Abstract: A scraper for an optical surface of a device is disclosed. The scraper includes a blade having an edge that is rigid and non-deforming to withstand high shear stresses. The blade is configured to rotate about a first axis parallel to the optical surface and also configured to move in a line with respect to a second axis perpendicular to the optical surface. This allows the rigid, non-deforming blade to maintain contact with the optical surface. Furthermore, the edge is configured to move across the optical surface to remove any materials adhered to the surface. The scraper can be used to clean the optical surface of an instrument, for example.

Abstract: A method and an apparatus for determining the particle content of a particle stream using a source of light and two receivers arranged offset from one another in the flow direction of the particle stream. The receivers provide an electrical signal to an evaluation unit as a function of the radiation intensity which they receive, and this signal makes possible a determination of the flow velocity and particle size. Coincident passage of two particles is indicated by a pulse occurring in the signal due to a “roof collapse” in the pulse caused by a weakening of the radiation intensity as the particles pass a receiver.

Abstract: Methods, systems and computer readable media for computing small particle size distributions of particles in a process stream comprising a sample dilute colloid. A reference matrix of pre-computed reference vectors is provided. Each reference vector represents a discrete particle size or particle size range of a particle size distribution of particles contained in a dilute colloid. Each reference vector represents a reference extinction spectrum over a predetermined wavelength range. A measurement vector representing a measured extinction spectrum of the sample particles in the sample colloid is provided, wherein the measured extinction spectrum has been spectrophotometrically measured over the wavelength range. The particle size distribution and particle concentrations of the particles in the sample colloid are determined using the reference matrix, the measurement vector and linear equations.

Abstract: The present invention relates to a random type recognition object for an identification apparatus wherein identification particles are distributed irregularly within a 3D shape and a positional value and a characteristic value of the identification particles distributed within the 3D shape in one or plural directions are recognized by separate recognition means, and an identification apparatus and method using a random type recognition object whose reproduction is impossible.

Abstract: The improved method and particle measuring and counting apparatus with the specimen selectable channels flow provide the analysis of the environmental condition related to contamination and pollution, and particularly provide precise measuring and counting of particles. The improved apparatus includes processor-controller, pump, specimen flowmeter, and the selectable channel specimen flow system comprising the channel valving device, filters, and particle monitor.

Abstract: An analyzer includes a distribution range information acquirer for obtaining distribution range information related to a particle size distribution range of a bound body of a protein and a predetermined substrate based on particle size distribution information which represents a distribution state of particle size of the bound body, wherein the bound body is obtained from a sample containing at least the protein; and a bond strength information acquirer for obtaining bond strength information related to strength of a bond of the protein and the predetermined substrate based on plurality of distribution range information obtained from a plurality of samples in which the predetermined substrate has different concentrations. An analyzing method and a computer program product are also disclosed.

Abstract: The present invention relates to the field of the detection, analysis and/or determination of matter or particles suspended in fluid. In one particular form, the present invention relates to smoke detectors, which detect unwanted pyrolysis or combustion of material. In another form, the present invention relates to smoke detectors of the early detection type, and which may be applied to ventilation, air-conditioning or duct monitoring of a particular area. In yet another form, the present invention relates to surveillance monitoring, such as building, fire or security monitoring. In still another form, the present invention relates to environment monitoring, such as monitoring, detection and/or analysis of a fluid, zone, area and/or ambient environment, including commercial and industrial environments.

Abstract: A flow cell and flow cytometer in which a nozzle at the end of a flow channel is disposed on a removable substrate held at a registered location on a flow cell. Other elements including illumination optics, light collection optics, and the flow cell may then be positioned at fixed locations and would not require subsequent periodic adjustment. The registered location for positioning the nozzle allows removal and replacement of the nozzle key with the nozzle subsequently positioned in the identical location.

Abstract: A system for determining a parameter of interest of at least one particle in a sample of a fluid obtained from a formation, comprises a view cell containing at least a portion of the sample and at least one window for viewing the sample. A light source illuminates the sample. An imaging system captures at least one image of the illuminated sample. A program executing a set of instructions on a computer analyzes the at least one image and generates an output related to at least one parameter of interest of the at least one particle in said sample.

