Abstract: Obtaining at least one of a cross-section profile, depth, width, slope, undercut and other parameters of via-holes by a non-destructive technique using an optical system having an illumination system for producing at least one light beam and directing it on a sample in a region of the structure containing at least one via-hole, a detection system configured and operable to collect a pattern of light reflected from the illuminated region, the light pattern being indicative of one or more parameters of said via-hole, and, a control system connected to the detection system, the control system comprising a memory utility for storing a predetermined theoretical model comprising data representative of a set of parameters describing via-holes reflected pattern, and a data processing and analyzing utility configured and operable to receive and analyze image data indicative of the detected light pattern and determine one or more parameters of said via-hole.

Abstract: A processing system having a chamber for in-situ optical interrogation of plasma emission to quantitatively measure normalized optical emission spectra is provided. The processing chamber includes a confinement ring assembly, a flash lamp, and a set of quartz windows. The processing chamber also includes a plurality of collimated optical assemblies, the plurality of collimated optical assemblies are optically coupled to the set of quartz windows. The processing chamber also includes a plurality of fiber optic bundles. The processing chamber also includes a multi-channel spectrometer, the multi-channel spectrometer is configured with at least a signal channel and a reference channel, the signal channel is optically coupled to at least the flash lamp, the set of quartz windows, the set of collimated optical assemblies, the illuminated fiber optic bundle, and the collection fiber optic bundle to measure a first signal.

Abstract: A pixel-by-pixel digitally-addressable, pixelated, fluid-assay, active-matrix micro-structure including plural pixels formed preferably on a glass or plastic substrate, wherein each pixel, formed utilizing low-temperature TFT and Si technology, includes (a) at least one functionalized, digitally-addressable assay sensor including at least one functionalized, digitally-addressable assay site which has been affinity-functionalized to respond to a selected, specific fluid-assay material, and (b) disposed operatively adjacent that sensor and its associated assay site, digitally-addressable and energizable electromagnetic field-creating structure which is selectively energizable to create, in the vicinity of the sensor and its associated assay site, a selected, ambient, electromagnetic field environment which is structured to assist, selectively and optionally only, in the reading-out of an assay-result response from the assay sensor and assay site.

Abstract: In an ingredient analysis method and an ingredient analysis apparatus in accordance with the present invention, high-frequency power is supplied from a power source 4 while helium gas is supplied to an atmospheric pressure plasma source 2 disposed near a substance to be analyzed, whereby plasma 5 is generated, and the substance to be analyzed is exposed to the plasma 5 and emits light. The light is guided to a filter 7 and a photodiode 8 via an optical fiber 6 and subjected to photoelectrical conversion. The signal obtained by the photoelectrical conversion is sent to a controller 9. The controller 9 judges whether a specific element is present or not in the substance to be analyzed.

Abstract: Process and apparatus for real-time determination of a solid sample composition as a function of the depth within the sample. The process comprises: forming a glow discharge (16) of atoms sputtered from an exposed area (17) of the sample (13) and analysing the glow discharge by optical emission spectroscopy; measuring the distance between said exposed area (17) and a fixed reference surface (12a) and determining from the measured distance the depth of the exposed area within the sample; and correlating the determined depth of the exposed area with the glow discharge analysis. Application to material analysis.

Abstract: The present invention pertains to the construction of analytic instruments and can be used for analyzing natural and industrial water, biological samples, geological samples and air. The purpose of this invention is to reduce substantially the power used by the atomizer and the analyzer, and to increase the number of objects that can be analyzed. To this end, the method for the thermionic atomization of a sample involves carrying out an ionic sputtering of the sample from the cathode in a low-pressure discharge. The cathode is heated by the discharge to a temperature of between 800 and 1400° C., while the ballast gas consists of Kr or Xe under a gas pressure of 10 to 15 torrs. The thermionic atomization device includes an atomizer arranged in a gas-discharge chamber filled with an inert gas. The atomizer is made in the form of a hollow, cylindrical, metallic and thin-wall cathode.

