Inspection Of Flaws Or Impurities Patents (Class 356/237.1)
  • Patent number: 11562480
    Abstract: The invention provides an automatic inspection process for detecting visible defects on a manufactured item. The process includes a set up mode in which images of same-type defect free items, but not images of same-type defected items, are obtained, and an inspection mode in which images of both same-type defect free items and same-type defected items, are obtained and defects are detected. Images of the same-type defect free items are analyzed and based on the analysis the process switches to the inspection mode.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: January 24, 2023
    Assignee: INSPEKTO A.M.V. LTD.
    Inventors: Yonatan Hyatt, Joel Koenka, Harel Boren
  • Patent number: 11557027
    Abstract: A vision inspection system includes a sorting platform having an upper surface supporting parts for inspection, wherein the parts are configured to be loaded onto the upper surface of the sorting platform in a random orientation. The vision inspection system includes an inspection station including an imaging device. The vision inspection system includes a vision inspection controller receiving images and processing the images based on an image analysis model to determine inspection results for each of the parts. The vision inspection controller has a shape recognition tool configured to recognize the parts in the field of view regardless of the orientation of the parts on the sorting platform. The vision inspection controller has an AI learning module operated to customize and configure the image analysis model based on the images received from the imaging device.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: January 17, 2023
    Inventors: Du Wen, Lei Zhou, Tim Darr, Roberto Francisco-Yi Lu
  • Patent number: 11543237
    Abstract: A method for inspection of a target object, the method including irradiating a reference surface having a non-flat reference profile with radiation; determining reference response data based on detected radiation having interacted with the reference surface; irradiating a target object with radiation, the target object including a target surface having a non-flat target profile corresponding to the reference profile; determining inspection response data based on detected radiation having interacted with the target object; and determining at least one parameter of the target object based on the reference response data and the inspection response data. An alternative method; a control system for controlling an emitter system and a detector system; and an inspection system including a control system, an emitter system and a detector system, are also provided.
    Type: Grant
    Filed: August 23, 2018
    Date of Patent: January 3, 2023
    Assignee: ABB Schweiz AG
    Inventors: Jacobus Lodevicus Martinus Van Mechelen, Deran Maas, Andreas Frank
  • Patent number: 11493454
    Abstract: This invention provides a system and method for detecting and imaging specular surface defects on a specular surface that employs a knife-edge technique in which the camera aperture or an external device is set to form a physical knife-edge structure within the optical path that effectively blocks reflected rays from an illuminated specular surface of a predetermined degree of slope values and allows rays deflected at differing slopes to reach the vision system camera sensor. The light reflected from the flat part of the surface is mostly blocked by the knife-edge. Light reflecting from the sloped parts of the defects is mostly reflected into the entrance aperture. The illumination beam is angled with respect to the optical axis of the camera to provide the appropriate degree of incident angle with respect to the surface under inspection. The surface can be stationary or in relative motion with respect to the camera.
    Type: Grant
    Filed: November 11, 2016
    Date of Patent: November 8, 2022
    Assignee: Cognex Corporation
    Inventors: Fariborz Rostami, John F. Filhaber, Feng Qian
  • Patent number: 11475584
    Abstract: In one example, a distance sensor includes a camera to capture images of a field of view, a plurality of light sources arranged around a lens of the camera, wherein each light source of the plurality of light sources is configured to project a plurality of beams of light into the field of view, and wherein the plurality of beams of light creates a pattern of projection artifacts in the field of view that is visible to a detector of the camera, a baffle attached to a first light source of the plurality of light sources, wherein the baffle is positioned to limit a fan angle of a plurality of beams of light that is projected by the first light source, and a processing system to calculate a distance from the distance sensor to an object in the field of view, based on an analysis of the images.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: October 18, 2022
    Assignee: Magik Eye Inc.
    Inventor: Akiteru Kimura
  • Patent number: 11467096
    Abstract: A system, apparatus, and method for remotely detecting defects in a structure may proceed non-destructively. A mobile sensing platform may place sensors in a desired positioning relative to the structure. The desired position may include a non-contacting relation between the sensors and structure. The mobile sensing platform may project laser beams onto the structure and sense backscattered light via the sensors. Variations in the backscattered light may correspond to motion of the structure, such as vibrations. By calculating the frequency and amplitude of the vibrations, defects in the structure may be detected. By correcting for noise, such as that associated with acceleration of the mobile sensing platform, accuracy and precision of defect detection may be enhanced.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: October 11, 2022
    Assignee: ADVANCED SYSTEMS AND TECHNOLOGIES, INC.
