Abstract: A grating measuring module includes a light source, a collimating device, a first grating, a second grating, and an image sensing chip. The first grating is arranged on an optical path of the collimating device and the second grating is arranged on an optical path of the first grating. Each of the two gratings comprises a first pattern and a plurality of second patterns locating at the both sides of the first pattern. The first and second gratings can each be attached to an object which may be displaced in relation to another object, so allowing light of a certain pattern to pass depending on the magnitude of the displacement. The image sensing chip arranged on an optical path from the second grating receives light emitted from the light source and forms an image from which a displacement can be calculated and displayed.

Abstract: A spectroscope for measuring a spectrum of input light includes a fringe former that forms first fringes having a first pitch by splitting the input light, a diffraction grating that disperses each of the first fringes, a moire pattern former that forms a moire pattern by overlaying the first fringes that have been dispersed, on second fringes having a second pitch different from the first pitch, and an image pickup device that measures the spectrum of the input light by detecting the moire pattern. At least one of the fringe former and the moire pattern former includes a cylindrical lens array.

Abstract: A substrate inspection system includes a substrate support, optics configured to irradiate a patterned structure on the substrate and capture images of the patterned structure from light reflected from the patterned structure, a focus adjustment operative to adjust a focal position of the incident light on the patterned structure, and an image processor configured to calculate an optimal value of a focus offset used to establish focal points of the light for defect detection in the patterned structure. The patterned structure may include a first pattern having an opening and a second pattern having top surfaces located at different heights relative to the substrate. The value of the focus offset is determined using images of the top surfaces of the second pattern obtained while changing the focal position of the incident light.

Abstract: Optical encoding systems include a generalized cylindrical code scale having one or more regions with different light reflective properties. In an example process, a code scale can be created by coating an elongated generalized cylinder with one or more different layers of materials having different light reflective properties. Portions of these layers can be removed selectively in order to expose a particular overlying material and create a particular pattern of features having different optical characteristics (e.g., absorbing, specularly reflecting, diffusely reflecting).

Abstract: The present invention provides an imprint method of molding an imprint material supplied on a shot region of a substrate by a mold having a pattern region in which a pattern has been formed, the method comprising a deformation step of performing, based on information indicating at least one among a shape of the pattern region and a shape of the shot region, deformation of at least one region among the pattern region and the shot region, an estimation step of estimating a moving amount of a mark by the deformation, the mark being provided in the at least one region, and an overlay step of performing, based on the moving amount and detection results of positions of a mark in the pattern region and a mark in the shot region, overlay between the pattern region and the shot region.

Abstract: The present invention provides an imprint apparatus including a control unit configured to perform detection process, wherein the detection process includes first process in which a detection optical system is caused to detect a mold-side mark in a state in which a substrate state is positioned such that a reference mark is located outside the field of view of the detection optical system, and second process in which the detection optical system is caused to detect the reference mark in a state in which the mold stage is positioned such that the mold-side mark is out of focus with respect to the detection optical system, and the substrate stage is positioned such that the reference mark is located inside the field of view of the detection optical system.

Abstract: A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern.

Abstract: A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern.

Abstract: A three dimensional shape measurement apparatus includes an illumination section and a grating transfer unit. The illumination section includes a light source unit generating a light and a grating unit changing the light generated by the light source unit into a grating pattern light having a grating pattern. The illumination section illuminates the grating pattern light onto a measurement target in a predetermined direction. The grating transfer unit transfers the grating unit in a predetermined inclination direction with respect to an extension direction of the grating pattern and an arrangement direction of the grating pattern. Thus, manufacturing cost may be reduced, and the three dimensional shape measurement apparatus may be easily managed.

Abstract: A method of decoding hierarchically orthogonal structured light and a 3-D depth measurement system using the same include a step of detecting boundary lines encoded at an identical position between layers and a boundary line inheritance step of converting the detected boundary lines into identical boundary lines. The present invention relates to a method of precisely searching for the boundary line of a pattern of radiated structured light based on the real coordinate system of an image plane, and an object thereof is to search for a boundary line irrespective of the reflection of a surface of an object, clearly classify a true boundary line and a false boundary line in a poor radiance environment, and increase the accuracy of a boundary line placed in another layer through inheritance.

