Abstract: The present disclosure has an apparatus for detecting fibers in a gas flowing along a passageway. A laser beam is provided at one end of the passageway and the beam is directed along a length of the passageway through which the gas flows. An electrode system, as disclosed, a quadrupole electrode system is mounted along the passageway to cause fibers carried in the gas to oscillate in a detection zone. A photo detector is positioned laterally of the passageway and detects light scattered by the oscillating fibers and projected through an opening in the passageway to provide an output signal that is a function of the light scattered by the fibers in the detection zone.

Abstract: A measuring device for quantitative determination of optical characteristic values for detecting photo- and/or electrochemical decomposition reactions taking place on surfaces of photocatalytically active substrates.

Abstract: The present invention relates to a method and a device for determining a concentration of a biological active substance in a sample by the means of an enzyme-linked immunosorbent assay (ELISA). The device comprises a solid support within a tubing for binding an immunosorbent and an inlet for fluids, a detector for detecting radiation due to an activity in the tubing, wherein the tubing is arranged inside a microchip extending substantially in one plane, for conducting the fluids along the plane of the microchip. The tubing forms a reaction cell having a large detection area. The reaction cell of the microchip is arranged perpendicular to the detector. The method comprises the steps of introducing the fluids into the tubing, conducting the fluids through the tubing forming a reaction cell, in which reaction cell the radiation emitting activity takes place, and detecting the light emitted from the reaction cell substantially perpendicular to the plane.

Abstract: The present invention provides a particle measuring system which is provided in a processing system that generates an atmosphere obtained by exhausting air or a gas in a processing chamber by a vacuum pump and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe which connects an exhaust opening of the processing chamber with the vacuum pump, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.

Abstract: The specific wavelength of 525 nm is described as a single monochromatic light source used in the determination of turbidity by nephelometry at 90° for particulate matter in raw water, water treatment, waste water treatment and industrial process streams. This wavelength improves the detection of smaller particle concentration in water where light scattering characteristics of shorter wavelengths are superior to light sources using longer wavelengths.

Abstract: Describes a nephelometric turbidity sensor device which embodies: methods for: (a) attenuation of entrained air, (b) attenuation of bubbles, (c) attenuation of scattered light (d) interchangeable light sources with automatic indexing of algorithms (e) anti-fog windows and (f) verification of operation by self-check and (g) self-calibration.

Abstract: The apparatus for deriving at least one property like turbidity or fluorescence of a sample liquid from measuring emitted light emitted from said sample liquid upon irradiation of said sample liquid with a probe light beam comprises a container for containing said sample liquid, said sample liquid forming a sample surface. It furthermore comprises a light source for generating said probe light beam directed, in an angle ?1?0° with respect to a sample surface normal, at said sample surface, and a detector adapted to detecting an intensity of said emitted light emitted through said sample surface out of said sample liquid generally along a first detection axis, said first detection axis forming an angle ?1?0° with a sample surface normal.

Abstract: A system which irradiates light onto a liquid flow containing a biological particle, detects the light therefrom to collect biological information thereon, and sorts the biological particle based upon the biological information, comprises an optical detector for detecting the light from the biological particle; an imaging device for imaging the flow and a droplet split off the flow; means for calculating, based upon the image taken by the imaging device, a distance from a detection point where the optical detector detects the light from the biological particle to a lower end position of the flow, and an interval between adjacent droplets split off the flow, thereby calculating a time that the particle moves from the detection point to the lower end position, based upon the distance and the interval; and means for providing the flow with electrons of a predetermined polarity depending upon the feature of the biological particle, when the calculated time passes after the optical detector detects the light from

Abstract: A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion.

Abstract: A method and apparatus for analyzing particles in a fluid, such as proteinaceous particles in a pharmaceutical formulation intended for parenteral delivery, are disclosed. The method comprises arranging a fluid to form a wide and shallow stream, acquiring a sequence of magnified still images of the stream, and processing said images, so as to highlight images of particles in the flowing fluid. The apparatus includes a light source, a flow cell, a lens with increased depth of view, a detector array, and a processor for acquiring and processing the images of particles in the fluid stream.

