For Dimensional Measurement Patents (Class 356/492)
  • Patent number: 10732045
    Abstract: An image acquisition apparatus including a beam source, a beam expander, a beam splitter, an interferometer reference arm, a sample, a beam diffuser, a telecentric f-? lens, a beam scanner, and a beam detector uses a terahertz wave to acquire a surface image and a depth image of the sample.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: August 4, 2020
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Sang-Pil Han, Jun Hwan Shin, Il Min Lee, Kyung Hyun Park
  • Patent number: 10663288
    Abstract: A shape measuring apparatus of the present invention measures a variation in a thickness of an object to be measured WA based on an A surface reference interference light and an A surface measuring interference light obtained by performing optical heterodyne interference on a first A surface measuring light and a second A surface measuring light and a B surface reference interference light and a B surface measuring interference light obtained by performing the optical heterodyne interference on a first B surface measuring light and a second B surface measuring light. When the optical heterodyne interference is performed, the shape measuring apparatus makes the first A surface measuring light and the second B surface measuring light equal in frequency and makes the first B surface measuring light and the second A surface measuring light equal in frequency.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: May 26, 2020
    Assignee: KOBELCO RESEARCH INSTITUTE, INC.
    Inventor: Kazuhiko Tahara
  • Patent number: 10606911
    Abstract: Methods and apparatuses for generating a model of a subject's teeth. Described herein are intraoral scanning methods and apparatuses for generating a three-dimensional model of a subject's intraoral region (e.g., teeth) including both surface features and internal features. These methods and apparatuses may be used for identifying and evaluating lesions, caries and cracks in the teeth. Any of these methods and apparatuses may use minimum scattering coefficients and/or segmentation to form a volumetric model of the teeth.
    Type: Grant
    Filed: November 12, 2018
    Date of Patent: March 31, 2020
    Assignee: Align Technology, Inc.
    Inventors: Gilad Elbaz, Erez Lampert, Yossef Atiya, Avi Kopelman, Ofer Saphier, Maayan Moshe, Shai Ayal
  • Patent number: 10545458
    Abstract: The present invention relates to an arrangement for the generation of images of optical sections of a three-dimensional (3D) volume in space such as an object, scene, or target, comprising: an illumination unit, an optical arrangement for the imaging of the object onto at least one spatially resolving detector, a scanning mechanism for scanning the entire object and a signal processing unit for the implementation of a method for digital reconstruction of a three-dimensional representation of the object from images of said object as obtained by said detector (which may be in a form of a hologram), wherein the optical arrangement includes a diffractive optical element (herein a phase pinhole), realized using a Spatial Light Modulator (SLM) configured to mimic an actual physical pinhole, while allowing the formation of a three-dimensional representation for a specific point of interest in said object, such that for each scanning position a single hologram or an image is recorded.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: January 28, 2020
    Assignee: B.G. Negev Technologies and Applications Ltd., at Ben Gurion University
    Inventors: Joseph Rosen, Roy Kelner, Barak Katz
  • Patent number: 10386171
    Abstract: A multi-axis heterodyne interferometer is disclosed for observations of five degrees of dynamic freedom using a single illumination source. The sensor utilizes polarization and frequency multiplexing to simultaneously observe and separate the image and Fourier planes following scattering of coherent illumination from a dynamic surface. Multiple carrier frequencies and polarizations separate two segments of a Mach-Zehnder interferometer. Segments of this interferometer have unique optical configurations to generate the image and Fourier planes simultaneously on a focal plane array. The measured irradiance contains information pertaining to an object's in-plane translation, out-of-plane rotation, and out-of-plane displacement.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: August 20, 2019
    Assignee: UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
    Inventors: James D. Perea, Bradley W. Libbey
  • Patent number: 10317656
    Abstract: An optical tomography apparatus comprises: a polychromatic light source, a one-dimensional optical sensor, an interferometric microscope, a one-dimensional confocal spatial filtering system, an actuation system making it possible to perform a one-way scan depthwise of an object to be observed and a processor for reconstructing a two-dimensional image of a section of the object from a plurality of one-dimensional interferential images acquired by the image sensor during the one-way scan. An optical tomography method based on use of such an apparatus is also provided.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: June 11, 2019
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Institut d'Optique Graduate School, UNIVERSITE PARIS SUD 11
    Inventor: Arnaud Dubois
  • Patent number: 10288860
