Contour Or Profile Patents (Class 356/511)
  • Patent number: 11913910
    Abstract: A measuring device for measuring an inspection target on the basis of vibration generated when the inspection target has been irradiated with laser light includes a condensing position deriving portion configured to derive an amount of adjustment of a distance between condensing lenses of a laser condensing unit configured to condense the laser light on the basis of a distance between a laser device configured to radiate the laser light and an irradiation location of the laser light and a communicating portion configured to transmit control information including information representing the amount of adjustment to the laser condensing unit.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: February 27, 2024
    Assignee: National Institutes for Quantum and Radiological Science and Technology
    Inventors: Katsuhiro Mikami, Toshiyuki Kitamura, Shuji Kondo, Hajime Okada, Tetsuya Kawachi, Yoshinori Shimada, Shinri Kurahashi, Masaharu Nishikino, Noboru Hasegawa
  • Patent number: 11852457
    Abstract: A system for measuring a thickness of a coating arranged on an anode substrate includes an optical measurement system configured to transmit a light signal having a known first polarization toward the anode substrate through the coating such that the light signal is reflected from the surface of the anode substrate, a detection module positioned to receive the reflected light signal and configured to determine a second polarization of the reflected light signal that is different from the first polarization and measure a polarization difference between the first polarization and the second polarization, and a measurement module configured to receive the measured polarization difference, calculate the thickness of the coating based on the measured polarization difference, and generate an output based on the calculated thickness.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: December 26, 2023
    Assignee: GM GLOBAL TECHNOLOGY OPERATIONS LLC
    Inventors: Fang Dai, Hongliang Wang, Shuru Chen, Mei Cai
  • Patent number: 11796307
    Abstract: Embodiments of systems and methods for measuring a surface topography of a semiconductor structure are disclosed. In certain examples, a plurality of interference signals, each corresponding to a respective one of a plurality of positions on a surface of the semiconductor structure, are measured. Calibration signals, associated with a baseline region corresponding to a first category of a plurality of categories and a calibrated region corresponding to a second category of the plurality of categories, are measured. A surface height offset, associated with the baseline region and the calibrated region, is determined based on original surface heights and the calibration signals. The original surface heights are determined based on the plurality of interference signals corresponding to the baseline region and the calibrated region. The surface topography of the semiconductor structure is characterized based, at least in part, on the surface height offset and the original surface heights.
    Type: Grant
    Filed: November 2, 2021
    Date of Patent: October 24, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Sicong Wang, Xiaoye Ding, Yi Zhou
  • Patent number: 11796311
    Abstract: A light emitting device, an optical detection system, an optical detection device and an optical detection method, the light emitting device comprising: a light source (01), and an aperture limiting unit (03) located on an emergent light path of the light source (01); the light source (01) is used to emit light; and the aperture limiting unit (03) is used to limit the aperture of light emitted by the light source (01) when a current detection area of an object to be tested (05) has a high aspect ratio structure so as to block a portion of light having a large included angle with the normal direction of the object to be tested (05).
    Type: Grant
    Filed: July 23, 2019
    Date of Patent: October 24, 2023
    Assignee: SKYVERSE TECHNOLOGY CO., LTD.
    Inventors: Lu Chen, Le Yang, Yanzhong Ma, Chaoqian Zhang
  • Patent number: 11796848
    Abstract: A display device includes: a display having two display panels each having a display-side inclined surface near an outer edge of a display surface, the display being configured to allow parallel arrangement of the two display panels such that the respective inclined surfaces face each other at a joint of the two display panels to form a gap between the inclined surfaces; and at least one translucent part protruding from the display-side inclined surface toward the adjacent display panel in the gap, wherein the translucent part includes in the gap a translucent-side inclined surface that is inclined from one side of the display panel to the other while extending in a direction where the adjacent display panel parts are arrayed.