Abstract: Disclosed herein are portable and modular detection devices and systems for detecting electromagnetic radiation, such as fluorescence, from an analyte which comprises at least one optical element removably attached to at least one alignment rail. Also disclosed are modular detection devices and systems having an integrated lock-in amplifier and spatial filter and assay methods using the portable and modular detection devices.

Abstract: A particle detector which can detect smaller particles by increasing the pulse width of the particle signal output from a photoelectric transducer element, includes a particle monitoring region formed by irradiating sample fluid with laser light, and light scattered from particles passing through the particle monitoring region is received by a photoelectric transducer element so as to detect a particle. The direction of flow of the sample fluid and the direction of the laser light are arranged parallel to each other. The particle detector may have a condenser lens for condensing the scattered light and a slit provided at a focal point of the condenser lens and extending in a direction parallel to the sample fluid flow. Also, the particle detector may have a condenser circuit for integrating the output signal of the photoelectric transducer element, and a low-pass filter for filtering the output signal of the condenser circuit.

Abstract: Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods are provided. According to one aspect, a semiconductor processor includes a process chamber configured to receive a semiconductor workpiece for processing; a supply connection in fluid communication with the process chamber and configured to supply slurry to the process chamber; and a sensor configured to monitor the turbidity of the slurry. Another aspect provides a semiconductor workpiece processing method including providing a semiconductor process chamber; supplying slurry to the semiconductor process chamber; and monitoring the turbidity of the slurry using a sensor.

Abstract: A measurement system that can measure scattered light across a predetermined scatter angle is disclosed. The measurement system has a light source configured to provide light along a first axis. The measurement system has a lens system aligned along a second axis that has a first focus near the first axis and where the second axis is different than the first axis. The measurement system has a sensor located on the second axis at a second focus of the lens system and is configured to detect scattered light near the first focus. The measurement system has a mask located on the second axis and is configured to limit the light that reaches the sensor to a predetermined angle of scatter. The disclosed invention eliminates the need for multiple nephelometric measuring devices and also system verification devices in order to perform assay of the presents or absence or number of suspended particles in a media as well as verification of the systems ability to measure in compliance to required performance attributes.

Abstract: A CVD apparatus comprising an optical unit detecting the mass of contaminants adhering to an inner surface of a CVD reactor by irradiating an inner surface of the reactor with light having monochromaticity through an optical window provided on an inner wall of the reactor and receiving its reflected light is provided.

Abstract: A method and apparatus for detecting contaminants in hydrocarbon fuel are disclosed, wherein a fuel analyzer includes a flow sensor to facilitate an automatic start up and shut down of a fuel analysis, and a calibration standard to facilitate an inline calibration of the fuel analyzer.

Abstract: A measurement system that can self calibrate is disclosed. The measurement system comprising a first light source directed along a first axis and configured to illuminate a sample volume. The measurement system has a sensor aligned along a second axis and is configured to detect scattered light in the sample volume. The measurement system has a second light source aligned along the second axis that is configured to illuminate the sensor during a calibration procedure.

Abstract: Embodiments of the present invention are directed to evaporation light scattering detectors having an evaporative chamber having a wall that is in good thermal contact with a heat sink. The heat has a high thermal mass such that a change in temperature of the wall during an analysis is minimized.

Abstract: A light scattering sensor is provided with a cylindrical lens focusing received light along substantially parallel lines, or bands, that correspond to a range of scattering angles and a linear detector that detects the light intensity along the substantially parallel lines. By using a cylindrical lens, the lens serves as an auto-collimator, whereby light scattered at a specific angle from the collimated light beam strikes the linear detector at a corresponding specific location regardless of the location from where the light was scattered. Embodiments of the cylindrical lens-based light sensor can be applied to a number of different applications and industries that analyze light scattering intensity as a function of scattering angle. For example, embodiments of the cylindrical lens-based light scattering sensor can be used for monitoring a target fluid for contaminants.

