In the discharge position, a sheet holding section of the holding means is rotated forward and downward from its sheet-bunch holding condition and protruded forward from the housing front face, then releases the sheet bunch to place the sheet bunch onto the sheet accumulating tray.

Abstract: An image forming apparatus capable of reducing time and effort of fixing the jammed film and capable of reducing waste of films not jammed when fixing the jammed film. The apparatus has: a film feeding section comprising a containing tray capable of containing photosensitive films and a shielding shutter to shield light into the containing tray; a plurality of processing sections to perform processing to a photosensitive film; a conveying mechanism to convey the photosensitive film along a predetermined conveying path leading continuously through the processing sections; a collecting section capable of collecting the photosensitive film on the conveying path; and a control section to control the conveying mechanism so as to convey photosensitive films in a jammed processing section and a processing section upstream of the jammed processing section to the collecting section when the photosensitive film is jammed on the conveying path.

Abstract: Disclosed is a sheet post-processing device, including: a downstream side intermediate stacking unit having a pair of slide guides for supporting left and right edges of the sheet that is sent, the slide guides moving toward and away from each other so that the sheet is pressed against one of the slide guides that serves as a reference by the other slide guide to be positioned; a processing unit for processing the sheet positioned by the downstream side intermediate stacking unit; and a stacking unit for receiving the sheet that is dropped through a gap created between the slide guides, in which the pair of slide guides each have a bottom piece for supporting the edge of the sheet, and in which the bottom piece of the other slide guide is partially cut off to provide a remaining portion, the remaining portion making the gap between the bottom pieces wider on the upstream side than on the downstream side in the sheet conveying direction.

Abstract: A center server in a network photo-print service system receives print order information related to a print, order and information related to conditions for a delivery site for prints, outputted in response to the order, from the customer (a customer-side terminal) through the network, extracts a delivery shop candidate group suitable for the conditions for a delivery site for prints from the shops capable of delivering the prints, requests the customer to select a shop from the delivery shop candidate group as a delivery shop, that is, a delivery site for the prints, and transmits the print order information to a print output device placed in the delivery shop thus determined in accordance with the selection by the customer.

Abstract: The method and apparatus for reading an image read photoelectrically an original image by prescan, set reading conditions in accordance with prescanned data obtained by the prescan, and perform fine scan that photoelectrically reads the original image to obtain fine scanned data for producing output image data. The method and apparatus analyze data of a preset area of the original image for both the prescanned data and the fine scanned data to calculate image characteristic values of the prescanned data and the fine scanned data of the preset area, calculate a correction condition for the fine scanned data such that the image characteristic values of the prescanned data and fine scanned data match and process the fine scannned data on the correction condition.

Abstract: An apparatus is disclosed for generating image feature data from an image having an arbitrary shape for use in image search. The apparatus includes rectangular area generating unit (2); rectangular image generating unit (3); padded-pixel value selecting unit (5); and image feature data generating unit (4). First, rectangular image generating unit (2) draws a rectangular area around input image (1) such that input image (1) is included therein. Rectangular image generating unit (3) pads a pixel value in an area of the rectangular area generated by rectangular area generating unit (2) which does not include pixels associated with input image (1) to generate a rectangular image. Image feature data generating unit (4) generates feature data from the image generated by rectangular image generating unit (3).

Abstract: A photographic system includes a photographic film having a film ID number thereon; a receipt provided with the photographic film, the receipt being imprinted with a uniform resource locator for acquiring an image on the film via the Internet, and an associated password; a scanner for scanning the film after processing to generate a digital image; means for associating the film ID number with the digital image; a digital image storage device for storing the digital image, a web server connected to the digital image storage device, having means for accessing the digital image using the uniform resource locator; a database accessible by the web server having stored therein the film ID number and the associated password; and wherein the means for accessing the digital image is password protected and accessible by use of the password.

Abstract: Images being processed in a photographic laboratory system into different forms of output are automatically evaluated to determine for each image whether it is of sufficient quality to merit processing into a selected form of output.

Abstract: A method for accomplishing an electronic image information transmitting service, comprising steps of: selecting by a second party whether or not to receive the electronic image information transmitting service; inputting by a first party with an inputting means information regarding the second party and a selection result by the second party in the selecting step; converting by the first party an image on a developed photographic film or on a developed photographic paper exposed based on the developed photographic film into electronic image information when the second party selects so as to receive the electronic image information transmitting service; accumulating the electronic image information converted by the first party in an accumulating means; and transmitting the electronic image information by a transmitting means through a communicating means to a reception destination designated by the second party.

