Abstract: Provided is a transfer detection method for use in a substrate processing apparatus including a transfer arm, which has a plurality of substrate holders and is configured to transfer a plurality of substrates to a plurality of stages between a first chamber and a second chamber adjacent to the first chamber by using the plurality of substrate holders, and an optical sensor provided in a vicinity of an opening via which the first and second chambers are in communication with each other, the method including: projecting a light beam having a horizontal optical axis parallel to the opening to a position through which the substrates held by the plurality of substrate holders pass; and determining at least one of a state of the substrates on the substrate holders and a state of the transfer arm, in response to a detection result of the light beam projected from the optical sensor.

Abstract: A cable detection system for detecting an end of a cable having a plurality of exposed different sections includes an illumination device and a camera. The illumination device emits an illuminating light to the end of the cable. The illumination device simultaneously emits a parallel light and a diffuse light to the end of the cable. The camera captures an image of the end of the cable. The parallel light sharpens a boundary between the different sections of the cable in the image, and the diffuse light clarifies a surface of the different sections in the image.

Abstract: A borescope includes an electronic image capture unit having two image capture sensors as a borescope lens at an end of a shaft that is designed for being inserted into a borescope opening, a position and alignment of the image capture sensors in relation to one another being suitable for ascertaining three-dimension (3D) information using triangulation; and a pattern projector configured to project a pattern into a common recording region of the image capture sensors. The pattern projector includes: a fundamentally optically imaging light-guide bundle, which is made up of statistically distributed optical fibers having differing transmittances, to whose input surface a light source is coupled and whose output surface is aligned with the region captured by the image capture sensors.

Abstract: The invention provides methods and systems for imaging.

Abstract: A device for performing a measurement of a strand-shaped object comprises at least one transmission apparatus configured to emit measuring radiation onto the strand-shaped object, which reflects the measuring radiation. At least one receiving apparatus is configured to receive the measuring radiation reflected by the strand-shaped object. An evaluation apparatus is configured to determine at least one of (1) the diameter and (2) the outer contour of the strand-shaped object based on the measuring radiation received by the at least one receiving apparatus. At least one retroreflector is configured to surround at least a portion of the strand-shaped object and retroreflect at least some of the measuring radiation reflected by the strand-shaped object.

Abstract: A method for tool measurement using a non-contact tool setting apparatus mounted to a machine tool, which includes a transmitter for emitting a light beam having a beam width and a receiver for receiving the light beam. The receiver generates a beam intensity signal describing the intensity of received light. The method is for measuring a tool having a nominal tool diameter less than the beam width so fully inserting the tool feature into the light beam would only partially occlude the beam. The method includes moving the tool through the beam thereby causing a change in the intensity signal and generating a trigger signal when the intensity signal crosses a trigger threshold. The tool size is derived using the trigger signal generated. Also, a step of applying a tool length correction that accounts for the nominal tool diameter of the tool being less than the beam width.

Abstract: An image-measuring apparatus without axial alignment is configured to measure a workpiece. The image-measuring apparatus without axial alignment includes a rotating plate, a lighting unit, an image capturing unit, a central control unit and a rotary driving member. The workpiece is disposed on the rotating plate. The lighting unit is configured to generate a light beam to illuminate the workpiece to form a first workpiece blocking shadow area on the image capturing unit. The rotating plate and the workpiece are rotated through a rotational angle by the central control unit to form a second workpiece blocking shadow area on the image capturing unit. The central control unit calculates the first workpiece blocking shadow area and the second workpiece blocking shadow area to generate an axial position of the workpiece. There is a distance between an axial position of the rotating plate and the axial position of the workpiece.

Abstract: An optical scanning system is described, including a rotor that is set up to rotate about an axis of rotation during a scanning process, an optical lens that is situated on the rotor in such a way that the lens is situated on the axis of rotation, an optical transmit unit that is situated on the rotor and is set up to send out a scanning beam in the direction of an optical axis of the lens, and an optical receive unit that is situated on the rotor and includes a detector that is set up to receive a reflected scanning beam, the detector being situated such that the reflected scanning beam is focused onto the detector by the lens.

