Abstract: A reverse mirror for reversing an image is disposed between a subject holder and an object lens. The reverse mirror and the object lens are moved for varying image magnification and focusing the image. A movable mirror disposed between the object lens and a platen can selectively establish a focusing optical system for focusing the image of an original on the platen, a focusing optical system for focusing the image of the original on an index plate, and a focusing optical system for focusing the image of the index plate on the original plate. After a prescribed number of originals have been photographed on a photosensitive member, the platen and mask plates are moved to predetermined positions to photograph marks necessary for cutting and bookbinding in non-image areas on the photosensitive member.

Abstract: A microfiche printing system and method includes an optical system operative to scan and temporarily record microfiche image edge data on a high speed row scanning stroke of a microfiche sheet and to print the row of microfiche images onto plain paper on a printing stroke of the microfiche sheet using the temporarily recorded data automatically to control microfiche image masking. The optics system includes a shutter/mirror assembly having a shutter movable between an open position for printing microfiche images aligned with the optics in the printing stroke and a closed position to block the light path of the optics system edge masking functions in the printing stroke and for diverting the image for edge sensing functions in the scanning stroke.

Abstract: The disclosure relates to a copy machine having a document feeding apparatus. The document feeding apparatus comprises a transport belt which includes a first belt transport portion and a second belt transport portion, both of which can be operable integrally or independently.When a plurality of copies are required to be formed from two kinds of different documents, i.e., a first document F and a plurality of second documents S, the second belt transport portion for transporting the second documents is operated independently of the first belt transport portion for transporting the first document.When a plurality of copies are required to be formed from one kind of documents, the first and second belt transport portions are integrally operated.

Abstract: An apparatus and a method for making a reticle mask is disclosed. A reticle mask is made by the double pass method wherein scribe lines are first drawn on the reticle mask. Thereafter, a product die pattern is made in the reticle mask by a plurality of times. A plurality of alignment marks are associated with each product die pattern. The plurality of alignment marks are all written in the scribe line region. Thus, any deviation of the relative position of the product die pattern to the scribe line may be quantified.

Abstract: A three point suspension system and clamping mechanism for holding the face of a chase perpendicular to the optical axis of a multiple imaging camera/projector. The chase is equipped with pins which project from it and are located to bear against three pegs which project from the chase carrier of the machine to provide three point contact between the chase and chase carrier. The tips of the pins are adjusted to define a plane that is parallel to the plane of the glass panel on the chase which receives the flat copy to be photoreproduced. The ends of the pegs lie in a common plane which is perpendicular to the optical axis so that the glass panel of the chase is also maintained normal to the optical axis. The clamping mechanism is operated by pneumatic cylinders and allows the chase to be quickly replaced or rotated to a different orientation.

Abstract: A flat panel display device, such as a liquid crystal panel display device, of large size and a method and apparatus of manufacture of the same. The display device may be provided by discrete or divided display sections. For the manufacture of the panel display device, a pattern for forming picture elements and a drive circuit therefor is photolithographically transferred onto the whole surface of a substrate or base plate in a step-and-repeat manner. In one aspect of the invention, different masks having patterns corresponding to portions of the first-mentioned pattern are used. After the pattern of one of the masks is transferred onto one portion of the substrate, the one mask is replaced by another which the substrate is moved stepwise so that the pattern of the other mask can be transferred onto another portion of the substrate.

Abstract: A photographic printer apparatus is provided, with quick change self-threading magazines of photographic material which enables use of different widths and types of photographic material at the input of the printer apparatus. A cutter station is positioned within the printer console adjacent the magazine input, where roll material is pre-cut to the desired size of the photographic print to be made before being exposed. Transport systems are provided in the console for vacuum guidance and positioning of the photographic material while it is being cut and for accurately positioning the photographic material opposite a first exposure station for exposure, and for transporting the piece of photographic material to a second exposure station or for storage and subsequent processing or to a continuously running processor adapted to develop, and wash and dry the previously exposed photographic material.