Abstract: A method for determining the movement of particles, particularly impurities, in a medium, under the influence of a changing interface between two neighboring phases. In a first step, the temporal and/or local evolution of said interface is determined. In a second step, the movement of said particles in dependence of the temporal and/or local evolution of the phase interface as determined in the first step is calculated. Optionally, the distribution of the particles within the medium at a certain time is then determined.

Abstract: The method of the present invention generates a regularly lined electric field inside a container 1 retaining a sample formed by dispersing particle groups in a liquid by a voltage being applied to an electrode pair 2 provided in the container 1, generates a diffraction grating by a density distribution of the particle groups in the sample inside the container 1, and when acquiring a diffusion coefficient of particles from a temporal variation of intensity in a disappearing process of a diffracted light obtained by irradiating a beam of light to the diffraction grating generated by the density distribution of the particle groups, performs a particle size analysis of the particle groups by using an approximate analysis expression of a diffracted light attenuation, I(t)=?exp[?2q2Dt] which uses q=2?/? defined by a particle concentration modulation period ? in the density distribution diffraction grating of the particle groups, and the Einstein-Stokes relation.

Abstract: A Method for identifying one or a small number of molecules, especially in a dilution of ?1 ?M, using laser excited FCS with measuring times ?500 ms and short diffusion paths of the molecules to be analyzed, wherein the measurement is performed in small volume units of preferably ?10?14 l, by determining material-specific parameters which are determined by luminescence measurements of molecules to be examined. The device which can be preferably used for performing the method according to the invention is a per se known system of microscope optics for laser focusing for fluorescence excitation in a small measuring compartment of a very diluted solution and for imaging the emitted light in the subsequent measurement through confocal imaging wherein at least one system of optics with high numerical aperture of preferably ?1.2 N.A.

Abstract: The invention relates to a measuring method for measuring the properties of a powder or granular sample (1) from the surface information of the sample. According to the method the sample is leveled for the measurement, at least one image of the surface of the sample (1) is taken and the properties, such as the grain-size distribution, of the sample (1) are determined by processing the information material by calculation. According to the invention, the sample (1) is made to be supported on a transparent sample plate (2, 13, 14, 15) and an image is taken through this sample plate (2, 13, 14, 15).

Abstract: The present invention provides a plurality of samples, each of which includes particles of a predetermined particle dimension, within narrow predetermined limits, dispersed in a carrier at a predetermined particle concentration. The predetermined particle dimension and the predetermined particle concentration are the same for each sample. However, advantageously, each sample has a different predetermined ratio of a value of an optical property of the particles to a value of the same optical property of the carrier. The present invention also provides a method for selecting a target sample from the plurality of samples to assess the measurement accuracy or the detection sensitivity of an optical particle analyzer as the predetermined ratio approaches 1.

Abstract: A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a condenser and an optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condenser is connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counter is connected to downstream sides of the condenser to optically detect the liquid droplets supplied from the condensers. The condenser has a condenser tube for interconnecting the saturator and the optical particle counter. The present condensation particle counter can use water as working fluid and also can optically measure fine particles in an easy and accurate manner by forming or installing an inner surface of a condenser tube with a hydrophilic tube.

Abstract: A method for in situ sampling and monitoring of a fluid flowing in a flow path, whereby the fluid is to be directed to a chamber a first valve may provide a connection the flow path and a second valve may provide a connection between an outlet from the chamber and the flow path, comprising the following steps: a) opening the first valve and the second valve to let the incoming fluid flow through the inlet to the chamber and from the chamber through the outlet into the continuation of the fluid path, thereby allowing fluid to circulate through the chamber for a certain time, b) trapping the fluid in the chamber by closing the second valve and thereafter closing the first valve, c) opening a valve 9 for reducing pressure, to obtain a pressure in the chamber suitable for monitoring the fluid, d) opening an access valve 11 and leading the fluid trapped in the chamber into a monitor system wherein the fluid is analyzed, and thereby providing the data representing the fluid characteristics, e) providing exit for th

Abstract: A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a plurality of condensers and a plurality of optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condensers are connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counters are connected to downstream sides of the condensers to optically detect the liquid droplets supplied from the condensers. Each of the condensers has a condenser tube for interconnecting the saturator and each of the optical particle counters. The condenser tube is provided with a hydrophilic tube installed inside surface of the condenser tube.

