Abstract: An adhesion defect detection apparatus includes an inspection window having a first dummy area, a second dummy area, and an inspection area disposed between the first dummy area and the second dummy area. A first shape changer is disposed on the inspection window. The first shape changer is configured to change a shape of the inspection window in a first direction. A second shape changer is disposed outside of both the first dummy area and the second dummy area. The second shape changer is configured to change a shape of the inspection window in a second direction that is perpendicular to the first direction.

Abstract: Provided are a microneedle array imaging device, a microneedle array imaging method, a microneedle array inspection device, and a microneedle array inspection method which enable inspection of a microneedle array with high accuracy based on an obtained image. A microneedle array 1 is imaged from a side of a surface on which microneedles 2 are arranged by irradiating a surface on a side opposite to the surface on which the microneedles 2 are arranged with parallel light as illumination light. At this time, the surface is irradiated with the illumination light under conditions in which an incident angle ? of light onto a bottom surface 2a of the microneedle 2 is 90??° or greater and an incident angle ? of light onto a side surface 2b of the microneedle 2 is less than a critical angle ?. In this manner, a state in which almost no light is emitted from a tip portion of the microneedle 2 can be generated.

Abstract: A method for detecting a deflection between a source module and a detection module in a scanning apparatus and configured as a sensor pair for scanning transmission measurement of sheet material being transported in a machine direction through a sensing gap formed between the source module and the detection module. The source module is arranged on a first side of the sensing gap and emits a sensing radiation or sensing energy radiation towards the sensing gap, and the detection module is arranged on a second side of the sensing gap opposite to the first side and detects the radiation from the source module and transmitted through the sensing gap. The method includes: attaching a removable blocking device to the detection module; and performing a partially-blocked scanning process during which the source module and the detection module are jointly moved in a cross direction of the scanning apparatus.

Abstract: Overlay measurement systems and methods are disclosed that control the relative phase between the scattered and specular components of light to amplify weak optical signals before detection. The systems and methods utilize model-based regressional image processing to determine overlay errors accurately even in the presence of inter-pattern interference.

Abstract: A method and an apparatus for detecting cracks in semiconductor substrates, such as silicon wafers and solar cells, are provided. The method and apparatus are based on the detection of light deflected at a crack.

Abstract: A device and method for subaperture stray light detection and diagnosis. A test light beam is generated. Stray light is detected. Based on the detected stray light, potential paths that light may have taken to arrive at the detection surface are determined. A testing device comprises a test light beam source whereby the cross sectional area of the test light beam is made less than the cross sectional area of the system aperture. A relative lateral positioning stage and an angular beam directing stage launch the test light beam into the aperture. A detector and a data processing system produce a data set relating the stray light to the location and directional angles of the test light beam to identify the sources of stray light. A light trap and test light beam delivery system are provided.

Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.

Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

Abstract: A method for analyzing quality of a glazing unit including: generating a digital image of a test chart produced in reflection by an outer surface of the glazing, the test chart presenting a pattern composed of a plurality of contrasted elements defining between them interface lines; calculating quantities representative of the glazing from the image generated, the calculation being carried out by a processing unit; and comparing the calculated values for the representative values relative to reference values. The representative quantities are representative of a deformation of the image of the test chart produced in reflection by the outer surface of the glazing.

Abstract: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.

Abstract: According to one embodiment, an inspection apparatus includes a first monochromatic body disposed behind an inspection target including a transparent member or a semitransparent member, relative to an observation position which deviates from a normal direction of the inspection target, a light source configured to illuminate the inspection target and disposed at such a position in front of the inspection target that an image of the light source is not reflected on the inspection target which is observed at the observation position, and a second monochromatic body disposed at such a position in front of the inspection target that an image of the second monochromatic body is reflected on the inspection target which is observed at the observation position.

Abstract: Disclosed is a visual inspection apparatus for a glass substrate of a liquid crystal display, comprising an inspection platform and at least two slide rails. The glass substrate for inspection is fixedly located on an inspection platform main body. The slide rails are installed at two adjacent sides of the main body leastwise. Length directions of the slide rails are parallel with a level of the main body. The lengths of the two adjacent slide rails are mutually perpendicular; the visual inspection apparatus further comprises a coordinate reader. The coordinate reader is slidably jointed to the slide rails and employed to cross above the level of the main body to form a locating point. An inspector reads a coordinate of the locating point to acquire a corresponding coordinate of the glass substrate. The present invention also provides an inspection method for a glass substrate of a liquid crystal display.

Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a first and second waveplate, a polarizing beam splitter, a first detector, a focusing lens, a blocker, and a second detector. The radiating source irradiates the first waveplate generating circularly polarized source beam that irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a sample. Reflected radiation from a sample is directed to the second waveplate generating linearly polarized beam that irradiates the polarizing beam splitter which directs a portion of the reflected radiation to the first detector. Scattered radiation from the sample is directed by the focusing lens to the second detector. Contemporaneous measurements by the first and second detectors are compared to differentiate.

Abstract: An optical inspector includes a radiating source, a time varying beam reflector, a telecentric scan lens, a blocker, a focusing lens, an aperture, and a detector. The radiating source irradiates a first position of on the time varying beam reflector with a source beam. The time varying beam reflector directs the source beam to the telecentric scan lens, which in turn directs the source beam to a transparent sample. A portion of the source beam travels through the transparent sample to another surface. The blocker blocks scattered radiation originating at the other surface. Scattered radiation originating from the transparent sample is not redirected by the blocker and is focused by the focusing lens to a first focal plane. The focused scattered radiation passes through the aperture before irradiating the detector. The detector output an intensity measurement of the scattered radiation that irradiates the detector.

Abstract: A measurement system scans the given surface of a tire component (e.g., a brush-finished tread or buffed tire casing) to electronically measure data points corresponding to vertical and horizontal coordinates along the given surface. Associated computer processors electronically calculate the slope at a plurality of different locations by determining the degree of steepness (e.g., rise over run, angle or grade) between selected ones of the first and second coordinates and electronically comparing at least one slope-based parameter to one or more predetermined levels to determine a characterization defining one or more of surface adhesion fitness, finishing brush wear level and brush bristle placement location. Slope may be determined between every adjacent pair of data points or between selected data points (e.g., identified local maximum and minimum). The at least one-slope based parameter compared to the predetermined levels may correspond to the slopes themselves or to a calculated average slope value.

Abstract: An apparatus comprising a container handling device comprising a centering device having a standing surface and a container gripper having a head side, a foot side, inspection openings on both said head side and said foot side, light-conducting elements, and a gripper bell having an inner area, a light source arranged to couple light into said light-conducting elements, a detection-and-control system comprising an optical system, and wherein said inner area can be illuminated by emerging light so that a cover side arranged at said foot side can be inspected by said optical system through said container gripper and by said light-conducting elements.

Abstract: Disclosed is an apparatus for characterizing attributes of a moving glass sheet comprising complementary mechanical material handling technologies that progressively stabilize, position, capture, flatten, and release the lower portion of glass sheets traveling past the apparatus while posing minimal constraint on the top section of the sheet. The apparatus includes a pressure-vacuum (PV)-type device comprising distinct regions such that the glass sheets experience a non-contact but gradual increase in constraining force until the point where measurements can be performed, then a gradual decrease in constraining force until the glass sheets are released from the inspection station. This graduated force technique is applied along the direction of travel of the sheets and may also be applied vertically upwards along the height of the sheet to restrict the motion of the sheet without constraining it at pinch points near the conveyor.

Abstract: A detecting system for detecting containers that exhibit features located on a container wall thereof includes a lighting unit having a plurality of light sources. The lighting unit is configured to project spaced-apart strip-shaped light beams onto a region of the container wall. The system also includes an optical arrangement having at least one camera.

Abstract: An apparatus and a method for inspecting matter and the use thereof for sorting recyclable material including transparent material are disclosed. The apparatus comprises a lighting unit for projecting a concentrated diffused lighting onto the matter to generate a specular reflected light beam representative of the inspected matter. The apparatus comprises an imaging unit mounted according to a given imaging angle with respect to the projected concentrated diffused lighting for imaging the specular reflected light beam to provide image data representative of the inspected matter. The apparatus comprises an analyzing unit for analyzing the image data and providing matter characterization data based on the specular reflected light beam representative of the inspected matter.

Abstract: Any issues associated with manufacture of a part are identified and highlighted on a part rendering. A software method and system then uses a visual change cue on the part rendering for communicating the manufacturability issues to the customer. The preferred visual change cue is a throbbing of the highlighting of the manufacturability issue, with the throbbing occurring in both color intensity and size. The part rendering depicts the part translucently, so throbbing manufacturability issues can be readily identified even if obscured behind a more-forward face of the part.