Abstract: A microfilm duplicating apparatus for duplicating images, recorded on a master film onto a photographic duplicate film, comprising a light source for illuminating any one of the images on the master film from rear, a single reflective mirror for reflecting a luminous flux, which has been emitted from the light source and passed through the master film while carrying the image to be duplicated, so as to travel towards the duplicate film, and an image forming lens assembly consisting of two facing lenses of equal focal length disposed on the path of travel of the luminous flux.

Abstract: A laser computer output microfilm camera for utilization of direct read after write film comprises a film gate, device for transporting a film in the film gate in stepped manner in one direction, device for moving the film gate normal to the one direction and parallel to a film plane also in a stepped manner, film supply device for supplying a film into the film gate, device for receiving a ready to use microfiche produced from the film, device for deviating a laser beam in the region of an image field of a microfiche image from the beginning of lines to the end of lines and back, and to a next line and back, objective device for projecting the laser beam onto the film gate or onto a film contained in the latter, the film supply device being formed as at least partially open stable container in which the film as a microfiche sheet film is stored in a stack, withdrawing device for withdrawing the film from the stable container and then transporting to the device for transporting the film, the stable container

Abstract: A film handling mechanism for a photographic printer which has only one surface-to-surface movement, thereby minimizing the number of tolerances to be controlled, and which nevertheless provides for film movement at the gate in all directions in the film plane including rotation, so as to provide unlimited flexibility in positioning a film frame for printing. The mechanism includes a reader for data on the film and four edge clamping of the frame selected for printing, regardless of film orientation and the location of the frame on a filmstrip.

Abstract: An apparatus for setting regions to be trimmed on an original picture in a photographing printer which produces a trimmed reproduction picture image comprises a base on which a projecting lens for projecting the original picture on the surface of a photosensitive material and a TV camera for photographing the original picture are disposed so that they may be alternately exchanged their position to be set on a position aligning with an optical axis of a light source, a monitor which displays the original picture image photographed by the TV camera and an indicating means which indicates a configuration showing substantially the same region as that of to be trimmed by a trimming mask frame in overlapped manner with said picture image on the monitor.

Abstract: A microfilm strip includes image frames arranged in chapters with indicia provided identifying those image frames which head the chapters. When it is desired to produce multiple prints of each of the image frames in a chapter the image frame comprising the first frame or head of the chapter is moved into the print gate. Upon entry of the print command signal, the strip is automatically advanced so that the last frame of the chapter is in the print gate. The printer then automatically prints each frame of the chapter starting with the last frame and ending with the first frame of the chapter. The prints arrive face-up at the output of the printer in collated form. As multiple sets of prints of the chapter are desired, the microfilm after printing the first image frame, returns to the last image frame for repeat printing of another set of prints of the chapter. This operation is repeated until the number of sets of collated prints is provided at the output.

Abstract: A printer includes a light source, a film carrier and a print paper support. A lens turret is mounted between the film carrier and the print paper support and is rotatable about a rotational axis. The lens turret is transversely movable with respect to the path of movement of the print paper whereby an image projected through the film and the lens is transversely movable across the print paper. The lens turret has a plurality of individual lenses for making different sizes of prints. A control system coordinates the longitudinal movement of the print paper and the rotational and transverse movements of the lens turret. A printing method utilizing the printer includes the step of transversely shifting the lens turret whereby the image is shifted transversely on the print paper.

Abstract: Apparatus using a single document transport means for microfilming the document and scanning the document for obtaining digital signals for storage that are indicative of the image carried on the document. One embodiment provides for sequential presentment of the document for filming and scanning. Another embodiment provides for simultaneous filming and scanning. Circuitry is disclosed by which the digital signals are processed for use in controlling the light source used for filming of the document. Circuitry is disclosed for supplying information for later retrieval of the digital signals and/or the microfilm for a particular document.