Abstract: The improved methods and apparatus for analysis of environment provide wireless communication of the environmental analyzers, e.g. such as particle monitoring (counting and measuring) instruments. The improved apparatus includes at least one of a plurality of environment monitoring systems and at least one of a plurality of remote control systems, each of which comprises the wireless communicating device and control/processing device. Also the improved apparatus includes the selectable channel flow system for the assayed environment which intersects a light (laser) beam or a ray within monitoring region of the monitoring device of the improved apparatus. The selection of the channel is provided by the valving device coupled with the inlet filtrating device.

Abstract: The invention provides systems and methods for detecting aerosols. The systems and methods can be used to detect harmful aerosols, such as, bio-aerosols.

Abstract: A system which irradiates light onto a liquid flow containing a biological particle, detects the light therefrom to collect biological information thereon, and sorts the biological particle based upon the biological information, comprises an optical detector for detecting the light from the biological particle; an imaging device for imaging the flow and a droplet split off the flow; means for calculating, based upon the image taken by the imaging device, a distance from a detection point where the optical detector detects the light from the biological particle to a lower end position of the flow, and an interval between adjacent droplets split off the flow, thereby calculating a time that the particle moves from the detection point to the lower end position, based upon the distance and the interval; and means for providing the flow with electrons of a predetermined polarity depending upon the feature of the biological particle, when the calculated time passes after the optical detector detects the light from

Abstract: An optical spectral detection device utilizing free space optical beam propagation is provided. The device includes at least one optical fiber input, at least one opto-electronic detection device, an optical element having an actuator with at least one tilt axis, and a diffraction element having a surface thereon. The device also includes an optical beam transfer arrangement positioned between the optical element and the diffraction element such that tilt actuation of the optical element elicits a proportional change in an angle of incidence of the optical beam onto the diffraction element, wherein the center of rotation for the angular change is the surface of the diffraction element. The spectral properties of the optical beam that are detected are selected by selectively positioning the optical element about at least one of the tilt axes.

Abstract: A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion.

Abstract: A method and apparatus for analyzing particles in a fluid, such as proteinaceous particles in a pharmaceutical formulation intended for parenteral delivery, are disclosed. The method comprises arranging a fluid to form a wide and shallow stream, acquiring a sequence of magnified still images of the stream, and processing said images, so as to highlight images of particles in the flowing fluid. The apparatus includes a light source, a flow cell, a lens with increased depth of view, a detector array, and a processor for acquiring and processing the images of particles in the fluid stream.

Abstract: Imaging systems may include a light source that directs light towards a scattering medium. A digital imaging system receives transmitted light that is transmitted through the scattering medium substantially without being scattered, and also receives multiple components of scattered light that are passed through the scattering medium after being scattered. The digital imaging system then outputs image intensity information related to the transmitted light and the scattered light. An imaging controller determines a property of the scattering medium, based on spatial correlations related to the image intensity information.

Abstract: Imaging systems may include a light source that directs light towards a scattering medium. A digital imaging system receives transmitted light that is transmitted through the scattering medium substantially without being scattered, and also receives multiple components of scattered light that are passed through the scattering medium after being scattered. The digital imaging system then outputs image intensity information related to the transmitted light and the scattered light. An imaging controller determines a property of the scattering medium, based on spatial correlations related to the image intensity information.

Abstract: The present invention relates to a device for measuring both the color and turbidity of a liquid sample. LEDs are used as light sources and reference detectors are included to control the output of the LEDs. The device is also capable of monitoring and correcting for fouling of optical surfaces. The device is intended to be installed in-line in a mains water supply line. The device can be used in domestic water meters or on sewage treatment sites to monitor the effluent discharged back to the river.

