Abstract: Operating methods of an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements. The invention simplifies the design of electromechanical light modulators and permits the construction of large size displays with greater mechanical tolerances on glass substrates.

Abstract: A laser projector is provided. A laser light source is configured to emit laser light. A scanning section is configured to scan a projection surface in a horizontal direction and a vertical direction with the laser light emitted from the laser light source, thereby forming an image on the projection surface. A generating section is configured to generate a pulse signal. A driving section is configured to reciprocate the scanning section in the horizontal direction in accordance with the pulse signal generated by the generating section. An adjusting section is configured to adjust a pulse pattern of the pulse signal generated by the generating section so as to change a scanning angle range of the scanning section in the horizontal direction.

Abstract: In one aspect, a system for facilitating short depth projection is shown and described. In brief overview, the system comprises a MEMS scanner that produces a ray of light in communication with an illumination source. An oscillating micromirror receives the ray of light from the illumination source and reflects the ray to one or more points on a curved reflective surface. The micromirror comprises a silicon mirror reinforced by a high-stiffness material. The system further comprises a screen on which the curved reflective surface projects the ray of light received from the micromirror.

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, a voltage applying unit applying a voltage to the coil, and the permanent magnet has a relief section to avoid making contact with the movable plate.

Abstract: A numerical aperture (NA) controlling unit and a variable optical probe including the same are provided. The NA controlling unit includes: an aperture adjustment unit which controls an aperture through which light is transmitted; and a focus control unit that is disposed in a predetermined position with respect to the aperture adjustment unit, that focuses light transmitted through the aperture, and that has an adjustable focal length. The variable optical probe includes: a light transmission unit; a collimator that collimates light transmitted through the light transmission unit into parallel light; an NA controlling unit that focuses light on a sample to be inspected; and a scanner that varies a path of light transmitted through the light transmission unit such that a predetermined region of the sample is scanned by light that passes through the NA controlling unit.

Abstract: Disclosed are a light scanning unit and a method of synchronizing the scanning operation of such light scanning unit. The light scanning unit includes a deflection mirror that is driven to oscillate so as to deflect and scan a light beam in a bidirectional scanning path. The synchronization of a scanning operation may be made at least in part in consideration of the direction of flow of the current that is supplied to drive the deflection mirror to oscillate.

Abstract: The invention relates to a deflection device for a projection apparatus for projecting Lissajous figures onto an observation field which is made to deflect a light beam about at least one first and one second deflection axis for generating Lissajous figures having a deflection unit for producing oscillations about the deflection axes and having a control apparatus for producing control signals for the deflection unit having a first and second control frequency which substantially corresponds to the resonant frequencies of the deflection unit, wherein the deflection unit has a quality factor of >3,000 and the control apparatus includes a feedback loop which is configured to regulate the first and/or second control frequencies in dependence on a measured phasing of the oscillations of the deflection unit so that the maximum amplitude of the oscillations remains in the resonant range of the deflection unit.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. Tangential distortion in a fast-scan dimension is compensated by incorporating a tangent function when determining the light beam location and interpolating pixel data. Tangential distortion in a slow-scan dimension is compensated by driving the scanning mirror nonlinearly in the slow scan dimension such that the light beam sweeps across the display surface at a constant rate.

Abstract: An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.

Abstract: A piezoelectric actuator of the presently disclosed subject matter can include: a first actuator including a first piezoelectric driving part; and a second actuator including a second piezoelectric driving part. A central portion of the first actuator can be supported. The first actuator can be bent and deformed by applying a first driving voltage to the first piezoelectric driving part, so that both end portions of the first actuator can be displaced in a thickness direction of the first actuator. Both end portions of the second actuator can be coupled to the both end portions of the first actuator. The second actuator can be bent and deformed in the opposite direction to the first actuator by applying a second driving voltage to the second piezoelectric driving part, so that a central portion of the second actuator can be displaced in a thickness direction of the second actuator.