Abstract: A detection device detecting a state of a toner image, an image forming apparatus including a detection device and method of detection are provided. The detection device includes a detector having a light window where light passes through and detecting a state of a toner image formed on an image bearing member via the light window, and a cleaner removing a pollutant attached to a surface of the light window. The cleaner includes an adsorption unit formed of a conductive material and reciprocating while being in contact with the surface of the light window and a voltage applying unit applying a voltage for adsorbing the pollutant to the adsorption unit.

Abstract: A device for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer includes: a light source configured to emit inspection beams to a rear side of the polycrystalline silicon layer; a light inspector configured to inspect the inspection beams reflected at the rear side of the polycrystalline silicon layer; and a controller that controls the light source and the light inspector.

Abstract: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror.

Abstract: A surface state inspection apparatus has a lighting device that irradiates an inspection target placed on a stage with light, an imaging device that images the inspection target, and a detection device that detects a surface defect of the inspection target by analyzing a first inspection image obtained by the imaging device. The lighting device is a surface light source that includes a light emission region having a predetermined size and, in the lighting device, portions of light emitted from positions in the light emission region differ from each other in a spectral distribution. The detection device detects a portion in which a hue is different from that of its surrounding portion in the inspection target surface as a flaw. The detection device detects a portion in which the hue is substantially equal to that of its surrounding portion while brightness is different from that of its surrounding portion as a stain.

Abstract: Methods and systems for accurately determining dimensional accuracy of a complex three dimensional shape are disclosed. The invention in one respect includes determining at least a non-critical feature and at least a critical feature of the 3-D component, determining a first datum using at least the non-critical feature, aligning the first datum to at least a portion of a reference shape, determining a second datum corresponding to the critical feature subsequent to the aligning, and determining the dimensional accuracy of the 3-D component by comparing the second datum to another portion of the reference shape.

Abstract: A method and a device for inspecting the quality of a formed thermoplastic fiber-reinforced plastic component wherein the component is tested by means of a sensor unit with a downstream electronic evaluation unit for analysis of the measuring result acquired by sensor technology by means of sample comparison, wherein by means of the optical sensor unit the surface roughness of the plastic component is measured after forming, which surface roughness is analyzed by means of the evaluation unit by a comparison with a stored reference pattern in such a manner that increased surface roughness is interpreted as increased internal materials porosity.

Abstract: Illumination subsystems for multi-spot wafer inspection are provided.

Abstract: A substrate processing apparatus having a polishing unit for polishing a periphery of a substrate. The substrate processing apparatus includes: a polishing unit configured to polish a periphery of a substrate; an imaging module configured to take an image of the periphery of the substrate polished by the polishing unit; and an image processing section configured to inspect a polished state of the substrate based on the image taken by the imaging module. The imaging module is configured to take the image of the periphery of the substrate when the polishing unit is not polishing the periphery of the substrate.

Abstract: A fire alarm consists of a housing in which sensors, a radiation source, and an optical window are disposed. A reflector protection basket or ring is disposed above the optical window. The basket or ring is suitable for protecting the optical window against mechanical influences, allows UV and IR radiation to pass through to a sufficient degree, and reflects UV and IR radiation from the housing interior, on its inside. Monitoring of the contamination of the window, function monitoring of the sensors and of the signal processing electronics, as well as easy replaceability of the components in the fire alarm are provided.

Abstract: A system for the optical inspection of glass panels (2) is described, with a conveying device (3) for moving a glass panel (2), and with a first inspection module (5, 6, 7), which includes an illumination device and a camera for illuminating and photographing the glass panel (2), and with a first evaluation module (8, 9, 10, 11) for evaluating the photographs of the glass panel (2). In addition, a second inspection module (5, 6, 7) is provided, which includes an illumination device or a camera for illuminating the photograph of the glass panel (2), and it is connected with a second evaluation module (8, 9, 10, 11) for evaluating the photographs taken of the glass panel, the illumination systems and/or the cameras of the first inspection module (5, 6, 7) and the second inspection module (5, 6, 7) having different designs and/or being located in different places relative to the glass panel (2), which is moved past the inspection modules (5, 6, 7) via the conveying device.

Abstract: A photomask inspection method that identifies a foreign particle such as dirt on a photomask with high sensitivity by suppressing erroneous identification due to an influence of noise is provided. The photomask inspection method includes acquiring image data of a photomask having regions with different layer structures on a surface thereof, creating inverted image data by subtracting the image data from pixel value data of the regions, creating offset inverted image data by raising pixel values of the inverted image data by a fixed amount, creating normalized correlation image data by computing a normalized correlation of the offset inverted image data and an offset Gaussian distribution-type kernel, and identifying foreign particles by comparing the normalized correlation image data and a predetermined threshold.

