Abstract: A multi-beam laser Doppler vibrometer simultaneously measures velocity, displacement, and vibration history of multiple locations on an object. A beam of coherent light is split into an object beam and a reference beam. The object beam is divided into a plurality of object beams to simultaneously illuminate multiple locations on the object under inspection. The reference beam is frequency shifted and split into a corresponding plurality of frequency-shifted reference beams. A portion of each object beam is reflected by the object as a modulated object beam. The plurality of modulated object beams are collected and respectively mixed with the plurality of frequency-shifted reference beams to provide a plurality of beam pairs. Each beam pair may be focused onto a photodetector or an optical fiber connected to a photodetector.

Abstract: An interferometry apparatus comprises one or more beam generators, a detector, and a plurality of optical paths along which one or more beams of light propagate. Disposed along at least one of the optical paths is an apodization mask to shape one of the beams.

Abstract: The invention features a system and method for reducing the contribution of cyclic errors to an interferometric position measurement of a movable stage. An initial interferometric position measurement of the stage is averaged with at least one additional measurement corresponding to a displacement(s) of the stage from its initial position. The displacements are selected to reduce the overall cyclic error contribution to an average position measurement. As a result, the average position of the stage can be measured more accurately than any of its individual positions. The average position can be used to more accurately determine the average position of an alignment mark on a wafer carried by the stage. Furthermore, the averaging described above can be applied to additional interferometric measurement axes.

Abstract: The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object.

Abstract: A multi-beam laser Doppler vibrometer simultaneously measures velocity, displacement, and vibration history of multiple locations on an object. A beam of coherent light is split into an object beam and a reference beam. The object beam is divided into a plurality of object beams to simultaneously illuminate multiple locations on the object under inspection. The reference beam is frequency shifted and split into a corresponding plurality of frequency-shifted reference beams. A portion of each object beam is reflected by the object as a modulated object beam. The plurality of modulated object beams are collected and respectively mixed with the plurality of frequency-shifted reference beams to provide a plurality of beam pairs. Each beam pair may be focused onto a photodetector or an optical fiber connected to a photodetector.

Abstract: The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object.

Abstract: A laser-based measuring apparatus divides a light beam from a laser light source into at least two light beams, passes the light beams through different optical paths from each other, recombines the light beams, has the light beams interfere with each other to generate interfered light, opto-electrically transduces the interfered light to an optical frequency, and measures the amount of travel of an object which changes an optical path length of a portion of an optical path based on the optical frequency. The measuring apparatus has a portion for generating at least two measuring light beams from the laser light source, two reflection planes included in an object moving on a measuring axis, arranged back-to-back to each other on the measuring axis, and an opposing incident optical system for directing the measuring light beams into the reflection planes, respectively, such that the measuring light beams oppose to each other on the measuring axis.

Abstract: A laser distance measuring system has a simple optical structure with which abnormal return light can be removed. The laser distance measuring system includes a laser light source that generates at least two interferable light beams with different frequencies on a same optical axis, a parallel reflecting portion that includes a reflecting surface, which is included in an object that moves along a measurement axis and that is arranged on the measurement axis, and returns an incident light beam in a direction opposite that at which it is incident and at a certain spacing from and parallel to the incident light beam, and an interferometer that is positioned between the laser light source and the parallel reflecting portion and that is arranged on the measurement axis. The optical axes of the light beams are displaced parallel to one another from the measurement axis and one of the light beams is passed through the interferometer and guided to the parallel reflecting portion.

Abstract: The methods of the present invention are directed at an accurate phase-based technique for measuring arbitrarily long optical distances with sub-nanometer precision. A preferred embodiment of the present invention method employs a interferometer, for example, a Michelson interferometer, with a pair of harmonically related light sources, one continuous wave (CW) and a second source having low coherence. By slightly adjusting the center wavelength of the low coherence source between scans of the target sample, the phase relationship between the heterodyne signals of the CW and low coherence light is used to measure the separation between reflecting interfaces with sub-nanometer precision. As the preferred embodiment of this method is completely free of 2? ambiguity, an issue that plagues most phase-based techniques, it can be used to measure arbitrarily long optical distances without loss of precision.