Abstract: In order to localize element concentrations in the edge areas of a horizontally manufactured continuous casting of alloyed non-ferrous metals, a longitudinal section is removed from the continuous casting. At least one strip of surface layer is then removed transversely by a metal removal unit from the longitudinal section forming a test specimen having a defined thickness. A point-by-point spectroanalysis of the metal composition is then carried out in linear sequence with the aid of a spectral-analysis head in the longitudinal direction of the strip. The element concentration determined in this manner is displayed numerically and/or graphically with the aid of a computer. The metal-removal unit and the spectral-analysis head are placed under the influence of a metal-removal and analysis control unit which is coupled to the computer via a programmable controller and via a spectrometer, respectively.

Abstract: In a distance measuring apparatus which performs a distance measuring operation in an active mode and in a passive mode, time serially, on a basis of charging conditions determined for performing the distance measuring operation in one of the active mode or the passive mode, charging conditions to be used in the distance measuring operation in the other mode are determined.

Abstract: A distance detector has an optical system, a distance sensor, and a distance calculating circuit. The optical system forms an image of a subject. The distance sensor has at least three line sensors that are disposed substantially on the imaging plane of the optical system and are arranged at partially uneven intervals. The distance calculating circuit calculates the distance to the subject in accordance with the output from the distance sensor.

Abstract: In a module which consists of optical systems and sensors, a pair of first line sensors are arranged vertically to a pair of second line sensors, and each of the line sensors is provided with a lens which projects an object image thereon. One of the first line sensors and one of the second line sensors intersect each other at right angles, and share an object lens which projects an object image onto them. In such a construction, the number of lenses, and the space for the line sensors are reduced, so that the module can be downsized.

Abstract: A distance-measuring apparatus is formed of a photographic device formed of a pair of image-forming lenses and photosensor arrays for taking images of an object through the image-forming lenses, and a calculating device electrically connected to the photosensor arrays for calculating a distance to an object to be measured by two images of the object taken by the photographic device based on a triangulation principle.

Abstract: In a method of measuring a distance, an evaluation function indicating a degree of coincidence of a pair of image data projected onto a pair of sensor arrays through a pair of focusing lenses is found, and a ratio of a valley value of a transition graph and a gradient of the transition graph are calculated by using a minimum and least value of the evaluation function and two values of the evaluation function adjacent to the minimum and least value. Then, the distance between the focusing lens pair and an object based on the evaluation function is calculated. Also, reliability of the calculated distance based on the calculated ratio is inspected. Thus, the calculated distance data is accurate and reliable.

Abstract: An apparatus includes a detecting device provided with a first sensor having an arrayed pixels and a second sensor having an arrayed pixels, a selector for selecting predetermined pixels within the first and second sensors, a controller for controlling the selector so that, in a first situation, selected pixels of the first sensor is fixed and selected pixels of the second sensor is shifted by one pixel, and, in a subsequent second situation, selected pixels of the second sensor is fixed and selected pixels of the first sensor is shifted by one pixel, and a calculator for calculating correlation based on the outputs from the selected pixels, and calculates an object distance based on the calculated correlation.

Abstract: A measuring instrument is formed of an image pickup device having a pair of image-forming lenses and photosensor arrays; and an arithmetic device using two images of a measured object photographed by the image pickup device to calculate the distance to the object based on the principle of triangulation. The image-forming lenses, a first holding member for the image-forming lenses and a second holding member for the photosensor arrays are formed of the same plastic material without hygroscopicity. Changes in size of the measuring instrument by ambient temperature and humidity are prevented to increase distant measurement accuracy.

Abstract: A system for detecting, identifying and docking aircraft using laser pulses to obtain a profile of an object in the distance. The system initially scans the area in front of the gate until it locates and identifies an object. Once the identity of the object is known, the system tracks the object. By using the information from the profile, the system can in real time display the type of airplane, the distance from the stopping point and the lateral position of the airplane.

Abstract: In a distance detection method, a pair of image data representing a pattern of images is obtained by using a pair of image sensors for receiving optical images. Then, a detection target extracted from each of the image data is captured while sequentially shifting positions of divisions in respective groups of divisions from window part data corresponding to a visual field to provide combinations, each having a pair of divisions, and a correlation value is calculated between each pair of the divisions. Also, a precision at a best correlation point as an indicator of reliability of the best correlation is obtained based on a changing condition of the correlation value near a shift value where the best correlation value has been calculated. Finally, a distance to the detection target is obtained by determining that the detection target is present in the visual field seen through the window corresponding to the window part data only when the precision exceeds a predetermined level.

