By Wavefront Detection Patents (Class 356/512)
  • Patent number: 11313794
    Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.
    Type: Grant
    Filed: October 6, 2020
    Date of Patent: April 26, 2022
    Assignee: Orbotech Ltd.
    Inventors: Ram Oron, Hanina Golan, Ilia Lutsker, Gil Tidhar
  • Patent number: 11293750
    Abstract: A film thickness measuring apparatus including: a measurement light path for irradiating a measurement target object with light from a light source; a correction light path for irradiating a reference member with light from the light source; and a light switching unit that selectively guides reflected light from the measurement target object or reflected light from the reference member, to a spectroscope.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: April 5, 2022
    Assignee: Otsuka Electronics Co., Ltd.
    Inventors: Shiro Kawaguchi, Kazuya Nakajima
  • Patent number: 11243067
    Abstract: Embodiments of systems and methods for measuring a surface topography of a semiconductor chip are disclosed. In an example, a method for measuring a surface topography of a semiconductor chip is disclosed. A plurality of interference signals each corresponding to a respective one of a plurality of positions on a surface of the semiconductor chip are received by at least one processor. The plurality of interference signals are transformed by the at least one processor into a plurality of spectrum signals each corresponding to the respective one of the positions on the surface of the semiconductor chip. The spectrum signals are classified by the at least one processor into a plurality of categories using a model. Each of the categories corresponds to a region having a same material on the surface of the semiconductor chip.
    Type: Grant
    Filed: June 24, 2020
    Date of Patent: February 8, 2022
    Inventors: Sicong Wang, Xiaoye Ding, Yi Zhou
  • Patent number: 11237117
    Abstract: Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response from the received light, and comparing the received spectral response to an expected spectral response.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: February 1, 2022
    Assignees: BWXT Nuclear Operations Group, Inc., BWXT NOG Technologies, Inc.
    Inventors: Aaron C. Havener, James D. Jogerst, Thomas C. Mohr, Keith B. Rider
  • Patent number: 11237120
    Abstract: A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: February 1, 2022
    Assignee: KLA-Tencor Corporation
    Inventors: Vincent Immer, Tal Marciano, Etay Lavert
  • Patent number: 11199396
    Abstract: A compensation optical unit (30) for a measurement system (10) for determining a shape of an optical surface (12) of a test object (14) by interferometry generates a measuring wave (44), directed at the test object, with a wavefront that is at least partly adapted to a target shape of the optical surface from an input wave (18). The unit includes first (32) and second (34) optical elements disposed in a beam path of the input wave. The second optical element is a diffractive optical element configured to split the input wave into the measuring wave and a reference wave (42) following an interaction with the first optical element. At least 20% of a refractive power of the entire compensation optical unit is allotted to the first optical element, and this allotted refractive power has the same sign as the refractive power of the entire compensation optical unit.
    Type: Grant
    Filed: March 28, 2020
    Date of Patent: December 14, 2021
    Inventors: Jochen Hetzler, Stefan Schulte
  • Patent number: 11145120
    Abstract: A surface generation device includes: a profile curve setting unit 2 configured to set a profile curve fitted to a part of shape data, a profile curve movement unit 3 configured to move the profile curve so as to satisfy a predetermined condition, and a surface generation unit 4 configured to generate a surface defined by a locus obtained by moving the profile curve satisfying the predetermined conditions. The predetermined conditions include a condition in which a locus of one point (for example, midpoint) on the profile curve becomes a line of curvature of the surface to be generated. Using such a condition, it is possible to efficiently obtain the high quality surface by setting the line of curvature indicating a flow of the surface as a guide line of a sweep method without repeating trial and error many times.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: October 12, 2021