Abstract: Particles in a liquid medium are detected by directing a source of laser light through a container containing a liquid sample with a concentration of microscopic particles in suspension. An optical detector located off the optical axis receives scattered light from the particles and provides a signal with a dc component and a varying component. The DC component is removed to provide a filtered signal representing the varying component. Movement is produced in the sample liquid, e.g., by convective stirring, to extend the band of frequencies of the varying component towards higher frequencies. The apparatus can be used for growth curve detection of biological samples and provides increased sensitivity.

Abstract: Semiconductor processors, sensors, semiconductor processing systems, semiconductor workpiece processing methods, and turbidity monitoring methods are provided. According to one aspect, a semiconductor processor includes a process chamber configured to receive a semiconductor workpiece for processing; a supply connection in fluid communication with the process chamber and configured to supply slurry to the process chamber; and a sensor configured to monitor the turbidity of the slurry. Another aspect provides a semiconductor workpiece processing method including providing a semiconductor process chamber; supplying slurry to the semiconductor process chamber; and monitoring the turbidity of the slurry using a sensor.

Abstract: A non-reciprocal nephelometer is disclosed herein that uses an integrating sphere with attached truncation-reduction tubes to contain the sample volume and to integrate the scattered light. The disclosed nephelometer improves on the imperfect angular response by using an integrating sphere design with forward (backward) truncation angles of ?1° (?179°), it reduces sampling losses by employing a substantially straight vertical flow path. In one disclosed embodiment, an illumination assembly consisting of one or multiple diffuse light sources is provided for homogenously illuminating the integrating sphere. An illumination aperture admits light from the light sources, a sensing aperture admits scattered light to an optical detector, and a dark aperture provides a dark background viewing area for the optical detector.

Abstract: The invention is directed to a method and a combined visibility measuring and precipitation measuring instrument for determining visibility, amount of precipitation and type of precipitation.

Abstract: A method and apparatus for detecting back-scattered light from small particles, such as blood cells, irradiated by a focused beam of light as such particles travel through the interrogation zone of a standard optical flow cell in a flow cytometer. Back-scattered light is collected at a location upstream of the beam-shaping optics (or a portion of such optics), at a location between the light beam source and the beam-shaping optics.

Abstract: This invention provides a radiation directing device, including a screen having a mirrored surface interrupted by one or more pin holes that pass through the screen, the pin holes having an elliptical shape. The invention further provides an apparatus, including (a) a screen having a mirrored surface interrupted by one or more pin holes passing through the screen; and (b) a detector for detecting radiation reflected by the mirrored surface, wherein the detector determines a position of a radiation beam relative to the pin hole.

Abstract: A method and apparatus provides for particle size detection. A particle detector signal is utilized to provide particle size information. The particle detection signal is obtained by utilizing particle detector information.

Abstract: An illumination system for increasing a light signal from an object passing through a reflection cavity. The reflection cavity is defined by spaced-apart, opposed first and second surfaces disposed on opposite sides of a central volume. Preferably the first reflecting surface forms an acute angle with the second reflecting surface. A beam of light is directed into the reflection cavity so that light is reflected back and forth between the first and second surfaces a plurality of times, illuminating a different portion of the central volume with each pass until, having ranged over the central volume, the light exits the reflection cavity. The “recycling” of the light beam in this manner substantially improves the signal to noise ratio of a detection system used in conjunction with the reflection cavity by increasing an average illumination intensity in the central volume.

Abstract: An optical particle counter has a gain-apertured laser cavity producing laser light, an inlet jet providing fluid flow into a particle detecting region within the laser cavity, the inlet jet having an inlet jet orifice; a detection optics assembly located to collect light scattered from particles with the detecting region for producing an output signal indicative of the particles; and an optical barrier complex located to reduce noise as compared to the gain-apertured system without the optical barrier complex for fluid flow rates greater than or equal to about 0.1 cubic feet per minute. The optical barrier complex inhibits laser light from illuminating turbulent eddy currents originating on the interior walls of the inlet jet. The optical barrier complex includes one or more physical apertures, one or more optical stops, or both which are located to prevent laser light from illuminating the eddy currents.