    Inventor: Vladimir Markov
  • Patent number: 11469188
    Abstract: A semiconductor package may include a package substrate, a molded interposer package (MIP) and a first stiffener. The MIP may be arranged on the package substrate. The MIP may include an interposer, at least one first semiconductor chip and at least one second semiconductor chip molded by a molding member. The first stiffener may be attached to any one of outer surfaces of the MIP. The first stiffener may be spaced apart from the upper surface of the package substrate to suppress a warpage of the MIP. Thus, central conductive bumps between the MIP and the package substrate may not be upwardly floated to improve an electrical connection between the central conductive bumps and the package substrate. Further, a short between edge conductive bumps between the MIP and the package substrate may not be generated.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: October 11, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Geunwoo Kim
  • Patent number: 11443917
    Abstract: The present invention relates to an image generation method for an objective for generating an image corresponding to a multi-frame image from image signals obtained by scanning a small number of frames are proposed.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: September 13, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Chikako Abe, Hitoshi Sugahara
  • Patent number: 11440285
    Abstract: An example of a method of manufacturing a component from a composite prepreg includes collecting a specimen from the composite prepreg and quantifying an amount of surface resin of the specimen by submerging the specimen in a container containing a fluid to determine a fluid pickup percentage. Responsive to a determination that the fluid pickup percentage exceeds a predefined threshold value, forming a component from the composite prepreg.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: September 13, 2022
    Assignee: Textron Innovations Inc.
    Inventor: Suvankar Mishra
  • Patent number: 11435298
    Abstract: In some examples, a system receives a first image of a circuit board produced by a first production stage, and compares the first image to a second image of the circuit board acquired at a second production stage for the circuit board. The system indicates an anomaly with the circuit board based on the comparing.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: September 6, 2022
    Assignee: Hewlett Packard Enterprise Development LP
    Inventors: David A. Moore, Jonathon Hughes, Michael L. Mixon, Gretchen La Fontaine Otero, Niysaan E. Vlasak
  • Patent number: 11397153
    Abstract: A beam of light is directed from a light source at a wafer on a chuck. The beam of light is reflected off the wafer toward a 2D imaging camera. Movable focus lenses in the path of the beam of light can independently change the illumination conjugate and the collection conjugate. A structured mask in an illumination path can be used and the beam of light can be directed through apertures in the structured mask. A gray field image of a wafer in a zone without direct illumination is generated using the 2D imaging camera and locations of defects on the wafer can be determined using the gray field image.
    Type: Grant
    Filed: November 27, 2020
    Date of Patent: July 26, 2022
    Assignee: KLA Corporation
    Inventor: Xiumei Liu
  • Patent number: 11378451
    Abstract: A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.
    Type: Grant
    Filed: August 8, 2017
    Date of Patent: July 5, 2022
    Assignee: KLA Corporation
    Inventors: Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen, Stilian Pandev, John Lesoine, Qiang Zhao, Liequan Lee, Houssam Chouaib, Ming Di, Torsten R. Kaack, Andrei V. Shchegrov, Zhengquan Tan
  • Patent number: 11369259
    Abstract: An endoscopic device includes a manipulator body and an insertion portion including opposed respective proximal and distal ends. The insertion portion is connected to the manipulator body via the proximal end. A first heat generator is configured to be attached to the manipulator body. A heat radiator is configured to be detachably attached to the manipulator body and is thermally connected to the first heat generator. The heat radiator includes at least one air inlet port through which air flows in and at least one air outlet port having an area smaller than an area of the at least one air inlet port.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: June 28, 2022
    Assignee: OLYMPUS CORPORATION
    Inventor: Toshisato Kudo
  • Patent number: 11353322
    Abstract: The present invention is intended to make it easier to perform positioning of a detection device when detecting surface characteristics of a sensing object. The invention includes a detection device, a processing part, a guidance information generation part and an informing part. The detection device detects reflection light from a sensing object by irradiating light onto the sensing object. The processing part calculates surface characteristics of the sensing object by processing data from the detection device. The guidance information generation part generates information about a distance and/or an attitude of the detection device relative to the sensing object. The informing part informs the information about the distance and/or the attitude generated by the guidance information generation part.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 7, 2022
    Assignee: HORIBA, Ltd.