    Assignees: Nihon Unisys, Ltd., Yokohama National University
    Inventors: Shoichi Tsuchie, Takashi Maekawa
  • Patent number: 11067477
    Abstract: The wavefront measurement device performs: generating a first pupil function at a reference wavelength based on input data of a wavefront aberration; calculating a first image plane amplitude at a reference wavelength based on the first pupil function; generating a second pupil function at a multi-wavelength region; calculating a second image plane amplitude at the multi-wavelength region based on the second pupil function; correcting a measured point spread function using the first and second image plane amplitudes; applying a constraint condition using the corrected point spread function to the first image plane amplitude to correct the first image plane amplitude; generating a third pupil function based on the corrected first image plane amplitude; and calculating a wavefront aberration on a pupil plane based on the third pupil function.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: July 20, 2021
    Inventors: Masataka Suzuki, Takayuki Yanagisawa, Shigetaka Itakura, Takayasu Anada
  • Patent number: 10935364
    Abstract: Disclosed are systems and methods to extract information about the size and shape of an object by observing variations of the radiation pattern caused by illuminating the object with coherent radiation sources and changing the wavelengths of the source. Sensing and image-reconstruction systems and methods are described for recovering the image of an object utilizing projected and transparent reference points and radiation sources such as tunable lasers. Sensing and image-reconstruction systems and methods are also described for rapid sensing of such radiation patterns. A computational system and method is also described for sensing and reconstructing the image from its autocorrelation. This computational approach uses the fact that the autocorrelation is the weighted sum of shifted copies of an image, where the shifts are obtained by sequentially placing each individual scattering cell of the object at the origin of the autocorrelation space.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: March 2, 2021
    Inventor: Lyle G. Shirley
  • Patent number: 10866082
    Abstract: A method for adjusting a measuring device having an interferometer unit with an optical axis, an optical distance measuring device with a measuring axis and a support slide that is moveable along a slide axis. The measuring axis is first aligned parallel to the slide axis. An adjustment body with a first spherical reflection and/or diffraction surface and a retro reflector at the back side is arranged at the support slide. It is brought into a first confocal position, in which a first center point of the first spherical reflection/diffraction surface coincides with the focus of the spherical wavefront that is emitted from the interferometer unit. The retro reflector defines a vertex that is located close to the first center point, such that the measuring axis of the distance measuring device extends close to the focus of the emitted spherical wavefront. In doing so, Abbe-faults can be reduced or eliminated.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: December 15, 2020
    Assignee: Carl Mahr Holding GmbH
    Inventors: Axel Wiegmann, Markus Lotz
  • Patent number: 10831014
    Abstract: Methods, devices and systems for up to three-dimensional scanning of target regions at high magnification are disclosed.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: November 10, 2020
    Assignee: The Trustees of Columbia University in the City of New York
    Inventor: Elizabeth M. C. Hillman
  • Patent number: 10742963
    Abstract: An image capturing apparatus includes an image sensing device, a first acquisition unit, a second acquisition unit, and a display control unit. The first acquisition unit acquires an image acquired by using the image sensing device and three-dimensional information regarding a subject in the image. The three-dimensional information includes depth information regarding the image. The second acquisition unit acquires a shaping resolution indicating a resolution used by a shaping device to shape an object in a three-dimensional shape of the subject. The display control unit displays, based on the shaping resolution and the three-dimensional information regarding the subject, a relationship between a size of the subject and magnitude of the shaping resolution.
