Abstract: The present invention enables snap-shot spectral imaging of a scene at high image generation rates. Light from the scene is processed through an optical system that comprises a coded-aperture. The optical system projects a plurality of images, each characterized by only one of a plurality of spectral components, onto a photodetector array. The plurality of images is interspersed on the photodetector array, but no photodetector receives light characterized by more than one of the plurality of spectral components. As a result, computation of the spatio-spectral datacube that describes the scene is simplified. The present invention, therefore, enables rapid spectral imaging of the scene.

Abstract: Disclosed is a spectrum measuring apparatus for shortening such a measurement time period for an object being measured including two or more mutually different measurement portions as is required for the spectrum measurements of the lights from individual measurement portions. The spectrum measuring apparatus comprises a slit group having two or more slits, a spectroscope for separating the lights extracted by the slit group, for the individual slits, and a measuring unit for measuring the intensities of the individual components, which are separated by the spectroscope, for the slits. The individual slits extract such ones of the lights coming from an object being measured including two or more mutually different measurement portions, as come from the individual measurement portions.

Abstract: An optical characteristic measurement device includes a photodetector and a processor. The photodetector has a detection surface greater than a light incident surface receiving light from a spectrometer. The processor is configured to obtain a measurement spectrum detected in a first detection area corresponding to the light incident surface and a signal intensity detected in a second detection area different from the light incident surface, correct a pattern prepared in advance and exhibiting a noise characteristic of the photodetector based on the signal intensity to calculate a first correction spectrum, subtract a correction value calculated based on the signal intensity from each component value of the measurement spectrum to calculate a second correction spectrum, and subtract each component value of the first correction spectrum from a corresponding component value of the second correction spectrum to calculate an output spectrum.

Abstract: A processing unit obtains a first spectrum detected in a first detection area and a first signal intensity detected in a second detection area after the light entering the housing is cut off, and then calculates a first correction spectrum by subtracting a first correction value calculated based on the first signal intensity from each component value of the first spectrum. The processing unit obtains a second spectrum detected in the first detection area and a second signal intensity detected in the second detection area while a cut-off portion is opened, and then calculates a second correction spectrum by subtracting a second correction value calculated based on the second signal intensity from each component value of the second spectrum. The processing unit calculates an output spectrum representing a measurement result by subtracting a corresponding component value of the first correction spectrum from each component value of the second correction spectrum.

Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.

Abstract: A surface chemistry measuring apparatus includes a processor, an array of tunable infrared laser spectrometers interfacing with the processor and configured for simultaneous measurement of surface chemistry across a surface to be measured using a range of infrared wavelengths and a display interfacing with the processor and adapted to display IR spectra of infrared wavelengths reflected from the surface to be measured.

Abstract: The invention relates to an interference filter (100) for receiving an incident light (135) and selecting a light component of the incident light to be transmitted (115). The interference filter (100) includes a metal mirror (110), a dielectric mirror (130), and a spacer (120) placed between the metal mirror (110) and the dielectric mirror (130). The metal mirror (110) and the dielectric mirror (130) are configured to enable optical interference in the spacer (120) to select the light component of the incident light to be transmitted (115). Using one metal mirror and one dielectric mirror allows achieving a spectral response with high finesse and large rejection band while reducing the total number of layers in the filter and reducing the number of additional filters necessary for removing transmitted side bands, relative to prior art approaches.

Abstract: A first step of measuring a change over time in the spectral transmission spectrum of a measurement sample by its exposure to the light of a light source including an ultraviolet radiation for a preset light exposure time, a second step of performing a correction according to the change over time in the spectral transmission spectrum of the measurement sample based on the result of the measurement obtained by the first step, and a third step of calculating the final in vitro predicted SPF of the measurement sample using the result of the correction obtained by the second step are included.

Abstract: A high speed miniature tera- and gigahertz electromagnetic radiation on-chip spectrometer that comprises a tunable solid state 2D charge carrier layer or a quasi 2D charge carrier layer with incorporated single or multiple defects, at least first and second contacts to the charge carrier layer. Also the device includes an apparatus for measuring the device response between the first and second contacts, and an apparatus for a controllable tuning of at least one of the charge carrier layer parameters. The operation principle is based on the fact that radiation of different wavelengths excites distinct sets of plasma modes in the charge carrier layer.