    Inventor: Eiichi Nagaoka
  • Patent number: 11330162
    Abstract: A technology is provided in which moving objects positioned at a different place and having more than the number of the cameras are displayed on a display device. The present invention is directed to a moving object imaging device including a camera, a deflection unit, a controller configured to control the camera and the deflection unit, an imaging processing part, and an imaging display part, thereby imaging the moving object in a sequentially repeating manner and creating moving image data based upon images acquired by the image processing part to display the created moving image data on the image display part.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: May 10, 2022
    Assignee: Hitachi, Ltd.
    Inventors: Daisuke Matsuka, Kazuhiko Hino, Masahiro Mimura
  • Patent number: 11300527
    Abstract: A method for detecting lens cleanliness of a lens disposed in a flat-field optical path, the flat-field optical path including a light source, the lens, a camera, the light source is a narrow-band multispectral uniform surface light source, the camera's light-sensitive surface is disposed perpendicular to an optical axis of the lens and in the light position of the lens, the method including collecting the bright-field image data and dark-field image data in a plurality of spectra through the lens; for each pixel, performing a spectral differential flat-field correction operation to yield a plurality of spectral differentials; and displaying the spectral differentials in the form of a plurality of images to show a uniformity of each of the plurality of images, wherein a non-uniform area on each of the plurality of images is determined to have been caused by an impurity of the lens.
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: April 12, 2022
    Assignee: MLOptic Corp.
    Inventors: Jiang He, Teresa Zhang, Wei Zhou, Peihong Bai
  • Patent number: 11280744
    Abstract: Accuracy of detecting abnormalities on the surface of a workpiece is improved. An appearance inspection apparatus for inspecting the appearance of a workpiece is provided. The appearance inspection apparatus for inspecting the appearance of the workpiece includes a first lighting unit that irradiates the workpiece with light, a first imaging unit that images the workpiece irradiated by the first lighting unit, a first detection unit that detects a first defect from an image captured by the first imaging unit, a second lighting unit that irradiates the workpiece with light, a second imaging unit that images the workpiece irradiated by the second lighting unit, and a second detection unit that detects a second defect from an image captured by the second imaging unit. The first lighting unit uses coaxial epi-illumination, and the second lighting unit uses coaxial epi-illumination and dome illumination.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: March 22, 2022
    Assignee: NIDEC CORPORATION
    Inventor: Eiji Yamada
  • Patent number: 11274993
    Abstract: A tire testing method includes: applying a lubrication solution to a bead part of a tire; detecting a phase of a reference point of the tire; detecting a phase of a rotation origin of a spindle at common coordinates shared with coordinates at which the phase of the reference point is indicated; detecting a singular point present on the tire by conducting a tire test while rotating the tire on the spindle, and detecting a phase from the rotation origin to the singular point; calculating a phase from the reference point to the singular point based on the phase of the reference point, the phase of the rotation origin, and the phase from the rotation origin to the singular point; storing information about the reference point and information about the rotation origin at the common coordinates; and marking the tire at a position where the singular point is present.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: March 15, 2022
    Assignee: Kobe Steel, Ltd.
    Inventors: Kohei Ito, Yasuhiro Matsushita, Koji Goto
  • Patent number: 11237484
    Abstract: A metrology tool, an aplanatic singlet lens, and a method of designing an aplanatic singlet lens are provided. The metrology tool is for determining a characteristic of a structure on a substrate. The metrology tool comprises an optical detection system for detecting radiation over a wavelength range. The optical detection system comprises an aplanatic singlet lens for focusing the radiation on to a detector. The aplanatic singlet lens has a n aplanatic wavelength which is within the wavelength range.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: February 1, 2022
    Assignee: ASML Netherlands B.V.
