Abstract: Various embodiments include systems and apparatuses for reducing contamination levels within optical chambers of particle-detection instruments. In one embodiment, an apparatus to reduce contamination within an optical chamber of a particle-detection instrument is described. The apparatus includes a plenum chamber to at least partially surround an aerosol-focusing nozzle of the particle-detection instrument and accept a filtered gas flow. A curtain-flow concentrating nozzle is coupled to the plenum chamber to produce a curtain flow into the optical chamber to substantially surround an aerosol flow. Other methods and systems are disclosed.

Abstract: A microfluidic chip configuration wherein injection occurs in an upwards vertical direction, and fluid vessels are located below the chip in order to minimize particle settling before and at the analysis portion of the chip's channels. The input and fluid flow up through the bottom of the chip, in one aspect using a manifold, which avoids orthogonal re-orientation of fluid dynamics. The contents of the vial are located below the chip and pumped upwards and vertically directly into the first channel of the chip. A long channel extends from the bottom of the chip to near the top of the chip. Then the channel takes a short horizontal turn that nearly negates any influence of cell settling due to gravity and zero flow velocity at the walls. The fluid is pumped up to a horizontal analysis portion that is the highest channel/fluidic point in the chip and thus close to the top of the chip, which results in clearer imaging.

Abstract: Data are collected on a turbidity of a fuel tank at each of a plurality of fueling stations. A fueling station is selected based on the collected data. A vehicle is moved to the selected fueling station.

Abstract: Apparatus and associated methods relate to a system for detecting foreign object debris ingested into an aircraft engine. The system detects such foreign object debris by projecting a beam of light over an inlet of the aircraft engine. When foreign object debris is ingested into the aircraft engine, it intercepts the beam of light and scatters a back-scattered portion of the intercepted beam of light. An optical detector is configured to detect the back-scattered portion of the intercepted beam of light. A processor is configured to determine whether foreign object debris is ingested by the aircraft engine based on a comparison of a threshold value with a signal indicative of the back-scattered portion generated by the optical detector.

Abstract: A laser sensor module measures a particle density of particles with a size of less than 20 ?m. The laser sensor module includes: a laser configured to emit a laser beam; a detector; and an optical arrangement. The optical arrangement is configured to focus the laser beam to a focus region. The laser is configured to emit the laser beam through the optical arrangement to the focus region. The optical arrangement has an emission window. The detector is configured to determine an interference signal of an interference of reflected laser light with emitted later light of the laser beam. The laser sensor module is configured to provide an indication signal of a soiling of the emission window based on the interference signal determined during a mechanical excitation of the emission window.

Abstract: According to one embodiment, an optical inspection apparatus includes a first illuminator, an image-forming optical system, a scattering light selector, and an imaging element. The first illuminator is configured to emit a first light beam. The first light beam reflected by an object is incident on the image-forming optical system. The scattering light selector is configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam. The passing light beams simultaneously form an image on the imaging element.

Abstract: Embodiments herein provide for improved range response in lidar systems. In one embodiment, a lidar system includes a laser, and a detector. First optics direct light from the laser on a beam path along a first optical axis of the first optics. Second optics image the light from the beam path onto a second plane that is substantially normal to the first plane. The second optics have a second optical axis that differs from the first optical axis. The first and the second optical axes lie in a same first plane. A first line in the first plane intersects a second line in the second plane at an acute angle. The first line is perpendicular to the first optical axis. A spatial filter configured in or near the second plane filters the light from the second optics onto the detector.

Abstract: A flow cell and a liquid chromatographic unit are provided. The flow cell includes a housing, a cell core, a liquid-core waveguide, an inlet connection assembly and an outlet connection assembly. The cell core is provided in the housing, and is provided with a liquid feed recess, a liquid channel and a liquid discharge recess therein. The liquid-core waveguide is provided in the liquid channel. The inlet connection assembly is provided at an end of the cell core, and includes an inlet press block, a liquid feed tube, and a light entering tube. The outlet connection assembly is arranged at another end of the cell core and is provided with a light exit hole.