Abstract: A reticle assembly, exposure system, and method for exposing each of a plurality of levels of a single die or device dies of a semiconductor wafer to a pattern of radiation on a site-by-site exposure basis are disclosed. Radiation patterning means between a source of radiation and the semiconductor wafer pattern the radiation onto the semiconductor wafer and a stepping means incrementally moves the semiconductor wafer relative to the patterning means for exposing the device dies, one at a time, in succession. The patterning means includes a reticle assembly having a plurality of reticles arranged in a coplanar array with each reticle having a respective different die exposure pattern.

Abstract: A method of fixing a frame image which has not been fixed due to burnout of a fixing lamp or a power failure. Such unfixed frame is detected, and the address thereof is stored in memory. When processing is resumed, the address of the unfixed frame is read in order to fix the frame, and thereafter, the address of the unfixed frame is erased. It is therefore possible to fix any unfixed frame reliably and automatically without any fear of the operator forgetting to effect fixing of such unfixed frame. Also disclosed is an apparatus which may suitably be employed to carry out the above-described method.

Abstract: An optical system for an electrophotographic film camera/reader-verifier. The image is transmitted downwardly to a first mirror (28) fixed at an angle of approximately 45.degree. with respect to either a horizontal or vertical plane. The image is, in turn, transmitted to a second mirror (32) fixedly disposed within a vertical plane, and a focusing lens (36) finally transmits the image to a film element for recording thereon. When an image frame of the film element is to be viewed, read, or verified, a projection lamp (40) is energized for illuminating the film element whereby the illuminated image thereof is transmitted to a third mirror (44), which is located at an inclined angle of approximately 15.degree. with respect to a horizontal plane. The mirror (44) in turn transmits the image of the film element to a front projection screen (46) which is also fixedly disposed at an angle of approximately 15.degree. with respect to a vertical plane.

Abstract: An apparatus and method for exposing a film of radiation sensitive material overlying a substrate to a pattern of radiation utilizes proximity focusing of a mask pattern onto the film and step and repeat techniques for exposing the entire area of the film to be exposed. The apparatus includes a source of radiation, a substrate holder supporting the substrate with the film of radiation sensitive material thereon in the path of the radiation, and a mask holder for supporting the mask intermediate the radiation source and the film in close proximity thereto for proximity focusing the mask pattern onto the film. A stepping means incrementally moves the mask relative to the substrate to permit exposure of the film area.

Abstract: A photomask includes a pattern region including a predetermined original image pattern, a pair of mark regions which respectively include alignment marks located on a line crossing the pattern region and which are located at two sides of the pattern region, and a pair of light-shielding regions each of which has at least the same width as that of a corresponding one of the mark regions along a direction parallel to the line.An exposure apparatus for sequentially exposing a plurality of regions on a photosensitive substrate by using a projection image on the photomask includes means for moving the photosensitive substrate and the photomask relative to each other such that images of marks for a current projection image are projected on a portion of a nonexposed region of a previous projection image, the portion being located next to a previous mark latent image and the nonexposed region being located between the latent image of the previous original image pattern and the latent image of the previous mark.

Abstract: A printing and trimming apparatus includes a negative film sheet for housing a negative film. The sheet enables trimming information such as the size and position of a trimming frame to be recorded thereon. The trimming information is once stored in a memory means. A control means controls a variable-magnification optical means on the basis of the trimming information read out from the memory means in such a manner that a printing and trimming operation is properly effected.

Abstract: An apparatus for the automatic microfilming of documents of different formats and the development of exposed microfilms in a continuous process. The apparatus includes a computer controlled combination of (a) an installation for the automatic insertion of documents and their transport through an exposure device from a stack of documents of a certain format, with means to adjust to a given format; (b) an interchangeable lens camera with an illumination and mirror system for the simultaneous imaging of the front and reverse side of the document and with an automatic film transport device; (c) a camera with an exposure system for the filming of titles and continuous identifications; (d) an automatic film development installation; and (e) a central guide and control system with an input keyboard, a monitor and a processor.