    Inventor: Ferry Zijp
  • Patent number: 11226293
    Abstract: A method of imaging surface features with a large (non-microscopic) field-of-view includes projecting a structured illumination pattern onto the transparent target. The surface features modify the structured illumination pattern, and an image of the modified structured illumination pattern is imaged at each of multiple different introduced phase shifts via an imaging device. The method further provides for extracting, from each of the captured phase-shifted images, image components that correspond to frequencies exceeding a cutoff frequency of the imaging device; and using the extracted image components to construct a corrected image of the surface features of the transparent target. The corrected image has a resolution that is greater than a spatially incoherent point-to-point optical resolution of the imaging device.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: January 18, 2022
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventor: Kaijun Feng
  • Patent number: 11206967
    Abstract: An image capture device includes a plurality of stacked ceramic circuit boards, an image sensor, signal conditioning electronics, and a connector. Each ceramic circuit board is parallel and directly coupled to at least one other circuit board. The image sensor is mounted to a first ceramic circuit board. The signal conditioning electronics are mounted to one or more of the stacked ceramic circuit boards and are coupled to receive electrical signals generated by the image sensor. The image capture device is enclosed by a shaft and the stacked ceramic circuit boards are stacked along a length of the shaft. The connector is mounted to a second ceramic circuit board that is on an opposite side of the plurality of stacked ceramic circuit boards from the first ceramic circuit board. The connector is mounted to a side of the second ceramic circuit board facing away from the first ceramic circuit board.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: December 28, 2021
    Assignee: INTUITIVE SURGICAL OPERATIONS, INC.
    Inventors: Viraj A. Patwardhan, John A Barton, Mathew Clopp, John E. Sell
  • Patent number: 11192665
    Abstract: Systems and methods are provided for thermal inspection of tape layup. One embodiment is a method for performing inspection of a tape layup. The method comprises laying up tape onto a surface of a laminate, applying heat to tack the tape to the surface, and generating thermographic images of the tape as applied to the surface.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: December 7, 2021
    Assignee: The Boeing Company
    Inventors: Tyler Holmes, Amanda Hansen, Steven K. Brady
  • Patent number: 11195440
    Abstract: A display device includes a defect inspection circuit, and a display panel having a display area and a peripheral area positioned outside the display area. The display panel includes a sensing wire positioned in the peripheral area and connected to the defect inspection circuit. The defect inspection circuit includes a resistance detection circuit that detects a resistance of the sensing wire based on an output signal corresponding to the sensing wire, a memory that stores first resistance information related to the resistance of the sensing wire detected in a first inspection operation, and a comparator circuit including a first comparator that compares the first resistance information with second resistance information. The second resistance information is related to the resistance of the sensing wire detected in a second inspection operation that is performed at a different time than the first inspection operation.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: December 7, 2021
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Kwang Sae Lee, Jung Hoon Shim, Won Kyu Kwak, Ki Myeong Eom
  • Patent number: 11163939
    Abstract: An article inspection apparatus includes an inspection control unit 31 and a weighing conveyor main unit 32 that inspect an article W while the article is being conveyed, and a display unit 50 and a display control unit 33 that output an image for displaying a determination result about a plurality of determination items as an image on the same screen in response to an inspection result. The display control unit 33 includes a selection unit 37 and an editing unit 38 that switches an image for displaying a determination result about a specific determination item out of a plurality of determination items to another image for displaying the determination result which is stored and held in advance, in response to a display change request input for the specific determination item.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: November 2, 2021
    Assignee: ANRITSU CORPORATION
    Inventor: Takamasa Ito
  • Patent number: 11158040
    Abstract: In a method for identifying a robot arm responsible for creating a scratch on a wafer, at least one scratch mark on a wafer is detected. A first scratch dimension of the at least one scratch mark is determined. The determined first scratch dimension is compared to a plurality of first robot arm dimensions to generate a plurality of first comparing results, wherein the first comparing results respectively correspond to a plurality of robot arms. One of the robot arms is identified based on the first comparing results.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: October 26, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Yen-Liang Chen
  • Patent number: 11126155