Abstract: A smoke detector (100) for use with an aspiration smoke detector (ASD) is described. The smoke detector includes a light source (104) configured to emit a beam of light (108); a reflector (102) including an aperture (110), the aperture aligned with a direction of propagation of the beam of light when no scattering occurs; and a photodetector (106); the reflector configured to reflect light scattered from the beam of light received at the reflector to a single focal point; and the photodetector located at the single focal point. An aspiration smoke detector (ASD) system (2) includes the smoke detector and a method of detecting smoke using the smoke detector.

Abstract: A sensor system includes: a housing having an internal wall defining an opening; a transparent window mounted within the opening; a sensor device within the housing and having at least one of a sensor output or a sensor input alignable with the transparent window; a vibration device in communication with the transparent window, where the vibration device is controllable to produce a first sonic movement; where the transparent window is movably responsive to the first sonic movement with a second sonic movement; and at least one damping member located between the transparent window and the sensor device, where the damping member substantially isolates the sensor device from at least the second sonic movement of the transparent window. A method includes determining a cleaning trigger corresponding to cleaning the transparent window; and controlling, in response to the cleaning trigger, a vibration frequency, amplitude, or duration of the vibration device.

Abstract: An apparatus for estimating bio-information may include a sensor configured to emit light to an object and detect light scattered or reflected from the object and a processor configured to acquire, based on an intensity of the detected light, a first absorbance coefficient change and a first scattering coefficient change, relative to a reference time point, acquire a second scattering coefficient change based on the first absorbance coefficient change, and correct the first scattering coefficient change based on the acquired second scattering coefficient change.

Abstract: Apparatuses and associated methods of manufacturing are described that provide a tip resistant optical testing instrument configured to rest on a surface. The optical testing instrument includes a shell defining a cavity for receiving a sample tube. The shell includes a bottom shell surface, wherein the bottom shell surface defines at least one support element, wherein the at least one support element is configured to engage the surface to support the optical testing instrument in a testing position, and a translational surface configured to engage the surface to support the optical testing instrument in an angled position. In an instance in which the optical testing instrument tilts from the testing position to the angled position, the translational surface is configured to engage the surface contacting the translational surface to prevent the optical testing instrument from tipping further and allow the optical testing instrument to return to the testing position.

Abstract: A measurement apparatus according to the present disclosure is a measurement apparatus capable of measuring particles in a fluid and comprises: a flow path device including a first flow path with translucency through which a first fluid including the particles passes and a second flow path with translucency through which a second fluid which does not include the particles passes; an optical sensor facing the flow path device, irradiating each of the first flow path and the second flow path with light, and receiving light passing through each of the first flow path and the second flow path; and a controller measuring the particles by comparing an intensity of light passing through the first flow path and an intensity of light passing through the second flow path, each of which is obtained by the optical sensor.

Abstract: Provided are methods of assessing the cleanliness of a flow cell of a flow cytometric system. The provided methods include computing a ratio of post-flow cell and pre-flow cell light beam intensities and using such a ratio to assess the cleanliness of the flow cell. Flow cytometric systems capable of monitoring the cleanliness of a flow cell contained within the system are also provided.

Abstract: The invention refers to an optical measurement apparatus (10) with an optical device (18,20,22) and a liquid sample vessel (12) for measuring an optical parameter of a liquid sample (13) in the liquid sample vessel (12), comprising a drying circuit circulating drying air for venting the sample vessel (12), wherein the drying circuit comprises a mechanical water stop means (100) in the course of the drying circuit, the water stop means (100) comprising a conduit body (102) with a water-absorbing swelling element (120) arranged within the conduit body (102). The water stop means is simple and inexpensive and reliably protects all elements downstream of the water stop means from a water ingress upstream of the water stop means.

Abstract: An airborne, gas, or liquid particle sensor with multiple particle sensor blocks in a single particle counter. Each sensor would sample a portion of the incoming airstream, or possibly a separate airstream. The various counters could be used separately or in concert.