    Type: Grant
    Filed: November 1, 2016
    Date of Patent: August 11, 2020
    Assignee: Canon Kabushiki Kaisha
    Inventor: Go Naito
  • Patent number: 10739277
    Abstract: A measurement system is presented for use in metrology measurements on patterned samples. The system comprises: at least one light source device configured to generate broadband light, at least one detection device configured to provide spectral information of detected light, and an optical system. The optical system comprises at least an oblique channel system for directing incident light generated by the light source(s) along an oblique illumination channel onto a measurement plane, on which a sample is to be located, and directing broadband light specularly reflected from the sample along a collection channel to the detection device(s). The optical system further comprises an interferometric unit comprising a beam splitting/combining device and a reference reflector device.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: August 11, 2020
    Inventors: Yoav Berlatzky, Valery Deich, Dror Shafir, Danny Grossman
  • Patent number: 10704888
    Abstract: A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: July 7, 2020
    Inventors: Hiroyuki Ishigaki, Takahiro Mamiya
  • Patent number: 10687738
    Abstract: Systems and methods are provided for performing phase-sensitive optical coherence tomographic (PS-OCT) measurements involving the vibrographic response of an acoustic stimulus. Detected signals are processed to provide sampled time-dependent vibrographic data characterizing a vibratory amplitude and phase response over one or more periods of the acoustic stimulus. The sampled time-dependent vibrographic data is processed to suppress the sinusoidal signal component associated with the acoustic stimulus, thereby providing a residual data associated with noise. The residual data is processed to obtain an estimate of the motion noise, and the motion noise is subtracted from the sampled time-dependent vibrographic data in order to provide noise-corrected vibrographic data. The noise-corrected vibrographic data can be processed to obtain one or more vibrographic measures and/or one or more images.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: June 23, 2020
    Inventors: Daniel MacDougall, Robert Adamson
  • Patent number: 10677589
    Abstract: A substrate having a plurality of features for use in measuring a parameter of a device manufacturing process and associated methods and apparatus. The measurement is by illumination of the features with measurement radiation from an optical apparatus and detecting a signal arising from interaction between the measurement radiation and the features. The plurality of features include first features distributed in a periodic fashion at a first pitch, and second features distributed in a periodic fashion at a second pitch, wherein the first pitch and second pitch are such that a combined pitch of the first and second features is constant irrespective of the presence of pitch walk in the plurality of features.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: June 9, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Alok Verma, Hugo Augustinus Joseph Cramer, Thomas Theeuwes, Anagnostis Tsiatmas, Bert Verstraeten
  • Patent number: 10663408
    Abstract: A method for use in optical measurements on patterned structures, the method including performing a number of optical measurements on a structure with a measurement spot configured to provide detection of light reflected from an illuminating spot at least partially covering at least two different regions of the structure, the measurements including detecting light reflected from the at least part of the at least two different regions within the measurement spot, the detected light including interference of at least two complex electric fields reflected from the at least part of the at least two different regions, and being therefore indicative of a phase response of the structure, carrying information about properties of the structure.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: May 26, 2020
    Inventors: Gilad Barak, Dror Shafir, Yanir Hainick, Shahar Gov
  • Patent number: 10655954
    Abstract: In a conventional moiré method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moiré fringes as a grating for generating phase-shifted second-order moiré fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moiré fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moiré fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.
    Type: Grant
    Filed: June 1, 2017
    Date of Patent: May 19, 2020
    Inventors: Qinghua Wang, Shien Ri, Hiroshi Tsuda
  • Patent number: 10612905
    Abstract: An interferometer for areally measuring an optically smooth surface is presented, including means for illuminating a surface region with a plurality of discrete object waves from different directions and comprising means which, on a detector, superimpose object waves reflected at the surface onto a reference wave that is coherent with a plurality of object waves in order to form an interferogram. The interferometer is distinguished by virtue of it being configured to illuminate the surface with a plurality of object waves at the same time and produce the reference wave by way of a Fizeau beam splitter plate or a Fizeau objective, and by virtue of the interferometer including an interferometer stop that is arranged in the beam path upstream of the detector, and imaging optics, wherein the interferometer stop is situated within, or slightly outside of, the Fourier plane of the imaging optics and said interferometer stop filters the object waves reflected by the surface.
    Type: Grant
    Filed: November 14, 2016
    Date of Patent: April 7, 2020
    Inventors: Goran Baer, Christof Pruss, Wolfgang Osten
  • Patent number: 10563975
    Abstract: According to an aspect of one or more embodiments, the present subject matter describes an apparatus for inspecting a slab of a material. The apparatus comprises a first and second low-coherence sensor configured to irradiate a first and second side of a slab of material with first light having a first polarization and second light having a second polarization, and thereafter configured to detect a reflection. A first polarizer is configured to allow reflected first light having the first polarization to pass through, and reject a second-light cross-talk portion having the second polarization. A second polarizer is configured to allow reflected second light having the second polarization to pass through, and reject a first-light cross-talk portion having the first polarization. Further, a computing-system is configured to receive signals representing the reflected first light and the reflected second light; and analyze the reflected first light and the reflected second light.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: February 18, 2020
    Assignee: APPLEJACK 199 L.P.
