Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.

Abstract: An image generating device for obtaining an image of an object, comprising: a control module configured to generate a first signal having a first frequency component and a first phase component for a first axis direction, and a second signal having a second frequency component and a second phase component for a second axis direction, an emitting unit configured to emit light to the object using the first signal and the second signal; and a light receiving unit configured to obtain light receiving signal based on returned light from the object.

Abstract: Implementations described and claimed herein provide a mechanically-scanning 3-dimensional light detection and ranging (3D LiDAR) system including a galvo mirror assembly, wherein the galvo mirror assembly includes a mirror attached to an armature of a galvanometer to reflect a light signal generated by a light generator and received from a target, at least one permanent magnet, and at least one coil configured to carry a current to move the armature.

Abstract: The present application discloses improvements that can be implemented in a laser detection and ranging (LiDAR) device to achieve accurate obstacle detection and to reduce measurement errors. A LiDAR device uses laser beams to scan a surrounding region to detect and identify objects. In one embodiment, the LiDAR control system is configured to refine a scanning region based on scanning results. The LiDAR control system may divide a scanning region into multiple sub-areas for differentiated scanning efforts. For example, the LiDAR control system may select a sub-area for enhanced scanning, e.g., with increased resolution. Methods for achieving scanning accuracy, increasing signal robustness, and reducing reflective noises are also disclosed.

Abstract: A mirror device includes a frame, a mirror body arranged in the frame and rotatable around a rotation, support beams connected between the mirror body and the frame and a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis. The leaf spring has a maximum thickness that is smaller than a minimum width thereof, where the leaf spring has openings that reduce the thickness thereof or the penetrate the leaf spring in the thickness direction.

Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.

Abstract: This rotary drive apparatus is arranged to rotate a flywheel arranged to support an optical component arranged to reflect incoming light coming from a light source or allow the incoming light to pass therethrough, and includes a motor including a rotating portion; and the flywheel, the flywheel being supported by the motor and arranged to rotate about a central axis extending in a vertical direction. The flywheel includes a plate-shaped accommodating portion in which the optical component is arranged; a bottom surface arranged at a bottom portion of the accommodating portion, and arranged to slant with respect to at least one of two opposed side surfaces of the optical component; and a base surface arranged to be in contact with at least a portion of another one of the two opposed side surfaces of the optical component.

Abstract: A light-projecting device includes a light source that emits a light, and a scanner that performs a first scan of the light in a first direction and a second direction opposed to the first direction, and performs a second scan of the light in a direction orthogonal to the first direction. The scanner performs the second scan while the scanner is swinging in a first angle range when the scanner performs the first scan in the first direction. The scanner performs the second scan while the scanner is swinging in a second angle range that is greater than the first angle range when the scanner performs the first scan in the second direction.

Abstract: An electro-optical device includes a substrate, a mirror support pillar extending in a direction in which the pillar intersects with a surface of the substrate, and a mirror that is so disposed as to be distanced from the substrate and to be capable of being displaced with respect to the mirror support pillar. The mirror has a reflective metal film, and a reflection enhancing lamination film that covers a portion including a surface and a side surface of the reflective metal film.

Abstract: An optical scanner comprises a light source and an MEMS mirror. The light source emits a light beam. The MEMS mirror has a reflecting surface for reflecting the light beam coming from the light source. The light source is configured in such a manner that the optical axis of the light beam vertically irradiates the reflecting surface of the MEMS mirror at a specific position.

Abstract: An image display device includes a light source, a screen, an optical system and a driving unit. The screen is irradiated with light from the light source to form an image. The optical system generates a virtual image with the light from the screen. The driving unit moves the screen in an optical axis direction. The driving unit includes a holder, one or more elastic members and a driving source. The holder holds the screen. The one or more elastic members support the holder so as to enable the holder to reciprocally move in the optical axis direction. The driving source generates force for moving the holder in the optical axis direction.

Abstract: A substrate, a plurality of mirrors disposed on one surface of the substrate to be separated from the substrate, a mirror support post disposed between the substrate and the mirror and connected to a part of the mirror to support the mirror, a first electrode disposed between a first portion of the mirror and the substrate on the substrate, a second electrode disposed between the substrate and a second portion facing the first portion are included. The mirror includes a thin portion in which a thickness of at least a part of an end portion of a rear surface of the mirror is thinner than a thickness of a middle of the mirror.

Abstract: The invention relates to an image reading apparatus and includes: scanning unit including a light source; a focusing mirror which reflects light from the light source on a reflecting surface portion; and a mirror holder which fixes the focusing mirror on fixing portions formed at both ends of the mirror holder, wherein, when the scanning unit is moved to read image information, the focusing mirror is formed such that the fixing portion is smaller than the reflecting surface portion in at least one of strength and rigidity.

Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

Abstract: A system for enabling a driver of a vehicle to visibly observe objects located in a blind spot includes, but is not limited to, a rear view viewing device that is mounted to the vehicle and configured to be electronically adjustable. The system further includes a sensor that is associated with the vehicle and that is configured to detect a location of an object with respect to the vehicle and to generate a first signal indicative of the location of the object. The system further includes a processor that is communicatively coupled with the sensor and that is operatively coupled with the rear view viewing device. The processor is configured to obtain the first signal from the sensor and to command the rear view viewing device to adjust such that the object is visibly observable to the driver when the processor receives the first signal.

Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.

Abstract: An optical reflecting device includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The first oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: A scanning projection apparatus is provided with a first light source module which includes a laser light source to emit a laser beam and a mirror unit which can be oscillated. Further, a light deflection unit which performs a two-dimensional scanning with the laser beam emitted from the first light source module by the mirror unit, a light detection unit which detects a distance from the mirror unit to an image projection surface or a difference in distance in the image projection surface, and a control unit which controls an oscillation angle of the mirror unit based on distance information from the light detection unit are included.

Abstract: In a light scanning method of scanning a light beam emitted from a light source on a plane to be scanned, a focal distance of an optical element that converges light emitted from the light source onto the plane to be scanned is sequentially varied to uniform a beam spot diameter at each position on the plane to be scanned where a distance from the light source varies.

Abstract: An optical scanning device includes a mirror part including a mirror reflecting surface to reflect incident light, a pair of torsion bars configured to support the mirror part from both sides and configured to form a first axis around which to swing the mirror part by a torsional motion thereof so as to deflect the reflected light, and at least one stress alleviation area configured to alleviate a stress generated by the torsional motion of the torsion bars. The alleviation area is provided between an intersection of a second axis perpendicular to the first axis and passing through the center of the mirror reflecting surface and an edge of the mirror reflecting surface, and at least one of the torsion bars.

Abstract: A retinal display projection device comprising a micro-projection component (2) arranged for projecting an image directly onto the retina of a user wearing the device, characterized in that said micro-projection component is arranged for projecting an image outside of the normal field of view of said user.

Abstract: An optical scanning unit includes a light source, an optical deflector that includes a light transmission window disposed on a light path from the light source and a rotatable mirror that includes a reflecting surface to reflect light that goes through the light transmission window into the light transmission window and to deflect the light from the light source toward a surface, and a light shield disposed on a light path of reflected light of the light from the light source reflected by a surface of the light transmission window.

Abstract: An optical reflection element according to the present invention includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The second oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.

Abstract: An optical device includes a base made of silicon and including a movable portion provided with a light reflecting portion having light reflectivity and capable of oscillating around a oscillation axis, at least one connection portion that extends from the movable portion, and a support portion that supports the connection portion, and a stray light suppression layer provided on a surface of the base and having a function of suppressing light reflection. In a plan view in which the base is viewed in a thickness direction thereof, the stray light suppression layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.

Abstract: A device projecting images by micro electro-mechanical system (MEMS) technology mirrors includes a base, a rotating seat, a substrate, a reflective mirror, a driver, and a controller. The rotating seat is rotably positioned on the base. The substrate is positioned on the rotating seat. The at least one MEMS reflective mirror is formed on the substrate and configured for rotating in two directions under control of the attached driver and controller to form two-dimensional images in a range.

Abstract: A projector includes: a laser light generating unit that emits laser light including image information; a laser light scanning unit that scans the laser light emitted by the laser light generating unit at a predetermined scan angle to project an image on a transparent display plate; and a scan control unit that sets a scan driving voltage, which determines the scan angle, according to an atmospheric pressure of an area in which the laser light scanning unit is disposed and supplies the scan driving voltage to the laser light scanning unit to control fluctuations in the scan angle.

Abstract: Embodiments of the present disclosure provide techniques and configurations for an optoelectronic assembly including a MEMS scanning mirror. In one embodiment, the MEMS scanning mirror may include a micro-scale mirror configured to be rotatable about a chord axis of the mirror to deflect an incident light beam into an exit window of the optoelectronic assembly, and a support structure configured to host the mirror to provide a light delivery field between a mirror surface and the exit window such that a path of the deflected light beam via the provided light delivery field to the exit window is un-obstructed. Other embodiments may be described and/or claimed.

Abstract: A device includes an optical scanner that comprises a mirror, a first actuator that rotates the mirror around a first axis of rotation, a first angular position sensor that senses an angular position of the mirror around the first axis of rotation, a second actuator that rotates the mirror around a second axis of rotation, a second angular position sensor that senses an angular position of the mirror around the second axis of rotation, and a controller coupled to the first and second drivers to drive the respective first and second actuators to rotate the mirror into respective angles around the first and second axes of rotation.

Abstract: A projection controlling method for controlling a MEMS scanning mirror to repeatedly scan an image light on a surface and form a projection image is provided. A resonance frequency of the MEMS scanning minor which swings around a first swing axis is detected and provided to a filter unit as a parameter of a filtering process. A first periodic control signal with a first frequency and a plurality of harmonic components is generated. The harmonic component with the resonance frequency is filtered from the first periodic control signal by the filter unit. The filtered first periodic control signal is provided to the MEMS scanning mirror to control the MEMS scanning mirror to swing around the first swing axis according to the first frequency and to scan the image light on the surface back and forth along a first direction. A MEMS projection apparatus is also provided.

Abstract: An image projection method and a microelectromechanical system (MEMS) image projection apparatus are provided. The image projection method controls a MEMS scanning mirror swinging around a first swing axis to project an image light beam. The image projection method includes following steps. A resonance frequency and a damping coefficient of the MEMS scanning mirror at swinging are measured to calculate a first amplitude scale and a first maintaining period, and a periodic wave signal is generated accordingly. The periodic wave signal is output to the MEMS scanning mirror for controlling the MEMS scanning mirror to swing, and a swing speed error thereof is recorded. By adjusting the first amplitude scale and the first maintaining period, the periodic wave signal is also adjusted, and the corresponding swing speed error is recorded. According to the recorded swing speed errors, the corrected periodic wave signal is generated for controlling the MEMS scanning mirror.

Abstract: A mirror axis (MA) is displaced by deformation of a holder (HD) and with resonance of an optical scanner (LS) itself according to the frequency of a voltage applied to a piezoelectric element (PE). The frequency of the applied voltage for causing a resonance deforms the holder (HD) so as to generate at least one node intersecting with respect to the length of the holder (HD) itself.

Abstract: A mobile computing device and an accessory device are individually equipped with features and components that enable magnetic coupling of the two devices. Specific embodiments provide for the use of one or more horseshoe magnets for use in the magnetic coupling mechanisms. As an addition or alternative, electromagnetic coupling may be used to selectively maintain and/or orient the two devices in a mated position.

Abstract: A disclosed optical scanning device includes a light source unit configured to emit a laser beam; an oscillating mirror configured to deflect the laser beam from the light source unit; a scanning/imaging optical system configured to focus the deflected laser beam on a target surface; and plural light-receiving elements configured to receive the laser beam in a scanning area of the laser beam, the position of the oscillating mirror being adjusted such that time intervals between output pulses in output signals of the respective light-receiving elements become substantially the same between the light-receiving elements and/or widths of the output pulses become substantially the same between the light-receiving elements.

Abstract: An image display apparatus includes laser light sources, a light combining section that combines laser light from the laser light sources, and an optical scanner that deflects drawing laser light from the light combining section for two-dimensional scanning. The optical axes of the laser light outputted from the laser light sources and directed toward the optical scanner are present in the same plane. Further, the optical scanner has a light reflection surface configured to be perpendicular to the plane when the optical scanner is not driven. The optical scanner deflects the drawing laser light reflected off the light reflection surface for two-dimensional scanning by causing the light reflection surface to swing within the plane and in the direction perpendicular to the plane.

Abstract: An optical head includes: a point source producing an excitation beam, optical elements adapted to converge the optical beam into an excitation point located in a subsurface plane relative to the surface of a sample, the plane being perpendicular to the optical axis of the optical head; and elements for scanning the excitation point so as to define an observation field in the subsurface plane along two perpendicular scanning directions, a rapid online scanning and a slow columnar scanning. The invention includes micro-electrical mechanical systems designed to move in translation along a selected displacement at least one of the optical elements, which is mobile along a direction perpendicular to the optical axis so as to obtain at least one of the scanning directions. The invention provides the advantages of maintaining an axial illumination of the sample and of using a miniature head.

Abstract: A light deflecting element includes: a movable plate provided with a light reflecting section having light reflectivity; a support section; a coupling section adapted to couple the movable plate rotatably to the support section; and a magnet disposed on an opposite surface of the movable plate to the light reflecting section, wherein the coupling section has a shape having a width gradually increasing in a direction from a side of the light reflecting section toward a side of the magnet in a cross-sectional view perpendicular to a rotational axis of the movable plate.

Abstract: A scanning image projector includes a laser light source, an MEMS scanner having a reflecting mirror which vibrates around first and second axes that are orthogonal to each other, and an MEMS control unit having a high speed drive circuit which causes resonant vibration of the reflecting mirror at high speed around the first axis, a low speed drive circuit which causes non-resonant vibration of the reflecting mirror at low speed around the second axis, and an offset drive circuit which offsets a position on the second axis in a non-resonant vibration region where the low-speed vibration is caused by a predetermined amount, wherein the MEMS control unit displays an image in a predetermined display region by drive signals from the high and the low speed drive circuits, and moves a position of the display region in the non-resonant vibration region by an offset signal from the offset drive circuit.

Abstract: A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.

Abstract: An optical scanning apparatus includes a laser source configured to irradiate a laser beam, a prism configured to reflect the laser beam irradiated from the laser source, a mirror configured to move the laser beam reflected from the prism by oscillating with respect to a predetermined axis and reflecting the laser beam reflected from the prism, the laser beam reflected from the prism being substantially perpendicular to a plane of the mirror in a case where the mirror is in a non-oscillating state, a waveplate positioned between the prism and the mirror and configured to polarize the laser beam reflected from the prism and the laser beam reflected from the mirror. The waveplate includes an end plane inclined with respect to the laser beam reflected from the prism to the mirror.

Abstract: A near-to-eye optical system includes an optically transmissive substrate having a see-through display region and a repeating pattern of diffraction elements. The repeating pattern of diffraction elements is disposed across the see-through display region of the optically transmissive substrate and organized into a reflective diffraction grating that bends and focuses computer generated image (“CGI”) light impingent upon the reflective diffraction grating. The see-through display region is at least partially transmissive to external ambient light impingent upon an exterior side of the optically transmissive substrate and at least partially reflective to the CGI light impingent upon an interior side of the optically transmissive substrate opposite the exterior side.

Abstract: Operating methods of an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements. The invention simplifies the design of electromechanical light modulators and permits the construction of large size displays with greater mechanical tolerances on glass substrates.

Abstract: Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value.

Abstract: Disclosed are a light scanning unit and a method of synchronizing the scanning operation of such light scanning unit. The light scanning unit includes a deflection mirror that is driven to oscillate so as to deflect and scan a light beam in a bidirectional scanning path. The synchronization of a scanning operation may be made at least in part in consideration of the direction of flow of the current that is supplied to drive the deflection mirror to oscillate.

Abstract: A scanning image display apparatus includes a light source section that emits a laser beam, a scan mirror that scans the laser beam two-dimensionally in a first direction and a second direction which intersects the first direction, and a control section that drives the scan mirror. Herein, the control section drives the scan mirror such that a scan frequency in the first direction becomes higher than a scan frequency in the second direction, and changes the scan frequency in the first direction in synchronization with a period of the scan frequency in the second direction to change a scan amplitude in the first direction.

Abstract: A method of adjusting a resonance frequency in an optical scanning device containing: providing the optical scanning device having a substrate composed of a substrate main body and two cantilever beam portions, a drive source, a mirror portion, and a supporting component for fixing the substrate main body at a fixed end; and reducing an area of the substrate which protrudes from the fixed end to an outside of the supporting component, thereby to increase the resonance frequency; or alternatively, increasing the area of the substrate which protrudes from the fixed end to the outside of the supporting component, thereby to reduce the resonance frequency.

Abstract: An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: An actuator includes a movable portion which can twist around an axis, a connecting portion which extends from the movable portion and is torsionally deformed according to the twisting of the movable portion, and a support portion which supports the connecting portion, wherein the movable portion has a cross shape in a plan view, and a cross-sectional width of the connecting portion perpendicular to the axis gradually increases from a first surface of the movable portion toward a second surface of the movable portion opposite the first surface.

Abstract: An actuator includes: a movable portion that can oscillate around an oscillation axis; a connection portion that extends from the movable portion and is torsionally deformed in accordance with oscillation of the movable portion; and a support portion that supports the connection portion. The movable portion forms a cross shape in a plan view from a thickness direction of the movable portion.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.