Abstract: Phase noise is at least partially cancelled for an interferometric system by using a delay/phase cross-correlation approach for two interferometers within the system. The cross-correlation approach may be used in measuring group delay of a device under test and includes determining the differences between the phase of the output of each interferometer at time t and the phase of the same output at the time t minus the delay of the other interferometer. In one embodiment, the first phase difference is the difference between the phase of a test interferometer output at time t and the phase of the test interferometer output at the time t offset by the known delay of a reference interferometer. The second phase difference is calculated using the same technique, but the time offset is a delay representative of the relative delay of two light propagations within the test interferometer.

Abstract: A heterodyne lateral grating interferometer having a laser signal received by an AOM which generates several defracted order beams including a zero order beam and higher order beams. A lens system reimages the defracted order beams onto a stationary phase grating. An RF drive signal is received by the AOM such that the spatial frequency of the traveling phase grating of the AOM is responsive to the frequency of the RF drive signal, and the optical phase modulation depth of the traveling phase grating is responsive to the power of the RF drive signal. A phase detector determines the phase of the zero order beam from the stationary phase grating with respect to the phase of the RF drive signal.

Abstract: The instant invention is a method and apparatus for the measurement, with low uncertainty, of the six degrees of freedom of a first structure relative to a second structure. The apparatus is comprised of compact, rigid, thermally stable structures. The invention uses linear displacement transducers which have no active pointing to maintain a desired orientation of the linear displacement transducers with other parts of the measurement system.

Abstract: Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.

Abstract: In general, in one aspect, the invention features a method, including interferometrically measuring first and second optical path lengths to a measurement object along respective first and second paths, wherein the measurement of the optical path lengths includes directing first and second measurement beams to reflect from the measurement object, measuring propagation directions of the first and second measurement beams, compensating the first measured optical path length for time-varying optical properties of gas in the first path based on the first and second measured optical path lengths and the first and second measured propagation directions.

Abstract: The invention comprises methods and apparatus for reducing sub-harmonic cyclic errors by rotating by a small angle an interferometer or elements thereof. The rotation of the interferometer or selective elements thereof introduces a corresponding small angle between a sub-harmonic type spurious beam that subsequently interferes with either the reference or measurement beam so that the fringe contrast of the interference terms between the subharmonic spurious beam and either the reference or measurement beam is reduced by a required factor for a given use application thereby reducing nonlinearities in the phase signal.

Abstract: The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object.

Abstract: A heterodyne lateral grating interferometer having a laser signal received by an AOM which generates several defracted order beams including a zero order beam and higher order beams. A lens system reimages the defracted order beams onto a stationary phase grating. An RF drive signal is received by the AOM such that the spatial frequency of the traveling phase grating of the AOM is responsive to the frequency of the RF drive signal, and the optical phase modulation depth of the traveling phase grating is responsive to the power of the RF drive signal. A phase detector determines the phase of the zero order beam from the stationary phase grating with respect to the phase of the RF drive signal.

Abstract: A method and system are provided for measurement of vibration of an object utilizing a non-contact imaging sensor such as a video camera. An object which does not already have a pair of spaced-apart marks is marked with two parallel lines spaced apart from one another a known, nominal distance. The two lines are perpendicular to an imaging axis of the camera. As such, when the object with the parallel lines is moved toward or away from the video camera, the lines on the object appear to move as two parallel lines in the image plane of the camera. As the object moves or vibrates along the imaging axis, the nominal image plane distance between the two lines changes. This apparent change in the distance between the parallel lines in the image plane is calibrated to the physical movement of the object in space due to deformation or rigid body motions.

Abstract: Interferometric apparatus and methodology for monitoring the relative motion among objects, preferably that of mask and wafer stages in photolithographic processes. The apparatus comprises a plurality of interferometers with each operating to provide a mixed optical interference signal containing phase information indicative of the motion of a corresponding object. Electrical interference signals are generated from the optical interference signals, and one of these is modified to compensate for any Doppler shift differences among the electrical interference signals caused by differences in preferred relative rates of motion in the objects. A mixer receives the electrical interference signals and the modified electrical interference signal and generates an output electrical interference signal containing information about the relative motion between objects.