Abstract: A distance measuring apparatus of the invention includes an arithmetic operation device which uses the degree of shift detected when the distance to a reference object is measured and a known distance to the reference object, to determine the difference between the offsets of image-forming positions on optical sensor arrays caused by a windshield present between a measuring object and the optical sensor arrays. The arithmetic operation device uses the difference between the offsets of the image-forming positions, an optical characteristic amount of the image-forming lenses, and the amount of shift detected when the distance to the measuring object is measured, to determine the distance to the measuring object.

Abstract: According to the method the intensity of at least one pressure-independent (impurity detection) or pressure-dependent (gas pressure determination) spectral line is measured selectively. Indirect detection utilizes the intensity of spectral lines whose wavelengths correspond to higher levels of excitation energy than those of the impurities. The intensity of these spectral lines is a measure of the impurities. Alternatively, the intensity of at least one spectral line of the respective impurity is measured directly. In order to eliminate co-phasal interference, two spectral lines are measured and the ratio is formed therefrom. The intensity ratio of argon lines of wavelengths .lambda..sub.1 =772.4 nm and .lambda..sub.2 =738.4 nm has in particular proved acceptable for the indirect detection of impurities in argon and the intensity ratio V of the argon lines of wavelengths .lambda..sub.1 =763.5 nm and .lambda..sub.2 =738.4 nm has proved acceptable for determining the argon pressure.

Abstract: A distance-measuring apparatus includes light-sensitive devices formed of optical sensor arrays disposed on image-forming surfaces of right and left image-forming lenses, respectively. The apparatus uses image data from the optical sensor arrays of the light-sensitive devices to determine the distance from an object such as a vehicle in front of the apparatus via a distance detection circuit and capable of detecting condensation or a foreign particle obscuring a cover glass or defective pixels in the optical sensor arrays. In a defective condition, a defective visibility sensor emits an alarm signal to alert the operator.

Abstract: A method of the invention corrects a detection error, caused by an assembly error, in a distance or a distance-related index detected from an image captured in the visual field of an image detection module including an optical device and a pair of image sensing devices, each including a plurality of image sensors.

Abstract: An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.

Abstract: Disclosed is a distance measuring apparatus for measuring the distance to an object on the basis of reflected light obtained as a result of projecting light onto an object, in which different reliability or contrast discrimination values are set in active and passive distance measurements. When the distance to the object is calculated by performing a correlation calculation on the basis of two received-light images obtained by an active or passive distance measurement, the reliability of the calculated distance and contrast values of the two received-light images are discriminated using the discrimination value.

Abstract: A distance measuring apparatus of an apparatus having a moving mechanism includes: a speed detector; and a mechanism responsive to a moving speed signal supplied from the speed detector which varies a focus lens position and a focal length of a light receiving optical system, a scanning range of a light projecting optical system, a base length, a position where light axes of a pair of light receiving optical systems or light axes of the light receiving and light projecting optical systems cross with each other, or responsive to a moving direction signal supplied from a moving direction detecting means of the apparatus having the moving mechanism which changes a measurement direction of a field of view. Thus, optimal measurement accuracy and a field of view to be measured can always be provided even though the moving speed or the moving direction of the apparatus having the moving mechanism is varied.

Abstract: To accurately and easily measure distance even when a photographic subject image has contrast portions inclined at various angles, a shift quantity, between a pair of left and right photographic subject images formed by a pair of left and right optical distance measuring systems having a base length, is detected and then a distance up to the photographic subject is measured.

Abstract: An optical apparatus for performing multi-point distance measurement by measuring the distance to an object using a triangulation method and light received from the object, includes first and second light-receiving systems each constituted by a multi-eye lens in which a plurality of elementary lenses are disposed adjacent to each other in a base line direction, and a photoelectric conversion element. The first and second light-receiving systems respectively form images of regions of the object, which correspond to the elementary lenses constituting the multi-eye lenses and are separated from each other, on the photoelectric conversion elements.