Abstract: A method for aligning a plurality of sub-apertures of a multiple-aperture imaging system including, but not limited to, identifying one sub-aperture to serve as a reference sub-aperture, actuating the reference sub-aperture in a series of piston steps of a known amount, collecting data relating to each image of a plurality of images of a point object, each image corresponding to a respective piston step, compiling the data into a three-dimensional data cube, detecting a plurality of fringes positioned within the three-dimensional data cube, determining the relative location of each sub-aperture of the plurality of sub-apertures based on a location of each fringe of the plurality of fringes within the three-dimensional data cube, and actuating a piston associated with at least one sub-aperture based, at least in part, on the relative location to move the at least one sub-aperture into alignment with another sub-aperture and repeating with each remaining sub-aperture until all sub-apertures are at substantially

Abstract: The present invention provides a method for simultaneous hue phase-shifting and a system for 3-D surface profilometry, wherein a single structured-light fringe pattern with encoded multiple trapezoidal color fringes is projected on an object so as to obtain a color image having deformed fringe patterns and then a hue information extracted from a HSI color model associated with the fringe pattern is transformed into a hue phase-shifting information for restructuring the 3-D surface profile of the object. Since the color structured light is composed of a plurality of colorful light having phase shifts with each other in spatial domain, the single structured-light pattern comprises multiple hue phase-shifting information so that the phase shifting and unwrapping can be performed by one-shot 3-D surface reconstruction process without needs of traditional conventional phase wrapping and Euler's transformation procedures such that the efficiency of phase shifting and 3-D surface measurement can be improved.

Abstract: A system, for determining characteristics of a beam wavefront and reshaping such wavefront, including: apparatus for sampling the wavefront curvature and generating outputs; apparatus for reshaping the wavefront; and apparatus for receiving the outputs, proportioning the outputs to match the inputs need to drive controls for the reshaping apparatus, and sending the proportioned outputs to the reshaping apparatus. The reshaping apparatus is, preferably, a deformable mirror. The sampling apparatus includes a distorted grating. The method includes: positioning the sampling apparatus in the bean path; positioning a reshaping apparatus in the beam path; sampling the curvature of the wavefront and generating outputs representative of the curvature thereof; sending the generated outputs to the proportioning apparatus; proportioning the outputs to match the inputs needed to drive the controls of the reshaping apparatus; and sending the proportioned outputs to the reshaping apparatus to change the shape thereof.

Abstract: A system for determining an object distance z includes a plurality of light emitters. A group of at least one of the plurality of light emitters includes an emitter group, and the pattern projected when one emitter group is emitting includes a fringe set. The light pattern of one fringe set exhibits a phase-shift relative to the light patterns of the other fringe sets, and the phase-shift varies as the distance from the origin of the plurality of fringe sets varies. The system further includes a processing unit that is configured to compute a ripple metric value associated with each of a plurality of possible z values. The processing unit is further configured to determine an approximated z value using the computed ripple metric values. A probe system is also provided. The probe system is configured to project a plurality of fringe sets from the probe onto an object.

Abstract: A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern.

Abstract: An optical position measuring arrangement including a source of illumination that generates one or several bundles of illuminating beams, a measuring graduation that is illuminated by the source of illumination so as to generate a periodic fringe pattern of a defined fringe pattern period and a fiber-optical scanning head, wherein the fiber-optical scanning head scans the periodic fringe pattern. A scanning plate is arranged in the fiber-optical scanning head, wherein the scanning plate is matched to the fringe pattern period and scans the periodic fringe pattern. Fringe patterns, which are phase-shifted in relation to each other, are generated within a fringe pattern period in bundles of partial signal beams in the one or several bundles of illuminating beams via a wavelength-dependent local separation, and the bundles of partial signal beams are employed for conversion into position-dependent phase-shifted scanning signals.