Abstract: A system, wearable device, and method include a light emitter configured to emit light at a first wavelength of between approximately 900 and 1000 nanometers and at a second wavelength of approximately 1350 nanometers, a first light detector spaced at a first distance from the light emitter, and a second light detector spaced at a second distance from the light emitter, the second distance approximately twice the first distance. At least one of hydration and glycogen of muscle tissue is determinable based on a relationship between backscatter light from the muscle tissue as detected by the second light detector and backscatter light from non-muscle tissue as detected by the first light detector.

Abstract: A Fenton apparatus of the present disclosure includes a reactor vessel, gas injection inlets that allow ejection of aeration coolant perpendicular to axis of the reactor vessel to agitate a reaction composition present in the reactor vessel under vortex conditions, a jacket cooling loop encasing the reactor vessel to allow circulation of a jacket coolant selected from a group consisting of forced air, nitrogen gas, and water, a coil cooling loop coiling around the reactor vessel to allow circulation of a coil coolant selected from a group consisting of forced air, nitrogen gas, water, and carbon dioxide. Multiple programmable solenoid valves are provided to individually control injection of the aeration coolant, the jacket coolant, and the coil coolant. A controller is provided to communicate with a temperature sensor and each programmable solenoid valve.

Abstract: An optical excitation system comprises a substrate (105) comprising at least one delivery means (104), for delivering analytes (109) into at least one region of interest (103), at least one radiation carrier (101) for directing at least one radiation beam from the at least one radiation carrier (101) into the at least one region of interest (103). The substrate (105) includes a thin lens system (120) comprising at least a first thin lens (121), for collimating radiation from the at least one region of interest (103) to a remote detection system (130). A particle sensor and sensing system comprising the excitation system are also provided, for example a modular particle sensor and modular sensing system, wherein the optical excitation system may be single use and disposable.

Abstract: A handheld aerosol-generating device may include an emitter configured to emit light, a sensor configured to receive light, and an aerosol chamber configured to hold an aerosol. The emitter may emit light into the aerosol chamber. The sensor may receive light from the aerosol chamber and measure at least one wavelength of the spectrum of the received light. Direct measurement of parameters, and/or the presence, of the aerosol in the aerosol chamber may be enabled, where the direct measurement of parameters of the aerosol in the aerosol chamber may enable optimal operation of an aerosol-generating system that may be the handheld aerosol-generating device.

Abstract: This invention relates to an optical system and method for performing turbidity assay, e.g. coagulation of blood or plasma, comprising a standard optical reference, a sample handling structure, a light source and an optical detection unit. The standard optical reference, such as a fluorophore-doped glass, provides constant optical signal under controlled optical conditions. The sample handling structure, such as a microfluidic system with reaction chamber, can be placed beneath or above the standard optical reference. During operation, the coagulating plasma/blood changes its optical absorbance and reflection properties, which results in changes in optical signal that reaches the optical reading unit. The variation of the optical signal, such as fluorescence signal indicates the kinetics of the turbidity varying process, such as plasma/blood coagulation process.

Abstract: A system and method for automated analysis of a membrane filter obtained from an air quality monitoring apparatus used for sampling airborne respirable fibres such as asbestos and synthetic mineral fibres is described. The system comprises capturing a macroscale image a membrane filter and analysing macroscale image using a computer vision method to determine a countable area of the membrane filter and one or more excluded regions within the countable area of the membrane filter. These excluded regions comprise membrane filter grid lines, air bubbles and large particulate matter. The slide is then placed on a robotic XY stage of a digital phase contrast microscope which is used to capture at least one magnified phase contrast image at each of 20 or more sample locations located across the filter member. The sample locations are selected such that a field of view at each sample location does not contain an excluded region.

Abstract: The particle size distribution measuring apparatus includes a centrifugal sedimentation measuring mechanism and a dynamic light scattering measuring mechanism. The centrifugal sedimentation measuring mechanism causes particles to settle out by rotating a measurement cell accommodating particles dispersed in a dispersion medium and detects transmitted light by irradiating light to the measurement cell to measure a first particle size distribution on a basis of a change of transmitted light intensity of the transmitted light. The dynamic light scattering measuring mechanism detects scattered light occurred upon irradiation of light to particles so as to measure a second particle size distribution based on a change of scattered light intensity of the scattered light occurred due to Brownian motion of particles.