Abstract: An apparatus for detecting particles in a sample of gas is disclosed. The apparatus comprises a single optical radiation source, a sensor head, and detection electronics. The sensor head comprises a housing having an elliptical cross section. The sensor head receives optical radiation from the source through a fiber optic line at the first focus, and a detector is located at the second focus. The detector receives radiation scattered and emitted by particles in the light beam at the first focus. The detection electronics determine the presence, and in one embodiment the identity, of particles based on the radiation incident on the detector.

Abstract: A particle sizing method and apparatus of the PIDS type uses randomly polarized radiation to irradiate a particle sample. Portions of the resulting side scattering pattern are decomposed to simultaneously produce, for each decomposed portion, first and second linearly polarized beams of radiation in which the respective planes of polarization of the two beams are mutually perpendicular. Each of the polarized beams is focused onto a photodetector, and the respective photodetector outputs are differentiated to provide PIDS signals that are useful in calculating a particle size distribution for the sample.

Abstract: Apparatus and methods for determining the presence of a fluid conduit at a predetermined location and at least one characteristic of the fluid in the conduit are disclosed. The apparatus includes a light source for generating radiated light in a direction towards the predetermined location, such that when the fluid conduit is present at the predetermined location the radiated light passes in a direction through the fluid conduit, a first optical sensor for detecting the radiated light through the fluid conduit, and a second optical sensor for detecting the radiated light which is reflected by the fluid conduit.

Abstract: The invention provides a flow cell system for high throughput solubility testing of compounds that is particularly useful for screening large compound collections, such as combinatorial chemical libraries or other such synthetic chemical libraries. The system includes a flow cell to channel a fluid sheath which itself channels a continuous or intermittent sample liquid stream containing a compound for testing. Where the concentration of compound in the sample exceeds the solubility limit, particles of the test compound precipitate. These particles scatter the light from an interrogating light beam directed at the sample liquid stream. Individual flashes of scattered light are detected as electronic pulse signals from the detector and their intensity analyzed according to intensity and number of events. System software analyzes the stored pulse signal data in real-time to determine whether there is a significant increase in scattering over the highly variable background scattering.

Abstract: A particle detection system exhibits an increased ability to detect the presence of submicron diameter particles and to distinguish between noise and pulse output signals generated by small diameter particles on which a light beam is incident. This increased ability results from the incorporation of a light reflector, a pair of detector elements that detect correlated portions of the light beam that have been scattered in multiple directions, and a coincidence circuit that determines whether each detector element in the pair concurrently generates a pulse output signal exceeding a predetermined threshold. Sample particles are counted only when both detector elements concurrently detect scattered light components.

Abstract: A particle detector comprising an optical cavity constructed of a solid-state laser which is optically pumped by pumping light generated from a pumping light source and a reflecting mirror, the optical cavity generating laser light, a flow path defined by sample fluid, and a particle detecting region where the laser light La is radiated upon the flow path, wherein particles passing through the particle detecting region are detected by receiving light scattered from the laser light due to the particles passing through the particle detecting region, and wherein the laser light generated within the optical cavity has a multi transverse mode, the cross sectional shape of which has a different length in the longitudinal direction and the transverse direction.

Abstract: To measure property-specific distributions like surface area and mass concentrations, in a particle field that attenuates light passing therethrough, such as a spray or aerosol, a probe beam having a suitably selected wavelength is directed into and thereby caused to interact with the particle field. Light produced by this interaction is detected by sensors separated a distance from the beam. Extinction of the probe as it propagates through the particle field is quantified by determining the amount of light exiting the field in comparison with the amount of light entering the field. The property specific concentrations are determined from the light detected by the sensors after correcting for the extinction of the beam as well as attenuation of the light traveling the distance from the beam to the sensors. The light produced by the interaction of the probe with the particle field may include scattering, fluorescence, or both.