Abstract: A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: A vibration unit including a frame, a vibration element including a substrate configured to vibrate, and a beam configured to connect the vibration element to the frame. The vibration unit is produced by applying an etching process to at least two surfaces of a substrate. A meeting position of the two surfaces of the substrate is located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and is located at a position other than a center position in a width direction of the beam.

Abstract: A disclosed optical scanning device includes a light beam generating unit configured to generate a light beam; a light beam deflecting unit configured to receive the light beam and deflect/emit the light beam with a deflecting mirror; a light beam ON/OFF control unit configured to control the light beam generating unit so that the light beam deflected by the light beam deflecting unit is turned ON/OFF in a particular light beam scanning region while the light beam is being reciprocally scanned; and a light beam scanning time measuring unit configured to obtain a measurement value by measuring a time at which the light beam passes a reference point provided on an edge part of the entire light beam scanning region that is away from a center part of the entire light beam scanning region. Timings at which the light beam is turned ON/OFF are controlled in accordance with the measurement value.

Abstract: The present invention relates to an optical scanning apparatus and an optical scanning system The optical system includes an optical engine connected to an optical scanning probe The optical scanning probe images a sample at different lateral positions of the sample The optical scanning probe includes a housing having a longitudinal axis extending in a direction towards a sample to be scanned, a first base having a first moveable mirror supported thereon by a first cantilever connecting the first moveable mirror to the first base, a second base having a second moveable mirror supported thereon by a second cantilever connecting the second moveable mirror to the second base, and a support attaching the first and second bases so that the first moveable mirror and the second moveable mirror are disposed along the longitudinal axis apart from each other

Abstract: An optical scanner is disclosed that has an optical source unit that emits a laser beam; a vibration mirror by which the laser beam from the optical source unit is deflected to scan; a driving circuit that vibrates the vibration mirror based on a driving signal generated from a reference clock; a light-receiving element that receives the laser beam within the scanning area of the laser beam; and a controlling unit that corrects the driving signal so as to make a phase deviation between the reference phase clock and the output signal of the light-receiving element constant.

Abstract: The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

Abstract: A scanning image display system which includes a plurality of scanning image displays each including a light source adapted to emit a laser beam, and a scan unit having a first scan section adapted to scan the laser beam emitted from the light source in a first direction on a projection surface, and a second scan section adapted to scan the laser beam in a second direction substantially perpendicular to the first direction. The first scan sections are resonant scan sections which are faster than the second scan sections in scan speed. The first scan sections are heated with light during the time that an image is formed and a reset period of the second scan sections in order to control resonant frequencies of the first scan sections.

Abstract: An optical scanning device, having: a substrate main body; two cantilever beams protruded from the respective side portion of one side of the main body; a mirror supported by torsion bars from the respective side, between the beams; a drive source to causes the main body to vibrate; and a light source to project light onto the mirror, wherein a fixed end of the main body is fixed to a supporting member, on the opposite side from the mirror side, wherein the drive source is provided on a part of the main body, and wherein the mirror resonantly vibrates according to vibration applied to the substrate by the drive source, thereby to change a direction of reflection light of the light projected onto the mirror according to the vibration of the mirror, characterized in that a plurality of holes are provided in the main body and the beams.

Abstract: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic.

Abstract: An oscillating element which can improve the adhesiveness thereof with an actuator is disclosed. In an oscillating element which includes a substrate which is configured to support an oscillation portion in an oscillating manner, and a driving layer which is configured to oscillate the oscillation portion, the driving layer including an adhesive layer formed on a substrate side thereof, an intermediate layer is positioned between the substrate and the driving layer. The intermediate layer is made of a material which allows surface activation bonding with the substrate, and the surface roughness of the intermediate layer on the adhesive layer side is set coarser than the surface roughness of the intermediate layer on the substrate side thus allowing the intermediate layer to easily acquire an anchoring effect with the adhesive layer.