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: October 24, 2023
    Inventor: Yoichi Nagashima
  • Patent number: 11784098
    Abstract: A method of determining overlay of a patterning process, the method including: obtaining a detected representation of radiation redirected by one or more physical instances of a unit cell, wherein the unit cell has geometric symmetry at a nominal value of overlay and wherein the detected representation of the radiation was obtained by illuminating a substrate with a radiation beam such that a beam spot on the substrate was filled with the one or more physical instances of the unit cell; and determining, from optical characteristic values from the detected radiation representation, a value of a first overlay for the unit cell separately from a second overlay for the unit cell that is also obtainable from the same optical characteristic values, wherein the first overlay is in a different direction than the second overlay or between a different combination of parts of the unit cell than the second overlay.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: October 10, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes, Hugo Augustinus Joseph Cramer
  • Patent number: 11713959
    Abstract: An interferometric overlay tool may include an interferometer and a controller. The interferometer may include one or more beamsplitters to split illumination including one or more wavelengths into a probe beam along a probe path and a reference beam along a reference path, one or more illumination optics to illuminate a grating-over-grating structure with the probe beam, one or more collection optics to collect a measurement beam from the grating-over-grating structure, one or more beam combiners to combine the measurement beam and the reference beam as an interference beam, and a variable phase delay configured to vary an optical path difference (OPD) in the interferometer. The controller may receive one or more interference signals representative of interferometric phase data associated with a plurality of OPD values and the one or more wavelengths from a detector and determine an overlay error of the grating-over-grating structure based on the interferometric phase data.
    Type: Grant
    Filed: March 17, 2021
    Date of Patent: August 1, 2023
    Assignee: KLA Corporation
    Inventors: Andrei V. Shchegrov, Ido Dolev, Yoram Uziel, Amnon Manassen
  • Patent number: 11682570
    Abstract: A controller is configured to perform at least a first characterization process prior to at least one discrete backside film deposition process on a semiconductor wafer; perform at least an additional characterization process following the at least one discrete backside film deposition process; determine at least one of a film force or one or more in-plane displacements for at least one discrete backside film deposited on the semiconductor wafer via the at least one discrete backside film deposition process based on the at least the first characterization process and the at least the additional characterization process; and provide at least one of the film force or the one or more in-plane displacements to at least one process tool via at least one of a feed forward loop or a feedback loop to improve performance of one or more fabrication processes.
    Type: Grant
    Filed: September 20, 2021
    Date of Patent: June 20, 2023
    Assignee: KLA Corporation
    Inventors: Pradeep Vukkadala, Mark D. Smith, Ady Levy, Prasanna Dighe, Dieter Mueller
  • Patent number: 11589746
    Abstract: Optical coherence tomography (OCT) imaging systems, handhold probes, and methods that use a field curvature to match a curved surface of tissue are disclosed. According to an aspect, an OCT imaging system includes optical elements to generate diverging light. The system also includes one or more mirrors and a lens system configured to scan the diverging light onto a curved surface of an object for imaging of the object.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: February 28, 2023
    Assignee: Duke University
    Inventors: Christian Viehland, Cynthia Toth, Joseph Izatt
  • Patent number: 11525993
    Abstract: Implementations of the disclosure are directed to predicting structured illumination parameters for a particular point in time, space, and/or temperature using estimates of structured illumination parameters obtained from structured illumination images captured by a structured illumination system. Particular implementations are directed to predicting structured illumination frequency, phase, orientation, and/or modulation order parameters.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: December 13, 2022
    Assignee: ILLUMINA, INC.
    Inventors: Michael J. Carney, Stanley S. Hong, Robert Langlois, Hongji Ren, Kevin Wayne Bartig, Rico Otto, Olga Andreevna Souverneva
  • Patent number: 11468557
    Abstract: Certain aspects pertain to Fourier camera systems and methods. In one aspect, a Fourier camera comprises a first optical system, a second optical system, a variable aperture filter, and a light detector. The first optical system configured to receive illumination reflected from a curved sample surface. The variable aperture filter configured to move an aperture to a plurality of aperture locations in a Fourier plane, wherein the aperture filters light from the first optical system to the second optical system. The light detector configured to receive light from the second optical system, and configured to acquire a plurality of raw intensity images of the curved sample surface corresponding to the plurality of aperture locations, wherein the raw images are iteratively updated in overlapping regions in Fourier space to generate a focused, substantially uniform resolution image of the curved sample surface, and wherein the overlapping regions correspond to the plurality of aperture locations.
    Type: Grant
    Filed: March 13, 2015
    Date of Patent: October 11, 2022
    Assignee: California Institute of Technology
    Inventors: Xiaoze Ou, Changhuei Yang
  • Patent number: 11454494
    Abstract: Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample (11) to be tested, a first detection apparatus (21) and a second detection apparatus (22) can be switched by means of an objective lens switching apparatus (20), so as to acquire height information and structure information of the sample (11) to be tested. In the process, the sample (11) to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample (11) to be tested avoided, and the probability of the sample (11) to be tested being polluted in the testing process reduced, but also a region to be tested of the sample (11) to be tested does not need to be determined repeatedly, improving the testing speed for the sample (11) to be tested.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: September 27, 2022
    Assignee: SKYVERSE TECHNOLOGY CO., LTD.
