Of Highly Reflective Surface (e.g., Mirror) Patents (Class 356/513)
  • Patent number: 10359367
    Abstract: There is provided an inspection apparatus, including: an illuminator configured to irradiate a pattern, a detector configured to detect a reflected light from the pattern, and a calculator configured to compare a first change and a second change to calculate a deviation between the first and second changes. The first change which is a change, of a detection result of a pattern formed by a plurality of first exposure conditions, with respect to the first exposure conditions. The second change which is a change, of a detection result of a reflected light, from a pattern, generated by irradiating the pattern with the illumination light. The pattern is formed by a plurality of second exposure conditions each having a predetermined interval in a range which has at least one part overlapping with a range of the first exposure conditions, with respect to the second exposure conditions.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: July 23, 2019
    Assignee: NIKON CORPORATION
    Inventor: Kazuhiko Fukazawa
  • Patent number: 10337850
    Abstract: A measurement arrangement (10) and an associated method for interferometrically determining the surface shape (12) of a test object (14) includes a light source (16) providing an input wave (18) and a diffractive optical element (24). The diffractive optical element is configured to produce in each case by way of diffraction from the input wave a test wave (26), which is directed at the test object (14) and has a wavefront that is adapted at least partially to a desired shape of the optical surface, and a reference wave (28). The measurement arrangement furthermore includes a reflective optical element (30) that back-reflects the reference wave (28) and a capture device (36) that captures an interferogram produced by superposing the test wave after interaction with the test object and the back-reflected reference wave (28), in each case after a further diffraction at the diffractive optical element in a capture plane (48).
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: July 2, 2019
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Jochen Hetzler, Sebastian Fuchs, Hans-Michael Stiepan, Karl-Heinz Schuster
  • Patent number: 10136120
    Abstract: A mobile or portable device comprises an illuminating arrangement comprising a light source, and an amplitude splitting interferometer configured to form an interferogram of light emitted by the light source. The illuminating arrangement is configured to illuminate a target region lying at a distance of at least 10 cm from the device by the interferogram, thereby projecting a structured light pattern onto the target region. The device further comprises an image sensor configured to capture at least one digital image frame of the target region illuminated by the interferogram, and a processing unit configured to obtain image data of the at least one digital image frame, and determine depth of at least one object location in the target region relative to a reference location on the basis of the obtained image data.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: November 20, 2018
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Samuli Wallius, Mikko Juhola
  • Patent number: 10060792
    Abstract: A spectrometer includes a light detection element provided with a light passing part, a first light detection part, and a second light detection part, a support fixed to the light detection element such that a space is formed, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the first light detection part in the space. A plurality of second light detection parts is disposed in a region surrounding the second reflection part.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: August 28, 2018
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takafumi Yokino, Katsumi Shibayama
  • Patent number: 9970880
    Abstract: An apparatus for measuring a curvature of a thin film includes a light emitting module, a first optical module, a second optical module, a third optical module, and an image analysis module. The light emitting module emits a single laser to be used as an incident light. The incident light is transmitted through a first optical path provided by the first optical module, then the incident light is guided by the second optical module to be incident to the thin film through a second optical path. A reflected light reflected by the thin film is transmitted through the second optical path, then guided by the third optical module to be transmitted along a third optical path. The image analysis module determines the curvature of the thin film according to the characteristic of the reflected light.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: May 15, 2018
    Assignee: Industrial Technology Research Institute