Abstract: A scanner driver of a galvanometric scanner system includes an analog drive circuit; a control unit 31 for storing and holding optimized data formed from combinations of optimal values of circuit constants set in advance in accordance with a plurality of drive modes of a galvanometric scanner; and an electronic trimmer for changing the circuit constants of the analog drive circuit. The control unit selects one of the optimized data in accordance with an external input, and sets or updates parameters of the circuit constants via the electronic trimmer in accordance with the selected optimized data. When a drive mode of the galvanometric scanner system is changed, the scanner driver can accordingly be optimized readily and quickly.

Abstract: An image forming apparatus includes a light source to emit a laser beam; a resonant scanning mirror, including a reflection surface to reflect the laser beam emitted from the light source, to scan the reflected laser beam by oscillating the reflection surface; at least one detector to detect the reflected laser beam during the scanning of the reflected laser beam, and generate a synchronizing signal each time the reflected laser beam is detected; and at least one light selection unit to restrict a path over which the reflected laser beam is incident on the at least one detector to a predetermined path.

Abstract: An imaging lens good in mass-productivity, compact, low in manufacturing cost, good in aberration performance is provided by effectively correcting aberrations without greatly varying the variation of the thickness of a curing resin. An imaging device having such an imaging lens and a portable terminal are also provided. A third lens (L3) has a flat surface on the object side, a convex surface near the optical axis on the image side, and a concave aspheric surface around the peripheral portion within the region where a light beam passes. Therefore, it is possible to reduce the other optical aberrations such as distortion and simultaneously to design the imaging lens so that the astigmatism takes on a maximum value at the outermost portion. Hence, the resolutions at low to middle image heights are high. In addition, such a shape does not cause a large variation of the thickness of the third lens (L3) from the region along the axis to the periphery.

Abstract: Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.

Abstract: An optical scanning device includes, in an effective scanning area in the target surface, a mechanism that causes a scanning speed at each scanning position with respect to a scanning speed at an approximately center in the effective scanning area to be within a range under a predetermined condition.

Abstract: An oscillator device includes an oscillation system having an oscillator and an elastic supporting member, a detecting member for detecting oscillation amplitude of the oscillator, a driving member for driving the oscillator, and a control unit for generating a driving signal for driving the oscillator and for supplying the driving signal to the driving member, wherein the control unit reciprocally sweeps a driving frequency of the driving signal so that a resonance frequency of the oscillation system is included within a frequency range swept, wherein the control unit determines a resonance frequency based on at least two frequencies with which an oscillation amplitude value obtainable by the reciprocal sweeping reaches a maximum, and wherein the control unit generates the driving signal based on the determined resonance frequency.

Abstract: A light scanning device is provided. The light scanning device includes: an oscillating mirror which oscillates rotationally and reflects a light beam to be scanned over a scanning range, the scanning range including a first scanning range and a second scanning range set across a center of the scanning range; a detection unit including a light receiving face, on which the light beam is incident, to detect the light beam; and first and second stationary mirrors which reflect the light beam reflected by the oscillating mirror to the first scanning range and the second scanning range, respectively, to be incident on the light receiving face, wherein an incident pattern of the light beam reflected by the first stationary mirror incident on the light receiving face is different from an incident pattern of the light beam reflected by the second stationary mirror incident on the light receiving face.

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, a voltage applying unit applying a voltage to the coil, and the permanent magnet has a relief section to avoid making contact with the movable plate.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; a control section adapted to perform control of a frequency of the drive signal so that the movable section is displaced in a predetermined range; and an abnormality detection section adapted to detect abnormal vibration of the movable section during the control by the control section, wherein the abnormality detection section detects, in response to change in frequency of the drive signal, a frequency of an envelope included in the abnormal vibration of the movable section as a beat frequency based on a detection signal of the detection section, and obtains a frequency of the drive signal for performing a restoration process o

Abstract: A MEMS apparatus is provided for scanning an optical beam which comprises: a. at least one mirror operative to perform am oscillation motion to a pre-defined rotation angle around a mirror rotation axis; b. a sound sensing means; and c. a conversion means operative to convert sound vibrations detected by the sound sensing means into one or more electrical signals, and wherein the sound sensing means is located at the vicinity of the at least one mirror whereby the movement of the at least one mirror sensed by the sound sensing means and converted by the conversion means into the one or more electrical signals characterizing the oscillating motion of the at least one mirror.

