Abstract: Disclosed herein are systems and methods for linearizing frequency chirp in a frequency-modulated continuous wave (FMCW) coherent LiDAR system. Exemplary methods can include generating a continuous wave laser signal having a frequency characteristic, in which the frequency characteristic can include a frequency chirp over a frequency band in at least one period; and receiving a signal based on the generated laser signal. The methods can further include mixing the received signal with a local oscillator signal, the local oscillator signal having the frequency characteristic; determining at least one beat frequency based on the mixed signal; sampling the mixed signal at a rate equal to at least two times the beat frequency; determining a correction signal based on the sampled signal; and applying the correction signal to the laser signal.

Abstract: A variable synthetic wavelength absolute distance measuring device locked to a dynamic sideband and a method thereof are disclosed. A high-frequency electro-optic phase modulator driven by an adjustable clock source to modulate a single-frequency reference laser to generate laser sidebands with equal frequency intervals. The tunable laser is locked to the fifth-order sideband through an offset frequency locking technology. After locking, the interval frequency of the sideband is determined by the adjustable clock source, namely dynamic sideband. The frequency of the adjustable clock source is dynamically adjusted, the interval frequency of the sideband and the frequency difference between the two lasers will change accordingly. Combined with the multi-wavelength interferometry, the constructed synthetic wavelength is also determined by the adjustable clock source, that is, the variable synthetic wavelength.

Abstract: A workpiece processing machine that includes: a beam emission head for providing a beam for processing the workpiece, an optical interferometer for splitting, redirecting, and detecting the beam, an adjustment element for changing a second portion of a power of the beam redirected from a retroreflector to a detector, and a control unit for actuating the adjustment element to control a ratio between a first power portion of the beam redirected from the workpiece to the detector and the second power portion of the beam redirected from the retroreflector to the detector to a target ratio.

Abstract: An interferometric distance-measurement device includes a multi-wavelength light source which provides a beam having at least three different wavelengths. An interferometer unit splits the beam into measuring and reference beams. The measuring beam propagates in the direction of a measuring reflector movable along a measuring axis and undergoes a back-reflection, and the reference beam propagates in the direction of a stationary reference reflector and undergoes a back-reflection. The back-reflected measuring and reference beams interfere with each other in an interference beam. A detection unit splits the interference beam such that several phase-shifted partial interference signals result for each wavelength. A signal processing unit determines absolute position information regarding the measuring reflector from the partial interference signals of different wavelengths and an additional coarse position signal.

Abstract: A measurement apparatus includes a laser apparatus, a branch that branches a frequency-modulated laser beam into a reference light and a measurement light, a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is the measurement light radiated onto an object to be measured, a first analyzer that analyses a first signal component corresponding to a difference in a propagation distance between the reference light and the measurement light on the basis of the beat signal, a second analyzer that analyses a second signal component corresponding to a cavity frequency of an optical cavity on the basis of the beat signal, and calculation circuitry that calculates the difference in the propagation distance between the reference light and the measurement light.

Abstract: The present invention discloses a method for detecting a microstructure of a functionally graded material based on digital acousto-optic holography, including the following steps: excite a sample with an ultrasonic wave; record a light wave; form a single tomographic acousto-optic hologram; perform numerical reconstruction of phase information, and perform global detection. The present invention uses an acoustic-optic modulation device to modulate a laser light source of a laser of a laser device to form two light waves of different frequencies. The two light waves each constitute a Mach-Zehnder interference system to record reflection wave information and transmission wave information of an ultrasound, and are finally combined and recorded in the same hologram to form the single tomographic acousto-optic hologram.

Abstract: A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

Abstract: An interferometer system comprises a sample interferometer arm for guiding a first wave to a sample, and receiving a reflected wave from the sample and a phase amplifier for amplifying a phase shift of the reflected wave, to provide phase-shift-amplified intermediate wave. The interferometer system can also comprise an additional interferometer arm for guiding an additional wave to combine with the intermediate wave, to provide an output wave, and a detector for detecting the output wave.