Abstract: One aspect of the invention is a system for digital dye color film processing. In one embodiment, a developer station applies a processing solution to film to initiate development of metallic silver grains and at least one dye image within the film. A scanning system illuminates the coated film with light having at least one frequency within the visible portion of the electromagnetic spectrum. The light interacts with the silver and at least one dye image within the film. The scanning station measures the light from the film and produces sensor data that is communicated to a data processing system. The data processing system processes the sensor data to produce a digital image. The digital image can then be output to an output device, such as a printer, monitor, memory device, and the like.

Abstract: A method and apparatus for processing a semiconductor wafer is provided for reducing CD microloading variation. OCD metrology is used to inspect a wafer to determine pre-etch CD microloading, by measuring the CD of dense and isolated photoresist lines. Other parameters can also be measured or otherwise determined, such as sidewall profile, photoresist layer thickness, underlying layer thickness, photoresist pattern density, open area, etc. The inspection results are fed forward to the etcher to determine process parameters, such as resist trim time and/or etch conditions, thereby achieving the desired post-etch CD microloading. In certain embodiments, the CD and profile measurements, trim, etch processing and post-etch cleaning are performed at a single module in a controlled environment. All of the transfer and processing steps performed by the module are performed in a clean environment, thereby increasing yield by avoiding exposing the wafer to the atmosphere and possible contamination between steps.

Abstract: A hinge device for copier lid is provided. The hinge device includes a connecting rod mechanism having a first connecting rod, a second connecting rod, a third connecting rod, and a base, and the first connecting rod is connected with the second connecting rod by a first pivot pin, and the second connecting rod is connected with the third connecting rod by a second pivot pin, and the base is connected with the third connecting rod by a third pivot pin, and the first connecting rod is connected with the base by a fourth pivot pin; and a flexible device connected to the first connecting rod and penetratably connected by the first pivot pin, and the flexible device abutting upon the second connecting rod to transfer spring force of the flexible device from the second connecting rod to the base, thereby rendering the copier lid close, open or static.

Abstract: An incident optical system introduces a plurality of laser beams to an optical deflector from within a scanning range, the width of the plurality of laser beams being larger than the width of a deflection surface of the optical deflector in a main scanning direction. Principal rays of the plurality of laser beams, separated by a predetermined angle, cross each other near the deflection surface in a main scanning cross-section. A scanning optical device satisfies the expression &Dgr;&thgr;<(4&pgr;/N)×(1−&rgr;), where &Dgr;&thgr; represents the largest angle between principal rays of two of the plurality of laser beams, N represents the number of deflection surfaces of the optical deflector, and &rgr; represents the scanning efficiency of the deflection surface, which is the ratio of an image forming range to the theoretical maximum scanning width on the deflection surface of the optical deflector.

Abstract: This invention is directed to a method of processing at least one digital image of at least one photographic image and distributing at least one visual print produced from the at least one digital image. The method includes the steps of storing at least one digital image of at least one photographic image on at least one image server at a first location. Selective authorized access to the at least one digital image of the at least one photographic image from a second location is then facilitated. Orders are received for at least one visual print of the at least one photographic image from the second location. Based upon the orders, at least one visual image is produced from the stored digital image at the first location in response to the at least one order.

Abstract: The present invention is to easily examine the contact state of two piled films in a short time.

Abstract: To achieve for a photographic film conveying device that no external force causing conveying speed to vary is applied to a photographic film during image reading, after a preceding photographic film is discharged from a reading conveying path, the time until a subsequent photographic film is conveyed to the reading conveying path is not long, or even if a photographic film set in a film supplying section is elongate, image reading of photographic films by an image reading section can be carried out efficiently, there is provided a photographic film conveying device comprising a section setting a discharge conveying section in a withdrawn state or a conveying state, a section controlling conveying of preceding and subsequent photographic films, or a section switching a conveying path of a photographic film.

Abstract: A hard copy print, method and system for producing the hard copy print. The hard copy print has a print side and a back side. The print side has information thereon which identifies the electronic location at which a digital record of the image can be accessed electronically. This information is preferably written in a machine readable form so as to allow automatic accessing of the digitally stored images. The system includes a digital storage device for storing of a digital record file of the image on the hard copy print.