Abstract: A machine tool includes a mounting table, a tool, a shade detector, and a tool controller. A workpiece is placed on the mounting table. The tool includes a tip. The shade detector is fixed on the mounting table, provides an optical path of a laser light, and detects a shade state of the laser light. The tool controller is connected to the mounting table via a supporting structure and controls an orientation and a position of the tool. A reference point associated with the tool is provided to the tool controller. The tool controller corrects a position of the tip based on a difference between a position obtained by calculation of the reference point in the case where the tip is matched with a measurement position P of a laser light and a position of the reference point when the tip portion is actually matched with a measurement position while keeping the orientation of a tool.

Abstract: Portable device for contactless measurement of a size, such as the diameter, of small and medium sized objects, such as wires, bars or tubes, even in movement, which comprises a light beam generator (1), two light beam deflector elements (2, 4) located opposite each other, a measuring region (3), an enlarging lens (5), a light beam splitting device (6). The light beam is split into two parts to form two separate images of the object (14) to be measured, being perceived by two linear image sensors (7.1, 7.2) and processed by two electronic circuits (8.1 and 8.2) and by an electronic processing component (9).

Abstract: A control unit for generating a timing signal for an imaging unit in an inspection system in which an image of an inspection target object is captured by the imaging unit while the inspection target object is caused to travel in a predetermined direction includes a traveling distance determination section configured to detect a traveling distance of the inspection target object based on a count value acquired as an integer value from a laser interferometer provided in the inspection system for detecting a traveling distance of the inspection target object, and configured to determine whether the detected traveling distance reaches a threshold, and a timing signal generation section configured to generate a timing signal when it is determined that the detected traveling distance reaches the threshold. The traveling distance determination section executes the determination by using a plurality of values selectively as the threshold.

Abstract: Embodiments disclosed herein are directed to time-of-flight (TOF) systems, and methods for use therewith, that substantially reduce interference that the TOF system may cause to at least one other system that is configured to wirelessly receive and respond to IR light signals. Some such embodiments involve emitting IR light having a low frequency (LF) power envelope that is shaped to substantially reduce frequency content within at least one frequency range known to be used by at least one other system that may be in close proximity to the TOF system. Such embodiments can also involve detecting at least a portion of the emitted RF modulated IR light that has reflected off one or more objects. A TOF system can produce depth images in dependence on results of the detecting, as well as update an application in dependence on the depth images.

Abstract: Disclosed is an inspection device for inspecting deformation of a substrate holding member of a substrate transport apparatus. The substrate holding member is moved in the forward-and-backward direction relative to the transport base to pass across a light path of the detection light formed by an optical detection unit. The position, with respect to a direction transverse to the forward-and-backward direction, of the substrate holding member is detected based on a detection signal of the optical detection unit. Based on a correlation data expressing the relationship between a first parameter indicative of a change of a position of the substrate holding member with respect to the forward-and-backward direction and a second parameter indicative of the change of the position of the substrate holding member with respect to the direction transverse to the forward-and-backward direction, whether or not deformation occurs in the substrate holding member is judged.

Abstract: Optical scanning with an optical probe composed of an elongated cylinder of transparent material mounted upon an optical scanner body; one or more sources of scan illumination mounted in the probe distally or proximally with respect to the scanner body and projecting scan illumination longitudinally through the probe; a radially-reflecting optical element mounted in the probe having a conical mirror on a surface of the radially-reflecting optical element, the mirror oriented so as to project scan illumination radially away from a longitudinal axis of the probe with at least some of the scan illumination projected onto a scanned object; a lens mounted in the probe between the radially-reflecting optical element and the scanner body and disposed so as to conduct to an optical sensor scan illumination reflected from the scanned object.

