Abstract: An interferometer comprises: a light source; a first polarization beam splitter configured to reflect, as reference light, a first polarization component of light emitted from the light source, and to transmit, as measurement light, a second polarization component of the light emitted from the light source; a birefringent-material element located between the light source and the first polarization beam splitter; and a light-receiving device configured to receive an interfering light generated by interference of the measurement light transmitted through the first polarization beam splitter, reflected by a reflecting surface to be measured, and transmitted through the first polarization beam splitter, with the reference light reflected by the first polarization beam splitter. The interferometer is configured such that the reference light and the measurement light pass through the birefringent-material element between the first polarization beam splitter and the light-receiving device.

Abstract: An optical image measurement device comprises: a light source configured to output a light having low temporal coherence and low spatial coherence; an optical system configured to split the light into a signal light and a reference light and superimpose the signal light having passed through a measured object and the reference light, thereby generating an interference light; a light receiver configured to receive the interference light and output an electric signal; and a forming part configured to form an image of the measured object based on the electric signal, wherein: the light receiver has a light receiving face on which a plurality of light receiving elements are arranged 2-dimensionally; and the optical system projects the interference light onto the light receiving face so that a size of the spatial coherent region of the interference light becomes equal to or larger than a size of the light receiving element.

Abstract: A method and apparatus for extracting the vector optical properties of biological samples with micron-scale resolution in three dimensions, using polarization-sensitive optical coherence tomography (PS-OCT). The method measures net retardance, net fast axis, and reflectivity. Polarization sensing is accomplished by illuminating the sample with at least three separate polarization states, using consecutive acquisitions of the same pixel, A-scan, or B-scan. The method can be implemented using non-polarization-maintaining fiber and a single detector. This PS-OCT method reported measures fast axis explicitly. In a calibration test of the system, net retardance was measured with an average error of 7.5° (standard deviation) 2.2° over the retardance range 0° to 180°, and fast axis with average error of 4.8° over the range 0° to 180°.

Abstract: Provided herein are systems, methods, and compositions for optical coherence tomography implementations. The OCT implementation generally applies to both spectrometer-based and swept source-based implementations of PS-FD-OCT, and also to both fiber based and bulk-optical and Michelson and Mach-Zender PS-OCT implementations, where the detection arm is free from two photoreceivers or spectrometers for detecting the interference of the first polarization state and the second polarization state.

Abstract: An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.

Abstract: A distortion measurement and inspection system is presented. In one embodiment, a vision system is implemented. The vision system performs dual focal plane imaging where simultaneous imaging of two focal planes is simultaneously performed on a sample substrate and a reference substrate to determine distortion. In addition, a highly reflective background is implemented to provide for more resolution during distortion measurement.

Abstract: A laser Doppler vibrometer for vibration measurement that employs active feedback to cancel the effect of large vibration excursions at low frequencies, obviating the need to unwrap phase data. The Doppler shift of a reflective vibrating test object is sensed interferometrically and compensated by means of a voltage-controlled oscillator driving an acousto-optic modulator. For frequencies within the servo bandwidth, the feedback signal provides a direct measurement of vibration velocity. For frequencies outside the servo bandwidth, feedback biases the interferometer at a point of maximal sensitivity, thus enabling phase-sensitive measurement of the high-frequency excursions. Using two measurements, one with a low bandwidth and one with a high bandwidth, more than five decades of frequency may be spanned.

Abstract: Combination is disclosed for deriving and displaying the full complement of nine dynamic parameters associated with a mechanical motion transmission system; the parameters comprise: (1) angular displacement, (2) angular velocity, (3) angular acceleration, (4) moment of force (i.e. torque), (5) kinetic energy, (6) work, (7) power, (8) momentum and (9) impulse. Quasi-instantaneous, absolute measurements are derived from elapsed-time measurements between successive sensing of fixed, equal, position events such as electric pulses generated by an incremental shaft encoder. The parameters are displayed on the X and Y axes of a Cartesian or other suitable graph where the X-axis (i.e. the independent axis) indicates the angular displacement of the encoder expressed as a succession of fixed, equal position events in the units of radians. The Y-axis (i.e. the dependent axis) indicates the absolute value of the parameters.