    Abstract: A method for analyzing a microscopic sample with a microscope includes illuminating at least a sub-region of the microscopic sample by illumination light. Detection light emanating from the microscopic sample is guided on a detection beam path, which includes at least one focusing optical element and which has a plurality of detection beam path branches, each with at least one detector element. The detector elements are parts of the same surface detector. By art adjusting element in at least a first one of the detection beam path branches, an optical path length of the first detection beam path branch is adjusted in such a way that the portion of the detection light guided on the first detection beam path branch is focused on the detector element of the first detection beam path branch.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: May 14, 2019
    Assignee: LEICA MICROSYSTEMS CMS GMBH
    Inventors: Werner Knebel, Frank Sieckmann, Florian Fahrbach
  • Patent number: 10175115
    Abstract: A wavefront analyzer is modified to simply determine the differences in amplitude and tilt which can exist between the different regions of an initial wavefront (S0). To achieve this, interference between two waves only is produced from beams (F1, F2) which come from neighboring regions on the initial wavefront. Such an analyzer can be used to coherently combine laser radiation produced by different sources arranged in parallel. Another use is for the determination of the differences in height and inclination which exist between the neighboring mirror segments of a Keck telescope.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: January 8, 2019
    Assignee: ONERA (OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES)
    Inventors: Cindy Bellanger, Maxime Deprez, Laurent Lombard, Jerome Primot
  • Patent number: 10127678
    Abstract: A technique for modular high-speed video vibration analysis of a structure. An embodiment of a device for high-speed video vibration analysis comprises a camera arrangement configured to generate at least two high-speed video streams of the structure and a data analyzer unit, connected to the camera arrangement. The data analyzer unit comprises a processing unit configured to extract vibrational data of at least a portion of the captured structure by considering estimated deformations of at least a portion of the captured structure along a first plane and determined depth information of at least a portion of the captured structure along a second plane different from the first plane or along an axis included in the second plane.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: November 13, 2018
    Assignee: AIRBUS DEFENCE AND SPACE GMBH
    Inventors: Antonio Pérez Acal, Gianluca Marsiglia, Daniele Nadalutti
  • Patent number: 10094653
    Abstract: The present invention provides a detection device and a detection method. The detection device comprises a light source module, a receiving module, an image generation module and a judgment module. The light source module is configured to emit light towards a film at a predetermined angle, the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film, the image generation module is configured to generate an equal thickness interference fringe image according to the interference light, and the judgment module is configured to judge whether thickness of the film is uniform according to the equal thickness interference fringe image. The detection device can perform high accuracy detection on uniformity of the thickness of a film, thereby facilitating improving display quality of a display panel.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: October 9, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yangkun Jing, Changjun Jiang
  • Patent number: 10088291
    Abstract: An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: October 2, 2018
    Assignee: MITUTOYO CORPORATION
    Inventors: Kazuhiko Kawasaki, Shinpei Matsuura
  • Patent number: 9823058
    Abstract: A device for position determination includes a light source and a planar measurement reflector movable along a measurement direction oriented perpendicular to the measurement reflector. A detector device is disposed such that a beam emitted by the light source strikes the detector device after impinging on the measurement reflector so that, in an event of a movement of the measurement reflector along the measurement direction, a signal results which is dependent on a position of the measurement reflector and from which a reference signal is generatable at a defined reference position. A deflection unit is disposed so as to deflect the beam such that the beam strikes the measurement reflector twice and therebetween passes through the deflection unit. The deflection unit is arranged so that a deviation in beam direction, resulting after the first reflection from a tilt of the measurement reflector, is compensated after the second reflection.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: November 21, 2017
    Assignee: DR. JOHANNES HEIDENHAIN GMBH
    Inventors: Walter Huber, Wolfgang Holzapfel, Ralph Joerger
  • Patent number: 9812996
    Abstract: There are provided a method for obtaining a distance between a base portion of an electrostatic chuck and a back surface of a target object and a method for neutralizing the electrostatic chuck based on the obtained distance. The electrostatic chuck has an upper surface including the base portion and a plurality of convex portions projecting from the base portion. The target object is mounted on apexes of the convex portions of the electrostatic chuck such that the back surface is in contact with the apexes. By processing a first wavelength spectrum output from a spectroscope based on reflected light of light emitted from a light source, a distance between the back surface of the target object and the base portion of the electrostatic chuck is calculated. Based on the calculated distance, a voltage is applied to the electrostatic chuck to neutralize the electrostatic chuck.