Abstract: A range finder having: first and second lenses for focussing an image of a subject via spatially different optical paths; first and second photosensor arrays disposed generally parallel and each having a plurality of pixels, an image being focussed on the first and second photosensor arrays by the first lens; a third photosensor array having a plurality of pixels, an image being focussed on the third photosensor array by the second lens, and a line extending through pixels of the first photosensor array and pixels of the third photosensor array having a slant from a line extending through the optical axes of the first and second lenses; a phase difference detecting unit for detecting a phase difference between images focussed by the first and second lenses and correcting an error to be caused by the slant in accordance with images focussed on the first to third photosensor arrays; and a distance calculating unit for calculating distance data to the subject in accordance with the phase difference detected by t

Abstract: This invention provides a gas atmosphere surrounding a seal between the face of a glow discharge lamp assembly and the sample surface to eliminate the possibility of the introduction of atmospheric gases into the glow discharge lamp. A groove concentric with the O-ring seal in the face of the glow discharge lamp is provided. This groove is supplied with gas slightly in excess of atmospheric pressure. This provides a gas blanket or jacket around the O-ring seal. Any leaks in the O-ring seal would draw the gas rather than atmospheric gases into the lamp. The incorporation of this modification is particularly important when a sample is being analyzed for elements which are also commonly present as atmospheric gases. The invention may be used on DC as well as RF glow discharge lamp assemblies.

Abstract: An obstacle detecting system for a motor vehicle which is capable of detecting not only the distance to an obstacle(s) existing in front of the motor vehicle and the width thereof, but also its height to thereby allow a motor vehicle control to be effected more appropriately with high reliability. The distance to the object and its width are detected by a laser radar type distance detecting unit, while the distance to the object lying within a window preset by a window setting device is also detected by a distance detecting circuit of a stereoscopic video camera unit. An object size determining unit is provided for selecting a window corresponding to a distance value detected by the stereoscopic video camera unit and which coincides with a distance value calculated by the laser radar type distance detecting unit, to thereby determine the size of the object on the basis of the preset position of the selected window.

Abstract: A phase difference detection type rangefinder is provided which calculates a distance value of each subject of two or more subjects at different distances.

Abstract: Here is disclosed a range finder utilizing a line sensor of charge accumulation type, wherein photosensitive monitoring means is provided to monitor luminance of a scene to be photographed, an appropriate amplification factor is selected on the basis of integral value of charge accumulated by the photosensitive monitoring means, a video signal output from the line sensor and reflecting the luminance of the scene is amplified at the selected amplification factor, then the amplified video signal is computed and thereby a period required for charge accumulation in the line sensor is shorten independently of the scene's luminance.

Abstract: A range finding device and method for determining the distance between a merged submarine and a target above the surface having a first and second periscopes mounted on a submarine with a known separation. These periscopes are rotatable and extensible above the surface and can determine the bearing from each of the periscopes to the target. A computer receives the bearings from the first and second periscopes and uses the bearings with the known preset distance between the periscopes to calculate the distance between the submarine and the target.

Abstract: An optical distance measurement device for determining the distance to a object 5 exhibiting a bilateral symmetry, such as an automobile, includes two optical systems whose optical axes are separated by a lateral distance perpendicular to the axis of symmetry of the object 5. Two images are formed upon the image sensors 3 and 4. A window formed within each image having a width substantially corresponding to the width of the object 5 is successively shifted from left to right within the image, and the symmetry with respect to the central axis thereof is evaluated by the microcomputer 10 at each position of the window. The axis position at which the evaluated degree of symmetry is the greatest is determined for each image. The distance to the object 5 is determined from the amount of shift between the two axis positions, based upon the principle of trigonometry.

Abstract: A non-conductive isolator for supporting a sample to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring for coupling a source of radio frequency energy to the same surface of a sample which is in direct contact with the induced glow discharge. An adapter kit for converting a direct current glow discharge analysis apparatus to a radio frequency energy induced flow discharge is also disclosed as well as the method of analyzing non-conductive and sample conductive using a source of RF energy coupled to the same sample surface being analyzed.