    Inventors: Lu Chen, Le Yang, Yanzhong Ma, Chaoqian Zhang
  • Patent number: 11448496
    Abstract: Source light having a range of optical wavelengths is generated. The source light is split into sample light and reference light. The sample light is delivered into a sample, such that the sample light is scattered by the sample, resulting in signal light that exits the sample. The signal light and the reference light are combined into an interference light pattern having optical modes, each having a direct current (DC) component and at least one alternating current (AC) component. Different subsets of the optical modes of the interference light pattern are respectively detected, and analog signals representative of the optical modes of the interference light pattern are output. Pair of the analog signals are subtracted from each other, and differential analog signals are output. The sample is analyzed based on the differential analog signals.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: September 20, 2022
    Assignee: HI LLC
    Inventors: Haowen Ruan, Hooman Mohseni
  • Patent number: 11399719
    Abstract: Disclosed are a probe for photoacoustic measurement which can suppress generation of artifacts obstructive to signal observation in a photoacoustic measurement, and a photoacoustic measurement apparatus including the same. The probe for photoacoustic measurement includes a light emission unit which emits measurement light to a subject, and an acoustic wave detection unit which detects a photoacoustic wave generated in the subject by the emission of measurement light. An emission end surface of the light emission unit is positioned to a side where the acoustic wave detection unit is located, with respect to a contact plane of the probe, and an optical axis at the emission end surface is inclined to a side opposite to the side on which the acoustic wave detection unit is positioned with respect to a normal direction of a detection surface of the acoustic wave detection unit.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: August 2, 2022
    Assignee: FUJIFILM Corporation
    Inventors: Kaku Irisawa, Atsushi Hashimoto
  • Patent number: 11369269
    Abstract: Systems and methods for acquiring images of a sample are provided. According to an aspect of the invention, a system includes a first light source that emits first light having a first wavelength as a temporally continuous beam; a second light source that emits second light having a second wavelength as a temporally modulated beam; and a scanning mirror that raster scans the first light across a sample during a raster scan period, and projects a structured light pattern of the second light onto the sample during the raster scan period. A first image of the sample is generated from at least a portion of the first light that is backscattered from the sample during the raster scan period, and a second image of the sample is generated from at least a portion of the second light that is backscattered from the sample during the raster scan period.
    Type: Grant
    Filed: January 23, 2019
    Date of Patent: June 28, 2022
    Assignee: VERILY LIFE SCIENCES LLC
    Inventors: Chinmay Belthangady, James Polans, Daniele Piponi, Eden Rephaeli
  • Patent number: 11365964
    Abstract: Disclosed is a stitching-measurement device adapted for performing stitching-measurement on a surface of a concave spherical lens, including: an interferometer, a reference lens, a first plane mirror, a second plane mirror, a first adjustment mechanism, a second adjustment mechanism, a concave spherical object to be measured, a motion table and a control mechanism, the first plane mirror being mounted on the first adjustment mechanism configured to change a position of the first plane mirror; the second plane mirror being mounted on the second adjustment mechanism configured to change a position of the second plane mirror; the concave spherical object to be measured being placed on the motion table configured to change a position of the concave spherical object to be measured; the control mechanism communicating with the interferometer, the first adjustment mechanism, the second adjustment mechanism, and the motion table for issuing control signals, wherein by the first adjustment mechanism and the second adj
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: June 21, 2022
    Assignee: The Institute of Optics and Electronics, The Chinese Academy of Sciences
    Inventors: Fuchao Xu, Xin Jia, Dachun Gan, Tingwen Xing
  • Patent number: 11353318
    Abstract: Disclosed is an optical probe system that is capable of high speed, high precision, and high resolution 3D digitalization of engineered objects. The 3D dimensional data of the engineered object is measured using a swept source optical coherence tomography system with improved speed, spatial resolutions, and depth range. Also disclosed is a type of coordinate measurement machine (CMM) that is capable of performing high speed, high resolution, and non-contact measurement of engineered objects. The mechanic stylus in the touch-trigger probe of a conventional CMM is replaced with an optical stylus with reconfigurable diameter and length. The distance from the center of the optical stylus to the measurement probe is optically adjusted to match the height of the object to be measured quickly, which eliminates one dimensional movement of the probe and greatly improves the productivity.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: June 7, 2022
    Assignee: Thorlabs, Inc.