Abstract: Interferometers and autocorrelator based sensors are disclosed that are configured to have multiple sample arms which can be scanned and the backscattered low coherence source light from a sample resolved in a single sweep of one or more variable delays of the sensor. Borescopes and catheters capable of scanning multiple sections or areas of materials and tissues using these sensors are described.

Abstract: A system for measuring a shape of a target object includes a photonic integrated circuit and a light detector. The photonic integrated circuit includes a phase shifter configured to change a phase difference between a first portion of light and a second portion of light within the phase shifter, and an output element configured to output the light from the phase shifter directly toward the target object. The output element includes a first output waveguide configured to act as a first point source; and a second output waveguide configured to act as a second point source. The light detector is positioned to receive reflected light from the target object.

Abstract: A device for performing polarization mode dispersion (PMD) measurements of an optical fiber is disclosed. The PMD measurement device employs a fixed analyzer method, and includes a tunable Fabry-Perot inferometer as the wavelength-selective element and an optical bandpass filter for spectrum calibration. A novel scanning algorithm, which performs multiple scans at different velocities, enables accurate PMD measurements, even of moving optical cable. The tunable Fabry-Perot interferometer is able to scan over a wide wavelength range and yet have a narrow linewidth, such that a wide range of PMD values can be measured.

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract: The present invention achieves multiplexing spectrum interference optical coherence tomography capable of full-range OCT measurement that causes no delays in measurement time due to high-order scans and is also free from complex conjugated images.

Abstract: An optical coherence tomography (OCT) apparatus includes an optical source, an interferometer generating an object beam and a reference beam, a transverse scanner for scanning an object with said object beam, and a processor for generating an OCT image from an OCT signal returned by said interferometer. At least the optical source, the interferometer, and the scanner are mounted on a common translation stage displaceable towards and away from said object. A dynamic focus solution is provided when the scanner and a folded object path are placed on the translation stage.

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract: A captured image of an object is input twice using a white background and a black background, after which the opacity D and the color image X of the object are obtained to yield an object image. It is possible to easily create a high-quality real image.

Abstract: Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources.

Abstract: Disclosed is an optical sensing device, which comprises a light source emitting a light; a beam splitter; an SPR sensor unit comprising a sensing surface; and a detecting mechanism; and a converting unit converting the first beam and the second beam from the optical device into a two-dimensional interference fringe pattern. From the above-mentioned configuration, an extra phase shift of a detection beam in SPR phase measurement is obtained. The differential measurement approach has shown to achieve a sensitivity figure significantly better than the best result that can be obtained from the prior art in the field of the measurement based on an SPR sensor.

Abstract: A method and an apparatus for measuring optical heterodyne interference in which a reference light and a measurement light differing in frequency is generated. The measurement light is S- or P-polarization light which is irradiated on a target through a polarization light beam splitter, and the reference light is P or S-polarization light which is reflected by a mirror. Interference of the measurement light from the target and the reference light reflected from the mirror is obtained by a light receiving element so as to measure a surface condition or detecting a surface detect on the target. A polarizing plate which is arranged before the light receiving element has an axis rotated so that a signal from the light receiving element becomes a minimum when the reference light is selectively shut off by a light shut off mechanism arranged before the polarization light beam splitter.

Abstract: An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized states of the first and second input lights being perpendicular to each other, and outputs the first and second input light; an interference section which inputs one branched light of the first and second input lights to a measuring object, makes output light from the measuring object interfere with other branched light of the first and second input lights, and outputs a plurality of interference lights; a plurality of light receiving sections which are respectively provided for the interference lights, receives the interference lights respectively, and outputs signals in accordance with optical powers of the interference lights respectively; and a low-pass filter for filtering the outputted signals.

Abstract: An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the reference beams impinge, wherein at least one of the mirrors can be displaced along a measuring axis. The optical assembly further includes a beam deflector, as well as a retro-reflector, wherein the measuring and the reference beams reflected at the measuring and the reference mirrors via the beam deflector and the retro-reflector are guided at least a second time in the direction toward the measuring and the reference mirrors and wherein the beam deflector is embodied as a plane-parallel plate.

Abstract: An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized states of the first and second input lights being perpendicular to each other, and outputs the first and second input light; an interference section which inputs one branched light of the first and second input lights to a measuring object, makes output light from the measuring object interfere with other branched light of the first and second input lights, and outputs a plurality of interference lights; a plurality of light receiving sections which are respectively provided for the interference lights, receives the interference lights respectively, and outputs signals in accordance with optical powers of the interference lights respectively; and a low-pass filter for filtering the outputted signals.