    Abstract: To provide an automatic screw inspection system allowing screw inspection of a workpiece to be conducted more efficiently. An automatic screw inspection system comprises: a robot to which a screw inspection device is attached, the screw inspection device including a holder unit attached in a removable manner and holding an inspection gauge used for inspection of a female screw hole in a workpiece as an inspection target; a gauge storage storing a plurality of the holder units for inspection of the female screw hole conforming to a plurality of standards; a table on which the workpiece is to be placed; and a controller that controls the drive of the robot.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: September 21, 2021
    Assignee: FANUC CORPORATION
    Inventor: Yuuya Miyahara
  • Patent number: 11092554
    Abstract: An adhesion defect detection apparatus includes an inspection window having a first dummy area, a second dummy area, and an inspection area disposed between the first dummy area and the second dummy area. A first shape changer is disposed on the inspection window. The first shape changer is configured to change a shape of the inspection window in a first direction. A second shape changer is disposed outside of both the first dummy area and the second dummy area. The second shape changer is configured to change a shape of the inspection window in a second direction that is perpendicular to the first direction.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: August 17, 2021
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventor: Tae Jin Hwang
  • Patent number: 11088003
    Abstract: The present disclosure provides an apparatus for fabricating a semiconductor device, including a first chamber for accommodating a mask, and a first ionizer in the first chamber, wherein the first ionizer is adjacent to the mask.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: August 10, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Po-Chien Huang, Chung-Hung Lin, Chih-Wei Wen
  • Patent number: 11079303
    Abstract: Vibrometric signatures of portions of a vehicle, such as a joint between two or more aspects of the vehicle, may be generated and used to make determinations regarding the integrity or suitability of the vehicle for one or more missions. Vibrometric signatures are generated based on imaging data captured with the vehicle subjected to excitation over a range of frequencies, and power levels of vibrations of the vehicle are calculated based on the images. Pixels corresponding to surfaces on either side of a joint are selected and vibrometric signatures calculated for such surfaces are compared to determine whether the joint adequately transfers vibrations, or whether the joint is sufficiently tight. Where the vibrometric signatures are sufficiently similar to one another, the joint may be presumed to be tight. Where the vibrometric signatures are not sufficiently similar to one another, the joint is presumed to require maintenance or inspection.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: August 3, 2021
    Assignee: Amazon Technologies, Inc.
    Inventors: Pragyana Mishra, Kevin Tseng
  • Patent number: 11069138
    Abstract: A geographical location of a user device is determined using a Global Positioning System. It is determined that the geographical location of the user device is within a geographical region of a digital element. In response to the determination that the geographical location of the user device is within a geographical region of the digital element, an indication that the digital element is selectable is provided. A representation of the digital element is provided without providing an auditory content of the digital element. A user selection indication that selects the representation of the digital element to obtain the auditory content of the digital element is received. The auditory content of the digital element is provided upon receiving the user selection indication.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: July 20, 2021
    Assignee: Ripple, Inc. of Delaware
    Inventor: Ray Beau Lotto
  • Patent number: 11060845
    Abstract: Targets, target elements and target design method are provided, which comprise designing a target structure to have a high contrast above a specific contrast threshold to its background in polarized light while having a low contrast below the specific contrast threshold to its background in non-polarized light. The targets may have details at device feature scale and be compatible with device design rules yet maintain optical contrast when measured with polarized illumination and thus be used effectively as metrology targets. Design variants and respective measurement optical systems are likewise provided.
    Type: Grant
    Filed: October 28, 2019
    Date of Patent: July 13, 2021
    Assignee: KLA Corporation
    Inventors: Eran Amit, Barry Loevsky, Andrew Hill, Amnon Manassen, Nuriel Amir, Vladimir Levinski, Roie Volkovich
  • Patent number: 11062586
    Abstract: A monitoring system for monitoring a condition of a substantially transparent component includes a light assembly operably coupled to the substantially transparent component. The light assembly is operable to selectively illuminate the substantially transparent component. At least one sensor is operably coupled to the substantially transparent component. The at least one sensor has a corresponding detection sensing volume. The at least one sensor is configured to measure the illumination of the substantially transparent component to determine a condition of the substantially transparent component.