Abstract: The present invention is a cost-effective and compact micro-spectrometer for rapid detection of chemical compounds in the low concentration limit. The invention provides for significantly higher sensitivity compared to conventional spectroscopy techniques (continuous wave and Fourier transform methods) by placing the sample within a high Finesse etalon cavity. An Optical Spectrum Analyzer (OSA) built on either continuous wave (CW-SPEC), or Fourier Transform Absorption Spectroscopy (FT-SPEC) is used to monitor the spectrum from the etalon cavity/sample combination during tuning of the etalon cavity˜this information is then used to reconstruct the absorption spectrum.

Abstract: The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object.

Abstract: The invention features a displacement and dispersion measuring interferometry system having a Helium-Neon laser light source. The light source can be a Helium-Neon laser that includes an intracavity doubling crystal and an intracavity etalon to generate two harmonically related, single-frequency wavelengths at sufficient powers for interferometric dispersion measurements. Alternatively, the light source can be a single-mode Helium-Neon laser that directs a single-frequency input beam into a resonant external cavity enclosing a doubling crystal to generate two harmonically related, single-frequency wavelengths at sufficient powers for interferometric dispersion measurements. In addition to dispersion measurements, the inherent wavelength stability of the Helium-Neon source permits high-accuracy displacement measurements.

Abstract: A method of obtaining a spectrum in a Fourier transformation infrared spectrophotometer includes the following steps: sampling a set of data while a movable mirror of the Fourier transformation infrared spectrophotometer performs a reciprocal movement, wherein the set of data constitutes an interferogram; judging whether the interferogram is reliable or not by comparing the shape of the interferogram with a shape of another interferogram or shapes of other interferograms obtained through neighboring measurement of measurements; accumulating the data of interferograms that are judged to be reliable; and constituting an absorption spectrum using a Fourier transformation method based on the accumulated data. Since unreliable data are adequately avoided from the data accumulation, the reliability of the accumulated data is assured, and an accurate absorption spectrum can be obtained.

Abstract: A high-precision heterodyne interferometer measures relative displacement by creating a thermally-insensitive system generally not subject to polarization leakage. By using first and second light beams separated by a small frequency difference (&Dgr;f), beams of light at the first frequency (f0) are reflected by co-axial mirrors, the first mirror of which has a central aperture through which the light is transmitted to and reflected by the second mirror. Prior to detection, the light beams from the two mirrors are combined with light of the second and slightly different frequency. The combined light beams are separated according to the light from the mirrors. The change in phase (&Dgr;&phgr;) with respect to the two signals is proportional to the change in distance of Fiducial B by a factor of wavelength (&lgr;) divided by 4&pgr; (&Dgr;L=&lgr;&Dgr;&phgr;1/(4&pgr;)). In a second embodiment, a polarizing beam splitting system can be used.

Abstract: A laser distance measuring system has a simple optical structure with which abnormal return light can be removed. The laser distance measuring system includes a laser light source that generates at least two interferable light beams with different frequencies on a same optical axis, a parallel reflecting portion that includes a reflecting surface, which is included in an object that moves along a measurement axis and that is arranged on the measurement axis, and returns an incident light beam in a direction opposite that at which it is incident and at a certain spacing from and parallel to the incident light beam, and an interferometer that is positioned between the laser light source and the parallel reflecting portion and that is arranged on the measurement axis. The optical axes of the light beams are displaced parallel to one another from the measurement axis and one of the light beams is passed through the interferometer and guided to the parallel reflecting portion.

Abstract: The present invention is an improved distance measuring interferometer that includes high speed phase modulators and additional phase meters to generate and analyze multiple heterodyne signal pairs with distinct frequencies. Modulation sidebands with large frequency separation are generated by the high speed electro-optic phase modulators, requiring only a single frequency stable laser source and eliminating the need for a first laser to be tuned or stabilized relative to a second laser. The combination of signals produced by the modulated sidebands is separated and processed to give the target distance. The resulting metrology apparatus enables a sensor with submicron accuracy or better over a multi-kilometer ambiguity range.

Abstract: An interferometric apparatus includes: a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams. The interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.