    Inventors: Tzung-Te Chen, Hsueh-Hsing Liu, Chun-Wen Chu, Yi-Keng Fu
  • Patent number: 9857169
    Abstract: An interferometer includes a short-coherence source and an internal path-matching assembly contained within its housing. Because path matching occurs within the housing of the interferometer, it is removed from external environmental factors that affect measurements. Therefore, a single cateye measurement of an exemplary surface can be performed in advance and stored as a calibration for subsequent radius-of-curvature measurements. In one embodiment, a path-matching stage is incorporated into a dynamic interferometer where orthogonally polarized test and reference beams are fed to a dynamic imaging system. In another embodiment, orthogonal linearly polarized test and reference beams are injected into a remote dynamic interferometer by means of one single-mode polarization-maintaining optical fiber.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: January 2, 2018
    Assignee: 4D TECHNOLOGY CORPORATION
    Inventors: Michael North Morris, James Millerd
  • Patent number: 9804504
    Abstract: A method of metrology target design is described. The method includes determining a sensitivity of a parameter for a metrology target design to an optical aberration, determining the parameter for a product design exposed using an optical system of a lithographic apparatus, and determining an impact on the parameter of the metrology target design based on the parameter for the product design and the product of the sensitivity and one or more of the respective aberrations of the optical system.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: October 31, 2017
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Guangqing Chen, Eric Richard Kent, Jen-Shiang Wang, Omer Abubaker Omer Adam
  • Patent number: 9733485
    Abstract: A collimating lens includes at least two lens groups, each having an aspherical surface. The collimating lens also includes a flat diffraction lens disposed nearest to an image plane.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: August 15, 2017
    Assignee: Himax Technologies Limited
    Inventors: Han-Ching Lin, Yin Dong Lu, Han Yi Kuo
  • Patent number: 9640682
    Abstract: A device for emitting electromagnetic radiation includes at least one optical semiconductor element configured to generate electromagnetic radiation, at least one photodiode, and at least one beam splitter. The beam splitter is arranged relative to the optical semiconductor element and the photodiode in such a way that one portion of the electromagnetic radiation generated by the optical semiconductor element passes through the beam splitter and a further portion of the electromagnetic radiation generated by the optical semiconductor element is reflected by the beam splitter and is directed onto the photodiode.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: May 2, 2017
    Assignee: Robert Bosch GmbH
    Inventors: Richard Fix, Patrick Sonstroem, Gottfried Doehler
  • Patent number: 9574935
    Abstract: A system for generating extreme ultraviolet light may include a chamber, a target supply device configured to supply a target material into the chamber, a laser apparatus configured to output a laser beam to irradiate the target material, a wavefront adjuster configured to adjust a wavefront of the laser beam, an imaging optical system configured to focus the laser beam reflected by the target material, an image detector configured to capture an image of the laser beam focused by the imaging optical system, and a controller configured to control the wavefront adjuster based on the captured image.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: February 21, 2017
    Assignee: GIGAPHOTON INC.
    Inventors: Masato Moriya, Osamu Wakabayashi
  • Patent number: 9354212
    Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: May 31, 2016
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Yoav Berlatzky, Amir Shoham, Ido Dolev
  • Patent number: 9332626
    Abstract: An extreme ultraviolet (EUV) light source is provided. The EUV light source comprises a spray nozzle array having a plurality of spray nozzles configured to spray a plurality of rows of droplets to an irradiating position. The EUV light source also includes a laser source having a first reflective mirror and a second reflective mirror configured to generate a first laser beam and a second laser beam, and to cause the first laser beam and the second laser beam to sequentially bombard the plurality of droplets arriving at the irritating position to generate EUV light with increased output power. Further, the EUV light source includes a light focusing device a light focusing device comprising a first partial focusing mirror and a second partial focusing mirror configured to perform a rotating scanning to collect EUV light and focus the collected EUV light at a central focusing point.