    Type: Grant
    Filed: June 4, 2018
    Date of Patent: July 13, 2021
    Assignee: CARRIER CORPORATION
    Inventor: David L. Lincoln
  • Patent number: 11041714
    Abstract: A high throughput and high resolution method for characterizing objects is based on scanning their surfaces with a fast spinning probing beam of electromagnetic radiation concurrently with relatively slow object motion. A characterization apparatus comprises a guiding system that directs a primary beam of electromagnetic radiation onto the surface of a characterized object. An actuator repositions the object. An analytical system measures characteristic parameters of secondary electromagnetic radiation instigated by the primary beam of electromagnetic radiation from the object. A register system records the measured characteristic parameters synchronously with instantaneous coordinates of beam spots at which the secondary electromagnetic radiation is instigated. A compact system of probing beam spinning enables fabrication of inexpensive characterization tools with small dimensions.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: June 22, 2021
    Inventors: Vassili Peidous, Nina Peydus
  • Patent number: 11040500
    Abstract: Systems and methods are provided for thermal inspection of tape layup. One embodiment is a method for performing inspection of a tape layup. The method comprises laying up tape onto a surface of a laminate, applying heat to tack the tape to the surface, and generating thermographic images of the tape as applied to the surface.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: June 22, 2021
    Assignee: The Boeing Company
    Inventors: Tyler Holmes, Amanda Hansen, Steven K. Brady
  • Patent number: 11016180
    Abstract: The present disclosure relates to methods and systems that improve the dynamic range of LIDAR systems. An example system includes a plurality of single-photon photodetectors and at least one additional photodetector monolithically integrated on a shared substrate. The plurality of single-photon photodetectors and the at least one additional photodetector are configured to detect light from a shared field of view. The system also includes a controller configured to carry out operations. The operations include: receiving respective photodetector signals from the plurality of single-photon photodetectors and the at least one additional photodetector; selecting a photodetector signal from at least two of: the two received photodetector signals and a combined photodetector signal formed by combining the two received photodetector signals; and determining an intensity of light in the field of view based on the selected photodetector signal.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: May 25, 2021
    Assignee: Waymo LLC
    Inventors: Caner Onal, Blaise Gassend, Pierre-yves Droz
  • Patent number: 11009219
    Abstract: A housing box according to an embodiment includes an outer frame, a top panel, and a bracket. The outer frame has a bottom wall and a pair of side walls continuous to the bottom wall and facing each other, and is an aluminum sheet metal having an opening on one side facing the bottom wall. The top panel is made of iron, and covers the one side of the outer frame. The bracket is made of iron, is disposed along the inner surface of the bottom wall and the inner surfaces of the pair of side walls, and is attached to the top panel.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: May 18, 2021
    Assignee: MINEBEA MITSUMI INC.
    Inventor: Shinichi Fujisawa
  • Patent number: 11002667
    Abstract: The present invention relates to digital pathology. In order to improve uniformity at microscopic level and to enhance stability in time for color calibration, a calibration slide (10) is provided for a digital pathology scanning microscope. The calibration slide comprises a substrate (12) and a pixel layout (14) comprising a plurality of spaced apart metal nanostructures (16) arranged on a surface (18) of the substrate. The substrate is optically transparent. The metal nanostructures are arranged to produce plasmon resonances for generating a color image under a bright-field illumination. The color image comprises a plurality of calibration color values that are provided for calibrating a digital pathology imaging system.
    Type: Grant
    Filed: December 23, 2016
    Date of Patent: May 11, 2021
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Marius Iosif Boamfa, Susanne Maaike Valster, Prarthana Shrestha
  • Patent number: 10989526
    Abstract: The present invention is a device for the complete acquisition of the shape of an object by means of a plurality of image sensors arranged around a space for image capture. Image sensors capture a plurality of images that are carried to a reconstruction system formed from said plurality of images corresponding to different views of the object. Document EP2511653 discloses a system where the object falls through the trap area so that there is no type of fastener or support which hides some part of the object. The present invention is a device for the acquisition and reconstruction of objects characterized by the use of an actuator serving as launcher and configured so that the object is positioned at the point of capture of images at either zero or very close to zero speed to improve the resolution of each image without blurring due to movement, even with relatively long exposure times. Additionally, the actuator is configured so that the fall of the object is such that it prevents damage by the impact effect.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: April 27, 2021
    Assignee: INSTITUTO TECHNOLÓGICO DE INFORMÁTICA UPV CIUDAD POLITÉCNICA DE LA INNOVACIÓN
    Inventor: Juan Carlos Pérez Cortés
  • Patent number: 10989670
    Abstract: A method for detecting defects in a thinned die, the method may include inspecting the thinned die with a two-dimensional inspection module, to find suspected defects that appear as non-reflecting regions that fulfill a size condition; measuring, using a depth measurement module, a depth of the suspected defects; and defining a suspected defects as a defects when the depth parameter exceeds a depth threshold.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: April 27, 2021
    Assignee: CAMTEK LTD.