    Inventor: Wojciech J Walecki
  • Patent number: 10480927
    Abstract: The present disclosure provides an optical coherence tomography (OCT) system for characterising first and second areas of interest of a material. The OCT system comprises first and second optical elements in use positioned at the first and second areas of interest of the material. The first and second optical elements are at least partially transmissive for electromagnetic radiation. The system further comprises first and second scanning heads in use positioned at the first and second optical elements, respectively, to receive electromagnetic radiation that has interacted with the material at the first and second areas of interest. In addition, the system comprises at least one detector optically coupled to the first and second scanning heads.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: November 19, 2019
    Assignee: OncoRes Medical Pty Ltd
    Inventor: Brendan Kennedy
  • Patent number: 10463254
    Abstract: Exemplary embodiments of systems and methods can be provided which can generate data associated with at least one portion of a sample. For example, at least one first radiation can be forwarded to the portion through at least one optical arrangement. At least one second radiation can be received from the portion which is based on the first radiation. Based on an interaction between the optical arrangement and the first radiation and/or the second radiation, the optical arrangement can have a first transfer function. Further, it is possible to forward at least one third radiation to the portion through such optical arrangement (or through another optical arrangement), and receive at least one fourth radiation from the portion which is based on the third radiation. Based on an interaction between the optical arrangement (or the other optical arrangement) and the third radiation and/or the fourth radiation, the optical arrangement (or the other optical arrangement) can have a second transfer function.
    Type: Grant
    Filed: May 5, 2017
    Date of Patent: November 5, 2019
    Assignee: The General Hospital Corporation
    Inventors: Guillermo J. Tearney, Brett Eugene Bouma, Joseph A. Gardecki, Linbo Liu
  • Patent number: 10436907
    Abstract: Provided herein are systems and methods for an active sensing instrument actively utilizing the Christiansen effect to sense and adapt to suspended scatterers such as dust. The instrument enhances detection of remote surfaces that are partially or fully obscured at visual wavelengths due to those suspended scatterers. The system also may be used to measure properties and spatial distributions of the suspended scatterers themselves. Though the system is broadly applicable to remote detection through scattering media, it is particularly drawn to remote sensing through dust particles in the atmosphere as may be produced from helicopter fly-overs, dust storms, or other events that draw up substantial concentrations of mineral-based dust particles into the air.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: October 8, 2019
    Assignee: Arete Associates
    Inventors: James Murray, Paul Lundquist, Jason Seely, Steve Rako, Micah Boyd
  • Patent number: 10352692
    Abstract: Object: An object is to quantify the roughness of a test surface by scattering and diffraction of illumination light and to evaluate the matching degree of surface roughness separately from color based on a difference in roughness. Solution to Problem A surface roughness determination apparatus 1 using a white light source includes an arithmetic processing unit 3 configured to convert 3-band visual sensitivity images S1i, S2i and S3i, which respectively have three spectral sensitivities (S1(?), S2(?) and S3(?)) subjected to linear transformation so as to be equivalent to a CIE XYZ color matching function and are obtained from a surface 5 by a two-dimensional colorimeter 2 using the three spectral sensitivities (S1(?), S2(?) and S3(?)), into tristimulus values X, Y and Z in a CIE XYZ color system and perform arithmetic operations.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: July 16, 2019
    Assignee: PAPALAB CO., LTD.
    Inventor: Makoto Kato
  • Patent number: 10288416
    Abstract: An interference fringe projection apparatus includes light source units that selectively emit light from a coherent light source from one of a plurality of optical emitters, a polarization-maintaining waveguide unit with a plurality of PANDA fibers (polarization-maintaining waveguides) that each guide light emitted from one of the plurality of optical emitters, polarization splitters that split an optical path of light emitted from each of the PANDA fibers by polarization direction, and a polarizing film that transmits only a linear polarization component in a particular direction of light split by the polarization splitter. The light source unit only emits linearly polarized light in one polarization-maintaining direction for at least one of the PANDA fibers, and the polarization-maintaining waveguide unit causes retardation of light emitted from the PANDA fibers to vary.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: May 14, 2019
    Inventor: Daichi Watanabe
  • Patent number: 10286485
    Abstract: The laser processing device includes: a measuring device configured to measure a change in a height of an object and including a first light source configured to emit probe light, a first light focusing unit configured to focus the probe light on the object, a light sensing unit configured to detect a change in the probe light reflected from a reflective surface of the object and including a Shack-Hartmann sensor, and a calculation unit configured to calculate the change in the height of the object by using the change in the reflected light detected by the light sensing unit; a second light source configured to emit laser light for processing to the object; and a focus adjusting device configured to adjust a focus of the laser light emitted to the object by using the change in the height of the object to be processed measured by the measuring device.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: May 14, 2019
    Assignee: EO TECHNICS CO., LTD.