Abstract: A radiation receiving sensor includes an infrared receiver including a plurality of infrared receiving devices that receive infrared radiation, a lens that allows infrared radiation to enter the infrared receiver, a rotator that rotates the infrared receiver and the lens about a part of the lens, and a cover member that faces the infrared receiver through the lens and that has translucency.

Abstract: A handheld aerosol-generating device may include an emitter configured to emit light, a sensor configured to receive light, and an aerosol chamber configured to hold an aerosol. The emitter may emit light into the aerosol chamber. The sensor may receive light from the aerosol chamber and measure at least one wavelength of the spectrum of the received light. Direct measurement of parameters, and/or the presence, of the aerosol in the aerosol chamber may be enabled, where the direct measurement of parameters of the aerosol in the aerosol chamber may enable optimal operation of an aerosol-generating system that may be the handheld aerosol-generating device.

Abstract: An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.

Abstract: A method for measuring a concentration of a gas in a container having a wall with at least one deformable portion, the gas absorbing electromagnetic radiation at least in a specific spectral range, wherein the method includes the steps of biasing deformable portion and a further portion of wall opposite deformable portion between opposite positioning surfaces, thereby forming a biased volume of the container between the opposite positioning surfaces, during a measuring time, transmitting electromagnetic radiation into biased volume and receiving transmitted or reflected radiation of transmitted radiation from biased volume along respective radiation paths, relatively moving, during measuring time, at least one of deformable portion and of further portion and at least one of radiation paths, and determining concentration of said gas from the radiation received.

Abstract: Methods and systems are disclosed for optimization of coagulation and/or flocculation in a water treatment process. According to exemplary embodiments, samples are taken from an aqueous liquid and the samples are monitored with an imaging device to capture visual data of particles dispersed or suspended in the liquid. The particles are classified into particle types based on the visual data and a particle size distribution indication is computed for each classified particle type. The particle size distribution indication is then compared to a predetermined particle size distribution value, and in response to a difference detected, dosage of at least one coagulation and/or flocculation agent in the water treatment process can be adjusted.

Abstract: The present disclosure relates to noninvasive methods, devices, and systems for measuring various blood constituents or analytes, such as glucose. In an embodiment, a light source comprises LEDs and super-luminescent LEDs. The light source emits light at least wavelengths of about 1610 nm, about 1640 nm, and about 1665 nm. In an embodiment, the detector comprises a plurality of photodetectors arranged in a special geometry comprising one of a substantially linear substantially equal spaced geometry, a substantially linear substantially non-equal spaced geometry, and a substantially grid geometry.

Abstract: The present invention provides a system and method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, structured laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration.

Abstract: The present disclosure relates to noninvasive methods, devices, and systems for measuring various blood constituents or analytes, such as glucose. In an embodiment, a light source comprises LEDs and super-luminescent LEDs. The light source emits light at at least wavelengths of about 1610 nm, about 1640 nm, and about 1665 nm. In an embodiment, the detector comprises a plurality of photodetectors arranged in a special geometry comprising one of a substantially linear substantially equal spaced geometry, a substantially linear substantially non-equal spaced geometry, and a substantially grid geometry.

Abstract: Provided are a beam steering apparatus, a method of driving the beam steering apparatus, and a light detection and ranging (LiDAR) system including the beam steering apparatus. The beam steering apparatus includes: a phase modulation device configured to modulate a phase of incident light and emit at least first emitted light and second emitted light; and a beam reflection device configured to reflect, to an object, at least one from among the first emitted light and the second emitted light. The phase modulation device includes a plurality of channels configured to independently modulate the phase of the incident light, and a binary phase profile is formed when one of first and second phase values ?1 and ?2 is applied to each of the plurality of channels.

Abstract: A microfluidic device and multi-stage target cell enrichment using the microfluidic device are disclosed herewith.

Abstract: A microscopy method, and a microscope for carrying out the method, in which an illumination radiation is directed through an object arranged in an object plane of a microscope, in order to image the object, image data of a first image of the object being acquired with a first configuration of the microscope and image data of a second image of the object being acquired with a second configuration of the microscope. Differences between the image data of the first image and the second image are determined and, in dependence on the determined differences, image data of a contrast image of the object is provided.