    Inventor: Aki Shoukrun
  • Patent number: 10983430
    Abstract: A method of testing a photomask assembly is disclosed. The method includes placing a photomask assembly into a chamber. The photomask assembly includes a pellicle attached to a first side of a photomask. The method further includes exposing the photomask assembly to a radiation source in the chamber. The exposing of the photomask assembly includes illuminating an entirety of an area of the photomask covered by the pellicle throughout an entire illumination time.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: April 20, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wu-Hung Ko, Chih-Wei Wen, Kun-Lung Hsieh
  • Patent number: 10948424
    Abstract: In a defect inspection device that irradiates a surface of a sample or a surface of a pattern chip with an illumination light shaped to extend in a first direction, and detects a scattered light generated from the surface of the sample or the surface of the pattern chip by the illumination light to detect a defect on the surface of the sample, the pattern chip has a dot pattern area in which multiple dots are arrayed in multiple rows and multiple columns, a minimum interval between the dots corresponding to the lines aligned in the first direction among the multiple dots arrayed in the dot pattern area in a second direction orthogonal to the first direction is smaller than a width of the illumination light, and a minimum interval between the multiple dots arrayed in the dot pattern area is larger than a resolution of the detection optical system.
    Type: Grant
    Filed: March 2, 2016
    Date of Patent: March 16, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Yuta Urano, Yukihiro Shibata, Toshifumi Honda, Yasuhiro Yoshitake, Hideki Fukushima
  • Patent number: 10949964
    Abstract: A system for analyzing a sample includes an inspection sub-system and at least one controller. The inspection sub-system is configured to scan a sample to collect a first plurality of sample images having a first image resolution. The controller is configured to generate a defect list based on the first plurality of sample images. The controller is further configured to input images corresponding to the defect list into a neural network that is trained with source data including sample images having the first image resolution and sample images having a second image resolution higher than the first image resolution. The controller is further configured to generate a second plurality of sample images with the neural network based on the images corresponding to the defect list, where the second plurality of sample images have the second image resolution and correspond to the defect list.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: March 16, 2021
    Assignee: KLA Corporation
    Inventors: Anuj Pandey, Bradley Ries, Himanshu Vajaria, Yong Zhang, Rahul Lakhawat
  • Patent number: 10937151
    Abstract: An automatic optical inspection (AOI) method for inspecting defects on a surface of an object is provided. The method includes: providing at least two different illumination systems; acquiring, by at least one detector, at least two pieces of image information of the object, each piece of image information being acquired under illumination of a corresponding one of the illumination systems; obtaining at least two pieces of surface defect information of the object by analyzing the acquired at least two pieces of image information using a computer and storing at least one of the obtained at least two pieces of surface defect information by the computer; and combining, by the computer, all of the at least two pieces of surface defect information to de-duplicate the at least two pieces of surface defect information and obtain a piece of combined surface defect information.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: March 2, 2021
    Assignee: Shanghai Micro Electronics Equipment (Group) Co., Ltd.
    Inventors: Fan Wang, Hailiang Lu, Kai Zhang
  • Patent number: 10928331
    Abstract: The present invention discloses a display defect detection method, apparatus, and device for a display screen. The method includes: identifying a suspected defective pixel from a first image of a front side of a tested display screen, where the first image is shot when the tested display screen is in a solid-color display state; identifying an external smudgy pixel from a second image of the front side of the tested display screen, where the second image is shot when the tested display screen is in a die-out state and the front side is illuminated by a diffuse reflection light source; detecting, for each suspected defective pixel identified from the first image, whether a pixel at a same location in the second image is the external smudgy pixel; and if no, determining the suspected defective pixel as a display defective pixel.