    Inventors: Dong Jun Lee, Dong Won Hyun, Byung Oh Kim
  • Patent number: 10236222
    Abstract: The system includes a dual interferometer sub-system configured to measure flatness across a substrate. The system includes a mass sensor configured to measure the mass of the substrate. The system includes a controller communicatively coupled to the dual interferometer sub-system and the mass sensor. The controller includes one or more processors. The one or more processors are configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to determine a thickness distribution of at least one of the substrate or a film deposited on the substrate as a function of position across the substrate based on one or more flatness measurements from the dual interferometer sub-system and one or more mass measurements from the mass sensor.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: March 19, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Dengpeng Chen, Andrew Zeng
  • Patent number: 10190871
    Abstract: A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: January 29, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 10176588
    Abstract: Embodiments described herein relate to systems and methods for specular surface inspection, and particularly to systems and methods for surface inspection comprising inverse synthetic aperture imaging (“ISAI”) and specular surface geometry imaging (“SSGI”). Embodiments may allow an object under inspection, to be observed, imaged and processed while continuing to be in motion. Further, multiple optical input sources may be provided, such that the object does not have to be in full view of all optical sensors at once. Further, multi-stage surface inspection may be provided, wherein an object under inspection may be inspected at multiple stages of an inspection system, such as, for an automotive painting process, inspection at primer, inspection at paint, inspection at final assembly. SSGI imaging modules are also described for carrying out micro-deflectometry.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: January 8, 2019
    Inventors: Wallace Trenholm, Maithili Mavinkurve, Mark Alexiuk, Jason Cassidy
  • Patent number: 10132609
    Abstract: A system and methods for quantitative optical phase imaging of a sample. First second replica field of an image field are generated, characterized by a respective optical phase, cross-polarized and shifted in a shift direction transverse to a normal to the surface of the sample. The replica fields are Fourier transformed, the second replica field is retarded by four successive phase shifts, and, after inverse Fourier transforming, the first and second replica fields pass through an analyzer polarizer and superposing the first and second replica fields on a detector array to create four successive detector signals. The four successive detector signals are solved to derive a gradient of the optical phase of the image field, which may be integrated to obtain a quantitative phase image.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: November 20, 2018
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Gabriel Popescu, Mikhail Eugene Kandel, Tan Huu Nguyen
  • Patent number: 10095183
    Abstract: In one embodiment, a color holographic image is created by generating a separate complex hologram for each of multiple different colors of an object field illuminated with incoherent light, combining the separate complex holograms to obtain a color complex hologram, and generating a reconstructed color holographic image of the object field.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: October 9, 2018
    Assignee: University of South Florida
    Inventor: Myung K. Kim
  • Patent number: 10055849
    Abstract: An image measurement device according to the present invention comprises: a stage on which a measurement object is mounted; an imaging device imaging the measurement object for a certain imaging range and outputting image information; a position control device that moves the imaging device to a plurality of measurement positions and scans in a scanning direction; and an arithmetic processing device that calculates a displacement of the measurement object. The imaging device is configured capable of imaging a preliminary measurement range broader than the certain imaging range. The arithmetic processing device, prior to a main measurement that measures the displacement of the measurement object at each measurement position, makes a preliminary measurement based on the image information corresponding to the preliminary measurement range, and sets a scanning range of the imaging device at each measurement position during the main measurement based on a result of this preliminary measurement.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: August 21, 2018
    Inventors: Hiroshi Sakai, Takeshi Saeki
  • Patent number: 10022818
    Abstract: Methods and systems are provided for using optical interferometry in the context of material modification processes such as surgical laser or welding applications. An imaging optical source that produces imaging light. A feedback controller controls at least one processing parameter of the material modification process based on an interferometry output generated using the imaging light. A method of processing interferograms is provided based on homodyne filtering. A method of generating a record of a material modification process using an interferometry output is provided.