    Inventors: James Jiang, Alex Cable
  • Patent number: 11339468
    Abstract: A magnetron sputtering scanning method for manufacturing a silicon carbide optical reflector surface modification layer and improving surface profile includes (1) for a silicon carbide plane mirror to be modified, first utilizing diamond micro-powders to grind and roughly polish an aspherical silicon carbide reflector with a conventional polishing or CCOS numerical control machining method; (2) after the surface profile precision of the silicon carbide reflector satisfies a modification requirement, utilizing a strip-shaped magnetron sputtering source to deposit a compact silicon modification layer on the surface of the silicon carbide reflector; (3) then, utilizing a circular sputtering source to modify and improve the surface profile of the reflector; and (4) finally, finely polishing the modification layer, and achieving the requirements for machining the surface profile and roughness of the reflector.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: May 24, 2022
    Assignee: NANJING INSTITUTE OF ASTRONOMICAL OPTICS & TECHNOLOGY, NATIONAL ASTORNOMICAL OBSERVATORIES, CHINESE ACADEMY OF SCIENCES
    Inventors: Jinfeng Wang, Meng Huang, Jie Tian, Yeru Wang
  • Patent number: 11313805
    Abstract: A method for detecting optical film defects based on differential interference, comprising: an incident light is adjusted into a planar light wave, and the surface of an optical film to be detected is adjusted to be perpendicular to the planar light wave; the planar light wave sequentially passes through a diaphragm, the optical film, a first collimating lens and a lenticular lens, and then form two parallel outgoing beams by differential interference; the two parallel outgoing beams pass through a second collimating lens to form a differential interference image on a photodetector; and the differential interference image is analyzed to detect both superficial and internal defects of the optical film.
    Type: Grant
    Filed: May 27, 2017
    Date of Patent: April 26, 2022
    Assignee: HUAIYIN NORMAL UNIVERSITY
    Inventors: Feng Lei, Xintian Bian
  • Patent number: 11270418
    Abstract: An image generating device for obtaining an image of an object, comprising: a control module configured to generate a first signal having a first frequency component and a first phase component for a first axis direction, and a second signal having a second frequency component and a second phase component for a second axis direction, an emitting unit configured to emit light to the object using the first signal and the second signal; and a light receiving unit configured to obtain light receiving signal based on returned light from the object.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: March 8, 2022
    Assignee: VPIX Medical Incorporation
    Inventors: Kyungmin Hwang, Ji Won Kim, Yeong Ryeol Kim
  • Patent number: 11240426
    Abstract: Pulsed hyperspectral, fluorescence, and laser mapping imaging in a light deficient environment is disclosed. A system includes an emitter for emitting pulses of electromagnetic radiation and an image sensor comprising a pixel array for sensing reflected electromagnetic radiation. The system includes a controller configured to synchronize timing of the emitter and the image sensor. The system is such that at least a portion of the pulses of electromagnetic radiation emitted by the emitter comprises one or more of a hyperspectral emission, a fluorescence emission, or a laser mapping pattern.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: February 1, 2022
    Inventors: Joshua D. Talbert, Donald M. Wichern
  • Patent number: 11234591
    Abstract: Methods and devices for detecting sites of low optical reflectivity from optical coherence tomography, OCT, of the retina are provided. The method includes segmenting retinal layers from OCT data, calculating optical reflectivity of each segmented retinal layers from the OCT data, and detecting sites of low optical reflectivity from the calculated optical reflectivity of the segmented retinal layers. The calculated optical reflectivity can be compared against a predetermined threshold obtained from a healthy population. Segmenting can be carried out according to the optical reflectivity of each identified retinal layer. OCT-Microangiography data can be displayed side-by-side or superimposed with the enface images of the calculated optical reflectivity. The device can be combined with OCT equipment, in particular for displaying the detected sites of low optical reflectivity.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: February 1, 2022
    Assignee: AIBILI-ASSOCIAÇÃO PARA INVESTIGAÇÃO BIOMÉDICA E INOVAÇÃO EM LUZ E IMAGEM
    Inventors: José Guilherme Fernandes Da Cunha-Vaz, Torcato Miguel Barreira Paredes Dos Santos
  • Patent number: 11194143
    Abstract: A spectral imaging device (12) includes an image sensor (28), a tunable light source (14), an optical assembly (17), and a control system (30). The optical assembly (17) includes a first refractive element (24A) and a second refractive element (24B) that are spaced apart from one another by a first separation distance. The refractive elements (24A) (24B) have an element optical thickness and a Fourier space component of the optical frequency dependent transmittance function. Further, the element optical thickness of each refractive element (24A) (24B) and the first separation distance are set such that the Fourier space components of the optical frequency dependent transmittance function of each refractive element (24A) (24B) fall outside a Fourier space measurement passband.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: December 7, 2021
    Assignee: DAYLIGHT SOLUTIONS, INC.