Abstract: A print mask apparatus has a pair of slide members provided on a base plate such as to oppose each other and supported such as to be independently movable in the direction orthogonal to the direction in which they oppose each other. The apparatus further has a pair of mask members respectively provided on the slide members and supported such as to be independently movable orthogonally with respect to the direction of movement of the slide members. Accordingly, it is possible for print sizes to be easily changed without any need to replace the mask members with others.

Abstract: An exposure apparatus for optically transferring a pattern of a circuit such as an integrated circuit on a semiconductor wafer. The positioning control of stepping movement of a movable stage holding the wafer thereon is effected in such a manner that even if a rotational displacement is present in the optical image of a mask pattern with respect to the moving coordinate axes of the stage, the rotational displacement is substantially cancelled in a printed pattern.

Abstract: Successive frames of an exposed and developed customer film are monitored during transport of the film in a first direction, and the information which is gathered during monitoring of discrete frames as well as of the entire film is stored in the memory of a microprocessor. The direction of travel of the film is then reversed and successive or selected frames of the film are copied during intervals between successive stepwise advances of the film in the second direction. Copying light which is used for the making of reproductions of images of the film frames is also used for illumination of film frames during monitoring. A mirror is provided to reflect light to the monitoring unit during travel of the film in the first direction, and such mirror is retracted preparatory to copying which starts with the last monitored frame and proceeds toward the first monitored frame of the film. The film is converted into a growing roll during monitoring of its frames.

Abstract: A self-contained COM (Computer Output on Microfilm) microimage recorder provides completed microfiche records of computer generated images. A master film strip travels a path including exposure, developing and duplication stations. An optics assembly at the exposure station exposes a pattern of numerous images provided serially by a cathode ray tube onto an image area of the master film strip. The entire image area is developed by heat at the developing station. A duplicate film strip moves along a path merging with the master film path at the duplication station where an entire pattern of images is duplicated onto an image area of the duplicate film strip from a developed image area of the master film strip. Duplicate film image areas are cut from the end of the strip as individual microfiche records and exit from the recorder as completed records after being developed and cleared.

Abstract: Apparatus for producing photographs from an image screen of a monitor, said apparatus consisting of a slidable sheet film platform, a means for sliding said sheet film platform in a Z coordinate direction, means for moving the image screen perpendicular to the Z direction in both X and Y coordinate directions, and a lens situated between said image screen and said film platform for providing a focused image on the sheet film, said lens being connected to said image screen so that the two can be moved together in the X direction, but are still capable of independent movement in the Y direction.

Abstract: The area detection method detects an area on an original enclosed with a mark of specific color by the steps of scanning the original by a photosensor, judging whether the number of the mark segment detected by the photosensor in a single scan line is an even or odd number for each scan and detecting the area based on the output of the photosensor in the scan period for which the judgement is made that the number of the detected mark segment is an even number.

Abstract: An apparatus for determining the focus state of a system for the projection exposure of a mask on a semiconductive substrate for producing integrated circuits without relatively displacing the mask, projection objective and substrate along the common optical axis, utilizes an arrangement for varying cyclically the optical path length for rays at least arising from a projected image on the substrate and running through the objective to a detector plane so that an intensity measurement of the light intensity at this plane indicates the path length required for sharpness and hence the focus state of the projection assembly.

Abstract: A mechanism for cutting film supplied in the form of a long strip into segments having a predetermined length and transporting the segments to a subsequent processing stages wherein cutting, positioning and holding of the film are performed substantially simultaneously with an apparatus having a simple construction. A film suction platen is provided having a plurality of holes formed therein. A lowered pressure is provided on the side of the platen opposite that on which film segments of a predetermined length are fed from a supply reel. A cutting mechanism is mounted alongside the platen to cut the segments after they have been fed. After the segments have been cut, and following exposure while on the film suction platen, the film suction platen is reciprocated to a take-out section which extracts the exposed film segments from the surface of the film suction platen and feeds them to the processing stage.