Abstract: A sample analyzer with an optical detection device and a sample analysis method of the sample analyzer are disclosed. The optical detection device includes a fluid chamber, a light source and a light detector. The fluid chamber includes an illumination zone. An analyte flows through the illumination zone so as to form a sample stream. The light source illuminates the illumination zone to excite cell articles, reacted with a reagent, of the sample stream to emit a light signal. The light detector detects the fluorescent lights and transforms it into an electric signal. The light detector can include a silicon photomultiplier.

Abstract: The invention relates to a method for observing a sample (15), comprising the illumination of the sample using a light source (11) and the acquisition of an image (Io) of the sample using an image sensor (16), the sample being disposed between the image sensor and the light source. Iterative steps are applied to the acquired image (Io), also referred to as a hologram, comprising: a single iterative numerical propagation (h), such as to estimate a complex image (A) of the sample in a reconstruction plane (P10) or in a detection plane (P0), in which the image sensor extends. The complex image can be used for the characterisation of the sample.

Abstract: Provided herein is a method and system for imaging a biological sample. The method may include scanning a biological sample using one or more light sheets, where the biological sample is in a field of view of a microscope that includes an objective and a direction of observation of the objective defines a z-axis, where a point spread function of the microscope is elongated in the z-axial direction, and the biological sample is at a z-axial distance from the objective, thereby illuminating a plurality of z-axial slices of the biological sample, and recording a plurality of images corresponding to a plurality of z-axial slices of the sample, where the images are generated by light patterns emitted from the scanned biological sample, thereby generating an image stack that includes a plurality of images of the biological sample.

Abstract: An example forward scatter sensor comprises: a transmitter to emit a light sheet; a receiver to observe light scattered from particles that fall through a measurement volume; and a control entity comprising an analyzer to record a measurement signal descriptive of intensity of light captured by the receiver as a function of time and to: carry out a precipitation analysis on basis of a time segment of the measurement signal; carry out a verification of analysis performance based on magnitudes of first peaks of at least one identified double peak and on respective residence times for said at least one identified double peak; and invoke a predefined maintenance action responsive to said verification indicating a threshold-exceeding difference between respective size estimates derived based on magnitudes of the first peak of said at least one identified double peak and based on residence times of said at least one identified double peak.

Abstract: A method of conducting wireless fiber inspection includes obtaining a video stream from an inspection probe and transmitting the video stream over a Wi-Fi network. The method further includes creating the Wi-Fi network using a Wi-Fi hotspot, performing image analysis on the obtained video stream, and transmitting the image analysis along with the video stream over the Wi-Fi network.

Abstract: A system and method for optimizing a fiber optic sensor by properly clocking or rotationally orienting a window with a fiber optic focuser. This method may include shining light through the focuser into the window and receiving with a reflectometer a first reflection from a first surface of the window and a second reflection from a second surface of the window. Next, the method may include calculating a delta of intensities between the first and second reflections, and then rotating an orientation of the window to a next rotational orientation. The steps of rotating the orientation of the window, receiving reflections, and calculating their delta may be repeated any plurality of times to solve for a plurality of deltas. Then, the method may include the steps of determining which one of the deltas is the largest and fixing the window to the focuser at a rotational orientation associated therewith.

Abstract: Complex wavefront engineering is realized through a random metasurface phase mask backed by a phase-only spatial light modulator. The metasurface consists of an array of subwavelength nanoscatterers which give the metasurface a pre-arranged disorder. Since the transmission matrix of the disordered metasurface is known, there is no need for extensive characterization measurements which are instead required in standard disordered optical devices.

Abstract: Devices (herein “powder spreadability inspection tools”) and methods are provided for evaluating the spreadability of powders utilized in additive manufacturing (AM) processes. In embodiments, the powder spreadability inspection tool includes a powder support surface on which a visual inspection area is provided, a spreader system including a spreader implement, and a powder dispenser. The spreader implement is movable relative to the powder support surface along a path, which extends or passes over the visual inspection area. The powder dispenser is operable to dispense a premeasured or metered volume of an AM powder sample onto the powder support surface ahead of the spreader implement. As the spreader implement moves along the path relative to the powder support surface, the spreader implement spreads a layer of the metered powder sample across the visual inspection area to allow a visual evaluation of the spreadability of the AM powder.