Abstract: Provided is an unevenness detecting apparatus comprising a determining section that determines a polarization state of returned light obtained from radiated light; an uneven portion judging section that judges whether an uneven portion is present based on the polarization state determined by the determining section; a convex/concave identifying section that identifies whether the uneven portion is convex or concave based on image data, captured by an image capturing element, of the uneven portion; and an output section that outputs information identifying whether the uneven portion is convex or concave.

Abstract: Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel rows include at least a first row with first illumination optics including a first array of prisms that are configured to reflect the light emitted by the light sources in the first row, and at least a second row with second illumination optics including a second array of prisms that are configured to refract the light emitted by the light sources in the second row. An imaging assembly is configured to capture an image of the object under illumination by the multiple parallel rows of the light sources.

Abstract: A lighting configuration that is a combination of far dark field lighting and a modified dark stripe lighting is disclosed. The novel combination provides a more robust detection of flaws on, e.g. a moving web of transparent film, than either would provide alone or through a summation of their individual parts.

Abstract: The invention relates to a test vessel (1) for a monitoring device for vessels, comprising a plurality of first marking rings (2) which surround the bottle body (7) at least in some sections at predefined fixed heights, and a plurality of marking lines (4) which run in a longitudinal direction (L) of the test vessel (1). According to the invention, the first marking rings (2) are respectively arranged at constant, predefined distances from one another in the longitudinal direction (L) of the test vessel (1). The marking lines (4) intersect at least some of the first marking rings (2), and the marking lines (4) are respectively arranged at predefined distances from one another in a circumferential direction of the test vessel (1).

Abstract: A concave-convex surface inspection apparatus includes a slit light source unit emitting a slit light to a concave-convex surface of an object to be inspected, an image-taking unit taking an image of the concave-convex surface illuminated by the emitted slit light with an imaging optical axis intersecting with an optical axis of the slit light with a narrow-angle equal to or narrower than 30 degrees, and an evaluation section obtaining a three dimensional shape of the concave-convex surface and evaluating the obtained three dimensional shape, wherein the slit light source unit includes a slit light source and a cylindrical lens, the image-taking unit includes a telecentric lens unit, an image-taking section having an imaging surface tilted relative to the imaging optical axis for increasing a focusing range of the concave-convex surface, and a P polarizer.

Abstract: A first inspection process of inspecting presence of a defect on a front surface of a film body with a protective film separated therefrom; a separator removing process of separating a separator from the inspected laminated film; a second inspection process of inspecting presence of the defect in the film body in a vertical attitude while introducing the film body with the separator separated and removed therefrom to a film travel path directed in a vertical direction, and storing detection data; a separator laminating process and a protective film laminating process of laminating a separator and a protective film to a back surface and a front surface of the inspected film body, respectively; and a film collecting process of winding up the inspected laminated film laminated with the protective film and the separator are provided.

Abstract: Systems and methods for acquiring information about a defect on a specimen are provided. One system includes an optical subsystem configured to acquire topography information about the defect. The system also includes an electron beam subsystem configured to acquire additional information about the defect. One method includes acquiring first data for the defect using an optical technique and second data for the defect using an electron beam technique. The first and second data is acquired while the specimen is disposed in a single vacuum chamber. The method also includes determining topography information about the defect from the first data. In addition, the method includes determining additional information about the defect from the second data.

Abstract: A spatial mask printer may be used in conjunction with an optical inspection tool. The tool can be used to obtain a Fourier image of an inspected object, and a filter mask image can be designed to block certain aspects of the object's image in the Fourier plane corresponding to repetitive aspects of the imaged object. The filter mask image can then be printed and used in the tool during the inspection process. The mask image may be designed by hand or by computer and may be stored for later use. Filters may be automatically placed into the optical path of the inspection tool by a filter wheel, or may be housed in other filter banks. The printer may be configured to operate in a clean room environment, and may be integrated into the optical inspection tool.

Abstract: An inspection method is provided and includes acquiring at least one inspection data set. Each inspection data set comprises inspection data for a component. The inspection method further includes mapping the inspection data set onto a three-dimensional (3D) model of the component, to generate a 3D inspection model for the component, and validating the inspection data against the 3D model of the component using at least one validation criterion. A multi-modality inspection method is also provided and includes acquiring multiple inspection data sets corresponding to multiple inspection modalities for a component and fusing the inspection data sets to form a fused data set. The multi-modality inspection method further includes mapping the fused data set onto a 3D model of the component to generate a 3D multi-modality inspection model for the component.