Abstract: It is an object to provide a vacuum apparatus capable of evaluating its cleanness precisely by surely monitoring particles including deposits readily detached from the apparatus, and a particle monitoring method and program employed therein, and a window member for particle monitoring. A semiconductor manufacturing apparatus 1000 includes a processing chamber 100 for performing a manufacturing processing on a wafer. A gas supply line for introducing a purge gas is connected to an upper portion of the processing chamber 100, a valve 120 being installed on the gas supply line. A rough pumping line 200 with a valve a is connected to a lower portion of the processing chamber 100. Installed on the rough pumping line 200 are a dry pump 220 for exhausting a gas in the processing chamber 100 and a particle monitoring unit 210 for monitoring particles between the valve a and the dry pump 220.

Abstract: The invention relates to a method for verification of particles, in particular of nanoparticles (16), in which a sensor area (15) is made available for this purpose, on which the particles can accumulate. The invention also relates to a sensor arrangement having a sensor area (15) which is suitable for carrying out the method mentioned. The invention provides for a plurality of sensor areas (15) to be arranged, on which particles which each have different characteristics can accumulate. For example, this makes it possible to classify nanoparticles (16) of different size, thus advantageously allowing a statement to be made on the size distribution of the nanoparticles (16) in a nanopowder.

Abstract: A particle inspection device includes a feeder configured to drop a particle through an image area. The feeder includes a tray surface having a flat portion and an edge portion disposed above the image area. The inspection device also includes a vibration device configured to vibrate the feeder induce movement of the particle from the flat portion to the edge portion and an image capturing device configured to capture an image of the particle in the image area. The edge portion may be a downwardly curved edge section and configured to maintain the orientation and reduce tumbling motion as the particle slides off the tray and falls through the image area. Alternately or additionally, a landing element is provided having a landing surface disposed in the image area and angled with respect to the flat portion of the tray surface and configured to receive the particle. The image capturing device is configured to capture an image of the particle on the landing surface.

Abstract: A method of evaluating a scattered light signal generated by a scattered light receiver when detecting especially fine particles in a carrier medium, wherein the scattered light signal runs through a filter algorithm operation to evaluate the scattered light signal subject to specific filter algorithms, the filter algorithm operation being based on a slope of the scattered light signal.

Abstract: A droplets detecting system (100) includes a laser diode assembly (20), a photo diode (30), a light source (40), a charge coupled device camera (50), a signal processing and displaying device (32), and an image processing and displaying device (52). The laser diode assembly is configured for emitting a laser light (26) to pass through a droplet (204). The photo diode is configured for receiving the laser light passing through the droplet and for generating an electronic signal. The light source is configured for emitting an illuminating light (42) to illuminate the droplet. The charge coupled device camera is configured for receiving the illuminating light and photographing the illuminated droplet. The signal processing and displaying device is connected with the photo diode and is configured for displaying the electronic signal generated by the photo diode. The image processing and displaying device is connected with the charge coupled device camera.

Abstract: An apparatus for determining the particle size and/or particle shape of a mixture of particles is provided, comprising a feeding device, which passes the mixture of particles through a zone of measurement as a particle flow; an illumination module, which generates illumination beams and illuminates the zone of measurement with them; a detection module comprising two cameras, each recording an area of the zone of measurement assigned to the respective camera, said cameras recording the areas with different magnifications, and comprising an evaluating module, which determines the particle size and/or particle shape on the basis of the recordings of the cameras, characterized in that the illumination module is provided such that it illuminates the two areas with different intensities.

Abstract: The present invention relates to a method, system and apparatus for continuously monitoring variations in the size of particles present in a fluid on a real time basis. The method comprises of passing one or more optical signal through the fluid such as engine oil. The variation (attenuation or enhancement) in the intensity of the optical signal is continuously measured with respect to time. In an embodiment, the method, system and apparatus of the present invention enable monitoring of the amount, size and onset of particle agglomeration using single or multiple wavelengths as interrogating optical signal(s). An exemplary embodiment is provided for monitoring of the amount, size and onset of soot particle agglomeration in engine oil using single or multiple wavelengths as interrogating optical signal(s).