Abstract: An image reading apparatus having an original sheet feeding portion and an image reading portion includes two reading sensors which read an image (top surface and back surface) of an original and can almost simultaneously read both sides of the original without a reversing mechanism. In the image reading apparatus, when an instruction for starting reading is implemented without selecting a single-side reading mode or a both-side reading mode of the original, the reading of the both sides is executed for a first original. In the case that the first original is determined to be the both-side original, the both-side reading mode is still executed. In the case that the first original is determined to be the single-side original, the single-side reading mode is executed.

Abstract: A system and method for ordering visual prints from digital image data. The system and method include acquiring digital images from a digital image storage medium, assigning a unique identification code to the acquired digital images, storing the acquired digital images in association with the unique identification code, printing at least one index sheet of the digital image, the at least one index sheet containing visual print ordering information and the unique identification code, providing visual print information, producing visual prints based on the print order information, and providing the visual prints to a customer.

Abstract: A method for reverse order printing. The control instructions that direct printing of a document on a printer are used to create journal files of the document, with each page of the document having its own journal file. The journal files are then accessed in reverse order and sent to the printer to produce the document in reverse order. In one embodiment, a frontend is used to trap the control instructions and then a player accesses the journal files. In another, the graphic device interface and the printer driver are used.

Abstract: A film assemblage of the self-developing type which has a pair of upper and lower carrier sheets in juxtaposed relationship to one another. A pair of openings is provided in each of the carrier sheets. A photosensitive sheet and a positive receiving sheet are joined to outer surfaces of the upper and lower carrier sheets; respectively, so as to cover the respective openings. The pair of upper and lower carrier sheets is fixedly joined together in overlapping relationship, whereby the photosensitive and receiving sheets are in superimposed and spaced apart relationship thereby forming, in combination, an image area of the film.

Abstract: An object of this invention is to properly set an original reading position in sheetfed scanning. To achieve this object, a background near a sheetfed scanning position is read to detect the distal end of a white sheet member arranged near a platen roller, and the reading position in sheetfed scanning is set.

Abstract: An image forming apparatus includes an image reader for reading information about an image on a document, a sheet support disposed below the image reader and arranged for supporting sheets thereon, and an image forming unit disposed between the image reader and the sheet support. A body of the image forming apparatus has at least one of the image reader, the sheet support and the image forming unit, and provides a sheet discharging space into which a sheet having an image formed thereon by the image forming unit is discharged, where the image reader, the sheet support, and the image forming unit are arranged around the sheet discharging space. The image forming apparatus further includes an opening unit for exposing the image forming unit to the exterior of the image forming apparatus through the sheet discharging space.

Abstract: There is described a film conveying apparatus drawably mounted onto an image-forming apparatus. The apparatus includes a film stacking section to stack photosensitive films on it, a conveying device being movable between a film conveying position and a film supplying position to convey the photosensitive films one by one from uppermost one, a first shading member that encloses both the film stacking section and the conveying device and has a conveyance opening from which the photosensitive film is conveyed out by the conveying device so as to maintain a light-shading state for both the film stacking section and the conveying device when the conveying device parks at the film conveying position; a second shading member, being movable relative to the first shading member, to open and close the conveyance opening; and a shading-member moving device to move the second shading member so as to open and close the conveyance opening.

Abstract: A method facilitates photographic print re-ordering by encoding a photographic print with an identifier identifying a recipient of the photographic print and one or more printing parameters associated with the photographic print.

Abstract: A photographing system for speedily providing photographs meeting a customer's request at relatively low prices is provided. An image of a subject is recorded on a film by a film camera. A still image of the subject is take by an electronic camera in synchronization with the film camera. An identification code generated every photographing is written at a position other than the image on the film to make a one-to-one correspondence between the image and the identification code. The still image is recorded in a recorder with the identification code. The still images retrieved from the recorder are simultaneously displayed with the identification codes on a first monitor. A desired still image is selected, and displayed on a second monitor with the corresponding identification code. Then, the image on the film having the same identification code of the desired still image is printed.

Abstract: For dividing an image and recording divided images on a photosensitive film with a plurality of laser beams, an auxiliary scanning speed is reduced in the vicinity of junctions between adjacent ones of the divided images to adjust the intervals between main scanning lines, and each of the main scanning lines is divided into divided main scanning lines in a main scanning direction, and the divided main scanning lines are formed separately in an auxiliary scanning direction. With such a correcting process, a high-quality image free of striped artifacts and inclination differences of main scanning lines can be recorded on the photosensitive film.