Abstract: An optical or infrared spectrometer is suitable for on-line measurements for industrial, agricultural, field, commercial and other applications. Optical spectrometers are very useful for various analytical measurements. On-line operation is needed for obtaining real-time information, which is useful e.g. for process automation and quality control needs. The invention is based on optical design optimized for measuring moving samples at a distance and includes a light guide for signal homogenization, a linear variable filter for defining multiple measurement wavelengths as well as a linear detector array for detecting optical signals relating to the different wavelengths. There is an element for cooling and stabilizing the operating temperature of both the linear detector array and the linear variable filter, while the spectrometer is operating in variable environmental conditions.

Abstract: Methods in a spectral measurement apparatus are disclosed. Light is received with a plurality of sensors. Each sensor generates an output signal having a frequency proportional to an intensity of light received by the sensor. First, second and third signals are generated each having a frequency proportional to an intensity of light received by a sensor of a wavelength or spectral band. A spectral characteristic of the received light is determined based on at least the first, second and third signals, which are are coupled to a processing element and input in parallel. The spectral characteristic is determined based on measuring a frequency or period of the at least first, second and third signals. Spectral data based on the determined spectral characteristic is generated by the processing element and displayed on a display device for perception by a viewer or transmitted to a data interface for transmission to an electronic device external to the spectral measurement apparatus.

Abstract: The invention relates to scanning pulsed laser systems for optical imaging. Coherent dual scanning laser systems (CDSL) are disclosed and some applications thereof. Various alternatives for implementation are illustrated, including highly integrated configurations. In at least one embodiment a coherent dual scanning laser system (CDSL) includes two passively modelocked fiber oscillators. The oscillators are configured to operate at slightly different repetition rates, such that a difference ?fr in repetition rates is small compared to the values fr1 and fr2 of the repetition rates of the oscillators. The CDSL system also includes a non-linear frequency conversion section optically connected to each oscillator. The section includes a non-linear optical element generating a frequency converted spectral output having a spectral bandwidth and a frequency comb comprising harmonics of the oscillator repetition rates.

Abstract: The present invention enables snap-shot spectral imaging of a scene at high image generation rates. Light from the scene is processed through an optical system that comprises a coded-aperture. The optical system projects a plurality of images, each characterized by only one of a plurality of spectral components, onto a photodetector array. The plurality of images is interspersed on the photodetector array, but no photodetector receives light characterized by more than one of the plurality of spectral components. As a result, computation of the spatio-spectral datacube that describes the scene is simplified. The present invention, therefore, enables rapid spectral imaging of the scene.

Abstract: A system for controlling the loading of animal food into self-propelled mixing units by means of a mechanical shovel. The system includes a testing apparatus, which is mounted to the shovel to determine a series of chemical-physical information related to the chemical components contained in the food and a weighing apparatus, which is installed in a self-propelled unit to measure the weight of the food and is adapted to establish a wireless communication with the testing apparatus to receive the chemical-physical information related to the components contained in the food.

Abstract: Fiber-optic probes are provided comprising an illumination fiber and a plurality of collection beveled fibers. In some embodiments, the fiber-optic probes may further comprise a collection flat-tip fiber. A system comprising a fiber-optic probe operably connected to a spectrometer, wherein the fiber-optic probe comprises an illumination fiber and a plurality of collection beveled fibers is provided. Associated methods are also provided.

Abstract: An optical characteristic measurement device includes a photodetector and a processor. The photodetector has a detection surface greater than a light incident surface receiving light from a spectrometer. The processor is configured to obtain a measurement spectrum detected in a first detection area corresponding to the light incident surface and a signal intensity detected in a second detection area different from the light incident surface, correct a pattern prepared in advance and exhibiting a noise characteristic of the photodetector based on the signal intensity to calculate a first correction spectrum, subtract a correction value calculated based on the signal intensity from each component value of the measurement spectrum to calculate a second correction spectrum, and subtract each component value of the first correction spectrum from a corresponding component value of the second correction spectrum to calculate an output spectrum.