Abstract: A particle monitoring apparatus including a light source configured to emit plural light fluxes, a projecting optical system configured to convert the plural light fluxes into a band-shaped light flux, to lead the band-shaped light flux into a flow passage of a given gas stream, and to partially superpose the plural light fluxes to form a substantially uniform light intensity distribution of the band-shaped light flux in a widthwise direction; a light detector configured to detect intensity of light; and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles.

Abstract: The present invention is a system and method of acquiring airborne objects utilizing a reverse logic algorithm. The system includes an optics component for detecting the intensity of light from a light source as well as determining the location of the light source. In addition, the system includes a computing system to determine sources of light, which fall below a specified light intensity threshold. The portion of the sky where the light intensity falls below the threshold is determined to be airborne objects. The airborne objects can be tracked by velocity and direction as desired by the acquisition system.

Abstract: Disclosed herein are methods for measuring the particle size distribution of a pharmaceutical aerosol, including methods utilizing laser diffraction.

Abstract: While objects travel through an optical cavity, the cavity provides output light that is affected by the objects, causing the output light to have a varying intensity function. The output light is photosensed to obtain sensing results that depend on the varying intensity function. The sensing results are used to distinguish at least one object, such as from its environment or from objects of other types. The objects can, for example, be particles or biological cells, and their optical characteristics, such as refractive index or absorption, can affect the output light, so that information about them is included in the output light. The output light can, for example, have a laterally varying intensity function with peaks whose features change due to the objects. The sensing results can also be used to track objects, together with other information, such as about the speed of a fluid that carries the objects through the cavity.

Abstract: Method and apparatus for the single particle detection of submicron structures such as biological molecules and viruses utilises an optical element (100) comprising an optically transparent substrate (1) partially coated with a thin film of metal (2) illuminated with an optical beam (4) incident on a non-metal coated region (3) of the surface of the optical element at a point adjacent or close to the metal coated region of the optical element such that the beam propagates above but close and substantially parallel to the metal surface defining a measurement zone from within which submicron particles (7) contained in a sample (6) placed in contact with the optical element scatter or emit light which can be detected in the far field by conventional photodetection systems. The apparatus can be configured in a flow cell or optical microscope configuration.

Abstract: Essential prerequisites for any injectable product are its sterility, its freedom from pathogens and its freedom from visible particle contamination . . . . These requirements must be satisfied prior to the release of an injectable product batch for sale and use. A major difficulty in responding to these assay requirements is the need for a size sensitivity difference of 100 or greater in determining the presence of viable pathogenic organisms and of non-viable random particle contaminants. The wide dynamic testing range cannot be satisfied in current art with a single non-destructive testing station. The present invention uses a special agitation procedure to generate separate liquid volumes containing the small viable and larger non-viable particle contaminants. This separation makes possible the introduction of sensing systems that have been optimized for each size range and that can operate in parallel without interference.

Abstract: A tribological debris analysis system alternately including a general purpose computer used in conjunction with an imaging device and an illumination delivery system, or a circuit board integrating an embedded processor with the imaging device used in conjunction with the illumination delivery system. The illumination delivery system includes a bypass conduit connected to the machine under evaluation, an optical flow cell, a pump for pumping a fluid through the optical flow cell connected to the bypass conduit, and a laser for illuminating the fluid flowing through the optical flow cell. The imaging device detects debris and sends information representative of the debris to the general purpose computer or the embedded processor. The general purpose computer or the embedded processor classifies the debris according to size, generates shape features of the imaged debris and identifies a type of object wear based upon the shape features.

Abstract: The invention relates to methods of assessing one or more geometric properties of a particle of a substance using a Raman spectroscopic property of the substance. The method is useful, for example, for assessing particle sizes and size distributions in mixtures containing both particles of the substance and other materials.