Abstract: A substantially Doppler-free spectrum of an element in a sputtered vapor is obtained by generating the sputtered vapor of the sample in a sputtering cell containing a rare gas and obtaining a saturated absorption spectrum for the vapor. The vapor is sputtered from a cathode including the sample and the pressure of the rare gas in the sputtering cell and the chopping frequency of a laser pump beam employed to obtain the saturated absorption spectrum are selected to reduce the number of detected velocity changing collisions in the cell to substantially eliminate any background Doppler-broadened component from the saturated absorption spectrum which is thereby a substantially Doppler-free spectrum.

Abstract: Process of analysis of surfaces by luminescent discharge spectrometry. The current used for the creation of the discharge between the anode (3) and the cathode (20) is a high-frequency current arriving on the nonconductive sample (21) to be analyzed and being propagated there by skin effect. Application is to the determination of the quality of surface coatings.

Abstract: A magnetron glow discharge plasma device is utilized as a furnace for vaporization, atomization and excitation of analytical solution samples of trace elements for atomic emission spectroscopy. The apparatus includes a sample deposited on the glow discharge lamp, a spectrometer optically coupled to the lamp through a transparent wall portion of the furnace, a photoelectric detector connected to the spectrometer for sensing the light and converting the light to an electrical signal and a computer for digitally storing and processing the sent signal.

Abstract: Ion beam machining apparatus which uses a focused ion beam to sputter particles from a target is disclosed. The beam is scanned over the target and photons emitted in response to the incidence of the beam on the target are analyzed to identify the different materials in the target and the location of these materials. Electrons are projected in a stream to the impingement site of the ion beam, in order to neutralize the charge produced by the beam and thereby stabilize the position of this site, and the photon detectors are isolated from any light emitted by the electron source.

Abstract: The present invention relates to a glow-discharge lamp comprising: a chamber body, provided with one or more gas supply and evacuation openings made of insulated material; a gas inner chamber, which expands toward an anode, is bordered on the sides by the inner walls of the chamber body and has a diameter which is largest at approximately the level of the anode and which has its smallest diameter corresponding to the examination sector of the sample to be examined; a sample arranged at the cathode end of the chamber body and with the anode incorporated in the chamber body, whereby the sample preferably is held at zero potential and the anode incorporated in the chamber body and having a passage opening is preferably held at high voltage; an end piece, if necessary, in the form of a window is arranged at the end of the chamber body, wherein at least one window opening (18) is provided in the chamber body (4) at the level of the negative glow light, and the sample (2) seals the inner gas chamber at the cathode

Abstract: An analysis system for directly analyzing solid samples by atomic emission spectroscopy wherein the system includes an atomic spectral lamp (1) of the type which enables a solid sample to be analyzed to be demountably located as a cathode of the lamp (1), means (2) for producing a primary electric discharge by cathodic sputtering from the sample via connection (8) and a secondary boosted discharge for analytical emission via connection (9), spectral wave length analysis device (4) being arranged to receive and determine the intensity of spectral lines emitted by the lamp (1), and control means (3) for controlling the system, the current level of the sample cathode and the operation of the spectral wave length analysis device (4) being controlled on the basis of output from the photomultiplier tube (7) such that the intensity of the spectral lines is maximized and the relationship between spectral line intensity and concentration of the corresponding element in the sample is maintained in a region which is sub

Abstract: Sample material is sputtered from an orifice in a disc mounted in a hollow cathode. A plasma plume is ejected from the orifice and the material sputtered from the smaple is transported directly into the base of the plasma plume. Collisions with particles in the plasma plume excite the sputtered material. Light emission and absorption from the plume are measured and ions in the plume are measured. A chamber surrounding the plasma plume is maintained at about 1 torr. About 15 cc's per minute of argon are supplied to the hollow cathode at 2 torr. The power supply supplies about 200 volts at about 0.10 amps. Low energy argon ions strick the disc at the end of the cathode tube and sputter atoms off the aperture. Atoms collide with particles in the plasma causing excitation, photon emission and ionization of atoms which are measured by optical and mass spectrometers.

Abstract: A method whereby the circuit pattern on a photographic mask or a reticle used in the manufacture of semiconductor devices is inspected for defects by an image processing technique. In this inspection method, the pattern of the mask is printed on a photosensitive member prepared by forming an opaque or semitransparent photosensitive layer on a transparent substrate and an image of the printed pattern formed on the photosensitive member is inspected by the image processing technique.