Abstract: A detection system including a receiver, a transmitter, and a processor for stealthy target detection or optical communications is described. Optical communications may be spread spectrum encoded communications over a bright background communication channel. The transmitter includes a quantum frequency entanglement source for outputting a signal beam and an idler beam, and transmission optics for directing the signal beam towards a remote surface. Photons in the idler beam are quantum-mechanically entangled in frequency with photons the signal beam. The transmitter includes a first spectrometer for measuring a frequency band associated with photons in the idler beam. The receiver includes a second spectrometer for identifying the frequency band associated with the photons in the received return beam. The system includes a processor configured to process the output of the spectrometers to determine the presence of a target in a target region or a message encoded in the received return beam.

Abstract: An “angle-resolved” version of FD-OCT is used to measure reflectance properties. An inspection apparatus comprises an illumination source configured to provide an illumination beam, an interferometer configured to use the illumination beam to illuminate a target on a substrate at an incidence angle and to use radiation reflected from the substrate with a reference beam derived from the illumination beam to produce an output beam, a sampling device arranged to select a portion of the output beam, a spectrometer configured to receive the selected portion of the output beam and to measure a spectrum of the received selected portion of the output beam, and a processor configured to determine from the measured spectrum reflectance properties of the target such as raw spectrometer spectral data, the Fourier transformed data, the extracted intensity components or carrier phase or the calculated complex reflectance.

Abstract: A spectral characteristic measuring apparatus includes: an illuminating section for irradiating illumination light onto a sample; a spectral section for separating light from the sample irradiated with the illumination light into light rays in accordance with wavelengths; a light receiving section including a plurality of light receiving elements for receiving the light rays separated by the spectral section in accordance with wavelengths, and converting the received light rays into electrical output signals; and a storing section for storing a combined central wavelength of each of the light receiving elements calculated in advance based a spectral intensity distribution of the illumination light.

Abstract: A system is provided that includes a cavity ring-down spectrometer and a processor. The spectrometer is configured to pass, through a cavity resonator, a modulated, continuous-wave electromagnetic signal at each of one or more selectable, transmission frequencies in the Terahertz region of the electromagnetic spectrum. The spectrometer includes a transmitter that, with the cavity resonator, is configured so as to excite a single resonant mode of the cavity resonator. The processor is configured to receive a measurement of the passed portion of the modulated electromagnetic signal, and determine a phase shift of the modulated electromagnetic signal based upon the measurement. The processor is then configured to calculate a ring-down time of the cavity resonator as a function of the phase shift.

Abstract: According to one embodiment of the present invention, a system for encoding an optical spectrum includes a dispersive element, a digital micromirror device (DMD) array, a detector, and a controller. The dispersive element receives light from a source and disperses the light to yield light components of different wavelengths. The digital micromirror device (DMD) array has micromirrors that modulate the light to encode an optical spectrum of the light. The detector detects the light that has been modulated. The controller generates an intensity versus time waveform representing the optical spectrum of the detected light.

Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.

Abstract: An optical arrangement for illuminating a surface of a biosensor having a periodic surface grating structure. The arrangement includes a light source generating light, collimating optics for collimating the light from the light source, and a first reflecting surface (e.g., prism surface) receiving light from the collimating optics and directing incident light onto a surface of the biosensor and a second spatially separated reflecting surface receiving light reflected from the surface of the biosensor. The arrangement further includes telecentric optics (e.g., telecentric lens) receiving light from the second surface of the prism. The telecentric lens directs light onto an entrance slit of a spectrometer. The arrangement increases the light collection efficiency at the spectrometer as compared to prior art arrangements.

Abstract: The present invention relates to methods of measuring the optical characteristics of volume holographic gratings with high resolution and with a large spectral coverage using a spectrally broad band source in conjunction with instruments that measure the spectrum such as spectrometers, imaging spectrometers, and spectrum analyzers.

Abstract: The invention is based on methods that allow analysis of mixed meningococcal saccharides from multiple serogroups even though they share monosaccharide units. With a combination of saccharides from serogroups C, W135 and Y, the invention analyses sialic acid, glucose and galactose content. The glucose and galactose results are used to directly quantify saccharides from serogroups Y and W135, respectively, and the combined glucose and galactose content is subtracted from the sialic acid content to quantify saccharides from serogroup C. The three serogroups can thus be resolved even though their monosaccharide contents overlap. The three different monosaccharide analyses can be performed on the same material, without interference between the monosaccharides and without interference from any other saccharide materials in the composition (e.g. lyophilisation stabilisers).