    Type: Grant
    Filed: November 17, 2014
    Date of Patent: November 7, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kenji Nagai, Yoshinobu Ooya
  • Patent number: 9687154
    Abstract: The invention relates to a method for the 3D measurement of the skin surface and near-surface skin layers by means of a confocal sensor with integrated color camera arranged in a handheld device, wherein said handheld device being moved by an operator via a sensor head to the location of the skin to be examined and a color image of the skin surface then being captured, whereupon the sensor being automatically changed over to confocal operation during which an image stack is generated by the simultaneous capturing of a multitude of all pixels necessary to create a complete image, said stack consisting of confocal images extending into the interior of the skin, with the entire area extending axially into the skin interior being scanned layer by layer in Z direction, wherein after capturing the measuring data an evaluation is performed resulting in a 3D image of the topography of the skin to be generated, and, moreover, from the image stack captured sectional images of the skin and skin volume are computed down
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: June 27, 2017
    Assignee: MIKROSKIN GMBH
    Inventors: Mark Weber, Juergen Valentin, Marcus Grigat
  • Patent number: 9690215
    Abstract: The invention relates to a differential interferometer module adapted for measuring a direction of displacement between a reference mirror and a measurement mirror. In an embodiment the differential interferometer module is adapted for emitting three reference beams towards a first mirror and three measurement beams towards a second mirror for determining a displacement between said first and second mirror. In a preferred embodiment the same module is adapted for measuring a relative rotation around two perpendicular axes as well. The present invention further relates to a lithography system comprising such a interferometer module and a method for measuring such a displacement and rotations.
    Type: Grant
    Filed: May 19, 2015
    Date of Patent: June 27, 2017
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Guido de Boer, Thomas Adrian Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers
  • Patent number: 9658527
    Abstract: A method for correcting a plurality of errors of a photolithographic mask is provided. First parameters of a imaging transformation of the photolithographic mask and second parameters of a laser beam locally directed onto the photolithographic mask are optimized, and the plurality of errors are corrected by applying an imaging transformation using optimized first parameters and locally directing the laser beam onto the photolithographic mask using optimized second parameters. The first and the second parameters are simultaneously optimized in a joint optimization process.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: May 23, 2017
    Assignee: Carl Zeiss SMS Ltd.
    Inventor: Vladimir Dmitriev
  • Patent number: 9658052
    Abstract: A method for reducing interference from scattered light/reflected light of an interference path by generating carrier through phase. Phase modulation is applied on the terminal of a fiber path, and a target signal is separated from an interference signal by selecting a specific working point, to obtain a purer target signal, thereby lengthening the measurement distance. The signal demodulation manner used in this method is different from the traditional manner of modulation performed by generating a carrier through the phase, and does not need to use the modulation frequency as the reference signal during demodulation, so this manner is easily implemented. The method is applicable to long-distance pipeline monitoring and wide-range fiber perimeter security, and especially to an application environment in which the modulation end is far away from the signal demodulation end.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: May 23, 2017
    Assignee: Fudan University
    Inventors: Bo Jia, Qian Xiao, Yuan Wu, Pang Bian
  • Patent number: 9250062
    Abstract: The invention relates to an apparatus for determining a layer thickness on a tape moved along a feed direction, comprising: a movement unit for moving the tape along the feed direction, a light generating unit for generating illumination radiation, a beam shaping unit disposed downstream of the light generating unit for shaping at least one strip-shaped illumination beam for linear illumination of the tape transversely with respect to the feed direction, a detector unit for detecting illumination radiation reflected and/or transmitted at the tape, and an evaluation device for determining the layer thickness on the basis of the detected illumination radiation. The apparatus can also be used for determining a degree of contamination of a surface of the tape, the surface being contaminated by particles, by detecting illumination radiation scattered at the tape.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: February 2, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Bernd Doerband, Ralf Lindner
  • Patent number: 9068811
    Abstract: A device for interferometrically determining the distance between two plates disposed substantially in parallel, includes a light source, beam-splitter element(s), reflector element(s), deflection elements, retroreflectors, and a detection unit. A beam of rays emitted by the light source falls on the first plate and splits into a reflected reference beam of rays and a transmitted measuring beam of rays. The measuring beam strikes a reflector on the second plate and undergoes a first reflection back toward the first plate. The reference beam traverses a first deflection element, and the measuring beam traverses a second deflection element. Both beams pass through a retroreflector. The reference beam is reflected at the first plate, and the measuring beam undergoes a second reflection at a reflector of the second plate, so that both beams propagate collinearly interferingly toward the detection unit, where a plurality of phase-shifted distance signals are generated.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: June 30, 2015
    Assignee: DR. JOHANNES HEIDENHAIN GMBH
    Inventor: Wolfgang Holzapfel
  • Publication number: 20150146208
    Abstract: An optical measuring probe for measuring inner and/or outer diameters of objects, uses a first optical element for focusing or collimating an optical beam onto a surface of an object. A second optical element for splitting the optical beam into a first measuring beam and a second measuring beam is provided in the optical measuring probe in such a way that the second measuring beam is guided out of the measuring probe in a direction opposite the direction of the first measuring beam and that the first measuring beam forms a first scan point and the second measuring beam forms a second scan point. Also described is a corresponding method for measuring diameters using the optical measuring probe. The optical measuring probe and the associated method make it possible to optically measure inner and outer diameters of measuring probes objects in a simple manner.