Abstract: In order to determine magnification and/or alignment in a device for the projection printing of a pattern on a mask onto a substrate an adjustment plate insertable below the projection lens is provided, said adjustment plate being provided with light-transmitting zones conjugated with recesses in the mask in respect of the projection lens in the exposure light, photometer means being arranged below said light-transmitting zones.

Abstract: In accordance with the present invention a photomasking kit (20) is provided which is useful for exposing photoready copy (12) so as to provide a plurality of like images of the copy (12) on a single master or negative (14). A plate (22) of a non-reproducing color has a plurality of posts (54) or openings (56) along its left (30) and right (32) margins. The photoready copy (12) is mounted to a mounting member (34) which has appropriate openings (56) or posts (54) for engagement with the posts (54) or openings (56) of the plate (22). The mounting member (34) is attached in a desired specific location to the plate (22). Areas of the plate (22) which it is not desired to expose onto the master or negative (14) are shielded. After exposure in this arrangement the mounting member (34) is moved to other positions on the plate (22) while other areas of the plate (22) are shielded and additional exposures of the master or negative (14) are carried out.

Abstract: An exposure apparatus for projecting a certain pattern predrawn on a printed board, an integrated circuit or the like on a sheet of film to print the pattern on the sheet. A mask body on which a certain pattern is drawn is held so that it can rotate relative to a film-like body, and when the mask body and the film-like body are held in a certain positional relation during exposure, no gap is formed between these bodies.

Abstract: A pattern generator for integrated multilayer circuits, comprising a light source (SLI) for each one of the layers, at least one associated reticle (RETMI) bearing patterns to be reproduced thereon and which is transparent to light, and optical means (MPI) for projecting and focusing the image of the patterns on the layer. The generator is characterized in that with a polarizer (POLI) being connected to the source, the reticle comprises a thin layer (GRI) of magnetooptical material with a magnetization which is at right angles to its surface, the image not the patterns being restituted by a light meter (ANALI).

Abstract: A storage jacket-film strip segment insertion apparatus having enhanced strip viewing and ease of use capabilities. A platform assembly having a tray is provided for receiving a storage jacket into which film strip segments are inserted by an associated film strip feed head. The tray is light-translucent or transparent to allow the jacket to be back-lit for viewing or copying through a provided transparent tray cover and projection lens. The tray and feed head are movable with respect to one another to provide feed head access to various portions of the storage jacket and a track assembly is provided attached to the tray for positive engagement and alignment of the tray with the feed head. The tray cover is attached to the platform assembly in such a manner as to cause the track to disengage from the feed head when the cover is raised, allowing the tray and feed head to be repositioned with respect to one another.

Abstract: An apparatus for transmitting pictures from a screen to pre-determined panels on a film sheet has a film sheet, a screen, two 45.degree. mirrors which are disposed in a ray path between the screen and the film sheet, a lens system which is disposed in the ray path, the optical axis of which is parallel to the film sheet, a moving device along one of the edges of the film sheet for moving the film sheet in an image plane of the film sheet, and additional moving devices for moving the screen, the 45.degree. mirrors and the lens system. The screen is parallel to the image plane of the film sheet. A base is provided which is parallel to the film sheet. A swivel flange is provided coaxial with the central axis of the screen which can be swivelled about the base through at least 180.degree. and which is optically open towards the screen. An extension housing is carried on the base, in which the 45.degree.

Abstract: A step wise drive system is mounted on a plate with a flat upper surface, in a light proof environment. The drive system drives a carriage via a motor actuating an endless screw which co-operates with the runner nut connected to the carriage. At the other end, the carriage comprises a motor which in turn co-operates with an endless screw acting on runner nut. The runner nut bears lateral slides connected to a film holder unit. Finally, the film holder unit is movable in a sliding fashion on a rail connected to the carriage. In this way, the film holder unit is connected to the second runner horizontally in X and Y directions and free vertically relative thereto. It can therefore slide on the upper surface of the plate with a dry fit, permitting excellent positioning of the microfiche for taking shots.