Abstract: In a spectroscopy module 1, a light passing hole 5b through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 5b and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light to be measured L1 advancing to the spectroscopic portion 4 via the light passing hole 5b and the diffracted lights L2 advancing to the light detecting portion 5a from the spectroscopic portion 4 pass through a void formed between the light detecting element 5 and the substrate 2 by an opening portion 10a of a wiring substrate 10. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract: A method of measuring the amount of a fluorescent material in a liquid comprising the steps of exciting the fluorescent material and measuring the fluorescent response of the material over a range of wavelengths to determine a response spectrum, identifying the material from the response spectrum and determining the amount of material as a function of the amplitude of the fluorescent response and a calibration factor based upon the identification of the material.

Abstract: A method for operating an optical filter in multiple modes. In one embodiment, an optical filter may be operated in a sensitivity mode to thereby generate a white light image representative of a region of interest. The optical filter may then be operated in a specificity mode to thereby generate a hyperspectral image representative of said region of interest. The white light image and the hyperspectral image may be fused to generate a hybrid image that provides morphological and hyperspectral data. The white light image and the hyperspectral image may be generated using a single detector, eliminating the need for image realignment.

Abstract: The invention relates to a method and apparatus for pre-hatch avian embryo sex determination. In particular, the invention relates to a non-invasive method and apparatus for in-ovo determining the sex of avian species while in the egg and allowing to sort the eggs into groups consisting primarily of either male or female embryos. The method comprises the steps of introducing into the egg an antibody designed to match with a sex specific antigen on the embryo, which antibody is labelled, allowing the labelled antibody to migrate to and bind with the sex specific antigen on the embryo, detecting binding of the labelled antibodies on the embryo using detection means positioned outside of the egg.

Abstract: Photometric and morphometric features derived from multi-mode imagery of cells in flow are used as a cell analyzer to determine if a marker corresponding to a cancer cell or precancerous cell is present in the population of cells imaged. An imaging system simultaneously acquires a plurality of images for each cell passing through the field of view of the imaging system. Acquiring a plurality of different images (i.e., bright field, dark field, and fluorescent images) facilitates the determination of different morphological and morphometric parameters. Simultaneously acquiring the plurality of images enables relatively large populations of cells to be rapidly imaged, so that relatively small numbers of cancer cells in a large population of cells can be detected. Initially, known cancer cells are imaged to enable a marker to be identified. Then, a sample that may include cancer cells is imaged to determine if the marker is present.

Abstract: Sensors operate by resolving changes in orientation of a wavelength dependent structure with respect to a reference direction determined by an incident light beam, resulting in very high sensitivity and dynamic range. Said sensors are wavelength encoded, can be multiplexed in a single light path such as an optical fiber, yet are decoupled mechanically from the fiber, resulting in high stability.

Abstract: An apparatus for incorporation into time-domain spectroscopy systems that creates a continuous reference whereby a sample pulses' phase and amplitude can be tracked and corrected employs a beam splitter to generate sample and reference pulses. A detector is positioned for receiving the reference radiation pulses that do not interact with the sample. The same detector is also positioned for receiving the sample radiation pulses that emerge from the sample. The apparatus can be readily implemented by being configured between the emitter and detector of a terahertz time-domain spectrometer. The reference pulse is used to trace the changes in time and amplitude of the sample pulse. Since any changes in the reference pulse will most likely manifest in the sample pulse, the reference pulse is monitored and used to correct the sample pulse and thereby reduce the effects of jitter.

Abstract: A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Abstract: A spectroscopic system is described that provides at least one of focus of an excitation beam onto a sample, automatic focus of an optical system of the spectroscopic system for collecting a spectroscopic signal, and/or averaging of excitation intensity over a surface area of the sample.