    Type: Application
    Filed: July 16, 2013
    Publication date: May 28, 2015
    Inventors: Peter Riegger, Gerald Franz, Pawel Drabarek
  • Patent number: 8979266
    Abstract: The present disclosure includes disclosure of devices, and methods to resolve microscopic structures. In at least one exemplary embodiment, a visualization apparatus comprises a source arm having a light source operable to emit a light beam, wherein the light beam defines a beam pathway, a reference arm comprising a reflecting surface positioned within the beam pathway, a sample arm comprising a wavefront sensor, an adaptive optics wavefront corrector, and a target, each of which are positioned within the beam pathway, wherein the adaptive optics wavefront corrector is operable to compensate for at least one aberration in the light beam, a detector arm comprising a beam detector positioned within the beam pathway, wherein the beam detector is operable to detect the reflected light beam from the reference arm and the target, and wherein the visualization apparatus is operable to minimize at least one aberration of the target.
    Type: Grant
    Filed: January 22, 2010
    Date of Patent: March 17, 2015
    Assignee: Indiana University Research and Technology Corporation
    Inventors: Abraham J. Cense, Donald T. Miller
  • Patent number: 8953170
    Abstract: A white-light interferometric measuring device includes: a white light source that emits a white light beam; a beam splitter that reflects the white light beam; and an interference objective lens that collects the white light beam having reflected off the beam splitter in the direction of an optical axis and irradiates a measurement workpiece with the white light beam, the interference objective lens generating interference between a measurement light beam obtained by reflection of the white light beam off the measurement workpiece and a reference light beam obtained by branching of the white light beam to be converged on the measurement workpiece. Polarization correcting means that corrects the white light beam to enter the interference objective lens to circularly polarized light is arranged between the white light source and the interference objective lens.
    Type: Grant
    Filed: March 1, 2013
    Date of Patent: February 10, 2015
    Assignee: Mitutoyo Corporation
    Inventors: Atsushi Usami, Tatsuya Nagahama
  • Patent number: 8792096
    Abstract: Four separately polarized beams are simultaneously measured upon diffraction from a substrate (W) to determine properties of the substrate. Linearly, circularly or elliptically polarized radiation is transmitted through a first beam splitter (N-PBS) and split into two polarized beams. These two beams are further split into two further beams using two further beam splitters, the further beam splitters (32,34) being rotated by 45° with respect to each other. The plurality of polarizing beam splitters enables the measurement of the intensity of all four beams and thus the measurement of the phase modulation and amplitude of the combined beams to give the features of the substrate. Algorithms are used to compare the four intensities of each of the polarized angles to give rise to the phase difference between the polarization directions and the ratio between the two main polarization direction amplitudes of the original polarized beam.
    Type: Grant
    Filed: March 24, 2009
    Date of Patent: July 29, 2014
    Assignee: ASML Netherlands B.V.
    Inventor: Alexander Straaijer
  • Patent number: 8742318
    Abstract: In a tool length measuring method measuring a length of a tool based on a movement amount of the tool from a predetermined position when the tool is moved from the predetermined position in a predetermined direction and interrupts a laser beam, the movement of the tool in a direction in which the tool approaches a main body of a laser device is stopped when a static signal indicating that the tool is interrupting the laser beam is detected.
    Type: Grant
    Filed: July 8, 2011
    Date of Patent: June 3, 2014
    Assignee: DMG Mori Seiki Co., Ltd.
    Inventors: Satoshi Miyamoto, Takayuki Nishioka
  • Patent number: 8743346
    Abstract: The present invention provides an inexpensive range image sensor and etc. A range image sensor comprises diffractive optical elements and on which are formed diffractive gratings that change a traveling direction of incident parallel light so that in a coordinate space defined by a xyz-axis, the incident parallel light is split into split beams, and angles formed by the x-axis and line segments determined by projected light spots formed by the split beams on a predetermined projection plane intersecting the z-axis become predetermined angles. Furthermore, the range image sensor is provided with a distance determining unit for determining distances to the projected light spots on the basis of the tilting with respect to the x-axis of the line segments determined by the projected light spots formed on the object by the split beams.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: June 3, 2014
    Assignee: Casio Computer Co., Ltd.