    Type: Grant
    Filed: October 16, 2015
    Date of Patent: May 3, 2016
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Qiang Wu, Liwan Yue
  • Patent number: 9207123
    Abstract: A temperature insensitive (athermal) channeled spectropolarimeter (CSP) is described. The athermal CSP includes a crystal retarder formed of a biaxial crystal. The crystal retarder has three crystal axes, wherein each axis has its own distinct index of refraction. The axes are oriented in a particular manner, causing an amplitude modulating carrier frequency induced by the crystal retarder to be thermally invariant. Accordingly, a calibration beam technique can be used over a relatively wide range of ambient temperatures, with a common calibration data set.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: December 8, 2015
    Assignee: Sandia Corporation
    Inventor: Julia Craven Jones
  • Patent number: 9080861
    Abstract: The observation device 1 is to observe the surface or the inside of an observation object 9, that has light sources 11 and 12, lenses 21 to 25, an aperture 31, an optical multiplexer 41, an optical demultiplexer 42, a half mirror 43, an image pickup unit 51, an analyzing unit 52, a display unit 53, a light receiving unit 61, a displacement detecting unit 62, a piezoelectric actuator 71, a drive unit 72, a mirror 73, a stage 81, a drive unit 82, and a control unit 90. The analyzing unit 52 determines a complex amplitude of an interference light figure taken as an image by the image pickup unit 51 with a phase shift technique after an optical path difference is set to each target value in sequence, and determines an amount of change per certain time of a phase component of a reflected light generated on the surface or the inside of the observation object 9 on the basis of an absolute value of an amount of change per certain time of the determined complex amplitude and an absolute value of the complex amplitude.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: July 14, 2015
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Toyohiko Yamauchi, Hidenao Iwai
  • Patent number: 9052189
    Abstract: A measurement apparatus includes: a vibration detection surface which has a set relative position with respect to a test surface, and is irradiated with a part of the measurement light; an image sensor configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: June 9, 2015
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Yuya Nishikawa
  • Patent number: 9013590
    Abstract: Methods and apparatus for pixel multiplication in optical imaging systems. In one example, an expanded optical point spread function, referred to as a code spread function, is used to phase modulate an incident electromagnetic wavefront, and digital processing, including correlation techniques, are used to filter and process the modulated wavefront to recover sub-pixel information from an image produced by the wavefront on a pixilated detector array.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: April 21, 2015
    Assignee: Raytheon Company
    Inventor: Chet L. Richards
  • Patent number: 9002094
    Abstract: A reference image to serve as a reference for a non-defective determination is previously stored in association with identification information for identifying an inspection object. An image of the inspection object is displayed side by side with the reference image of corresponding identification information. A drawn position of the reference image and a drawn position of the acquired image are aligned, adjustment is made so as to make brightness of the reference image coincide with brightness of the acquired image, and adjustment is made so as to make a focus on the reference image coincide with a focus on the acquired image. Adjustment is made so as to make a focus of the reference image coincide with a focus of the acquired image.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: April 7, 2015
    Assignee: Kenyence Corporation
    Inventor: Aruto Hirota
  • Patent number: 8947675
    Abstract: The method for measuring profile of an aspheric surface projects an illumination light onto the aspheric surface and introduces a reflected light reflected by the aspheric surface to a sensor through an optical system. The method provides, to a wavefront of the illumination light, a curvature bringing an absolute value of an angle of the reflected light to a smaller value than a maximum value of absolute values of angles of optical system side peripheral rays, locates an exit pupil such that the absolute value of the reflected light angle is smaller than the maximum value, provides, to a sensor conjugate surface, a curvature and a position causing rays of the reflected light not to intersect on the sensor conjugate surface. The sensor conjugate surface, the wavefront of the illumination light and the aspheric surface have a same one of convex and concave surfaces toward a same direction.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: February 3, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yoshiki Maeda
  • Patent number: 8873067
    Abstract: Provided herein is a TSV measuring interferometer that uses a variable field stop that adjusts such that a light is focused at an inlet and at a bottom surface of a TSV when measuring a diameter and depth of the TSV, thereby reducing a measurement time and result data, the interferometer also using a telecentric lens that adjusts the light injected into the TSV to be a straight line, so as to obtain a sufficient amount of light reaching the bottom surface to improve the accuracy of measurement even in a TSV having a large aspect ratio.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: October 28, 2014
    Assignee: Snu Precision Co., Ltd.
    Inventors: Ki Hun Lee, Heung Hyun Shin, Heui Jae Pahk
  • Publication number: 20140313517
    Abstract: Apparatus and methods for performing wavefront-based and profile-based measurements of an aspheric surface are disclosed. The apparatus includes an interferometric wavefront measurement system that collects wavefront-based measurement data of the aspheric surface. The apparatus also includes a profile measurement system that performs at least one non-contact profile-based measurement of the aspheric surface to collect profile-based measurement data of the aspheric surface. The measurements are performed without removing the aspheric element from a rotatable base. The two measurements are then used to form a combined measurement of the aspheric surface.