Abstract: Various methods and systems are provided for generation of a laser pulse with massive pulse-front tilt (PFT) and its use for measurement of laser pulses. In one embodiment, a method includes directing a laser pulse into an etalon and propagating the laser pulse through the etalon to form a tilted pulse. Another embodiment involves directing pulses into an etalon and propagating the pulses through the etalon in opposite directions to form a pair of massively tilted pulses that are tilted in opposite directions. In another embodiment, a system includes a Fresnel biprism configured to produce a pair of pulses from an input pulse and a lens configured to direct each pulse through an opening (or openings) in an input surface of an etalon, where the etalon is configured yield a pair of pulses tilted in opposite directions, each pulse having a massive PFT.

Abstract: Methods and systems for label-free on-chip optical absorption spectrometer consisting of a photonic crystal slot waveguide are disclosed. The invention comprises an on-chip integrated optical absorption spectroscopy device that combines the slow light effect in photonic crystal waveguide and optical field enhancement in a slot waveguide and enables detection and identification of multiple analytes to be performed simultaneously using optical absorption techniques leading to a device for chemical and biological sensing, trace detection, and identification via unique analyte absorption spectral signatures. Other embodiments are described and claimed.

Abstract: A metrology system for analyzing a semiconductor device on a substrate can include a metrology sensor.

Abstract: An optical filter includes a first substrate, a second substrate facing the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and facing the first optical film, and at least one of the first optical film and the second optical film has a metal film having a reflecting property and transmissibility of a light in a desired wavelength band, and a surface and an edge portion of the metal film is covered by a dielectric film. It is also possible to provide a tilted surface to an edge portion of the metal film. Further, it is also possible to form a step-like bump between the metal film and a dielectric film as another optical film formed under the metal film.

Abstract: An Etalon filter includes a first substrate, a second substrate which faces the first substrate, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The reflective characteristic of the first optical film determined by the reflectance of light of each wavelength in a reflective band is different from the reflective characteristic of the second optical film determined by the reflectance of light of each wavelength in the reflective band. The first optical film can have a reflective characteristic with a first wavelength ?1 as a center wavelength, and the second optical film can have a reflective characteristic with a second wavelength ?2 different from the first wavelength as a center wavelength.

Abstract: A spectroscopic analysis of a sample includes arranging the sample in a resonator cavity for transmitting cavity mode frequencies with a cavity mode frequency spacing, coupling pulsed source light into the resonator cavity, with the source light including source comb frequencies with a source frequency spacing, coupling pulsed transmitted light out of the resonator cavity, and spectrally resolved detecting the transmitted light with a detector device. The cavity mode frequency spacing and the source frequency spacing are detuned relative to each other, so that the transmitted light includes transmitted comb frequencies with a spacing larger than the source frequency spacing. The detecting feature includes collecting spectral distributions of the transmitted light in dependence on relative positions of the cavity mode frequencies and the source comb frequencies.

Abstract: A sensor of the type for liquid and/or gas analysis, which is connected to a measuring and/or evaluating system or, respectively, to a higher-ranking control system and has a sensor housing. The circuit for the collecting, processing and transmitting measured values to the measuring and/or evaluating system or to the control system (19) are provided in the sensor housing (2). This circuit has analog sensor electronics (3), an analog-digital converter (14) for converting the detected analog measured values into digital measured values, a processing unit (15) and communication device (17) for processing and transmitting the digital measured values to the measuring and/or evaluating system or to the control system (19) according to a standard communication protocol of process technology.

Abstract: A measuring arrangement for spectroscopic examination and throughput acquisition of a crop flow is provided, the arrangement having a spectrometer which comprises a light source, a window, a dispersive element and a detector, the light source is positioned to illuminate the crop flow during operation through the window, and positioned such that light reflected by the crop flow passes through the window and onto the dispersive element, which is positioned to deflect the reflected light onto the detector in different directions as a function of wavelength, a throughput-determining device cooperating with the crop flow, and a recording device for recording the measured values of the spectrometer and of the throughput determining device.

Abstract: The present invention relates to a device (10), a method and an application thereof for optically measuring the surface of a tested product (5), especially a PCB-product for reflow soldering paste inspection. The device comprises at least one white light source (1) for emitting a beam of white light, at least one collimation unit (4) for collimating said beam of white light (30), at least one spectrometer unit, preferably an optical prism (2) or an optical diffraction grading (51), for splitting said beam of white light (30) into a beam of multichromatic light (31) being directed onto said tested product (5) under a predetermined incident angle ?, and at least one camera (3) for recording a reflected beam of monochromatic light (32) of said tested product (5). Z-axis surface height information of said tested product (5) can be extracted from a hue value of said reflected beam of mono chromatic light (32) while relatively moving said tested product (5) in a x-axis scanning direction (9).