Abstract: A media width detecting system is adapted to measure an absolute width of media without the need for human intervention or without the need for media to be referenced against a known location. The media width detecting system includes a measuring pattern that is provided across a media path for media. The measuring pattern can be in the form of, for example, a bar code pattern. The system further includes a reader that is provided relative to the measuring pattern so as to read the width of the measuring pattern. When media traverses the measuring pattern, a portion of the measuring pattern, for example, a subset of the bars of the bar code pattern, is covered by the media. The reader would then be adapted to determined a width of the measuring based on the covered portion of the media pattern in relation to the uncovered portion or uncovered bars.

Abstract: A method and a device are provided for automating receipt of orders for additional printing of a photographic print, including order information relating to desired image processing. In a print order receiving machine, when a photographic print is inserted, an image of the photographic print is read and displayed on a monitor (steps 150, 152). When order conditions are inputted, an image which is processed on the basis of the order conditions is displayed on the monitor (steps 154 through 158). Further, when input of the order conditions is completed, the order conditions and order information based on the order conditions are set. The set order information is printed onto a photographic print as an invisible two-dimensional bar code. Copying processing of the photographic print is carried out on the basis of the order information which is read from the photographic print.

Abstract: A photographic paper magazine, for containing a photographic paper roll of photographic paper, includes a magazine case. A support shaft is contained in the magazine case in a rotatable manner, and secured to an axis of the paper roll in a rotationally immovable manner. First and second flanges are disposed on the support shaft, for neatening end faces of the paper roll. A passageway is formed in the magazine case, for passage of the photographic paper in and out. Sixteen receiving pins are formed to project from an edge portion of the first flange toward the second flange, for defining a passage space between. The passage space allows passage of the photographic paper extending from the paper roll toward the passageway. When the support shaft is rotated in a winding direction, the sixteen receiving pins temporarily wind a portion of the photographic paper extending out of the passage space.

Abstract: A print system for performing image processing on an original image and outputting a print in which the original image is reproduced. The system includes image processing unit to process the original image or image data thereof; setting unit for setting the image processing in the image processing unit with the original image as image data, in accordance with the image data or an instruction input from outside; storing unit for storing image processing information of the original image processed by the image processing unit and retrieval information for retrieving the original image; and retrieval unit for retrieving image processing information of a corresponding original image corresponding to the supplied retrieval information, wherein when reprocessing the original image the setting unit sets an image processing by the processing unit in this reprocessing by adding image information retrieved by retrieval unit.

Abstract: The image processing apparatus executes predetermined image processing on image data obtained by photoelectrically reading an image photographed on a photographic film through a photographic lens of a camera, and thus obtains the image data for output. The apparatus comprises a unit for obtaining a characteristic of the photographic lens, a unit for developing the characteristic of the photographic lens into a dipping quantity corresponding to a position of the image, and a unit for compensating a marginal light quantity of the image by use of the dipping quantity. The apparatus is capable of compensating a decrease in light quantity of an area peripheral to the image even when the image is photographed through a low-performance lens, and obtaining a high quality image with stability without any darkened peripheral area.

Abstract: A film handling apparatus having a carrier, wherein the carrier is provided with a film size sensor disposed near a film entrance opening, a transport path capable of changing a transport width while maintaining a constant center position, a mask provided with opening opposite a film and designed for use with various sizes of film and a controller for changing the transport path width and selecting the mask opening in accordance with the film size detected by the film size sensor.

Abstract: High resolution gray scale graphical images are formed in a semiconductor substrate by the use of two or more levels of indicia having a plurality of image segments and having a continuous conductive line formed in the surface of the substrate, each image segment includes a portion of said continuous conductive line and a contrasting material providing pixels in which the width of the line within a segment varies in relationship to gray scale levels in the graphic image to be formed. Providing a graphic image to be converted; converting the graphic image to a gray level, two dimensional bit mapped converting the bit mapped image into a set of parallel lines of varying width; each line comprising a single continuous segment in which the width varies based on the density of the gray level required to form the gray level image; and transferring the set of lines to a pattern of conductor/insulator lines on a substrate.

Abstract: The image photographing, processing and providing systems as well as the photographing camera utilize a system which has a second communication device for transmitting photographing information of an object when at lease the object is photographed, a photographing device, a first communication device operated in association with the photographing device for receiving the photographing information transmitted from the second communication device and a storing unit for storing the photographing information received by the first communication device and the image data of the images of the photographed object which are related to each other. The image editing apparatus, the image order sheet and image ordering method for each object utilize the photographed result by the image photographing system and the photographing camera. These systems and the camera can effectively function even if many are installed in a wide site such as a theme park by the application of the transmitting/receiving function.