    Type: Application
    Filed: March 13, 2014
    Publication date: October 23, 2014
    Applicant: CORNING INCORPORATED
    Inventor: STEVEN JAMES VANKERKHOVE
  • Patent number: 8853604
    Abstract: An Integrated Laser Field Conjugation System (ILFCS) for end-to-end compensation of high-energy laser for propagation through turbulence with non-cooperative target. ILFCS using interferometric slaving technique and stand-alone adaptive optical systems to effect pre-compensation of amplitude and phase aberrations in turbulent medium, providing pre-compensation for aberrations in a laser amplifier. Performing compensation functions in low-power beam paths, increasing capability, reducing cost, reducing size compensation components for phase correction devices. Pre-compensating low-power master oscillator beam for aberrations in both high-power amplifier and turbulent propagation path-to-target with configuration enabling wavefront sensing of aberrations. Can be configured to perform phase compensation, or compensation of phase/amplitude aberrations. Capability to compensate aberrations in master oscillator beam.
    Type: Grant
    Filed: December 7, 2010
    Date of Patent: October 7, 2014
    Inventor: Jeffrey D. Barchers
  • Patent number: 8842292
    Abstract: Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: September 23, 2014
    Assignee: Institute of Optics and Electronics, Chinese Academy of Sciences
    Inventors: Xin Jia, Tingwen Xing
  • Publication number: 20140233038
    Abstract: The present invention is directed to more accurately acquiring shape data than conventional techniques. After an imaging unit images an interference fringe, a calculation unit acquires the captured image from the imaging unit. The calculation unit extracts a ring zone region where the interference fringe is sparse in the captured image from each captured image, and calculates a phase distribution of the interference fringe in each ring zone region. The calculation unit acquires a deviation component having an orientation and an amount both unchangeable along a circumferential direction of a circle centered at the optical axis of the subject light by analyzing the interference fringe contained in each acquired captured image. Further, the calculation unit calculates positions of characteristic points of a calibrator, and calculates a distortion component. Then, the calculation unit calculates the shape data corrected based on the deviation component and the distortion component.
    Type: Application
    Filed: February 14, 2014
    Publication date: August 21, 2014
    Inventor: Atsushi Maeda
  • Patent number: 8786864
    Abstract: A circular common-path point diffraction interference wavefront sensor includes an optical matching system, a beam-splitter, a first reflection mirror, a second reflection mirror, a first Fourier lens, a second Fourier lens, a charge-coupled device (CCD) detector, a computer system, and a two-pinhole mask having a reference pinhole and a testing window and placed at a confocal plane of the first Fourier lens and the second Fourier lens. A testing beam is divided into two beams through the beam-splitter. One beam makes the pinhole diffraction by the reference pinhole, thereby producing the approximately ideal plane wave as the reference wave. Another beam passes through the testing window almost without any attenuation as the signal wave. The spatially linear carrier frequency is introduced by adjusting the tilt angle of the beam-splitter. The present invention is adapted for all kinds of dynamic and static detection field of wavefront phase.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: July 22, 2014
    Assignee: Sichuan University
    Inventors: Guoying Feng, Yongzhao Du, Shouhuan Zhou
  • Patent number: 8687203
    Abstract: A method of determining a shape of an optical test surface (14) includes: with adaptation optics (20), adapting a wavefront of a measuring beam (30) to a desired shape of the optical test surface (14), interferometrically measuring the shape of the optical test surface (14) with the adapted measuring beam, irradiating the adapted measuring beam at different angles of incidence onto the optical test surface and respectively measuring the wavefront of the measuring beam after the interaction of the measuring beam with the optical test surface (14), establishing the effect of the adaptation optics (20) upon the interferometric measurement result from the wavefronts measured for the individual angles of incidence, and determining the shape of the optical test surface (14) by removing the established effect of the adaptation optics (20) from the interferometric measurement result.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: April 1, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Bernd Doerband
  • Patent number: 8675206
    Abstract: Provided is a measurement method or apparatus that can reduce the time for measuring the shape of an entire test surface. Each of a plurality of measurement ranges is set so that one measurement range overlaps a portion of at least another measurement range to form an overlap region, each measurement range being a portion of the test surface. Then, the shape of the test surface is measured at a first resolution in a first measurement range among the plurality of measurement ranges, and is measured at a second resolution in a second measurement range. Pieces of data of the shapes of the test surface in the plurality of measurement ranges are stitched together using the resulting measurement data to calculate the shape of the test surface.