Abstract: A flow cytometer for the analysis of large particles or small multicellular organisms may experience unstable flow because of the large diameter of the flow chamber. The use of a sheath fluid or a sheath and sample with addition of a viscosity-increasing agent to give a viscosity higher than that of water ensures that flow in the pre-analysis section will be fully developed laminar flow, and that the flow in the analysis section will be laminar. This allows accurate analysis and sorting of large particles or analysis and sorting of smaller particles at an increased rate of speed. Water-soluble polymers are preferred because they increase fluid velocity with negligible osmotic effects. A 0.9 weight % solution of polyvinyl pyrollidone with an average molecular weight of 1.3 million is particularly effective. Use of viscosity-increasing agents that cause minimal increases in surface tension of the fluid is also preferred.

Abstract: An apparatus and method for producing a diffusive, continuous laminar flow for particle growth via condensation of vapors with a mass diffusivity near or higher than the thermal diffusivity of the surrounding gas. In an exemplary embodiment, the method uses the condensation of water vapor onto particles suspended in air.

Abstract: An illumination system for increasing a light signal from an object passing through a reflection cavity. The reflection cavity is disposed between spaced-apart, opposed first and second surfaces disposed on opposite sides of a moving stream of objects. A light collection system is disposed substantially orthogonal to a plane passing through the surfaces and the stream so as to collect light that is scattered from or emitted by the objects as they pass through a field of view disposed between the first and second surfaces. A beam of light from a laser source is directed through the stream of moving objects in a direction nearly orthogonal to the stream (but slightly inclined) and lying in the plane that extends through the surfaces and the stream. Due to the reflection angle and the distance between the stream and the first surface, the point at which the light reflected from the first surface intersects the stream on a second pass is displaced from where it passed though the stream on its initial pass.

Abstract: Methods and apparatus are disclosed for determining the volume, hemoglobin concentration, maturity and cell shape of mammalian red blood cells in a whole blood sample and simultaneously monitoring system standardization. Methods for distinguishing red blood cells from other cellular particles, prior to the red blood cell analysis are also disclosed. Red blood cells are passed through a beam of light in single file at a selected wavelength, obtaining an initial cytogram by means of the resultant magnitude of one light loss signal and one forward angle light scatter signal at a selected angular interval and a third side angle light scatter or two forward angle light scatter signals at a selected angular intervals and a third side-angle light scatter signal, projecting the cytogram, point by point, onto a pre-calibrated 3-dimensional surface containing grid lines of volume and hemoglobin concentration and determining accurate values of cell volume and hemoglobin concentration.

Abstract: The high numerical aperture flow cytometer of the present invention includes a flow cell and a laser input. The laser input emits a beam of light that is oriented substantially orthogonally to the flow of blood cells through the flow cell such that laser light impinges upon the blood cells as they pass through the flow cell. A portion of the beam from the laser input that impinges upon the blood cells in the flow cell is scattered at a substantially right angle to the beam of laser input (“right angle scatter”). A second portion of the beam from the laser input that impinges upon the cells in the flow cell is scattered at a much lower angle than 90°.

Abstract: A method for measuring the characteristics of particles in a fluid by detecting electromagnetic radiation scattered on individual particles and an apparatus for performing the method are characterized in that the measurement takes place in structurally separated manner using at least one irradiating device and at least one receiver device in at least one sensor arrangement through which flows a fluid flow containing the particles to be measured, that in the at least one sensor arrangement signal formation takes place of a signal to be received in the receiver device using exclusively optomechanical elements and that signals are transmitted between the at least one sensor arrangement and the at least one irradiating device or the at least one receiver device by means of optical signal transmitters. This makes the apparatus particularly suitable for use in explosion-endangered environments and at difficultly accessible measurement locations, e.g. on chimneys.