Abstract: An inspection apparatus for containers, comprising a first illumination device which directs light having first characteristic properties onto the base of the container, a second illumination device which directs light having second characteristic properties, which differ at least partially from the first characteristic properties, onto the base of the container, and at least one image recording device which receives at least a portion of the light directed onto the base of the container and transmitted by the latter. At least the second illumination device illuminates the base of the container in an indirect manner.

Abstract: A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window, a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal, and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal.

Abstract: Glass inspection systems are provided for detecting particles and defects in or on a glass sheet or glass ribbon (2, 14). The system is mounted so that the surface (1) to be inspected is in the object plane of a reflective lens (10). The lens images a thin stripe area, long in the direction tangent to the lens circumference and short in the radial direction, onto a linescan camera (18). A line illuminator (12) can be mounted so that it illuminates the stripe area. To perform the inspection, the system is moved with respect to the glass in the direction perpendicular to the long axis of the stripe, either by moving the system over the glass or by moving the glass while the system is fixed. Image information is collected by the linescan camera during this motion and assembled into an image.

Abstract: The invention is directed to a method for illuminating an object and projecting its image on a ground glass screen. Optical comparators conventionally use incandescent illumination, either mercury arc or halogen. The use of an array of high intensity LED devices, provides many options for packaging the required optical components used in comparators.

Abstract: A system and method for inspecting a machined surface. The method includes acquiring optical information of the machined surface from a predefined orientation. Further, the method includes comparing one or more parameters of the optical information with a corresponding one or more reference parameters. Furthermore, the method includes assessing a quality of the machined surface based on the comparison.

Abstract: An inspection apparatus includes a stage allowing an inspection subject to be mounted thereonto, an illumination unit for emitting diffused light to the inspection subject, an imaging unit disposed to face the illumination unit with the inspection subject interposed therebetween, for taking the diffused light that is emitted from the illumination unit and is transmitted through the inspection subject, a first prism sheet disposed between the inspection subject and the illumination unit and having a first prism surface with a plurality of prisms aligned in a stripe pattern to face the illumination unit, a second prism sheet disposed between the illumination unit and the first prism sheet and having a second prism surface with a plurality of prisms aligned in a stripe pattern to face the first prism surface.

Abstract: Methods and systems for using common-path interferometry are described. In some embodiments, a common-path interferometry system for the detection of defects in a sample is described. An illumination source generates and directs coherent light toward the sample. An optical imaging system collects light reflected from the sample including a scattered component of that is predominantly scattered by the sample, and a specular component that is predominantly undiffracted by the sample. A variable phase controlling system is used to adjust the relative phase of the scattered component and the specular component so as to improve the ability to detect defects in the sample.

Abstract: Device for carrying out optical readings on textile materials submitted to dyeing comprising optical reading means associated with corresponding optical processing means, characterised in that it comprises a body (1) inside which it is provided a chamber (10) featuring an input (I) and output (U) section and is crossed by a dyeing bath drawn out of a dyeing tank or machine (T) in which a textile material is submitted to dyeing, inside said chamber (10) being disposed an optical detector or probe (2) and a seat being provided for the positioning of a specimen or sample (F) of the textile material submitted to dyeing in correspondence of the probe (2), said seat featuring positioning means for a support (3) onto which said specimen (F) is applied, so that the specimen is immersed in the dyeing bath flowing inside chamber (10), said support (3) being movably positioned on said positioning means; and said support (3) is movable towards said probe (2) or, vice versa, said probe (2) is movable towards said support

Abstract: A device for monitoring blockage of a turret in a cryomagnet, at least one monitoring unit that functionally interacts with a state of the inside of the turret of a cryomagnet is provided to monitor the inside of the turret.

Abstract: An optical sensor device (10) is able to be coupled to a window (14), in particular to a windscreen of a motor vehicle. The optical sensor device (10) comprises a sensor unit (12), which includes a emitter (26), a receiver (28) and a light conductor unit (30). By the light conductor unit (30), a light beam (34) emitted by the emitter (26) is coupled into the window (14), coupled out of the window (14) and directed onto the receiver (28). The light conductor unit (30) includes Fresnel lens regions and associated reflecting regions.