    Inventor: Hideaki Inoue
  • Publication number: 20140132962
    Abstract: Position detector for determining the rotation angle position of a rotatably supported object, comprising a light source for producing a light beam, a diffraction grating, a mirror which is connected with the object in a co-rotating manner in such a way that the light beam is reflected therefrom onto the diffraction grating and passes over the diffraction grating during a rotation of the mirror, thereby producing diffraction light, an interference device which is configured such as to be able to bring different diffraction orders of the diffraction light to interference, thereby producing an interference pattern, a light detector by means of which a brightness course, caused by the passing over of the diffraction grating with the reflected light beam, of the interference pattern can be detected, and an evaluation unit by which the rotation angle position of the object can be determined based on the brightness course.
    Type: Application
    Filed: May 2, 2012
    Publication date: May 15, 2014
    Applicant: SCANLAB AG
    Inventors: Norbert Petschik, Vladimir Ponkratov, Martin Valentin, Hans-Joachim Münzer
  • Publication number: 20140049762
    Abstract: A measurement system for measuring the position of a work piece (28) includes a stage grating (234) and an encoder head (236). A first measurement beam (38A) is directed at the stage grating (234) at a first angle, the first measurement beam (38A) being at a first wavelength. A second measurement beam (38B) is directed at the stage grating (234) at a second angle that is different than the first angle, the second measurement beam (38B) being at a second wavelength that is different than the first wavelength. At least a portion of the first measurement beam (38A) and at least a portion of the second measurement beam (38B) are interfered with one another to create a measurement signal along a signal axis.
    Type: Application
    Filed: March 12, 2013
    Publication date: February 20, 2014
    Inventor: Eric Peter Goodwin
  • Patent number: 8649019
    Abstract: A shape determining device includes first and second homodyne interferometers respectively provided for front and back surfaces of an object to be measured and a thickness distribution calculator that calculates a thickness distribution of the object based on intensities of first and second interference light beams respectively detected by the first and second homodyne interferometers for the front and back surfaces of the object at a plurality of measurement sites. The thickness distribution calculator calculates, for each interference light beam for which the intensity is detected by the first and second homodyne interferometers, a phase difference between the polarization components of a corresponding reference light beam and a corresponding object light beam in a corresponding non-interference light beam based on the intensity of the interference light beam, and calculates the thickness distribution based on a distribution of the calculated phase differences.
    Type: Grant
    Filed: January 28, 2010
    Date of Patent: February 11, 2014
    Assignees: Kobe Steel, Ltd., Kobelco Research Institute, Inc.
    Inventors: Masato Kannaka, Eiji Takahashi, Masakazu Kajita, Hideki Matsuoka, Hidetoshi Tsunaki, Noritaka Morioka, Kazuhiko Tahara, Takuya Atsumi
  • Publication number: 20130301006
    Abstract: The present invention relates to a dual focusing optical coherence imaging system. The dual focusing optical coherence imaging system includes: a light source unit for generating broadband light; a main optical distributor for distributing the light generated from the light source to allow the light to be propagated; an interference unit including first and second interference parts for forming interference signals with respect to different focused areas of an object to be detected using the light distributed from the optical distributor, and a common sample arm commonly connected to the first and second interference parts; an optical switch connected to the first and second interference parts to select at least one of the interference signals transmitted from the first and second interference parts; and a detection unit for converting the interference signal selected by the optical switch according to a preset mode into an electrical signal.
    Type: Application
    Filed: January 30, 2012
    Publication date: November 14, 2013
    Applicant: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
    Inventors: Beop Min Kim, Hyun Woo Jeong, Sang Won Lee
  • Publication number: 20130242311
    Abstract: A white-light interferometric measuring device includes: a white light source that emits a white light beam; a beam splitter that reflects the white light beam; and an interference objective lens that collects the white light beam having reflected off the beam splitter in the direction of an optical axis and irradiates a measurement workpiece with the white light beam, the interference objective lens generating interference between a measurement light beam obtained by reflection of the white light beam off the measurement workpiece and a reference light beam obtained by branching of the white light beam to be converged on the measurement workpiece. Polarization correcting means that corrects the white light beam to enter the interference objective lens to circularly polarized light is arranged between the white light source and the interference objective lens.