Abstract: A system and method for measuring small particles suspended in a fluid are disclosed. The system employs optical imaging using diffraction enlargement. A sample of small particles illuminated by a light source is imaged onto a pixel array of detector elements using an imaging optical system having a reduced magnification not sufficient for forming a large enough image of a smallest particle of interest. A low-aperture imaging optics with NA<0.05 is used to add diffraction enlargement to the image corresponding to at least 5 pixels to enable accurate measurement of images of smallest particles of interest, and to increase an optical sampling volume. Suitably programmed processor is used for determining at least a pixel count for each of the diffraction-enlarged images, and for generating a number, size or distribution of particles accounting for pre-determined diffraction enlargement of particle images of different sizes. The method enables analysis of large samples of small particles in one measurement.

Abstract: A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.

Abstract: A particle diameter measuring apparatus includes a dark field illumination section which dark-field-illuminates particles to be subjected to measurement, an image pickup section which captures a particle image of each of the dark-field-illuminated particles, and a computing section which calculates a particle diameter of each particle based on luminance of the captured image.

Abstract: A droplets detecting system (100) includes a laser diode assembly (20), a photo diode (30), a light source (40), a charge coupled device camera (50), a signal processing and displaying device (32), and an image processing and displaying device (52). The laser diode assembly is configured for emitting a laser light (26) to pass through a droplet (204). The photo diode is configured for receiving the laser light passing through the droplet and for generating an electronic signal. The light source is configured for emitting an illuminating light (42) to illuminate the droplet. The charge coupled device camera is configured for receiving the illuminating light and photographing the illuminated droplet. The signal processing and displaying device is connected with the photo diode and is configured for displaying the electronic signal generated by the photo diode. The image processing and displaying device is connected with the charge coupled device camera.

Abstract: A method for the substantially complete detection and measurement of all particles, within a predetermined size, range, contained in an injectable solution comprising the steps of: a) rotation of the container causes substantially all of the particles in the injectable solution in the container to be set in motion; b) uniformly illuminating the background around the container with light; and c) detecting at least one of light scatter, light reflection and light extinction caused by said particles, with detectors having a depth of focus of detection in a specified volume of the container. Wherein the detectors are positioned, relative to the container whereby the optical path and field of view allows the sensor sufficient focus to view substantially all of the bottom interior surface of the container and substantially all of the solution volume within the container.

Abstract: A system for determining the amount of LC that is dropped on a display panel is presented. The system can adjust the amount of the LC to be dropped based on a real-time feedback on the amount of LC that is currently being dropped. The amount of LC that is being dropped is detected by utilizing a light source and a CCD camera. Because LC is not consumed wastefully and the detection interval is shortened with this system, the amount of LC that is dropped can be controlled more accurately and manufacturing cost is reduced.

Abstract: A particle imaging system and a method provided for analyzing particles in a fluid; the system comprising a means for capturing image data of the fluid within a sample cell, and a means for flow control, a valve and a pump, wherein the fluid within the sample cell is periodically stopped, or slowed down, for image capturing and moved rapidly between image capturing events. Advantageously, the present invention allows to increase exposure times, which is particularly significant for fluorescent imaging at low illumination levels.

Abstract: Particle detection and characterizing apparatus has an insulating tube along which the particles flow. Five electrodes spaced along the outside of the tube are connected via amplifiers to a processor arranged to measure the charge on the particles. The apparatus also includes a laser and photomultiplier tube arranged to measure the size of the particles so that the nature of the particles can be characterized from their electrical charge and size.

Abstract: A device for measuring aerosol size distribution within a sample containing aerosol particles. The device generally includes a spectrometer housing defining an interior chamber and a camera for recording aerosol size streams exiting the chamber. The housing includes an inlet for introducing a flow medium into the chamber in a flow direction, an aerosol injection port adjacent the inlet for introducing a charged aerosol sample into the chamber, a separation section for applying an electric field to the aerosol sample across the flow direction and an outlet opposite the inlet. In the separation section, the aerosol sample becomes entrained in the flow medium and the aerosol particles within the aerosol sample are separated by size into a plurality of aerosol flow streams under the influence of the electric field.