    Inventors: Jeremy A. Rowlette, Miles James Weida
  • Patent number: 11156548
    Abstract: A parameterized geometric model of a structure can be determined based on spectra from a wafer metrology tool. The structure can have geometry-induced anisotropic effects. Dispersion parameters of the structure can be determined from the parameterized geometric model. This can enable metrology techniques to measure nanostructures that have geometries and relative positions with surrounding structures that induce non-negligible anisotropic effects. These techniques can be used to characterize process steps involving metal and semiconductor targets in semiconductor manufacturing of, for example, FinFETs or and gate-all-around field-effect transistors.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: October 26, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Manh Nguyen, Phillip Atkins, Alexander Kuznetsov, Liequan Lee, Natalia Malkova, Paul Aoyagi, Mikhail Sushchik, Dawei Hu, Houssam Chouaib
  • Patent number: 11150195
    Abstract: Defects are detected using data acquired from an interference channel and a polarization modification channel in an interferometer. The interference objective splits a polarized illumination beam into a reference illumination that is reflected by a reference surface without modification to the polarization, and a sample beam that is reflected by a sample surface, that may modify the polarization. Light from the sample beam with no change in polarization is combined with the reference illumination and directed to the interference channel, which may measure the reflectivity and/or topography of the sample. Light from the sample beam with modified polarization is directed to the polarization modification channel. The intensity of the light detected at the polarization modification channel may be used, along with the reflectivity and topography data to identify defects or other characteristics of the sample.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: October 19, 2021
    Assignee: Onto Innovation Inc.
    Inventor: Nigel P. Smith
  • Patent number: 11118900
    Abstract: A method and apparatus for characterizing the surface form of an optical element, in particular a mirror or a lens element of a microlithographic projection exposure apparatus, includes: carrying out a plurality of interferometric measurements, in each of which an interferogram is recorded between a test wave emanating from a portion of the optical element in each case and a reference wave, the position of the optical element relative to the test wave being altered between these measurements, and calculating the figure of the optical element on the basis of these measurements. This calculation is carried out iteratively such that, in a plurality of iteration steps, the figure of the optical element is ascertained in each case by carrying out a forward calculation, each of these iteration steps being based in each case on a reference wave that was adapted based on the preceding iteration step.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: September 14, 2021
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Frank Riepenhausen, Martin Schroeter
  • Patent number: 11113832
    Abstract: Example embodiments allow for training of artificial neural networks (ANNs) to generate depth maps based on images. The ANNs are trained based on a plurality of sets of images, where each set of images represents a single scene and the images in such a set of images differ with respect to image aperture and/or focal distance. An untrained ANN generates a depth map based on one or more images in a set of images. This depth map is used to generate, using the image(s) in the set, a predicted image that corresponds, with respect to image aperture and/or focal distance, to one of the images in the set. Differences between the predicted image and the corresponding image are used to update the ANN. ANNs tramed in this manner are especially suited for generating depth maps used to perform simulated image blur on small-aperture images.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: September 7, 2021
    Assignee: Google LLC
    Inventors: Neal Wadhwa, Jonathan Barron, Rahul Garg, Pratul Srinivasan
  • Patent number: 11092431
    Abstract: A method and apparatus for characterizing the surface form of an optical element, in particular a mirror or a lens element of a microlithographic projection exposure apparatus, includes: carrying out a plurality of interferometric measurements, in each of which an interferogram is recorded between a test wave emanating from a portion of the optical element in each case and a reference wave, the position of the optical element relative to the test wave being altered between these measurements, and calculating the figure of the optical element on the basis of these measurements. This calculation is carried out iteratively such that, in a plurality of iteration steps, the figure of the optical element is ascertained in each case by carrying out a forward calculation, each of these iteration steps being based in each case on a reference wave that was adapted based on the preceding iteration step.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: August 17, 2021
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Frank Riepenhausen, Martin Schroeter
  • Patent number: 11020608
    Abstract: Systems and methods for monitoring properties of the cornea and controlling the crosslinking treatment. The thickness of the cornea during crosslinking may be measured by using ultrasonic reflections to determine an anterior distance (D1?) between a reference location (37) on a device resting on the eye and an anterior surface (66) of the cornea and to determine a posterior distance (D3?) between a posterior surface (63) of the cornea and an element of the eye such as an anterior surface (72) of the lens of the eye. These distances are subtracted from a reference distance (D0) between the reference location and the element of the eye. The reference distance (D0) may be determined using ultrasonic reflections to determine the corresponding anterior and posterior distances and the thickness (D2) of the cornea prior to crosslinking. The speed of sound in the cornea during crosslinking may be derived using the thickness (D2?) and time of flight of ultrasound through the cornea.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: June 1, 2021
    Assignee: TECLens, LLC
    Inventor: Patrick David Lopath
  • Patent number: 11009337