    Type: Application
    Filed: March 1, 2013
    Publication date: September 19, 2013
    Applicant: MITUTOYO CORPORATION
    Inventors: Atsushi USAMI, Tatsuya NAGAHAMA
  • Patent number: 8422023
    Abstract: An optical coherence tomography (OCT) apparatus includes an optical source, an interferometer generating an object beam and a reference beam, a transverse scanner for scanning an object with said object beam, and a processor for generating an OCT image from an OCT signal returned by said interferometer. At least the optical source, the interferometer, and the scanner are mounted on a common translation stage displaceable towards and away from said object. A dynamic focus solution is provided when the scanner and a folded object path are placed on the translation stage.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: April 16, 2013
    Assignee: Optos PLC
    Inventor: Adrian Podoleanu
  • Patent number: 8379219
    Abstract: A compound common-path interferometer including first and second measurement arms for measuring a test object is arranged so that a reference optic of the first measurement arm is disconnected from a remainder of the first measurement arm and a coupling between the reference optics of the first and second measurement arms forms a monolithic measurement cavity for maintaining reference surfaces of the reference optics at a fixed spacing and orientation. Separate supports are provided for the monolithic measurement cavity and the remainder of the first measurement arm.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: February 19, 2013
    Assignee: Corning Incorporated
    Inventors: John Weston Frankovich, Christopher Alan Lee, Michael Joseph Litzenberger
  • Publication number: 20130033709
    Abstract: The general field of the invention is that of optical systems for detection of the orientation of mobile objects in space. The main application is helmet posture detection inside of an aircraft cockpit. The system according to the invention operates by interferometry. It comprises a fixed electro-optical device comprising one or more collimated point-like emission sources and a detection assembly comprising one or more point-like photosensitive detectors. Two or more retro-reflecting devices referred to as “cube corner” are disposed on the mobile object. This system can be completed by optical means operating in polarized light mode allowing the direction of variation of the interference fringes to be determined and by other optical devices allowing an initial orientation to be measured.
    Type: Application
    Filed: August 3, 2012
    Publication date: February 7, 2013
    Inventors: Laurent POTIN, Bruno Barbier, Siegfried Rouzes
  • Patent number: 8345258
    Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.
    Type: Grant
    Filed: February 6, 2010
    Date of Patent: January 1, 2013
    Assignee: 4 D Technology Corporation
    Inventors: James E. Millerd, Michael North-Morris
  • Publication number: 20120250028
    Abstract: In one embodiment, the invention relates to an apparatus for increasing the repetition rate in a light source. The apparatus includes a first optical coupler comprising a first arm, a second arm and a third arm; a first mirror in optical communication with the second arm of the first optical coupler; and a first optical delay line having a first end in optical communication with the third arm of the first optical coupler and a second end in optical communication with a second mirror, wherein light entering the first arm of the first optical coupler leaves the first arm of the first optical coupler either delayed by an amount (?) or substantially undelayed.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Applicant: LIGHTLAB IMAGING, INC.
    Inventors: Joseph M. Schmitt, Desmond Adler
  • Patent number: 8255181
    Abstract: A correction algorithm may be applied for correcting misalignment of a radially-aligned array of sensors. Due to the tilt, signals from sensors that are further away from the media, may become slightly attenuated, while signals from sensors that are closer to the media are slightly increased. The error appears periodic and largely sinusoidal in nature around the array given the circular nature of the array of sensor elements. The algorithm determines the magnitude and phase of a sinusoidal function that best fits the wavelength data. In one embodiment, a discrete Fourier transform may be performed at the ‘frequency’ equivalent to one period around the array to determine the magnitude and phase estimate thereof. Then, a sinusoidal correction function may be generated using the magnitude and the phase in order to correct the reflectance data.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: August 28, 2012
    Assignee: Xerox Corporation
    Inventor: Thomas Edward Higgins
  • Patent number: 8169612
    Abstract: A method for calibrating an apparatus for ellipsometric measurements performed on an arbitrarily large or continuously moving sample, using a visible sample reference frame, and one or more laser sources in order to calibrate the ellipsometer for variations in the distance between the ellipsometer apparatus and the sample of interest. Included are techniques for projecting a first laser beam spot from an incident laser source onto a sample, then analyzing the position of the first laser beam spot relative to the center of the sample reference frame using human-aided measurements and confirmations and/or computer vision techniques. Then adjusting pivot points and/or apparatus-to-sample distance to achieve a first beam spot being located about the center of the sample reference frame, and concurrently intersecting the plane of the sample. Other techniques include changing the incidence and reflectance angle using a semi-circular track arc design with a stepping motor activating each goniometer arm.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: May 1, 2012
    Assignee: KooSur Technologies Inc.