Abstract: Methods and systems for compensating a measured optical path length for time-varying optical properties of gas in an interferometer's measurement beam path based on a measurement of the beam propagation direction are disclosed.

Abstract: A method and system for determining range by correlating a relationship between one or more distances of a diffraction grating from an illuminated target surface with variations in the respective wavelengths of high order diffraction spectra. The high order diffraction spectra are observed through the diffraction grating. The high order diffraction spectra are derived from broadband radiation transmitted from the illuminated target surface.

Abstract: The methods of the present invention are directed at an accurate phase-based technique for measuring arbitrarily long optical distances with sub-nanometer precision. A preferred embodiment of the present invention method employs a interferometer, for example, a Michelson interferometer, with a pair of harmonically related light sources, one continuous wave (CW) and a second source having low coherence. By slightly adjusting the center wavelength of the low coherence source between scans of the target sample, the phase relationship between the heterodyne signals of the CW and low coherence light is used to measure the separation between reflecting interfaces with sub-nanometer precision. As the preferred embodiment of this method is completely free of 2&pgr; ambiguity, an issue that plagues most phase-based techniques, it can be used to measure arbitrarily long optical distances without loss of precision.

Abstract: A single laser is stabilized sequentially in time with respect to different wavelengths in conjunction with a continuous, preferably linear, wavelength transition for absolute optical interferometric measurement. During the wavelength transition, the number of the traversing interferences is counted in a measuring channel. The length of a measuring section may be measured in absolute terms to give known and stable wavelengths and phase measurements of the two wavelengths. Active integrated optics and residual phase measurement by compensation in the integrated optics make it possible to detect wavelength differences of 10−7 &lgr;.

Abstract: Disclosed is a method for correcting a nonlinearity error in a two-frequency laser interferometer which measures the phase angle using 90° phase mixing technique and a method for measuring a phase angle by using the same. The phase angle correcting method includes the steps of: calculating ellipse parameters, such as amplitudes, offsets and a phase difference of two sine and cosine output signals from the nonlinearity error correcting electronics; calculating an adjusting voltages for correcting offsets, amplitudes and a phase of the output signals; conducting a correction wherein offsets of output signals become zero, amplitudes are same, and a phase difference beyond 90° between the output signals becomes zero; and applying the output signals whose offsets, amplitudes and phase are corrected to Equation (&thgr;=arctan(Iy′/Ix′)) to calculate the phase angle.

Abstract: A method and system for correcting an angle &thgr;l indicative of a relative angular orientation of a measurement object for the effects of dispersion caused by gas along a measurement path contacting the measurement object, wherein the angle &thgr;l is measured interferometrically at a wavelength &lgr;l, the method and system including: (i) interferometrically measuring the angular orientation at a first wavelength &lgr;q to give a first angle &thgr;q indicative of the angular orientation (ii) interferometrically measuring the angular orientation at a second wavelength &lgr;u not equal to the first wavelength &lgr;q to give a second angle &thgr;u indicative of the angular orientation; and (iii) correcting the angle &thgr;l by an additive factor &Dgr;&thgr;l=−&Ggr;(&thgr;q−&thgr;u), wherein &Ggr;=(nl−1)/(nq−nu) is the reciprocal dispersive power of the gas and nl, nq, and nu are the indices of refraction of the gas at wavelengths &lgr;l, &lgr;q, and &lgr;u, respectively.

Abstract: A device for the non-contacting measurement of an object to be measured, particularly for distance and/or vibration measurement, has at least one laser light source, optical devices for splitting the light into object light (4) and reference light (5) for interacting with the object to be measured and for superimposing object light and reference light following the interaction of the object light with the object to be measured, preferably a frequency shift device in the form of a Bragg cell for producing a frequency shift between the object light and the reference light and a detecting device (15) for converting reference light and object light into electrical signals suitable for further processing. The detecting device has at least two series-connected optoelectronic transducers in the form of photodiodes (30, 31). Between the transducers is located a tap (32) for tapping a difference signal which, for further processing, is supplied to a transimpedance circuit (33) associated with one of the transducers.