Abstract: The present invention relates to the field of DNA analysis. In particular, the present invention is directed to a device for the parallel imaging of fluorescence intensities at a plurality of sites as a measure for DNA hybridization. More particular, the present invention is directed to a device to image multiplex real time PCR or to read out DNA microarrays.

Abstract: Lithography tools and substrates are aligned by generating geometric interference patterns using optical gratings associated with the lithography tools and substrates. In some embodiments, the relative position between a substrate and lithography tool is adjusted to cause at least one geometric shape to have a predetermined size or shape representing acceptable alignment. In additional embodiments, Moiré patterns that exhibit varying sensitivity are used to align substrates and lithography tools. Furthermore, lithography tools and substrates are aligned by causing radiation to interact with optical gratings positioned between the lithography tools and substrates. Lithography tools include an optical grating configured to generate a portion of an interference pattern that exhibits a sensitivity that increases as the relative position between the tools and a substrate moves towards a predetermined alignment position.

Abstract: The invention relates to an information carrier (101) intended to be read and/or written by a periodic array of light spots, said information carrier (101) comprising a data area (105) defined by a set of elementary data areas, a first periodic structure (108) intended to interfere with said periodic array of light spots for generating a first moiré pattern, a second periodic structure (109) intended to interfere with said periodic array of light spots for generating a second moiré pattern, said second periodic structure (109) being arranged perpendicularly to said first periodic structure (108). The invention also relates to an apparatus for reading and/or writing said information carrier (101).

Abstract: The invention relates to an information carrier, and a system for positioning such an information carrier in an apparatus. This system comprises an optical element (102) for generating a periodic array of light spots (103) intended to be applied to an information carrier (101), said information carrier (101) comprising a first periodic structure (108) intended to interfere with said periodic array of light spots (103) for generating a first Moiré pattern, and a second periodic structure (109) intended to interfere with said periodic array of light spots (103) for generating a second Moiré pattern, analysis means for deriving from said first and second Moiré patterns, the angle value (S) between said periodic array of light spots (103) and said information carrier (101), and actuation means (AC1-AC2-AC3) for adjusting the angular position of said information carrier (101) with respect to said array of light spots (103), from control signals (114) derived based on said angle value (S).

Abstract: A shape value of a pattern having a pivotal characteristic is measured (step S1), an exposure energy variation is detected from the measured value, a first data base is accessed using a result of the measurement of the shape value (Step S2), an exposure energy is calculated (Step S3), a shape value of an isolated pattern is measured (Step S4), a second data base is accessed using a result of the measurement (Step S5), and a focal variation is determined using the calculated proper exposure energy (Step S6).

Abstract: A 3D shape measuring apparatus using a shadow moire, which can measure a 3D shape of a test object by selectively switching on/off a plurality of illuminating parts irrespective of a form of the test object is provided.

Abstract: An evaluation method for evaluating optical characteristics of an optical system, the evaluation method includes: providing an optical system that is an evaluation object and that has a light incidence section and a light emission section; disposing a first pattern having a fist predetermined pitch, in an optical path of light which is incident onto the light incidence section; disposing a projection surface having a second pattern with a second predetermined pitch, at the position to which the light emitted from the light emission section is reached; projecting an image of the first pattern onto the projection surface through the optical system; and evaluating the optical characteristics of the optical system by observing a state of moiré fringes which are generated onto the projection surface due to interference between the image and the second pattern.

Abstract: The present invention relates to the field of DNA analysis. In particular, the present invention is directed to a device for the parallel imaging of fluorescence intensities at a plurality of sites as a measure for DNA hybridization. More particular, the present invention is directed to a device to image multiplex real time PCR or to read out DNA microarrays.

Abstract: An object pattern is imaged by an imaging system onto the image plane of the imaging system at a location where a reference pattern suited to the object pattern is situated in order to measure the imaging fidelity of an optical imaging system, for example, an eyeglass lens, a photographic lens, or a projection lens, for use in the visible spectral range. The resultant, two-dimensional, superposition pattern is detected in a spatially resolved manner in order to determine imaging parameters therefrom. The object pattern is generated with the aid of at least one electronically controllable pattern generator that serves as a self-luminous, electronically configurable, incoherent light source and may, for example, have a color monitor. The measuring system allows rapidly, flexibly, checking optical imaging systems with minimal time and effort spent on the mechanical setup required.