Abstract: An interferometer system, including a heterodyne interferometer and a processing system. The heterodyne interferometer is arranged to provide a reference signal and a measurement signal. The reference signal has a reference phase. The measurement signal has a measurement phase and an amplitude. The processing system is arranged to determine a cyclic error of the heterodyne interferometer based on the reference phase, the measurement phase and the amplitude.

Abstract: A heterodyne detection spectrometer setup comprises an optical path with at least a first cavity able to emit a first laser beam; a second cavity able to emit a second laser beam; and at least one combining and/or reflecting element. The cavities are connected to current drivers for stimulating laser emission, which shows increased signal-to-noise ratios of the heterodyne signal and an increased dynamic range. This can be reached if at least the second cavity comprises an active medium connected to a heterodyne signal extraction element and a (multi-) heterodyne signal processing unit, which is simultaneously usable for laser light generation and as detector element, comprising an active medium introduced in the optical path in order that the first and/or second laser beam can enter the respective other cavity. At least one reference path is established between the two cavities in the optical path with at least two combining and/or reflecting elements.

Abstract: A new monolithic Atomic Force Microscopy (AFM) active optical probe monolithically integrates a base of the probe, a cantilever, a semiconductor laser source, an AFM tip, and a photodetector into a robust, easy-to-use single semiconductor chip to enable AFM measurements, optical imaging, and optical spectroscopy at the nanoscale.

Abstract: A system is provided for measuring distance or displacement, comprising: first and second laser sources configured to provide first and second laser outputs; a beam combiner configured to receive and combine at least part of the first and second laser outputs into a combined laser output; a signal calibrator configured to receive at least part of the first laser output, the second laser output, or the combined laser output, and output a calibration signal; a plurality of optical paths, including a first optical path, a second optical path, the plurality of optical paths being configured to direct at least part of the combined beam onto an optical detector to produce an interference signal; and a signal processor configured to receive the interference signal and determine a pathlength difference between the first and second optical paths.

Abstract: Some embodiments are directed to a system for measuring vibrations of a surface of a mechanical part, by digital holography. The system includes a source of radiation emitting in a predetermined range of frequencies, a first separator element configured to define a first incident ray and a reference ray, a module for shaping a second incident ray from the first incident ray, and an optical element configured to make the reference ray and a radiation produced by a reflection of the incident ray on the surface of the mechanical part interfere. The module for shaping the second incident ray includes diffracting optical elements having a diffraction structure to diffract the incident radiation. The structure is from a polymer, sol-gel or photoresin material resting against a glass substrate, the structure including elements etched in a plane parallel and/or orthogonal to the substrate, with dimensions from 100 nanometres to 100 micrometres.

Abstract: A system and method can include a laser Doppler vibrometer (LDV) in optical communication with a part during manufacturing and a transducer in ultrasonic communication with the part during manufacturing. The system can also include a controller connected to both the LDV and the transducer. The controller may be configured to cause the transducer to vibrate the part during manufacturing at a predetermined frequency and the LDV may be configured to measure one or more mechanical response types of the part during manufacturing based on one or more optical characteristics of a reflected beam. The controller may further be configured to determine whether a defect is present in the part during manufacturing in response to the one or more mechanical response types of the part.

Abstract: Example apparatuses and methods relating to imaging systems are provided. An example imaging system may include an optical source configured to generate an optical beam, a beam splitter configured to split the optical beam into a reference beam and an object beam, and a beam combiner configured to route a combined beam with reference beam and object beam components along a common path into a target medium. In this regard, the target medium may act upon the combined beam to form a common path interference beam. The example imaging system may further include an imaging sensor configured to receive the common path interference beam and generate common path interference beam data associated with the common path interference beam, and an image data processor configured to analyze the common path interference beam data to generate image data describing the target medium.