    Inventor: Chao Gao
  • Publication number: 20120038885
    Abstract: The present disclosure includes disclosure of devices, and methods to resolve microscopic structures. In at least one exemplary embodiment, a visualization apparatus comprises a source arm having a light source operable to emit a light beam, wherein the light beam defines a beam pathway, a reference arm comprising a reflecting surface positioned within the beam pathway, a sample arm comprising a wavefront sensor, an adaptive optics wavefront corrector, and a target, each of which are positioned within the beam pathway, wherein the adaptive optics wavefront sensor is operable to compensate for at least one aberration in the light beam, a detector arm comprising a beam detector positioned within the beam pathway, wherein the beam detector is operable to detect the reflected light beam from the reference arm and the target, and wherein the visualization apparatus is operable to minimize at least one aberration of the target.
    Type: Application
    Filed: January 22, 2010
    Publication date: February 16, 2012
    Applicant: Indiana University Research and Technology Corp.
    Inventors: Abraham J. Cense, Donald T. Miller
  • Publication number: 20120002213
    Abstract: An object of the present invention is to measure thickness distribution with precision by using a simple device configuration without being affected by vibrations of a to-be-measured object. In the present invention, for each of the front and the back surfaces of a to-be-measured object 1, each of light beams obtained by branching into two an emitted light beam from a laser light source 2 is further branched into two. Then, the light beams are reflected in reference surfaces and measurement points 1a and 1b mutually in a front and back relation, so that non-interference light beams Pax and Pbx each of which contains the reference light beam and the object light beam as mutually orthogonal polarization components are acquired. Then, each light beam is branched into a plurality. Onto one or more of the branched light beams, phase shift is performed in which a change is imparted to the phase difference between the orthogonal polarization components by using wavelength plates a261, a263, and a264 and the like.
    Type: Application
    Filed: January 28, 2010
    Publication date: January 5, 2012
    Inventors: Masato Kannaka, Eiji Takahashi, Masakazu Kajita, Hideki Matsuoka, Hidetoshi Tsunaki, Noritaka Morioka, Kazuhiko Tahara, Takuya Atsumi
  • Publication number: 20110141479
    Abstract: An interferometer comprises: a light source; a first polarization beam splitter configured to reflect, as reference light, a first polarization component of light emitted from the light source, and to transmit, as measurement light, a second polarization component of the light emitted from the light source; a birefringent-material element located between the light source and the first polarization beam splitter; and a light-receiving device configured to receive an interfering light generated by interference of the measurement light transmitted through the first polarization beam splitter, reflected by a reflecting surface to be measured, and transmitted through the first polarization beam splitter, with the reference light reflected by the first polarization beam splitter. The interferometer is configured such that the reference light and the measurement light pass through the birefringent-material element between the first polarization beam splitter and the light-receiving device.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 16, 2011
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shigeki KATO
  • Patent number: 7952722
    Abstract: An optical image measurement device comprises: a light source configured to output a light having low temporal coherence and low spatial coherence; an optical system configured to split the light into a signal light and a reference light and superimpose the signal light having passed through a measured object and the reference light, thereby generating an interference light; a light receiver configured to receive the interference light and output an electric signal; and a forming part configured to form an image of the measured object based on the electric signal, wherein: the light receiver has a light receiving face on which a plurality of light receiving elements are arranged 2-dimensionally; and the optical system projects the interference light onto the light receiving face so that a size of the spatial coherent region of the interference light becomes equal to or larger than a size of the light receiving element.
    Type: Grant
    Filed: December 12, 2007
    Date of Patent: May 31, 2011
    Assignee: Kabushiki Kaisha Topcon
    Inventors: Kinpui Chan, Masahiro Akiba, Yasufumi Fukuma
  • Publication number: 20110109914
    Abstract: A method and apparatus for extracting the vector optical properties of biological samples with micron-scale resolution in three dimensions, using polarization-sensitive optical coherence tomography (PS-OCT). The method measures net retardance, net fast axis, and reflectivity. Polarization sensing is accomplished by illuminating the sample with at least three separate polarization states, using consecutive acquisitions of the same pixel, A-scan, or B-scan. The method can be implemented using non-polarization-maintaining fiber and a single detector. This PS-OCT method reported measures fast axis explicitly. In a calibration test of the system, net retardance was measured with an average error of 7.5° (standard deviation) 2.2° over the retardance range 0° to 180°, and fast axis with average error of 4.8° over the range 0° to 180°.