Abstract: An optical interferometer (100) includes a first optical interferometer (200) disposed on a front surface side of a workpiece (W) and a second optical interferometer (300) disposed on a rear surface side of the workpiece (W). The first optical interferometer (200) and the second optical interferometer (300) each include a light emitting section (210, 310), a wire grid (220, 320) and an interference fringe sensor (230, 330). Wire alignment directions of the wire grid (220) of the first optical interferometer (200) and the wire grid (320) of the second optical interferometer (300) are orthogonal to each other. When no workpiece (W) is set, the wire grid (220) of the first optical interferometer (200) reflects light from the second optical interferometer (300) to generate object light and the wire grid (320) of the second optical interferometer (300) reflects light from the first optical interferometer (200) to generate object light.

Abstract: A method and apparatus for simultaneously acquiring interferograms created with a plurality of different interference conditions are provided in the present invention. In the present invention, an object beam and a reference beam are used to interfere with each other and there are a plurality of sub-fields of interference simultaneously generated. All the sub-fields of interference can be simultaneously acquired by an image acquiring device with single shooting action so as to form the plurality of interferograms. Moreover, the present invention also provides a method for solving the phase information of the object beam from the interferograms formed by the foregoing said method.

Abstract: The present invention relates to a method for measuring the maturity or cell wall thickening of a sample of cellulosic fibre. The method including the steps of: a) exposing the sample of fibre to polarized light; b) capturing one or more images of the sample through crossed polar lenses and a compensator plate so that the image(s) include interference colours from the sample; and c) conducting computer analysis on the image(s) captured in step b) to determine the maturity or degree of cell wall thickening of the cellulosic fibre by comparing the image(s) to reference colour interference data. The present invention also relates to an apparatus for carrying out the method. The apparatus including an optical light path for exposing the sample of fibre to polarized light, an image capturing means, and a computer for conducting image analysis to determine fibre maturity or the degree of cell wall thickening.

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract: The present invention is directed to a heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, from which extremely accurate film depths can be calculated. A linearly polarized light comprised of two linearly polarized components that are orthogonal to each other, with split optical frequencies, is directed toward a film causing one of the optical polarization components to lag behind the other due to an increase in the optical path in the film for that component. A pair of detectors receives the beam reflected from the film layer and produces a measurement signal, and the beam prior to incidence on the film layer and generates a reference signal, respectively. The measurement signal and reference signal are analyzed by a phase detector for phase shift. The detected phase shift is then fed into a thickness calculator for film thickness results.

Abstract: A system and method for analyzing the characteristics of a thin film is provided whereby the in-plane birefringence of thin films is determined by measuring the interference fringes in the transmission or reflection spectra using unpolarized light and light linearly polarized along the MD and CD directions. The three spectra can be measured simultaneously or sequentially. The in-plane birefringence data can be used to characterize clear polymer films, which are principally made of biaxial oriented polymer, as the film is being continuously fabricated on a production line.

Abstract: An optical interferometer (100) includes a first optical interferometer (200) disposed on a front surface side of a workpiece (W) and a second optical interferometer (300) disposed on a rear surface side of the workpiece (W). The first optical interferometer (200) and the second optical interferometer (300) each include a light emitting section (210, 310), a wire grid (220, 320) and an interference fringe sensor (230, 330). Wire alignment directions of the wire grid (220) of the first optical interferometer (200) and the wire grid (320) of the second optical interferometer (300) are orthogonal to each other. When no workpiece (W) is set, the wire grid (220) of the first optical interferometer (200) reflects light from the second optical interferometer (300) to generate object light and the wire grid (320) of the second optical interferometer (300) reflects light from the first optical interferometer (200) to generate object light.

Abstract: Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of the test parts and the reference surface of a second of the two interferometers, and between the first and second reference surfaces. The latter measurement between the reference surfaces of the two interferometers enables the measurements of the opposite sides of the test parts to be related to each other.