Abstract: A free space variable optical attenuator (VOA) utilizes a beamsplitter to create tap beams (of both the input signal and the beam-steered output signal) that are directed into monitoring photodiodes. The beamsplitter is configured to exhibit a non-equal splitting ratio such that the tap beams are only a relatively small portion of the input/output beams. The free space configuration eliminates the need for fiber-based couplers, splices and connections to external monitors, as required in prior art VOA monitoring systems. The VOA utilizes a voltage-controlled, MEMS-based tilt mirror to provide beam steering of the propagating, free space beam in a known manner to introduce attenuation (power reduction) in the output signal.

Abstract: A system uses range and Doppler velocity measurements from a lidar system and images from a video system to estimate a six degree-of-freedom trajectory of a target. The system estimates this trajectory in two stages: a first stage in which the range and Doppler measurements from the lidar system along with various feature measurements obtained from the images from the video system are used to estimate first stage motion aspects of the target (i.e., the trajectory of the target); and a second stage in which the images from the video system and the first stage motion aspects of the target are used to estimate second stage motion aspects of the target. Once the second stage motion aspects of the target are estimated, a three-dimensional image of the target may be generated.

Abstract: Length metrology apparatuses and methods are disclosed for measuring both specular and non-specular surfaces with high accuracy and precision, and with suppressed phase induced distance errors. In one embodiment, a system includes a laser source exhibiting a first and second laser outputs with optical frequencies that are modulated linearly over large frequency ranges. The system further includes calibration and signal processing portions configured to determine a calibrated distance to at least one sample.

Abstract: An optical interrogation system, e.g., an OFDR-based system, measures local changes of index of refraction of a sensing light guide subjected to a time-varying disturbance. Interferometric measurement signals detected for a length of the sensing light guide are transformed into the spectral domain. A time varying signal is determined from the transformed interferometric measurement data set. A compensating signal is determined from the time varying signal which is used to compensate the interferometric measurement data set for the time-varying disturbance. The compensation technique may be applied along the length of the light guide.

Abstract: An interferometer is provided that includes a single retroreflector arranged at a target plane and a plurality of retroreflectors arranged at a reference plane of the interferometer. The single retroreflector and the plurality of retroreflectors are positioned such that a measurement beam provided to the interferometer makes a plurality of passes between the single retroreflector and the plurality of retroreflectors. One of the plurality of retroreflectors is positioned as a terminal retroreflector that reflects the measurement beam back on itself such that an output of the interferometer is coaxial with an input to the interferometer.

Abstract: A system and method to detect an object buried beneath the seabed are described. The system includes a moving platform, a low frequency signal source coupled to the platform to transmit a low frequency signal to an area of the seabed, and a laser Doppler vibrometer (LDV) coupled to the platform to transmit a plurality of transmission beams to the area of the seabed at a respective plurality of angles at each position of a plurality of positions of the platform over the area. The LDV includes a plurality of receivers that receive a respective plurality of reflection beams resulting from the plurality of transmission beams. A processor develops a three-dimensional image that indicates the object, the processor determining a reflection value at each point of the three-dimensional image as a coherent combination of reflection from the point contributing to each of the plurality of reflection beams.

Abstract: Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating a first laser beam of a first wavelength ?1 to a transparent substrate and measuring intensity of the first laser beam transmitting through the transparent substrate; irradiating a second laser beam of a second wavelength ?2 to the transparent substrate and measuring intensity of the second laser beam transmitting through the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting through the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent rays by multiple internal reflection of the second laser beam is maintained at ?/2.

Abstract: Systems and methods for conformal imaging vibrometry capable of real-time measurements of the dynamic motions of any arbitrary two-dimensional or three-dimensional structure. The systems and methods are able to fully characterize the dynamic behavior of an object of any arbitrary geometry. The test object is illuminated with multiple laser beams whose directions conform to the local normal axis of the surface. The approach enables high-speed vibration imaging of whole-body dynamics of arbitrarily shaped structures in real-time, with no multiplexed data capture or synthesized motion reconstruction, as is currently practiced. By measuring the object's vibrations simultaneously at multiple points, the disclosed systems and methods are able to reproduce the structural behavior under operational conditions, which can then be spectrally decomposed to determine the modal, complex modal and transient nature of the true structural dynamics.