    Type: Grant
    Filed: August 29, 2016
    Date of Patent: July 17, 2018
    Assignee: IPG Phontonics
    Inventors: Paul J. L. Webster, James M. Fraser, Victor X. D. Yang
  • Patent number: 9995648
    Abstract: Provided is an optical measurement system. The optical measurement system includes: an optical module which includes an optical system and which is configured to illuminate a sample and register a defocused image of a nanostructured surface of the sample, an optical system parameter control module configured to set optical parameters of the optical system, an optical transfer function (OTF) measurement module configured to measure an OTF, a defocused image calculation module configured to calculate the defocused image based on the measured OTF and the optical parameters, and a critical dimension (CD) evaluation module configured to compare the registered defocused image with the calculated defocused image of the nanostructured surface of the sample and to output a CD value of the nanostructured surface.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: June 12, 2018
    Inventors: Alexey Shchekin, Maksim Riabko, Sergey Koptyaev, Anton Medvedev
  • Patent number: 9976912
    Abstract: Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: May 22, 2018
    Assignee: California Institute of Technology
    Inventor: James Kent Wallace
  • Patent number: 9979586
    Abstract: The phase modulation device (3) includes a first phase modulation element (11) which modulates a phase of a light flux in accordance with a voltage applied to each of a plurality of first electrodes in accordance with a first ratio of a second aberration component to a first aberration component of a wave front aberration generated by an optical system including an objective lens (4); a second phase modulation element (12) which modulates a phase of a light flux in accordance with a voltage applied to each of a plurality of second electrodes in accordance with a second ratio of the second aberration component to the first aberration component; and a control circuit (3) which controls voltages applied to each of first electrodes and each of second electrodes in accordance with a distance from the objective lens to a light focusing position of the light flux.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: May 22, 2018
    Assignee: CITIZEN WATCH CO., LTD.
    Inventor: Ayano Tanabe
  • Patent number: 9958355
    Abstract: An apparatus for measuring the optical performance characteristics and dimensions of an optical element comprising a low coherence interferometer and a Shack-Hartmann wavefront sensor comprising a light source, a plurality of lenslets, and a sensor array is disclosed. The low coherence interferometer is configured to direct a measurement beam along a central axis of the optical element, and to measure the thickness of the center of the optical element. The light source of the Shack-Hartmann wavefront sensor is configured to emit a waveform directed parallel to and surrounding the measurement beam of the interferometer, through the plurality of lenslets, and to the sensor array. A method for measuring the optical performance characteristics and dimensions of a lens using the apparatus is also disclosed.
    Type: Grant
    Filed: May 13, 2016
    Date of Patent: May 1, 2018
    Assignee: Lumetrics, Inc.
    Inventors: Filipp V. Ignatovich, Donald S. Gibson, Michael A. Marcus
  • Patent number: 9903708
    Abstract: A semiconductor measuring tool has a folding mirror configuration that directs a light beam to pass the same space multiple times to reduce the size and footprint. Furthermore, the folding mirrors may reflect the light beam at less than forty-five degrees; thereby allowing for smaller folding mirrors as compared to the prior art.
    Type: Grant
    Filed: March 7, 2016
    Date of Patent: February 27, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Chunhai Wang, Chunsheng Huang, Andrew An Zeng, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang
  • Patent number: 9869540
    Abstract: A displacement measuring device includes an optical module for refracting or reflecting light; a beam splitting module including a polarizing beam splitting layer for allowing light with a first polarization direction to pass through and reflecting light with a second polarization direction; a light source for generating a first light beam with the first polarization direction and a second light beam with the second polarization direction, wherein the first light beam is reflected by a measured object after passing through the optical module and the beam splitting module, and the second light beam is reflected by the polarizing beam splitting layer after passing through the optical module; an image sensor for sensing an interference pattern generated by the reflected first and second light beams; and a processing unit for calculating a displacement value of the measured object according to the interference pattern.
    Type: Grant
    Filed: November 23, 2016
    Date of Patent: January 16, 2018
    Assignee: NOPORVIS CO., LTD.
    Inventors: Wei-Hung Su, Hui-Hung Lin, Kuo-Kai Hung, Chun-Neng Chan, Lu-Yu Wang
  • Patent number: 9835441
    Abstract: An absolute distance measurement apparatus and method using laser interferometric wavelength leverage includes a light source system, a wavelength-leverage laser interferometric system and an interference signal processing and controlling system. The light source system outputs a orthogonally linearly polarized beam with the wavelength ?1 and the wavelength ?2. The orthogonally linearly polarized beam projects onto the wavelength-leverage laser interferometric system to form the interference beam. The interference beam projects onto the interference signal processing and controlling system. In the wavelength-leverage laser interferometric system, the synthetic wavelength and the single wavelength as well as the measured absolute distance and the moving displacement of the cube-corner prism in the reference arm form a wavelength-leverage absolute distance measurement relationship.
    Type: Grant
    Filed: March 27, 2015
    Date of Patent: December 5, 2017
    Inventors: Benyong Chen, Liping Yan, Shihua Zhang
  • Patent number: 9811779
    Abstract: A method and apparatus used for general purpose problem solving using entanglement properties of holography. Intelligent point-based entities having spatial and other electromagnetic properties called DROPLETS [Data-Representative-Object-Particle(s)-Liking-EnTanglement] are generated as delegate objects—avatars—connected to data sources representing situations, event or other problems. A DROPLET's properties are controlled by changes in input data, self-state, feedback, and/or changes of other DROPLETS. Coherent rays are introduced and interact with DROPLETS, generating an INTELLIGENCE WAVEFRONT. Interference patterns are recorded and converted to binary machine codes of a near-infinite set, instructing where to store human/machine-readable content within a plurality of associative memories. Said content includes waveforms, harmonics, codes, data, and other holograms, which are dispersed and stored wholistically throughout using spread spectrum techniques.
    Type: Grant
    Filed: March 6, 2011
    Date of Patent: November 7, 2017
    Inventors: Eric John Dluhos, Bradley Lloyd Wilk
  • Patent number: 9798130
    Abstract: Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: October 24, 2017
    Assignee: Zygo Corporation
    Inventors: Thomas Dresel, Jan Liesener, Peter J. de Groot
  • Patent number: 9733616
    Abstract: A portable inspection probe for the inspection of a recessed mating surface of an optical fiber connector is provided. In one variant, the portable inspection probe includes a digital holographic detection module operable to digitally record a hologram of the recessed mating surface, and a rigid probe tip configured to be optically coupled to the digital holographic detection module and shaped to provide optical access to the recessed mating surface. In another variant, the portable inspection probe is to be used with a rigid probe tip connectable thereto, and the digital holographic detection module includes a probing optical assembly not traversed by a reference beam and configured to direct an object beam onto the recessed mating surface and to collect the object beam upon reflection thereof by the recessed mating surface. An inspection system and an inspection method are also provided.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: August 15, 2017
    Assignee: EXFO INC.
    Inventors: Bernard Ruchet, Normand Cyr
  • Patent number: 9715215
    Abstract: A display system (300) comprising an optical system and a processing system. The optical system comprising a spatial light modulator (380), a light source, a Fourier transform lens, a viewing system (320, 330) and a processing system. The spatial light modulator is arranged to display holographic data in the Fourier domain, illuminated by the light source. The Fourier transform lens is arranged to produce a 2D holographic reconstruction in the spatial domain (310) corresponding to the holographic data. The viewing system is arranged to produce a virtual image (350) of the 2D holographic reconstruction. The processing system is arranged to combine the Fourier domain data representative of a 2D image with Fourier domain data representative of a phase only lens to produce first holographic data, and provide the first holographic data to the optical system to produce a virtual image.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: July 25, 2017
    Assignee: Two Trees Photonics Limited
    Inventors: Jamieson Christmas, Dackson Masiyano
  • Patent number: 9696211
    Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry.