Abstract: Disclosed herein is a method and apparatus for simultaneously measuring a displacement and angular variations. The method and apparatus of the present invention allows light radiated from a single light source to be placed along a light axis so as to simultaneously measure a distance (displacement) and angular variations that are different physical quantities, so that the displacement and angular variations of the measuring device of a precision measuring apparatus or machining device of a machine tool moved by a stage can be simultaneously measured without an Abbe error.

Abstract: Thermal expansion characteristics of test materials of ultra-low thermal expansion material are measured with a test beam that is split into a test material-measuring portion and an instrument-measuring portion. Both measuring portions propagate through common portions of a test arm. The test material-measuring portion encounters a test material, but the instrument-measuring portion does not. Thermal expansion characteristics of the test material are measured to high accuracy by manipulating the measures to distinguish displacements associated with the test material from displacements associated with the instrument structure.

Abstract: An interferometer system includes a plane mirror interferometer, a turning mirror, a retardation plate assembly having a retardation plate that can be adjusted and then fixed, and a retroreflector. A light beam travels in a path comprising the plane mirror interferometer, the turning mirror, the retardation plate assembly, and the retroreflector. The retardation plate assembly may include a plurality of bearings, a ring riding on the bearings, the retardation plate mounted to the ring, and a plunger pushing the ring against the bearings. The retardation plate may be fixed by adhesive after determining an orientation that produces little polarization leakage in the system.

Abstract: In order to reduce polarization dependent error, the polarization state of incident light is set to at least two different states of polarization, and a first optical property is determined separately for each of said at least two states of polarization. Then, an averaging procedure is carried out in order to obtain a mean value of the first optical property or of a property derived therefrom. Alternatively, the averaging procedure can be performed with respect to a DUT property of a device under test that is determined as a function of said first optical property.

Abstract: The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invention is characterised in that a source (1) is active during a fraction 1/n of the period (n being an integer) and of variable phase p/n of the period (p being an integer). Interferences are produced between light beams generated by reflection of incident light beams (7) and (8) on the micro-oscillators (12). Periodically the micro-oscillators (12) are displaced by means. The value of the parameter p (p being an integer) is varied and N elementary measurements are integrated to obtain a measurement representing each of the values of p. The phase and amplitude of each micro-oscillator (12) are calculated on the basis of the representative data obtained for each value of p and this for a large number of accumulations.

Abstract: A method and apparatus for determining the thickness of slabs of materials using an interferometer.

Abstract: Interference measuring apparatus for detecting a plurality of different interference phase signals. The apparatus has a light dividing member for dividing linearly polarized light beams superposed one upon another into a plurality of light beams. The apparatus also includes a light transmitting member with a plurality of light passing portions having different light transmitting properties in conformity with the incidence positions of the plurality of light beams divided by the light dividing member. In addition, the apparatus has a polarizing plate to receive the plurality of light beams that passed through the light transmitting member.

Abstract: Described is a method for screening for alterations in exocytosis of a population of cells. The cells are sorted by a FACS machine by assaying for alterations in at least three of the properties selected from the group consisting of light scattering, fluorescent dye uptake, fluorescent dye release, annexin granule binding, surface granule enzyme activity, and the quantity of granule specific proteins. Methods for screening for bioactive agents capable of modulating exocytosis in a cell are also described. The methods provide for reduced background and increased specificity without increasing the time or steps involved in assaying for exocytosis.

Abstract: A method and system using spectral interference of light from plasma emissions collected at near grazing incidence to in-situ monitor and control the film thickness of a non-opaque film. Embodiments of this invention are particularly useful to all substrate processing chambers equipped to form an in-situ plasma within the chamber and which are used to deposit or etch non-opaque films. One embodiment of the method of the present invention forms a plasma within a substrate processing chamber to deposit a non-opaque film on a wafer substrate within the chamber. During the plasma deposition process, a plurality of wavelengths of radiation including those reflected from the top and bottom layer of the film being deposited upon a wafer surface are collected through an existing viewport, and conveyed to a spectrometer for measurements via an optical fiber attached near this viewport. These measurements are analyzed to determine the film's thickness.

Abstract: A multi-axis interferometer includes a multiplexer portion and a beam splitter portion integrated into the same optically transmissive monolith. The multiplexer portion is configured to split an input beam into a corresponding plurality of intermediate beams, each of which is directed toward the beam splitter portion through a corresponding output port of the multiplexer portion. The beam splitter portion is configured to separate the intermediate beam into a measurement component and a reference component.