Abstract: The disclosure provides for a novel optical chopper that can rapidly change the intensity of light incident on a colloid under investigation. This helps record images of various sizes of nanoparticles that scatter light with very different efficiencies (effective cross-sections), typically orders of magnitude different.

Abstract: An imaging system may include a modulation component to provide a modulation signal. The imaging system may include an illumination component to receive the modulation signal and emit a modulated optical signal based on the modulation signal, and provide an electrical illumination signal. The electrical illumination signal may be an electrical representation of the modulated optical signal emitted by the illumination component. The imaging system may include an electrical mixer to receive the electrical illumination signal and the modulation signal, multiply the electrical illumination signal and the modulation signal in order to form a mixed signal, filter the mixed signal in order to form a filtered mixed signal, and output, based on the filtered mixed signal, a calibration signal associated with calibrating the imaging system.

Abstract: Disclosed herein are aerosol particle growth systems including polymer electrolyte membranes and related methods of increasing the size of aerosol particles. In some embodiments, an outer housing contains a reservoir of a working fluid, and a PEM conduit extends through the outer housing, the reservoir, and the working fluid so that the working fluid is in contact with an outer surface of the PEM conduit. The conduit can be generally helical or coiled, for example. In some embodiments, the working fluid is molecularly transported across the PEM and disperses into an aerosol flowing through the PEM conduit. As the aerosol flows through the PEM conduit, the aerosol particles act as nucleation sites for the gaseous working fluid, which condenses on the particles, causing the particles to grow in size and making them easier to detect, collect, measure, count, study, or otherwise investigate.

Abstract: An apparatus and method is disclosed to monitor the condition of a fluid flow including particulate matter and air or gas content fluid in the fluid flow as well as fluid quality. The apparatus includes a sensor array with an ultrasonic transducer, inductive sensor and fluid quality sensor. It also includes a cyclonic separator. The method includes sensing and sizing particulate matter, distinguishing air bubbles from the particle matter and assessing the quality of the fluid.

Abstract: Various embodiments include methods and apparatuses to reduce false-particle counts in a water-based condensation particle counter (CPC). In one embodiment, a cleanroom CPC has three parallel growth tube assemblies. A detector is coupled to an outlet of each of the three parallel growth tube assemblies, and is used to compare the particle concentrations measured from each of the three growth tube assemblies. An algorithm compares the counts from the three detectors and determines when the particles counted are real and when they are false counts. Any real particle event shows up in all three detectors, while false counts will only be detected by one detector. Statistics are used to determine at which particle count levels the measured counts are considered to be real versus false. Other methods and apparatuses are disclosed.

Abstract: A module for preventing barnacle formation in a marine air-conditioning system. The module comprises: i) a housing; ii) a source of irradiating light disposed in the housing, the irradiating light suitable for killing or stunning barnacle larvae; iii) a circuit assembly disposed in the housing and configured to receive electrical power from an external power supply and to provide electrical power to the source of irradiating light; and iv) a transparent window disposed in the housing to permit the irradiating light to pass therethrough. The housing is adapted to be coupled to a water filter supplying raw water to the marine air-conditioning system such that the irradiating light is transmitted into the raw water in the water filter.

Abstract: The present invention provides a method for improving an identification degree of low-luminosity dispersed-phase particles in a multiphase system. The method comprises: adding additive particles into a multiphase system containing low-luminosity dispersed-phase particles before photographing the multiphase system to obtain an image including the low-luminosity dispersed-phase particles, wherein the refractivity of the additive particles is greater than that of the low-luminosity dispersed-phase particles.

Abstract: A substrate treating apparatus includes a treatment unit including a container, and a support member in the interior of the container to support a substrate, the treatment unit being configured to treat the substrate a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit and an inspection unit that inspects whether the treatment liquid is normally discharged from the treatment liquid nozzle. The nozzle further includes a nozzle driver that moves the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit.