Abstract: A light deflector 130 includes: a control unit 106 configured to generate a resonant drive signal for resonantly driving an MEMS mirror 133, and a non-resonant drive signal for non-resonantly driving the MEMS mirror 133; a resonant sensor 144 configured to detect the resonant drive of the MEMS mirror 133 and generate a resonant sensor signal; and a sensor signal processing unit 103 configured to acquire a phase difference between the resonant drive signal generated by the control unit 106 and the resonant sensor signal, in a case where the MEMS mirror 133 is resonantly driven in a Y-axis direction, also the MEMS mirror 133 is non-resonantly driven in an X-axis direction, and scanning is performed. The control unit 106 calculates an amplitude of the non-resonant drive of the MEMS mirror 133 on the basis of a change in the above phase difference.

Abstract: An illumination apparatus configured to provide illumination while changing a spectrum of light from a light source includes a wavelength variable unit configured to change a spectrum of irradiating light, and an optical system configured to irradiate the wavelength variable unit with the light from the light source. The wavelength variable unit is disposed so that an incident surface of the wavelength variable unit on which the light emitted from the optical system is incident is tilted with respect to a plane perpendicular to an optical axis of the optical system.

Abstract: An optical scanning device includes light sources, a deflector, an optical element, and light blockers. The light blockers are spaced apart in a rotation direction of the deflector. An inequality ?1<?2 is satisfied, where when viewed from the rotation axis direction, ?1 is an angle formed by a line segment connecting the end portion of a light blocker disposed most downstream in the rotation direction to a rotation axis center of the deflector and a line segment connecting the end portion of a light blocker disposed most upstream in the rotation direction to the rotation axis center, and ?2 is an angle formed by a line segment connecting an upstream end portion of one mirror surface in the rotation direction to the rotation axis center and a line segment connecting a downstream end portion of the one mirror surface in the rotation direction to the rotation axis center.

Abstract: A head-mountable device can include a crown module that receives input from a user and provides localized haptic feedback to the user. A magnetic element coupled to a crown can be moved by inducing magnetic fields, and the position and/or movement of the magnetic element can be detected to provide closed-loop control of the induced magnetic fields. The haptic feedback can be effectively perceived by the user at the crown without causing the entire head-mountable device to vibrate against the head and/or face of the user.

Abstract: A hinge for a microelectromechanical system includes a fixed part and a part movable relative to the fixed part along at least an out-of-plane direction, the hinge being intended to suspend the moving part from the fixed part. The hinge includes a first rigid part, a second part fixed to the first part at one end and intended to be anchored to the fixed part or the moving part. The second part deforms in bending in a first direction, two third parts are fixed to the first part and are anchored to the moving part or the fixed part, and the third parts deform in bending along a second direction orthogonal to the first direction.

Abstract: A laser projection device that includes at least one laser diode for generating at least one laser beam, and at least one movable mirror element for deflecting the at least one laser beam. The laser projection device includes at least one control and/or regulation unit that is designed to control and/or regulate a brightness of the at least one laser beam as a function of a relative deflection speed of the at least one laser beam.

Abstract: A control system for a laser scanning projector includes a mirror controller generating horizontal and vertical mirror synchronization signals for an oscillating mirror apparatus based upon a mirror clock signal, and laser modulation circuitry. The laser modulation circuitry generates horizontal and vertical laser synchronization signals as a function of a received laser clock signal, and generates control signals for a laser that emits a laser beam that impinges on the oscillating mirror apparatus. Synchronization circuitry generates the laser clock signal and sends the laser clock signal to the laser modulation circuitry, receives the horizontal and vertical mirror synchronization signals from the mirror controller, receives the horizontal and vertical laser synchronization signals from the laser modulation circuitry, and modifies the laser clock signal so as to achieve alignment between the horizontal and vertical mirror synchronization signals and the horizontal and vertical laser synchronization signals.

Abstract: Systems and methods for implementing a continuously monitoring safety system that tracks emission of light energy from the light source by measuring energy at various sampling points within image frames projected by a projector and estimating a highest energy for a pupil area of each of the image frames based on a subset of sampling points encompassed by the pupil area. The highest energy for each of the image frames is summed to generate a cumulative highest energy, which is compared to a predetermined threshold, and in response to the cumulative highest energy exceeding the threshold, adjusting an power output of the projector.

Abstract: A system, apparatus and method and method for controlling interoperation between a resonant scanner and a movable stage. The movable stage being employed to position a specimen for optical scanning by the resonant scanner. The invention providing high resolution scanning of specimen tissue at a rate of ten times or more faster than other known methods of optically scanning a specimen.

Abstract: A wearable vibration presentation apparatus includes a weight saving and simplified electric-mechanical vibration converter that has a mechanism that is quite different. The vibration presentation apparatus includes a transmitting member and a control unit, wherein a side portion of the transmitting member abuts a portion of a vibration presentation object or is wound to the vibration presentation object. Vibration is transmitted to the vibration presentation object via the transmitting member by applying predetermined tension to the transmitting member and varying the predetermined tension based on a driving signal on a basis of a vibration presentation signal.

Abstract: Laser sensor lenses and methods for maintaining clean laser sensors lenses are disclosed. One method may include applying a coating having first and second components to an exterior surface of a lens of a laser sensor, the first component including a thermogenic light-absorbing (TLA) material; and irradiating the TLA material from a light source within the laser sensor to generate heat from the TLA material to cause the second component to form an active coating. The light source may be a laser of a LiDAR sensor. The heat from the TLA material may cause the second component to cure, solidify, or undergo a phase change. The active coating may be at least one of hydrophobic, oleophobic, and hydrophilic. In another embodiment, a removable cover having a TLA material may be positioned proximate the lens window and irradiated to heat the lens window (e.g., to melt ice thereon).

Abstract: A system, apparatus and method and method for controlling interoperation between a resonant scanner and a movable stage. The movable stage being employed to position a specimen for optical scanning by the resonant scanner. The invention providing high resolution scanning of specimen tissue at a rate of ten times or more faster than other known methods of optically scanning a specimen.

Abstract: Embodiments of the present invention provide an apparatus including a micromirror, an excitation structure containing or supporting the micromirror, and at least one piezoelectric sensor. The excitation structure includes at least one piezoelectric actuator, the excitation structure being configured to resonantly excite the micromirror so as to cause a deflection of the micromirror. The at least one piezoelectric sensor is configured to provide a sensor signal dependent on the deflection of the micromirror, the piezoelectric sensor being connected to the excitation structure so that during the resonant excitation of the micromirror, the sensor signal and the deflection of the micromirror exhibit a fixed mutual phase relationship.

Abstract: A micromechanical structure is described, including: at least one elastically deformable first area, which includes a defined piezoelectrically doped second area, at least in sections; at least one fourth area, into which the electrical charges generated in the second area may be conducted; and at least one third area connected electrically to the second and fourth area, in which an electrical current flowing through is convertible into thermal energy.

Abstract: An endoscope system has observation modes making observations with lights having optical characteristics different from each other. The system includes an endoscope including an insertion section provided with an illumination window, a light guide arranged in the insertion section, and including an entrance end on which the lights enter and a plurality of light guide areas that guide the lights entered on the entrance end, and an entrance area switching unit that switches between the light guide areas through which the entered lights are guided by switching between areas on which the lights enter at the entrance end in accordance with an observation mode.

Abstract: A digital color clock employs six Color Outputs to represent the time of day. A first Color Output represents a tens digit of hours, a second Color Output represents a ones digit of hours, a third Color Output represents a tens digit in minutes, a fourth Color Output represents a ones digit in minutes, a fifth Color Output represents a tens digit in seconds, and a sixth Color Output represents a ones digit in seconds. The digital color clock can optionally display the date, temperature, humidity, and/or barometric pressure using Color Outputs. Front and back light sensors can be included for measuring brightness of ambient light to enable adjustment of Color Outputs in response to changes in brightness of ambient light. In one embodiment, the Color Outputs are interspersed among other unchangeable Color Outputs of a display. The display can be a component of a stationary or hand-held computing device.

Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts are disposed in each of the pair of vibration parts, and rotate the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.

Abstract: Provided is a surface-emitting semiconductor laser including a substrate; a first semiconductor multilayer reflector of a first conductivity type formed on the substrate, the first semiconductor multilayer reflector including plural pairs of a low-refractive-index layer and a high-refractive-index layer; a cavity region formed on the first semiconductor multilayer reflector; a second semiconductor multilayer reflector of a second conductivity type formed on the cavity region, the second semiconductor multilayer reflector including plural pairs of a low-refractive-index layer and a high-refractive-index layer; a columnar structure extending from the second semiconductor multilayer reflector to the cavity region; and a current confinement layer formed inside the columnar structure by selective oxidation of a semiconductor layer containing Al. The cavity region includes an active region; and a cavity extension region interposed between the active region and the first semiconductor multilayer reflector.

Abstract: In a light scanning method of scanning a light beam emitted from a light source on a plane to be scanned, a focal distance of an optical element that converges light emitted from the light source onto the plane to be scanned is sequentially varied to uniform a beam spot diameter at each position on the plane to be scanned where a distance from the light source varies.

Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

Abstract: A laser scanning module employs a scan mirror and magnet rotor subassembly supported by a stator structure using a pair of elastomeric wheel hinges. The scan mirror and magnet rotor subassembly includes: a scan mirror and magnet rotor subassembly having a rotor frame having a pair of rotor support posts aligned along a scan axis passing through the rotor frame; a scan mirror mounted on the rotor frame; and a permanent magnet mounted on the rotor frame. The elastomeric wheel hinge includes a central portion having an aperture for passage and fixed attachment of one rotor support post, a plurality of elastomeric spoke portions extending from the central portion and radially extending from the central aperture to a circumferential rim portion connected to the outer end portion of each spoke portion so as to form the elastomeric wheel hinge.

Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.

Abstract: The present invention relates to a reactionless, constant scanning velocity laser scanner having a scanning mirror and a counter-rotating mass trading kinetic energy as the mirror collides with the counter rotating mass rotating in opposite direction to reverse the direction of rotation of the mirror. The scanning mirror is rotatably mounted in a frame and spaced from a rotatably mounted counterweight such that in each direction of rotation the mirror will collide with the counterweight moving in the opposite direction of rotation. The counterweight has spring means thereon positioned to bump against the mirror in one direction and then the other direction of rotation to repel the mirror to cause a back and forth scanning motion in the mirror. The counterweight is moved by an actuator which replaces energy lost during scanning.

Abstract: A scanning microscope is described, having an illumination unit for emitting an illumination light beam, an objective for generating an elongated illumination focus in a specimen to be imaged, and a scanning apparatus for moving the illumination focus over a target region of the specimen to be illuminated by modifying the direction of incidence in which the illumination light beam is incident into an entrance pupil of the objective. The scanning apparatus directs the illumination light beam onto a sub-region of the entrance pupil offset from the pupil center in order to incline the illumination focus relative to the optical axis of the objective, and modifies the direction of incidence of the illumination light beam within that sub-region in order to move the illumination focus over the target region to be illuminated.

Abstract: An optical reflecting device includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The first oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, —a transparent window (202) substantially covering the reflection side of the micro-mirror; —wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); —the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); —said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: A laser scanning device and a calibration method thereof are provided. The laser scanning device includes a light-emitting element, an oscillating reflective element, a light receiving element and a micro processing unit. The oscillating reflective element is configured to swing back and forth in an adjustable oscillation frequency, such that laser beams emitted from the light-emitting element are reflected to a predetermined scan region. When a swing angle of the oscillating reflective element is affected by a change of the environment temperature, an oscillation frequency of the laser scanning device is directly changed corresponding to the current environment temperature by the micro processing unit such that the oscillating reflective element correctly swings in a predetermined angle range.

Abstract: A scanning system includes a scanning member having at least one reflective surface and at least one light source for emitting at least one light beam to be incident on the at least one reflective surface of the scanning member during a scanning operation. At least one curved synchronization mirror deflects and focuses at least a portion of the at least one light beam that is deflected by the scanning member to indicate at least one of a start and an end of a scan line operation of the scanning operation. A sensor receives the at least one light beam deflected and focused by the at least one curved synchronization mirror.

Abstract: An optical scanning device includes a mirror that oscillates to scan incident visible light. The mirror includes a substrate, a metal film formed on the substrate, and an reflection enhancing film stacked on the metal film.

Abstract: An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.

Abstract: Provided is an optical scanning device that can be downsized and improve the reading rate of a laser-type image reading system. This is an optical scanning device that includes a torsion beam, and a variable focus mirror that is supported by the torsion beam. Furthermore, the variable focus mirror is supported at two symmetrical positions with respect to the axis of rotation of the torsion beam.

Abstract: An optical device includes a base made of silicon and including a movable portion provided with a light reflecting portion having light reflectivity and capable of oscillating around a oscillation axis, at least one connection portion that extends from the movable portion, and a support portion that supports the connection portion, and a stray light suppression layer provided on a surface of the base and having a function of suppressing light reflection. In a plan view in which the base is viewed in a thickness direction thereof, the stray light suppression layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.

Abstract: A scanning mirror includes a mirror unit configured to reflect a laser beam, a supporter configured to cause the mirror unit to rotate and oscillate, and an oscillation sensor configured to output a monitor signal indicating oscillation of the mirror unit. A photodetector detects an intensity of the laser beam. When a value of the monitor signal falls out of a predetermined range of a normal operation and a value of the intensity detected by the photodetector fails to decrease, a breaking signal for causing the supporter to oscillate more than a breaking limit angle of the supporter is input. This scanning mirror and an image projection device using this scanning mirror can display an image at sufficient brightness safely.

Abstract: A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.

Abstract: A laser scanning device and a control method thereof are provided. The method includes: providing a control signal to an oscillating reflective mirror of the device; setting a frequency of the control signal gradually decreased from a maximal-setting-value of a resonant frequency of the mirror; judging whether a light detector receives a laser light reflected by the mirror according to an edge signal of the detector; judging whether a pulse width of the edge signal is equal to a predetermined pulse width when the detector receives the laser light: (1) increasing the frequency of the control signal when the pulse width of the edge signal is greater than the predetermined pulse width, (2) decreasing the frequency of the control signal when the pulse width of the edge signal is less than the predetermined pulse width. The time and labor for measuring the scanning frequency of the mirror may be saved.

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror; —an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror; —wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: A piezoelectric actuator according to an aspect of the invention can include: a first actuator including a first piezoelectric driving part; and a second actuator including a second piezoelectric driving part. A central portion of the first actuator can be supported. The first actuator can be bent and deformed by applying a first driving voltage to the first piezoelectric driving part, so that both end portions of the first actuator can be displaced in a thickness direction of the first actuator. Both end portions of the second actuator can be coupled to the both end portions of the first actuator. The second actuator can be bent and deformed in the opposite direction to the first actuator by applying a second driving voltage to the second piezoelectric driving part, so that a central portion of the second actuator can be displaced in a thickness direction of the second actuator.

Abstract: A method for improving the alignment of the bi-directional scan lines of a resonant mirror imaging system is disclosed. The method includes sensing the position of the mirror and selecting a portion of each scan line, such as the exact middle 50% and the start points of the scan lines in both directions for displaying the image. Determine the specific number of pixels used to modulate the scan lines and the clocking rate at which the pixels are inserted on the light beam so that the pixels completely fill the selected portion of the scan lines. The clock rate is then adjusted to the determined rate.