Abstract: Apparatus for inspecting a semiconductor wafer (8) has a plurality of light sensors (2) arranged relative to a light source (1) and wafer inspection platform (4), so that images of different angle views of a surface of the wafer can be received and compared with corresponding images taken of a reference wafer to automatically detect defects based on image comparison. The light sensors (2) may receive superposed images of light (7) reflected directly from the light source (1) off the wafer surface and light (6) indirectly reflected off the wafer surface after first reflecting off a dome (3) with a diffusely reflecting inner surface (5) positioned over the platform (4).

Abstract: An apparatus for removing reflected light is provided, which is used for a measuring device that emits a sheet-like beam of light onto suspended particles and measures light scattered from the suspended particles. The apparatus includes a light introduction unit, a light reflective unit, a light sealing unit and a light absorption member. The light introduction unit has a first aperture, a second aperture, and a passage through which the light travels from the first aperture to the second aperture. The light reflective unit disposed opposite to the second aperture allows the light having traveled through the second aperture to reflect toward a predetermined direction so as to prevent the light from returning into the second aperture. The light sealing unit in which the light reflective unit is disposed has an inner wall to confine the light reflected from the light reflective unit.

Abstract: A method and apparatus that linearly scans at least one plane of radiation having a width wider than the diameter of the part onto an exterior side surface of the supported part so that the part occludes the at least one plane of radiation at a plurality of spaced apart locations. The invention includes forming a virtual representation of an outer profile of the part in a reference frame based on the input data and providing a virtual representation of an inner bore of a physical gauge in the reference frame. Then determining an interference position between the part and the gauge using the virtual representations wherein the interference position is a position along the axis where the bore diameter is substantially equal to the part diameter. Finally calculating a distance along the axis based on the interference position and storing the distance.

Abstract: A box inspector for detecting at an inspection station an unacceptable skew in, an item missing from, and/or an unacceptable gap in a box. The box inspector has pairs of aligned emitters and receivers generating a signal when an unacceptable skew is detected, at least two item present sensors corresponding to the number of items adapted to be located in a single row within the box and generating an item absent signal when an item is missing from the box, a gap detect sensor generating an unacceptable gap signal when the gap is larger than a predetermined gap size, and a box present sensor generating a box present signal when a box arrives at the inspection station. A controller receives signals from these components and generates indications when the box is unacceptably skewed, an item is missing from the box, and/or an unacceptable gap exists in the box.

Abstract: A method of sight distance analysis comprising: acquiring a scene-graph representation comprising three dimensional entities; acquiring at least one three dimensional object representation within the scene graph environment; acquiring a target object representation; selecting at least one camera position; positioning the acquired target object representation in the scene graph representation at a distance from the selected at least one camera position; and determining a visibility factor for the positioned target object representation.

Abstract: An optical measuring apparatus includes a light transmission unit, a light reception unit, a measurement value calculation unit, and a correction unit. The light transmission unit forms a beam of light that focuses in a measurement area where a measurement target object is placed and scans the measurement area with the beam of light. The light reception unit receives the beam of light that has passed through the measurement area and outputs a received-light signal on the basis of the received beam of light. The measurement value calculation unit calculates a measurement value that represents the dimension of the measurement target object on the basis of the received-light signal. The correction unit corrects the measurement value on the basis of the amount of change in the strength of the received-light signal per unit of time of scanning the beam of light.

Abstract: A position detecting device, including: a movable section which has an axial section and moves in a direction of an axial line of the axial section; and a supporting section which supports the movable section and allows the movable section to move through the axial section; wherein the movable section includes a basic position section which is arranged on a virtual surface which includes the axial line of the axial section, and the virtual surface is vertically positioned on the supporting section toward the axial section, wherein the supporting section includes a position detecting section to detect a positional change of the basic position section; and wherein the position detecting device detects the position of the movable section relative to the supporting section, based on the change of position of the basic position section, detected by the position detecting section.