Abstract: An optical displacement-measuring instrument of a reflection type includes a sensor head movable above a scale in a direction of measurement. This instrument is of a three-grating type that comprises a first optical grating arranged close to a light source, a second optical grating arranged on the scale, and a third optical grating arranged in a photoreceptor. A light diffuser is arranged between the light source and the first optical grating. A collimated light from the light source is diffused at the light diffuser and led to the first optical grating.

Abstract: A method for measuring deformation in specimens is provided. The method includes providing a shadow moiré system, the shadow moiré system including an illumination source, a reference grating and an image capture device and providing a specimen. The method further includes determining a selected distance between the specimen and the reference grating, and illuminating the specimen with light from the illumination source directed through the reference grating onto the specimen, thereby forming shadow moiré fringes onto the specimen. The method further includes capturing an image of the shadow moiré fringes by the image capture device.

Abstract: An interferential position measuring arrangement including a light source, which emits a beam of rays and an optical element, which converts the beam of rays emitted by the light source into an incoming beam of rays. A scale grating which splits the incoming beam of rays into a first partial beam of rays and a second partial beam of rays. A first scanning grating that causes splitting of the first partial beam of rays and a second scanning grating that causes splitting of the second partial beam of rays, wherein a periodically modulated interferential fringe pattern with definite spatial interferential fringe pattern period results in a detection plane. A detection arrangement which causes splitting of light entering through the detection arrangement into at least three different spatial directions and optoelectronic detector elements arranged in the at least three spatial directions for detecting phase-shifted scanning signal.

Abstract: A method and an apparatus for surface configuration measurement of the present invention use stereoscopic lattice type of moiré optics as testing optics. The moiré optics accurately shifts moiré fringes of particular fringe order by a preselected phase without any shift error. A line sensor camera, which is a specific form of a camera, limits a measurement range to the vicinity of the particular fringe order. The camera outputs at least three moiré image data shifted in phase. A phase shifting method can therefore be easily applied to the stereoscopic lattice type of moiré optics without giving any consideration to the accurate phase shift of the entire fringe orders. The apparatus can measure the surface configuration of a work with high accuracy.

Abstract: A method for adjusting an optical system of an energy beam apparatus by using a mark signal that is obtained by one-dimensionally or two-dimensionally scanning a mark on a sample with an energy beam. The mark has a one-dimensional or two-dimensional periodic structure. A first mark signal is detected by scanning the mark with a beam. The mark is set on the optical axis of the optical system. A second mark signal is detected by scanning the mark with a beam. The mark is located at a position that is deviated from the optical axis. A deviation of a deflection position is determined based on a phase difference between the first and second mark signals.

Abstract: Systems and methods analyze the performance of a mechanical system having two identical rotating members therein. Light is directed from two identical light sources to intercept encoded portions of the rotating members. A portion of the light is reflected from the encoded portions of each rotating member. The reflected portion of the light can be then detected to recover performance data maintained therein, wherein the performance data contains performance characteristics of the mechanical system. A reflected portion of the light can be detected to recover performance data. The light sources can be configured as Vertical Cavity Surface Emitting Lasers (VCSEL). The encoded portions of rotating members thereof can include a bar code. Images from a first encoded surface may interact with an image from a second encoded surface after the light beams are reflected off the first and second rotating surfaces to produce Moirè fringes.

Abstract: A compact moiré effect body scanner provides 3-D images of a human body for use in making up suitable garments. The scanner includes an elongate projection module with a photographic grid that illuminates the body. An elongate imaging module having a second photographic grid lies alongside the projection module and a digital camera is used to capture images of the body. The scanner is typically about 400 mm long, 400 mm high, and 150 mm wide and can be used in normal room light conditions.