Abstract: A simplified microfiche recording apparatus and method is provided that images a light image reflected through a fixed mirror train from hard copy or other source in microimage size on an intermediate dry-process film, develops the microimage and transfers the microimage by contact printing to an archival microfiche film. Stations are provided for imaging, developing and transferring which are in fixed relation to each other along a stationary intermediate film head. Single frame advancement of the intermediate film is utilized from station to station, where suitable, to avoid fogging of the intermediate film by insuring that the portion of the intermediate film which is subject to light piping from the transferring station contains developed microimage.

Abstract: In a divisional printing apparatus wherein the pattern of a mask is reduced and projected for printing onto a wafer and the mask and the wafer are moved relative to each other at each shot so that the exposed areas thereof do not overlap each other, and whereby the same pattern as that for collective printing is printed onto the effective area of the wafer by a plurality of shots, a shot arranging method in which, in the case of a so-called multichip shot in which a plurality of chips are exposed at a time at each shot, the special chip area of the wafer is not exposed, but the wafer is effectively exposed so that the creation of unusable chips is minimized.

Abstract: An automatic focusing apparatus according to the present invention is constructed of a base on which a substrate is placed, detection means for detecting a pressure of air which is caused to flow out of an interspace between the substrate and an orifice by spurting the air from the orifice toward the substrate, reference pressure generation means for generating a reference pressure which is necessary for setting a standard distance between the substrate and the orifice, a pressure transducer which receives pressure signals from said detection means and said reference pressure generation means and which converts a pressure difference between these pressure signals into an electric signal, base drive means for moving the substrate in parallel with the orifice on the basis of the output signal from said pressure transducer, and offset signal generation means for generating a signal which, when superposed on the output signal from said pressure transducer, serves to shift the substrate from the standard distance.

Abstract: A photographic easel that will allow the exposure of four equal sized photographic images on one sheet of any of the standard sizes of photographic sheet material. These exposures are made in rapid succession without moving the easel or without composing the photographic image between each exposure. The unique principle is based on a mathamatical relationship between the width of the photographic sheet material and the adjustable width of the working area. An adjustable bar allows for the use of various sizes of photographic sheet material.

Abstract: A process camera for printing pictures of different sizes in the desired display positions on a photosensitive material to obtain a press plate, wherein a manuscript holder for mounting a manuscript to be printed, a lens holder including a focusing lens, and a photosensitive material holder for mounting a photosensitive material are aligned in series on and along the light axis, the manuscript holder being movable towards and away from the lens holder, and the photosensitive material holder being movable in the perpendicular directions to the light axis, and wherein a plurality of register pins and respective drive means for positioning the manuscripts of different sizes are provided in the manuscript holder, and each of the register pins is independently projected beyond the manuscript holder by the respective drive means.

Abstract: An apparatus is disclosed for printing borders on photographic prints. Unlike the existing border printers, this apparatus permits opposite borders to be printed at the same time. The apparatus comprises a panel with a flat surface having a paper stop at one edge, a frame, hinged to the panel at the one edge, having two parallel arms perpendicular to the paper stop, two sliding cross bars extending between the two parallel arms, the cross bars adapted to be maintained parallel with the paper stop at any position in the frame, each cross bar having a straight edge strip at one side to press the photographic print against the flat surface of the panel, and an expandible lightproof concertina-type cover extending between the two sliding cross bars in the frame, the cover having lightproof edge connections with the two parallel arms when the cross bars are at any position in the frame.

Abstract: Apparatus for producing microform records from various image sources, such as hard copy or cathode ray tube images fed from various data sources, includes an image-reducing projection system into which is selectively directed light reflected from hard copy or light preferably from the face of a cathode ray tube to which white background CRT image-forming signals are fed from any one of a number of selectable data sources. The reduced image involved is preferably applied first to a non-archival heat developable mask-forming film, like a dry silver film, and then the image on this film is transferred preferably to an archival film capable of later receiving additional data on unused portions thereof and most advantageously arranged as a microfiche card. The cathode ray tube face is preferably positioned immediately below a platform-containing or receiving image field area. The platform normally is adapted to receive hard copy thereupon.