Abstract: An optical scanning device includes: a reflection part which is configured to scan a light beam by swinging; a drive part which is configured to generate a drive waveform for swinging the reflection part; a waveform information storage part which is configured to store a plurality of waveform informations used for the generation of the drive waveform; a drive waveform setting part which is configured to select one waveform information from the plurality of waveform informations, and is configured to set the drive waveform; and a detection part which detects an amount of ringing which is superimposed on swinging of the reflection part, wherein the drive waveform setting part sequentially supplies the plurality of waveform informations stored in the waveform information storage part to the drive part, and selects the waveform information with which the amount of ringing detected by the detector becomes smaller than a predetermined value.

Abstract: A laser projector including a laser light source, a scan unit to scan the laser beam, a scan signal generation unit to generate a pulse signal, a drive unit to drive the scan unit and a pulse pattern adjustment unit to adjust a pulse pattern, wherein the pulse pattern adjustment unit adjusts the pulse pattern to a first pulse pattern for adjusting the swing amount from a first swing amount to a second swing amount in a projection interval, adjusts the pulse pattern to a second pulse pattern for adjusting the swing amount from the second swing amount back to the first swing amount in a first-stage interval in a non-projection interval, and adjusts the pulse pattern to a third pulse pattern for keeping the swing amount at the first swing amount in a second-stage interval in the non-projection interval until a scan position returns to the projection interval.

Abstract: A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprising an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.

Abstract: A control method of stabilizing the oscillation amplitude of a torsion oscillator is described. The method includes the steps of: driving a torsion oscillator at a predetermined frequency with a drive energy level by a control module to generate a scanning angle of the incident light beam, wherein the drive energy level is associated with the predetermined frequency; comparing the scanning angle corresponding to the drive energy level with a designate scanning angle by the control module; and adjusting the drive energy level based on the comparison result until the scanning angle of the torsion oscillator is equal to the designate scanning angle.

Abstract: A method for monitoring movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based upon capacitance changes over time in the MEMS device. The method comprises the steps of: if the at least one moving mirror is an in-plain mirror, then: a. providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of that at least one moving mirror; b. measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and c. monitoring the movement of the at least one moving mirror based on the measured current. If the at least one moving mirror is a staggered mirror, then: d. measuring a current associated with the movement of the at least one moving mirror; e. identifying a plurality of ripples associated with capacitance changes in the MEMS device over time, in the measured current; and f.

Abstract: System and method for synchronizing the low speed mirror movement of a mirror display system with incoming frame or video signals, and synchronizing buffered lines of video data to the independently oscillating scanning mirror. According to one embodiment of the invention, the peak portions of the low speed cyclic drive signal are synchronized with the incoming frames of video by compressing or expanding the peak portion or turn around portion so that each video frame begins at the same location on the display screen. The actual position of the high frequency mirror is determined by sensors and a “trigger” signal is generated to distribute the signals for each scan line such that the scan lines are properly positioned on the display.

Abstract: A movable body apparatus includes a vibratory system, a vibration detecting portion, a driving portion, and a controlling portion. The vibratory system has a resonance frequency and a movable body capable of being reciprocally and rotatably vibrated. The vibration detecting portion detects a vibration condition of the movable body. The driving portion drives the vibratory system with a drive signal. The controlling portion regulates the drive signal supplied to the driving portion. The controlling portion regulates a driving frequency of the drive signal so that a delay phase difference between the drive phase of the drive signal and the vibration phase of the vibratory system obtained from detection result of the vibration detecting portion, both obtained when the vibratory system is vibrated at a predetermined frequency, is maintained.