Abstract: A method of detecting land mines includes pre-processing a raw laser interferometer image, processing pre-processed image by calculating one or more derivatives having one or more peaks, along vectors extending in at least two different directions, mapping the peaks of said derivatives to create a derivative map, and detecting an anomalous signature in the derivative map.

Abstract: During a marine seismic survey, shots are fired at a time interval shorter than an S-wave listening time during which seismic receivers within a predetermined distance from the shot location detect reflected S-waves caused by an earlier shot. In portion of data acquired during the survey, information related to the S-wave reflections caused by the earlier shot is blended with information related to P-wave and S-wave reflections from a later shot.

Abstract: A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.

Abstract: A variable-wavelength light source is provided with a first laser medium, a first optical resonator constituted of a total reflection mirror and a half-mirror, a second laser medium, a second optical resonator constituted of a total reflection mirror and the half-mirror, a first filter having a pair of first mirrors configured to cause first light and second light to be transmitted and reflected selectively, a second filter having a pair of second mirrors configured to cause the first light and the second light to be transmitted and reflected selectively, a first drive mechanism configured to operate the first mirror and the second mirror in conjunction with each other, and a second drive mechanism configured to operate the second mirror.

Abstract: An interferometer apparatus for an optical fiber system and method of use is described. The interferometer comprises an optical coupler and optical fibers which define first and second optical paths. Light propagating in the first and second optical paths is reflected back to the optical coupler to generate an interference signal. First, second and third interference signal components are directed towards respective first, second and third photodetectors. The third photodetector is connected to the coupler via a non-reciprocal optical device and is configured to measure the intensity of the third interference signal component directed back towards the input fiber. Methods of use in applications to monitoring acoustic perturbations and a calibration method are described.

Abstract: A detection apparatus and method for FMCW LIDAR employ signals that are modified so that low-cost and low-speed photodetector arrays, such as CCD or CMOS cameras, can be employed for range detection. The LIDAR is designed to measure the range to one or more targets and includes a single mode swept frequency laser (SFL), whose optical frequency is varied with time, as a result of which, a target beam which is reflected back by the one or more targets is shifted in frequency from a reference beam by an amount that is proportional to the relative range to the one or more targets. The reflected target beam(s) is/are combined with the reference beam and detected by the photodetector array. In the case of a sparse number of targets to be detected, Compressive Sensing (CS) techniques can be employed by a processor to reduce the number of measurements necessary to determine the range of each target.

Abstract: Methods, systems, and apparatuses are disclosed for using Photon Doppler Velocimetry for laser bond inspection.

Abstract: An optical device may include a mirror for respectively reflecting and transmitting parts of a first laser beam as first reflected and first transmitted beams, and for respectively transmitting and reflecting parts of a second laser beam as second transmitted and second reflected beams; an optical system disposed so that the first and second laser beams are such that beam paths of the first transmitted and second reflected beams are parallel or substantially coincide, or such that beam paths of the first reflected and second transmitted beams are parallel or substantially coincide; first and second measuring units configured to respectively measure a beam parameter of the first transmitted or first reflected beams, and of the second reflected or second transmitted beams; and first and second adjusting units configured to adjust the first and second laser beams based on measurement results by the measuring units.

Abstract: A light source apparatus configured to emit first light and second light includes a wavelength reference device, a splitter, a first detector, a second detector, and a control unit. The control unit includes a correction unit configured to reduce from a detection signal detected by the first detector a portion included in the detected signal and related to an intensity of the second light incident on the first detector from the splitter, and configured to reduce from a detection signal detected by the second detector a portion included in the detected signal and related to an intensity of the first light incident on the second detector from the splitter. The control unit controls a wavelength of the first light and a wavelength of the second light based on signals from the correction unit.