    Abstract: In a method for calibrating an interferometer (100) having a beam path for a measuring beam (112), wherein at least one plane (320) that at least partially reflects the measuring beam (112) has been introduced into the beam path, and wherein a normal to a first plane (320) is inclined at a first angle to a measuring beam (112) incident on the first plane (320), the following steps are carried out: interferometric measurement of a first axial spacing of a first point on the first plane (320) with the measuring beam (112), and interferometric measurement of a second axial spacing of a second point on one of the at least one plane (320) with the measuring beam (112), wherein the second point is spaced apart from the first point.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: May 18, 2021
    Assignee: HAAG-STREIT AG
    Inventors: Lucio Robledo, Pascal Kesselring
  • Patent number: 10955338
    Abstract: A reflectometer system for use with a non-contact actinic system includes a primary lens, and an illumination source and a detector positioned on an observation side of the primary lens opposite a goods production area and sample region. The illumination source emits an illumination beam through an illumination beam void between the primary lens and the housing, which is directed into the goods production area and sample region, and onto a flow or static sample of material to be tested. The material being tested then create a reflected beam, which shines back to the observation side of the primary lens through the primary lens to the detector. The general alignment of the illumination beam and the reflected beam create an extended sample region within the goods production area, as well as a compact reflectometer system structure.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: March 23, 2021
    Assignee: Group 32 Development & Engineering, Inc.
    Inventors: Edward M. Granger, Matthew Weisberg
  • Patent number: 10942296
    Abstract: The present invention provides a processing method of a cover plate, a control apparatus, a cover plate processing apparatus, and a storage medium. The processing method utilizes a scanning device to scan surfaces and obtain surface features of a first cover plate and a second cover plate, and performs Fourier transformation on the surface features of the first cover plate and the second cover plate to obtain the surface feature frequency variation distribution curves of the first cover plate and the second cover plate, thereby to obtain the surface feature frequency variation distribution curves of a high-resolution cover plate. Fourier inverse transformation is performed on the surface feature frequency variation distribution curves of the high-resolution cover plate to obtain surface features of a target cover plate, so that the high-resolution cover plate so processed meets balancing speckles and anti-glare requirements.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: March 9, 2021
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Yong Yang
  • Patent number: 10925480
    Abstract: Methods of applying OCT angiography are disclosed. In particular, methods of detecting, visualizing and measuring the extent of retinal neovascularization are disclosed. Further disclosed are methods measuring retinal nonperfusion area and choriocapillaris defect area.
    Type: Grant
    Filed: June 5, 2018
    Date of Patent: February 23, 2021
    Assignee: Oregon Health & Science University
    Inventors: David Huang, Yali Jia
  • Patent number: 10918274
    Abstract: The disclosure herein provides methods, systems, and devices for improving optical coherence tomography machine outputs through multiple enface optical coherence tomography angiography averaging techniques. The embodiments disclosed herein can be utilized in ophthalmology for employing optical coherence tomography (OCT) for in vivo visualization of blood vessels and the flow of blood in an eye of a patient, which is also known generally as optical coherence tomography angiography (OCTA).
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: February 16, 2021
    Assignee: Doheny Eye Institute
    Inventors: SriniVas R. Sadda, Akihito Uji
  • Patent number: 10921111
    Abstract: Detecting device and method, and liquid crystal dropping apparatus and method are provided. The detecting device is configured to detect a volume of an uneven region of a color filter substrate in a display area, and includes at least one collection unit and a processing circuit. The collection unit is configured to obtain a surface image of the color filter substrate in the display area, and output the obtained surface image to the processing circuit. The processing circuit is connected to the collection unit and configured to process the surface image to obtain a volume of the uneven region of the color filter substrate in the display area. The detecting device and the corresponding method can automatically obtain the volume of the uneven region of the color filter substrate in the display area, thereby obtaining an appropriate filling amount of liquid crystal and ensuring product quality.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: February 16, 2021
    Assignees: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Jian Chen, Sangman Yuk, Huifang Yuan, Wenhao Tang
  • Patent number: 10915003
    Abstract: The present invention provides a projecting apparatus for a 3D sensing system. The projecting apparatus comprises: at least a light source and a patterning unit. The at least a light source is utilized for emitting beams with different wavelengths. The patterning unit is utilized for receiving the beams and imposing at least a pattern on the beams to generate a structure light with higher resolution.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: February 9, 2021
    Assignee: HIMAX TECHNOLOGIES LIMITED
    Inventor: Meng-Ko Tsai
  • Patent number: 10916015
    Abstract: A method for improving segmentation in optical coherence tomography imaging. The method comprises obtaining an OCT image of imaged tissue, generating a first feature image for at least a portion of the OCT image, and generating a second feature image for at least the portion of the OCT image, based on either the OCT image or the first feature image, by integrating image data in a first direction across the OCT image or first feature image. A third feature image is generated as a mathematical function of the first and second feature images, and layer segmentation for the OCT image is performed, based on the third feature image.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: February 9, 2021
    Assignee: Alcon Inc.