    Type: Grant
    Filed: October 29, 2015
    Date of Patent: July 4, 2017
    Inventor: Artur Olszak
  • Patent number: 9689745
    Abstract: Current apparatuses and methods for analysis of spectroscopic optical coherence tomography (SOCT) signals suffer from an inherent tradeoff between time (depth) and frequency (wavelength) resolution. In one non-limiting embodiment, multiple or dual window (DW) apparatuses and methods for reconstructing time-frequency distributions (TFDs) that applies two windows that independently determine the optical and temporal resolution is provided. For example, optical resolution is provided. For example, optical resolution may relate to scattering information about a sample, and temporal resolution may be related to absorption or depth related information. The effectiveness of the apparatuses and methods is demonstrated in simulations and in processing of measured OCT signals that contain fields which vary in time and frequency. The DW technique may yield TFDs that maintain high spectral and temporal resolution and are free from the artifacts and limitations commonly observed with other processing methods.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: June 27, 2017
    Assignee: Duke University
    Inventors: Adam Wax, Robert N. Graf, Francisco E. Robles
  • Patent number: 9658043
    Abstract: An optical test apparatus includes a three-dimensional dome, light sources and a control unit. The three-dimensional dome covers a field of view of an image acquisition device. The image acquisition device is a test target device. The light sources are dispersedly arranged on the three-dimensional dome and generate a predetermined image on the three-dimensional dome. The first control unit controls the light sources.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: May 23, 2017
    Inventors: Mariko Sato, Shojiro Furuya, Daichi Miyoshi, Yukito Hata
  • Patent number: 9655521
    Abstract: A dual-modality apparatus for imaging of biological tissue includes a reflectance confocal microscopy (RCM) imaging apparatus and an optical coherence tomography (OCT) imaging apparatus. A first optical component reflects a first beam of light provided by a RCM imaging apparatus towards a sample and passes a second beam of light provided by an OCT imaging apparatus towards the sample, such that the first and second beam of lights share at least a portion of an imaging path.
    Type: Grant
    Filed: January 31, 2013
    Date of Patent: May 23, 2017
    Assignees: Physical Sciences, Inc., Memorial Sloan-Kettering Cancer Center
    Inventors: Nicusor V. Iftimia, Mircea Mujat, R. Daniel Ferguson, Ankit H. Patel, Milind Rajadhyaksha
  • Patent number: 9644947
    Abstract: A device for real-time thickness inspection is provided. An optical interferometric technique is used. Measurement requirements in rapid online thickness inspection can be satisfied. An object is measured in a non-contact and non-destructive way. For measuring, an optical spherical wavefront is radiated on the object in an oblique angle. The interference fringe pattern (IFP) thus imaged on a screen is directly related to the thickness distribution of the object. The phase difference on the same horizontal cross section in the IFP monotonically decreases from the light source side to the other side. Accordingly, phase unwrapping can be effectively performed without using phase shift. The present invention achieves rapid on-line thickness inspection through the optical path of interference without using optical lens groups and special optical elements.
    Type: Grant
    Filed: August 18, 2014
    Date of Patent: May 9, 2017
    Inventors: Wei-Chung Wang, Chi-Hung Huang, Po-Chi Sung, Meng-Hsiu Li
  • Patent number: 9625674
    Abstract: The autofocus device for a sample observation device provided with an objective is provided with a photodetector, an autofocus optical system that includes a tube lens, that guides light to one of two regions of a pupil plane of the objective that has been divided into two, and that guides light that has passed through the other region after being reflected by a sample to the photodetector, and a light shielding member which is arranged between the tube lens and a light receiving plane of the photodetector and on which an aperture has been formed. The autofocus device satisfies 2.1<?AP/(2·?LD), where ?AP represents a diameter of the aperture and ?LD represents a light flux diameter, on the light shielding member, of light reflected by the sample in a state in which the light is condensed on the light receiving plane.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: April 18, 2017
    Inventor: Yohei Sakamoto