Abstract: Interferometric apparatus and methodology for monitoring the relative motion among objects, preferably that of mask and wafer stages in photolithographic processes. The apparatus comprises a plurality of interferometers where each interferometer operates to provide a mixed optical interference signal containing phase information indicative of the motion of a corresponding object. Detector means are provided for receiving the mixed optical interference signals and generating electrical interference signals containing information corresponding to the motion of an associated object. Electronic processing means operate to receive at least one select one of the electrical interference signals and generate a corresponding modified electrical interference signal that is compensated for any Doppler shift differences among the electrical interference signals caused by differences in preferred relative rates of motion in the objects.

Abstract: Displacement detector 1 generates bi-phase sine wave signals S1A and S1B with a period of P1 in accordance with a displacement L to be detected. Another displacement detector 2 generates bi-phase sine wave signals S2A and S2B with a period of P2 different from the period P1 in accordance with the displacement L to be detected. Wavelength composing means 3 composes the sine wave signals S1A, S2A and the cosine wave signals S1B, S2B output from the displacement detectors 1 and 2 to generate bi-phase sine wave signals, SxA=S1A·S2B−S1B·S2A and SxB=S1B·S2B+S1A·S2A, with a period of Px equal to the least common multiple between the periods P1 and P2.

Abstract: A system and method for measuring the group delay of an optical device under test (DUT) utilizes an optical frequency counter in conjunction with a test interferometer to compensate for the non-uniform frequency changes of an input optical signal used by the test interferometer to measure the group delay. The group delay of the optical DUT is measured using the zero-crossings of an AC coupled heterodyne beat signal produced by the test interferometer from the input optical signal. In the measurement of the group delay, phase changes in the heterodyne beat signal caused by the non-uniform frequency changes of the input optical signal are compensated by using the measured optical frequency of the input optical signal. The optical frequency is detected by the optical frequency counter. The detected optical frequency is indicative of the non-uniform frequency changes of the input optical signal.

Abstract: An optical signal transmission circuit for a probe is switched on by an optical switch-on signal comprising a burst 42 of pulses having a predetermined length. This is detected by a circuit which discriminates whether an input signal is a genuine switch-on signal or an interference burst 44, on the basis of the duration of the switch-on signal.

Abstract: An optical sensing apparatus for use in a ring laser interferometer measuring a physical quantity of an object includes a ring laser cavity formed by several internal mirrors, of which at least two internal mirrors are partly light-transmitting. The ring laser cavity generates two laser beams of an identical wavelength, the two laser beams propagating in counter direction to each other in the ring laser cavity. External mirrors are disposed at a distance from the ring laser cavity, whereby portions of the two laser beams, which pass through the internal mirrors and travel on optical paths toward the external mirrors, are reflected back into the ring laser cavity. The apparatus further includes at least one platform for mounting the external mirrors.

Abstract: A laser-based measuring apparatus divides a light beam from a laser light source into at least two light beams, passes the light beams through different optical paths from each other, recombines the light beams, has the light beams interfere with each other to generate interfered light, opto-electrically transduces the interfered light to an optical frequency, and measures the amount of travel of an object which changes an optical path length of a portion of an optical path based on the optical frequency. The measuring apparatus has a portion for generating at least two measuring light beams from the laser light source, two reflection planes included in an object moving on a measuring axis, arranged back-to-back to each other on the measuring axis, and an opposing incident optical system for directing the measuring light beams into the reflection planes, respectively, such that the measuring light beams oppose to each other on the measuring axis.

Abstract: The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object.

Abstract: Methods and apparatus that combine dispersion interferometry with refractometry to compensate for refractive index fluctuations in the measurement path of a dispersion interferometer over both short and long time periods. Dispersion and refractometry data are weighted over appropriate time intervals, and means and methods are also provided for initializing &Ggr;, the inverse dispersive power, so that the dispersion and refractometry data are self consistent. A refractometer is placed in close proximity to the measurement path of the dispersion interferometer to experience substantially the same air flow and act as a surrogate for obtaining information about the index of refraction.