Abstract: The invention relates to a test method for the testing of the functional capability of a monitoring sensor which scans a protective field to be monitored using a scanner. In accordance with the invention, at least one contour test object and one field test object are provided outside the protective field to be monitored. A field set is defined having at least two scan fields, with the first scan field of the first field set comprising the protective field to be monitored and at least one contour test object and the second scan field of the first field set comprising at least the region of the field test object. In a first test sequence, the protective field to be monitored is scanned with the first field set, with a positive first output signal only being generated when the contour test object is detected in the expected position in the first scan field and with a negative second output signal being generated when the field test object is detected in the second scan field of the first field set.

Abstract: A method and system for optically inspecting parts are provided. The method includes the step of supporting a part along a measurement axis. The method includes scanning the part with an array of spaced planes of radiation so that the part occludes each of the planes of radiation at spaced locations along the axis to create a corresponding array of unobstructed planar portions of the planes of radiation. Each of the unobstructed planar portions contains an amount of radiation which is representative of a respective geometric dimension of the part. The method still further includes measuring the amount of radiation present in each of the unobstructed planar portions to obtain measurement signals. The method includes processing the measurement signals to obtain raw data. The method further includes providing calibration data and processing the calibration data and the raw data to obtain measurements of the part.

Abstract: Apparatus is provided for slitting composite material into tape and for measuring the width of the slit tape as the tape is being reeled onto take up rolls. The tape width is measured by an optical micrometer. The optical micrometer includes a transmitter for directing radiant energy over the tape and, a receiver for receiving radiant energy from the transmitter that passes across an edge of the tape and for producing a signal related to the width of the tape.

Abstract: A method and apparatus for efficiently executing two types of measurements with an optical measuring device and a scanning electron microscope are provided. For example, the method and apparatus may execute the following steps: calculating an average of the dimensional values of a plurality of scanned feature objects; and calculating an offset of a dimensional value on the basis of a difference between the calculated average value and the dimensional value of the feature object obtained when the light is irradiated. The offset between measurement values between the optical measuring device and the scanning electron microscope can be determined precisely.

Abstract: One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.

Abstract: Method for measuring the cross-sectional dimension of an elongated profile having rounded or sharp edges, in particular of a flat or sector cable by illuminating the article with light sources and determination of a plurality of shadow borders and calculating the parameter of the circle from the coordinates of the light sources and the shadow borders. The dimensions are determined from the circular parameter.

Abstract: An optical measuring device capable of improving the precision of detection of contamination on a protective glass is disclosed. With threshold values as large as 90%, 50%, 10% of a peak value of a scan signal, measured values Q90, Q50, Q10 of a dimension of a work to be measured are derived, respectively. It is determined whether a difference between the measured value Q90 and the measured value Q50 (or a variation of the measured value) is equal to or larger than a predetermined reference value. (B)-(D) show the presence of contamination on the protective glass, equal to or larger than the reference value. (A) shows the absence of contamination, lower than the reference value. It is then determined whether a difference between the measured value Q50 and the measured value Q10 is equal to or larger than a predetermined reference value. (D) shows the presence of thick contamination on the protective glass, equal to or larger than this reference value.

Abstract: Device measures external and internal dimensions of measurement objects using a light source for illuminating a slit diaphragm, in front of or behind which a spirally slotted disc is arranged, slit diaphragm and disc being rotatable in relation to each other and the disc having a spiral slot intersecting the slit of the slit diaphragm, the interaction of which with the slit creates a hole aperture. Evaluation device measures the time in which the light beams scan the measurement object and determines dimensions from the measured times. To scan the measurement object simultaneously in different spacial planes or in one plane in different axes, several slits are provided in the slit diaphragm. Slits may be disposed radially around axis of rotation. Light source(s) may emit light of one or more wavelengths or different frequency modulated light amplitudes.