Abstract: An optical scanning device includes a condensing optical system for collecting a light beam emitted from light source means, a deflecting system for scanningly deflecting the light beam collected by the condensing optical system, and an imaging optical system configured to image the light beam scanningly deflected by the deflecting means, on a surface to be scanned, the deflecting means having a deflecting surface reciprocally movable within a main-scan sectional plane to scanningly deflect the light beam from the condensing optical system, wherein, when the deflecting surface reciprocally moves within the main-scan sectional plane, the deflecting surface receives an angular acceleration which is able to cause deformation being asymmetric with respect to a sub-scan direction, and wherein the condensing optical system collects the light beam from the light source means to a region of the deflecting surface which is at a side of a central line of the deflecting surface with respect to the sub-scan direction whe

Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for causing selected pixels in a raster pattern of scan lines to be illuminated to produce an image of high resolution in color. The direction of scanning of the scan lines is switched between alternate frames, and the resulting image is the superposition of successive frames integrated for viewing by the human eye.

Abstract: At least one exemplary embodiment is directed to an image display apparatus which displays an image on a surface to be scanned and includes a light source configured to emit a light beam modulated on the basis of image information, a scanner configured to scan the surface to be scanned with the light beam emitted from the light source, a light receiver configured to receive the light beam that is incident upon a particular area of the surface to be scanned when the surface to be scanned is scanned with the light beam, a first determiner configured to determine whether or not an output signal from the light receiver are output at a predetermined time interval, and a controller configured to control driving of the light source on the basis of a determination signal from the determiner.

Abstract: Optical delay line system that includes a retro-reflection mirror which is displaced along a circular path while being maintained in angular alignment with launch and return sources of light subject the components of the system to minimum levels of unbalanced linear acceleration. A retroreflector is pivotally mounted on a rotating element such that the optical axis of the retroreflector's motion is mobile such that its angle or position changes relative to a fixed observer. There is no linear stopping and starting of the retroreflector and all acceleration of the retroreflector is rotational acceleration with small angles so the required forces in the optical delay line are greatly reduced. Both large displacement and high repetition rates are achieved. The system can be configured so that optical fibers serve as launch and return optics. Alternatively, free space beam paths deliver light to the optical delay and return the reflected light from the retroreflector.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the

Abstract: An actuator includes: a first vibration system including a driving member having a frame shape, and a pair of first axial members each one end of which supports the driving member so as to allow the driving member to rotate about an X-axis; a second vibration system including a movable plate provided inside the driving member, and a pair of second axial members each one end of which supports the movable plate so as to allow the movable plate to rotate about a Y-axis perpendicular to the X-axis; a driving unit including a ferromagnetic member, a coil generating a magnetic field on the ferromagnetic; and a positioning portion that places the ferromagnetic member or the coil symmetrical with respect to an intersection point of the X and Y-axes.

Abstract: In one aspect, a system for facilitating short depth projection is shown and described. In brief overview, the system comprises a MEMS scanner that produces a ray of light in communication with an illumination source. An oscillating micromirror receives the ray of light from the illumination source and reflects the ray to one or more points on a curved reflective surface. The micromirror comprises a silicon mirror reinforced by a high-stiffness material. The system further comprises a screen on which the curved reflective surface projects the ray of light received from the micromirror.

Abstract: A scanning projector includes a mirror that scans in two dimensions. The scanning mirror oscillates at a resonant frequency on a fast-scan axis, and is phase locked to an incoming frame rate on a slow-scan axis. An interpolation component interpolates pixel intensity data from adjacent pixels based on the position of the mirror when a pixel clock arrives. Incoming video data is stored in a buffer. Less than a complete frame of video data may be stored in the buffer.