    Type: Grant
    Filed: July 13, 2011
    Date of Patent: March 18, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yumiko Osaki
  • Patent number: 8675205
    Abstract: The time delay (and therefore the OPD) between object and reference beams in an interferometer is manipulated by changing the spectral properties of the source. The spectral distribution is tuned to produce a modulation peak at a value of OPD equal to the optical distance between the object and reference arms of a Fizeau interferometer, thereby enabling the use of its common-axis configuration to carry out white-light measurements free of coherence noise. Unwanted interferences from other reflections in the optical path are also removed by illuminating the object with appropriate spectral characteristics. OPD scanning is implemented without mechanical means by altering the source spectrum over time so as to shift the peak location by a predetermined scanning step between acquisition frames. The invention and its advantages are applicable to optical coherence tomography as well as conventional white light interferometry.
    Type: Grant
    Filed: March 29, 2013
    Date of Patent: March 18, 2014
    Inventor: Artur G. Olszak
  • Patent number: 8593642
    Abstract: Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurem
    Type: Grant
    Filed: March 12, 2012
    Date of Patent: November 26, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Rolf Freimann, Bernd Doerband, Stefan Schulte, Albrecht Hof, Frank Riepenhausen, Matthias Manger, Dietmar Neugebauer, Helmut Issler, Armin Bich
  • Patent number: 8576408
    Abstract: A method of testing figure quality of a convex mirror in which an optical quality substrate material is used. Three separate interferometric null tests are carried out to produce three independent sets of optical path difference (OPD) data. Null lenses, or nulling computer generated holograms (CGHs), are designed and used as needed in each test setup so that spherical aberration is corrected. From the three sets of OPD data, surface figure errors on the rear and front surfaces of the test optic are calculated as well as the OPD error introduced by refractive index inhomogeneity in the substrate material. The rear surface is then corrected, generally using a computer-controlled polishing machine, to reduce rear surface errors to a manageably small level. The front convex surface of the test optic is then corrected to reduce surface figure error to within some specified amount.
    Type: Grant
    Filed: April 11, 2011
    Date of Patent: November 5, 2013
    Inventor: Thomas Stewart McKechnie
  • Patent number: 8526008
    Abstract: A Fizeau interferometer incorporates an off-axis paraboloidal reflector that forms virtual images of reference and test surfaces and a camera lens that converts the virtual images into real images on a camera detector surface. The camera detector surface is arranged together with the camera lens to accommodate tilting of the virtual images by the off-axis paraboloidal reflector.
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: September 3, 2013
    Assignee: Corning Incorporated
    Inventors: Joshua Monroe Cobb, Thomas James Dunn, John Weston Frankovich
  • Patent number: 8526009
    Abstract: A low coherent light from a white light source is emitted to a sample surface. A detour distance in a detour section is adjusted such that an optical path difference between a reference light and a sample light is equal to or shorter than a coherence length of interference light. The interference light is incident on an image sensor only when an inclination angle of a diffraction grating plate and a wavelength of the interference light satisfy a predetermined condition. Thus, an interference fringe image is formed. Based on each of the interference fringe images taken on a wavelength-by-wavelength basis of the interference light and an optical distance between a reference surface and the sample surface along an optical path of a measuring light at the time of taking the interference fringe image, a shape of the sample surface is measured.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: September 3, 2013
    Assignee: Fujifilm Corporation
    Inventor: Nobuaki Ueki
  • Patent number: 8514406
    Abstract: The present invention provides a measurement apparatus which measures a surface shape of a measurement target surface, the apparatus including an optical system configured to split light from a light source into measurement light and reference light, guide the measurement light onto the measurement target surface, and guide the reference light onto a reference surface, a detection unit configured to detect an intensity of the measurement light reflected by the measurement target surface, an intensity of the reference light reflected by the reference surface, and an interference pattern formed between the measurement light reflected by the measurement target surface and the reference light reflected by the reference surface, and a processing unit configured to obtain a surface shape of the measurement target surface based on an interference signal of the interference pattern detected by the detection unit.