    Type: Application
    Filed: September 22, 2010
    Publication date: May 12, 2011
    Inventors: Jonathan E. ROTH, Joseph A. IZATT, Andrew M. ROLLINS
  • Patent number: 7929148
    Abstract: Provided herein are systems, methods, and compositions for optical coherence tomography implementations. The OCT implementation generally applies to both spectrometer-based and swept source-based implementations of PS-FD-OCT, and also to both fiber based and bulk-optical and Michelson and Mach-Zender PS-OCT implementations, where the detection arm is free from two photoreceivers or spectrometers for detecting the interference of the first polarization state and the second polarization state.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: April 19, 2011
    Assignee: Volcano Corporation
    Inventor: Nathaniel J. Kemp
  • Patent number: 7929120
    Abstract: An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: April 19, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tsutomu Osaka
  • Patent number: 7898670
    Abstract: A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: March 1, 2011
    Assignee: Corning Incorporated
    Inventors: David Berg, Jacques Gollier, Douglas S Goodman, Correy Robert Ustanik
  • Patent number: 7894074
    Abstract: A laser Doppler vibrometer for vibration measurement that employs active feedback to cancel the effect of large vibration excursions at low frequencies, obviating the need to unwrap phase data. The Doppler shift of a reflective vibrating test object is sensed interferometrically and compensated by means of a voltage-controlled oscillator driving an acousto-optic modulator. For frequencies within the servo bandwidth, the feedback signal provides a direct measurement of vibration velocity. For frequencies outside the servo bandwidth, feedback biases the interferometer at a point of maximal sensitivity, thus enabling phase-sensitive measurement of the high-frequency excursions. Using two measurements, one with a low bandwidth and one with a high bandwidth, more than five decades of frequency may be spanned.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: February 22, 2011
    Assignee: The United States of America as represented by the Secretary of Commerce, NIST
    Inventor: John Lawall
  • Patent number: 7860681
    Abstract: Combination is disclosed for deriving and displaying the full complement of nine dynamic parameters associated with a mechanical motion transmission system; the parameters comprise: (1) angular displacement, (2) angular velocity, (3) angular acceleration, (4) moment of force (i.e. torque), (5) kinetic energy, (6) work, (7) power, (8) momentum and (9) impulse. Quasi-instantaneous, absolute measurements are derived from elapsed-time measurements between successive sensing of fixed, equal, position events such as electric pulses generated by an incremental shaft encoder. The parameters are displayed on the X and Y axes of a Cartesian or other suitable graph where the X-axis (i.e. the independent axis) indicates the angular displacement of the encoder expressed as a succession of fixed, equal position events in the units of radians. The Y-axis (i.e. the dependent axis) indicates the absolute value of the parameters.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: December 28, 2010
    Inventors: Stanley R. Schaub, Pieter Van Vliet
  • Patent number: 7852485
    Abstract: Interferometers and autocorrelator based sensors are disclosed that are configured to have multiple sample arms which can be scanned and the backscattered low coherence source light from a sample resolved in a single sweep of one or more variable delays of the sensor. Borescopes and catheters capable of scanning multiple sections or areas of materials and tissues using these sensors are described.
    Type: Grant
    Filed: August 20, 2008
    Date of Patent: December 14, 2010
    Assignee: Medeikon Corporation
    Inventors: Gerard A. Alphonse, Donald B. Carlin, Fred Rappaport
  • Publication number: 20100290060
    Abstract: A system for measuring a shape of a target object includes a photonic integrated circuit and a light detector. The photonic integrated circuit includes a phase shifter configured to change a phase difference between a first portion of light and a second portion of light within the phase shifter, and an output element configured to output the light from the phase shifter directly toward the target object. The output element includes a first output waveguide configured to act as a first point source; and a second output waveguide configured to act as a second point source. The light detector is positioned to receive reflected light from the target object.
    Type: Application
    Filed: May 14, 2010
    Publication date: November 18, 2010
    Applicant: Andover Photonics, Inc.
    Inventors: Masoud Mohazzab, Liang Chen
  • Patent number: 7812962
    Abstract: A device for performing polarization mode dispersion (PMD) measurements of an optical fiber is disclosed. The PMD measurement device employs a fixed analyzer method, and includes a tunable Fabry-Perot inferometer as the wavelength-selective element and an optical bandpass filter for spectrum calibration. A novel scanning algorithm, which performs multiple scans at different velocities, enables accurate PMD measurements, even of moving optical cable. The tunable Fabry-Perot interferometer is able to scan over a wide wavelength range and yet have a narrow linewidth, such that a wide range of PMD values can be measured.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: October 12, 2010
    Assignee: Luciol Instruments SA
    Inventor: Jurgen Brendel