Abstract: A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.

Abstract: A mirror apparatus includes beams that support a mirror portion therebetween, the mirror portion having a mirror on a surface thereof, and drives the beams in a torsional direction to cause the mirror portion to oscillate at a predetermined resonance frequency, wherein thermally deformable materials that deform due to heating are provided on surfaces of the beams, and a spring constant of the beams is adjusted such that thermal deformations of the thermally deformable materials cause the mirror portion to oscillate at the predetermined resonance frequency.

Abstract: A disclosed optical scanning device includes a light source unit configured to emit a laser beam; an oscillating mirror configured to deflect the laser beam from the light source unit; a scanning/imaging optical system configured to focus the deflected laser beam on a target surface; and plural light-receiving elements configured to receive the laser beam in a scanning area of the laser beam, the position of the oscillating mirror being adjusted such that time intervals between output pulses in output signals of the respective light-receiving elements become substantially the same between the light-receiving elements and/or widths of the output pulses become substantially the same between the light-receiving elements.

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, —a transparent window (202) substantially covering the reflection side of the micro-mirror; —wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); —the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); —said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: A light scanning apparatus includes: a light source configured to emit a light beam; a deflector configured to deflect and scan the light beam from the light source in a main scanning direction; a control substrate that is configured to control driving of the light source and includes a first connection part to which the light source is connected and a second connection part for connecting an external terminal; and a housing that supports the control substrate. The first connection part is arranged within the housing and the second connection part is exposed and arranged at the outside of the housing.

Abstract: The invention relates to an optical resonator made of low-outgassing materials, comprised of at least one chamber, a non-linear crystal arranged in the chamber, and an array of mirrors arranged in the chamber and comprised of a plurality of mirrors for deflecting a light beam. To specify such a resonator which is low-outgassing and which ensures fine adjustment of the optical elements at the same time, the present invention proposes that the non-linear crystal and at least one mirror of the array of mirrors is arranged on one movable carrier each, wherein the said carrier is fabricated from a low-outgassing material and seals the chamber.

Abstract: Briefly, in accordance with one or more embodiments, a beam scanner may comprise a nanophotonics chip to provide a scanned output beam. The nanophotonics chip comprises a substrate, a grating in-coupler formed in the substrate to couple a beam from a light source into the substrate, a modulator to modulate the beam, and a photonic crystal (PC) superprism to provide a scanned output beam that is scanned in response to the modulated beam.

Abstract: During one cycle of reciprocating operation of a MEMS mirror, a light receiving sensor detects a falling time at which a laser beam reflected by an upstream-of-sensor mirror and scanned in one direction passes an edge of a regulation portion, and a rising time at which the laser beam scanned in the other opposed direction passes the edge of the regulation portion. A controller executes an arithmetic operation on the basis of the two times detected by the light receiving sensor and controls the operation of the MEMS mirror, which is performed by the driver, such that the detected two times are held at respective setting times.

Abstract: A module configured to deflect light in an image forming apparatus. A torsion bar supports a mirror and defines a rotational axis of the mirror. A controller is configured to apply electronic pulses to at least one driving device to oscillate the mirror in the module around the rotational axis at a scanning frequency different than a resonance frequency of the mirror.

Abstract: An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: An optical scanning device includes an optical scanning element which has a reflection mirror and is configured to perform reciprocating scanning of an optical flux radiated from a light source by resonance oscillations of the reflection mirror; a photo detector which is arranged at a position which a portion of the optical flux scanned by the optical scanning element in a reciprocating manner passes in both outgoing-path scanning and incoming-path scanning, and is configured to output a pulse signal having a predetermined width at a point of time that the scanned optical flux is detected; and the reference signal generator which is configured to detect timing between rising edge timing of one pulse signal and falling edge timing of the other pulse signal out of two pulse signals continuously outputted from the photo detector, and to generate the reference signal based on intermediate timing between the edge timings.