    Type: Grant
    Filed: February 10, 2010
    Date of Patent: August 20, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hideki Matsuda
  • Patent number: 8472030
    Abstract: A surface profile measuring apparatus includes a first image pickup device that obtains an interference pattern, an optical system that guides a measuring beam and a reference beam to the first image pickup device, a second image pickup device with which a distribution of light quantity of a beam from a light source traveling thereto avoiding the optical system is measured, and an arithmetic unit that calculates a profile of a target surface from the interference pattern. A distribution of light quantity of a beam from the light source transmitted through the optical system is measured with the first image pickup device. The profile of the target surface calculated by the arithmetic unit is corrected on the basis of the distributions of light quantity measured with the first and second image pickup devices.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: June 25, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tetsuji Oota
  • Patent number: 8456644
    Abstract: Deformations of a surface of a test object can be measured by attaching mirrors to a surface of a test object, each mirror having a reflective surface with a dimension and a radius of curvature smaller than those of the surface of the test object. Light is directed towards the mirrors and a reference surface, and interference patterns are generated using light reflected from the mirrors and the reference surface. Changes in the surface of the test object are determined based on the interference patterns.
    Type: Grant
    Filed: September 2, 2010
    Date of Patent: June 4, 2013
    Assignee: Zygo Corporation
    Inventors: Christopher J. Evans, John Filhaber, Vivek G. Badami, Jan Liesener
  • Patent number: 8446458
    Abstract: A miniaturized Holographic Fourier transform imaging spectrometer HFTIS, made from simple all-reflective components and with no moving parts, is provided. This HFTIS includes an all-reflective two beam interferometer, which provides two interfering beams; a two-dimensional detector array to detect the interference pattern created by the beams; a computing machine for correcting the distortions in the pattern and calculating the spectrum from the corrected interferogram. The same principle can be used to build spot spectrometers, line-scan imaging spectrometers (also called array spectrometers or line-scan hyperspectral cameras) as well as two-dimensional instantaneous imaging spectrometers (also called staring hyperspectral cameras). In all variants of HFTIS that can be built using this invention, the wave-signal collecting element can also be built of all-reflective components.
    Type: Grant
    Filed: December 1, 2008
    Date of Patent: May 21, 2013
    Inventor: Hamed Hamid Muhammed
  • Patent number: 8422029
    Abstract: A method of testing a convex mirror surface figure in which an optical quality substrate material is used having a convex front surface and a rear surface polished to a precise optical figure to create a lens. The lens is then tested by a standard interferometric or wavefront lens-testing method and the convex surface coated once a desired curvature is obtained. Null testing may be attained by passing a collimated interferometer beam through a focusing lens shaped to counter the predicted spherical aberration introduced by a perfect convex mirror/lens.
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: April 16, 2013
    Inventor: Thomas Stewart McKechnie
  • Patent number: 8373865
    Abstract: A method detects a topology of a reflective surface. The method includes providing an optical fiber positioned such that light emitted from the optical fiber is reflected by at least a portion of the reflective surface. The optical fiber and the portion of the reflective surface form an optical resonator having an optical resonance with a resonance lineshape. The method further includes emitting light from the optical fiber while the optical fiber is at a plurality of positions along the reflective surface. The light emitted from the optical fiber irradiates a corresponding plurality of portions of the reflective surface. The method further includes measuring a change of the resonance lineshape due to the irradiation of the plurality of portions of the reflective surface.
    Type: Grant
    Filed: January 23, 2012
    Date of Patent: February 12, 2013
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Onur Kilic, Michel J. F. Digonnet, Gordon S. Kino, Olav Solgaard
  • Patent number: 8345263
    Abstract: The present invention provides a measurement apparatus that illuminates a surface to be tested having an aspheric surface using light beams that form spherical waves to measure a figure of the surface to be tested, including a detection unit configured to detect interference patterns between light beams from the surface to be tested and light beams from a reference surface, and a controller configured to control processing for obtaining a figure of the surface to be tested based on the interference patterns detected by the detection unit.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: January 1, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventor: Akihiro Nakauchi
  • Patent number: 8314937
    Abstract: The present invention provides a measurement apparatus that illuminates a surface to be tested having an aspheric surface using light beams that form spherical waves to measure a figure of the surface to be tested, including a detection unit configured to detect interference patterns between light beams from the surface to be tested and light beams from a reference surface, and a controller configured to control processing for obtaining a figure of the surface to be tested based on the interference patterns detected by the detection unit.