Abstract: A spectrograph having multiple excitation wavelength ranges is disclosed. The spectrograph can include a wavelength switching mechanism to switch between different wavelength ranges in accordance with the wavelength of an incoming light signal. The wavelength switching mechanism can include multiple optical assemblies (or elements) corresponding to the different wavelength ranges for processing the incoming light signal. The mechanism can also include a switching component for switching the optical assemblies to align the appropriate assembly with the incoming light signal. Each optical assembly can include one or more transmission gratings to disperse the incoming light signal into multiple wavelengths within a particular wavelength range and a reflecting mirror proximate to the grating(s) to reflect the wavelengths of light back through the grating(s) to photodetectors for measuring to wavelengths to generate a light spectrum. The spectrograph can be used in Raman spectroscopy.

Abstract: The present solution is directed to a measuring system and a method for determining spectrometric measurement results with high accuracy. The spectrometric measuring system, comprises a radiation source, an entrance slit, a dispersion element, and a detector with detector elements arranged in a linear or matrix-shaped manner in one or more planes. The detector has an even distribution of at least two different wavelength-selective filters on its detector elements. While detectors from photography and video applications are used for this purpose, use of the invention is not limited to the visible spectral region. Further, color filters on the pixels may be omitted or modified in the manufacturing process. It is also possible to use other types of detectors in which the wavelength-selective filters and associated detectors are arranged one behind each other in a plurality of planes in which complete color information is available to each individual picture point.

Abstract: In one general aspect, a spectroscopic apparatus is disclosed for investigating heterogeneity of a sample area. The apparatus includes an image acquisition system operative to acquire images of a plurality of sub-areas in the sample area and a sub-area selection interface operative to receive a selection designating one of the sub-areas for which an image has been obtained. A spectrometer has a field of view and is operative to acquire a spectrum of at least part of one of the sub-areas in its field of view, and a positioning mechanism is responsive to the sub-area selection interface and operative to position the field of view of the spectrometer relative to the sample area based on a received selection.

Abstract: A device for on-site measurement of concentration of uranium in high temperature molten salts is provided. More particularly, to a device for on-site measurement of concentration of uranium in high temperature molten salts that can be directly applied to a pyroprocess for reusing spent nuclear fuel and determine concentration of uranium 3+ and 4+ chemical species using ultraviolet-visible light absorption spectrometry.

Abstract: A zoned order sorting filter for a spectrometer in a semiconductor metrology system is disclosed with reduced light dispersion at the zone joints. The order sorting filter comprises optically-transparent layers deposited underneath, or on top of thin-film filter stacks of the order sorting filter zones, wherein the thicknesses of the optically-transparent layers are adjusted such that the total optical lengths traversed by light at a zone joint are substantially equal in zones adjacent the zone joint. A method for wavelength to detector array pixel location calibration of spectrometers is also disclosed, capable of accurately representing the highly localized nonlinearities of the calibration curve in the vicinity of zone joints of an order sorting filter.

Abstract: A metrology system for gauging and spatially mapping a semiconductor material on a substrate can be used in controlling deposition and thermal activation processes.

Abstract: A box 14 having a body 13 is used with a transparent flexible bag containing a liquid such as an IV bag. First and second faces 12 are positioned relative to each other. The faces each have therewithin an end or fiber optic port 11 of a respective light path. A light source is optically coupled with the light path of the first face and a spectrometer is optically coupled with the light path of the second face. The light paths are coaxial and are disposed so that the transparent flexible bag is positionable therebetween. The spectrometer is disposed to detect an anomaly in the liquid within the transparent flexible bag, and to annunciate the anomaly to a human user. The box defines a reproducible light path length through the liquid. A caliper 29 having a body 22 may be used in spectrometric analysis of a transparent tube containing a liquid such as a syringe or an IV line. The caliper has finger pads 27 which permit opening the spring-loaded caliper as needed.