Abstract: Satellite data is used to determine water depth by accounting for the changing turbidity of the water over time and without requiring calibration using SONAR measurements. Radiance values at multiple wavelengths sensed at both a first time and a second time are stored in a database. Modeled reflectance values are calculated for a defined surface area on the water based on an assumed depth, assumed water constituents and assumed bottom cover. A plurality of differences between the modeled reflectance values and the reflectances sensed at the two times are calculated. A bathymetry application module minimizes the sum of the differences between the modeled and sensed subsurface reflectances by varying the assumed depth, bottom cover and water constituents. The differences are weighted based on wavelength before being summed. The depth that results in the minimized sum of the differences is the estimated depth, which is displayed on a graphical user interface.

Abstract: A method of tracking the position of an object, comprising using reference interference data from first output beam, reference interference data from a second output beam, measurement interference data from the first output beam, measurement interference data from the second output beam, and knowledge of the difference between the absolute phase offset of the first output beam and the absolute phase offset of the second output beam for both a reference interferometer (15?) and a measurement interferometer (15) to calculate a parameter indicative of the absolute phase offset of the measurement interferometer (15) for the first output beam. The calculated parameter is used to calculate the ratio of the optical path differences of the measurement interferometer (15) and the reference interferometer (15?).

Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.

Abstract: The invention relates to a method and a corresponding apparatus for measuring distance and optionally speed, in particular for multiscale distance measurement.

Abstract: A precision equipment having: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint is provided by a supplying-discharging static-pressure joint and includes: a movement surface that is connected to the table and is orthogonal to a moving direction of the table; a drive surface that is connected to the rod and faces the movement surface; and a fluid supply channel supplying fluid to a static-pressure clearance between the movement surface and the drive surface. The laser interferometer includes a laser path having an optical axis along the moving direction passing through the inside of the rod of which a pressure is reduced and the drive surface and reflect on the movement surface.

Abstract: A method distributing data in a network is provided. The method comprises measuring the path lengths between a reference clock and a plurality of remote destinations and sending a timing signal from the reference clock to the plurality of remote destinations. The method further comprises measuring the phase between the reference clock and a return signal from each of the plurality of remote destinations and adjusting the phase of the data such that each remote destination receives the data within a skew tolerance.

Abstract: A system and method for controllably chirping electromagnetic radiation from a radiation source includes an optical cavity arrangement. The optical cavity arrangement enables electromagnetic radiation to be produced with a substantially linear chirp rate and a configurable period. By selectively injecting electromagnetic radiation into the optical cavity, the electromagnetic radiation may be produced with a single resonant mode that is frequency shifted at the substantially linear chirp rate. Producing the electromagnetic radiation with a single resonant mode may increase the coherence length of the electromagnetic radiation, which may be advantageous when the electromagnetic radiation is implemented in various applications. For example, the electromagnetic radiation produced by the optical cavity arrangement may enhance a range, speed, accuracy, and/or other aspects of a laser radar system.

Abstract: A mixerless high frequency interferometric Doppler radar system and methods has been invented, numerically validated and experimentally tested. A continuous wave source, phase modulator (e.g., a continuously oscillating reference mirror) and intensity detector are utilized. The intensity detector measures the intensity of the combined reflected Doppler signal and the modulated reference beam. Rigorous mathematics formulas have been developed to extract bot amplitude and phase from the measured intensity signal. Software in Matlab has been developed and used to extract such amplitude and phase information from the experimental data. Both amplitude and phase are calculated and the Doppler frequency signature of the object is determined.