    Type: Grant
    Filed: January 11, 2010
    Date of Patent: November 20, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventor: Akihiro Nakauchi
  • Publication number: 20120243001
    Abstract: An apparatus and associated method for testing a non-symmetric (e.g., phi-polynomial) surface. The apparatus uses several simple (singlet) optical elements (e.g., an Offner null configuration) and a tilted optic under test in combination with an active optical element (e.g., actuated, deformable membrane mirror, optical phase modulator, etc.) that together form a null or quasi-null that allows for conventional null-based interferometry. This solution solves the problem of exceeding the dynamic range of a conventional interferometer when trying to test non-symmetric optical surfaces.
    Type: Application
    Filed: March 26, 2012
    Publication date: September 27, 2012
    Applicant: UNIVERSITY OF ROCHESTER
    Inventors: Jannick P. Rolland, Kyle Fuerschbach
  • Patent number: 8275573
    Abstract: An adaptive algorithm is tailored to fit the local fringe frequency of single-frame spatial-carrier data under analysis. Each set of data points used sequentially by the algorithm is first processed with a Fourier Transform to find the local frequency of the fringes being analyzed. That information is then used to adapt the algorithm to the correct phase step thus calculated, thereby optimizing the efficiency and precision with which the algorithm profiles the local surface area. As a result, defects are identified and measured with precision even when the slope of the surface varies locally to the point where the algorithm without adaptive modification would not be effective to measure them. Once so identified, the defects may be measured again locally with greater accuracy by conventional temporal PSI.
    Type: Grant
    Filed: November 23, 2009
    Date of Patent: September 25, 2012
    Assignee: Bruker Nano, Inc.
    Inventors: Joanna Schmit, Florin Munteanu
  • Patent number: 8269975
    Abstract: A device for calibrating a wavefront measuring system (WMS) includes a computer generated hologram (CGH) disposed in an axial path of light traveling to or from the WMS, and an imaging lens disposed in the axial path between the WMS and the CGH. An entrance port of the WMS is configured to form a pupil image of a device under test, where a center of curvature (CoC) of the device under test is located along the axial path between the pupil image and the device under test. The CGH is located along the axial path at the CoC, when the imaging lens is inserted between the CoC and the WMS.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: September 18, 2012
    Assignee: Exelis, Inc.
    Inventor: Eugene Olczak
  • Patent number: 8269982
    Abstract: A system for measuring deformation of at least one surface of an object including an interferometer for receiving illumination reflected from the surface of the object, and a surface treatment disposed on the surface of the object for providing a retro-reflective patina. The retro-reflective patina is configured to reflect the illumination from the surface of the object. The retro-reflective patina is attached to the surface of the object and may include a plurality of cube corners, or a plurality of dielectric spheres, or a combination of cube corners and dielectric spheres. Impinging light onto the object is provided by an optical source that may be separate from or integral to the interferometer. The impinging light may be directed toward the object through an objective lens, which is also used for receiving the illumination from the object. Alternatively, the impinging light may be directed toward the object by first bypassing the objective lens.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: September 18, 2012
    Assignee: Exelis, Inc.
    Inventors: Gene Olczak, Stephen D O'Donohue, Thomas W Dey, Cormic K Merle
  • Patent number: 8213017
    Abstract: The invention relates to an analytical system and method for generating and metering optical signals. The invention includes an optical system having an illuminating system and a sensor platform. The illuminating system includes an arrangement identified as “SLM” for the temporally rapidly variable spatial light modulation, by which in an operating state, illuminating patterns of a freely selectable and rapidly variable geometry, which can be determined by the settings of the SLM, can be generated on the sensor platform from an illuminating light, which enters into this SLM and which includes a substantially homogenous intensity distribution in the in the cross section of the illuminating light at right angles to its direction of expansion.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: July 3, 2012
    Inventor: Max Wiki
  • Publication number: 20120154819
    Abstract: A Fizeau interferometer incorporates an off-axis paraboloidal reflector that forms virtual images of reference and test surfaces and a camera lens that converts the virtual images into real images on a camera detector surface. The camera detector surface is arranged together with the camera lens to accommodate tilting of the virtual images by the off-axis paraboloidal reflector.