Abstract: A step-and-repeat alignment and exposure system is provided with an adjustable holder for holding a main reticle, a main optical unit including a projection lens for producing an image of the main reticle at an image plane, a stage movable along coordinate axes adjacent to the image plane, and a holder rotatably mounted on the stage for holding a semiconductive wafer to be aligned with respect to the image of the main reticle. The system is further provided with an adjustable holder for holding an auxiliary reticle, a single channel auxiliary optical unit including a main objective lens for producing an image of the auxiliary reticle at the image plane, and a reference mark disposed on the stage and aligned with respect to the coordinate axes.

Abstract: A machine and a control system are provided for generating high registration photomasks with a contact printing arrangement. Further, a unique control arrangement is provided for controlling a machine such as a high registration contact print machine or other type of machine. In a preferred embodiment, a control system generates signals to a step and repeat contact printing machine that exposes many prints of master die images on a photographic film, where these prints have a high registration characteristic. In a further embodiment a unique control arrangement is provided for machine control operations.

Abstract: The apparatus forms one-to-one reticle images on a wafer. The apparatus includes means for holding a reticle containing an image pattern corresponding to the size of the desired wafer pattern. An illumination system substantially uniformly illuminates the reticle pattern. A one-to-one stationary projection optical system projects an image of the reticle pattern onto a predetermined focal plane. Suitable means such as a vacuum chuck holds the wafer. An alignment system steps and orients a wafer chuck to register markings on the individual sides of the wafer with the projected image of corresponding markings on the reticle. A fluid servo system acts on the chuck to hold at least a portion of the wafer in the predetermined focal plane of the projection optical system.

Abstract: An apparatus for the projection copying of patterns defined by masks on a workpiece, e.g. a semiconductor wafer coated with a photoresist in the production of integrated circuit units, comprises a stage with a cross-feed for positioning a wafer chuck in the X and Y direction in a horizontal wafer plane at which the projection beam is focused. According to the invention, the stage is supported on a base plate which, in turn, is mounted on three spaced-apart posts capable of infinitesimal vertical adjustment, guide surfaces or lines between the base plate and the structure on which it is supported having normals some of which intersect substantially in the wafer plane so that the axis of tilt, which can be generated by differentially adjusting the posts, is located substantially in the wafer plane.

Abstract: A computer controlled microfilm camera system and method for microfilming data onto pre-cut individual microfiche film sheets in one of a plurality of formats selected by a system user. The camera system includes a reusable cartridge which permits the single microfiche film sheet to be substantially withdrawn and exposed, and then reinserted into the cartridge for processing in a daylight loading processor. The cartridge is supported on a movable carriage assembly which is connected to a first drive system and stepping motor so as to provide for translation of the film sheet in a column direction. The carriage assembly supports a second drive system and stepping motor which is connected so as to provide for translation of the film sheet in a row direction.

Abstract: The invention concerns a process for "flow microfilming", particularly using 16mm film, where the film starts being fed synchronously with the feeding of a document to be filmed, moves forward in synchronism with the document and stops after the microfilming of the document is over. According to the invention, the stopping of the film after the document has been microfilmed is done such that the length of the film utilized each time for a given document is equal to a whole multiple of a standard minimum length, whereby the film may be automatically indexed for viewing regardless of the actual length of any given document.

Abstract: The microfiche carrier slides laterally on front and rear ball bearings between the carrier and subcarrier. The front bearing permits vertical separation of the carrier from the subcarrier and the rear ball bearing then permits the race member carried by the carrier to be withdrawn from between the upper and lower sets of ball bearings. In use the carrier is latched to the subcarrier by a latch carried by the transparent index pressure plate. The subcarrier is mounted on the base by ball bearings. The base contains the electrical components and the light source and condenser lens. The base can be withdrawn from the housing as a unit with the carrier attached.