Abstract: A spectral source comprises a lamp containing an anode and a cathode in an inert gas. The cathode has a hollow portion therein, and a opening at its side wall. The anode is positioned to face the opening of the cathode. The anode and cathode are different in shape and connected to a high-frequency discharge power source. A magnetic field is arranged in perpendicular to the direction of the axial center of the opening.

Abstract: A light source is disclosed which can be used in atomic absorption analysis using the Zeeman effect. In operation, an external magnetic field is applied to the hollow cathode of the light source to cause the Zeeman-splitting of an emission line from the cathode material. The hollow cathode is made of a ferromagnetic metal as which is the element of interest for analysis and a metal for reducing the magnetic shield of the externally applied magnetic field by the ferromagnetic metal so that the external magnetic field effectively acts on the hollow portion of the cathode to provide the desired Zeeman-splitting. The hollow cathode is designed such that the product of the saturation flux densities of the cathode materials and the volume thereof is equal to or smaller than 0.2(Wb.multidot.m).times.10.sup.-6. The emission line from the cathode material is produced by excitation from a high frequency power supply, the power supply being connected to the cathode and the anode of the light source.

Abstract: A spectral source comprises a lamp containing an anode and a cathode in an inert gas. The anode and cathode are different in shape and connected to a high-frequency power source to produce a high-frequency discharge between the anode and cathode to cause both sputtering of the cathode and excitation of a radiation having the spectrum according to the material sputtered from the cathode. The application of solely high-frequency power prevents adherence of the sputtered material to the interior walls of the lamp bulb thereby allowing a reduction of the dimensions of the lamp bulb, prolongating the life time of the lamp and increasing the stability and intensity of the radiation. A magnetic field may be applied to the radiation for Zeeman modulation. Due to the relatively small dimensions of the lamp bulb, relatively small and inexpensive magnets may be used.

Abstract: A high intensity atomic spectral lamp having a first set of electrodes including a primary cathode consisting of or comprising a selected element adapted to produce a primary electric discharge which gives rise to an atomic vapor of said element by cathodic sputtering from the primary cathode; a second set of electrodes adapted to produce a secondary electric discharge which passes through the said atomic vapor, to excite the atoms in the vapor to emit radiation characteristic of said element; a window to allow the passage of said radiation out of the lamp, said window being placed in front of the operative surface of the primary cathode; means to pass a stream of inert gas through the lamp close to and across the operative surface of the primary cathode and between the primary cathode and the window in such manner as to sweep away from the vicinity of the primary cathode surface atomic species formed by said primary discharge.

Abstract: This invention relates to an apparatus and a method for spectroscopically analyzing substances, by fluorescent or resonant detection. An atomic cloud of a reference element is generated by cathodic sputtering and irradiated with radiation emitted from a substance of unknown composition. Generation of the atomic cloud is ceased and the inherent radiation of the atomic cloud allowed to decay. Any fluorescent or resonant radiation of the atomic cloud is then detected to determine the presence or concentration of the reference element in the unknown substance. Further, the amount of background radiation is detected by determining the amount of radiation extant when the concentration of atoms in the atomic cloud has decreased to substantially zero. The invention also provides an abnormal glow discharge lamp having two or more windows, the lamp being particularly suitable for use with the apparatus. The lamp further has a hollow anode with a transverse planar cathode.

Abstract: This method and apparatus optically samples numerous points on the surface of an object to remotely sense its shape utilizing two stages. The first stage employs a moveable non-contact scanner, which in normal operation sweeps a narrow beam of light across the object, illuminating a single point of the object at any given instant in time. The location of that point relative to the scanner is sensed by multiple linear photodetector arrays behind lenses in the scanner. These sense the location by measuring the relative angular parallax of the point. The second stage employs multiple fixed but widely separated photoelectronic sensors, similar to those in the scanner, to detect the locations of several light sources affixed to the scanner, thereby defining the absolute spatial positions and orientations of the scanner. Individual light sources are distinguished by time-multiplexing their on-off states.