    Type: Application
    Filed: December 6, 2011
    Publication date: June 21, 2012
    Inventors: Joshua Monroe Cobb, Thomas James Dunn, John Weston Frankovich
  • Patent number: 8203109
    Abstract: A beam director subsystem and method for use in a weapons system. The beam director subsystem includes a source of electromagnetic radiation for generating a high energy laser (HEL) beam. The electromagnetic radiation is directed to a secondary mirror that reflects the electromagnetic radiation to a primary mirror for output of the HEL beam. The secondary mirror is generally curved and expands the electromagnetic radiation received from the source prior to outputting the HEL beam from the primary mirror. The subsystem further includes a track telescope coupled to the housing. The track telescope has a track detector configured to receive electromagnetic radiation originating from the HEL and electromagnetic radiation emitted from an illuminator and reflected from an airborne target.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: June 19, 2012
    Assignee: Raytheon Company
    Inventors: Brian B. Taylor, David J. Park, Dwight L. Denney, David G. Jenkins, John R. Rutkowski, Anees Ahmad, Daniel J. Mosier, Daniel Vukobratovich
  • Patent number: 8169620
    Abstract: A phase imaging method for an optical wavefront acquires a plurality of phase images of the optical wavefront using a phase imager. Each phase image is unique and is shifted with respect to another of the phase images by a known/controlled amount that is less than the size of the phase imager's pixels. The phase images are then combined to generate a single high-spatial resolution phase image of the optical wavefront.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: May 1, 2012
    Assignee: The United States of America, as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: H. Philip Stahl, James T. Mooney
  • Patent number: 8154733
    Abstract: The system and the method of the present invention differ from the prior art in that radii of curvature of any length of spherical and cylindrical test surfaces can be optically measured, with only a supplementary dual-focus lens being required in addition to an interferometer or an autocollimator. The supplementary dual-focus lens has a first focal plane, into which the surface vertex of the test surface is positioned, which establishes the cat's eye position (P(cat)), and a second focal plane into which the center of curvature of the test surface is moved, which establishes the autocollimation position (P(aut)) for the test surface. The radius of curvature of the test surface is determined from the distance between the focal planes (D(foc)) and the path of movement which can be reduced to zero.
    Type: Grant
    Filed: September 24, 2009
    Date of Patent: April 10, 2012
    Assignee: Jenoptik Optical Systems GmbH
    Inventors: Stefan Franz, Roland Schreiner
  • Patent number: 8089634
    Abstract: Optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that a long wave variation of the actual shape of the optical surface with respect to the target shape is limited to a maximum value of 0.2 nm, wherein the long wave variation includes only oscillations having a spatial wavelength equal to or larger than a minimum spatial wavelength of 10 mm.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: January 3, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jochen Hetzler, Frank Schillke, Stefan Schulte, Rolf Freimann, Bernd Doerband
  • Patent number: 8089633
    Abstract: A method of testing a convex mirror surface figure in which an optical quality substrate material is used having a convex front surface and a rear surface polished to a precise optical figure to create a lens. The lens is then tested by a standard interferometric or wavefront lens-testing method and the convex surface coated once a desired curvature is obtained. Null testing may be attained by passing a collimated interferometer beam through a focusing lens shaped to counter the predicted spherical aberration introduced by a perfect convex mirror/lens. A nominal rear surface figure of the mirror/lens may be used if a precisely figured test window is contacted with the rear surface using a refractive index-matching substance with an index of refraction closely matching the index of refraction of the test optic.
    Type: Grant
    Filed: May 17, 2009
    Date of Patent: January 3, 2012
    Inventor: Thomas Stewart McKechnie