    Inventor: Hugang Ren
  • Patent number: 10902648
    Abstract: A system and related method for signal processing. Interferometric projection data reconstructed into one or more images for a spatial distribution of a physical property of an imaged object. The interferometric projection data is derived from signals acquired by an X-ray detector (D), said signals caused by X-ray radiation after interaction of said X-ray radiation with an interferometer and with the object (OB) to be imaged, said interferometer (IF) having a reference phase. A reconstructor (RECON) reconstructs for the image(s) by fitting said data to a signal model by adapting fitting variables, said fitting variables including i) one or more imaging variables for the one or more images and ii), in addition to said one or more imaging variables, a dedicated phase variable for a fluctuation of said reference phase.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: January 26, 2021
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Thomas Koehler, Bernhard Johannes Brendel, Peter Noel, Franz Pfeiffer, Maximilian Von Teuffenbach
  • Patent number: 10890429
    Abstract: An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: January 12, 2021
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hung Chih Chiang, Cheng Yi Chang, Ting Wei Chang, Chi Shen Chang
  • Patent number: 10873400
    Abstract: Described are various embodiments of a dual optical modulator, system and method. In one embodiment, an optical modulator modulates an input optical signal having a designated optical frequency. The modulator comprises first and second tunable modulators operable around the optical frequency and operatively disposed between a bus waveguide path and an opposed waveguide path. The modulator further comprises a relative optical phase-shifter optically coupled between the tunable modulators so to impart a relative optical phase shift between the bus waveguide path and the opposed waveguide path. The tunable modulators are respectively driveable to modulate a respective resonance thereof in complimentary directions relative to the optical frequency and thereby resonantly redirect a selectable portion of the input optical signal along the opposed waveguide path such that the relative optical phase shift is imparted thereto for output.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: December 22, 2020
    Assignee: Elenion Technologies, LLC
    Inventors: Thomas Wetteland Baehr-Jones, Michael J. Hochberg, Yang Liu
  • Patent number: 10760900
    Abstract: A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulse train acts on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: September 1, 2020
    Assignee: The University of Electro-Communications
    Inventor: Kaoru Minoshima
  • Patent number: 10740940
    Abstract: Techniques for automating the generation and analysis of fundus drawings are described. Captured images undergo image processing to extract information about image features. Fundus images are generated and recommended labels for the fundus drawing are generated. Fundus drawings can be analyzed and undergo textual processing to extract existing labels. Machine learning models and co-occurrence analysis can be applied to collections of fundus images and drawings to gather information about commonly associated labels, label locations, and user information. The most frequently used labels associated with the image can be identified to improve recommendations and personalize labels.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: August 11, 2020
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Prashant Gupta, Manish Gupta, Mithun Das Gupta
  • Patent number: 10649447
    Abstract: Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the measurements on all of the wafers in at least one lot at all measurement spots on the wafers. The method also includes determining an optimal sampling scheme, an enhanced sampling scheme, a reduced sampling scheme, and thresholds for the dynamic sampling scheme for the process based on results of the measurements. The thresholds correspond to values of the measurements at which the optimal sampling scheme, the enhanced sampling scheme, and the reduced sampling scheme are to be used for the process.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: May 12, 2020
    Assignee: KLA-Tencor Corp.