Abstract: Apparatus and a method for inspecting a topology of a surface (2) of a structural member (1) are provided. The degree to which a known type of stress has been applied to the member may be ascertained using a Moiré grid (8). The method involves providing a range of calibration samples of structurally equivalent members, the samples each having been subject to the known type of stress to a differing respective degree. Measurements taken using the apparatus and method of the invention are then compared with measurements taken from a calibration sample to determine the amount of stress which has been applied.

Abstract: The present invention relates a moiré image capturing apparatus and the related method, the apparatus comprising: an optical projection unit arranged in perpendicular to a reference surface with a light source for illuminating light to the reference surface, where an object is positioned, and a projection grating installed on a optic axis between the light source and the reference surface for projecting the light generated by the light source toward the object; and an optical imaging unit arranged in perpendicular to the reference surface with an imaging lens for making an image with the light reflected at the object and a light receiving part installed on the same optic axis as that of imaging lens for receiving the light passing through the imaging lens to turn into a moiré image, so that a reference grating is removed to make the apparatus in a simpler structure and that a step of removing an image of the reference grating except the moire image having information on figure of the object is n

Abstract: An apparatus and method for wavefront sensing that includes: employing two moiré gratings in an optical path; optically Fourier transforming a moiré deflectogram produced by the gratings; variably transmitting the transformed moiré deflectogram; and receiving an image of the variably transmitted and transformed moiré deflectogram. The variable transmission is best accomplished by transmission filter, a transmissive optic encoding intensity information upon the moiré deflectogram as a function of fringe angle. For example, the function can be a triangular transmission function centered on the (0,0) order spatial frequency spot and oriented at 45 degrees to the y-axis. The optical Fourier transform is accomplished by a lens and the variable transmission by an apodized slit.

Abstract: In a three-dimensional image scanner, a grating projection type moire topography is used, so as to capture three-dimensional form information of an object to be measured easily in a short time with a high degree of freedom in measurement. Also, a heat-insulating partition comprising at least two partition walls forming a cooling/heat-insulating path is disposed between a light source and a heat-sensitive section, so as to effectively inhibit the heat generated by the light source from being transmitted to the heat-sensitive section. The three-dimensional form information of the object is captured by a measurement head 12 having a function as a grating projection type moire device.

Abstract: A position measuring system that includes a graduation support having a measuring graduation, a planar waveguide and a light source that generates light that is conducted to the measuring graduation, wherein the light is reflected at surfaces of the planar waveguide. A scanning unit for scanning the measuring graduation that includes a light-sensitive scanning area to which light modulated by the measuring graduation is conducted. The modulated light conducted to the light-sensitive scanning area has at least two different light portions, which differ in a number of reflections at the surfaces of the planar waveguide, and wherein the reflecting of the at least two different light portions occurs prior to reaching the measuring graduation.

Abstract: A method and an apparatus for surface configuration measurement of the present invention use stereoscopic lattice type of moiré optics as testing optics. The moiré optics accurately shifts moiré fringes of particular fringe order by a preselected phase without any shift error. A line sensor camera, which is a specific form of a camera, limits a measurement range to the vicinity of the particular fringe order. The camera outputs at least three moiré image data shifted in phase. A phase shifting method can therefore be easily applied to the stereoscopic lattice type of moiré optics without giving any consideration to the accurate phase shift of the entire fringe orders. The apparatus can measure the surface configuration of a work with high accuracy.

Abstract: A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.

Abstract: A light pattern generator generates a pattern of continuous wave, modulated and/or pulsed light onto a face of a collimator. The light pattern is collimated by an optical element and directed to a focusing element which focuses the collimated light pattern onto a sample. A controller controls the pattern generator and the light source to determine a shape of the illuminated pattern on the face of the collimator. The controller also controls the frequency, positional phase angle and pulse width of the light source. Additionally, the controller may control the color of the light so that the color varies over time.

Abstract: In a linear scale, a reference point signal is outputted as a signal which is synchronized with an absolute value. 8 is a a/b phase signal generator forming a two-phase a/b signal of a moving signal by an absolute value which divided the inside of pitch when the a scale moves, 31 is a period counter, 32 is a subtracter, 33 is an up-down counter.