    Type: Grant
    Filed: April 25, 2018
    Date of Patent: February 23, 2021
    Assignee: Huawei Technologies Co., Ltd.
    Inventor: Huiqiang Zhang
  • Patent number: 10930065
    Abstract: Implementations are described herein for three-dimensional (“3D”) modeling of objects that target specific features of interest of the objects, and ignore other features of less interest. In various implementations, a plurality of two-dimensional (“2D”) images may be received from a 2D vision sensor. The plurality of 2D images may capture an object having multiple classes of features. Data corresponding to a first set of the multiple classes of features may be filtered from the plurality of 2D images to generate a plurality of filtered 2D images in which a second set of features of the multiple classes of features is captured. 2D-3D processing, such as structure from motion (“SFM”) processing, may be performed on the 2D filtered images to generate a 3D representation of the object that includes the second set of one or more features.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: February 23, 2021
    Assignee: X DEVELOPMENT LLC
    Inventors: Elliott Grant, Yueqi Li
  • Patent number: 10921721
    Abstract: Embodiments of the present disclosure include measurement systems and grating pattern arrays. The measurement systems include multiple subsystems for creating diffraction patterns or magnified real images of grating regions on a substrate. The measurements systems are configured to reflect and transmit light, and the reflected and transmitted beams create diffraction patterns and enlarged images. The diffraction patterns and images provide information on grating pitch and angles of grating regions. Grating pattern arrays disposed on a substrate include main regions and reference regions. The reference regions are used to locate corresponding main regions. The measurement systems do not include a rotating stage, and thus precise control of rotation of a stage is not needed.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: February 16, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jinxin Fu, Yifei Wang, Yongan Xu, Ludovic Godet
  • Patent number: 10921479
    Abstract: The disclosure discloses a magnetic induction intensity detection device and a terminal equipment. The magnetic induction intensity detection device provided by an embodiment of the disclosure includes: a power supply, an electroluminescence component and a current detection component, wherein the electroluminescence component and the current detection component are connected in series; the power supply is configured to supply a voltage to the electroluminescence component so that the electroluminescence component generates a current; the current detection component is configured to detect a current variation flowing through the electroluminescence component, and determine a current magnetic induction intensity according to the current variation and a correspondence between current variations and magnetic induction intensities.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: February 16, 2021
    Assignees: BOE Technology Group Co., Ltd., Chengdu BOE Optoelectronics Technology Co., Ltd.
    Inventors: De Yuan, Weilong Zhou, Jiangtao Deng
  • Patent number: 10890539
    Abstract: A semiconductor defect inspection apparatus for inspecting a specimen including a semiconductor substrate having a surface on which a predetermined pattern is formed, includes an excitation light irradiator, a polarization converter, a detector, and a defect analysis detector. The excitation light irradiator irradiates the specimen with excitation light along an optical path from the irradiator to the specimen and such that the excitation light is obliquely incident at a predetermined incident angle. The first polarization converter is disposed in the optical path, and converts the excitation light into s-polarized light. The detector detects photoluminescence light generated from the specimen when the excitation light is incident on the specimen. The defect analysis detector detects a dislocation defect by analyzing a photoluminescence image obtained by photoelectrically converting the photoluminescence light.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: January 12, 2021
    Assignee: KIOXIA CORPORATION
    Inventors: Hiroaki Shirakawa, Kiminori Yoshino
  • Patent number: 10883944
    Abstract: Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions.
    Type: Grant
    Filed: March 17, 2018
    Date of Patent: January 5, 2021
    Assignee: Machine Vision Lighting Inc.
    Inventor: Shigeki Masumura
  • Patent number: 10861724
    Abstract: Disclosed are a substrate inspection apparatus and a substrate processing system. The substrate inspection apparatus includes a sensor module and a jig associated with the sensor module to transfer the sensor module. The sensor module may include a housing having a first surface and a second surface facing each other and including an insertion hole connecting the first and second surfaces to each other, a sensor inserted into the insertion hole to measure a state of the substrate, and a tilting member on the housing to adjust tilt of the housing.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: December 8, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jongwoo Sun, Hakyoung Kim, Yun-Kwang Jeon, Wonyoung Jee