Abstract: A pump beam is modulated at a first frequency and a modulated pump beam is used to periodically heat the surface of a semiconductor wafer at a location, thereby generating a disturbance at such location. Two probe beams are provided which are coherent with each other having different frequencies or phase. One probe beam is directed towards the location where the disturbance is generated and the other probe beam is directed towards the sample surface at a location away from the disturbance so that it is substantially unaffected by the disturbance but is subject to substantially the same environmental factors as the location where the disturbance is generated. Reflections of the two probe beams are combined and interfere at a detector, The detector output is analyzed to provide the normalized amplitude of the sidebands for determining the physical characteristics or composition of the wafer, including the dose of any ion implants.

Abstract: In an interferometric alignment system provides an alignment signal for reproducibly registering a reticle 10 with a wafer 12. The radiation from a laser 50, which is the illumination source for the interferometer, is modulated by a phase modulator 52 to eliminate spurious noise from the alignment signal.

Abstract: An interference-type distance measuring device generates a reference beam having a first frequency and detection beam having a second frequency and directs these beams toward a moving detection unit which reflects these beams toward an interference system, where these beams are used to generate a detection interference wave. A reference interference wave generated by the interference system is converted into a first sine-wave signal, the interference detection wave is converted into a second sine-wave signal, first and second cosine-wave signals are generated from the first and second sine-wave signals, and the position of the motion detection unit is detected based upon these four signals.

Abstract: Methods and apparatus that combine dispersion interferometry with refractometry to compensate for refractive index fluctuations in the measurement path of a dispersion interferometer over both short and long time periods. Dispersion and refractometry data are weighted over appropriate time intervals, and means and methods are also provided for initializing &Ggr;, the inverse dispersive power, so that the dispersion and refractometry data are self consistent. A refractometer is placed in close proximity to the measurement path of the dispersion interferometer to experience substantially the same air flow and act as a surrogate for obtaining information about the index of refraction.

Abstract: A position detection method detects the position of a mark formed at the bottom of a film such as a polysilicon layer which transmits no visible light. A flattened alignment mark is formed on a wafer, onto which the pattern on a reticle is transferred. A polysilicon film is formed on the alignment mark. An alignment sensor includes a laser light source and a frequency shifter, which produce light beams having wavelengths between 800 and 1500 nm and differing slightly in frequency from each other. The beams are radiated through a projection optical system and transmitted by the polysilicon film to irradiate the alignment mark. The diffracted light from the alignment mark is received through the optical system by a photoelectric detector. On the basis of the signal detected by the photoelectric detector, the position of the alignment mark is detected.

Abstract: A dynamic optical micrometer for measuring the position of a moving object is invented. The optical micrometer includes a laser for generating an optical signal, an RF signal generator, an acousto-optic modulator that is responsive to the optical signal and the RF signal and is operative to provide a first light beam and a second light beam that is up shifted in frequency by the RF frequency, an optical interferometer that reflects the first beam off the object and interferometrically combines the reflected light beam and the second light beam into a heterodyned signal, means responsive to the heterodyned signal and operative to produce an electrical signal at the optical beat frequency corresponding to the RF and means responsive to the RF signal and the electrical signal and operative to provide a linear output signal that corresponds to the position of the object. A method for accomplishing the same is also invented.

Abstract: Interferometric apparatus and method by which polarization effects and stage yaw and pitch are substantially reduced. A beam redirecting means selected from the group consisting of corner mirrors, prisms, diffractive elements, holographic elements, and combinations thereof are fixedly mounted on a body capable of rectilinear motion for movement therewith. The measurement beam path to and from the redirecting means is folded at least once so that incoming and outgoing beam segments are spatially separated and substantially parallel to one another and the reference beam.

Abstract: An apparatus is disclosed for generating data representative of a three-dimensional distribution of the light backscattering potential of a transparent or semi-transparent object such as a human eye. The apparatus includes an interferometer, both the reference beam and measurement beam of which are directed toward the object and reflected by respective reference and measurement sites thereof, such that axial motion of the object during measurement affects both beams equally. The measurement beam is raster scanned transversely across each measurement site for which data is obtained. Also, the frequency of one of the beams is shifted by a non-moving frequency shifter, such that the reflected beams combine and are modulated by a heterodyne beat frequency, which is detected when the object path difference is matched with the interferometer path difference.