Abstract: The instant invention is a method and apparatus for the measurement, with low uncertainty, of the six degrees of freedom of a first structure relative to a second structure. The apparatus is comprised of compact, rigid, thermally stable structures. The invention uses linear displacement transducers which have no active pointing to maintain a desired orientation of the linear displacement transducers with other parts of the measurement system.

Abstract: A method of aligning an optical fiber to an integrated optical circuit includes positioning the optical fiber at a first workstation such that a fast axis of the optical fiber is oriented at a first angular position, and securing the optical fiber to a glass block in that position. Then, positioning the integrated optical circuit at a second workstation such that a fast axis of the integrated optical circuit is oriented at the first angular position, and positioning the glass block and optical fiber at the second workstation with the optical fiber adjacent to the integrated optical circuit, so that the fast axis of the optical fiber is oriented at the first angular position. The free end of the optical fiber is illuminated, and the fiber is rotated until the integrated optical circuit detects a maximum throughput across the interface between the optical fiber and the integrated optical circuit.

Abstract: An apparatus and method for performing quality inspections on a test surface based on optically stimulated emission of electrons. In one embodiment, the apparatus comprises a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface, and circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and for indicating a condition of quality based on the generated signal indicative of the photoelectron current.

Abstract: The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate system; interferometrically profiling a second surface of the test object in a second coordinate system different from the first coordinate system; providing a relationship between the first and second coordinate system; and calculating the geometric property based on the interferometrically profiled surfaces and the relationship between the first and second coordinate system. In some embodiments, the relationship may be determined by using calibrated gage blocks or by using a displacement measuring interferometer. Corresponding system are also described.

Abstract: A retarder includes a birefringent film embedded in an adhesive between two plates. The adhesive is index matched to the birefringent film.

Abstract: An optical element such as a beam splitter for interferometer separates a heterodyne beam from the laser into separate beams having different the frequencies and orthogonal polarizations. Optical fibers can conduct the separate beams to a beam combiner for interferometer optics. The PBS and/or the beam combiner can use a coating to reflect one linear polarization and transmit an orthogonal linear polarization. To improve extinction ratios in the PBS or the beam combiner, a yaw angle for an input beam is non-zero and corresponds to a peak in the extinction ratio of a reflected beam.

Abstract: The invention comprises methods and apparatus for reducing sub-harmonic cyclic errors by rotating by a small angle an interferometer or elements thereof. The rotation of the interferometer or selective elements thereof introduces a corresponding small angle between a sub-harmonic type spurious beam that subsequently interferes with either the reference or measurement beam so that the fringe contrast of the interference terms between the subharmonic spurious beam and either the reference or measurement beam is reduced by a required factor for a given use application thereby reducing nonlinearities in the phase signal.

Abstract: A Wollaston prism phase-stepping point diffraction interferometer for testing a test optic. The Wollaston prism shears light into reference and signal beams, and provides phase stepping at increased accuracy by translating the Wollaston prism in a lateral direction with respect to the optical path. The reference beam produced by the Wollaston prism is directed through a pinhole of a diaphragm to produce a perfect spherical reference wave. The spherical reference wave is recombined with the signal beam to produce an interference fringe pattern of greater accuracy.

Abstract: A capacitive motion encoder, for sensing the position of a moving object relative to a stationary object, includes at least one stationary element, coupled to the stationary object and a moving element, coupled to the moving object and in proximity to the stationary element. A field transmitter generates an electrostatic field, which is modulated by a change in capacitance between the stationary and moving elements responsive to relative motion of the elements. A conductive shield, is electrically decoupled from both the moving and the stationary objects, and encloses the moving and stationary elements so as to shield the elements from external electrical interference. Processing circuitry is coupled to sense the modulated electrostatic field and to determine responsive thereto a measure of the position of the moving object.

Abstract: A measurement system (10) for accurately measuring the surface geometry of a part (32) in three dimensions includes a laser (12) for emitting a laser beam (14). The laser beam (14) is transmitted to a birefringent crystal (16) which splits the laser beam (14) into a pair of beams (18,20). The pair of beams (18,20) are then subjected to a phase shift by a liquid crystal system (24) as controlled by a computer (26). The pair of beams (18,20) are then expanded in order to form a fringe pattern (30) on the surface of the part (32) to be measured.