    Inventors: Pavel Izikson, John Robinson, Mike Adel, Amir Widmann, Dongsub Choi, Anat Marchelli
  • Patent number: 10565462
    Abstract: In an electronic apparatus that captures images, characters in an image are accurately recognized. The electronic apparatus includes an imaging section, a distance measurement section, a shape estimation section, and a coordinate conversion section. The imaging section images an object and captures image data. The distance measurement section measures distances from the imaging section to a plurality of measurement points on a surface of the object. The shape estimation section estimates a shape of the object from the measured distances. The coordinate conversion section performs coordinate conversion on the image data, the coordinate conversion including converting three-dimensional coordinates on the surface of the object into plane coordinates on a predetermined reference plane on the basis of the estimated shape.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: February 18, 2020
    Assignee: Sony Corporation
    Inventors: Mitsuharu Ohki, Nobuki Furue, Yoshihito Ohki, Keisuke Touyama, Masahiro Watanabe, Kensei Jo
  • Patent number: 10533836
    Abstract: Dual laser frequency combs can rapidly measure high resolution linear absorption spectra. However, one-dimensional linear techniques cannot distinguish the sources of resonances in a mixture of different analytes, nor separate inhomogeneous and homogeneous broadening. These limitations are overcome by acquiring high resolution multi-dimensional non-linear coherent spectra with frequency combs.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: January 14, 2020
    Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Steven T. Cundiff, Bachana Lomsadze
  • Patent number: 10439728
    Abstract: Described are various embodiments of a dual optical modulator, system and method. In one embodiment, an optical modulator modulates an input optical signal having a designated optical frequency. The modulator comprises first and second tunable modulators operable around the optical frequency and operatively disposed between a bus waveguide path and an opposed waveguide path. The modulator further comprises a relative optical phase-shifter optically coupled between the tunable modulators so to impart a relative optical phase shift between the bus waveguide path and the opposed waveguide path. The tunable modulators are respectively driveable to modulate a respective resonance thereof in complimentary directions relative to the optical frequency and thereby resonantly redirect a selectable portion of the input optical signal along the opposed waveguide path such that the relative optical phase shift is imparted thereto for output.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: October 8, 2019
    Assignee: Elenion Technologies, LLC
    Inventors: Thomas Wetteland Baehr-Jones, Michael J. Hochberg, Yang Liu
  • Patent number: 10393643
    Abstract: An optical vortex coronagraph scatterometer including a light source of wavelength ?, a scattering cell in optical communication with the light source, a circular aperture having a radius R at a distance d from the scattering cell in optical communication with the light source, a pivot point between the circular aperture and the scattering cell allowing relative movement of the light source and the scattering cell with respect to the circular aperture, a first lens at a focal length f1 between the circular aperture and an optical vortex element, and a second lens at a focal length f2 between the optical vortex element and a detector; and method for determining a scattering spectra at low and zero angles is disclosed.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: August 27, 2019
    Assignee: Rochester Institute of Technology
    Inventor: Grover A. Swartzlander, Jr.
  • Patent number: 10393503
    Abstract: A system and method for surface inspection of an object using optical coherence tomography (OCT) is provided. The method includes determining a surface profile of the object, the surface profile includes one or more regions on a surface of the object; moving the object relative to the OCT scanner head; and for each of the one or more regions on the surface of the object, performing: determining a working distance where the surface of the object at the respective region is within a present depth of field; determining an angle where the respective region is at the determined working distance from an OCT scanner head; directing the OCT scanner head at the determined angle towards the respective region when the respective region is at the determined working distance along the respective angle; and performing an A-scan of the object when the respective region is within the present depth of field.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: August 27, 2019
    Assignee: SIGHTLINE INNOVATION INC.
    Inventors: Wallace Trenholm, Lorenzo Pons
  • Patent number: 10386172
    Abstract: A system and method for surface inspection of an object using optical coherence tomography (OCT) with anticipatory depth of field adjustment is provided. The method includes determining a present working distance and one or more forward working distances; determining a present depth of field in which the surface of the object is in focus at the location of the present working distance and at as many of the consecutive forward surface locations as determined possible; changing to the present depth of field; performing an A-scan of the object; moving the object such that the scanner head is directed at each of the consecutive forward surface locations determined to be in the present depth of field; and performing an A-scan at each of the consecutive forward surface locations determined to be in the present depth of field.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: August 20, 2019
    Assignee: SIGHTLINE INNOVATION INC.
    Inventors: Wallace Trenholm, Lorenzo Pons
  • Patent number: 10365465
    Abstract: Systems and method for high-speed single-pixel quantitative phase contrast optical imaging are provided. This imaging technique can bypass the use of conventional image sensors and their associated speed limitations. The quantitative phase images can be acquired much faster than conventional quantitative phase imaging by a chirped-wavelength-encoding mechanism via wavelength-swept laser sources or optical time-stretch based on optical fibers, without the need for interferometric approaches.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: July 30, 2019
    Assignee: Versitech Limited
    Inventors: Kin Man Kevin Tsia, Tsz Wai Terence Wong, Kam Seng Andy Lau, Hin Long Tang