Abstract: A device for analyzing microparticles is provided which includes a chamber with an inlet and an outlet for respectively introducing and dispensing a flowing fluid comprising microparticles, a light source for providing light through the chamber and a photometer for measuring the intensity of light transmitted through individual microparticles. The device further includes an imaging system for acquiring images of the fluid. In some cases, the device may be configured to identify and determine a quantity of the microparticles within the fluid. Consequently, a method for identifying and tracking microparticles in motion is contemplated herein. The method involves flowing a fluid comprising microparticles in laminar motion through a chamber, transmitting light through the fluid, measuring the intensities of the light transmitted through the microparticles, imaging the fluid a plurality of times and comparing at least some of the intensities of light between different images of the fluid.

Abstract: The invention relates to an apparatus for determining the shape and/or size of small particles, comprising a cell into which the particles are placed, at least one light source for illuminating the particles, and at least one one-dimensional image sensor for measuring an image of the illuminated particles. The cell is embodied as a conduit through which the particles can be transported, and the image sensor is placed in the immediate vicinity of the conduit or into the conduit.

Abstract: In a method for controlling an orienting/positioning system, the orienting system comprises at least one sensor means, an external motion detection device for detecting an externally-caused motion in the environment of the sensor means and actuator means for controlling an orienting and/or positioning action of the sensor means.

Abstract: A medium having microfluidic circuitry for sampling and analyses. The medium may be a cartridge having a window countersunk into it and containing a flow channel. The flow channel may have items of interest flowing through it. Analyses of these items may be optical involving one or more light sources emanating light to and one or more light detectors receiving light from the channel. There are various configurations so that source and detector light cones may reach the flow channel without obscuration or interference of the light to and from the flow channel in the window.

Abstract: An optical detection system for flow cytometry that uses two or more light sources positioned laterally at different distances from a central axis of a flow stream for providing light through different parts of the flow stream. One or more lenses are used to focus the light from the two or more light sources through the flow stream and onto a common focal point or region on the opposite side of the flow stream. One or more light detectors are then placed at, near or around the common focal point or region. A processor or the like receives at least one output signal from the one or more light detectors to analyze and determine selected characteristics of the flow stream.

Abstract: A foreign matter detecting and eliminating system detects and eliminates foreign matters included in a fluid, such as a fruit juice containing fibrous materials, a beverage and a liquid medicine.

Abstract: An apparatus for analyzing a population of particles is set forth. The apparatus includes an emitter adapted to generate a beam of electromagnetic radiation, such as from a laser, and a particle chamber disposed in a path of the electromagnetic radiation beam. The apparatus also includes a sensor to detect electromagnetic radiation scattered by or otherwise received from the particle chamber. A sensor alignment unit supports the sensor along a detection axis and allows adjustment of the position of the sensor along orthogonal axes lying in a plane that is generally perpendicular to the detection axis. In one embodiment, the sensor alignment unit includes a first support platform and a first adjustment mechanism disposed to adjust the position of the first support platform along a first orthogonal axis. The sensor alignment unit also includes a second support platform that supports the sensor.

Abstract: An data processing system 4 includes: an integral part 43 which integrates, by two mutually different times, light intensities indicating light intensity signals outputted from light detectors 24 respectively provided for detecting intensities of scattered light and transmitted light generated by irradiating a sample powder S with light and then outputs each of the integrated values; an actuator control part 44 which generates and outputs a control signal for a vibration actuator 32 which drops the sample powder S stored in a sample housing so that one of the integrated values of light intensity outputted from the integral part 43 becomes closer to a set value previously defined; and a particle size distribution calculation part 45 which calculates the particle size distribution of the sample powder S based on another of the integrated values of light intensity outputted from the integral part 43.

Abstract: A sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the slurries used in the semiconductor industry for chemical mechanical planarization. Spectral transmission data is taken over the spectral range of 0.20-2.5 microns, utilizing specially constructed, chemically resistant sample cells of 50-2000 microns thickness, and miniature, fixed grating, linear detector array spectrometers. At wavelengths greater than one micron, the preferred design utilizes InGaAs linear detector arrays. An ultrasonic disrupter can be employed to breakup harmless soft agglomerates. In addition to direct particle size distribution measurement, the invention described here could be used to detect other fundamental causes of slurry degradation, such as foaming and jelling.