Abstract: The present invention provides a measurement apparatus which measures a distance between a reference surface and a surface to be measured, including a wavelength reference element configured to include a gas cell in which a plurality of types of gases having absorption lines different from each other are sealed, and a processing unit configured to set a wavelength of light emitted by a light source to a plurality of different wavelengths corresponding to a plurality of different absorption lines by using the wavelength reference element, control a phase detection unit to detect a phase corresponding to an optical path length between the reference surface and the surface to be measured for each of the plurality of different wavelengths, and perform processing of obtaining the distance.

Abstract: The present invention relates to an optical position-measuring device for generating a plurality of phase-shifted scanning signals regarding the relative position of a fiber optic scanning head and a reflection measuring standard movable relative thereto in at least one measuring direction. In the fiber optic scanning head, a scanning reticle is disposed before the measuring standard end of an optical fiber. The scanning signals are coded in a wavelength-dependent manner. To this end, a beam incident on the scanning reticle is split into at least two sub-beams which strike the reflection measuring standard and are subsequently recombined to interfere with each other so as to generate the phase-shifted scanning signals. The sub-beams travel different optical path lengths between splitting and recombination.

Abstract: System for optical seismic surveying of an area of interest including at least one seismic source, at least one laser source, at least one optical sensing system and a processor, the processor being coupled with the seismic source, the laser source and the optical sensing system, the seismic source for generating at least one seismic wave in the area of interest, the laser source for generating a matrix of laser spots over the area of interest, the optical sensing system for detecting reflections of the laser spots as a speckle pattern, wherein the seismic source modifies the speckle pattern and wherein the processor determines at least one property of the seismic wave according to the modified speckle pattern thereby generating a seismic map of the area of interest.

Abstract: A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges and each continuously scans a wavelength of generated light in the corresponding wavelength scanning range, an interferometer unit which splits light emitted by each of the plurality of light sources into reference light and test light, and detects, as an interference signal, an interference fringe formed by the reference light and the test light, and a processor which determines a slope of a phase of the interference signal with respect to wave number of the light based on the interference signal detected by the interferometer unit for each of the plurality of wavelength scanning ranges, and determines the distance from the slope of the phase.

Abstract: A method of calculating a geometrical distance of a test optical path on the basis of interfering a test beam and a reference beam includes an optical-path-length calculating step of calculating an optical path length of the test optical paths having different wavelengths by using the interfering beam having mutually different wavelengths, a refractive-index calculating step of calculating the refractive index of the test optical path on the basis of the optical path length of the test optical path calculated by the optical-path-length calculating step, a smoothing step of smoothing a plurality of refractive indices acquired by repeating the optical-path-length calculating step and the refractive-index calculating step to calculate a smoothed refractive index, and a geometrical distance calculating step of calculating the geometrical distance of the test optical path on the basis of the smoothed refractive index calculated by the smoothing step.

Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.

Abstract: A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.

Abstract: In a distance-measuring method, chirped laser radiation with two separable radiation components is emitted to at least one target to be surveyed and via a local oscillator path, the radiation components having an opposite chirp as a time dependency of the modulated wavelengths (?1, ?2). After reception of the laser radiation scattered back from the target and passed via the local oscillator path, the laser radiation received is converted into signals and the distance to the at least one target is determined from the signals on the basis of interferometric mixing, separation of the radiation components being effected on the basis of their spectral characteristic.

Abstract: A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body and measurement results of a second measurement system which measures a variance of the arm member using a laser interferometer. In this case, the drive system corrects measurement errors caused due to a variance of the arm member included in the measurement results of the first measurement system, using the measurement results of the second measurement system.

Abstract: An interferometric sensor having an interference objective, an illumination system, and a detection system configured to simultaneous non-contact determination of profile and roughness of a tested surface. The illumination system comprises a radiation source configured to emit three wavelengths of quasi-monochromatic light. The sensor further includes a detection system having a color array detector in optical communication with the interference objective and configured to detect the light reflected by the measurand. The sensitivity of measurement can be adjusted by re-orienting of a portion of the sensor with respect to the measurand.