Abstract: A system for capturing an image of an instruction provided on a card by a camera. The fixture includes support surface having a cradle for receiving a camera. A support member extending from the support surface for supporting the support surface a fixed distance from a surface on which the fixture is placed. The instruction card is placed in the fixtures. The photofinisher during scanning of the developed film automatically reads a coded instruction and fulfills the order in accordance with the instruction.

Abstract: A tray 1 can be inserted in and pulled out of a main body 10 of an image forming apparatus. A lifting member 23 is provided in the main body 10 so that the lifting member 23 is able to enter into the tray 1 and lift a stack of sheets in the tray 1. The lifting member 23 is driven by a motor 25 provided in the main body 10. A switching member 27 is provided for connecting and disconnecting the transmission of the power of the motor 25 to the lifting member 23. When the tray 1 is fully inserted in the main body 10, the switching member 27 connects the transmission. In contrast, when the tray 1 is to be moved out of the main body 10, the switching member 27 disconnects the transmission, so that the lifting member 23 swings downward out of the tray 1.

Abstract: An image recording device which cuts an elongated photosensitive material, and disposes plural rows of photosensitive material sheets in parallel, and simultaneously conveys the photosensitive material sheets. The elongated photosensitive material pulled-out from a magazine is cut by a cutter into a plurality of sheet-shaped photographic printing papers of predetermined widths. The photographic printing papers are conveyed by first conveying roller pairs to predetermined positions on a conveying path. Due to nipping of the first conveying roller pairs being released, the photographic printing papers, which have been conveyed to conveying positions of respective rows, abut a stopper such that trailing ends of the photographic printing papers are aligned. Further, due to the plurality of photographic printing papers being nipped by second roller pairs, the plurality of photographic printing papers are conveyed toward an exposure position simultaneously in plural rows on the conveying path.

Abstract: For dividing an image and recording divided images on a photosensitive film with a plurality of laser beams, an auxiliary scanning speed is reduced in the vicinity of junctions between adjacent ones of the divided images to adjust the intervals between main scanning lines, and each of the main scanning lines is divided into divided main scanning lines in a main scanning direction, and the divided main scanning lines are formed separately in an auxiliary scanning direction. With such a correcting process, a high-quality image free of striped artifacts and inclination differences of main scanning lines can be recorded on the photosensitive film.

Abstract: A printer prints a calibration pattern on a leading end portion of a roll of recording paper when the recording paper is loaded in the printer. A cutter cuts the leading end portion off the recording sheet so as to make an end edge rectangular to side edges of the recording sheet. A photometric device measures densities of the printed calibration pattern, and a system controller derives correction values for correcting density or color from the measured densities. After the calibration process, an image is printed in an image recording area on the recording paper following the leading end portion. For a printer that prints an image on a cut sheet recording paper, a calibration pattern is printed on a margin outside an image recording area. After densities of the calibration pattern are measured, the margin with the calibration pattern is cut off the recording paper.

Abstract: A method and apparatus for processing a semiconductor wafer is provided for reducing dimensional variation by feeding forward information relating to photoresist mask CD and profile to adjust the next process the inspected wafer will undergo (e.g., a photoresist trim process). After the processing step, dimensions of a structure formed by the process, such as the CD of a gate formed by the process, are measured, and this information is fed back to the process tool to adjust the process for the next wafer to further reduce dimensional variation. By taking into account photoresist CD and profile variation when choosing a resist trim recipe, post-etch CD is decoupled from pre-etch CD and profile. With automatic compensation for pre-etch CD, a very tight distribution of post-etch CD is achieved. In certain embodiments, the CD and profile measurements, trim, etch processing and post-etch cleaning are performed at a single module in a controlled environment.

Abstract: An image forming apparatus for sequentially superimposes images formed by a plurality of image forming stations for forming images of different colors, respectively, on a transferring material born and transported by a transferring material transporting member, which forms a misregister detection mark on the transferring material transporting member, illuminates to read the mark, calculates a misregister amount of the read misregister detection mark, and corrects the misregister of an image based on calculated results, wherein the apparatus adjusts an illuminating light amount according to a color of a misregister detection mark.