Abstract: An apparatus for measuring distortion of a cylindrical body includes: a stationary straight rail provided on a flat surface; a cylindrical-body transfer mechanism for rolling the cylindrical body such that a peripheral surface of one end of the cylindrical body remains in contact with the stationary straight rail; a reference pole disposed at a position separated a predetermined distance from the cylindrical body in a direction perpendicular to the rolling direction of the cylindrical body; a laser scan micrometer capable of simultaneously scanning the top end of the cylindrical body and the reference pole by means of laser beam projected toward the rolling direction to thereby measure a distance between the cylindrical body and the reference pole; and a control section for processing measurement data so as to obtain radial distortion of the cylindrical body.

Abstract: A self-contained smoke detector system has internal self-diagnostic capabilities and accepts a replacement smoke intake canopy (14) without a need for recalibration. The system includes a microprocessor-based self-diagnostic circuit (200) that periodically checks sensitivity of the optical sensor electronics (24, 28) to smoke obscuration level. By setting tolerance limits on the amount of change in voltage measured in clean air, the system can provide an indication of when it has become either under-sensitive or over-sensitive to the ambient smoke obscuration level. An algorithm implemented in software stored in system memory (204) determines whether and provides an indication that for a time (such as 27 hours) the clean air voltage has strayed outside established sensitivity tolerance limits. The replaceable canopy is specially designed with multiple pegs (80) having multi-faceted surfaces (110, 112, 114).

Abstract: A frequency splitting laser micrometer for measuring a displacement of an object is disclosed.

Abstract: A method and device for fluorimetric determination of a biological, chemical or physical parameter of a sample utilize at least two different luminescent materials, the first of which is sensitive to the parameter, at least with respect to luminescence intensity, and the second of which is insensitive to the parameter, at least with respect to luminescence intensity and decay time. The luminescent materials have different decay times. The time- or phase behaviour of the resulting luminescence response is used to form a reference value for determination of a parameter.

Abstract: An automated cable and line inspection mechanism visually scans the entire surface of a cable as the mechanism travels along the cable=s length. The mechanism includes a drive system, a video camera, a mirror assembly for providing the camera with a 360 degree view of the cable, and a laser micrometer for measuring the cable=s diameter. The drive system includes an electric motor and a plurality of drive wheels and tension wheels for engaging the cable or line to be inspected, and driving the mechanism along the cable. The mirror assembly includes mirrors that are positioned to project multiple images of the cable on the camera lens, each of which is of a different portion of the cable. A data transceiver and a video transmitter are preferably employed for transmission of video images, data and commands between the mechanism and a remote control station.

Abstract: Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit (10) and a light detecting unit (14). A light source (30) causes a light beam (12) to propagate from the emitting unit (10) to the detecting unit (14). A light detector (40) detects the presence or absence of the beam. A trigger signal is produced when occlusion occurs and so the position of an object can be determined by reference to the machine's coordinate readings. The beam (12) may be uncollimated and thus provide a device with an easier set-up and a greater resistance to vibration in use. The light detector (40) and/or light source may be protected from contamination by windows (34,44) or a protector having an aperture therein. The light emitting and detecting units each have an aperture for the light beam.

Abstract: An apparatus for measuring distortion of a cylindrical body includes: a stationary straight rail provided on a flat surface; a cylindrical-body transfer mechanism for rolling the cylindrical body such that a peripheral surface of one end of the cylindrical body remains in contact with the stationary straight rail; a reference pole disposed at a position separated a predetermined distance from the cylindrical body in a direction perpendicular to the rolling direction of the cylindrical body; a laser scan micrometer capable of simultaneously scanning the top end of the cylindrical body and the reference pole by means of laser beam projected toward the rolling direction to thereby measure a distance between the cylindrical body and the reference pole; and a control section for processing measurement data so as to obtain radial distortion of the cylindrical body.